阅读说明：本技术 一种用于核聚变装置的真空抽气装置及方法 (Vacuum air extraction device and method for nuclear fusion device ) 是由 蔡潇 曹曾 冉红 张炜 李瑞鋆 于 2020-07-23 设计创作，主要内容包括：本发明属于核聚变真空技术领域,具体涉及一种用于核聚变装置的真空抽气装置及方法,该装置包括管道水冷却结构组件、多角度波纹管补偿结构组件、真空测量接口、抽气管道、密封法兰一和密封法兰二,其中密封法兰一连接在抽气管道的一端,真空测量接口、管道水冷却结构组件和多角度波纹管补偿结构组件向后依次固定连接在抽气管道的外壁上,抽气管道的另一端连接密封法兰二。本发明可以防止真空室在高温烘烤时由于热传导及热辐射引起真空抽气设备因密封面材料老化、失效造成真空设备漏气损坏,能够对因真空室窗口法兰及连接管道因焊接变形引起的径向,横向、极向的角度偏移在一定范围内进行补偿修正,满足后端连接设备安装精度要求。(The invention belongs to the technical field of nuclear fusion vacuum, and particularly relates to a vacuum air extraction device and a method for a nuclear fusion device. The invention can prevent the vacuum pumping equipment from air leakage and damage caused by aging and failure of sealing surface materials due to heat conduction and heat radiation in the high-temperature baking of the vacuum chamber, can compensate and correct the radial, transverse and polar angle deviation caused by welding deformation of the window flange and the connecting pipeline of the vacuum chamber in a certain range, and meets the requirement of the installation precision of rear-end connecting equipment.)

1. A vacuum pumping device for a nuclear fusion device is characterized in that: the device comprises a pipeline water cooling structure assembly (1), a multi-angle corrugated pipe compensation structure assembly (2), a vacuum measurement interface (3), an air exhaust pipeline (4), a first sealing flange (5) and a second sealing flange (8), wherein the first sealing flange (5) is connected to one end of the air exhaust pipeline (4), the vacuum measurement interface (3), the pipeline water cooling structure assembly (1) and the multi-angle corrugated pipe compensation structure assembly (2) are sequentially and fixedly connected to the outer wall of the air exhaust pipeline (4) backwards, and the other end of the air exhaust pipeline (4) is connected with the second sealing flange (8).

2. A vacuum pumping apparatus for a nuclear fusion device as in claim 1, wherein: the pipeline water cooling structure assembly (1) is made of 316L stainless steel materials, and three circles of water flow guide grooves are formed in the pipeline water cooling structure assembly.

3. A vacuum pumping apparatus for a nuclear fusion device as in claim 2, wherein: the pipeline water cooling structure component (1) is welded with a sealed quick connector (9) for the connection and outflow of cooling water.

4. A vacuum pumping apparatus for a nuclear fusion device as in claim 3, wherein: the multi-angle corrugated pipe compensation structure assembly (2) comprises a corrugated pipe (6) and an adjustable supporting connecting rod (7), the corrugated pipe (6) and the adjustable supporting connecting rod (7) are respectively welded on an air exhaust pipeline (4), so that the supporting connecting rod (7) is adjusted to stretch or compress the corrugated pipe (6), and angle compensation correction is carried out on the sealing flange II (8) and the air exhaust pipeline (4).

5. A vacuum pumping apparatus for a nuclear fusion device as in claim 4, wherein: the first sealing flange (5) is made of metal, one end of the first sealing flange is welded on the air exhaust pipeline (4), and the other end of the first sealing flange is connected with vacuum air exhaust equipment in a sealing mode through fluororubber.

6. A vacuum pumping apparatus for a nuclear fusion device as in claim 5, wherein: and the second sealing flange (8) is made of metal and is in sealing connection with the vacuum chamber.

7. A method of pumping vacuum pumping apparatus for a nuclear fusion device as in claim 6 including the steps of:

step (1) in the installation process of a vacuum pumping pipeline (4), a corrugated pipe (6) is adjusted and angle compensation correction is carried out through a support connecting rod (7) in a multi-angle corrugated pipe compensation structure component (2);

step (2) opening vacuum pumping equipment, and continuously introducing cooling water of 0.2MPa and 10 ℃ into the pipeline water cooling structural component (1) in the vacuum chamber baking process until the baking process is finished;

and (3) closing the vacuum pumping equipment after the plasma physical discharge experiment is finished.

Technical Field

The invention belongs to the technical field of nuclear fusion vacuum, and particularly relates to a vacuum air extraction device and method for a nuclear fusion device.

Background

In the future, the fusion device needs to be ensured to run safely for a long time, the vacuum chamber for generating and maintaining the plasma to run needs to be ensured to be an ultrahigh vacuum environment, and the vacuum degree needs to reach 10^-5Of the order of Pa. The function of the vacuum pumping system is to provide an experimental operation vacuum environment for fusion reaction. Thus requiring safe and reliable operation of the system during fusion device experiments. At present, most fusion devices are baked at a high temperature of more than 300 ℃ before experiments are carried out, residual water vapor in the wall of a vacuum chamber is removed, and rubber sealing materials of vacuum pumping equipment cannot normally work at a high temperature for a long time; in addition, the vacuum chamber window and the connecting pipeline cause small angle deviation during welding, and the installation precision of rear-section equipment is influenced. At present, the large-scale nuclear fusion vacuum chamber air extractor at home and abroad is generally a method for protecting the rubber sealing material from working in a normal working range by prolonging the length of an air extraction pipeline to increase the baking heat conduction distance and increase the heat dissipation area. The method has high requirement on installation space and has the defects of low heat dissipation speed of the pipeline and the like.

Therefore, it is necessary to provide a vacuum pumping device and method for nuclear fusion device to solve the disadvantages of the prior art.

Disclosure of Invention

The invention aims to provide a vacuum air extraction device and a vacuum air extraction method for a nuclear fusion device, which aim to solve the problems of air leakage and damage of vacuum equipment caused by aging and failure of sealing surface materials of the vacuum air extraction equipment due to heat conduction and heat radiation during high-temperature baking of a vacuum chamber, and can compensate and correct radial, transverse and polar angle deviation caused by welding deformation of a window flange and a connecting pipeline of the vacuum chamber within a certain range, so that the requirement on installation accuracy of rear-end connecting equipment is met.

The technical scheme of the invention is as follows:

the utility model provides a vacuum pumping device for nuclear fusion device, the device includes pipeline water cooling structure subassembly, multi-angle bellows compensation structure subassembly, the vacuum measurement interface, the pump-line, sealing flange one and sealing flange two, wherein sealing flange one end of connecting at the pump-line, the vacuum measurement interface, pipeline water cooling structure subassembly and multi-angle bellows compensation structure subassembly are fixed connection in proper order backward on the outer wall of pump-line, sealing flange two is connected to the other end of pump-line.

The pipeline water cooling structure assembly is made of 316L stainless steel materials, and three circles of water flow guide grooves are formed in the pipeline water cooling structure assembly.

The pipeline water cooling structure assembly is welded with a sealed quick connector for the access and outflow of cooling water.

The multi-angle corrugated pipe compensation structure assembly comprises a corrugated pipe and an adjustable support connecting rod, the corrugated pipe and the adjustable support connecting rod are respectively welded on the air exhaust pipeline, the support connecting rod is adjusted to stretch or compress the corrugated pipe, and angle compensation correction is carried out on the sealing flange II and the air exhaust pipeline.

The first sealing flange is made of metal, one end of the first sealing flange is welded on the air exhaust pipeline, and the other end of the first sealing flange is connected with the vacuum air exhaust equipment in a sealing mode through fluororubber.

And the second sealing flange is made of metal and is in sealing connection with the vacuum chamber.

The air exhaust method of the vacuum air exhaust device for the nuclear fusion device comprises the following steps:

step (1) in the installation process of a vacuum pumping pipeline, the corrugated pipe is adjusted and angle compensation correction is carried out through a support connecting rod in a multi-angle corrugated pipe compensation structure component;

step (2) opening vacuum pumping equipment, and continuously introducing cooling water of 0.2MPa and 10 ℃ into the pipeline water cooling structure assembly in the vacuum chamber baking process until the baking process is finished;

and (3) closing the vacuum pumping equipment after the plasma physical discharge experiment is finished.

The invention has the following beneficial effects:

(1) the invention can prevent the vacuum equipment from air leakage and damage caused by aging and failure of the sealing surface material of the vacuum pumping equipment due to heat conduction and heat radiation when the vacuum chamber is baked at high temperature.

(2) The invention can compensate and correct the radial, transverse and polar angle deviation caused by welding deformation of the vacuum chamber window flange and the connecting pipeline in a certain range, and meets the requirement of the installation precision of rear-end connecting equipment.

Drawings

FIG. 1 is a schematic structural view of a vacuum pumping tool applied to a nuclear fusion device, which is designed by the invention;

wherein: 1-pipeline water cooling structural components; 2-a multi-angle corrugated pipe compensation structure component; 3-a vacuum measurement interface; 4-an air exhaust pipeline; 5, sealing the flange I; 6-a corrugated tube; 7-a support link; 8-sealing a second flange; 9-sealing the quick interface.

Detailed Description

The technology of the present invention is further described below with reference to the following examples and the accompanying drawings:

as shown in figure 1, the vacuum air extractor for nuclear fusion device provided by the invention comprises a pipeline water cooling structure component 1, a multi-angle corrugated pipe compensation structure component 2, a vacuum measurement interface 3, an air extraction pipeline 4, a first sealing flange 5 and a second sealing flange 8, wherein the first sealing flange 5 is welded at one end of the air extraction pipeline 4, the vacuum measurement interface 3, the pipeline water cooling structure component 1 and the multi-angle corrugated pipe compensation structure component 2 are sequentially welded on the outer wall of the air extraction pipeline 4, and the second sealing flange 8 is welded at the other end of the air extraction pipeline 4.

The first sealing flange 5 is made of metal, one end of the first sealing flange is welded on the air exhaust pipeline 4, and the other end of the first sealing flange is connected with vacuum air exhaust equipment in a sealing mode through fluororubber.

The second sealing flange 8 is made of metal and is connected with the vacuum chamber in a sealing mode.

The pipeline water cooling structure component 1 is made of 316L stainless steel materials, and three circles of water flow guide grooves are formed in the pipeline water cooling structure component;

the multi-angle bellows compensation structure assembly 2 includes a high-flexibility stainless steel bellows 6 made of 316L stainless steel material and an adjustable support link 7.

When the second sealing flange 8 and the air exhaust pipeline 4 cause radial, transverse and polar angle deviation due to welding deformation or vacuum chamber baking, the corrugated pipe 6 can be stretched or compressed by adjusting the position of the support connecting rod 7 to perform angle compensation correction, so that the requirement on the installation precision of rear-end connecting equipment is met, and the normal operation of vacuum equipment is ensured;

the cooling water is connected and discharged through the sealed quick connector 9.

At present, most fusion devices are baked at a high temperature of more than 300 ℃ before experiments are carried out, and residual moisture in the wall of a vacuum chamber is removed. The ultimate working temperature of the equipment sealing material is 150 ℃, when the vacuum chamber is baked from normal temperature to 300 ℃, cooling water is not introduced into the pipeline water cooling structural assembly 1, and the temperature of the outer surface of the sealing flange I5 is 180 ℃ after the vacuum chamber baking temperature is maintained at 300 ℃ for 72 hours, which exceeds the ultimate working temperature of the equipment sealing material of 150 ℃.

If 0.2MPa cooling water at 10 ℃ is continuously introduced at the baking starting stage, the surface temperature of the first 5 sealing flange is 80 ℃ after the baking temperature of the vacuum chamber is maintained at 300 ℃ for 72 hours and is lower than the limit working temperature of 150 ℃ of the sealing material of the equipment, and the purpose of protecting the safe operation of the rear-end connected vacuum equipment is achieved.

The invention also provides an air extraction method of the vacuum air extraction device for the nuclear fusion device, which comprises the following steps:

in the installation process of a vacuum pumping pipeline 4, a corrugated pipe 6 is adjusted and angle compensation correction is carried out through a support connecting rod 7 in a multi-angle corrugated pipe compensation structure component 2;

step (2) in the vacuum chamber baking process, continuously introducing cooling water of 0.2MPa and 10 ℃ into the pipeline water cooling structure assembly 1 until the baking process is finished;

and (3) closing the vacuum pumping equipment after the plasma physical discharge experiment is finished.

The present invention has been described in detail with reference to the embodiments, but the present invention is not limited to the embodiments, and various changes can be made without departing from the gist of the present invention within the knowledge of those skilled in the art. The prior art can be adopted in the content which is not described in detail in the invention.