阅读说明：本技术 一种rf探针薄膜与探针台光学自动贴合装置与方法 (Device and method for optically and automatically attaching RF probe film and probe station ) 是由 于海超 徐兴光 赵梁玉 于 2021-07-23 设计创作，主要内容包括：本发明一种RF探针薄膜与探针台光学自动贴合装置与方法属于MEMS加工和半导体芯片测试技术领域；该贴合装置包括探针台单元,探针薄膜单元,出胶单元和测距单元；所述探针台单元包括：探针台,探针台底座,探针台相机,X轴平台,Y轴平台和Z轴平台；所述探针薄膜单元包括：探针薄膜,探针薄膜底座,探针薄膜相机和探针薄膜台升降台；所述出胶单元包括：胶桶,针头和伺服推杆；所述测距单元包括测距传感器；该贴合方法通过真空吸附方法固定探针台和探针薄膜,利用光学自动检测手段,先后将探针台调整到滴胶工位完成滴胶和移动到探针薄膜下方进行粘贴；本发明能够实现探针薄膜与探针台自动贴合,贴合精度高,平面度高,滴胶精确,良品率高。(The invention relates to an optical automatic laminating device and method for an RF probe film and a probe station, belonging to the technical field of MEMS processing and semiconductor chip testing; the laminating device comprises a probe station unit, a probe film unit, a glue outlet unit and a distance measuring unit; the probe station unit includes: the device comprises a probe station, a probe station base, a probe station camera, an X-axis platform, a Y-axis platform and a Z-axis platform; the probe film unit includes: the probe film lifting platform comprises a probe film, a probe film base, a probe film camera and a probe film platform lifting platform; the play gluey unit includes: the rubber barrel, the needle head and the servo push rod; the distance measuring unit comprises a distance measuring sensor; the attaching method fixes a probe station and a probe film by a vacuum adsorption method, and adjusts the probe station to a glue dripping station to finish glue dripping and move to the lower part of the probe film for attaching by an optical automatic detection means; the invention can realize the automatic fitting of the probe film and the probe station, and has the advantages of high fitting precision, high flatness, accurate glue dripping and high yield.)

1. An automatic laminating device of RF probe film and probe platform optics, its characterized in that includes: the device comprises a probe table unit, a probe film unit, a glue outlet unit and a distance measuring unit;

the probe station unit includes: the device comprises a probe station (1), a probe station base (2), a probe station camera (5), an X-axis platform (7), a Y-axis platform (8) and a Z-axis platform (9); the probe platform (1) is vacuum-adsorbed above the probe platform base (2), an X-axis platform (7), a Y-axis platform (8) and a Z-axis platform (9) are arranged below the probe platform base (2), and the probe platform base (2) bears the probe platform (1) to perform three-dimensional translation under the driving of the X-axis platform (7), the Y-axis platform (8) and the Z-axis platform (9); the probe station (1) is provided with a probe station mark, and a probe station camera (5) arranged above the probe station (1) determines the position of the probe station (1) by identifying the probe station mark;

the probe film unit includes: the probe film lifting platform comprises a probe film (3), a probe film base (4), a probe film camera (6) and a probe film platform lifting platform (13); the probe film (3) is adsorbed below the probe film base (4) in a vacuum manner, a probe film platform lifting platform (13) is arranged above the probe film base (4), and the probe film base (4) bears the probe film (3) to move up and down under the driving of the probe film platform lifting platform (13); a film mark is arranged on the probe film (3), and a probe film camera (6) arranged below the probe film (3) identifies the film mark to determine the position of the probe film (3);

the play gluey unit includes: a glue barrel (10), a needle head (11) and a servo push rod (12); glue is placed in the glue barrel (10), the needle head (11) is installed at the end part of the glue barrel (10), the servo push rod (12) is arranged in the glue barrel (10), and the glue is extruded out from the needle head (11) under the pushing of the servo push rod (12);

the distance measuring unit comprises a distance measuring sensor (14), wherein the distance measuring sensor (14) is used for measuring the distance between the probe platform (1) and the probe film (3).

2. The device for optically and automatically attaching the RF probe film to the probe station as claimed in claim 1, wherein the base (2) of the probe station is designed with a groove, the groove is provided with a channel, the probe station (1) is placed in the groove, and the groove is vacuumized through the channel, so that the probe station (1) is vacuum-absorbed above the base (2) of the probe station.

3. The device for optically and automatically attaching the RF probe film to the probe station as claimed in claim 1, wherein the probe film base (4) is designed with a boss, the boss is provided with a channel, the probe film (3) is placed under the boss, the probe film (3) is fixed by a positioning pin, the boss is vacuumized through the channel, the probe film (3) is vacuum-absorbed under the probe film base (4), and then the positioning pin is removed.

4. The apparatus according to claim 1, wherein the servo pusher (12) has a minimum movement distance of 1 μm.

5. The apparatus according to claim 1, wherein the distance measuring sensor (14) is mounted on the X-axis stage (7), the Y-axis stage (8) or the Z-axis stage (9).

6. The device for automatically optically laminating the RF probe film and the probe station as claimed in claim 1, wherein the probe station camera (5), the probe film camera (6), the X-axis platform (7), the Y-axis platform (8), the Z-axis platform (9), the servo push rod (12), the probe film station lifting platform (13) and the range sensor (14) are all connected with a PC, and under the control of the PC, the probe station camera (5), the probe film camera (6), the X-axis platform (7), the Y-axis platform (8), the Z-axis platform (9), the servo push rod (12), the probe film station lifting platform (13) and the range sensor (14) work in cooperation.

7. An optical automatic bonding method for an RF probe film and a probe station is characterized by comprising the following steps:

step a, vacuum-absorbing a probe table (1) above a probe table base (2);

b, vacuum-adsorbing the probe film (3) below the probe film base (4);

c, imaging the probe station (1) by the probe station camera (5), acquiring the marked position of the probe station, obtaining the position information of the probe station (1) and feeding back the position information to the PC;

d, imaging the probe film (3) by the probe film camera (6), acquiring the position information of the probe film (3) by acquiring the film mark position, and feeding back the position information to the PC;

step e, the PC controls the X-axis platform (7), the Y-axis platform (8) and the Z-axis platform (9) according to the position of the probe platform (1) to adjust the probe platform (1) to a glue dripping station;

step f, the PC controls the servo push rod (12) to realize the glue dripping or the linear glue dripping of the glue outlet unit;

step g, the PC controls the X-axis platform (7), the Y-axis platform (8) and the Z-axis platform (9) according to the position of the probe platform (1) and the position of the probe film (3), and moves the probe platform (1) to the position below the probe film (3);

step h, the PC controls the lifting platform (13) of the probe film platform to move downwards according to the distance from the probe platform (1) to the probe film (3) obtained by the ranging sensor (14), so that the distance between the probe platform (1) and the probe film (3) reaches a threshold value;

step i, cooling and solidifying the glue;

and j, breaking vacuum of the probe platform base (2) and the probe film base (4), controlling the probe film platform lifting platform (13) to move upwards by the PC, and taking out the workpiece after the probe platform (1) and the probe film (3) are attached.

Technical Field

The invention discloses an optical automatic laminating device and method for an RF probe film and a probe station, and belongs to the technical field of MEMS processing and semiconductor chip testing.

Background

In the manufacturing process of the MEMS semiconductor probe card, a probe film produced by the processes of photoetching, etching, micro electroforming, chemical mechanical polishing and the like needs to be attached to a probe table through special glue; at present, a probe film and a probe station are mainly attached manually, and the attaching mode has the following technical problems:

firstly, manual laminating operation is inconvenient, and the position precision is not high;

secondly, the traditional probe station is fastened with the base through a screw, and after the probe film is attached, the probe film is easy to bend when the screw is detached due to the fact that the area of the film is larger than that of the probe station and the height of the probe station is very low, and the probe is damaged seriously;

thirdly, the probe film is mechanically pressed in the traditional manual laminating process, so that the flatness of the probe film is difficult to ensure;

fourthly, manual glue dripping is also adopted in the traditional manual gluing process, the glue dripping speed is low, the glue dripping amount is difficult to control accurately, if the glue dripping amount is too small, the gluing of the probe film and the probe table is not firm, the service life of the probe card is influenced, if the glue dripping amount is too large, the solidification of the non-gluing part of the probe film is caused, the flexibility of the probe film in the up-and-down movement is influenced, and the service life of the probe card is also influenced;

in a word, the manual bonding mode has the technical problems of inaccurate bonding position, low flatness, inaccurate glue dripping, low yield and the like; however, no device for automatically attaching the probe film to the probe station is available in the market.

Disclosure of Invention

The invention discloses an optical automatic laminating device and method for an RF probe film and a probe station, aiming at a series of technical problems existing in a manual laminating mode of the probe film and the probe station, and the optical automatic laminating device and method can replace manual laminating and have the technical advantages of high laminating precision, high flatness, accurate glue dripping and high yield.

The purpose of the invention is realized as follows:

an optical automatic bonding device for an RF probe film and a probe station comprises: the device comprises a probe table unit, a probe film unit, a glue outlet unit and a distance measuring unit;

the probe station unit includes: the device comprises a probe station, a probe station base, a probe station camera, an X-axis platform, a Y-axis platform and a Z-axis platform; the probe station is vacuum-adsorbed above the probe station base, an X-axis platform, a Y-axis platform and a Z-axis platform are arranged below the probe station base, and the probe station base bears the probe station to perform three-dimensional translation under the driving of the X-axis platform, the Y-axis platform and the Z-axis platform; the probe station is provided with a probe station mark, and a probe station camera arranged above the probe station determines the position of the probe station by identifying the probe station mark;

the probe film unit includes: the probe film lifting platform comprises a probe film, a probe film base, a probe film camera and a probe film platform lifting platform; the probe film is adsorbed below the probe film base in a vacuum mode, a probe film platform lifting table is arranged above the probe film base, and the probe film base bears the probe film to move up and down under the driving of the probe film platform lifting table; the probe film is provided with a film mark, and a probe film camera arranged below the probe film determines the position of the probe film by recognizing the film mark;

the play gluey unit includes: the rubber barrel, the needle head and the servo push rod; glue is placed in the glue barrel, the needle head is installed at the end part of the glue barrel, the servo push rod is arranged in the glue barrel, and the glue is extruded out of the needle head under the pushing of the servo push rod;

the distance measuring unit comprises a distance measuring sensor, and the distance measuring sensor is used for measuring the distance between the probe platform and the probe film.

According to the automatic optical laminating device for the RF probe film and the probe station, the base of the probe station is provided with the groove, the groove is provided with the channel, the probe station is placed in the groove, the groove is vacuumized through the channel, and the probe station is vacuum-adsorbed above the base of the probe station.

Above-mentioned RF probe film and probe platform optics automatic laminating device, probe film base design has the boss, the boss is opened there is the passageway, places the probe film the boss below to it is fixed with the probe film to use the locating pin, through the passageway with the boss evacuation, realize probe film vacuum adsorption in probe film base below, remove the locating pin again.

According to the automatic optical laminating device for the RF probe film and the probe station, the minimum movement distance of the servo push rod is 1 micrometer.

According to the automatic optical laminating device for the RF probe film and the probe station, the distance measuring sensor is installed on the X-axis platform, the Y-axis platform or the Z-axis platform.

Above-mentioned RF probe film and probe station optics automatic laminating device, probe platform camera, probe film camera, X axle platform, Y axle platform, Z axle platform, servo push rod, probe film platform elevating platform and range finding sensor all connect the PC, under the PC control, probe platform camera, probe film camera, X axle platform, Y axle platform, Z axle platform, servo push rod, probe film platform elevating platform and range finding sensor collaborative work.

An optical automatic bonding method of an RF probe film and a probe station comprises the following steps:

step a, vacuum-absorbing a probe station above a probe station base;

b, vacuum adsorbing the probe film below the probe film base;

c, imaging the probe station by the probe station camera, acquiring the marked position of the probe station, acquiring the position information of the probe station, and feeding back the position information to the PC;

d, imaging the probe film by the probe film camera, acquiring the position information of the probe film by acquiring the film mark position, and feeding back the position information to the PC;

e, the PC controls the X-axis platform, the Y-axis platform and the Z-axis platform according to the position of the probe station, and adjusts the probe station to a glue dripping station;

step f, the PC controls the servo push rod to realize glue unit glue dripping or linear glue dripping;

step g, the PC controls the X-axis platform, the Y-axis platform and the Z-axis platform according to the position of the probe platform and the position of the probe film, and moves the probe platform to the lower part of the probe film;

step h, the PC controls the lifting platform of the probe film platform to move downwards according to the distance from the probe platform to the probe film obtained by the distance measuring sensor, so that the distance between the probe platform and the probe film reaches a threshold value;

step i, cooling and solidifying the glue;

and j, breaking vacuum of the probe platform base and the probe film base, controlling the probe film platform lifting platform to move upwards by the PC, and taking out the workpiece after the probe platform and the probe film are attached.

Has the advantages that:

the invention provides an optical automatic laminating device and method for an RF probe film and a probe station.

Secondly, in the invention, a vacuum adsorption mode is adopted between the probe station and the probe station base to replace the traditional screw fastening mode, so that the problem of probe damage caused by bending of a probe film when the screw is disassembled is effectively avoided.

Thirdly, in the invention, the probe film and the probe film base adopt a vacuum adsorption mode to replace the traditional mode of mechanically flattening the probe film by the probe film base, so that the flatness of the probe film can be below 10 microns.

The invention also provides a glue discharging unit which replaces the traditional manual glue dripping mode, not only is the glue dripping speed high, but also the glue dripping amount can be accurately controlled, the problem that the joint of the probe film and the probe table is not firm due to too little glue dripping or the solidification of the non-joint part of the probe film is caused due to too much glue dripping in the traditional mode is effectively solved, and the service life of the probe card is further prolonged.

Drawings

FIG. 1 is a schematic structural diagram of an automatic optical bonding apparatus for an RF probe film and a probe station according to the present invention.

Fig. 2 is a schematic structural view of a probe station vacuum-adsorbed on a base of the probe station.

FIG. 3 is a schematic diagram of a structure of a probe film vacuum-adsorbed on a probe film base.

Fig. 4 is a schematic structural view of the glue discharging unit.

FIG. 5 is a flow chart of the method for optically and automatically bonding the RF probe film to the probe stage according to the present invention.

In the figure: the probe comprises a probe table 1, a probe table base 2, a probe film 3, a probe film base 4, a probe table camera 5, a probe film camera 6, a probe film camera 7X-axis platform, a probe table 8Y-axis platform 9Z-axis platform 10 glue barrel, a probe head 11, a servo push rod 12, a probe film table lifting table 13 and a ranging sensor 14.

Detailed Description

The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.

Detailed description of the invention

The following is a specific embodiment of the present invention of an apparatus for optically and automatically bonding an RF probe film and a probe stage.

The schematic structural diagram of the automatic optical bonding apparatus for an RF probe film and a probe stage according to this embodiment is shown in fig. 1, and the automatic optical bonding apparatus for an RF probe film and a probe stage includes: the device comprises a probe table unit, a probe film unit, a glue outlet unit and a distance measuring unit;

the probe station unit includes: the device comprises a probe station 1, a probe station base 2, a probe station camera 5, an X-axis platform 7, a Y-axis platform 8 and a Z-axis platform 9; the probe station 1 is vacuum-adsorbed above the probe station base 2, as shown in fig. 2; an X-axis platform 7, a Y-axis platform 8 and a Z-axis platform 9 are arranged below the probe station base 2, and the probe station base 2 bears the probe station 1 to perform three-dimensional translation under the driving of the X-axis platform 7, the Y-axis platform 8 and the Z-axis platform 9; the probe station 1 is provided with a probe station mark, and a probe station camera 5 arranged above the probe station 1 determines the position of the probe station 1 by identifying the probe station mark;

the probe film unit includes: a probe film 3, a probe film base 4, a probe film camera 6 and a probe film platform lifting platform 13; the probe film 3 is vacuum-absorbed below the probe film base 4, as shown in fig. 3; a probe film platform lifting platform 13 is arranged above the probe film base 4, and the probe film base 4 bears the probe film 3 to move up and down under the driving of the probe film platform lifting platform 13; a film mark is arranged on the probe film 3, and the probe film camera 6 arranged below the probe film 3 identifies the film mark to determine the position of the probe film 3;

the play gluey unit includes: a glue barrel 10, a needle 11 and a servo push rod 12; glue is placed in the glue barrel 10, the needle 11 is installed at the end of the glue barrel 10, the servo push rod 12 is arranged in the glue barrel 10, and the glue is extruded from the needle 11 under the pushing of the servo push rod 12, as shown in fig. 4;

the ranging unit includes a ranging sensor 14, and the ranging sensor 14 is used for measuring the distance between the probe station 1 and the probe film 3.

Detailed description of the invention

The following is a specific embodiment of the present invention of an apparatus for optically and automatically bonding an RF probe film and a probe stage.

According to the automatic optical laminating device for the RF probe film and the probe station, on the basis of the first specific embodiment, the groove is designed in the probe station base 2, a channel is formed in the groove, the probe station 1 is placed in the groove, the groove is vacuumized through the channel, and the probe station 1 is vacuumed above the probe station base 2.

Above-mentioned technical scheme provides a concrete implementation method for probe platform 1 vacuum adsorption above probe platform base 2.

Detailed description of the invention

The following is a specific embodiment of the present invention of an apparatus for optically and automatically bonding an RF probe film and a probe stage.

The automatic laminating device of RF probe film and probe platform optics under this embodiment on the basis of embodiment one, further inject probe film base 4 design has the boss, the boss is opened there is the passageway, places probe film 3 the boss below to fix probe film 3 with the locating pin, through the passageway with the boss evacuation, realize probe film 3 vacuum adsorption in probe film base 4 below, remove the locating pin again.

Above-mentioned technical scheme provides a concrete implementation method for probe film 3 vacuum adsorption below probe film base 4.

Detailed description of the invention

The following is a specific embodiment of the present invention of an apparatus for optically and automatically bonding an RF probe film and a probe stage.

In the automatic optical bonding apparatus for an RF probe film and a probe station according to the present embodiment, on the basis of the first embodiment, the minimum movement distance of the servo rod 12 is further limited to 1 μm.

Detailed description of the invention

The following is a specific embodiment of the present invention of an apparatus for optically and automatically bonding an RF probe film and a probe stage.

In the automatic optical bonding device for the RF probe film and the probe station according to the present embodiment, on the basis of the first embodiment, the distance measuring sensor 14 is further limited to be mounted on the X-axis stage 7, the Y-axis stage 8 or the Z-axis stage 9.

Detailed description of the invention

The following is a specific embodiment of the present invention of an apparatus for optically and automatically bonding an RF probe film and a probe stage.

In the automatic optical bonding device for the RF probe film and the probe station in this embodiment, on the basis of the first specific embodiment, the probe station camera 5, the probe film camera 6, the X-axis platform 7, the Y-axis platform 8, the Z-axis platform 9, the servo push rod 12, the probe film station lift table 13 and the distance measuring sensor 14 are all connected to a PC, and under the control of the PC, the probe station camera 5, the probe film camera 6, the X-axis platform 7, the Y-axis platform 8, the Z-axis platform 9, the servo push rod 12, the probe film station lift table 13 and the distance measuring sensor 14 work cooperatively.

Detailed description of the invention

The following is a specific embodiment of the present invention of an optical automated bonding method for an RF probe film and a probe station.

In the method for optically and automatically bonding an RF probe film to a probe stage according to this embodiment, a flowchart is shown in fig. 5, and the method for optically and automatically bonding an RF probe film to a probe stage includes the following steps:

step a, vacuum-absorbing a probe station 1 above a probe station base 2;

step b, the probe film 3 is absorbed under the probe film base 4 in vacuum;

c, imaging the probe station 1 by the probe station camera 5, acquiring the position information of the probe station 1 by acquiring the marked position of the probe station, and feeding back the position information to the PC;

d, the probe film camera 6 images the probe film 3, obtains the position information of the probe film 3 by obtaining the film mark position and feeds the information back to the PC;

step e, the PC controls the X-axis platform 7, the Y-axis platform 8 and the Z-axis platform 9 according to the position of the probe station 1, and adjusts the probe station 1 to a glue dripping station;

step f, the PC controls the servo push rod 12 to realize the glue dripping or the linear glue dripping of the glue outlet unit;

step g, the PC controls the X-axis platform 7, the Y-axis platform 8 and the Z-axis platform 9 according to the position of the probe platform 1 and the position of the probe film 3, and moves the probe platform 1 to the lower part of the probe film 3;

step h, the PC controls the lifting platform 13 of the probe film platform to move downwards according to the distance from the probe platform 1 to the probe film 3 obtained by the distance measuring sensor 14, so that the distance between the probe platform 1 and the probe film 3 reaches a threshold value;

step i, cooling and solidifying the glue;

and j, breaking vacuum of the probe platform base 2 and the probe film base 4, controlling the probe film platform lifting platform 13 to move upwards by the PC, and taking out the workpiece after the probe platform 1 and the probe film 3 are attached.

The above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.