阅读说明：本技术 传感器装置 (Sensor device ) 是由 帕先科·弗拉基米尔 缪拉尔特·保罗 齐恩·汉斯彼特 于 2020-03-19 设计创作，主要内容包括：本发明公开了一种传感器装置(1),其包括压电换能器(3)和基座构件(2)。压电换能器包括具有至少一个激励电极(37、38)的压电构件,激励电极连接到压电构件的第一面,并且压电构件具有在第一面和第二面之间的厚度(h)。压电换能器(3)附接到基座构件(2)的支撑面,其中压电换能器的第二面邻近基座构件的支撑面。基座构件包括至少一个远离压电构件的声波反射标签(21)。(A sensor device (1) comprises a piezoelectric transducer (3) and a base member (2). The piezoelectric transducer includes a piezoelectric member having at least one excitation electrode (37, 38) connected to a first face of the piezoelectric member, and the piezoelectric member has a thickness (h) between the first face and a second face. A piezoelectric transducer (3) is attached to the support face of the base member (2), with a second face of the piezoelectric transducer adjacent the support face of the base member. The base member includes at least one acoustic wave reflective label (21) remote from the piezoelectric member.)

1. A sensor device (1) comprising a piezoelectric transducer (3) and a base member (2),

wherein the piezoelectric transducer comprises a piezoelectric member having at least one excitation electrode (37, 38) connected to a first face thereof and having a thickness (h) between the first and second faces,

wherein a piezoelectric transducer (3) is attached to a support face of the base member (2), wherein the second face of the piezoelectric transducer is adjacent to the support face of the base member, characterized in that the base member comprises at least one acoustic wave reflective tag (21) remote from the piezoelectric member.

2. Sensor device according to the preceding claim, characterized in that said at least one acoustic wave reflective label (21) is provided on said supporting surface of said base member (2).

3. Sensor device according to any one of the preceding claims, characterized in that the at least one acoustic wave reflective label (21) is a groove in the supporting surface of the base member (2) and is arranged at a delay line width (s1, s3, s5) from the piezoelectric transducer (3).

4. Sensor device according to any one of the preceding claims, characterized in that the piezoelectric transducer (3) comprises at least one longitudinally extending beam (31, 33) and the at least one acoustic wave reflective label (21) extends parallel to the beam of the piezoelectric transducer.

5. The sensor device according to any of the preceding claims, wherein the base member (2) has an acoustic impedance and the piezoelectric member has an acoustic impedance, characterized in that the base member and the piezoelectric transducer are arranged such that the ratio between the acoustic impedance of the piezoelectric member divided by the acoustic impedance of the base member is at least approximately equal to 2^-1/2。

6. Sensor device according to any one of the preceding claims, characterized in that the at least one excitation electrode (37, 38) is connected to an antenna (51, 52) and that the antenna is arranged on the supporting surface of the base member.

7. A sensor arrangement according to any one of the preceding claims, characterized in that a ground electrode (36) is connected to the second face of the piezoelectric member.

8. A sensor device according to any one of the preceding claims, characterized in that the piezoelectric transducer comprises a one-piece monolithic piezoelectric member, wherein an array of parallel grooves (35) having a depth (t) is provided within the piezoelectric member and extends in the first face, whereby an array of parallel extending beams (31, 33) is defined in the piezoelectric member and separated from each other by the grooves, wherein on the first face of the piezoelectric member each beam is connected to an excitation electrode (37, 38).

9. Sensor device according to the preceding claim, characterized in that the array of beams is subdivided into two subsets, wherein the excitation electrodes (37) connected to a first subset of beams (31) are electrically connected to each other, the excitation electrodes (38) connected to a second subset of beams (33) are electrically connected to each other and electrically insulated from the excitation electrodes (37) connected to the first subset of beams (31), wherein the beams (31) of the first subset are arranged alternately with the beams (33) of the second subset such that the two subsets of beams are interleaved with each other.

10. Sensor device according to the preceding claim, characterized in that said first subset of beams (31) extends from a first transverse beam (32) to a second transverse beam (34) and said second subset of beams (33) extends from said second transverse beam (34) to said first transverse beam (32), wherein said first subset of beams (31) is separated from said second transverse beam (34) and said second subset of beams (33) is separated from said first transverse beam (32) by a respective transverse groove.

Technical Field

The present disclosure relates to a sensor device as claimed in the claims. Further relates to a measurement system comprising the sensor device.

Background

The use of piezoelectric transducers to sense various physical parameters is known in the art. For example, the propagation velocity of surface acoustic waves (also known as SAW) utilized by these applications can vary depending on the mechanical stress, deformation, strain, temperature, or molecular deposition on the surface of the surface acoustic wave device. Changes in propagation velocity, as well as changes in geometry due to strain, may be detected as changes in, for example, wave propagation time, phase shift, etc. Thus, surface acoustic wave devices can be used, for example, to measure temperature, strain, torque, force, and the like. Surface acoustic wave devices can be used to measure, for example, airborne matter, humidity, biological matter, radiation, or magnetism if a particular coating is properly applied to the surface acoustic wave device. Piezoelectric sensors of the type described can be used as wireless sensors without the need for mounting or wired connection to a particular power source on the piezoelectric transducer.

Surface and bulk acoustic wave devices are also used as bandpass filters in electronic applications, particularly in telecommunications applications.

Generally, a surface acoustic wave device is provided as an electrode on a piezoelectric substrate. Typically, they are provided as interdigital transducers, with electrode sets interleaved alternately across the surface of the piezoelectric substrate. An interdigital transducer (IDT) is a device consisting of two interlocking arrays of comb-shaped metal electrodes in the form of a zipper. These metal electrodes are deposited on the surface of the piezoelectric substrate to form a periodic structure. The primary function of an interdigital transducer is to generate a periodically distributed mechanical force in the input transducer by the piezoelectric effect, thereby converting an electrical signal into a Surface Acoustic Wave (SAW). The same principle applies to the conversion of surface acoustic waves back into electrical signals in the output transducer. Thus, some devices employ an input transducer and an output transducer. An oscillating voltage excitation signal provided to the input transducer induces a propagating wave in the substrate that is in turn converted to an oscillating voltage response signal at the output transducer.

Surface acoustic wave sensors are proposed, for example, in patent documents EP 1577667, US7,243,547, US7,434,989, US7,795,779, US 8,742,645, US 9,027,407, US 2016/0012265 and US 2015/0013461. In certain applications, a common problem with these devices is that they are limited to an upper temperature limit. US 2015/0244344 proposes a surface acoustic wave device having a piezoelectric material, such as ordered langasite A₃BC₃D₂0₁₄A structure that can operate at temperatures up to about 1500 ℃. Some of the components include Sr₃TaGa₃Si₂0₁₄、Sr₃NbGa₃Si₂0₁₄、Ca₃TaGa₃Si₂0₁₄And Ca₃TaAl₃Si₂0₁₄. However, lanthanum gallium silicate exhibits relatively poor electromechanical coupling values. In turbine engine blade applications, US 2015/0244344 proposes placing a dielectric layer between the piezoelectric material and the thermal barrier coating of the blade. US 2015/0244344 proposes placing a discrete piezoelectric transducer on an acoustic substrate to form a surface guided bulk wave transducer. At the american society of electrical and electronics engineers international Symposium of sononics (IEEE international ultrasound Symposium) in 2016, v.pashchenko, r.matloub, f.parsaporkolour, p.muralt, s.balandras, and k.haffner disclose piezoelectric transducers that have particular advantages, particularly in terms of electromechanical coupling, i.e., converting an electrical excitation signal into sound waves.

Summary of the subject matter of the present disclosure

As initially mentioned, the present disclosure relates to a sensor device. In one aspect, a sensor that enables reliable temperature measurement should be provided. On the other hand, a sensor suitable for use under high temperature conditions should be provided, e.g. for use at temperatures above 300 ℃, above 450 ℃ or even above 600 ℃. In other aspects, the sensor device should be a passive sensor device, not requiring a specific power source directly connected to the sensor device. On the other hand, the sensor device should be capable of remote operation, so that no connection to other hardware by cables is required.

This is achieved by the subject matter set forth in the claims.

Further effects and advantages of the disclosed subject matter will become apparent whether or not explicitly mentioned in view of the disclosure provided below.

Accordingly, a sensor device is disclosed comprising a piezoelectric transducer and a base member, wherein the piezoelectric transducer comprises a piezoelectric member having at least one excitation electrode connected to a first face thereof. In particular, the base member is a non-piezoelectric base member, i.e. the base member is made of a non-piezoelectric material. As described in more detail below, in a non-limiting specific embodiment, the base member may be a pure sapphire member. The excitation electrode is adapted to electrically excite the piezoelectric member by an externally provided voltage, and to receive and transmit a voltage signal caused by mechanical excitation of the piezoelectric member. The piezoelectric member has a thickness defined between the first face and the second face. The piezoelectric transducer is attached to the support face of the base member with the second face of the piezoelectric transducer adjacent the support face of the base member. The base member includes at least one acoustic wave reflective label remote from the piezoelectric member. In operation, the piezoelectric member is electrically excited substantially upon application of an oscillating voltage to the at least one excitation electrode. The electrical excitation signal has a finite duration. The vibration of the piezoelectric member is transmitted to the base member and propagates on the surface of the base member as a surface acoustic wave. The surface acoustic waves are reflected at the at least one acoustic wave reflective label. The reflected surface acoustic wave is transferred to the piezoelectric member and mechanically excites the piezoelectric member. Due to the excitation of the piezoelectric member, an oscillating voltage is generated at the excitation electrode. In this respect, the piezoelectric transducer, i.e. the same piezoelectric transducer, is configured to operate as an input transducer and an output transducer. "the same piezoelectric transducer" does not necessarily mean that only one transducer is provided; however, as described below, this is one embodiment. It indicates that one sensor performs two functions. It will be appreciated that the duration of the electrical excitation signal must be shorter than the expected delay between the acoustic excitation and the return of the response signal to the transducer. Thus, as described above, in an exemplary embodiment, the sensor device may include a single transducer, and the single transducer may serve as both an input transducer and an output transducer. The delay time between electrically exciting the piezoelectric member and detecting the response signal from the reflected wave may depend on some physical parameter, such as, but not limited to, temperature or strain. The sensor device may be calibrated to know the correlation between the delay time and the physical parameter of interest. Accordingly, the sensor devices disclosed herein may be used to determine or measure a physical parameter of interest. For example, it can be used to measure temperature. Thus, the sensor may be interrogated when an oscillating excitation voltage signal is applied to the transducer in order to electrically excite the piezoelectric member and thereby generate a surface acoustic wave on the base member. The response signal from the surface acoustic wave reflected from the acoustic wave reflective tag then mechanically excites the piezoelectric member, thereby generating an electrical signal at the excitation electrode, which can be detected as a response signal. It should be understood that, in particular, the excitation signal may be wirelessly transmitted to the excitation electrode, and the response signal may be wirelessly transmitted from the excitation electrode.

In some cases, the total thickness of the piezoelectric member, measured from the first face to the second face, may correspond to at least approximately one-half of the wavelength of the bulk acoustic wave inside the piezoelectric member at the target excitation frequency. Thus, it will be appreciated that the sensor device may be specifically designed for a particular target excitation frequency or target frequency.

It is noted that the use of the indefinite article "a" or "an" within the framework of this disclosure does not in any way limit the singular nor exclude the presence of a plurality of named elements or features. Thus, it should be understood that it means "at least one" or "one or more".

In an exemplary embodiment of the sensor device, at least one acoustic wave reflective label is disposed on the support surface of the base member. This is beneficial in various aspects. On the one hand, when the sound waves from the transducer are transmitted from the transducer to the base member at the supporting surface of the base member, it is reasonable to assume that the surface sound waves are strongest at the supporting surface. Furthermore, in general, the sensor device may be intended to be attached to a component surface, wherein one face of the base member is opposite to the support face, so that propagation of surface acoustic waves on said opposite face may be suppressed or strongly attenuated.

In other aspects, the at least one acoustic wave reflective tag can be a groove in the support surface of the base member and disposed one delay line width from the piezoelectric transducer. The grooves can be easily manufactured in any kind of base member and prove robust in harsh environments, such as exposure to high temperatures, high pressures and/or aggressive substances. Furthermore, the grooves have been shown to produce excellent surface acoustic wave reflection qualities. As used herein, a delay line refers to the space between the transducer and the acoustic wave reflective tag on the supporting surface of the base member, and it is readily understood that the width of the delay line is critical to the magnitude of the time delay between electrically exciting the transducer and detecting the response signal.

In embodiments, the depth of the grooves corresponds to 3% to 7% of the wavelength of the surface acoustic waves on the base member at the envisaged excitation frequency, and in more particular embodiments at least about 5% of said wavelength. It has been found that the depth of the grooves has a significant effect on the quality of the response signal, since too shallow grooves will not produce sufficient reflection amplitude. On the other hand, it was observed that too deep grooves lead to conversion of surface acoustic waves into bulk acoustic waves and to parasitic dissipation. The useful depth range may depend on the material of the base member. For example, if the base member is a sapphire base member, the above values bring about good performance. In some cases, the groove width in the direction of wave propagation may correspond to at least one-quarter of the wavelength of the surface acoustic wave on the base member at the target excitation frequency.

In embodiments of the sensor devices disclosed herein, the piezoelectric transducer includes at least one longitudinally extending beam, and at least one acoustic wave reflective tag extending parallel to the beam of the piezoelectric transducer. More specifically, the wave reflecting tags are offset from the beam parallel, with the offset direction perpendicular to the beam and the tags. This enables a particularly good reflection of the generated surface acoustic wave from the tag, as well as a good reception of the reflected surface acoustic wave signal by the transducer. It may also be the case that the length of the tag is at least equal to the length of the beam, so that waves propagating laterally from the beam are fully captured by the tag. It has been found that if the base member and the piezoelectric transducer are arranged such that the ratio of the acoustic impedance of the piezoelectric member divided by the acoustic impedance of the base member is at least approximately equal to 2^-1/2It is beneficial for the base member to have acoustic impedance and the piezoelectric member to have acoustic impedance. This may improve the acoustic coupling between the transducer and the base member such that the base member is brought into contact with the transducer when a specific acoustic power is input from the transducerThe surface acoustic wave amplitude of (c) is enhanced.

In order to be able to transmit wireless signals and power to and from the sensor device, the excitation electrode may be connected to an antenna. The antenna may in turn be arranged on the support surface of the base member, which results in a particularly compact and robust design. It will be appreciated that the more readily effective wireless power and signal transmission to and from the transducer can be achieved, the lower the power required to generate a particular acoustic wave amplitude within the piezoelectric member, or vice versa, the higher the acoustic wave amplitude for a given excitation signal strength. Furthermore, the higher the efficiency of the transmission and conversion of mechanical waves between the transducer and the base member, the stronger the response signal resulting from a given excitation signal will be, which further supports an efficient wireless signal transmission and an acceptable signal-to-noise ratio between the sensor device and any evaluation unit.

Furthermore, it has been found, at least in embodiments, that the performance of the sensor device is improved if the ground electrode is connected to the second side of the transducer, i.e. in particular adjacent to the base member or between the second side of the piezoelectric member and the support surface of the base member. In this case, the thickness of the piezoelectric member is measured between the first face and the face facing the ground electrode. It was found that this arrangement produced particular performance benefits if aluminium scandium nitrate transducers were applied. In certain non-limiting embodiments, the ground electrode is a platinum electrode.

In a more specific embodiment, a piezoelectric transducer includes a monolithic piezoelectric member in which an array of parallel grooves having a depth are disposed within the piezoelectric member and extend in a first plane, whereby an array of parallel extending beams are defined in the piezoelectric member and separated from each other by the grooves. The depth of the groove is less than the total thickness of the piezoelectric member measured between the first and second faces of the piezoelectric member in order to maintain mechanical coupling between the beams. On the first face of the piezoelectric member, each beam is connected to an excitation electrode. At the american society of electrical and electronics engineers international sonos Symposium, in 2016, v. pashchenko, r. matloub, f. parsaporkolour, p. muralt, s. balandras, and k. haffner, indicate that the coupling coefficient (i.e., the efficiency with which sound waves from a transducer are substantially converted to surface sound waves on a base member, and vice versa, as will be readily understood by those skilled in the art, the efficiency with which reflected surface sound waves are transmitted to the transducer for conversion to an electrical response signal) is significantly enhanced when the mechanical coupling between the transducer beams is maintained. Due to these effects, the response of the sensor device to the excitation signal provided to the transducer is enhanced. Therefore, the response signal strength when the sensor is inquired is improved. Thus, the signal-to-noise ratio is improved when the excitation signal is wirelessly transmitted to and the response signal is wirelessly transmitted from the transducer.

In an embodiment, the pitch of the beams, measured perpendicular to the longitudinal extension of the beams, corresponds to at least about half the wavelength of the surface acoustic waves on the base member at the target excitation frequency. In an embodiment, the depth of the grooves separating the beams from each other may correspond to at least about 60% of the total thickness of the piezoelectric member measured between the first and second faces of the piezoelectric member. As mentioned above, the total thickness of the piezoelectric member, measured from the first face to the second face, may correspond to at least about one-half of the wavelength of the bulk acoustic wave inside the piezoelectric member at the target excitation frequency. Each of said values is observed to improve the electromechanical coupling of the surface acoustic waves, i.e. the intensity or amplitude of the surface acoustic wave for each electrical excitation signal amplitude, and vice versa, the intensity of the electrical signal derived from a certain reflected wave amplitude. The enhancement of the parameter may be used to enhance the signal-to-noise ratio of the sensor device.

In a more specific embodiment, the array of beams is subdivided into two subsets, wherein the excitation electrodes connected to a first subset of the beams are electrically connected to each other, the excitation electrodes connected to a second subset of the beams are electrically connected to each other, and are electrically insulated from the excitation electrodes connected to the first subset of the beams, wherein the beams of the first subset alternate with the beams of the second subset such that the two subsets of beams are interleaved with each other. This embodiment essentially constitutes an interdigital transducer. Furthermore, it may be the case that a first subset of the beams extends from the first transverse beam to the second transverse beam and a second subset of the beams extends from the second transverse beam to the first transverse beam. The first subset of beams is separated from the second transverse beam and the second subset of beams is separated from the first transverse beam by respective transverse grooves. The transverse grooves may have the same depth as the grooves separating the beams from each other. "lateral" is herein and when relating to beams, to be understood as being lateral with respect to the beams of the beam array, and not with respect to the sensor device or the base member.

The excitation electrodes of each subset of beams may be connected to each other and may also be connected to a common antenna. However, it should be understood that the electrodes of the first subset of beams are electrically insulated from the electrodes of the second subset of beams.

The piezoelectric transducer may include at least one piezoelectric member composed of one of aluminum nitrate and aluminum scandium nitrate. In this respect, the piezoelectric transducer comprises at least one piezoelectric element consisting of aluminum nitrate or aluminum scandium nitrate. Other suitable materials now known or in the future may be applied to the piezoelectric members in the piezoelectric transducers described herein. The base member may be a pure sapphire member.

In embodiments, at least one surface of the base member between the piezoelectric transducer and the at least one acoustic wave reflective tag may be coated with a metal oxide. This enables the application of sensor devices for the detection of certain chemical substances.

A measuring system comprising at least one sensor device of the above-mentioned type is also disclosed. The at least one excitation electrode is adapted and configured for contactless transmission of a signal. The measurement system also includes a device configured to transmit an actuation signal to the transducer and receive a response signal from the transducer (i.e., to interrogate the sensor). The apparatus for transmitting the actuation signal to the transducer and receiving the response signal from the transducer may be a single device or may be provided as separate multiple devices.

A method for manufacturing a sensor device of the type disclosed herein is also disclosed. The method includes providing a base member or substrate, respectively. In a particular embodiment, the base member is a sapphire member. The method includes etching a groove in a top surface of the base member, the groove intended to function as an acoustic wave reflective label. The method includes depositing a piezoelectric material on a top surface of a base member. Depositing the piezoelectric material may include sputtering. The piezoelectric material may be one of aluminum nitrate or aluminum scandium nitrate.

Subsequently, the method includes etching the piezoelectric material to create grooves in the piezoelectric material that separate the transducer beams from each other. It will be appreciated that in creating the recess, the etch depth is less than the thickness of the piezoelectric layer. The method may further include masking portions of the piezoelectric material intended to form the transducer and removing the piezoelectric material from portions of the base member not intended to be covered by the transducer. In an embodiment, the method may comprise providing a layer of electrode material on the layer of piezoelectric material before etching the grooves or beams, respectively. Therefore, when the separation groove is etched, the excitation electrode is formed on the beam. More specific embodiments may further include depositing a material for the ground electrode on the base member, and fabricating the ground electrode prior to depositing the piezoelectric material.

It should be understood that the features and embodiments disclosed above may be combined with each other. It is also to be understood that other embodiments are contemplated as being within the scope of the present disclosure and claimed subject matter, such embodiments being apparent to one of ordinary skill in the art.