阅读说明：本技术 一种超硬材料的微透镜阵列制造方法 (Method for manufacturing microlens array of superhard material ) 是由 周天丰 刘晓华 艺苑 阮本帅 梁志强 焦黎 王西彬 于 2019-04-16 设计创作，主要内容包括：本发明公开了一种超硬材料微透镜阵列的制造方法,包括如下步骤：根据微透镜的曲率半径选择对应直径的多个球头棒材；所述球头棒材的球头为微透镜阵列制造中的塑形模具；调整所述球头棒材和所述待加工工件的相对位置,使所述球头棒材的球头与所述待加工工件接触,并进行位置固定；按设定路径移动待加工工件的同时,驱动多个所述球头棒材转动,且不断向所述待加工表面喷洒金刚石颗粒悬浮液,同时逐渐将所述待加工工件沿z轴方向上升距离h。与现有技术相比,本发明采用球头为微透镜阵列制造中塑形模具的球头棒材,按照设定路径对被加工工件进行加工,这就能够灵活制造出任意曲面的微透镜阵列。(The invention discloses a method for manufacturing a superhard material micro-lens array, which comprises the following steps: selecting a plurality of ball head rods with corresponding diameters according to the curvature radius of the micro lens; the ball head of the ball head bar is a shaping die in the manufacturing of the micro-lens array; adjusting the relative positions of the ball head bar and the workpiece to be processed to enable the ball head of the ball head bar to be in contact with the workpiece to be processed and fix the position of the ball head bar and the workpiece to be processed; and driving the plurality of ball head rods to rotate while moving the workpiece to be processed according to a set path, continuously spraying diamond particle suspension to the surface to be processed, and gradually increasing the distance h of the workpiece to be processed along the z-axis direction. Compared with the prior art, the invention adopts the ball head as the ball head bar of the shaping die in the micro-lens array manufacturing, and the processed workpiece is processed according to the set path, so that the micro-lens array with any curved surface can be flexibly manufactured.)

1. A method for manufacturing a superhard material microlens array is characterized by comprising the following steps:

selecting a plurality of ball head rods with corresponding diameters according to the curvature radius of the micro lens; the ball head of the ball head bar is a shaping die in the manufacturing of the micro-lens array;

adjusting the relative positions of the ball head bar and the workpiece to be processed to enable the ball head of the ball head bar to be in contact with the workpiece to be processed and fix the position of the ball head bar and the workpiece to be processed; the surface to be processed of the workpiece to be processed is positioned on a plane formed by x-y axes; the ball head bar is arranged above the surface to be processed, and the axis of the ball head bar is arranged along the Z-axis direction;

the method comprises the following steps that a workpiece to be machined is moved according to a set path, a plurality of ball head rods are driven to rotate, diamond particle suspension is continuously sprayed on the surface to be machined, and meanwhile the workpiece to be machined is gradually lifted for a distance h along the z-axis direction; the distance h is the processing depth of the microlens array.

2. A method of fabricating a microlens array of superhard material as claimed in claim 1, wherein the workpiece to be machined is secured to a three dimensional motorised translation stage.

3. A method of fabricating a microlens array of superhard material as claimed in claim 1, wherein the ball-head bar is a bar-shaped steel; the ball head of the ball head bar is in a spherical crown shape.

4. A method of fabricating a microlens array of superhard material as claimed in claim 1, wherein the ball-headed bar is held by a jig.

5. A method for manufacturing a microlens array of superhard material as claimed in claim 4, wherein a plurality of the ball-head rods are driven to rotate by a motor; the motor is arranged above the clamp.

6. The method for manufacturing a microlens array of superhard material as claimed in claim 1, wherein, after the step of moving the workpiece to be processed in the set path while rotating a plurality of ball rods and continuously spraying the diamond particle suspension to the surface of the workpiece to be processed while gradually raising the workpiece to be processed by a distance h along the z-axis direction, the method further comprises: and cleaning and drying the processed workpiece.

7. The method for manufacturing a microlens array of superhard material as claimed in claim 6, wherein the step of drying the processed workpiece after cleaning comprises: and (3) cleaning the processed workpiece in acetone and drying.

Technical Field

The invention relates to the technical field of manufacturing of microlens arrays, in particular to a manufacturing method of a superhard material microlens array.

Background

At present, methods for manufacturing a microlens array include a photoresist hot melt method, a photosensitive glass thermoforming method, an ion exchange method, a femtosecond laser method, a turning method, a milling method, a photoelectric reaction etching method, a focused ion beam etching and deposition method, a chemical vapor deposition method, and the like. However, the above methods have the disadvantages of low efficiency, high cost and complicated operation.

In order to overcome the above-mentioned methods in the prior art, there is a newly proposed screen assisted steel ball grinding method, and a three-dimensional schematic diagram of the device is shown in fig. 1. The method has the characteristics of high efficiency, low cost and simple operation. The method has two defects, one is that the method essentially takes a steel ball as a body, the shape of a spherical crown is copied to the surface of a superhard material by a grinding method, and a micro-lens pit with the same shape as the spherical crown is obtained, but a screen device is complex and heavy, and the matching between the screen and the steel ball is easy to cause errors; secondly, due to the limitation of the shape of the steel ball, the shape of the spherical crown can only be copied to the superhard material, and the spherical micro-lens pit can only be obtained by replacing balls with different diameters. Therefore, it is an urgent technical problem to be solved by those skilled in the art to provide a method for flexibly manufacturing a microlens array having an arbitrary curved surface.

Disclosure of Invention

The invention aims to provide a method for manufacturing a superhard material microlens array, which can flexibly manufacture a microlens array with any curved surface.

In order to achieve the purpose, the invention provides the following scheme:

the invention discloses a method for manufacturing a superhard material micro-lens array, which comprises the following steps:

selecting a plurality of ball head rods with corresponding diameters according to the curvature radius of the micro lens; the ball head of the ball head bar is a shaping die in the manufacturing of the micro-lens array;

adjusting the relative positions of the ball head bar and the workpiece to be processed to enable the ball head of the ball head bar to be in contact with the workpiece to be processed and fix the position of the ball head bar and the workpiece to be processed; the surface to be processed of the workpiece to be processed is positioned on a plane formed by x-y axes; the ball head bar is arranged above the surface to be processed, and the axis of the ball head bar is arranged along the Z-axis direction;

the method comprises the following steps that a workpiece to be machined is moved according to a set path, a plurality of ball head rods are driven to rotate, diamond particle suspension is continuously sprayed on the surface to be machined, and meanwhile the workpiece to be machined is gradually lifted for a distance h along the z-axis direction; the distance h is the processing depth of the microlens array.

Optionally, the workpiece to be processed is fixed on the three-dimensional electric translation table.

Optionally, the ball-head bar is a bar-shaped steel; the ball head of the ball head bar is in a spherical crown shape.

Optionally, the ball-head bar is fixed by a clamp.

Optionally, a motor is used for driving the ball-head bars to rotate; the motor is arranged above the clamp.

Optionally, when moving the workpiece to be processed according to the set path, rotating the plurality of ball rods, continuously spraying the diamond particle suspension to the surface of the workpiece to be processed, and gradually raising the workpiece to be processed along the z-axis by the distance h, further comprising: and cleaning and drying the processed workpiece.

Optionally, the step of drying the cleaned workpiece includes: and (3) cleaning the processed workpiece in acetone and drying.

The method for manufacturing the microlens array of the superhard material disclosed by the invention mainly has the following advantages: in the manufacturing method of the superhard material microlens array, the ball head is used as a ball head rod of a shaping die in the microlens array manufacturing to process a workpiece to be processed, and in the processing process, diamond particle suspension is continuously sprayed on the surface to be processed, and meanwhile, the workpiece to be processed is moved according to a set path, so that the microlens array with any curved surface can be flexibly processed according to the shaping die on the ball head and the processing path of the workpiece to be processed.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic three-dimensional structure diagram of a screen mesh assisted steel ball grinding method device in the prior art;

FIG. 2 is a flow chart of a method for fabricating a micro-lens array of superhard material according to an embodiment of the invention;

FIG. 3 is a schematic structural diagram of an apparatus for implementing a method for manufacturing a micro-lens array of superhard material according to an embodiment of the invention;

FIG. 4 is a schematic diagram of the free-form surface microlens pit processing by a high-precision machine tool having X, Z and C axes according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of the operation of a high-precision machine tool having X, Z and C axes for machining a microlens pit according to an embodiment of the present invention.

Description of reference numerals: 1-steel ball; 2-screening a screen; 3-a silicon wafer; 4-xyz three-degree-of-freedom translation stage; 5-ball head bar material; 6-a workpiece to be processed; 7-three-dimensional electric translation stage.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The invention aims to provide a method for manufacturing a superhard material microlens array, which can flexibly manufacture a microlens array with any curved surface.

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.

Fig. 2 is a flowchart of a method for manufacturing a microlens array of superhard material according to an embodiment of the present invention, and as shown in fig. 2, the method for manufacturing a microlens array of superhard material includes the following steps:

s110, selecting a plurality of ball head rods 5 with corresponding diameters according to the curvature radius of the micro lens; the ball head of the ball head bar 5 is a shaping die in the manufacturing of the micro-lens array;

s120, adjusting the relative positions of the ball head rod 5 and the workpiece 6 to be processed to enable the ball head of the ball head rod 5 to be in contact with the workpiece 6 to be processed, and fixing the positions; the surface to be processed of the workpiece 6 to be processed is positioned on a plane formed by x-y axes; the ball head rod 5 is arranged above the surface to be processed, and the axis of the ball head rod 5 is arranged along the Z-axis direction;

s130, processing the workpiece 6 to be processed, specifically: the method comprises the following steps that while a workpiece 6 to be processed is moved according to a set path, a plurality of ball head rods 5 are driven to rotate, diamond particle suspension is continuously sprayed on the surface to be processed, and meanwhile the workpiece 6 to be processed is gradually lifted by a distance h along the z-axis direction; the distance h is the processing depth of the microlens array.

And S140, cleaning the processed workpiece in acetone and then drying.

In step S110, the adopted ball head bar 5 is a bar-shaped steel, and the ball head is in a spherical crown shape.

In step S120, as shown in fig. 3, the ball-end bar 5 is disposed above the surface to be processed, specifically, the ball-end bar 5 is fixed above the surface to be processed by using a fixture. And a motor may be provided at a position above the jig for driving the ball-headed bar 5 to rotate.

And in step S120, in order to improve the convenience of moving the workpiece 6 to be processed, the workpiece 6 to be processed may be fixed on the three-dimensional motorized translation stage 7. In the processing process, the control of the path of the workpiece to be processed can be realized by controlling the moving path of the three-dimensional electric translation stage 7, and the ascending distance of the three-dimensional electric translation stage 7 is the depth of the lens array pits on the workpiece 6 to be processed.

The three-dimensional motorized translation stage employed in the present invention may be a high precision machine tool having an X-axis, a Z-axis, and a C-axis. Because the X axis, the Z axis and the C axis form a space cylindrical coordinate system, the machining of the three-dimensional non-revolution symmetric curved surface of the micro-lens pit can be realized through the linkage of the three axes, as shown in fig. 4 and 5.

In the processing process, a moving path of a workpiece to be processed needs to be planned, and generation of a track point of the moving path of the processing is generally performed according to the following steps:

firstly, calculating an equation expression of a micro lens array in a Cartesian coordinate system, wherein z is f (x, y);

secondly, the expression in a cylindrical coordinate system is expressed as z ═ f (x, y);

then, discretizing a track point on the (ri, i) plane to obtain a coordinate (ri, i) of the processing point, and substituting an equation z into f (ri, i) to calculate to obtain a coordinate zi;

and finally, the machine tool enables the ball head rod to move along the track point through the linkage of the X axis, the Z axis and the C axis, and a micro-lens array is processed.

Calculating the trace points according to the above method is a very burdensome task, but it is much more convenient to calculate the machining path trace points through DIFFSYS assembly software. DIFFSYS is a programming software dedicated to numerically controlled machine (CNC) design applications for generating CNC machining programs for various complex surfaces. The shape of the desired microlens array can be designed in DIFFSYS software and then the machining program is automatically generated by the software.

In addition, the material of the workpiece 6 to be processed is any one of superhard materials such as single crystal silicon, silicon carbide, tungsten carbide and the like.

The method for manufacturing the microlens array of the superhard material disclosed by the invention mainly has the following advantages: in the manufacturing method of the superhard material microlens array, the ball head is adopted as a ball head rod of a shaping die in the microlens array manufacturing to process a workpiece to be processed, and in the processing process, diamond particle suspension is continuously sprayed on the surface to be processed, and meanwhile, the workpiece to be processed is moved according to a set path, so that the microlens array with any curved surface can be flexibly processed according to the shaping die on the ball head and the processing path of the workpiece to be processed.

In the method for manufacturing the microlens array of the superhard material, the ball head is directly adopted as the ball head bar of the shaping die in the manufacturing of the microlens array to process the workpiece to be processed, so that a complex device in the original screen auxiliary microlens array manufacturing method can be abandoned, the structure of the device for manufacturing the microlens array of the superhard material is simplified, and the manufacturing difficulty is reduced.

The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.