阅读说明：本技术 超声雾化器 (Ultrasonic atomizer ) 是由 钟术光 于 2020-07-18 设计创作，主要内容包括：本发明涉及一种超声雾化器,包括超声雾化片及具有厚度方向及长度或/和宽度方向或/和径向方向通导能力的且在雾化过程中和在被雾化液体中基本稳定地保持原有形态的多孔体,该超声雾化片包括压电陶瓷板,该压电陶瓷板的相对的两表面上或/和相对的两表面之间设置有相对的电极作为压电活性区,或者该压电陶瓷板的表面上或/和表面下层内设置有相邻的叉指电极成为压电活性区,(该电极间施加交流电可使该超声雾化片以其厚度方向振动,上述振动可使该多孔体中的液体雾化)。该雾化器雾化效率较高；雾化性能稳定,基本不受体位影响；其雾化时温度上升幅度下降,噪音降低,不易受损,提高其安全性等优势。(The invention relates to an ultrasonic atomizer, comprising an ultrasonic atomizing sheet and a porous body which has conductivity in the thickness direction and the length direction or/and the width direction or/and the radial direction and basically stably maintains the original shape in the atomizing process and the atomized liquid, wherein the ultrasonic atomizing sheet comprises a piezoelectric ceramic plate, opposite electrodes are arranged on two opposite surfaces of the piezoelectric ceramic plate or/and between the two opposite surfaces of the piezoelectric ceramic plate to be used as piezoelectric active regions, or adjacent interdigital electrodes are arranged on the surface of the piezoelectric ceramic plate or/and in a surface lower layer to be used as the piezoelectric active regions, (the ultrasonic atomizing sheet can vibrate in the thickness direction by applying alternating current between the electrodes, and the liquid in the porous body can be atomized by the vibration). The atomizer has high atomization efficiency; the atomization performance is stable and basically not influenced by body position; the temperature rise amplitude is reduced during atomization, the noise is reduced, the damage is not easy to occur, and the safety is improved.)

1. An ultrasonic atomizer comprising an ultrasonic atomizing sheet and a porous body having a thickness direction and a length or/and a wide reading direction or/and a radial direction conductivity and substantially stably maintaining its form during atomization and in an atomized liquid,

The ultrasonic atomization sheet comprises a piezoelectric ceramic plate, wherein opposing electrodes are arranged on opposing surfaces of the piezoelectric ceramic plate (I) or/and between the opposing surfaces to serve as piezoelectric active regions, or adjacent interdigital electrodes are arranged on the surface of the piezoelectric ceramic plate (II) or/and below the surface to serve as piezoelectric active regions (an alternating current is applied between the electrodes to vibrate the ultrasonic atomization sheet in the thickness direction thereof, and the vibration atomizes the liquid in the porous body).

2. The ultrasonic atomizer of claim 1, characterized in that said porous body is disposed on the surface of said ultrasonic atomization sheet.

3. The ultrasonic atomizer of claim 1, characterized in that said porous body is disposed within a perpendicular distance of 0 to 10mm from the surface of said ultrasonic atomization sheet.

4. The ultrasonic atomizer of claim 1, further comprising a container, said porous body being disposed as a portion or all of a wall of said container or on an outer surface of said container, said ultrasonic atomization sheet being disposed within said container or on a surface of said container or as a portion of a wall of said container.

5. An ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate is free of through holes.

6. An ultrasonic nebulizer according to claim 1, characterized in that the piezoceramic plate (I) is a single piezoceramic plate, or a stack substantially or mainly formed by two or three or more piezoceramic plates/layers.

7. The ultrasonic atomizer of claim 1, wherein said ultrasonic atomization sheet further comprises a vibration plate on which said piezoelectric ceramic plate is disposed.

8. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is made of a clad material having a cross section formed in a sandwich structure by joining different raw materials to each other in a layer shape.

9. An ultrasonic atomizer according to claim 1, characterized in that said piezoceramic plate or/and said porous body is substantially or generally square.

10. The ultrasonic atomizer of claim 1, wherein said interdigitated electrodes are selected from the group consisting of fence electrodes.

[ technical field ] A method for producing a semiconductor device

The present invention relates to an ultrasonic atomizer. More particularly, the present invention relates to a multi-purpose ultrasonic atomizer with improved performance.

[ technical background ] A method for producing a semiconductor device

The present ultrasonic atomizer or ultrasonic atomizing plate typically has a structure in which a vibrating plate is formed by bonding a circular metal plate to one surface of a circular piezoelectric ceramic plate, wherein the peripheral portion of the piezoelectric ceramic plate is supported in the circular wall of the metal plate, wherein the piezoelectric ceramic plate has a through hole at the center thereof, and wherein the metal plate has a atomizing area having a plurality of micro holes formed therethrough up and down at the center thereof, the micro hole area being opposite to the through hole. However, such an ultrasonic atomizer or an ultrasonic atomizing sheet has many disadvantages such as a small effective vibration displacement, difficulty in obtaining strong vibration, low effective energy conversion efficiency, a small area occupation ratio of an atomizing area, and a low atomizing capability, and is difficult to be used particularly for a miniaturized portable device.

Other atomizing devices such as chinese patent CN102219511A disclose in example thereof fig. 2 (paragraph 0069) a rectangular or bar-shaped "piezoelectric element 10 (test piece)" comprising "piezoelectric substrate 11" of "7 mm × 4.5 mm" and " vibration electrodes 12, 13" on the surface thereof, and in paragraph 0058 indicates "piezoelectric ceramic composition (piezoelectric element) of the present invention, vibrator … … for … … atomizer can be used in addition to oscillator".

Thereafter, chinese patent CN209002936U discloses a similar ultrasonic atomizing sheet, which "comprises a sheet-shaped piezoelectric substrate (101), a surface electrode (102) attached to one side surface of the piezoelectric substrate (101), and a driving electrode (103) attached to the other side surface of the piezoelectric substrate (101), wherein the piezoelectric substrate (101) is in a strip shape".

In addition, chinese patents CN206079025U and CN107752129A also disclose an ultrasonic atomizing sheet or an ultrasonic atomizer, "including an ultrasonic atomizing sheet, the upper surface of the ultrasonic atomizing sheet is provided with a tobacco tar adsorbing layer to form a piezoelectric ceramic component (10), the ultrasonic atomizing sheet and the tobacco tar adsorbing layer form an integrated structure, the tobacco tar adsorbing layer is used for adsorbing and transporting tobacco tar", and the tobacco tar adsorbing layer has a ceramic pulp layer, cotton, and non-woven fabric.

In addition, chinese patent CN2611051Y utilizes two piezoelectric sheets to drive the vibration diaphragm and the atomization diaphragm which form the liquid supply chamber, respectively, and the circular piezoelectric sheet and the vibration diaphragm are bonded to form a piezoelectric transducer, which provides high-speed longitudinal pressure wave in the liquid ejection direction to make the liquid ejected through the micro-orifice at high speed.

Similarly, chinese patent CN1359733A discloses a method and apparatus for delivering atomized liquid into human body, the apparatus includes an elastic cavity mold with micro-orifices on one surface, a piezoelectric ceramic plate mounted on the other surface of the elastic cavity mold, and a liquid supply tube connected to the elastic cavity mold and providing liquid for the elastic cavity mold, the elastic cavity mold is driven by electric signals to vibrate, and the formed pressure wave extrudes the liquid from the micro-orifices to form atomized liquid drops for administration.

The above listed ultrasonic nebulizing devices or ultrasonic nebulizers are also deficient:

1) the piezoelectric ceramic used by the prior atomizing sheet basically adopts a driving mode in the length-width direction or the radial non-thickness direction, and the telescopic vibration in the length-width direction or the radial non-thickness direction causes the atomizing efficiency of the ultrasonic atomizing sheet or the ultrasonic atomizer to be very low, and causes the center of the ultrasonic atomizing sheet to vibrate too much, generate heat seriously, generate noise greatly and possibly damage the ultrasonic atomizing sheet; in addition, the telescopic vibration in the length-width direction and the non-thickness direction may cause the tobacco tar adsorbing layer on the ultrasonic atomizing sheet in CN206079025U and CN107752129A to be extruded and damaged, such as cracking and dropping, due to passive telescopic motion (the two do not move synchronously), and the pores in the porous structure are easy to block and not easy to replace;

2) And/or the particle size of the droplets (atomized particles) after atomization of the liquid is not controlled, the porous body is not used, or the porous body is used but it is difficult to stably maintain the original form during atomization and in the atomized liquid, such as when the porous body which cannot maintain the original form in the liquid is used, such as cotton is deformed (shrinkage, form instability), or the porous body is broken and disintegrated such as a ceramic slurry layer (too high porosity and too low mechanical strength due to high moisture content during the manufacture thereof) due to ultrasonic vibration after a period of use, the particle size of the droplets (atomized particles) is not controlled any more, so that the particle size of the droplets (atomized particles) is too large or too wide in distribution, wherein larger particles are more, and further, the disintegrated particles or fragments may injure the user, so that the use thereof is limited, such as being unsuitable for medical use, particularly for inhalation into the lung, such as e-cigarette;

3) and/or porous body in ultrasonic atomizer, such as porous plate or non-woven fabric (wherein micropore is basically through hole) obtained by laser, machinery, chemical corrosion, hot melt, interweaving first and then hot melt or hot pressing, etc., basically it is the conductivity of thickness direction, basically there is no conductivity of length direction or/and width direction or radial direction, make its liquid-guiding or transfusion ability not strong, especially the liquid-guiding or transfusion ability not strong of length direction or/and width direction or radial direction, and there is no ability to store liquid, thus make its atomization efficiency not strong, need a bigger reservoir, the liquid must be communicated with micropore directly;

4) When the liquid in the liquid supply cavity of the device is not full, the device is upright, flat, inclined at different angles, even when the surface of the porous plate faces upwards or downwards, the contact area of the porous plate and the liquid is different, part of the through holes cannot be contacted with the liquid, so that partial atomization is lost, and the atomization performance becomes unstable and is influenced by the position (such as CN2611051Y and CN 1359733A).

Therefore, in reality, there is a need for further improvement of the ultrasonic atomizing sheet or the ultrasonic atomizer in the above invention.

[ summary of the invention ]

The present invention has an object to provide an ultrasonic atomizing sheet or an ultrasonic atomizer which can be used for a miniaturized portable device, is reduced in size, is light and thin, and is portable.

The invention aims to provide an ultrasonic atomization sheet or an ultrasonic atomizer, which has high atomization efficiency.

The invention aims to provide an ultrasonic atomization sheet or an ultrasonic atomizer, which has stable atomization performance and is basically not influenced by body positions.

It is another object of the present invention to provide an ultrasonic atomizing plate or an ultrasonic atomizer, in which the temperature rise is reduced during atomization.

It is another object of the present invention to provide an ultrasonic atomizing sheet or an ultrasonic atomizer, which is reduced in noise upon atomization.

It is another object of the present invention to provide an ultrasonic atomization sheet or an ultrasonic atomizer which is less likely to be damaged or/and improved in safety when atomized.

It is another object of the present invention to provide an ultrasonic atomization sheet or an ultrasonic atomizer which atomizes a mist (atomized particles) having a narrow particle size distribution range with fewer larger particles.

It is another object of the present invention to provide an ultrasonic atomizing sheet or an ultrasonic atomizer in which a porous structure which is easily clogged is easily replaced after the pores thereof are clogged.

Another object of the present invention is to provide an ultrasonic atomizing sheet or an ultrasonic atomizer, which has many uses, is particularly suitable for medical use, and improves clinical effects.

It is another object of the present invention to provide an ultrasonic nebulization patch or ultrasonic nebulizer suitable for pulmonary inhalation, in particular for electronic cigarettes.

The inventor surprisingly finds that the ultrasonic atomizer is assisted by the porous body with the conducting capacity in the thickness direction and the length direction or/and the width direction or the thickness direction and the radial direction, has better functions of liquid storage, liquid guiding or liquid transfusion, can remarkably improve the atomizing capacity and the atomizing efficiency, improves the atomizing effect, can ensure that the particle size distribution range of fog drops (atomized particles) is narrower, has fewer larger particles, is beneficial to reducing the size of the ultrasonic atomizer, and can be used for various purposes.

The present inventors have also surprisingly found that an ultrasonic atomizer employs an ultrasonic atomizing sheet (particularly, a square shape) comprising a (particularly, square, through-hole-free) piezoelectric ceramic plate (or piezoelectric element) and a (particularly, square) vibrating plate (e.g., a metal plate) to which the piezoelectric ceramic plate (or piezoelectric element) is fixedly attached, electrodes are provided on front and back surfaces of the piezoelectric ceramic plate (or piezoelectric element), and an alternating signal applied between the electrodes can be bent and vibrated in a thickness direction, which is advantageous for reducing a size, particularly a size in a width and/or thickness, and is suitable for a miniaturized portable device, which is advantageous for increasing an effective vibration displacement amount, obtaining a strong effective vibration, increasing an effective energy conversion efficiency, increasing an atomizing area, greatly improving an atomizing ability, an atomizing efficiency, and improving an atomizing effect, and the ultrasonic atomization sheet can generate heat lightly, the temperature rise amplitude is not high, the noise is reduced, and the ultrasonic atomization sheet is not easy to damage.

The present invention has been accomplished based on the above findings, by attaining some or all of the above objects of the present invention.

The present invention relates to an ultrasonic atomizer comprising an ultrasonic atomizing sheet and a porous body having a conducting (i.e., communicating and guiding a fluid flow) ability in a thickness direction and a length direction or/and a width direction or/and a radial direction and substantially stably maintaining its form during atomization and in a liquid to be atomized, the ultrasonic atomizing sheet comprising a piezoelectric ceramic plate (or piezoelectric element) (without through-holes), opposed electrodes provided on opposed surfaces of the piezoelectric ceramic plate (or piezoelectric element) or between opposed surfaces (e.g., in a surface layer) as piezoelectric active regions, or adjacent (next to/adjacent to) interdigital electrodes provided on the surface of the piezoelectric ceramic plate (or piezoelectric element) or in a subsurface layer as piezoelectric active regions, (application of an alternating current (or/and alternating) electric (signal) between the electrodes can vibrate the ultrasonic atomizing sheet in its thickness direction (bending or/and twisting), (the porous body may be sensitive to the vibration of the ultrasonic atomization sheet), (the vibration may atomize the liquid in (the pores of) the porous body)).

The term "substantially stably maintains its form" means that the form can be substantially maintained by accumulating (atomizing) operation for 1 hour or more, preferably 10 hours or more, more preferably 50 hours or more, more preferably 100 hours or more, more preferably 500 hours or more, more preferably 1000 hours or more, more preferably 2000 hours or more, most preferably 5000 hours or more.

The term "substantially retaining its form" as used above means that the form is substantially free of irreversible changes (e.g., substantially insoluble (dissolved), substantially non-molten, irreversibly deformed, substantially free of breakage such as cracking, splitting, etc.), and does not undergo a dimensional change of more than 10%, preferably not more than 5%, more preferably not more than 2%, more preferably not more than 1%, more preferably not more than 0.5%, and most preferably not more than 0.1%; or/and (original) function is substantially maintained without substantial change, such as a change in the atomization amount of the ultrasonic atomizer, or/and the average particle size of the atomized particles, or/and the particle size distribution of the atomized particles, or the like, of the important performance index, which is usually not more than 20%, preferably not more than 10%, more preferably not more than 5%, more preferably not more than 2%, more preferably not more than 1%, more preferably not more than 0.5%, and most preferably not more than 0.1%.

Preferably, the piezoelectric ceramic plate is not provided with through holes, and the through holes are not provided, so that the atomization performance is improved compared with the through holes (in the central area), the atomization area is reduced due to the through holes, and the central area has the strongest atomization capability, and the closer to the central area, the stronger atomization capability is.

Preferably, the porous body is disposed on the surface of the ultrasonic atomization sheet or within a vertical distance of 0 to 10mm, more preferably within 0 to 6mm, still more preferably within 0 to 3m, most preferably within 0 to 1mm from the surface.

Preferably, the porous body is provided on the surface of the ultrasonic atomization sheet (preferably, when viewed in the thickness direction, at least a partial area (e.g., 30% or more, preferably 50% or more, more preferably 70% or more, and most preferably 90% or more) of the area of the pores of the porous body coincides with the piezoelectric active region of the ultrasonic atomization sheet), or at least a partial area (e.g., 30% or more, preferably 50% or more, more preferably 70% or more, and most preferably 90% or more) of the piezoelectric active region of the ultrasonic atomization sheet coincides with the area of the pores of the porous body (the more the overlapping area is, the more the atomization performance is improved).

Preferably, the ultrasonic atomizer further comprises a container, the porous body is arranged to be a part or all of the wall body of the container or arranged on the outer surface of the container, and the ultrasonic atomization sheet is arranged in the container or arranged on the surface of the container or arranged to be a part of the wall body of the container.

Preferably, the ultrasonic atomization sheet further includes a vibration plate, the piezoelectric ceramic plate (or piezoelectric element) is disposed (mounted or fixed) on (a surface of) the vibration plate, and preferably, an overlapping area between the piezoelectric ceramic plate (or piezoelectric element) and the vibration plate, as viewed in a thickness direction, preferably, the area of the overlapping area occupies at least 20% or more (more preferably, 30% or more, more preferably, 50% or more, more preferably, 70% or more, and most preferably, 90% or more) of an entire area of a face of the piezoelectric ceramic plate (or piezoelectric element) or the vibration plate including the overlapping area (the larger the area ratio is, the larger the vibration in the thickness direction is, the smaller the plane contraction-expansion vibration is, and the higher the atomization performance is improved). Preferably, opposing electrodes are provided as the piezoelectric active regions on or/and between (e.g., in) opposing surfaces of at least the piezoelectric ceramic plate (or piezoelectric element) in the above-mentioned overlapping region.

Preferably, the piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomization sheet is substantially or generally a square body, at least one pair of opposite sides of which are fixed to the vibration plate, more preferably, at least two relatively short sides of which are fixed to the vibration plate, and most preferably, at least four corners (corners) of which are fixed to the vibration plate, so as to facilitate the maximum range of thickness direction vibration.

The piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomization sheet is positioned on one side (with a single-sided structure) of the vibrating plate, or two sides (with a double-sided structure, namely a sandwich structure) of the vibrating plate, so that the ultrasonic atomization sheet is formed; or the piezoelectric ceramic plate (or the piezoelectric element) is sandwiched or wrapped by the vibrating plate.

The ultrasonic atomizing plate is preferably of a sandwich structure which is basically (or mainly) formed by attaching and fixing two piezoelectric ceramic plates (or piezoelectric elements) and a vibrating plate which is fixedly clamped between the two piezoelectric ceramic plates (or piezoelectric elements). The two piezoelectric ceramic plates (or the electrodes on the piezoelectric elements) are connected in series, and the polarities of the electrodes on the opposite surfaces of the two piezoelectric ceramic plates (or the piezoelectric elements) are the same (the two piezoelectric ceramic plates are polarized in opposite directions), or the two piezoelectric ceramic plates (or the electrodes on the piezoelectric elements) are connected in parallel, and the polarities of the electrodes on the opposite surfaces of the two piezoelectric ceramic plates (or the piezoelectric elements) are opposite (the two piezoelectric ceramic plates are polarized in the same direction), so that bending vibration is realized. Preferably, the edge of the vibrating plate extends out of the periphery of the two piezoelectric ceramic plates (or the piezoelectric elements); preferably, the ultrasonic atomization plate is provided with a bonding pad outside the peripheries of the two piezoelectric ceramic plates (or piezoelectric elements), and more preferably, the bonding pad is connected to the vibration plate.

Preferably, the above piezoelectric ceramic plate (or piezoelectric element) or/and the above vibration plate or/and the above porous body is substantially (or generally) square (as opposed to a round flat body) is advantageous in improving atomization performance or/and reducing a space occupation ratio).

The width (a) of the interdigital electrode or the distance (b) between adjacent interdigital electrodes (fingers) is generally 10nm to 1mm, preferably 20nm to 500 μm, more preferably 40nm to 200 μm, and most preferably 80nm to 100 μm, respectively. The effective length (w) of the interdigital electrodes (fingers) (or the aperture of the interdigital transducer formed by the adjacent interdigital electrode pairs) is not limited, and is generally 0.5mm to 30mm, preferably 1mm to 20mm, and preferably 3mm to 15 mm. The width (a) of the interdigital electrode and the distance (b) between the adjacent interdigital electrodes (fingers) are preferably substantially equal, and the excited surface acoustic wave wavelength is substantially four times the width (a) of the finger. The period length of an interdigital transducer formed by adjacent interdigital electrode pairs can be represented by p, and p is 2a +2 b. The interdigital electrode is preferably a fence electrode. When the two bus bars are respectively connected or communicated with two ends (positive pole or negative pole) of alternating current, the surface wave is generated on the surface of the piezoelectric ceramic plate (or piezoelectric element) arranged on the two bus bars, and the surface wave can vibrate in the thickness direction (bending or/and twisting), and the vibration can be strengthened by a vibrating plate fixed on the piezoelectric ceramic plate.

Preferably, the above-mentioned finger electrodes are disposed on the opposite surfaces of the above-mentioned piezoelectric ceramic plate (or piezoelectric element) or/and in the lower layer of the opposite surfaces. Preferably, the polarity of the first interdigital electrode on the upper surface is opposite to the polarity of the first interdigital electrode on the lower surface, and the number of the finger electrodes on the upper and lower surfaces is counted from the same end of the piezoelectric ceramic plate. More preferably, the interdigital electrodes are substantially symmetrically disposed on or/and in the lower layer on the opposite surfaces of the piezoelectric ceramic plate (or the piezoelectric element).

Drawings

Fig. 1 is a schematic diagram of bending vibration when two piezoelectric ceramic plates (reverse polarization) are connected in series.

Fig. 2 is a schematic diagram of bending vibration when two piezoelectric ceramic plates (with same polarization) are connected in parallel.

FIG. 3 shows a cross-sectional view of an ultrasonic atomizer according to example 1 (comparative example porous body having only micropores capable of conducting in the thickness direction and not in the length or/and width directions; example porous body having micropores capable of conducting not only in the thickness direction but also in the length or/and width directions).

FIG. 4 is a sectional view showing an example of an ultrasonic atomizer according to example 2 (comparative example porous body having only micropores capable of conducting in the thickness direction and not in the length direction and/or width direction; example porous body having micropores capable of conducting not only in the thickness direction but also in the length direction and/or width direction).

FIG. 5 is a sectional view showing an example of an ultrasonic atomizer according to example 3 (comparative example porous body having only micropores capable of conducting in the thickness direction and not in the length direction and/or width direction; example porous body having micropores capable of conducting not only in the thickness direction but also in the length direction and/or width direction).

FIG. 6 is a sectional view showing an example of an ultrasonic atomizer according to example 4 (comparative example porous body having only micropores capable of conducting in the radial direction in the thickness direction; example porous body having micropores capable of conducting in the radial direction in addition to the thickness direction).

Fig. 7 shows an exploded perspective view of the ultrasonic atomizer of example 5.

Fig. 8 shows a sectional view along the line (v-v) of fig. 7, illustrating an assembled state of the ultrasonic atomizer.

Fig. 9 is a sectional view taken along line VI-VI in fig. 7.

Fig. 10 is an enlarged cross-sectional view of a portion of the ultrasonic atomizer shown in fig. 7.

Fig. 11 is a graph of atomization amount versus time for the ultrasonic atomizer shown in fig. 7.

Fig. 12 shows an exploded perspective view of an ultrasonic atomizer of example 6.

Fig. 13 is a plan view of the ultrasonic atomizer shown in fig. 12 with the porous body and the sealing adhesive removed.

Fig. 14 is a partial cross-sectional view taken along line a-a of fig. 13.

Fig. 15 is a perspective view of an ultrasonic atomizing sheet to which a vibration plate (resin film) is attached in example 6.

Fig. 16 is an exploded perspective view of an ultrasonic atomizing sheet to which a vibration plate (resin film) is attached in example 6.

Fig. 17 is an enlarged perspective view of a piezoelectric element in example 6.

Fig. 18 is a partial sectional view taken along line B-B in fig. 17.

FIG. 19 is a front cross-sectional view of a piezoelectric ceramic plate 11 (laminated piezoelectric actuator) according to example 7-1.

FIG. 20 is a perspective view of a piezoelectric ceramic plate 11 (multilayer piezoelectric actuator) according to example 7-2.

FIG. 21 is a sectional side view of a piezoelectric ceramic plate 11 (laminated piezoelectric actuator) according to example 7-2.

FIG. 22 is an exploded perspective view of the electrode arrangement in a piezoelectric ceramic plate 11 (multilayer piezoelectric actuator) according to example 7-2.

Fig. 23 is a side (v-v) sectional view of an ultrasonic atomizing sheet 10 relating to example 9.

FIG. 24 is a perspective view of a piezoelectric element according to embodiment 10-1.

FIG. 25 is a side sectional view of a piezoelectric element according to example 10-1.

FIG. 26 is a side sectional view of a piezoelectric element according to example 11-1.

FIG. 27 is a side sectional view of a piezoelectric element according to example 10-2.

FIG. 28 is a side sectional view of a piezoelectric element according to example 11-2.

Fig. 29 is a side sectional view of a piezoelectric element according to example 10.

Fig. 30 is a perspective view of a piezoelectric vibrating piece used in the piezoelectric atomizer in embodiment 12.

Fig. 31 is a sectional view taken along line C-C in fig. 30.

Fig. 32A is a sectional view taken along line B-B in fig. 33, and B is an enlarged view of a circled portion in fig. a.

FIG. 33 is a plan view of the piezoelectric atomizer used in example 12 (FIG. 35) with the porous body and the elastic sealing material removed.

Fig. 34A is a sectional view taken along line a-a in fig. 33, and B and C are enlarged views of the circled portion in fig. a.

Fig. 35 is an exploded perspective view of a piezoelectric atomizer in example 12.

Fig. 36A and B are perspective views of the terminal in embodiment 12.

Fig. 37 is a plan view showing the manner in which one of the terminals is moved relative to the housing in embodiment 12.

Fig. 38 is a plan view showing another example of the terminal in example 12.

Fig. 39 is a perspective view showing the manner in which one of the terminals is moved relative to the housing in embodiment 12.

Fig. 40A-C show the procedure of forming the bent terminals in the container by insert molding in example 12.

Fig. 41 is a perspective view of a piezoelectric vibrating piece used in the piezoelectric atomizer in example 13.

Fig. 42 is a sectional view taken along a line a-a of the piezoelectric vibrating piece in fig. 41.

Fig. 43 is an exploded perspective view of the piezoelectric atomizer used in example 13.

Fig. 44 is a sectional view showing a bend of a piezoelectric vibrating piece used in the piezoelectric atomizer in example 13.

Fig. 45 is a plan view of the piezoelectric vibrating piece supported in the housing of the piezoelectric atomizer in the case of example 13 before application of a second elastic adhesive (elastic bonding (/ alloy) body).

Fig. 46 is an enlarged perspective view of a corner portion of a housing of a piezoelectric atomizer in accordance with embodiment 13.

Fig. 47 is an enlarged sectional view of the piezoelectric vibrating piece supported in the case taken along a line B-B in fig. 45.

Fig. 48 is an enlarged sectional view of the piezoelectric vibrating piece supported in the case taken along a line C-C in fig. 45.

Fig. 49 is a structural view of a piezoelectric atomizer using a flexural piezoelectric vibrating piece in example 13.

FIG. 50 shows the positions of nodes of the bending modes of the surface of the piezoelectric vibrating piece in example 13.

Fig. 51 shows a comparison of example 14 with respect to vibration nodes between a piezoelectric vibrating piece (piezoelectric element) supported on four sides and a diaphragm supported at corners thereof.

Fig. 52 is a perspective view of the housing of the piezoelectric atomizer in embodiment 14-1.

Fig. 53 is a plan view of the piezoelectric atomizer of fig. 52, with the porous body and the elastic sealant removed.

Fig. 54 is a cross-sectional view taken along line a-a of fig. 53.

FIG. 55 is a plan view of a piezoelectric atomizer according to example 14-2, from which a porous body and an elastic sealing agent have been removed.

Fig. 56 is a sectional view taken along line C-C of fig. 55.

Fig. 57 is a perspective view of a housing included in the piezo aerosol of fig. 55.

FIG. 58 is a perspective view of the piezoelectric atomizer of example 14-3, from which the porous body has been removed.

Fig. 59 is an assembly view of the container and the piezoelectric vibrating piece (piezoelectric element) shown in fig. 58.

Fig. 60 is a perspective view of a piezoelectric vibrating piece (piezoelectric element) used in the piezoelectric atomizer in example 14.

Fig. 61 is a stepped sectional view taken along line B-B of fig. 60.

Fig. 62 is an exploded perspective view showing a piezoelectric atomizer in embodiment 15.

Fig. 63 is a plan view showing the piezoelectric atomization sheet 1 supported on the cartridge body (before the elastic adhesive is applied) in the piezoelectric atomizer in example 15.

Fig. 64 is an enlarged cross-sectional view taken along line III-III of fig. 63.

FIG. 65 is an enlarged cross-sectional view taken along line IV-IV of FIG. 63.

Fig. 66 is a plan view showing the cartridge 10 used in the piezoelectric atomizer in embodiment 15 shown in fig. 62.

FIG. 67A is a cross-sectional view taken along line VI-VI of FIG. 66, and B is a cross-sectional view taken along line VII-VII of FIG. 66.

Fig. 68 is an enlarged perspective view showing the lower left corner of the case shown in fig. 66.

Fig. 69 is a perspective view showing the piezoelectric element 3 in the piezoelectric atomization sheet 1 in the piezoelectric atomizer in embodiment 15.

FIG. 70 is a cross-sectional view taken along line X-X of FIG. 69.

FIG. 71 shows a perspective view of the ultrasonic atomizer/sheet of example 16-1.

FIG. 72 is a cross-sectional view in the width direction (A) and the length direction (B) of the ultrasonic atomizer/sheet according to example 16-1.

FIG. 73A is a cross-sectional view in the length-width direction of the ultrasonic atomizer of example 16-2; b shows a cross-sectional view along the length-height direction of the ultrasonic atomizer of examples 1-2.

Fig. 74 shows a cross-sectional view in the height-width direction of the ultrasonic atomizer of example 16-2.

Fig. 75 shows a cross-sectional view in the width direction (a) and the length direction (B) of an ultrasonic atomization sheet of example 17.

Fig. 76 shows a cross-sectional view in the height-width direction of the lower part of the ultrasonic atomizer of example 17.

Fig. 77 is a cross-sectional view in the height-width direction of the upper part of an ultrasonic atomizer according to example 17.

Fig. 78 shows a cross-sectional view in the length-width direction of the ultrasonic atomizer of example 17.

Fig. 79 shows a cross-sectional view in the length-height direction of an ultrasonic atomizer of example 17.

Fig. 80 shows a cross-sectional view in the length-height direction of the ultrasonic atomizer of example 18.

Fig. 81 is a cross-sectional view in the height-width direction of the lower part of the ultrasonic atomizer of example 18.

Fig. 82 is a cross-sectional view in the height-width direction of the upper part of the ultrasonic atomizer of example 18.

Fig. 83 is a cross-sectional view in the height-width direction of an ultrasonic atomizer (containing no porous body) of example 20.

Fig. 84 is a projection view of an ultrasonic atomizer (containing no porous body) of example 20, which is projected from the height direction on the length-width plane.

Fig. 85 is a schematic plan view showing interdigital electrodes in the ultrasonic atomizer of examples 21 and 22, wherein a denotes the (finger) width of the interdigital electrode, b denotes the distance between adjacent interdigital electrodes (fingers), p denotes the period length of an interdigital transducer composed of adjacent pairs of interdigital electrodes, and w denotes the piezoelectric active effective length of the interdigital electrode (finger) (or the aperture of the interdigital transducer described above).

Detailed Description

Piezoelectric ceramic plate (or piezoelectric element)

The present invention relates to an ultrasonic atomizing sheet or a piezoelectric ceramic plate (or piezoelectric element) in an ultrasonic atomizer, which may be a single piezoelectric ceramic plate, or a laminated body formed substantially (or mainly) of two or three or more piezoelectric ceramic plates/layers, wherein opposing electrodes are disposed on opposing surfaces or/and between opposing surfaces (e.g., in the surface layers), and an alternating current (or alternating current) electricity (signal) is applied between the electrodes to vibrate the ultrasonic atomizing sheet in its thickness direction (bending or/and twisting).

The ultrasonic atomizing sheet or the piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomizer according to the present invention is preferably a laminated body formed substantially (or mainly) of two piezoelectric ceramic sheets/layers, an inner electrode is provided between the two piezoelectric ceramic sheets/layers, two outer side surfaces are provided with and communicate with two outer side electrodes, the inner electrode is insulated from the two outer side electrodes, and application of an alternating (/ or alternating) electric (signal) between the inner electrode and the outer side electrodes can vibrate the ultrasonic atomizing sheet in its thickness direction (bending or/and twisting). Preferably, the inner electrode is led out to the outer side surface and arranged in parallel with the outer electrode (with a predetermined space therebetween).

Another preferable example of the ultrasonic atomizing sheet or the piezoelectric ceramic plate (or the piezoelectric element) in the ultrasonic atomizer according to the present invention comprises a laminate in which two or three piezoelectric ceramic layers are laminated; main surface electrodes formed on the upper and lower surfaces of the laminate; and internal electrodes formed between the adjacent two piezoelectric ceramic layers, wherein all of the ceramic layers are polarized in the same direction with respect to the thickness direction; and by applying an alternating current (signal) across the main surface electrodes and the internal electrodes, the laminate body generates (bends or/and twists) vibration in its thickness direction in its entirety. Preferably, the piezoelectric ceramic plate (or piezoelectric element) includes three laminated piezoelectric ceramic layers, and the thickness of the intermediate ceramic layer is between 50 percent and 80 percent of the entire thickness of the laminated body. In the three laminated stacks, since there is no potential difference between the two internal electrodes, the intermediate layer does not contribute to the bending vibration, but its thick thickness increases the mechanical strength of the piezoelectric ceramic plate (or piezoelectric element), and the two thin outer layers increase the amount of displacement and increase the amount of atomization (the thinner the piezoelectric ceramic plate (or piezoelectric element), the greater the amount of displacement, the stronger the atomization ability).

Still another preferable example of the above-mentioned laminated type piezoelectric ceramic plate (or piezoelectric element) includes a laminated body in which at least two piezoelectric ceramic layers are laminated, main surface electrodes provided on front and back surfaces of the laminated body, and internal electrodes located between each of the ceramic layers, where all the ceramic layers are polarized in the same direction in a thickness direction, the laminated body vibrating entirely in a bending mode in response to an alternating current (/ or alternating) electric (signal) applied between the main surface electrodes and the internal electrodes.

Still another preferable example of the ultrasonic atomizing sheet or the piezoelectric ceramic plate (or the piezoelectric element) in the ultrasonic atomizer according to the present invention comprises a plurality of piezoelectric ceramic layers laminated to define a laminate; main surface electrodes provided on the front and rear main surfaces of the laminate; internal electrodes provided between the respective ceramic layers, and all the ceramic layers are polarized in the same direction in the thickness direction thereof; the above-mentioned piezoelectric ceramic plate (or piezoelectric element) generates flexural vibration in response to an alternating current (/ or alternating) electricity (signal) applied between the main surface electrode and the internal electrode; and a resin layer provided so as to cover substantially all of the front and rear surfaces of the laminate (to protect the electrodes thereon and to improve crushing strength and fogging resistance).

Still another specific example of the laminated piezoelectric ceramic plate (or piezoelectric element) includes:

at least three sheet-like piezoelectric ceramic sintered bodies having an upper surface, a lower surface, and opposing 1 st and 2 nd end surfaces;

an upper surface electrode formed on an upper surface of the ceramic sintered body located at the uppermost portion;

a lower surface electrode formed on a lower surface of the ceramic sintered body located at the lowermost portion;

a 1 st external electrode formed on a 1 st end surface of the ceramic sintered body;

a 2 nd external electrode formed on a 2 nd end face of the ceramic sintered body;

at least one 1 st internal electrode formed between adjacent ceramic sintered bodies and led out to the 1 st external electrode;

and at least one 2 nd internal electrode formed between the adjacent ceramic sintered bodies and drawn out to the 2 nd external electrode;

the ceramic sintered body is laminated together with the 1 st internal electrode and the 2 nd internal electrode;

the 1 st internal electrode is insulated from the 2 nd external electrode, and the 2 nd internal electrode is insulated from the 1 st external electrode;

the upper surface electrode and the uppermost 1 st internal electrode, the 1 st internal electrode and the 2 nd internal electrode, and the lower surface electrode and the lowermost 2 nd internal electrode are opposed to each other with the ceramic sintered body interposed therebetween, and a part of the ceramic layer is interposed between the upper surface electrode and the uppermost 1 st internal electrode, between the 1 st internal electrode and the 2 nd internal electrode, and between the lower surface electrode and the lowermost 2 nd internal electrode as an active layer, and has at least three active layers;

When the total number of the ceramic sintered bodies is an odd number, the 1 st external electrode lead-out is communicated with the lower surface electrode, the 2 nd external electrode lead-out is communicated with the upper surface electrode, and the upper surface electrode and the lower surface electrode are insulated (preferably, the surface electrodes are led out to the same surface and arranged in parallel with the surface electrode formed thereon, but are insulated with the surface electrode (a preset interval is reserved between the surface electrodes));

when the total number of the above-mentioned ceramic sintered bodies is an even number, the 1 st external electrode is insulated from the upper surface electrode and the lower surface electrode (but preferably the 1 st external electrode is led out to the upper surface and/or the lower surface, juxtaposed with the surface electrode formed thereon, but insulated from the surface electrode (with a predetermined interval therebetween)), and the 2 nd external electrode is led out to communicate with the upper surface electrode and the lower surface electrode;

the atomizing sheet can be caused to flexurally vibrate in the thickness direction by applying (alternating signal) alternating current (/ or alternating) electricity (signal) to the 1 st and 2 nd external electrodes.

Another specific example of the above laminated piezoelectric ceramic plate (or piezoelectric element) comprises

A ceramic sintered body made of piezoelectric ceramic and having an upper surface, a lower surface, and opposing 1 st and 2 nd end surfaces;

An upper surface electrode formed on an upper surface of the ceramic sintered body;

a lower surface electrode formed on a lower surface of the ceramic sintered body;

a 1 st external electrode formed on a 1 st end surface of the ceramic sintered body;

a 2 nd external electrode formed on a 2 nd end face of the ceramic sintered body;

at least one 1 st internal electrode formed in the ceramic sintered body and drawn out to the 1 st end face;

at least one 2 nd internal electrode formed in the ceramic sintered body and drawn out to the 2 nd end face;

and at least three ceramic layers formed in the ceramic sintered body and laminated together with the 1 st internal electrode and the 2 nd internal electrode;

the 1 st internal electrode is insulated from the 2 nd external electrode, and the 2 nd internal electrode is insulated from the 1 st external electrode;

the top surface electrode and the uppermost 1 st internal electrode, the 1 st internal electrode and the 2 nd internal electrode, and the bottom surface electrode and the lowermost 2 nd internal electrode are opposed to each other via the ceramic layers in the ceramic sintered body, and a part of the ceramic layers are interposed between the top surface electrode and the uppermost 1 st internal electrode, between the 1 st internal electrode and the 2 nd internal electrode, and between the bottom surface electrode and the lowermost 2 nd internal electrode as active layers, and have at least three active layers;

When the number of the ceramic layers is odd, the 1 st external electrode lead-out is communicated with the lower surface electrode, the 2 nd external electrode lead-out is communicated with the upper surface electrode, and the upper surface electrode and the lower surface electrode are insulated (preferably, the surface electrodes are led out to the same surface and arranged in parallel with the surface electrode formed thereon, but are insulated from the surface electrode (a preset interval is reserved between the surface electrodes));

when the number of the ceramic layers is even, the 1 st external electrode is insulated from the upper surface electrode and the lower surface electrode (but preferably, the 1 st external electrode is led out to the upper surface and/or the lower surface, is arranged in parallel with the surface electrode formed thereon, but is insulated from the surface electrode (with a preset interval therebetween)), and the 2 nd external electrode is led out to be communicated with the upper surface electrode and the lower surface electrode;

the atomizing sheet can be caused to flexurally vibrate in the thickness direction by applying (alternating signal) alternating current (/ or alternating) electricity (signal) to the 1 st and 2 nd external electrodes.

Preferably, in the ceramic sintered body, ceramic layers between the uppermost internal electrode of the 1 st internal electrode and the 2 nd internal electrode and an upper surface of the ceramic sintered body are made to be a 1 st inactive layer (that is, no upper surface electrode is provided, or the upper surface electrode and the uppermost internal electrode are not opposed to each other with the ceramic layers interposed therebetween in the ceramic sintered body, and no ceramic layer is interposed between the upper surface electrode and the uppermost internal electrode as an active layer), and ceramic layers between the lowermost internal electrode of the 1 st internal electrode and the 2 nd internal electrode and a lower surface of the ceramic sintered body are made to be a 2 nd inactive layer (that is, no lower surface electrode is provided, or the lower surface electrode and the lowermost internal electrode are opposed to each other with the ceramic layers interposed therebetween in the ceramic sintered body, wherein no ceramic layer is interposed between the lower surface electrode and the internal electrode positioned at the lowermost portion as an active layer), the thickness of the ceramic layer as the inactive layer is thinner than the thickness of the ceramic layer as the active layer,

And the length of the 1 st internal electrode or the 2 nd internal electrode is set to be the distance from the 1 st end face or the 2 nd end face of the 1 st internal electrode or the 2 nd internal electrode to the top end of the 1 st internal electrode or the 2 nd internal electrode, at least one of the lengths of the internal electrode positioned at the uppermost part and the internal electrode positioned at the lowermost part is shorter than the lengths of the other internal electrodes,

the 1 st and 2 nd external electrodes are formed so as not to overlap internal electrodes connected to different potentials among the uppermost and lowermost internal electrodes with an inactive layer interposed therebetween when viewed in a plan view in a stacking direction of the ceramic sintered bodies.

Thus, it is possible to provide a multilayer piezoelectric actuator and a piezoelectric vibration device including the same, in which even if the outermost ceramic layer is an inactive layer, the amount of displacement is increased by reducing the thickness of the inactive layer, and thus, breakage in the ceramic sintered body is less likely to occur.

The shape of the electrode on the ultrasonic atomizing sheet or the piezoelectric ceramic plate (or piezoelectric element) in the ultrasonic atomizer according to the present invention may be substantially rectangular, or circular, or any other shape without limitation.

The (natural) vibration frequency of the piezoelectrically active region of the above piezoelectric ceramic plate (or piezoelectric element) or/and the above alternating (/ or alternating) electric (signal) frequency range is usually 10kHz-500MHz, preferably 20kHz-100MHz, more preferably 80 k-200 kHz or 160 k-260 kHz or 1 MHz-3 MHz, or 3.5 MHz-50 MHz. Preferably, the vibration frequency of the piezoelectric ceramic plate (or the piezoelectric element) is substantially the same as the frequency of the alternating current (/ or alternating) electricity (signal).

The piezoelectric ceramic plate (or piezoelectric element) is in the form of a substantially flat square (e.g., square, rectangle, strip), diamond, triangle, trapezoid, polygon, circle, ellipse, or other flat body, preferably a square (e.g., square, rectangle, strip). Preferably, the center or middle portion of the piezoelectric ceramic plate (or the piezoelectric element) is solid, preferably, the center or middle portion is solid made of any elastic solid material for buffering the central mechanical energy and reducing the central damage, especially, the elastic solid material is solid and can rebound the potential energy accumulated in the center or middle portion to reduce the energy loss and improve the energy utilization rate, the elastic solid material can be a solid polymer material (polymer) which is elastic at a temperature higher than the glass transition temperature thereof, examples of the elastic solid material include, but are not limited to, rubber, vulcanized rubber, silicone rubber, foamed (or porous) plastic, polyurethane elastomer (TPU) material, PE (polyethylene), PP (polypropylene), PS (polystyrene), PVC, PU (polyurethane, foamed polyurethane), EVA (ethylene-vinyl acetate copolymer rubber product), CR (chloroprene rubber), PEF (polyethylene chemically crosslinked high foaming material), EPS (expanded polystyrene), EPE (expanded polyethylene), EPP (expanded polypropylene), phenol foam, EPDM (ethylene propylene diene elastomer, commonly known as cellular rubber), and the like.

The above-mentioned piezoelectric ceramic plate (or piezoelectric element) material, i.e., piezoelectric ceramic, is not particularly limited in its composition or otherwise. Any and every piezoelectric ceramic may be used herein. As long as ceramics exhibiting piezoelectricity can be used in the present invention, specifically, examples of ceramics that can be used include a Bi layered compound, a tungsten bronze structure material, a perovskite structure compound of Nb acid-base compounds, lead magnesium niobate (PMN system), lead nickel niobate (PNN system), lead zirconate titanate containing Pb (PZT system), a material containing lead titanate, barium, or the like (see CN 1502469A).

Among these, a perovskite-type compound containing at least Pb is preferable for higher piezoelectric performance. Examples of the perovskite-type compound containing Pb include lead magnesium niobate (PMN-based), lead nickel niobate (PNN-based), lead zirconate titanate containing Pb (PZT-based), lead titanate-containing materials, and the like. By adopting such a composition, a piezoelectric ceramic sheet having piezoelectric vibration with a high piezoelectric constant can be obtained. Among these, lead zirconate titanate or lead titanate containing Pb is more suitable because of having a larger displacement.

For environmental protection and improvement of safety, a perovskite-type compound of niobic acid, zirconic acid or titanic acid is more preferable.

As one preferable example of the perovskite-type crystal, PbZrTiO3 containing Pb as an a-site constituent element and Zr and Ti as a B-site constituent element can be used. Further, other oxides may be mixed, or the a-site and/or the B-site may be replaced with other elements as a subcomponent insofar as the characteristics are not adversely affected. For example, Zn, Sb, Ni and Tc may be added as subcomponents to form a solid solution of Pb (Zn1/3Sb2/3)03 and Pb (Ni1/2Te1/2) 03.

According to the present invention, the perovskite-type crystal preferably further contains an alkaline earth element as an a-site constituent element. Examples of the alkaline earth element include Ba, Sr, Ca, and the like, and particularly, Ba and Sr are more preferable because a high displacement can be obtained. Thus, as a result of increasing the dielectric constant, a higher piezoelectric constant can be obtained.

Specifically, compounds represented by Pb1-x-ySrxBay (Zn1/3Sb2/3) a (Ni1/2Te1/2) bZr1-a-b-cTiCO3+ α mass% Pb1/2NbO3 (0. ltoreq. x.ltoreq.0.14, 0. ltoreq. y.ltoreq.0.14, 0.05. ltoreq. a.ltoreq.0.1, 0.002. ltoreq. b.ltoreq.0.01, 0.44. ltoreq. c.ltoreq.0.50, α. 0.1 to 1.0) are included.

Other specific examples are: single component systems such as BaTiO3, PbTiO3, KxW03, PbNb206 and the like; two-component systems such as PbTi03-PbZrO3, PbTiO3-Pb (Mg1/3Nb2/3)03 and the like; and three-component systems such as PbTiO3-PbZrO3-Pb (Mg1/3Nb2/3)03, PbTiO3-PbZrO3-Pb (Co1/3Nb2/3)03, K1-X-zNaxLizNO3 (e.g., { LiX (K1-YNaY)1-X } (Nb1-Z-WTaZSBW)03, etc.), etc. Specific examples of complex oxides and compounds useful in the present invention are found in CN 1206700A. Derivatives obtained by partially replacing Pb with any of Ba, Sr, Ca, etc., or partially replacing Ti with Sn, Hf, etc., may also be used.

The piezoelectric ceramic plate material can also be mixed with a polymer material to form a sheet with piezoelectricity. Examples of the polymer material include fluoroplastics (e.g., polyvinylidene fluoride and polytetrafluoroethylene), polylactic acid, and silica gel.

The piezoelectric ceramic preferably contains 0.1 mass% or less, and particularly preferably contains 0.07 mass% or less of carbon. Since carbon causes poor insulation in polarization due to the insulation of the piezoelectric body, the carbon can be suppressed within the above range to suppress the flow of current in polarization, thereby enabling polarization to a saturated polarization state. Therefore, a displacement failure due to a polarization failure can be prevented.

The porosity of the piezoelectric ceramic is preferably 5% or less, more preferably 1% or less, and particularly preferably 0.5% or less. By reducing the porosity, the strength of the piezoelectric ceramic can be improved, and breakage can be suppressed even when the thickness is small.

In the case where the piezoelectric ceramic of the present invention is used as an atomizer, the piezoelectric strain constant can be, for example, d31 mode. In order to fully exert the atomization capacity, d31 should be 50pm/V or more, preferably 100pm/V or more, more preferably 150pm/V or more, particularly preferably 200pm/V or more, and particularly preferably 250pm/V or more.

The electrode of the piezoelectric ceramic sheet may be an internal electrode or a surface electrode, and the material thereof may be conductive, and for example, a good conductor such as Au, Ag, Pd, Pt, Cu, Sn, Al, Ni, or an alloy thereof may be used, and preferably at least Ag is contained. Among them, Ag is preferable in terms of improving sinterability, and is excellent in conductivity and low in cost, while Pd is preferable in terms of conductivity and heat resistance. In addition, the use of the internal electrode, preferably Ag or Ni, promotes the lowering of the firing temperature (for example, in the case where the piezoelectric ceramic contains a volatile oxide such as Pb, K, Na, or Li).

The electrodes of the piezoelectric ceramic sheet are required to have a thickness such that they have conductivity and do not interfere with displacement, and the thickness is preferably 0.1 to 500 μm, more preferably 0.5 to 50 μm, and most preferably 1 to 5 μm. Particularly, the thickness of the internal electrode is preferably about 1 to 3 μm, and the thickness of the surface electrode is preferably 0.2 to 0.5 μm.

Vibrating plate

The ultrasonic atomization sheet or the vibration plate in the ultrasonic atomizer can convert the fixed piezoelectric ceramic plate (or the piezoelectric element) from the original straight telescopic vibration (such as the expansion-contraction vibration in the length direction and the expansion-contraction vibration in the area direction) into the (bending or/and torsion) vibration in the thickness direction, thereby increasing the effective vibration displacement, obtaining stronger effective vibration, increasing the effective energy conversion efficiency, increasing the area of an atomization area, greatly improving the atomization capacity and the atomization efficiency, improving the atomization effect, enabling the ultrasonic atomization sheet to generate heat less and enabling the ultrasonic atomization sheet not to be easily damaged.

At least one end or one side of the ultrasonic atomizing sheet or the vibration plate of the ultrasonic atomizer is fixed, preferably, substantially or generally square, at least two relatively short sides thereof are fixed, and more preferably, at least four corners (corners) thereof are fixed.

When two adjacent piezoelectric ceramic plates (or piezoelectric elements) with opposite expansion and contraction vibration in the straight direction are fixed together, one of the piezoelectric ceramic plates (or piezoelectric elements) can be mutually regarded as a vibration plate of the other piezoelectric ceramic plate (or piezoelectric element), so that the effect is stronger.

Examples of the vibrating plate that can be used in the present invention include, but are not limited to, a (square) metal plate, a ceramic plate (including a piezoelectric ceramic plate), a glass plate, a resin or plastic plate, and a composite plate thereof, and a wood plate, a bamboo plate can also be used in the present invention.

Examples of the metal and ceramic raw materials listed below as the "porous body" can be used for the metal plate and the ceramic plate (including the glass plate), and are not described herein.

The raw material of the resin or plastic plate may be one of non-metallic materials such as epoxy resin, acryl resin, Polyimide, polyamideimide, etc. having an elastic modulus of 500MPa to 1500MPa in a cured state, such as acrylic resin such as polymethyl methacrylate (PMMA), Polyimide, Polyethylene (PE), Polyethylene terephthalate (PET), polypropylene (PP), poly (cyclohexane dimethanol terephthalate) (PCT), polybutylene terephthalate (PBT), Polytetrafluoroethylene (PTFE), expanded polytetrafluoroethylene (ePTFE), and polyether ether ketone (PEEK), or any high-order engineering plastic.

The vibrating plate and the piezoelectric ceramic plate (or piezoelectric element) are substantially square bodies (e.g., square, rectangle, strip), rhombus, triangle, trapezoid, polygon, circle, ellipse, or other flat bodies, preferably rectangular bodies (circle or other shapes can also be used in the present invention), and the length and/or width and/or thickness thereof are substantially the same or different. The size of the vibrating plate is larger than, equal to, or smaller than the size of the piezoelectric ceramic plate (or piezoelectric element), and preferably larger than the size of the piezoelectric ceramic plate (or piezoelectric element).

The vibrating plate has certain rigidity and elasticity. The Young's modulus, thermal expansion coefficient and other favorable parameters of the vibration plate are substantially the same as or within + -50% (preferably + -30%) of the Young's modulus of the piezoelectric plate.

In order to increase the effective vibration displacement amount and obtain strong effective vibration, the weight and thickness of the vibrating plate are reduced as much as possible (30% or more) without greatly (30% or less) lowering the advantageous parameters such as the coefficient of thermal expansion of rigidity. The lighter the vibrating plate is, the higher the atomization ability per unit energy is. It is necessary that the piezoelectric ceramic plate (or piezoelectric element) has a thickness of about 5 to 2000 μm (preferably 10 to 1000 μm, more preferably 10 to 500 μm, still more preferably 10 to 200 μm, most preferably 20 to 100 μm), and the vibrating plate (e.g., 42# alloy) has a thickness of about 10 to 2000 μm (preferably 20 to 1000 μm, still more preferably 20 to 500 μm, still more preferably 20 to 200 μm, most preferably 50 to 100 μm). Too thin, the rigidity of the vibration plate becomes low, which makes it difficult to reliably support the piezoelectric element, or makes it difficult to sufficiently convert the shape distortion of the piezoelectric element into amplitude motion. If the thickness is too large, the rigidity of the vibration plate will be significantly increased, which will result in that deformation due to distortion of the shape of the piezoelectric element is difficult to transmit to the vibration plate, the vibration amplitude of the vibration plate is not obtained, and the atomization ability is reduced.

The frequency of the natural vibration mode of the piezoelectric ceramic plate (or the piezoelectric element) and the frequency of the natural vibration mode of the vibration plate are set to be different from each other, but preferably, substantially the same.

The mechanical quality factor Qm of the ultrasonic atomization sheet formed by integrally combining the piezoelectric ceramic plate (or piezoelectric element) and the vibration plate satisfies: qm is less than or equal to 5.0.

Preferably, the vibration plate is a metal plate having a length greater than that of the piezoelectric ceramic plate (or the piezoelectric element) and electrically connected to the back surface electrode of the piezoelectric plate. The vibrating plate is a metal plate having a thickness of 10 to 300 μm.

Preferably, the piezoelectric ceramic plate (or the piezoelectric element) is fixed to the first surface of the vibrating plate at a position deviated from the longitudinal direction of the vibrating plate, and the vibrating plate has an exposed portion at the second surface of the vibrating plate (not more than 50%, preferably 30%, which is slightly more than the original length of the vibrating plate to reduce a part of noise, but is excessively more than the original length, mainly extends and contracts in the straight direction, is greatly reduced or disappears in the thickness direction (bending or/and twisting), and the function of the vibration is greatly reduced or disappears).

Preferably, a relationship between an area Ap of the piezoelectric ceramic plate (or the piezoelectric element) and an area Am of the vibration plate satisfies: Am/Ap is more than or equal to 1.1 and less than or equal to 10.

Preferably, the outer shape of the vibrating plate is larger than the piezoelectric ceramic plate (or the piezoelectric element), and the piezoelectric ceramic plate (or the piezoelectric element) is bonded to a substantially central portion of the surface thereof. Preferably, the vibrating plate is a resin film. Preferably, the area of the piezoelectric ceramic plate (or the piezoelectric element) is 40 to 70% of the area of the vibration plate (preferably, a resin film), and the vibration plate (preferably, the resin film) is thinner than the piezoelectric ceramic plate (or the piezoelectric element). Preferably, the vibrating plate (preferably, the resin sheet) is formed of a material having an elastic modulus of 500MPa to 1500 MPa.

Preferably, the vibrating plate is made of a metal (outer) clad material in which different materials are bonded to each other in a layered form and a sandwich structure is formed in a cross section thereof, so that the weight of the vibrating plate is not reduced by lowering the rigidity of the vibrating plate and the thermal expansion coefficient of the surface of the vibrating plate of the piezoelectric atomization sheet, and the vibrating plate is supported and fixed by the frame portion so as to form a damper portion having a linear amplitude, thereby obtaining a piezoelectric atomizer having improved atomization characteristics (amount).

A specific example of the diaphragm includes 2 surface layers constituting both surfaces of a clad material made of a 1 st raw material, and an elastic material layer having elasticity stronger than that of the clad material, which is formed by bonding both surfaces of the 2 surface layers made of a 2 nd raw material different from the 1 st raw material to the surface layers, respectively. The 1 st material has a thermal expansion coefficient which is close to the thermal expansion coefficient of the piezoelectric element (the piezoelectric ceramic plate) mounted and fixed thereto (in the range of ± 50% (preferably ± 30%, most preferably ± 10%), and the density of the 2 nd material is lower than the density of the 1 st material. The thickness of the surface layer is thinner than that of the elastic material layer (core layer). The 1 st and 2 nd materials are each composed of a metal and a polymer resin sheet. The 1 st material is a metal sheet made of 42# alloy stainless steel, and the 2 nd material is one of a metal and a polymer resin sheet selected from the group consisting of 42# alloy stainless steel and the like. The 2 nd material is a metal thin plate of a material made of aluminum as a basic component (material). As the polymer resin sheet, for example, a rubber-based polymer resin sheet made of rubber such as Styrene Butadiene Rubber (SBR), Butadiene Rubber (BR), acrylonitrile butadiene rubber (NBR), ethylene propylene rubber (EPM), ethylene propylene diene rubber (EPDM), or a compound thereof can be used. As a raw material of the woven fabric or the nonwoven fabric, for example, a polyurethane fiber can be used. As an example, when the diaphragm material is made of 42# alloy or 304 stainless steel having a thickness of 10 μm as a surface material and a light soft metal such as aluminum, magnesium or titanium having a thickness of 30 μm as an elastic (magnetic core) material, and the total thickness is 50 μm, the flexural rigidity of the entire material made of 42# alloy or 304 stainless steel having a thickness of 50 μm can be approximated. The thickness of the elastic (magnetic core) material is 30-60 μm. In another example, the elastic (core) material may be made of aluminum, and the elastic (core) material may be made of a manganese-copper alloy having a good internal loss or a lightweight metallic film of magnesium, titanium, or the like. For example, as the elastic (magnetic core) material, a plastic material such as polyethylene terephthalate, polyethylene, polypropylene, polyurethane, polyamide, polyimide, or the like, or a rubber polymer resin such as styrene-butadiene rubber, butyl rubber, ethylene-propylene rubber, or a compound thereof, or a polymer resin film such as synthetic rubber, may be used.

Generally, when the frequency of the operating alternating current is lower or higher than the frequency of the natural vibration mode, the atomizing ability of the piezoelectric element is greatly reduced, and the more the deviation is, the more the reduction is, but in the following preferred embodiment, the frequency of the operating alternating current is lower or higher than the frequency of the natural vibration mode of the piezoelectric ceramic plate (or piezoelectric element) mounted (fixed) on the above-mentioned membrane body, particularly, at an ultra high frequency exceeding 100KHz, the atomizing ability can be maintained high, and the generation of large peaks and valleys (lower atomizing ability) can be reduced.

Therefore, it is preferable that the diaphragm is a film-shaped body, the piezoelectric ceramic plate (or the piezoelectric element) is attached (fixed), and the film-shaped body is fixed to a frame member provided on an outer peripheral portion of the film-shaped body in a state where tension is applied.

Alternatively, the diaphragm is a film-like body that is provided around the piezoelectric ceramic plate (or piezoelectric element) and elastically holds the piezoelectric ceramic plate (or piezoelectric element); the vibrating plate is larger in size than the piezoelectric ceramic plate (or the piezoelectric element), and the piezoelectric ceramic plate (or the piezoelectric element) is attached (fixed) to a substantially central portion thereof.

Preferably, the film-like body has a dense-sparse portion having a physically sparse portion capable of forming a peak and/or a trough in the outer circumferential direction, and the film-like body is disposed so as to correspond to a natural frequency of a same-phase mode in which the abdomen portion and the node portion are formed in a concentric ring shape.

Preferably, the film-like body has a bellows structure which is provided around the piezoelectric ceramic plate (or the piezoelectric element) to hold the piezoelectric ceramic plate (or the piezoelectric element) and has ridges and/or valleys in an outer circumferential direction to elastically hold the piezoelectric ceramic plate (or the piezoelectric element).

Preferably, the bellows structure of the membrane body is configured as follows: the abdomen of the bellows coincides with the apex of the abdomen of the vibration mode of the same phase mode of the natural frequency.

Preferably, there are no bellows, i.e., crests and troughs, at the positions of the nodes of the above-described vibration modes.

Preferably, in the bellows structure of the membrane body, the bellows and the abdomen in the vibration mode correspond to each other in a one-to-one manner, and an apex of the abdomen in the bellows and an apex of the abdomen in the vibration mode coincide with each other.

Preferably, the edge of the membrane body is held by an elastic body.

Preferably, the elastomer is polyurethane foam or thermoplastic elastomer.

The plate-like body is a metal plate.

Preferably, the film-like body is a resin film.

Preferably, the natural frequency is a resonance point between 20kHz and 400kHz

Preferably, the metal plate and the piezoelectric body have a substantially rectangular plate shape, and a length-width ratio of the metal plate to the piezoelectric body is substantially 10: 4.

Porous body

The porous body of the present invention can obviously improve atomization capacity and atomization efficiency, improve atomization effect, and make the particle size distribution range of fog drops (atomized particles) narrower, wherein, the larger particles are less, and the porous body has balanced auxiliary atomization performance, liquid guiding and absorbing performance, liquid storage capacity and mechanical performance, and has the conductivity in the thickness direction and length direction or/and width direction or/and radial direction, and basically and stably keeps the original form in the atomization process and in the atomized liquid, such as insolubilization (dissolution), infusibility, non-deformation (such as shrinkage), non-breakage, such as crushing, cracking, etc.

The average pore diameter of the porous body of the present invention is usually less than 100 or 50 μm, but for the purpose of balancing the auxiliary atomization performance, the liquid guiding and absorbing performance, the liquid storing capability and the mechanical performance, the average pore diameter is 0.05 to 30 μm, preferably 0.1 to 20 μm, more preferably 0.5 to 10 μm, still more preferably 0.5 to 5 μm, and most preferably 1 to 3 μm. The aperture is too large, the atomization effect is not good, and particularly, when the aperture is too small, the aerosol is easy to be blocked by insoluble substances when being used for pulmonary administration such as electronic cigarettes. The porous body should comprise a solid porous support material having a porosity of at least 10% (by volume, the same applies hereinafter), preferably, the solid porous support material has a porosity of about 20% to about 80%, more preferably, about 30% to about 60%, and most preferably, about 35% to about 50%. Too high porosity, reduced functional performance of the porous body, susceptibility to damage, and too low, greatly reduced atomization efficiency and liquid storage capacity.

The porous body of the present invention is generally located on or outside the surface of the ultrasonic atomization sheet in the above vibration range of the ultrasonic atomization sheet, and the vertical distance between the two is generally 0 to 500 times the thickness of the ultrasonic atomization sheet, preferably 0 to 200 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 100 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 50 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 20 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 10 times the thickness of the ultrasonic atomization sheet, more preferably 0 to 5 times the thickness of the ultrasonic atomization sheet, and most preferably 0 to 2 times the thickness of the ultrasonic atomization sheet.

The form of the porous body is generally, but not limited to, any shape of a substantially flat shape, including a substantially square shape (e.g., square, rectangle, elongated shape), rhomboid shape, triangle, trapezoid, polygon, circle, ellipse or other flat shape, preferably a square shape, and the form of the substantially flat porous body is generally not larger than the maximum cross-sectional area of the ultrasonic atomization sheet, and the projection area thereof does not usually exceed the ultrasonic atomization sheet, but in some embodiments, the maximum cross-sectional area thereof may be larger than the maximum cross-sectional area of the ultrasonic atomization sheet, and the projection area thereof may exceed the ultrasonic atomization sheet.

The thickness of the porous body is usually 0.01 to 5mm, preferably 0.05 to 2mm, more preferably 0.05 to 1mm, and most preferably 0.1 to 0.5 mm.

The surface of the porous body and the ultrasonic atomization sheet form an integrated or split structure, the whole surface of the porous body can be attached to the surface of the ultrasonic atomization sheet, part of the surface can also be attached to the surface peripheral region of the ultrasonic atomization sheet, the central or middle region is not attached, preferably, part of the surface peripheral region of the ultrasonic atomization sheet is not attached, the central or middle region is not attached, and other surface peripheral regions are attached, and the non-integrated or integrated structure is favorable for easy replacement of the porous body after being blocked.

Part of the surface of the porous body may be attached to the surface of the container wall, so that the porous body, the container wall and the ultrasonic atomization sheet together form one or more containers having a volume. Also, the structure in which such a porous body is not integrated or integrated with the above-described ultrasonic atomizing sheet is advantageous in that the porous body can be easily replaced after clogging.

One specific example of the porous body is a microporous ultrasonic atomization sheet with multiple pores, which generally includes, but is not limited to, a metal sheet with micropores in the middle region, and an annular piezoelectric ceramic sheet with a through hole in the center, which is attached and fixed on the metal sheet, wherein the opposite sides of the annular piezoelectric ceramic sheet have two opposite electrodes, and the middle region with micropores of the metal sheet is opposite to the through hole of the annular piezoelectric ceramic sheet, so as to form an atomization functional region.

The porous body may contain one or more support materials, or support materials in which different regions have different average pore sizes, which are insoluble in the liquid to be atomized by the ultrasonic atomizer (/ ultrasonic atomization sheet) described above.

In a preferred embodiment, the porous body support material is based on, but not limited to, one or more of ceramics, geopolymer materials (inorganic polymer materials), metals, glasses, insoluble silicates, zeolites, carbon and other small soluble inorganic materials, or one or more plastics (i.e., insoluble solid (organic) polymer materials (polymers)), and particularly, plastics (i.e., insoluble solid (organic) polymer materials (polymers)) are preferred because they have better properties such as elasticity and toughness than other materials, are less susceptible to damage during vibration, and more importantly, can rebound the aggregation potential energy, reduce energy loss, and improve energy utilization. The above-mentioned "insolubility" means insolubility in the liquid to be atomized by the above-mentioned ultrasonic atomizer (/ ultrasonic atomizing sheet).

The container wall material should be non-porous.

The porous body support material described above may be based on one or more sintered ceramic materials.

The term "ceramic" is understood to include compounds formed between metallic and non-metallic elements, often oxides, nitrides and carbides formed and/or processable by some form of solidification process, typically involving the action of heat. In this regard, clay materials, cements, and glasses are included in the definition of ceramics (calister, "materials science and engineering," john wiley & Sons, 7 th edition (2007)).

The ceramic may comprise a sintered ceramic (e.g., kaolin, metakaolin, ceria, zirconia, scandia, aluminum oxide (/ combination), aluminum nitride (/ combination), titanium oxide (/ combination), titanium nitride (/ combination), silicon oxide (/ combination), silicon carbide (/ combination), silicon nitride (/ combination), boron nitride (/ combination), and combinations thereof).

Preferably, the ceramic material employed is based on metal oxides (such as alumina or zirconia), or on ceramics based on metal (or metalloid or non-metal) oxides, which are particularly useful because they cannot undergo further oxidation and therefore exhibit good stability at high temperatures.

The ceramic material may also be an oxide and/or double oxide, and/or a nitride and/or carbide of the elements scandium, cerium, yttrium, boron, silicon, aluminum, carbon, titanium, zirconium or tantalum or preferably any one of silicon, aluminum, carbon, titanium, zirconium or tantalum or combinations thereof.

In a preferred embodiment, the ceramic material is an oxide, nitride and/or carbide of any of the elements silicon, aluminum, carbon, titanium, zirconium or tantalum or a combination thereof. Specific materials that may be mentioned include ceria, zirconia, scandia, aluminum oxide (/ alloy), aluminum nitride (/ alloy), titanium oxide (/ alloy), silicon carbide (/ alloy) layer, silicon nitride (/ alloy), boron nitride (/ alloy), and combinations thereof.

Sintered ceramics (including materials formed from ceria, zirconia, scandia, aluminum oxide (/ alloys), aluminum nitride (/ alloys), titanium oxide (/ alloys), titanium nitride (/ alloys), silicon oxide (/ alloys), silicon carbide (/ alloys, silicon nitride (/ alloys), boron nitride (/ alloys), and combinations thereof) are well known to the skilled artisan. Such sintered ceramics are particularly suitable as carrier materials in which liquids can be stored.

After sintering has occurred and the ceramic has formed, the porous sintered ceramic may store a liquid, i.e. using a method of draining liquid drawn into the pores of the carrier material by capillary forces.

The pore size in the support material can be controlled by various techniques known to the skilled person. For ceramics (and geopolymers), control of pore size is typically achieved during the manufacture of the network structure of the support material. Examples of known methods of manufacturing porous scaffolds are disclosed in Subiab et al (2010) biomaterial scaffold manufacturing techniques for potential tissue engineering applications, tissue engineering, Daniel Eberli (eds.).

Alternatively, the porous body support material described above may be based on one or more chemically bonded ceramic materials. One or both of these may be provided in the form of pellets.

Suitable chemically bonded ceramics include non-hydrated, partially hydrated, or fully hydrated ceramics, or combinations thereof.

Non-limiting examples of chemically bonded ceramic systems include calcium phosphate, calcium sulfate, calcium carbonate, calcium silicate, calcium aluminate, magnesium carbonate, and combinations thereof. Preferred chemical compositions include those based on chemically bonded ceramics that consume a controlled amount of water to form a network after hydration of one or more suitable precursor species.

Other specific systems available are those based on aluminates and silicates, both of which consume large amounts of water. Phases such as CA2, CA3 and C12a7, and C2S and C3S (according to common cement terminology, C ═ CaO, a ═ Al203, SiO2 ═ S) in crystalline or amorphous states can be used, which are readily available. The calcium aluminate and/or calcium silicate phases may be used as separate phases or as a mixture of phases. The phases described above, both in non-hydrated form, act as a binder phase (cement) in the carrier material when hydrated. The weight ratio of liquid (water) to cement is generally in the range of 0.2 to 0.5, preferably in the range of 0.3 to 0.4.

Further materials which may be mentioned in this connection include clay minerals, such as aluminium silicate and/or aluminium silicate hydrate (crystalline or amorphous). Non-limiting examples include kaolin, dickite, halloysite, nacrite, zeolite, illite, or combinations thereof, preferably halloysite.

In a further embodiment of the invention, the porous body is based on a ceramic material formed from a self-setting ceramic. Non-limiting examples of self-setting ceramics include calcium sulfate, calcium phosphate, calcium silicate, and calcium aluminate-based materials. Specific ceramics that may be mentioned in this connection include alpha-tricalcium phosphate, calcium sulfate hemihydrate, CaOAl2O3, CaO (SiO2)3, CaO (SiO2)2 and the like.

Other ceramic materials which may be used include those based on sulfates such as calcium sulfate or phosphates such as calcium phosphate. Specific examples of such materials include alpha or beta phase calcium sulfate hemihydrate (finished calcium sulfate dihydrate), basic or neutral calcium phosphate (apatite), and acidic calcium phosphate (brushite).

For the avoidance of doubt, the porous body material may comprise more than one ceramic material, for example a mixture comprising sintered and chemically bonded ceramics.

Alternatively, the porous body support material described above may be based on one or more geopolymer materials.

The skilled person will understand that the term "geopolymer" includes or means any material selected from the class of synthetic or natural aluminosilicate materials, which can be formed by reaction of an aluminosilicate precursor material, preferably in powder form, with an aqueous alkaline liquid (e.g. a solution), preferably in the presence of a silica source.

The term "silica source" will be understood to include any form of silicon oxide, such as SiO2, including silicates. The skilled artisan understands that silica can be made in several forms, including glass, crystals, gels, aerogels, fumed silica (or fumed silica), and colloidal silica (e.g., Aerosil).

Suitable aluminosilicate precursor materials typically (but not necessarily) crystallize in their native form and include kaolin, dickite, halloysite, nacrite, zeolite, illite, preferably dehydroxylated zeolite, halloysite, or kaolin, and more preferably metakaolin (i.e., dehydroxylated kaolin). Dehydroxylation (e.g. kaolin) is preferably carried out by calcining (i.e. heating) the hydroxylated aluminosilicate at a temperature above 400 ℃. For example, metakaolin can be prepared as described in Stevenson and Sagoe-huntsil, journal of materials science (j.mater.sci.), 40, 2023(2005), and zuulgami et al, physics of europe (eur.physj.ap), 19, 173(2002) and/or as described below. Dehydroxylated aluminosilicates may also be produced by condensing a silica source and a vapor containing a source of alumina (e.g., Al2O 3).

Thus, in a further embodiment, the support material may be a material obtainable by a process in which an aluminosilicate precursor material (such as a material selected from the group consisting of kaolin, dickite, halloysite, nacrite, zeolite, illite, dehydroxylated zeolite, dehydroxylated halloysite, and metakaolin) is reacted with an aqueous alkaline liquid, optionally in the presence of a silica source.

Precursor materials can also be made using sol-gel methods, typically resulting in nanoscale aluminosilicate amorphous powder (or partially crystalline) precursors, as described by Zheng et al in journal of materials science, 44, 3991-3996 (2009). This results in a finer microstructure of the hardened material. (e.g., sol-gel routes may also be used to make the precursor materials for the chemically bonded ceramic materials described above.)

If provided in powder form, the aluminosilicate precursor particles have an average grain size of less than about 500 μm, preferably less than about 100 μm, more preferably less than about 20 (or 30) μm.

In the formation of geopolymer materials, such precursor materials may be dissolved in an aqueous alkaline solution, for example, wherein the pH is at least about 12, such as at least about 13. Suitable hydroxide ion sources include strong inorganic bases such as alkali or alkaline earth metal (e.g. Ba, Mg or more preferably Ca or especially Na or K, or combinations thereof) hydroxides (e.g. sodium hydroxide). The molar ratio of metal cation to water can vary between about 1: 100 and about 10: 1, preferably between about 1: 20 and about 1: 2.

Preferably, a silica source (e.g., a silicate such as SiO2) is added to the reaction mixture by some means. For example, the aqueous alkaline liquid may comprise SiO2, forming what is commonly referred to as water glass, i.e., a sodium silicate solution. In such cases, the amount of SiO2 and water in the liquid is preferably at most about 2: 1, more preferably at most about 1: 1, and most preferably at most about 1: 2. The aqueous liquid may also optionally contain sodium aluminate.

Alternatively, the silicate (and/or alumina) may be added to an optionally powdered aluminosilicate precursor, preferably as a fumed silica (AEROSIL @ silica). The amount that can be added is preferably up to about 30 wt%, more preferably up to about 5 wt% of the aluminosilicate precursor.

Free hydroxide ions are present in this intermediate alkaline mixture, causing aluminum and silicon atoms from the source material to dissolve. The geopolymer material may then be formed by allowing the resulting mixture to solidify (cure or harden), during which process the aluminum and silicon atoms from the source material are reoriented to form a hard (and at least largely) amorphous polymer material. Curing may be carried out at room temperature, at elevated temperatures, or at reduced temperatures, such as at about or slightly above ambient temperature (e.g., between about 20 ℃ and about 90 ℃, such as about 40 ℃). Hardening may also be performed under any atmosphere, humidity or pressure (e.g., under vacuum or other conditions). The resulting inorganic polymer network is typically a highly coordinated 3-dimensional aluminosilicate gel in which the negative charge on the tetrahedral aluminium Al3+ sites is balanced by the alkali metal cation charge.

In this regard, the geopolymer-based carrier material may be formed by mixing a powder comprising an aluminosilicate precursor and an aqueous liquid (e.g., solution) comprising water, a source of hydroxide ions as described above, and a source of silica (e.g., a silicate) to form a paste. The ratio of liquid to powder is preferably between about 0.2 and about 20 (weight/weight), more preferably between about 0.3 and about 10 (weight/weight). Calcium silicate and calcium aluminate may also be added to the aluminosilicate precursor component.

Such pores may thus be essentially "secondary pores" formed by chemical interactions (e.g. "bonding") between the surfaces of primary particles of a support material (which may be itself porous (i.e. "primary" pores containing) such as a ceramic or geopolymer.) such pores may for example result from exposure of such material to one or more chemical agents which cause a physical and/or chemical transformation (such as partial dissolution) at that surface (which may itself result from some other physicochemical process such as drying, curing, etc.) and then the surfaces are physically and/or chemically bonded together, creating the pores/voids.

For geopolymers, control of pore size is typically achieved during the manufacture of the network structure of the support material. Examples of known methods of manufacturing porous scaffolds are disclosed in SubiaB et al (2010) biomaterial scaffold manufacturing techniques for potential tissue engineering applications, tissue engineering, DanielEberli (eds.).

In yet another alternative, the porous body support material described above may be based on one or more metals.

By using the term "metal" we include both pure metals and alloys (i.e. mixtures or two or more metals). Suitable metals that can be used as support materials include those that remain solid up to or above the heating temperature used in the device of the invention, e.g. above 400 ℃ or preferably above 500 ℃. Specific metal support materials include those based on titanium, nickel, chromium, copper, iron, aluminum, zinc, manganese, molybdenum, platinum, and alloys containing the metals. So-called refractory metals may also be used in view of their high heat resistance and wear resistance.

In this case, specific pure metals and alloys that may be used include brass, manganese, molybdenum, nickel, platinum, zinc, and in particular include titanium, titanium alloys, nickel-chromium alloys, copper-nickel alloys, iron, steel (e.g., stainless steel), aluminum, iron-chromium-aluminum alloys.

The pore size in the metal support material can be controlled by various techniques known to the skilled person. Examples of suitable methods that can be used to form the metal substrate with the desired porosity include three-dimensional printing and drilling. 3D printing of porous bodies can be achieved using conventional 3D printing equipment, and pore sizes as low as 10 μm or less can be achieved using this fabrication technique. Drilling methods to introduce porosity or increase the level of porosity in a material are known to the skilled person. Such a method may be particularly advantageous as it provides a greater degree of control over the pore size and overall porosity level in the material. Such drilling methods can be used to form pores down to an average size of about 20 (or 30) μm and possibly lower.

Internal porosity can also be developed in metallic structures (particularly in the case where the metallic structure is present as an electrically conductive part of an induction heating system) by a gas expansion (or foaming) process based on hot isostatic pressing (hip). Porous bodies with isolated porosities typically in the range of 20-40% are obtained by these processes. When foaming is carried out in a highly reactive multicomponent powder system, such as a system subjected to self-propagating high temperature synthesis (SHS), porosity can develop more rapidly. The highly exothermic reaction initiated by local or global heating of the compacted powder mixture to the reaction ignition temperature results in the vaporization of the hydrous oxides on the powder surface and the release of gases dissolved in the powder. The reaction powder mixture is rapidly heated to form a liquid containing (primarily hydrogen) gas bubbles and, when the reaction is complete, rapidly cooled, trapping the gas to form a foam. Gas formation and foam expansion can be enhanced by adding a vapor forming phase such as carbon (which burns in air to produce CO) or blowing agents that react together to raise the reaction temperature and produce fine particles that stabilize the foam. Other suitable methods known to the skilled person are disclosed in AndrewKennedy (2012), porous metals and metal foams made from powders (porousmetals and metal foams madefrom powders), powder metallurgy (powdermallargy), doctor KatsuyoshiKondoh (ed.).

In a further alternative, the porous support material may be based on one or more plastics (i.e. (water/alcohol) insoluble solid (organic) polymeric materials (polymers)), preferably (water/alcohol) insoluble heat resistant plastics, the term "heat resistant plastics" referring herein to plastics (e.g. silica gels, fluoroplastics) that can withstand temperatures of at least 150 ℃, preferably 200 ℃, more preferably 250 ℃ without deforming, softening or liquefying. Examples of the above porous plastic support material include polysulfones (PS, such as bisphenol a type Polysulfone (PSF), polyether sulfone (PES) polysulfone amide (PSA), phenolphthalein type polyether sulfone (PES-C), polyether ketone (PEK-C)), cellulose ester, cellulose ether, polyamide (such as nylon 6, nylon 66), silica gel, fluoroplastic, polyolefins (such as Polyethylene (PE), polypropylene, Polyacrylonitrile (PAN)), polyvinyl chloride (PVC), PC (polycarbonate), PAC, Chitosan (CS), polyvinyl alcohol (PVA), polyvinyl butyral (PVB), polyethylene terephthalate (PET), poly (cyclohexanedimethanol terephthalate) (PCT), polybutylene terephthalate (PBT), Polytetrafluoroethylene (PTFE), expanded polytetrafluoroethylene (ePTFE), and the like. Such fluoroplastics include, but are not limited to, Polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer (PFA) (polytetrafluoroethylene-perfluoropropyl vinyl ether PFA-P, polytetrafluoroethylene-perfluoromethyl vinyl ether PFA-M), vinylidene fluoride-hexafluoropropylene copolymer (viton. RTM., F26), fluorinated ethylene propylene copolymer (FEP), vinylidene fluoride-chlorotrifluoroethylene copolymer (Kel-F, F23), Polychlorotrifluoroethylene (PCTFF), one or more of tetrafluoroethylene-ethylene copolymer (ETFE), polyvinylidene fluoride (PVDF), poly (ethylene-co-chlorotrifluoroethylene) (ECTFE), polytetrafluoroethylene-hexafluoropropylene-vinylidene fluoride (THV), and vinylidene fluoride-tetrafluoroethylene copolymer (F24).

The above-mentioned plastic (i.e., the (water/alcohol) insoluble solid (organic) polymeric material (polymer)) porous body preparation method may be well known, and includes, but is not limited to: melt-blowing, immersion precipitation phase inversion, melt extrusion-stretching, Thermally Induced Phase Separation (TIPS), and alternating deposition self-assembly. The immersion precipitation phase inversion method is a phase inversion method, and comprises preparing homogeneous polymer solution with certain composition, changing thermodynamic state of the solution by certain physical method, allowing the solution to undergo phase separation from the homogeneous polymer solution, and finally converting into a three-dimensional macromolecular network type gel structure. The melt extrusion-stretching method comprises the steps of carrying out melt extrusion on pure high polymers in the melt extrusion-stretching process, pulling apart platelet structures which are arranged in parallel and are vertical to the extrusion direction of hard elastic materials in the stretching process to form micropores, and then fixing the pore structures through a heat setting process. Wherein the Thermal Induced Phase Separation (TIPS) comprises forming a homogeneous solution of a polymer and a diluent with a high boiling point and a low molecular weight at a high temperature, reducing the temperature to perform solid-liquid or liquid-liquid phase separation, and then removing the diluent to obtain the microporous polymer body. Wherein, the alternative deposition self-assembly method is to prepare the polyelectrolyte separation layer on the porous ceramic membrane support body by electrostatic self-assembly, which is an effective method for preparing the organic-inorganic composite membrane body. The method comprises the steps of alternately depositing oppositely charged polyelectrolytes at a liquid/solid interface through electrostatic interaction to form a multi-layer membrane body; the research on the number of self-assembled layers, the material and the time, the pH value of a polyelectrolyte solution and the like shows that the pore diameter and the thickness of the composite membrane body are adjusted in a nanometer range.

The pore size of the porous bodies is controlled during the manufacture of the network structure of the support material by various known techniques. A particular method suitable for use in the porous body support materials conveniently used in the present invention is porogen leaching, which involves the use of a sacrificial phase during the shaping of the support material. During shaping of the support material, a porogen material may be included as part of the reaction mixture to aid in shaping of pores within the final support material network. The pore-forming material includes, for example, volatile oil (e.g., perfume), volatile liquid (e.g., water, alcohol), organic solid material with high volatility (e.g., benzyl alcohol, menthol, borneol, camphor, salicylic acid, caproic acid, caffeine), organic or inorganic solid material (e.g., ammonium carbonate, ammonium bicarbonate, ammonium acetate) which can be thermally degraded into gas, etc., and has an average particle size of 0.05 to 20 (or 30) μm, preferably 0.1 to 10 μm, more preferably 0.5 to 5 μm, and most preferably 0.5 to 3 μm, and is used in a ratio of at least 10% (by volume, the same applies hereinafter), preferably about 20% to about 80%, more preferably about 30% to about 70%, and most preferably about 40% to about 60%, based on the total volume of the carrier material and the pore-forming material. The porogen material may then be removed from the support material, for example by volatilizing, subliming or thermally degrading the porogen material as it is heated during the curing process, or by dissolving the porogen material away using a suitable solvent. Dissolution is usually achieved with water in order to avoid leaving a residual amount of material which may have a detrimental effect on the operation of the device or on the user.

Foaming methods may also be used to increase the pore size of the support materials mentioned herein. Such methods will be known to the skilled person and are particularly suitable for forming support materials having larger pore sizes.

Any of the carrier materials described herein can be used in the device of the present invention. The above-mentioned support materials are preferably based on one or more chemically bonded ceramic materials, one or more geopolymer materials or one or more metals or one or more heat-resistant plastics. In a further embodiment, the present invention relates to a device as described above, wherein the carrier material is selected from the list consisting of:

(i) oxides, nitrides and/or carbides of any of the elements silicon, aluminum, carbon, titanium, zirconium, yttrium, titanium, zirconium, cerium, scandium, boron or tantalum and combinations thereof;

(ii) a material obtainable by a process in which an aluminosilicate precursor material is reacted with an aqueous alkaline liquid;

(iii) calcium phosphate, calcium sulfate, calcium carbonate, calcium silicate, calcium aluminate, magnesium carbonate, aluminum silicate, and combinations thereof;

(iv) brass, manganese, molybdenum, nickel, platinum, zinc, titanium alloys, nickel-chromium alloys, copper-nickel alloys, iron, steel, aluminum, and iron-chromium-aluminum alloys; and

(v) heat resistant plastics such as silica gel, fluoroplastics, and the like.

The materials listed above under (i), (ii) and (iii) are particularly preferred.

The preferred preparation method of the porous reservoir device comprises the following steps:

3D printing ceramic, geopolymer, metal or heat-resistant plastic printing material (such as paste or powder) to obtain a ceramic, geopolymer, metal or heat-resistant plastic precursor, wherein the ceramic, geopolymer, metal or heat-resistant plastic printing material (such as paste or powder) contains a pore-forming agent with an average particle size of 0.05-20 (or 30) μm, preferably 0.1-10 μm, more preferably 0.5-5 μm, and most preferably 0.5-3 μm, (by volume, at least 10% (by volume, the same below), preferably about 20-80%, more preferably about 30-70%, and most preferably about 40-60%), the above-mentioned ratio is based on the sum of the volume of the whole carrier material and the volume of the pore-forming material); the ceramic, geopolymer, metal or heat-resistant plastic precursors described above are treated by heat treatment or other known techniques to solidify or integrate them to form a porous body, i.e., a porous reservoir.

Container wall and container

The ultrasonic atomizer to which the present invention relates may not comprise a container (wall body), but preferably also comprises a container (wall body). The container wall body forms one or more containers with volume by itself or together with the ultrasonic atomization sheet or/and the porous body, the containers are communicated with the porous body, and the containers can contain liquid and/or a liquid absorber. The container comprises (comprises) 4 or 3 side walls, a top wall and a bottom wall, wherein the side walls are mainly formed by the container wall, and the top wall or the bottom wall is mainly formed by the container wall, or is mainly formed by the container wall and the ultrasonic atomization sheet or/and the porous body together or is respectively mainly formed by the ultrasonic atomization sheet or the porous body separately. When the container has (comprises) 4 side walls (6 closed on the sides), the container (on its side walls or/and top wall or/and bottom wall) also has one or more openings, for example for adding or transferring liquid, or for communicating with air, which can be connected to a pipe or closed by an openable lid; when the container has (includes) 3 side walls (5 side closed and one side not closed), the container preferably contains a liquid absorbent for absorbing and transporting liquid. The container wall surface is preferably an insulator. Preferably, the container is substantially (or generally) square, and more preferably, the porous body is substantially (or generally) square.

Some preferred embodiments of the above ultrasonic atomizer are as follows:

the ultrasonic atomizer I does not comprise a container wall body, and the porous body is partially or completely arranged on the surface of the ultrasonic atomization sheet; or

The ultrasonic atomizer II further comprises a container wall body, the container wall body is basically (or generally) formed with a container with a volume by itself, the ultrasonic atomization sheet and the porous body are not basically (or generally) formed between the container, the ultrasonic atomization sheet is partially or completely arranged outside the container, the porous body is partially or completely arranged on the surface of the ultrasonic atomization sheet facing the outside of the container, the porous body is communicated with the container, and the ultrasonic atomization sheet and/or the porous body are/is not clamped by the container wall body; or

The ultrasonic atomizer III further comprises a container wall, the container wall substantially (or generally) forms a container with a volume together with the ultrasonic atomization sheet, the ultrasonic atomization sheet is a part of the container wall, the porous body is not substantially (or generally) formed between the container, the porous body is partially or completely arranged on the surface of the ultrasonic atomization sheet facing the outside of the container, and the porous body is communicated with the container (for example, through the holes on the vibration plate and the container wall of the ultrasonic atomization sheet or a part of the porous body extends into the container); or

The ultrasonic atomizer iv further comprises a container wall, the container wall substantially (or entirely) forms a container with a volume together with the porous body, the porous body is a part of the container wall, the ultrasonic atomizing sheet is not substantially (or entirely) formed between the container, the ultrasonic atomizing sheet is partially or entirely disposed in the container and not disposed on the surface of the porous body, and a distance is provided therebetween, when viewed from the thickness direction, a part or an entire area of the porous body overlaps with the ultrasonic atomizing sheet, or the ultrasonic atomizing sheet is partially or entirely disposed in the container and on the surface of the porous body facing the inside of the container, and the porous body is communicated with the container; or

The ultrasonic atomizer V further comprises a container wall body which basically (or generally) forms a container with a volume together with the ultrasonic atomizing sheet and the porous body, the ultrasonic atomizing sheet is partially disposed on the surface of the porous body or the porous body is partially disposed on the surface of the ultrasonic atomizing sheet, partial surfaces of the ultrasonic atomizing sheet and the porous body are not overlapped together, the ultrasonic atomizing sheet and the porous body together form a part of the container wall, the part of the ultrasonic atomizing sheet overlapped with the surface of the porous body is the inner side surface of the container, the part of the porous body overlapped with the surface of the ultrasonic atomizing sheet is the outer side surface of the container, or the ultrasonic atomizing sheet and the porous body are respectively a part of the container wall, the ultrasonic atomizing sheet is not disposed on the surface of the porous body, and a distance is formed between the ultrasonic atomizing sheet and the porous body, the ultrasonic atomization sheet is provided with a porous body, and the porous body is partially or totally overlapped with the ultrasonic atomization sheet when viewed from the thickness direction.

In order to realize stable atomization performance, the ultrasonic atomization sheet or the piezoelectric ceramic plate (or the piezoelectric element) and the container are structured so as to satisfy the relation fcav < fo in which fo is a resonance frequency of the ultrasonic atomization sheet (piezoelectric vibration element) and fcav is a resonance frequency of the resonance cavity of the container, even if the atomization performance changes little under high temperature conditions.

The container wall (side wall or/and top wall or/and bottom wall) is provided with a support member for supporting the ultrasonic atomization sheet or/and the porous body. The container wall body includes a support portion disposed on an inner periphery of the wall body or the support member is provided inside between the wall bodies facing each other, the support portion supporting the outer periphery or peripheral portion of the ultrasonic atomization sheet or/and the porous body; or the ultrasonic atomization sheet and/or the porous body may be supported on both surfaces by being sandwiched between the support members.

The support member is fixed or reinforced with the ultrasonic atomization sheet and/or the porous body supported by the support member or a portion of the porous body or a peripheral portion thereof by an elastic adhesive (elastic bonding member) arranged.

The support member includes an elastic material such as glass epoxy (FR-4), composite material (CEM-3), polyetherimide, polyimide, polyester, urethane, polypropylene, silicone, polyurethane, rubber, or the like, and preferably urethane having a young's modulus of 3.7 × 106Pa after curing.

As the elastic adhesive (elastic adhesive/adhesive) body, a known adhesive such as an epoxy resin, a silicone resin, or a polyester resin can be used. As a method of curing the resin used as the adhesive, any of thermosetting, photo-curing, anaerobic curing, and the like can be used to manufacture the vibrator.

The above-mentioned container walls (side walls or/and top wall or/and bottom wall) provided with support (bearing) members are preferably embodied as follows:

the wall body of the container includes a plurality of supporting members for supporting the ultrasonic atomization sheet and/or the porous body on at least two opposite sides of the ultrasonic atomization sheet and/or the porous body or at corners of the ultrasonic atomization sheet and/or the porous body.

The inner circumferential surface of the container wall body is formed with a stepped portion at a middle position in the height direction thereof, and the ultrasonic atomization sheet and/or the porous body are/is contacted with the stepped portion from the lower surface thereof so as to be supported.

As described above, the container wall body includes the support portions for supporting the ultrasonic atomization sheet or/and the outer edge portion on the back (lower) side of the porous body, and the support portions are provided at four positions in the inner edge portion of the container wall body so as to support the four corner portions of the ultrasonic atomization sheet or/and the porous body. The support members provided in the wall body of the container are protrusions arranged to support the ultrasonic atomization sheet or/and the porous body at points near four corners thereof.

Preferably, the container wall includes a platform provided in the vicinity of the support portion, the platform being disposed lower than the upper surface of the support portion so that a gap is formed between the upper surface of the platform and the back (lower) side surface of the ultrasonic atomization sheet or/and the porous body. An elastic adhesive (elastic bonding (/ close) body) is provided between the upper surface of the platform and the back (lower) side surface.

More preferably, the container includes four side walls and steps provided on inner circumferences of the four side walls in a ring-shaped layout. The vessel further includes inner ends and an inner connection for each inner end. The inner connection of each inner end part has a branched structure located in the corner of the ultrasonic atomization sheet. The support members are located at four corners of the ultrasonic atomizing sheet in the steps and are provided at positions lower than the steps. The upper surface of the ultrasonic atomization sheet is substantially in height correspondence with the inner-connected upper surface of each inner end portion. The support members are substantially triangular in plan view and are arranged on the same circumference.

Further, as described above, a plurality of bases are provided at four corners of the container, and a protrusion is provided on an upper surface of each base so as to protrude therefrom. The ultrasonic atomization sheet and/or the bottom surface of the corner of the porous body are substantially supported by the respective protrusions.

Still further, the container may comprise a support portion arranged to support the peripheral portion of the ultrasonic atomization sheet or/and the porous body so that the peripheral portion thereof is fixed to the support portion, and a support surface provided on the support portion, the support surface having an arcuate cross section, the center of curvature of the support surface being located in the vicinity of the lower surface of the peripheral portion of the ultrasonic atomization sheet or/and the porous body.

Further, the ultrasonic atomization sheet and/or the porous body are supported so as to be inserted between the support portion and the wall body and held, as projecting from the side of the container wall body facing inward.

Further, the wall body of the container may include an annular projection, and the ultrasonic atomization sheet and/or the support portion of the porous body may include an outwardly projecting mounting flange having an outer diameter larger than an inner diameter of the annular projection, so that when the ultrasonic atomization sheet and/or the porous body is inserted into the wall body, the mounting flange of the ultrasonic atomization sheet and/or the porous body is forced against the annular projection, and the mounting flange is positioned within the wall body.

The above arrangements can minimize the disturbance of the vibration of the ultrasonic atomization sheet, prevent the deterioration of the atomization ability of the atomizer, improve the fixing strength and the damage resistance to the ultrasonic atomization sheet and/or the porous body, improve the impact resistance of the atomizer, and contribute to the miniaturization.

The following examples of particularly preferred ultrasonic atomizers not only have the advantages of the above examples, but also greatly improve their atomizing capabilities.

Particularly preferred ultrasonic atomizer example 1 has: a membrane body; a frame-type container wall body provided on an outer peripheral portion of the film body; the piezoelectric ceramic plate is arranged on the membrane body in the frame of the wall body of the frame type container and forms an ultrasonic atomization sheet together with the membrane body; and a porous body provided in a frame of the frame member so as to cover the piezoelectric element, wherein the film body is fixed to the frame member in a state in which tension is applied thereto. The frame member is made of a material that is less deformable than the porous body, and the porous body is joined to the frame member. The porous body is made of a resin having a Young's modulus of 1MPa to 1 GPa. The porous body is made of an acrylic resin. The film body is made of resin. The frame member includes a first frame member and a second frame member, and the outer peripheral portion of the film body is sandwiched between the first frame member and the second frame member. As the resin, for example, an acrylic resin, a silicone resin, a rubber or the like can be used, and the Young's modulus is preferably in the range of 1MPa to 1GPa, and more preferably 1MPa to 850 MPa.

Particularly preferred is an ultrasonic atomizer example 2 which comprises an ultrasonic atomizing sheet having a vibrating plate (preferably a metal foil, more preferably a resin film) having a larger outer shape than the piezoelectric vibrating plate (piezoelectric ceramic plate) and having the piezoelectric vibrating plate (piezoelectric ceramic plate) bonded to an approximately central portion of the surface thereof; the above porous body; and a frame-type container wall for accommodating the ultrasonic atomization sheet; the ultrasonic atomization sheet is provided with a piezoelectric vibrating plate having a piezoelectric active region, a porous body capable of sensing the vibration of the ultrasonic atomization sheet, and a piezoelectric vibrating plate having a piezoelectric active region and a liquid atomizing device having a piezoelectric vibrating plate, wherein at least 30% of the area of the porous body having pores coincides with the piezoelectric active region of the piezoelectric vibrating plate or at least 30% of the area of the piezoelectric active region of the piezoelectric vibrating plate coincides with the area of the porous body having pores, as viewed in the thickness direction, and the vibration atomizes the liquid in the pores of. Preferably, the area of the piezoelectric vibrating plate (piezoelectric ceramic plate) is 40 to 70% of the area of the resin film, a frame-shaped support portion larger than the outer shape of the piezoelectric vibrating plate (piezoelectric ceramic plate) is provided on the inner peripheral portion of the container wall, and the outer peripheral portion of the resin film, to which the piezoelectric vibrating plate (piezoelectric ceramic plate) is not bonded, is supported by the support portion of the container wall. The resin film is thinner than the piezoelectric vibrating plate and is formed of a material having an elastic modulus of 500MPa to 1500 MPa. The resin film has heat resistance of 300 ℃ or higher.

Other preferred ultrasonic atomizer example embodiments are shown in fig. 3 to 5.

Fig. 3 shows an ultrasonic atomizer arranged such that a backside surface node portion of an ultrasonic atomizing sheet 1 (whose side is spaced from the container side wall as viewed in the thickness direction, and whose front and back sides are secured to each other) is fixed to a support portion 2a (whose length is determined by the distance between the side walls, and whose front and back sides or left and right sides are secured to each other) projecting from the container wall 2 by an elastic adhesive (elastic bonding (e.g., silicon adhesive) 3. The porous body 4 (in the figure, the pores 2 having different diameters are exemplified, the smaller pores are more numerous and are used for assisting the atomization, and the larger pores are less numerous and are used for discharging bubbles that may be generated during the atomization) closes the container wall 2 (on which there is a small opening communicating with the outside, and this opening is also opened on the side wall).

Fig. 4 shows an ultrasonic atomizer arranged such that both short side portions of the ultrasonic atomization sheet 1 (the longer side of which is spaced from the side wall of the container as viewed in the thickness direction to ensure communication between the front and rear sides thereof) are fixed to the support portion 2b of the wall body 2 by an elastic adhesive (elastic bonding (e.g., silicone adhesive) 3. The porous body 4 (in the figure, the pores 2 having different diameters are exemplified, the smaller pores are more numerous and are used for assisting the atomization, and the larger pores are less numerous and are used for discharging bubbles that may be generated during the atomization) closes the container wall 2 (on which there is a small opening communicating with the outside, and this opening is also opened on the side wall).

Fig. 5 shows an ultrasonic atomizer arranged such that tapered groove portions 2c and 4a are provided in a wall body 2, and both short-side peripheral portions of the above-mentioned ultrasonic atomizing sheet 1 (the longer side thereof is spaced from the container side wall as viewed in the thickness direction to ensure that both sides of the front and rear thereof are communicated) are inserted into the groove portions 2c and 4a and fixed with an elastic adhesive (elastic bonding (e.g., silicon adhesive) 3. The film-like porous body 5 is fixed to the container wall 4 to close the container wall 2 (which has a small opening communicating with the outside, the opening also being opened in the side wall).

The ultrasonic atomizer according to the present invention further comprises an elastic sealing agent, wherein the gap between the outer periphery of the ultrasonic atomization sheet or/and the porous body and the inner periphery of the wall body of the container is sealed with the elastic sealing agent, and the elastic sealing agent may be made of the elastic adhesive (elastic bonding (or/and) body) material.

The liquid storage container may be formed from a substantially transparent material such as medical resins Polymethylmethacrylate (PMMA), Chevron Phillips styrene-butadiene copolymer (SBC), Arkema specialty polymers and Clear, DOW (Health + TM) Low Density Polyethylene (LDPE), DOW LDPE91003, DOW LDPE91020(MFI 2.0; density 923), ExxonMobil polypropylene (PP) PP1013H1, PP1014H1 and PP9074MED, TrinseoCALRE Polycarbonate (PC)2060 series.

The liquid storage container may be molded, for example, by an injection molding process. Preferably, the liquid storage container comprises an outlet in the liquid storage container for delivering the liquid aerosol-forming substrate from the liquid storage container. The outlet may be provided at an end of the liquid storage container.

The container wall material is generally not particularly limited, except that the container wall material should be non-porous and insoluble in the liquid contained. The material of the container wall may be similar to that of the porous body support, and in a preferred embodiment, the material of the container wall includes, but is not limited to, one or more of ceramics, geopolymer materials (inorganic polymer materials), inorganic materials such as metals, glasses, silicates, zeolites, and carbons, or one or more of plastics (i.e., water/alcohol-insoluble solid (organic) polymer materials (polymers)), and particularly, metals and plastics (i.e., water/alcohol-insoluble solid (organic) polymer materials (polymers)) are preferred because they have better mechanical properties than other materials and are less likely to be damaged during vibration or the like.

Elastic bonded (/ combined) body

Preferably, the ultrasonic atomizer according to the present invention further includes an elastic bonding element interposed between a 1 st surface, which is one surface on which the piezoelectric element (or piezoelectric ceramic plate) of the ultrasonic atomizing sheet is bent, and one main surface of the vibrating plate, the elastic bonding element bonding the 1 st surface of the piezoelectric element (or piezoelectric ceramic plate) to the one main surface of the vibrating plate, and at least a part of the elastic bonding element being formed of a deformable viscoelastic body; and/or between the ultrasonic atomization sheet and the porous body; and/or between them and the container walls and container.

The elastic bonded (or bonded) body is softer and more easily deformed than the vibrating plate, and has a smaller elastic modulus and rigidity, such as Young's modulus, rigidity, and bulk modulus, than the vibrating plate. That is, the elastic adhesive (/ synthetic) body is deformable, and when the same force is applied, it is deformed more than the vibration plate.

The thickness of the elastic adhesive (/ synthetic) body is larger than the amplitude of the bending vibration of the piezoelectric element (or piezoelectric ceramic plate).

The elastic adhesive (/ synthetic) body has at least a base layer and an adhesive layer composed of the viscoelastic body.

The elastic adhesive (/ synthetic) body has a 3-layer structure composed of 2 adhesive layers and the base layer disposed between the 2 adhesive layers. The base layer is composed of a nonwoven fabric and the viscoelastic body interposed between fibers of the nonwoven fabric.

The elastic adhesive (/ or elastomer) has the viscoelastic body in all cross sections between the surface on the piezoelectric element (or piezoelectric ceramic plate) side and the surface on the vibrating plate side.

The vibrating plate is fixed to the support via a 2 nd elastic bonding element at least a part of which is composed of a viscoelastic body.

The elastic adhesive/bonding material is made of a resin such as glass epoxy (FR-4), composite material (CEM-3), polyetherimide, polyimide, polyester, acryl, silicon, urethane, or rubber, a metal such as stainless steel, aluminum, or an alloy thereof, and has a thickness of 50 to 200 μm.

The adhesive layer is composed of a viscoelastic body, and the thickness thereof is set to be, for example, about 10 to 30 μm. As the viscoelastic material constituting the adhesive layer, for example, known viscoelastic materials formed of polymer materials such as acryl, silicon, urethane, and rubber can be suitably used. The base layer has a higher rigidity than the adhesive layer, and the thickness thereof is set to be, for example, about 50 to 200 μm. The base layer is preferably composed of a viscoelastic material and a nonwoven fabric which constitute the adhesive layer. That is, the base layer is preferably formed of a nonwoven fabric impregnated with the viscoelastic material constituting the adhesive layer (the viscoelastic material constituting the adhesive layer penetrates between fibers of the nonwoven fabric). As a result, the elastic bonded (/ bonded) body including a viscoelastic body over at least a part of the entire thickness direction, that is, the elastic bonded (/ bonded) body including a viscoelastic body in all cross sections between the surface on the piezoelectric element (or piezoelectric ceramic plate) side and the surface on the vibrating plate side can be obtained. Examples of the fibers used for the nonwoven fabric include natural fibers, chemical fibers, glass fibers, and metal fibers. The base layer 132 may be formed using a resin, for example. Examples of the resin include polyester, polyethylene, polyurethane, and propylene. Further, a foam made of these resins may be used.

Liquid absorber

The present invention relates to a container which can contain a liquid and/or a liquid absorbent. The liquid absorbent is used for storing and transporting liquid, and also for adsorbing or filtering insoluble particles in liquid, and preventing the porous body from being blocked or clogged, and includes, but is not limited to, fibers (e.g., natural or artificial fibers, organic or inorganic fibers), porous materials (e.g., soft or hard porous materials, organic or inorganic porous materials, and may be the same as the porous body materials, and preferably the pore size in the liquid absorbent is larger than that of the porous body, which facilitates the liquid to be rapidly transported to the porous body).

Protective coating (protective film)

The protective coating (protective film) may be used in combination with the ultrasonic atomization sheet and/or the porous body and/or the container wall and/or the liquid absorber in the ultrasonic atomization sheet or the ultrasonic atomizer disclosed in the present invention.

Protective coatings (protective films) can be used to help control the rate of atomization of the stored liquid during use. One or more coatings may be applied to the outer surface of the above-described carrier material. This may assist in controlling the delivery/drainage of the stored liquid, for example by ensuring that the user receives the aerosolized material/stored liquid within a short period of time, and thereby reducing the likelihood that the user may stop inhaling before receiving the entire intended dose.

The protective coating (protective film) may also be used to improve the stability of the atomized liquid and the ultrasonic atomization sheet and/or the porous body and/or the container wall and/or the liquid absorber in the ultrasonic atomization sheet or the ultrasonic atomizer, to prevent or slow down thermal degradation or oxidation of the atomized liquid, to prevent or slow down chemical corrosion of the ultrasonic atomization sheet and/or the porous body and/or the container wall and/or the liquid absorber in the ultrasonic atomization sheet or the ultrasonic atomizer, and the like. For example, the coating may shield or may act as a barrier to the atomized liquid or the above-mentioned ultrasonic atomization sheet in the ultrasonic atomizer and/or the above-mentioned porous body and/or the above-mentioned container wall and/or the above-mentioned liquid absorber from its external environment.

The protective coating materials used in the present invention can be designed to be inert in the following manner:

(a) general physicochemical stability under normal storage conditions, including a temperature of between about negative 80 and about positive 50 ℃ (preferably between about 0 and about 40 ℃, and more preferably room temperature, such as from about 15 to about 30 ℃), a pressure of between about 0.1 and about 2 bar (preferably at atmospheric pressure), a relative humidity of between about 5 and about 95% (preferably about 10 to about 75%), and/or prolonged (i.e., greater than or equal to six months) exposure to about 460 lux uv/visible light. Under such conditions, as above, a chemical degradation/decomposition of less than about 5%, such as less than about 1%, of the carrier material network as described herein may be found; and

(b) General physicochemical stability under acidic, basic, and/or alcoholic (e.g., ethanol) conditions at room temperature and/or at elevated temperatures (e.g., up to about 200 ℃), which may result in less than about 15% degradation.

(c) It is preferred in this respect that the network exhibits a compressive strength at the micro-and nano-structural level of greater than about 1MPa, such as greater than about 5MPa, for example about 10MPa, which is high enough to withstand damage to the material at the micro-structural level, i.e. less than about 200 μm.

The protective coating described above comprises: aluminum oxide Al2O3 thin film, silicon dioxide SiO2 thin film, titanium dioxide TiO2 thin film, zinc oxide ZnO thin film, hafnium dioxide HfO2 thin film, magnesium oxide MgO thin film, zirconium dioxide ZrO2 thin film, nickel oxide NiO thin film, cobalt oxide CoO thin film, iron oxide thin film FeOx thin film, copper oxide thin film CuOx thin film, boron oxide B2O3 thin film, indium oxide In2O3 thin film, TiN oxide SnO2 thin film, gallium oxide Ga2O3 thin film, niobium pentoxide Nb2O5 thin film, gadolinium oxide Gd2O3 thin film, tantalum pentoxide Ta2O5 thin film, boron nitride BN thin film, aluminum nitride AlN thin film, titanium nitride TiN thin film, silicon carbide SiC thin film, zinc sulfide ZnS thin film, zirconium sulfide ZrS thin film, hyaluronic acid thin film HA, tungsten thin film, molybdenum Pt thin film, ruthenium thin film, palladium thin film, pyromellitic dianhydride-diaminodiphenyl ether-DADA-diaminodiphenyl oxide thin film, pyromellitic dianhydride-HMDA-hexamethylenediamine thin film, PMDA-HMA-HMD-HMA thin film, Pyromellitic dianhydride-ethylenediamine PMDA-EDA film, pyromellitic dianhydride-p-phenylenediamine PMDA-PDA film, silica gel film and fluoroplastic film.

When the coating material is a layer, the coating material is any one of the films; when the coating material is a multilayer, the coating material is a multilayer film formed by overlapping any one of the films, or a multilayer film formed by alternately overlapping any two of the films, or a combined multilayer film of the multilayer film formed by overlapping any one of the films and the multilayer film formed by alternately overlapping any two of the films.

One embodiment of a protective coating (protective film):

the protective film is preferably formed by applying a paste resin in a thin film shape and curing the resin, or by bonding an adhesive sheet and curing the adhesive sheet, and has a fracture at a corner portion of the piezoelectric vibrating piece to expose the main surface electrode.

The resin layer should have a thickness covering the piezoelectric element and be provided so as to cover substantially the entire front and rear surfaces of the piezoelectric vibrating piece (e.g., laminate). Preferably, the resin layer is a hardened coating layer.

Terminal

The ultrasonic atomizer according to the present invention further comprises a pair of terminals for internal electrical connection and/or external electrical connection of both electrodes of the piezoelectric vibrating piece in the ultrasonic atomizing plate and/or a conductive adhesive (conductive adhesive) for fixing and electrical connection of the internal electrical connection and/or the external electrical connection.

Preferably, the interconnection has a bifurcated structure located in a corner of the piezoelectric vibrating piece.

Preferably, the terminal includes a conductive member electrically connected to both electrodes of the piezoelectric vibrating piece in the ultrasonic atomizing sheet by conductive paste, respectively.

More preferably, the terminal is provided at a position at or near a support member included in a wall body of the ultrasonic atomizer container.

In a preferred embodiment, the ultrasonic atomizer further comprises a pair of terminals having an inner connection exposed to the vicinity of the supporting member of the container wall and an outer connection exposed to the outer surface of the container wall and electrically connected to the inner connection; and a conductive adhesive; wherein, the two electrodes of the piezoelectric vibrating piece in the ultrasonic atomization piece are respectively and electrically connected with the internal connection of the terminal by conductive adhesive.

As another preferred embodiment, the ultrasonic atomizer further comprises a pair of terminals provided in the wall body of the ultrasonic atomizer container such that a first end of each terminal is inserted into the wall body of the container at a position close to the support portion and a second end of each terminal is provided outside the wall body of the container; wherein the first end portion of each terminal comprises: a main body portion fixed to the wall of the container; wing parts extending from two sides of the main body part to the corner of the container wall body and not fixed on the container wall body; and a stress relief portion disposed between the body portion and the wing portion to enable the wing portion to move toward the interior of the container wall; each electrode of the piezoelectric vibrating piece in the ultrasonic atomizing sheet is connected to at least one wing portion of the terminal.

As another preferred embodiment, the ultrasonic atomizer comprises a pair of terminals having an internal connection exposed in the vicinity of the supporting member of the wall body of the container of the ultrasonic atomizer and an external connection exposed on the outer surface of the wall body of the container and electrically connected to the internal connection; a first adhesive layer which is provided on a shortest path connecting the piezoelectric vibrating piece and the inner connection in the ultrasonic atomization sheet, the shortest path being located between the outer periphery and the inner connection in the ultrasonic atomization sheet, thereby fixing the ultrasonic atomization sheet to the container; a conductive adhesive layer for electrically connecting the electrodes of the piezoelectric vibrating reed in the ultrasonic atomization sheet and the internal connection of the terminal, the conductive adhesive layer being interposed between the electrodes of the piezoelectric vibrating reed in the ultrasonic atomization sheet and the internal connection through the upper surface of the first adhesive layer by bypassing the shortest connection path between the piezoelectric vibrating reed and the internal connection in the ultrasonic atomization sheet; and a second adhesive layer for sealing a gap between the outer periphery of the ultrasonic atomization sheet and the inner periphery of the container, wherein the Young's modulus of the first and second adhesive layers after curing is smaller than that of the conductive adhesive. Preferably, the viscosity of the first adhesive layer before curing is higher than that of the second adhesive layer, so that it is difficult to spread. Preferably, the first adhesive layer is partially applied to the vicinity of four corners of the ultrasonic atomization sheet. Preferably, the conductive paste is applied to the vicinity of at least two of the four corners of the piezoelectric diaphragm.

In accordance with yet another preferred embodiment, the ultrasonic atomizer further comprises a pair of terminals fixed to said container wall so that the internal connection portion is exposed at the inner periphery of said container wall; and a conductive paste applied and solidified between an electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and an internal connection portion of a terminal so that the conductive paste electrically connects the lead conductive piece to the internal connection portion of the terminal, wherein one of the conductive pastes is applied and solidified between the internal connection portion of the first end of the terminal and one of the electrodes in the vicinity of one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, and another conductive paste is applied and solidified between the internal connection portion of the second end of the terminal and another electrode in the vicinity of another corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, the another corner being adjacent to one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet. The application position of the conductive paste faces the application position of the other conductive paste with the piezoelectric vibrating piece of the ultrasonic atomizing sheet interposed therebetween. The application position of one of the above-mentioned conductive pastes and the application position of the other conductive paste are on one side of the piezoelectric vibrating piece in the above-mentioned ultrasonic atomization sheet and are close to both corners on both ends of the above-mentioned one side. Preferably, an elastic adhesive is also included. The elastic adhesive is coated between the piezoelectric vibrating piece and the end in the ultrasonic atomization sheet, and the conductive adhesive is coated on the elastic adhesive.

The above-mentioned structures and arrangements can minimize the obstacle of the vibration of the ultrasonic atomization sheet, prevent the degradation of the atomization ability of the atomizer, improve the fixing strength and the damage resistance to the ultrasonic atomization sheet and/or the porous body, and improve the impact resistance of the atomizer, and contribute to the miniaturization.

The invention also relates to an electronic cigarette device which is characterized by comprising the ultrasonic atomizer. Preferably, the device further comprises a heating component, and the heating component heats the smoke atomized by the ultrasonic atomizer so as to overcome the defects that the temperature of the smoke atomized by the ultrasonic atomizer is low and cold stimulation is caused to a smoke inhalator. Preferably, the mist atomized by the ultrasonic atomizer is heated to 40 to 100 ℃, more preferably to 40 to 80 ℃, and most preferably to 50 to 70 ℃. Preferably, the heating element is located in or adjacent to a mouthpiece of the appliance, and more preferably in or adjacent to a smoke outlet in the mouthpiece of the appliance.

The preferable technical scheme is as follows:

1. an ultrasonic atomizer comprising an ultrasonic atomizing sheet and a porous body having a conducting capacity in a thickness direction and a length direction or/and a width direction or/and a radial direction and substantially stably maintaining its form during atomization and in an atomized liquid,

The ultrasonic atomization sheet comprises a piezoelectric ceramic plate, wherein opposite electrodes are arranged on the opposite surfaces of the piezoelectric ceramic plate (I) or/and between the opposite surfaces to serve as piezoelectric active regions, or adjacent interdigital electrodes are arranged on the surface of the piezoelectric ceramic plate (II) or/and in a lower layer of the surface to serve as piezoelectric active regions (an alternating current is applied between the electrodes to vibrate the ultrasonic atomization sheet in the thickness direction thereof, and the vibration atomizes the liquid in the porous body).

2. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the atomized liquid for more than 10 hours.

3. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the atomized liquid for more than 50 hours.

4. The ultrasonic atomizer according to claim 1, wherein said porous body substantially stably maintains its original form during atomization and accumulated in the liquid being atomized for more than 100 hours.

5. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the liquid being atomized for more than 500 hours.

6. The ultrasonic atomizer according to claim 1, wherein said porous body is capable of substantially stably maintaining its form during atomization and accumulated in the atomized liquid for more than 1000 hours.

7. The ultrasonic atomizer according to claim 1, wherein the porous body has a morphology that does not undergo substantially irreversible changes during atomization and in the liquid being atomized, the dimensional change being no more than 10%; or/and the function of the ultrasonic atomizer is basically maintained without radical change, and the performance index of the ultrasonic atomizer does not change more than 20%.

8. The ultrasonic atomizer according to claim 7, wherein the performance index includes an atomizing amount, or/and an average particle diameter of the atomized particles, or/and a particle diameter distribution state of the atomized particles.

9. The ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate is free of through holes.

10. The ultrasonic atomizer according to claim 1, characterized in that said piezoelectric ceramic plate (I) is a single piezoelectric ceramic plate, or a laminated body substantially or mainly formed of two or three or more piezoelectric ceramic plates/layers.

11. The ultrasonic atomizer according to claim 1, characterized in that the piezoelectric ceramic plate (I) comprises a laminated body in which at least two piezoelectric ceramic layers are laminated, main surface electrodes provided on front and back surfaces of the laminated body, and internal electrodes located between each of the ceramic layers, wherein all the ceramic layers are polarized in the same direction in a thickness direction, the laminated body vibrating entirely in a bending mode in response to an alternating current applied between the main surface electrodes and the internal electrodes.

12. The ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate (I) is a laminated body formed substantially or mainly of two piezoelectric ceramic plates/layers, an inner electrode is provided between the two piezoelectric ceramic plates/layers, two outer side surfaces are provided with two outer side electrodes and communicated, the inner electrode is insulated from the two outer side electrodes, and an alternating current is applied between the inner electrode and the outer side electrodes to vibrate the inner electrode in a thickness direction thereof.

13. The ultrasonic atomizer according to claim 12, wherein the inner electrode is led out to the outer side surface and arranged in parallel with the outer electrode.

14. The ultrasonic atomizer according to claim 1, characterized in that said piezoelectric ceramic plate (I) comprises a laminated body formed by laminating two or three piezoelectric ceramic layers; main surface electrodes each formed on an upper surface and a lower surface of the laminate; and internal electrodes formed between the adjacent two piezoelectric ceramic layers, wherein all the ceramic layers are polarized in the same direction with respect to the thickness direction; and the laminated body is vibrated in its thickness direction in its entirety by applying an alternating current across the main surface electrodes and the internal electrodes.

15. The ultrasonic atomizer according to claim 1, characterized in that said piezoelectric ceramic plate (I) comprises three laminated piezoelectric ceramic layers, and the thickness of the intermediate ceramic layer is between 50 percent and 80 percent of the entire thickness of said laminated body.

16. The ultrasonic atomizer according to claim 1, wherein said piezoelectric ceramic plate (I) comprises a plurality of piezoelectric ceramic layers, which are laminated to define a laminate; main surface electrodes provided on front and rear main surfaces of the laminate; internal electrodes disposed between the respective ceramic layers, and all the ceramic layers are polarized in the same direction in the thickness direction thereof; the piezoelectric ceramic plate (I) generates flexural vibration in response to an alternating current applied between the main surface electrode and the internal electrode.

17. The ultrasonic atomizer according to claim 1, characterized in that the porous body is provided on the surface of the ultrasonic atomizing sheet.

18. The ultrasonic atomizer according to claim 17, wherein at least a partial area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or at least a partial area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores, as viewed in the thickness direction.

19. The ultrasonic atomizer according to claim 18, wherein 30% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 30% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

20. The ultrasonic atomizer according to claim 18, wherein 50% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 50% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

21. The ultrasonic atomizer according to claim 18, wherein 70% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 70% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

22. The ultrasonic atomizer according to claim 18, wherein 90% or more of the area of the porous body having the micropores coincides with the piezoelectrically active region of the ultrasonic atomizing sheet, or 90% or more of the area of the piezoelectrically active region of the ultrasonic atomizing sheet coincides with the area of the porous body having the micropores.

23. The ultrasonic atomizer according to claim 1, characterized in that the porous body is disposed within a vertical distance of 0 to 10mm from the surface of the ultrasonic atomization sheet.

24. The ultrasonic atomizer according to claim 1, wherein said porous body is disposed within a vertical distance of 0 to 6mm from the surface of said ultrasonic atomization sheet.

25. The ultrasonic atomizer according to claim 1, characterized in that the porous body is disposed within a vertical distance of 0 to 3mm from the surface of the ultrasonic atomization sheet.

26. The ultrasonic atomizer according to claim 1, characterized in that it further comprises a container, said porous body is provided as a part or all of the wall body of said container or on the outer surface of the container, and said ultrasonic atomizing sheet is provided in said container or on the surface of the container or as a part of the wall body of said container.

27. The ultrasonic atomizer according to claim 1, wherein said porous body is located on the surface of said ultrasonic atomizing sheet or outside the surface thereof within said vibration range of said ultrasonic atomizing sheet, and the vertical distance therebetween is 0 to 50 times the thickness of said ultrasonic atomizing sheet.

28. The ultrasonic atomizer according to claim 1, wherein said porous body is located on the surface of said ultrasonic atomizing sheet or outside the surface thereof within said vibration range of said ultrasonic atomizing sheet, and the vertical distance therebetween is 0 to 10 times the thickness of said ultrasonic atomizing sheet.

29. The ultrasonic atomizer according to claim 1, wherein the average pore diameter of the porous body is less than 100 μm.

30. The ultrasonic atomizer according to claim 1, wherein the average pore diameter of the porous body is 0.05 μm to 30 μm.

31. The ultrasonic atomizer according to claim 1, wherein the average pore diameter of the porous body is 0.5 μm to 10 μm.

32. The ultrasonic atomizer according to claim 1, wherein the porosity of the porous body is 20% to 80%.

33. The ultrasonic atomizer according to claim 1, wherein the porous body has a thickness of 0.01mm to 5 mm.

34. The ultrasonic atomizer according to claim 1, characterized in that the porous body material is selected from one or more ceramic, geopolymer, metal, glass, zeolite, carbon or plastic materials, and composite materials thereof.

35. The ultrasonic atomizer according to claim 1, wherein the porous body and the ultrasonic atomizing plate form an integrated or split structure.

36. The ultrasonic atomizer according to claim 1, characterized in that the porous body is substantially or generally a square, rhomboid, triangular, trapezoidal, polygonal, circular, elliptical or other flat body.

37. The ultrasonic atomizer according to claim 1, characterized in that said ultrasonic atomizing sheet further comprises a vibrating plate, and said piezoelectric ceramic plate is disposed on this vibrating plate.

38. The ultrasonic atomizer according to claim 37, wherein there is an overlapping area between said piezoelectric ceramic plate and said vibrating plate as viewed in a thickness direction.

39. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 30% or more of the entire area of one surface of the piezoelectric ceramic plate or the vibrating plate including the overlapped region.

40. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 50% or more of the entire area of a face of the piezoelectric ceramic plate or the vibrating plate including the overlapped region.

41. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 70% or more of the entire area of one surface of the piezoelectric ceramic plate or the vibrating plate including the overlapped region.

42. The ultrasonic atomizer according to claim 38, wherein the area of the overlapped region occupies at least 90% or more of the entire area of the piezoelectric ceramic plate or the one surface of the vibrating plate including the overlapped region.

43. The ultrasonic atomizer according to claim 38, characterized in that opposing electrodes are provided as piezoelectrically active regions on or/and between opposing surfaces at least in said overlapping area of said piezoceramic plate (I).

44. The ultrasonic atomizer according to claim 37, characterized in that the piezoelectric ceramic plate in the ultrasonic atomizing plate is substantially or generally a square body, at least one pair of opposite sides of which are fixed to the vibrating plate.

45. The ultrasonic atomizer according to claim 37, characterized in that the piezoceramic plate in the ultrasonic atomization plate is substantially or generally a square body, at least two relatively short sides of which are fixed to the vibration plate.

46. The ultrasonic atomizer according to claim 37, characterized in that the piezoceramic plate in the ultrasonic atomization sheet is substantially or generally a square body, at least four corners of which are fixed to the vibration plate.

47. The ultrasonic atomizer according to claim 37, wherein the piezoelectric ceramic plate in the ultrasonic atomization sheet is located on one side of the vibration plate, or on both sides thereof; or the piezoelectric ceramic plate is clamped or wrapped by the vibrating plate.

48. The ultrasonic atomizer according to claim 37, wherein said ultrasonic atomizing plate is of a sandwich structure, and is basically or mainly formed by attaching and fixing two piezoelectric ceramic plates and a vibrating plate, and said vibrating plate is fixedly held between said two piezoelectric ceramic plates, said two piezoelectric ceramic plates are connected in series, and said two piezoelectric ceramic plates are polarized in opposite directions, or said two piezoelectric ceramic plates are connected in parallel, and said two piezoelectric ceramic plates are polarized in the same direction, so as to realize flexural vibration.

49. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than half the thickness of said vibrating plate.

50. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than one tenth of the thickness of said vibrating plate.

51. The ultrasonic atomizer according to claim 37, wherein the distance between opposing electrodes in the piezoelectrically active area of said piezoelectric ceramic plate (I) is less than one percent of the thickness of said vibrating plate.

52. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than one thousand times the thickness of said vibrating plate.

53. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region in the piezoelectric ceramic plate (I) is 0.1 to 500 μm.

54. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region in the piezoelectric ceramic plate (I) is 0.5 μm to 50 μm.

55. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region in the piezoelectric ceramic plate (I) is 0.5 μm to 5 μm.

56. The ultrasonic atomizer according to claim 37, wherein the distance between the opposing electrodes in the piezoelectric active region of the inner electrode in the piezoelectric ceramic plate (I) is 1 μm to 3 μm, and the thickness of the surface electrode is 0.2 μm to 0.5 μm.

57. The ultrasonic atomizer according to claim 37, wherein at least one end or one side of the vibrating plate of the ultrasonic atomization plate is fixed.

58. The ultrasonic atomizer according to claim 37, characterized in that the vibrating plate of the ultrasonic atomizing plate is substantially or generally a square body in which at least two relatively short sides are fixed.

59. The ultrasonic atomizer according to claim 37, characterized in that the vibrating plate of the ultrasonic atomization plate is substantially or generally a square body, at least four corners of which are fixed.

60. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is selected from the group consisting of a metal plate, a resin or plastic plate, and a composite plate thereof.

61. The ultrasonic atomizer according to claim 37, wherein the vibrating plate is selected from a resin or a plastic plate having an elastic modulus of 500MPa to 1500MPa in a cured state.

62. The ultrasonic atomizer according to claim 37, wherein the thickness of the vibrating plate is 10 to 2000 μm.

63. The ultrasonic atomizer according to claim 37, wherein a mechanical quality factor Qm of the ultrasonic atomizing sheet formed by integrating the piezoelectric ceramic plate and the vibrating plate satisfies: qm is less than or equal to 5.0.

64. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is a metal plate having a length longer than that of said piezoelectric ceramic plate and electrically connected to a back surface electrode of the piezoelectric plate.

65. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is a metal plate having a thickness of 10 μm to 300 μm.

66. The ultrasonic atomizer according to claim 37, wherein said piezoelectric ceramic plate is fixed to a first surface of a vibrating plate at a position offset from a longitudinal direction of the vibrating plate, and the vibrating plate has an exposed portion at a second surface of the vibrating plate.

67. The ultrasonic atomizer according to claim 37, wherein a relationship between an area Am of said vibration plate and an area Ap of said piezoelectric ceramic plate satisfies: Am/Ap is more than or equal to 1.1 and less than or equal to 10.

68. The ultrasonic atomizer according to claim 37, wherein the vibrating plate has a larger outer shape than the piezoelectric ceramic plate, and the piezoelectric ceramic plate is bonded to a substantially central portion of a surface thereof.

69. An ultrasonic atomizer according to claim 37, wherein said vibrating plate has a larger outer shape than said piezoelectric ceramic plate, and is bonded to a substantially central portion of a surface thereof, said vibrating plate is a resin film, an area of said piezoelectric ceramic plate is 40 to 70% of an area of said vibrating plate, and said vibrating plate is thinner than a total thickness of said piezoelectric ceramic plate.

70. An ultrasonic atomizer according to claim 37, wherein said vibrating plate is made of a clad material having a cross section formed in a sandwich structure by bonding different materials to each other in a layer shape.

71. An ultrasonic atomizer according to claim 37, wherein said vibrating plate includes 2 surface layers constituting both surfaces of a clad material using a 1 st raw material, and an elastic material layer having a higher elasticity than said clad material, which is formed by bonding both surfaces thereof to said surface layers, respectively, between said 2 surface layers using a 2 nd raw material different from said 1 st raw material.

72. The ultrasonic atomizer according to claim 71, wherein said 1 st starting material has a thermal expansion coefficient within ± 50% of a thermal expansion coefficient of a piezoelectric ceramic plate to which said starting material is attached, and said 2 nd starting material has a density lower than that of said 1 st starting material.

73. The ultrasonic atomizer of claim 71, wherein the thickness of the surface layer is thinner than the thickness of the elastic material layer.

74. The ultrasonic atomizer according to claim 71, wherein the 1 st and 2 nd raw materials are respectively formed by one of a metal and a polymer resin or a light soft metal or an alloy sheet thereof.

75. An ultrasonic atomizer according to claim 37, wherein said vibrating plate is a membrane-like body to which said piezoelectric ceramic plate is attached, and said membrane-like body is fixed to a frame member provided at an outer peripheral portion of said membrane-like body in a state in which tension is applied thereto.

76. The ultrasonic atomizer according to claim 37, wherein said vibrating plate is a membrane-like body that is provided around said piezoelectric ceramic plate and elastically holds said piezoelectric ceramic plate; the vibrating plate is larger in size than the piezoelectric ceramics plate, and the piezoelectric ceramics plate is installed at a substantially central portion thereof.

77. The ultrasonic atomizer according to claim 1, characterized in that the piezoelectric ceramic plate or/and the porous body is substantially or generally a square body.

78. The ultrasonic atomizer according to claim 37, wherein the vibrating plate is substantially or generally square.

79. The ultrasonic atomizer according to claim 1, characterized in that the ultrasonic atomizing sheet is a generally elongated body.

80. The ultrasonic atomizer of claim 79, wherein said ultrasonic atomization sheet is a generally elongated body having a length to width ratio of not less than 1.5 but not more than 8.

81. The ultrasonic atomizer of claim 79, wherein said ultrasonic atomization sheet is generally elongated and has a length to width ratio of not less than 2 but not more than 6.

82. The ultrasonic atomizer according to claim 1, characterized by further comprising a container wall, wherein the container wall substantially or generally forms a container with a volume by itself, the ultrasonic atomization sheet and the porous body are substantially or generally not formed between the container, the ultrasonic atomization sheet is partially or completely disposed outside the container, the porous body is partially or completely disposed on a surface of the ultrasonic atomization sheet facing outside the container, the porous body is in communication with the container, and the ultrasonic atomization sheet and/or the porous body are or are not sandwiched by the container wall.

83. The ultrasonic atomizer according to claim 1, characterized by further comprising a container wall, the container wall substantially or generally forms a container having a volume together with the ultrasonic atomization sheet, the ultrasonic atomization sheet is a part of the container wall, the porous body is substantially or generally not formed between the containers, the porous body is partially or entirely disposed on the surface of the ultrasonic atomization sheet facing the outside of the container, and the porous body is communicated with the container.

84. The ultrasonic atomizer according to claim 1, characterized by further comprising a container wall, the container wall substantially or generally forms a container having a volume together with the porous body, the porous body is a part of a container wall, the ultrasonic atomizing sheet is substantially or generally not formed between the container, the ultrasonic atomizing sheet is partially or entirely disposed in the container and not disposed on a surface of the porous body, a distance is provided therebetween, a partial or entire area of the porous body coincides with the ultrasonic atomizing sheet as viewed in a thickness direction, or the ultrasonic atomizing sheet is partially or entirely disposed in the container and on a surface of the porous body facing an inside of the container, and the porous body communicates with the container.

85. The ultrasonic atomizer according to claim 1, further comprising a container wall, wherein the container wall substantially or generally forms a container with a volume together with the ultrasonic atomizing sheet and the porous body, the ultrasonic atomizing sheet is partially disposed on the surface of the porous body or the porous body is partially disposed on the surface of the ultrasonic atomizing sheet, a part of the surface of the ultrasonic atomizing sheet and a part of the surface of the porous body are not overlapped together, the ultrasonic atomizing sheet and the porous body jointly form a part of the container wall, the part of the ultrasonic atomizing sheet overlapped with the surface of the porous body is a surface inside the container, the part of the porous body overlapped with the surface of the ultrasonic atomizing sheet is a surface inside the container, or the ultrasonic atomizing sheet and the porous body are respectively a part of the container wall, and the ultrasonic atomizing sheet is not disposed on the surface of the porous body, a distance exists between the two, and a part or the whole area of the porous body is coincided with the ultrasonic atomization sheet when viewed from the thickness direction.

86. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein said ultrasonic atomizing plate or said piezoelectric ceramic plate and said container are constructed so as to satisfy the relationship fcav < fo, where fo is a resonance frequency of said ultrasonic atomizing plate or said piezoelectric ceramic plate and fcav is a resonance frequency of said container resonance cavity.

87. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein the container wall is provided with a support member for supporting the ultrasonic atomization sheet or/and the porous body.

88. The ultrasonic atomizer according to claim 87, characterized in that the container wall comprises a support portion placed on an inner ring of the wall or the support member is provided inside between walls facing each other, the support portion supporting the ultrasonic atomization sheet or/and an outer ring or a peripheral portion of the porous body; or the ultrasonic atomization sheet and/or the porous body may be supported on both sides by being sandwiched by the support member.

89. The ultrasonic atomizer according to claim 87, wherein said support member is further fixed or reinforced with said ultrasonic atomizing plate and/or said porous body portion or its peripheral portion supported thereby by an elastic adhesive.

90. The ultrasonic atomizer according to claim 87, characterized in that the container wall comprises a plurality of support members to support the ultrasonic atomization sheet or/and the porous body on at least two opposite sides of the ultrasonic atomization sheet or/and the porous body or at corners of the ultrasonic atomization sheet or/and the porous body.

91. The ultrasonic atomizer according to claim 87, wherein the inner circumferential surface of the container wall main body is formed with a stepped portion at a position intermediate in the height direction thereof, and the ultrasonic atomizing plate or/and the porous body are supported by contacting the stepped portion from below thereof.

92. The ultrasonic atomizer according to claim 87, wherein the container wall comprises a support portion for supporting the ultrasonic atomizing sheet or/and the porous body at the outer edge portion on the back side, the support portion being provided at four positions in the inner edge portion of the container wall so as to support four corner portions of the ultrasonic atomizing sheet or/and the porous body.

93. The ultrasonic atomizer according to claim 87, characterized in that the support members provided in the wall of the container are protrusions arranged to support the ultrasonic atomization sheet or/and the porous body at points near four corners.

94. The ultrasonic atomizer of claim 87, wherein said container wall comprises a platform disposed adjacent to said support portion, said platform being disposed below an upper surface of said support portion such that a gap is formed between said upper surface of said platform and a backside surface of said ultrasonic atomization sheet or/and said porous body, and an elastic adhesive is provided between said upper surface of said platform and said backside surface.

95. The ultrasonic atomizer according to claim 87, wherein the container comprises four side walls and steps provided in an annular arrangement on the inner peripheries of the four side walls, the container further comprises inner ends and inner connections for the respective inner ends, the inner connections of the respective inner ends having a bifurcated structure located in corners of the ultrasonic atomizing sheet, the respective support members are located at the four corners of the ultrasonic atomizing sheet in the respective steps and provided at positions lower than the respective steps, and upper surfaces of the ultrasonic atomizing sheet are substantially in height with upper surfaces of the inner connections of the respective inner ends.

96. The ultrasonic atomizer of claim 95, wherein said support members are substantially triangular in plan view and said support members are disposed on a common circumference.

97. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein a plurality of pedestals are provided at four corners of the container, and protrusions are provided on an upper surface of each pedestal so as to protrude therefrom, and bottom surfaces of the corners of the ultrasonic atomizing sheet or/and the porous body are substantially supported by the respective protrusions.

98. The ultrasonic atomizer according to claim 11, 82 to 85, characterized in that the container comprises a support portion arranged to support the ultrasonic atomizing sheet or/and the peripheral portion of the porous body so that the peripheral portion thereof is fixed to the support portion, and a support surface provided on the support portion, the support surface having an arcuate cross section with a center of curvature located in the vicinity of a lower surface of the ultrasonic atomizing sheet or/and the peripheral portion of the porous body.

99. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that the ultrasonic atomization sheet and/or the porous body is supported so as to be inserted between the support portion and the wall body and held, projecting from the side of the container wall body facing inward.

100. The ultrasonic atomizer according to claim 11, 82 to 85, characterized in that the container wall comprises an annular projection, and the ultrasonic atomization sheet or/and the support portion of the porous body comprise an outwardly projecting mounting flange and have an outer diameter larger than an inner diameter of the annular projection, whereby when the ultrasonic atomization sheet or/and the porous body is inserted into the wall body, the mounting flange of the ultrasonic atomization sheet or/and the porous body is forced over the annular projection so that it is positioned within the wall body.

101. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that the protrusion of the container is substantially or generally square.

102. The ultrasonic atomizer according to any one of claims 1 to 101, wherein the ultrasonic atomization sheet further includes an elastic adhesive body interposed between a 1 st surface, which is one surface of the ultrasonic atomization sheet on which the piezoelectric ceramic plate is bent, and one main surface of the vibration plate, and joining the 1 st surface of the piezoelectric ceramic plate and the one main surface of the vibration plate, and at least a part of the elastic adhesive body is composed of a deformable viscoelastic body.

103. The ultrasonic atomizer according to claim 102, wherein said elastic bonded body is softer and more deformable than said vibration plate, and has a smaller elastic modulus and rigidity than said vibration plate.

104. The ultrasonic atomizer of claim 102, wherein said elastic bonding body has a thickness greater than an amplitude of bending vibration of said piezoceramic sheet.

105. The ultrasonic atomizer of claim 102, wherein said elastic bonding body comprises at least a base layer and an adhesive layer comprising said viscoelastic body.

106. The ultrasonic atomizer according to claim 102, wherein said elastic adhesive body has a 3-layer structure comprising 2 adhesive layers and said base layer disposed between said 2 adhesive layers.

107. The ultrasonic atomizer according to claim 105, wherein the base layer is composed of a nonwoven fabric and the viscoelastic body interposed between fibers of the nonwoven fabric.

108. The ultrasonic atomizer according to claim 102, characterized in that the viscoelastic body is present in all cross sections of the elastic bonding body between the surface on the piezoelectric ceramic plate side and the surface on the vibrating plate side.

109. The ultrasonic atomizer according to claim 102, wherein the vibrating plate is fixed to the support body via a 2 nd elastic bonding body at least a part of which is composed of a viscoelastic body.

110. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that it further comprises an elastic adhesive body interposed between a 1 st surface, which is one surface of the ultrasonic atomizing sheet on which the piezoelectric ceramic plate is bent, and one main surface of the vibrating plate, and joining the 1 st surface of the piezoelectric ceramic plate to the one main surface of the vibrating plate, and at least a part of the elastic adhesive body is composed of a deformable viscoelastic body; and/or, between the ultrasonic atomization sheet and the porous body; and/or between them and the container walls and container.

111. The ultrasonic atomizer according to claims 1 to 101, characterized in that the ultrasonic atomizing plate is further used in combination with a protective coating.

112. The ultrasonic atomizer according to any one of claims 1 to 101, wherein the ultrasonic atomization sheet further comprises a pair of terminals for internal electrical connection and/or external electrical connection of both electrodes of the piezoelectric vibrating piece in the ultrasonic atomization sheet, and/or a conductive adhesive for fixing and electrical connection of the internal electrical connection and/or the external electrical connection.

113. The ultrasonic atomizer according to claim 112, wherein said interconnector has a bifurcated structure located in a corner of said piezoelectric vibrating piece.

114. The ultrasonic atomizer according to claim 112, wherein said terminal comprises a conductive member electrically connected to both electrodes of a piezoelectric vibrating piece in said ultrasonic atomizing plate by conductive paste, respectively.

115. The ultrasonic atomizer according to claim 11 or 82 to 85, wherein the ultrasonic atomizing plate further comprises a pair of terminals for internal electrical connection and/or external electrical connection of both electrodes of the piezoelectric vibrating piece in the ultrasonic atomizing plate, and/or a conductive adhesive for fixing and electrical connection of the internal electrical connection and/or the external electrical connection, and the terminals are provided at a position of or near a support member included in a wall body of the ultrasonic atomizer container.

116. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that it further comprises a pair of terminals having an inner connection exposed in the vicinity of the supporting member of the container wall and an outer connection exposed on the outer surface of the container wall and electrically connected to the inner connection; and a conductive adhesive; wherein two electrodes of the piezoelectric vibrating piece in the ultrasonic atomization piece are respectively and electrically connected with the internal connection of the terminal by conductive adhesive.

117. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that the ultrasonic atomizer comprises a pair of terminals having an inner connection exposed near the support member of the container wall of the ultrasonic atomizer and an outer connection exposed on the outer surface of the container wall and electrically connected to the inner connection; a first adhesive layer applied on a shortest path connecting a piezoelectric vibrating piece and an inner connection in the ultrasonic atomization sheet, the shortest path being located between the outer periphery and the inner connection in the ultrasonic atomization sheet, thereby fixing the ultrasonic atomization sheet with a container; a conductive adhesive layer for electrically connecting an electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and an internal connection of a terminal, the conductive adhesive layer being interposed between the electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and the internal connection by bypassing a shortest connection path between the piezoelectric vibrating piece in the ultrasonic atomization sheet and the internal connection via an upper surface of the first adhesive layer; and a second adhesive layer for sealing a gap between the outer periphery of the ultrasonic atomization sheet and the inner periphery of the container, wherein the Young's modulus of the first and second adhesive layers after curing is smaller than that of the conductive adhesive.

118. The ultrasonic atomizer of claim 117, wherein the viscosity of the first layer of glue is higher than the viscosity of the second layer of glue before curing.

119. The ultrasonic atomizer of claim 117, wherein the first layer of adhesive is applied partially around the four corners of the ultrasonic atomization sheet.

120. The ultrasonic atomizer of claim 119, wherein the conductive paste is applied proximate at least two of the four corners of the piezoelectric diaphragm.

121. The ultrasonic atomizer according to claim 11 or 82 to 85, characterized in that it further comprises a pair of terminals fixed to said container wall so that the internal connection part is exposed on the inner ring of said container wall; and a conductive paste applied and solidified between an electrode of the piezoelectric vibrating piece in the ultrasonic atomization sheet and an internal connection portion of a terminal so that the conductive paste electrically connects the lead electrode to the internal connection portion of the terminal, wherein one of the conductive pastes is applied and solidified between the internal connection portion of the first end of the terminal and one of the electrodes in the vicinity of one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, and another conductive paste is applied and solidified between the internal connection portion of the second end of the terminal and another electrode in the vicinity of another corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet, the another corner being adjacent to one corner of the piezoelectric vibrating piece in the ultrasonic atomization sheet.

122. The ultrasonic atomizer according to claim 121, wherein a position of application of the conductive paste faces a position of application of another conductive paste with a piezoelectric vibrating piece of the ultrasonic atomizing sheet interposed therebetween.

123. The ultrasonic atomizer according to claim 121, wherein a position of application of one of said conductive pastes and a position of application of the other conductive paste are on one side of a piezoelectric vibrating piece in said ultrasonic atomizing sheet and are close to both corners on both ends of said one side.

124. The ultrasonic atomizer according to claim 121, further comprising an elastic adhesive applied between said piezoelectric vibrating piece and said terminal in said ultrasonic atomizing sheet, and said conductive paste is applied on said elastic adhesive.

125. An ultrasonic atomizer comprising an ultrasonic atomizing plate having a vibrating plate which is larger in outer shape than a piezoelectric ceramic plate and to which the piezoelectric ceramic plate is bonded at a substantially central portion of a surface thereof, wherein opposed electrodes are provided as piezoelectric active regions on opposed surfaces of the piezoelectric ceramic plate or between the opposed surfaces, or adjacent interdigital electrodes are provided as piezoelectric active regions on the surface of the piezoelectric ceramic plate or in a layer below the surface thereof (application of an alternating current between the electrodes causes the ultrasonic atomizing plate to vibrate in a thickness direction thereof, and the vibration causes atomization of a liquid in a porous body to be described below); a porous body having a thickness direction and a length or/and a width direction or/and a radial direction conductivity and substantially stably maintaining its form during atomization and in an atomized liquid; and a frame-type container wall for accommodating the ultrasonic atomization sheet; at least 30% of the area of the porous body having the pores coincides with the piezoelectric active region of the piezoelectric vibrating plate or at least 30% of the area of the piezoelectric active region of the piezoelectric vibrating plate coincides with the area of the porous body having the pores, as viewed in the thickness direction.

126. The ultrasonic atomizer according to claim 125, wherein an area of said piezoelectric ceramic plate is 40 to 70% of an area of said vibrating plate.

127. The ultrasonic atomizer according to claim 125, wherein a frame-shaped support portion having a larger outer shape than the piezoelectric ceramic plate is provided on an inner peripheral portion of the wall of the frame container, and an outer peripheral portion of the vibrating plate, to which the piezoelectric ceramic plate is not bonded, is supported by the support portion of the wall of the frame container.

128. The ultrasonic atomizer according to claim 125, wherein said vibrating plate is a metal foil.

129. The ultrasonic atomizer according to claim 125, wherein said vibrating plate is a resin film.

130. An ultrasonic atomizer characterized by having: a membrane body; a frame-type container wall body provided on an outer peripheral portion of the film body; a piezoelectric ceramic plate which is provided on the membrane body within the frame of the wall body of the frame-type container and forms an ultrasonic atomization sheet together with the membrane body, wherein opposing electrodes are provided as piezoelectric active regions on opposing surfaces of the piezoelectric ceramic plate or between the opposing surfaces, or adjacent interdigital electrodes are provided on the surface of the piezoelectric ceramic plate or in a layer below the surface of the piezoelectric ceramic plate as piezoelectric active regions (application of an alternating current between the electrodes causes the ultrasonic atomization sheet to vibrate in its thickness direction, and the vibration causes atomization of a liquid in a porous body described below); and a porous body which has a conductivity in a thickness direction and a length direction or/and a width direction or/and a radial direction and which substantially stably maintains its form during atomization and in a liquid to be atomized, the porous body being provided in a frame of the frame member so as to cover the piezoelectric ceramic plate, the porous body being fixed to the frame member in a state in which tension is applied to the porous body.

131. The ultrasonic atomizer of claim 130, wherein said frame member is formed of a material that is less deformable than said porous body, said porous body being bonded to said frame member.

132. The ultrasonic atomizer of claim 130, wherein the porous body comprises a resin having a young's modulus of 1MPa to 1 GPa.

133. The ultrasonic atomizer of claim 130, wherein the membrane is comprised of a resin.

134. The ultrasonic atomizer of claim 133, wherein the young's modulus of said resin is in the range of 1MPa to 1 GPa.

135. The ultrasonic atomizer according to claim 130, wherein said frame member has a first frame member and a second frame member, and wherein an outer peripheral portion of said membrane body is sandwiched between said first frame member and said second frame member.

136. The ultrasonic atomizer according to claim 25, wherein said piezoelectric ceramic plate further comprises resin layers provided so as to cover substantially all of the front and rear surfaces of the laminated body.

137. The ultrasonic atomizer according to claim 37, characterized in that the distance between opposing electrodes in the piezoelectrically active area in said piezoelectric ceramic plate (I) is less than one ten thousandth of the thickness of said vibrating plate.

138. The ultrasonic atomizer according to claim 1, characterized in that the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 10nm to 1mm, respectively.

139. The ultrasonic atomizer according to claim 1, wherein the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 20nm to 500 μm, respectively.

140. The ultrasonic atomizer according to claim 1, wherein the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 40nm to 200 μm, respectively.

141. The ultrasonic atomizer according to claim 1, wherein the finger width of the interdigital electrode or the distance between adjacent interdigital electrodes is 80nm to 100 μm, respectively.

142. The ultrasonic atomizer according to claim 1, wherein the effective length of piezoelectric activity of the interdigital electrode finger is 0.5mm to 30 mm.

143. The ultrasonic atomizer according to claim 1, wherein the finger width of said interdigital electrode is substantially equal to the distance between the adjacent interdigital electrode fingers.

144. The ultrasonic atomizer according to claim 1, wherein said interdigital electrodes are selected from the group consisting of fence electrodes.

145. The ultrasonic atomizer according to claim 1, wherein the interdigital electrode fingers of the same polarity are connected or communicated with the same bus bar, and the interdigital electrode (finger) of the other polarity is connected or communicated with the other bus bar.

146. The ultrasonic atomizer according to claim 1, wherein said interdigital electrodes are provided on or/and in a lower layer of the opposite surfaces of said piezoelectric ceramic plate.

147. The ultrasonic atomizer according to claim 149, wherein the polarity of said first interdigital electrode on the upper surface is opposite to the polarity of said first interdigital electrode on the lower surface, and said interdigital electrodes on both said upper and lower surfaces are counted from the same end of said piezoelectric ceramic plate.

148. The ultrasonic atomizer according to claim 149, wherein said interdigital electrodes are substantially symmetrically disposed on or/and in a lower layer on opposite surfaces of said piezoceramic plate.

149. The ultrasonic atomizer according to claim 1, wherein the frequency range of the alternating current is 10kHz to 500 MHz.

150. The ultrasonic atomizer according to claim 1, wherein the frequency range of the alternating current is 20kHz to 100 MHz.

151. The ultrasonic atomizer according to claim 1, wherein the natural frequency of the piezoelectric active region of the piezoelectric ceramic plate is substantially the same as the frequency of the alternating current.

152. An electronic cigarette device characterized by comprising the ultrasonic atomizer according to claims 1 to 151.

153. An electronic vaping device according to claim 152, further comprising a heating element configured to heat the aerosol atomized by the ultrasonic atomizer.