Balance mass device and photoetching equipment
阅读说明:本技术 平衡质量装置及光刻设备 (Balance mass device and photoetching equipment ) 是由 丛国栋 于 2019-04-17 设计创作,主要内容包括:本发明涉及一种平衡质量装置,包括调节单元、框架单元及磁钢阵列,调节单元包括第一调节组件及第二调节组件,框架单元包括顶板及连接于顶板第一表面上且相对设置的两个侧板,磁钢阵列设置于顶板的第二表面上,第二表面与第一表面相对;第一调节组件设置于两个侧板外侧,以调节对应于两个侧板外的磁钢阵列的面型;第二调节组件设置于两个侧板之间,以调节对应于两个侧板内的磁钢阵列的面型。本发明使磁钢阵列的面型得到了补偿,进而使磁钢阵列的面型达到要求。(The invention relates to a balance mass device, which comprises an adjusting unit, a frame unit and a magnetic steel array, wherein the adjusting unit comprises a first adjusting component and a second adjusting component; the first adjusting assembly is arranged on the outer sides of the two side plates so as to adjust the surface shape of the magnetic steel array corresponding to the outer sides of the two side plates; the second adjusting component is arranged between the two side plates to adjust the surface type of the magnetic steel array corresponding to the two side plates. The invention compensates the surface type of the magnetic steel array, and further makes the surface type of the magnetic steel array meet the requirements.)
1. A balance mass device is characterized by comprising an adjusting unit, a frame unit and a magnetic steel array, wherein the adjusting unit comprises a first adjusting component and a second adjusting component, the frame unit comprises a top plate and two side plates which are connected to the first surface of the top plate and are oppositely arranged, the magnetic steel array is arranged on the second surface of the top plate, and the second surface is opposite to the first surface; the first adjusting assembly is arranged on the outer sides of the two side plates so as to adjust the surface shape of the magnetic steel array corresponding to the outer sides of the two side plates; the second adjusting component is arranged between the two side plates to adjust the surface shape of the magnetic steel array corresponding to the two side plates.
2. The balance mass apparatus of claim 1, wherein said first adjustment assembly comprises a first base and at least two lateral adjustment members, wherein said first base has at least two first threaded holes spaced along a first direction on a side thereof adjacent to said side plate, and each of said lateral adjustment members has one end screwed into said first threaded hole to connect with said first base and the other end engaging with said side plate; wherein the first direction is a length direction of the frame unit.
3. The balance mass of claim 2, wherein said lateral adjustment member is capable of being screwed out in a direction away from said first base or screwed in a direction close to said first base to deform the profile of said magnetic steel array outwardly of said two side plates upwardly or downwardly.
4. The balance mass of claim 3, wherein the lateral adjustment member is a first screw, and a head of the screw for engaging the side plate is rounded.
5. The balance mass apparatus of claim 2, wherein said second adjustment assembly comprises a plurality of second bases and a plurality of middle adjustment members, said plurality of second bases being spaced apart along said first direction and connected between two of said side plates, and each of said second bases having a plurality of second threaded holes spaced apart along said second direction, one end of each of said middle adjustment members being disposed on said second base and the other end of each of said middle adjustment members passing through said second threaded holes and engaging said top plate; wherein the second direction is a width direction of the frame unit.
6. The balance mass apparatus of claim 5, wherein said middle adjustment member is capable of being screwed in a direction close to said second base or screwed out in a direction away from said second base to deform a face shape corresponding to said magnetic steel array in both of said side plates upward or downward.
7. The balance mass of claim 6, wherein the central adjustment member is a second screw, and the end of the screw for engaging the top plate is rounded.
8. The balance mass of claim 1, wherein a back iron is further disposed between the frame unit and the magnetic steel array, the magnetic steel array being bonded to the back iron.
9. A lithographic apparatus comprising a stage, a coarse motion motor connected to the stage, and the balance mass apparatus of any one of claims 1 to 8, wherein the adjustment unit in the balance mass apparatus adjusts the profile of the magnetic steel array, and the coarse motion motor moves the stage.
Technical Field
The invention relates to the technical field of photoetching equipment, in particular to a mass balancing device and photoetching equipment.
Background
In the design of a workpiece table of a photoetching device, a high-precision linear direct-drive three-phase motor is generally adopted for servo control, meanwhile, in order to reduce the impact of the workpiece table moving at a high speed on the outside, a balance mass unit is often added, the reaction force of the workpiece table acts on the balance mass unit, so that the balance mass unit and the workpiece table move reversely, and thus, according to the law of conservation of momentum and conservation of center of mass, the energy conservation is achieved inside the workpiece table system comprising the workpiece table and the balance mass unit, and the influence on the outside of the workpiece table system is relatively small. The balance mass unit can provide a magnetic field for a coarse motion motor driving the workpiece table to move, and vibration generated by the coarse motion motor is reduced.
Present balance mass unit, including balance mass frame and magnetic steel array, bond good magnetic steel array back on balance mass frame, because the magnetic force each other of magnetic steel array and the gravity action that magnetic steel array itself received, make the deformation of collapsing appear easily in the middle of the magnetic steel array and both sides, influence the surface profile type of whole magnetic steel array, this will seriously influence the motion stroke of coarse motion motor, and then influence the power of coarse motion motor, thereby finally make the unable accurate control of motion condition of workstation, consequently must be in certain limit with magnetic steel array's deformation control.
Disclosure of Invention
The invention aims to provide a balance mass device which can solve the problem of collapse and deformation of a magnetic steel array, compensate the deformation of the magnetic steel array and further enable the magnetic steel surface type to meet the requirement.
In order to achieve the above object, the present invention provides a balance mass apparatus, including an adjusting unit, a frame unit and a magnetic steel array, wherein the adjusting unit includes a first adjusting assembly and a second adjusting assembly, the frame unit includes a top plate and two side plates connected to a first surface of the top plate and disposed oppositely, the magnetic steel array is disposed on a second surface of the top plate, and the second surface is opposite to the first surface; the first adjusting assembly is arranged on the outer sides of the two side plates so as to adjust the surface shape of the magnetic steel array corresponding to the outer sides of the two side plates; the second adjusting component is arranged between the two side plates to adjust the surface shape of the magnetic steel array corresponding to the two side plates.
Optionally, the first adjusting assembly includes a first base and at least two lateral adjusting members, at least two first screw holes are formed in one side of the first base close to the side plate at intervals along a first direction, one end of each lateral adjusting member is screwed into the first screw hole to be connected with the first base, and the other end of each lateral adjusting member is attached to the side plate; wherein the first direction is a length direction of the frame unit.
Optionally, the lateral adjusting part can be screwed out or screwed in towards a direction away from the first base, so that the surface shape of the magnetic steel array outside the two side plates is deformed upwards or downwards.
Optionally, the lateral adjusting member is a first screw, and a screw head of the first screw, which is used for being attached to the side plate, is arc-shaped.
Optionally, the second adjusting assembly includes a plurality of second bases and a plurality of middle adjusting members, the plurality of second bases are arranged at intervals along the first direction and connected between the two side plates, a plurality of second screw holes are arranged at intervals along the second direction on each second base, one end of each middle adjusting member is arranged on the second base, and the other end of each middle adjusting member passes through the second screw holes and is attached to the top plate; wherein the first direction is a width direction of the frame unit.
Optionally, the middle adjusting part can be screwed in the direction close to the second base or screwed out in the direction away from the second base, so that the surface shape of the magnetic steel array in the two side plates is deformed upwards or downwards.
Optionally, the middle adjusting part is a second screw, and the end of the screw, which is used for being attached to the top plate, of the second screw is arc-shaped.
Optionally, a back iron is further arranged between the frame unit and the magnetic steel array, and the magnetic steel array is bonded to the back iron.
The invention also provides photoetching equipment which comprises a wafer bearing table, a coarse motion motor connected with the wafer bearing table and the balance mass device, wherein an adjusting unit in the balance mass device is used for adjusting the surface shape of the magnetic steel array, and the coarse motion motor is used for pushing the wafer bearing table to move.
According to the invention, the first adjusting components are arranged on the outer sides of the two side plates of the frame unit to adjust the surface shapes of the magnetic steel arrays outside the two side plates, and the second adjusting components are arranged between the two side plates to adjust the surface shapes of the magnetic steel arrays inside the two side plates, so that the surface shapes of the two ends and the middle part of the magnetic steel arrays are compensated, and the surface shapes of the magnetic steel arrays meet the requirements.
Drawings
Fig. 1 is a schematic structural diagram of a balance mass apparatus according to an embodiment of the present invention;
FIG. 2 is a bottom view A of FIG. 1 in accordance with the present invention;
FIG. 3 is a schematic structural view of a lateral fastener and a central fastener provided in accordance with another embodiment of the present invention;
fig. 4 is a schematic structural diagram of a balancing mass apparatus according to another embodiment of the present invention;
in the figure: 1-a magnetic steel array; 2-back iron; 3-a frame unit; 31-a top plate; 32-side plate; 4-a first adjustment assembly; 41-a first base; 42-lateral adjustment; 43-lateral adjustment; 5-a second adjustment assembly; 51-a second base; 52-middle adjustment; 53-middle adjustment.
Detailed Description
The following describes in more detail embodiments of the present invention with reference to the schematic drawings. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
As shown in fig. 1 and 2, a balance mass device includes an adjusting unit, a frame unit 3 and a magnetic steel array 1, wherein the adjusting unit includes a first adjusting component 4 and a second adjusting component 5, the frame unit 3 includes a
Specifically, the second surface upper berth of
Further, the first adjusting component 4 includes a
Specifically, the
Further, the lateral adjusting
Specifically, side
If the degree of upward warpage adjustment exceeds the requirement, the
Further, the second adjusting assembly 5 includes a plurality of
Specifically, the
Further, the
Specifically, middle
If the degree of upwards warping adjustment exceeds the requirement, also can through with middle
Further, the lateral adjusting member is a first screw, and a screw head of the first screw, which is attached to the side plate 32, is arc-shaped. In specific implementation, the first screw may be a common screw, and in order to reduce scratches on the surface of the side plate 32 of the frame unit 3 and achieve smoother adjustment, a screw head of the first screw is configured to be an arc shape, as shown in fig. 3, a screw head of the lateral adjusting member 43 is configured to be an arc shape, and a half-round head screw, a ball head screw, and the like in a standard member may be selected.
Similarly, the middle adjusting member is a second screw, and the end of the screw used for the attachment of the second screw to the
The preferred lateral and medial adjustment members 43, 53 are applied to the balance mass apparatus as shown in fig. 4 to provide smoother adjustment and to facilitate reduced surface damage to the frame unit.
The invention also provides photoetching equipment which comprises a wafer bearing table, a coarse motion motor connected with the wafer bearing table and the balance mass device, wherein an adjusting unit in the balance mass device is used for adjusting the surface shape of the magnetic steel array 1, and the coarse motion motor is used for pushing the wafer bearing table to move.
The surface type of the magnetic steel array is adjusted through the adjusting unit in the mass balancing device, so that the surface type of the magnetic steel array meets requirements, the influence on the stroke of the coarse motion motor is reduced, and the requirements can be met when the coarse motion motor drives the wafer bearing table to move.
In summary, in the balance mass apparatus provided in the embodiment of the present invention, the first adjusting assembly is disposed outside the two side plates of the frame unit to adjust the surface shape of the magnetic steel array corresponding to the outside of the two side plates, and the second adjusting assembly is disposed between the two side plates to adjust the surface shape of the magnetic steel array corresponding to the inside of the two side plates, so that the surface shapes of the two ends and the middle of the magnetic steel array are compensated, and the surface shape of the magnetic steel array meets the requirement.
The above description is only a preferred embodiment of the present invention, and does not limit the present invention in any way. It will be understood by those skilled in the art that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims.
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