阅读说明：本技术 超硬材料的高密度微透镜阵列制造装置及方法 (Device and method for manufacturing high-density microlens array of superhard material ) 是由 周天丰 刘晓华 艺苑 阮本帅 梁志强 焦黎 王西彬 于 2019-04-15 设计创作，主要内容包括：本发明公开了一种超硬材料的高密度微透镜阵列制造装置及方法,装置包括移动平台、筛网、旋转球体、喷射装置和旋转驱动装置,移动平台能在竖直及水平面上移动,筛网固定于移动平台上方并开设有直径不大于旋转球体直径的通孔,喷射装置用于喷洒磨削颗粒悬浮液,旋转驱动装置用于驱动旋转球体旋转。方法包括步骤一：旋转球体与超硬材料基体的上表面接触；步骤二：旋转球体旋转带动磨削颗粒悬浮液磨削超硬材料基体表面；步骤三：水平移动移动平台,旋转球体与超硬材料基体的上表面其他位置接触；步骤四：重复步骤二和步骤三,得到高密度微透镜阵列。本发明能够在超硬材料表面制造高密度、小间距的微透镜阵列,并且成本低,制作效率高。(The invention discloses a device and a method for manufacturing a high-density microlens array of a superhard material. The method comprises the following steps: the rotary sphere is contacted with the upper surface of the superhard material substrate; step two: the rotating ball body rotates to drive the grinding particle suspension to grind the surface of the superhard material substrate; step three: horizontally moving the moving platform, and contacting the rotary sphere with other positions on the upper surface of the superhard material substrate; step four: and repeating the second step and the third step to obtain the high-density micro-lens array. The invention can manufacture the micro-lens array with high density and small spacing on the surface of the superhard material, and has low cost and high manufacturing efficiency.)

1. A device for manufacturing a high-density microlens array of superhard material is characterized in that: including moving platform, screen cloth, rotatory spheroid, injection apparatus and rotary drive device, moving platform is used for installing the superhard materials base member, moving platform can remove on vertical direction and horizontal plane, the screen cloth fixed set up in the moving platform top, the through-hole has been seted up on the screen cloth, the through-hole diameter is not more than rotatory spheroid diameter, rotatory spheroid can enter into extremely in the through-hole, injection apparatus is used for spraying grinding particle suspension on superhard materials base member surface, rotary drive device is used for the drive rotatory spheroid is in rotate in the through-hole, thereby rotatory drive of rotatory spheroid grinding particle suspension grinding superhard materials base member surface obtains high density microlens array.

2. An apparatus for manufacturing a high-density microlens array of superhard material as claimed in claim 1, wherein: the rotary driving device comprises a conveying belt, a belt wheel and a motor, the conveying belt is arranged above the screen and the rotary sphere and is in contact with the rotary sphere, the belt wheel is used for tensioning the conveying belt, and the belt wheel is driven by the motor.

3. An apparatus for manufacturing a high-density microlens array of superhard material as claimed in claim 1, wherein: the rotating sphere is a steel ball, and the grinding particle suspension is diamond particle suspension.

4. An apparatus for manufacturing a high-density microlens array of superhard material as claimed in claim 1, wherein: the through holes are distributed on the screen mesh in an array mode.

5. An apparatus for manufacturing a high-density microlens array of superhard material as claimed in claim 1, wherein: the jetting device is a nozzle disposed above the superhard material substrate.

6. A method for manufacturing a high-density microlens array of superhard material is characterized in that: a high density microlens array fabrication apparatus using the superhard material of any one of claims 1 to 5, comprising the steps of:

the method comprises the following steps: fixedly mounting a superhard material substrate on a table top of the moving platform, moving the moving platform in the vertical direction, and placing the rotary sphere in the through hole to enable the rotary sphere to be in contact with the upper surface of one processing position of the superhard material substrate;

step two: spraying grinding particle suspension liquid on the surface of the superhard material substrate, starting the rotary driving device to drive the rotary sphere to rotate in the through hole, and driving the grinding particle suspension liquid to grind the surface of the superhard material substrate through the rotation of the rotary sphere;

step three: horizontally moving the moving platform to enable the rotating sphere to be in contact with the upper surface of the other processing position of the superhard material substrate;

step four: and repeating the second step and the third step until a high-density micro-lens array is obtained.

7. A method of manufacturing a high density microlens array of superhard material as claimed in claim 6, wherein: further comprises the following steps: and cleaning the processed high-density micro-lens array, and drying after cleaning.

8. A method of manufacturing a high density microlens array of superhard material as claimed in claim 6, wherein: and controlling the processing depth of the micro lens by adjusting the moving distance of the moving platform in the vertical direction.

9. A method of manufacturing a high density microlens array of superhard material as claimed in claim 7, wherein: and step five, placing the processed high-density micro-lens array in acetone for cleaning.

Technical Field

The invention relates to the technical field of manufacturing of microlens arrays, in particular to a device and a method for manufacturing a high-density microlens array made of superhard materials.

Background

A lens is a well-known optical element, belonging to the passive optical elements, used in optical systems to converge and diverge light radiation. The conventional lenses are large in size and can be seen by human eyes, and the optical properties of the lenses can be well researched by using knowledge of geometric optics according to the law of refraction.

The same lenses are arranged on a plane according to a certain period to form a lens array, and the optical property of the lens array formed by the common lenses is the combination of the functions of the single lenses.

However, with the progress of scientific technology, the current instruments and equipment have developed towards the trend of light, mechanical and electrical integration. The optical element manufactured by the traditional method not only has complex manufacturing process, but also has large size and heavy weight, and can not meet the requirements of the current technological development. At present, people can manufacture lenses and lens arrays with very small diameters, which are generally unrecognizable by human eyes and can only be observed by equipment such as a microscope, a scanning electron microscope, an atomic force microscope and the like, namely, microlenses and microlens arrays.

At present, methods for manufacturing a microlens array include a photoresist hot melt method, a photosensitive glass thermoforming method, an ion exchange method, a femtosecond laser method, a turning method, a milling method, a photoelectric reaction etching method, a focused ion beam etching and deposition method, a chemical vapor deposition method, and the like.

The methods such as photoetching, etching and the like have mature processes and good compatibility, can also realize batch production, but have high processing equipment cost and low efficiency, and are only suitable for two-dimensional or simple three-dimensional structures; the processing of a nano-scale precision structure can be realized by adopting energy processing methods such as an ion exchange method, a femtosecond laser method, a focused ion beam and the like, but the defects of high processing equipment cost, low processing efficiency and poor uniformity exist, and the batch production is difficult; the single-point diamond turning method and the milling method can finish high-surface-type precision machining of a complex structure, but the cost of a machining lathe or milling machine is high, when a material to be machined is a superhard material (monocrystalline silicon, silicon carbide, tungsten carbide and the like), a cutter is seriously worn in the machining process of a reference surface, the cutting machining of the high-quality reference surface is difficult to guarantee, if a high-density micro-nano array is machined, the cutter needs to be repeatedly replaced due to the serious wear of the cutter, the machining cost is high, the machining efficiency is low, and meanwhile, the cutting machining of the high-quality high-uniformity micro-nano array cannot be guaranteed.

Therefore, what kind of low-cost and high-efficiency processing device and method is used to manufacture and process the high-density microlens array on the surface of the superhard material mold is a technical problem to be solved urgently by those skilled in the art.

Disclosure of Invention

The present invention is directed to provide an apparatus and a method for manufacturing a high-density microlens array of a superhard material, which can manufacture a microlens array of a high density and a small pitch on a surface of a superhard material, and has a low cost and a high manufacturing efficiency.

In order to achieve the purpose, the invention provides the following scheme:

the invention provides a device for manufacturing a high-density microlens array of a superhard material, which comprises a moving platform, a screen, a rotary sphere, a spraying device and a rotary driving device, wherein the moving platform is used for mounting a superhard material substrate, the moving platform can move in the vertical direction and the horizontal plane, the screen is fixedly arranged above the moving platform, a through hole is formed in the screen, the diameter of the through hole is not larger than that of the rotary sphere, the rotary sphere can enter the through hole, the spraying device is used for spraying grinding particle suspension liquid on the surface of the superhard material substrate, the rotary driving device is used for driving the rotary sphere to rotate in the through hole, and the rotary sphere rotates to drive the grinding particle suspension liquid to grind the surface of the superhard material substrate so as to obtain the high-density microlens array.

Preferably, the rotation driving device includes a belt, a pulley, and a motor, the belt is disposed above the screen and the rotary sphere and is in contact with the rotary sphere, the pulley is used to tension the belt, and the pulley is driven by the motor.

Preferably, the rotating sphere is a steel ball, and the grinding particle suspension is a diamond particle suspension.

Preferably, the through holes are distributed on the screen mesh in an array.

Preferably, the ejection means is a nozzle, the nozzle being disposed above the superhard material substrate.

The invention also provides a manufacturing method of the high-density microlens array of the superhard material, and the manufacturing device of the high-density microlens array of the superhard material comprises the following steps:

the method comprises the following steps: fixedly mounting a superhard material substrate on a table top of the moving platform, moving the moving platform in the vertical direction, and placing the rotary sphere in the through hole to enable the rotary sphere to be in contact with the upper surface of one processing position of the superhard material substrate;

step two: spraying grinding particle suspension liquid on the surface of the superhard material substrate, starting the rotary driving device to drive the rotary sphere to rotate in the through hole, and driving the grinding particle suspension liquid to grind the surface of the superhard material substrate through the rotation of the rotary sphere;

step three: horizontally moving the moving platform to enable the rotating sphere to be in contact with the upper surface of the other processing position of the superhard material substrate;

step four: and repeating the second step and the third step until a high-density micro-lens array is obtained.

Preferably, the method further comprises the following step five: and cleaning the processed high-density micro-lens array, and drying after cleaning.

Preferably, the processing depth of the micro lens is controlled by adjusting the moving distance of the moving platform in the vertical direction.

Preferably, in step five, the processed high-density microlens array is washed in acetone.

Compared with the prior art, the invention has the following technical effects:

the rotary sphere rotates to drive the grinding particle suspension to grind the surface of the superhard material substrate, the grinding suspension can be recycled, the cost is low, the rotary sphere can be replaced after being damaged, the replacement cost of the rotary sphere is low, the replacement is convenient, the machining quality of the micro lens can be guaranteed by timely replacing the rotary sphere, and the manufacturing efficiency is improved; through the horizontal movement of the movable platform, a high-density and small-spacing micro-lens array can be manufactured on the surface of the superhard material substrate.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic view showing a non-processing state of a partial structure of a high-density microlens array fabricating apparatus for an ultra-hard material according to the present invention;

FIG. 2 is a schematic view showing a state of processing of a high-density microlens array fabricating apparatus for an ultra-hard material according to the present invention;

in the figure: 1-moving platform, 2-screen, 3-rotary sphere, 4-spraying device, 5-rotary driving device, 6-conveying belt, 7-belt wheel and 8-superhard material substrate.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The invention aims to provide a device and a method for manufacturing a high-density microlens array of a superhard material, which are used for solving the problems in the prior art, can manufacture a microlens array with high density and small spacing on the surface of the superhard material, and have low cost and high manufacturing efficiency.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.