阅读说明：本技术 用于高真空科学实验装置的同心圆三维电动步进扫描系统 (Concentric circle three-dimensional electric step scanning system for high-vacuum scientific experimental device ) 是由 吴启东 于 2020-07-01 设计创作，主要内容包括：本发明公开了用于高真空科学实验装置的同心圆三维电动步进扫描系统,包括旋转环、旋转头组件、90度直角转接器、旋转驱动器组件,所述旋转头组件设置有多组,且旋转头组件安装在旋转环上,所述90度直角转接器的一端连接旋转环,所述90度直角转接器的另一端连接旋转驱动器组件,所述旋转驱动器组件通过90度直角转接器改变动力方向,本发明通过本地控制器及远程上位机可实现同心圆三维快速电动步进扫描,设计结构紧凑,密封性强,体积小,移动精度高,同时便于根据实际情况测量要求跟换相对应探头以满足测量要求。(The invention discloses a concentric circle three-dimensional electric stepping scanning system for a high-vacuum scientific experimental device, which comprises a rotating ring, a rotating head assembly, a 90-degree right-angle adapter and a rotating driver assembly, wherein the rotating head assembly is provided with a plurality of groups, the rotating head assembly is arranged on the rotating ring, one end of the 90-degree right-angle adapter is connected with the rotating ring, the other end of the 90-degree right-angle adapter is connected with the rotating driver assembly, and the rotating driver assembly changes the power direction through the 90-degree right-angle adapter.)

1. A concentric circle three-dimensional electronic step scanning system for high vacuum science experimental apparatus, characterized in that, including rotatory ring (100), rotating head subassembly (200), 90 degrees right angle adapter (300), rotary actuator subassembly (400), rotating head subassembly (200) is provided with the multiunit, and rotating head subassembly (200) installs on rotatory ring (100), rotatory ring (100) is connected to the one end of 90 degrees right angle adapter (300), rotary actuator subassembly (400) is connected to the other end of 90 degrees right angle adapter (300), rotary actuator subassembly (400) changes the power direction through 90 degrees right angle adapter (300).

2. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 1, characterized in that: the rotating ring (100) comprises a shell fixing seat (1), a shell fixing ring cover (2), a main gear ring (3), a transmission gear shaft (4), a bearing (5), a shell fixing connecting column (6), a main gear bearing fixing column (7), a universal coupling (8) and a cable support (9).

3. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 2, characterized in that: the shell fixing ring cover (2) is covered on the shell fixing seat (1), a ring cavity is formed between the shell fixing seat (1) and the shell fixing ring cover (2), the main gear ring (3) and the cable support (9) are located in the ring cavity and are installed on the shell fixing seat (1), and the cable support (9) is located in an inner ring of the main gear ring (3);

the utility model discloses a gear transmission device, including shell fixing base (1), shell fixed ring lid (2), bearing (5), drive gear axle (4), and drive gear axle (4), shell fixed ring lid (6) are installed on shell fixing base (1) through shell fixed connection post (6), and shell fixed connection post (6) are equipped with the multiunit, the top at drive gear axle (4) is installed in bearing (5), and the bottom of drive gear axle (4) is installed on shell fixing base (1), the cover is equipped with the ring gear on drive gear axle (4), ring gear and driving gear ring (3) meshing on drive gear axle (4), universal joint (8) are installed on drive gear axle (4), and universal joint (8) protrusion sets up on shell fixing base (1) surface.

4. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 1, characterized in that: the rotary head assembly (200) comprises a rotary head fixing seat (10), a rotary head support (11), a rotary head end plate (12), a rotary head (13), a rotary head butt joint nut (14), a rotary head spur rack (15), a rotary head fixing shaft (16), a rotary head screw rod (17), a rotary head screw rod nut (18), a rotary head connecting gear (19) and a rotary head bearing (20).

5. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 4, characterized in that: the rotary head fixing seat (10) is mounted on the rotary head support (11) through bolts, the rotary head spur rack (15) is located in an opening through groove of the rotary head fixing seat (10), the rotary head spur rack (15) is sleeved on the outer wall of the rotary head screw nut (18), the rotary head screw nut (18) is in threaded connection with the rotary head screw rod (17), the tail end of the rotary head screw rod (17) is connected with a rotary head connecting gear (19) and then is inserted into the rotary head fixing seat (10), the upper end and the lower end of the rotary head screw rod (17) located on the rotary head screw nut (18) are both provided with rotary head bearings (20), the rotary head end plate (12) is fixed at the top end of the rotary head fixing seat (10) through bolts, and the rotary head (13) is movably mounted on the rotary head fixing seat (10), and the tooth marks on the base of the rotating head (13) are meshed with the rotating head spur rack (15);

rotating head butt joint nut (14) are installed on the top of rotating head (13), also be provided with swivel head bearing (20) between the mounting hole on rotating head fixed axle (16) and rotating head fixing base (10), rotating head end plate (12) are installed behind rotating head fixing base (10), and the tip of rotating head lead screw (17) inserts in the through-hole of rotating head end plate (12).

6. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 1, characterized in that: the 90-degree right-angle adapter (300) comprises an adapter shell (21), an adapter cover plate (22), an adapter bevel gear (23), an adapter coupling rod A (24), an adapter coupling rod B (25), an adapter bearing (26), an adapter snap spring (27), an adapter connecting block A (28), an adapter extension rod (29), an adapter coupling (30), an adapter connecting block B (31) and an adapter fixing cylinder (32).

7. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 6, characterized in that: one end of the adapter coupling rod A (24) and one end of the adapter coupling rod B (25) penetrate through and extend into the adapter housing (21), adapter bevel gears (23) are installed at the end parts of the adapter coupling rod A (24) extending into the adapter housing (21), the adapter bevel gears (23) of the adapter coupling rod A (24) and the adapter coupling rod B (25) are in a vertical state, the adapter bevel gears (23) of the adapter coupling rod A (24) and the adapter coupling rod B (25) are meshed with each other, adapter bearings (26) and adapter snap springs (27) are installed between the adapter coupling rod A (24) and the adapter coupling rod B (25) and the adapter housing (21), and an adapter cover plate (22) is installed on the adapter housing (21);

adapter shaft coupling (30) are all installed at the both ends of adapter extension bar (29), adapter coupling (30) and adapter coupling pole B (25) are passed through to adapter extension bar (29) one end and are connected, the fixed section of thick bamboo of adapter (32) cover is established in adapter extension bar (29) periphery, the one end of the fixed section of thick bamboo of adapter (32) is passed through adapter connecting block A (28) and is installed on adapter shell (21), adapter connecting block B (31) are installed to the other end of the fixed section of thick bamboo of adapter (32).

8. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 1, characterized in that: the rotary actuator assembly (400) includes a rotary actuator flange (33), a rotary actuator gear ring bearing (34), a rotary actuator gear ring (35), a rotary actuator gear ring cover (36), a rotary actuator seal gear drive shaft (37), an O-ring (38), a rotary actuator bearing a (39), a rotary actuator bearing B (40), a rotary actuator seal gear drive shaft nut (41), a rotary actuator reduction gear (42), a rotary actuator reduction gear bearing set screw (43), and a rotary actuator (44).

9. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 8, characterized in that: the output shaft of the rotary driver (44) is connected with one end of a rotary driver sealing gear transmission shaft (37), the rotary driver reduction gears (42) are provided with three groups, the three groups of rotary driver reduction gears (42) are meshed with the rotary driver sealing gear transmission shaft (37), the rotary driver reduction gears (42) are installed on a rotary driver flange (33) through rotary driver reduction gear bearing fixing screws (43), the other end of the rotary driver sealing gear transmission shaft (37) penetrates through the rotary driver flange (33), rotary driver bearings A (39) and rotary driver bearings B (40) are installed at two ends of the rotary driver sealing gear transmission shaft (37) through the rotary driver flange (33), and an O-shaped ring (38) is sleeved above the rotary driver sealing gear transmission shaft (37), a rotary driver seal gear transmission shaft nut (41) is arranged at the tail end of the rotary driver seal gear transmission shaft (37);

the rotary driver gear ring bearing (34) is installed in an annular groove of the rotary driver flange (33), the rotary driver gear ring (35) is installed on the inner annular wall of the rotary driver gear ring bearing (34), and the rotary driver gear ring cover (36) covers the rotary driver gear ring (35) and then is fixed on the rotary driver flange (33).

10. The concentric circle three-dimensional electric step-and-scan system for high vacuum science experimental apparatus according to claim 1, characterized in that: the rotary head connecting gear (19) is meshed with the main gear ring (3), the other end of the adapter extension rod (29) is connected with a rotary driver sealing gear transmission shaft (37) through an adapter coupler (30), and an adapter coupler shaft rod A (24) is connected with a universal coupler (8).

Technical Field

The invention relates to the technical field of scanning systems, in particular to a concentric circle three-dimensional electric stepping scanning system for a high-vacuum scientific experimental device.

Background

At present, the research investment of magnetic confinement fusion plasma devices such as magnetic mirrors, coaxial guns and plasma sources in leading-edge physics is more and more intensive, the research precision requirement is higher and more, and the requirement of various devices on multi-scale and multi-dimensional parameter scanning is higher and more. The existing measuring structure is a single head, the single measurement cannot meet the measurement requirement of a multi-head same-plane position, and the measurement data is seriously influenced.

Disclosure of Invention

The invention aims to provide a concentric circle three-dimensional electric stepping scanning system for a high-vacuum scientific experimental device, which can realize three-dimensional quick electric stepping scanning of concentric circles through a local controller and a remote upper computer, has compact design structure, strong sealing property, small volume and high moving precision, and is convenient to change corresponding probes according to the measurement requirement of actual conditions so as to meet the measurement requirement.

In order to achieve the purpose, the invention provides the following technical scheme: a three-dimensional electronic step scanning system of concentric circles for high vacuum science experimental apparatus, including rotatory ring, swivel head subassembly, 90 degrees right angle adapters, rotary actuator subassembly, the swivel head subassembly is provided with the multiunit, and the swivel head subassembly is installed on rotatory ring, rotatory ring is connected to the one end of 90 degrees right angle adapters, the rotary actuator subassembly is connected to the other end of 90 degrees right angle adapters, the rotary actuator subassembly changes the power direction through 90 degrees right angle adapters.

Preferably, the rotating ring comprises a housing fixing seat, a housing fixing ring cover, a main gear ring, a transmission gear shaft, a bearing, a housing fixing connecting column, a main gear bearing fixing column, a universal coupling and a cable support.

Preferably, the housing fixing ring cover is arranged on the housing fixing seat, an annular cavity is formed between the housing fixing seat and the housing fixing ring cover, the main gear ring and the cable support are positioned in the annular cavity and are arranged on the housing fixing seat, and the cable support is positioned in an inner ring of the main gear ring;

the utility model discloses a transmission gear, including shell fixed connection post, bearing, transmission gear axle, universal coupling, shell fixed connection post lid passes through shell fixed connection post and installs on the shell fixing base, and shell fixed connection post is equipped with the multiunit, the bearing is installed on the top of transmission gear axle, and the bottom of transmission gear axle installs on the shell fixing base, the epaxial cover of transmission gear is equipped with the ring gear, the epaxial ring gear of transmission gear meshes with master gear ring, universal coupling installs on the transmission gear is epaxial, and the universal.

Preferably, the rotating head assembly comprises a rotating head fixing seat, a rotating head bracket, a rotating head end plate, a rotating head docking nut, a rotating head spur rack, a rotating head fixing shaft, a rotating head lead screw nut, a rotating head connecting gear and a rotating head bearing.

Preferably, the rotating head fixing seat is mounted on the rotating head support through a bolt, the rotating head spur rack is located in an opening through groove of the rotating head fixing seat, the rotating head spur rack is sleeved on the outer wall of a rotating head screw nut, the rotating head screw nut is in threaded connection with a rotating head screw rod, the tail end of the rotating head screw rod is connected with a rotating head connecting gear and then is inserted on the rotating head fixing seat, rotating head bearings are mounted at the upper end and the lower end of the rotating head screw rod, the rotating head end plate is fixed at the top end of the rotating head fixing seat through a bolt, the rotating head is movably mounted on the rotating head fixing seat through two groups of rotating head fixing shafts, and tooth marks on;

the rotary head butt joint nut is installed on the top of rotary head, also be provided with the rotary head bearing between the mounting hole on rotary head fixed axle and the rotary head fixing base, the rotary head end plate is installed behind the rotary head fixing base, and the tip of rotary head lead screw inserts in the through-hole of rotary head end plate.

Preferably, the 90-degree right-angle adapter comprises an adapter shell, an adapter cover plate, an adapter bevel gear, an adapter coupling rod A, an adapter coupling rod B, an adapter bearing, an adapter snap spring, an adapter connecting block A, an adapter extension bar, an adapter coupling, an adapter connecting block B and an adapter fixing cylinder.

Preferably, one end of the adaptor coupling rod a and one end of the adaptor coupling rod B penetrate through and extend into the adaptor housing, adaptor bevel gears are mounted at the end parts of the adaptor coupling rod a extending into the adaptor housing, the adaptor bevel gears of the adaptor coupling rod a and the adaptor coupling rod B are in a vertical state, the adaptor bevel gears of the adaptor coupling rod a and the adaptor coupling rod B are meshed with each other, adaptor bearings and adaptor snap springs are mounted between the adaptor coupling rod a and the adaptor coupling rod B and the adaptor housing, and an adaptor cover plate is mounted on the adaptor housing;

adapter couplers are installed at two ends of the adapter extension bar, one end of the adapter extension bar is connected with an adapter coupling bar B through the adapter couplers, the adapter fixing barrel is covered on the periphery of the adapter extension bar, one end of the adapter fixing barrel is installed on the adapter shell through an adapter connecting block A, and the other end of the adapter fixing barrel is provided with an adapter connecting block B.

Preferably, the rotary drive assembly includes a rotary drive flange, a rotary drive gear ring bearing, a rotary drive gear ring cover, a rotary drive seal gear drive shaft, an O-ring, a rotary drive bearing a, a rotary drive bearing B, a rotary drive seal gear drive shaft nut, a rotary drive reduction gear bearing set screw, and a rotary drive.

Preferably, an output shaft of the rotary driver is connected with one end of a rotary driver sealing gear transmission shaft, three groups of rotary driver reduction gears are arranged, the three groups of rotary driver reduction gears are all meshed with the rotary driver sealing gear transmission shaft, the rotary driver reduction gears are installed on a rotary driver flange through rotary driver reduction gear bearing fixing screws, the other end of the rotary driver sealing gear transmission shaft penetrates through the rotary driver flange, a rotary driver bearing A and a rotary driver bearing B are respectively installed at two ends of the rotary driver sealing gear transmission shaft penetrating through the rotary driver flange, an O-shaped ring is sleeved above the rotary driver sealing gear transmission shaft, and a rotary driver sealing gear transmission shaft nut is installed at the tail end of the rotary driver sealing gear transmission shaft;

the rotary driver gear ring bearing is installed in an annular groove of the rotary driver flange, the rotary driver gear ring is installed on the inner annular wall of the rotary driver gear ring bearing, and the rotary driver gear ring cover covers the rotary driver gear ring and then is fixed on the rotary driver flange.

Preferably, the rotating head connecting gear is meshed with the main gear ring, the other end of the adapter extension rod is connected with a transmission shaft of a sealing gear of a rotary driver through an adapter coupler, and the adapter coupler shaft rod A is connected with a universal coupler.

The invention provides a concentric circle three-dimensional electric step scanning system for a high-vacuum scientific experimental device, which has the following beneficial effects:

(1) the invention uses the ring structure as the support under high vacuum through the precise matching of the fixed combined gear transmission, the three-dimensional measurement control system which can rapidly advance the ring array type framework in a 90-degree fan shape simultaneously can control a plurality of measurement frameworks to simultaneously move in a fan shape on the vertical plane through the rotating ring, the rotating head assembly, the right-angle adapter and the rotating driver assembly, the system can control a plurality of measurement frameworks to simultaneously move in a fan shape on the vertical plane, the measurement point can be constantly kept on a circular surface in the moving process, the framework structure can be stopped at any angle in the moving range, the scanning interval can be obtained by sweeping the whole moving range to form a circular platform structure, the three-dimensional parameter change result can be inverted according to the symmetry and the continuity of the measurement object (such as plasma), the return difference is less than 0.1mm, the moving distance of the probe head in the inner part can be simultaneously, the radial and axial three-dimensional distribution structure provides convenience for scientific research work.

(2) The invention adopts a circumferential stepping frame structure, supports angular asymmetric distribution, but the probe can be arranged on a circular surface at any time, can be designed into non-uniform distribution according to different experimental conditions, and has extremely high plasticity, in addition, the number of the circumferentially distributed stepping metal rods can reach 15, the minimum angle can reach 0 degree, the maximum angle can reach 90 degrees, and the back-and-forth angle is 180 degrees; the distribution angle of the flange is far smaller than that of the flange of the device, and the collection amount of experimental parameters is rich.

(3) The invention has very strong transportability, the size range of the structural system can be within 50cm, and the invention can be applied to large, medium and small devices. In addition, the system can perform software one-key operation through the vacuum external motor, thereby saving labor and time, greatly improving the experimental efficiency,

(4) the invention can realize three-dimensional rapid electric stepping scanning of concentric circles by the local controller and the remote upper computer, has compact design structure, strong sealing performance, small volume and high moving precision, and is convenient to change the corresponding probe according to the measurement requirement of actual conditions so as to meet the measurement requirement.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic illustration of an exploded view of the rotating ring of the present invention;

FIG. 3 is a schematic top view of the rotating ring of the present invention;

FIG. 4 is a schematic cross-sectional view taken along line A-A of FIG. 3 according to the present invention;

figure 5 is an exploded view of a rotary head assembly according to the present invention;

FIG. 6 is a schematic view of the overall structure of the rotary head assembly of the present invention;

FIG. 7 is a schematic cross-sectional view of a rotary head assembly according to the present invention;

FIG. 8 is an exploded view of the 90 degree right angle adapter of the present invention;

FIG. 9 is a schematic view of the overall 90-degree right angle adapter of the present invention;

FIG. 10 is a schematic cross-sectional view taken along line A-A of FIG. 9 in accordance with the present invention;

FIG. 11 is an exploded view of the rotary actuator assembly of the present invention;

FIG. 12 is a schematic view of an external structure of a rotary actuator according to the present invention;

FIG. 13 is a schematic cross-sectional view taken along line A-A of FIG. 12 according to the present invention.

In the figure: 100. a rotating ring; 200. a rotating head assembly; 300. a 90 degree right angle adapter; 400. a rotary driver assembly;

1. a housing fixing seat; 2. a housing retaining ring cover; 3. a main gear ring; 4. a drive gear shaft; 5. a bearing; 6. the shell is fixedly connected with the column; 7. a main gear bearing fixing column; 8. a universal coupling; 9. a cable holder; 10. a rotating head fixing seat; 11. rotating the head support; 12. rotating the head end plate; 13. rotating the head; 14. the rotating head is butted with a nut; 15. rotating a spur rack; 16. rotating the head fixing shaft; 17. rotating a head screw rod; 18. rotating a head screw nut; 19. the rotating head is connected with a gear; 20. a rotating head bearing; 21. an adapter housing; 22. an adapter cover plate; 23. an adaptor bevel gear; 24. an adapter coupling rod A; 25. the adapter coupling rod B; 26. an adaptor bearing; 27. an adapter snap spring; 28. an adapter connecting block A; 29. lengthening the adapter; 30. an adapter coupling; 31. an adapter connecting block B; 32. an adaptor fixing cylinder; 33. a rotary actuator flange; 34. a rotary drive gear ring bearing; 35. a rotary driver gear ring; 36. a rotary driver gear ring cover; 37. the rotary driver seals the gear transmission shaft; 38. an O-shaped ring; 39. a rotary actuator bearing A; 40. a rotary actuator bearing B; 41. the rotary driver seals the gear drive shaft nut; 42. a rotary drive reduction gear; 43. a screw is fixed on a bearing of a reduction gear of the rotary driver; 44. a rotary drive.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention.

As shown in fig. 1 to 13, the present invention provides a technical solution: the concentric circle three-dimensional electric stepping scanning system for the high vacuum scientific experimental apparatus comprises a rotating ring 100, a rotating head assembly 200, a 90-degree right-angle adapter 300 and a rotating driver assembly 400, wherein the rotating head assembly 200 is provided with a plurality of groups, the rotating head assembly 200 is installed on the rotating ring 100, one end of the 90-degree right-angle adapter 300 is connected with the rotating ring 100, the other end of the 90-degree right-angle adapter 300 is connected with the rotating driver assembly 400, and the power direction of the rotating driver assembly 400 is changed through the 90-degree right-angle adapter 300.

The rotating ring 100 comprises a housing fixing seat 1, a housing fixing ring cover 2, a main gear ring 3, a transmission gear shaft 4, a bearing 5, a housing fixing connecting column 6, a main gear bearing fixing column 7, a universal coupling 8 and a cable support 9.

The shell fixing ring cover 2 is covered on the shell fixing seat 1, an annular cavity is formed between the shell fixing seat 1 and the shell fixing ring cover 2, the main gear ring 3 and the cable support 9 are located in the annular cavity and are installed on the shell fixing seat 1, and the cable support 9 is located in an inner ring of the main gear ring 3;

the utility model discloses a drive gear, including shell fixing base 1, shell fixed ring lid 2, shell fixed ring lid 6, bearing 5, and drive gear axle 4, shell fixed ring lid 2 is installed on shell fixing base 1 through shell fixed ring 6, and shell fixed ring 6 is equipped with the multiunit, bearing 5 installs on the top of drive gear axle 4, and the bottom of drive gear axle 4 installs on shell fixing base 1, the cover is equipped with the ring gear on the drive gear axle 4, the ring gear on the drive gear axle 4 meshes with main gear ring 3, universal coupling 8 installs on drive gear axle 4, and universal coupling 8 protrusion sets up on shell fixing base 1 surface.

The rotary head assembly 200 includes a rotary head holder 10, a rotary head holder 11, a rotary head end plate 12, a rotary head 13, a rotary head docking nut 14, a rotary head spur rack 15, a rotary head fixing shaft 16, a rotary head lead screw 17, a rotary head lead screw nut 18, a rotary head connecting gear 19, and a rotary head bearing 20.

The rotary head fixing seat 10 is mounted on the rotary head support 11 through bolts, the rotary head spur rack 15 is located in an opening through groove of the rotary head fixing seat 10, the rotary head spur rack 15 is sleeved on the outer wall of the rotary head screw nut 18, the rotary head screw nut 18 is in threaded connection with the rotary head screw nut 17, the tail end of the rotary head screw nut 17 is connected with the rotary head connecting gear 19 and then is inserted into the rotary head fixing seat 10, rotary head bearings 20 are mounted at the upper end and the lower end of the rotary head screw nut 18 of the rotary head screw nut 17, the rotary head end plate 12 is fixed at the top end of the rotary head fixing seat 10 through bolts, the rotary head 13 is movably mounted on the rotary head fixing seat 10 through two groups of rotary head fixing shafts 16, and tooth marks;

the top end of the rotary head 13 is provided with a rotary head docking nut 14, a rotary head bearing 20 is also arranged between the rotary head fixing shaft 16 and the mounting hole on the rotary head fixing seat 10, the rotary head end plate 12 is installed behind the rotary head fixing seat 10, and the end of the rotary head lead screw 17 is inserted into the through hole of the rotary head end plate 12.

The 90-degree right-angle adapter 300 includes an adapter housing 21, an adapter cover plate 22, an adapter bevel gear 23, an adapter coupling rod a24, an adapter coupling rod B25, an adapter bearing 26, an adapter snap spring 27, an adapter connecting block a28, an adapter extension bar 29, an adapter coupling 30, an adapter connecting block B31, and an adapter fixing cylinder 32.

One end of the adaptor coupling rod A24 and one end of the adaptor coupling rod B25 penetrate through and extend into the adaptor housing 21, the end of the adaptor coupling rod A24 extending into the adaptor housing 21 is provided with an adaptor bevel gear 23, the adaptor bevel gears 23 of the adaptor coupling rod A24 and the adaptor coupling rod B25 are in a vertical state, the adaptor coupling rod A24 and the adaptor bevel gear 23 of the adaptor coupling rod B25 are meshed with each other, an adaptor bearing 26 and an adaptor snap spring 27 are arranged between the adaptor coupling rod A24 and the adaptor coupling rod B25 and the adaptor housing 21, and the adaptor cover plate 22 is arranged on the adaptor housing 21;

adapter couplers 30 are installed at two ends of the adapter extension bar 29, one end of the adapter extension bar 29 is connected with an adapter coupling bar B25 through the adapter couplers 30, the adapter fixing cylinder 32 covers the adapter extension bar 29 peripherally, one end of the adapter fixing cylinder 32 is installed on the adapter shell 21 through an adapter connecting block A28, and an adapter connecting block B31 is installed at the other end of the adapter fixing cylinder 32.

The rotary drive assembly 400 includes a rotary drive flange 33, a rotary drive gear ring bearing 34, a rotary drive gear ring 35, a rotary drive gear ring cover 36, a rotary drive seal gear drive shaft 37, an O-ring 38, a rotary drive bearing a39, a rotary drive bearing B40, a rotary drive seal gear drive shaft nut 41, a rotary drive reduction gear 42, a rotary drive reduction gear bearing set screw 43, and a rotary drive 44.

The output shaft of the rotary driver 44 is connected with one end of the transmission shaft 37 of the seal gear of the rotary driver, the reduction gear 42 of the rotary driver is provided with three groups, and three sets of rotary drive reduction gears 42 are all meshed with the rotary drive seal gear drive shaft 37, the rotary drive reduction gear 42 is mounted on the rotary drive flange 33 by rotary drive reduction gear bearing set screws 43, the other end of the rotary drive seal gear drive shaft 37 extends through the rotary drive flange 33, and the rotary actuator sealed gear transmission shaft 37 is respectively provided with a rotary actuator bearing a39 and a rotary actuator bearing B40 through both ends of the rotary actuator flange 33, the O-shaped ring 38 is sleeved above the rotary driver sealing gear transmission shaft 37, and a rotary driver sealing gear transmission shaft nut 41 is installed at the tail end of the rotary driver sealing gear transmission shaft 37;

the rotary driver gear ring bearing 34 is installed in an annular groove of the rotary driver flange 33, the rotary driver gear ring 35 is installed on an inner annular wall of the rotary driver gear ring bearing 34, and the rotary driver gear ring cover 36 covers the rotary driver gear ring 35 and then is fixed on the rotary driver flange 33.

The rotating head connecting gear 19 is meshed with the main gear ring 3, the other end of the adapter extension bar 29 is connected with a rotating driver sealing gear transmission shaft 37 through an adapter coupler 30, and the adapter coupling rod A24 is connected with a universal coupler 8 for power transmission and linkage.

It should be noted that, a concentric circle three-dimensional electric step scanning system for a high vacuum scientific experiment apparatus, in operation, can realize 0 ~ 90 degrees right angle reversal motion according to rotating head assembly 200, because of the inside gear of rotating head assembly 200 and the completion motion mode of lead screw cooperation mechanical principle, rotating head assembly 200 is assembled the back and is installed respectively in rotatory ring 100 corresponding position, the main gear ring 3 inside rotatory ring 100 and rotating head connecting gear 19 are finished the gear cooperation, rotatory ring 100 main gear ring 3 drives rotating head assembly 200 after the movment and presses all the rotating gears and the lead screw motion of dress on rotatory ring 100 respectively, thereby realize rotating head assembly 200 and link. The main gear ring 3 of the rotating ring 100 is in gear fit with the transmission gear shaft 4 on the rotating ring 100, and the transmission gear shaft 4 is in gear fit with the coupler 8, so that power input and external power connection are completed. One end of the 90-degree right-angle adapter 300 is connected with the coupler 8 output by the rotating ring 100, and the other end is connected with the internal port of the vacuum cavity of the rotating driver assembly 400, so that the power input of the concentric three-dimensional rapid electric stepping scanning system and the internal component of the cavity are sealed with the outside, the concentric three-dimensional rapid electric stepping scanning system drives the 90-degree right-angle adapter 300 to input to the main gear ring 3 of the rotating ring 100 through the driving power of the external rotating driver, and drives the rotating head assembly 200 to move mechanically, thereby realizing the internal measurement of the concentric three-dimensional rapid electric stepping scanning system.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.