阅读说明：本技术 一种基于音叉驱动效应的高精度水平轴硅微陀螺仪 (High-precision horizontal axis silicon micro gyroscope based on tuning fork driving effect ) 是由 刘国文 高乃坤 徐杰 张乐民 王健鹏 刘福民 于 2020-06-23 设计创作，主要内容包括：本发明公开了一种基于音叉驱动效应的高精度水平轴硅微陀螺仪,包括：包括盖帽层、陀螺仪敏感结构和衬底层；其中,盖帽层和衬底层相连接组成内部真空结构,陀螺仪敏感结构设置于内部真空结构；陀螺敏感结构包括第一驱动梳齿组、第二驱动梳齿组、第三驱动梳齿组、第四驱动梳齿组、第一驱动检测梳齿、第二驱动检测梳齿、第三驱动检测梳齿、第四驱动检测梳齿、第一驱动弹性梁组、第二驱动弹性梁组、第一检测弹性梁组、第二检测弹性梁组、锚区组、第一质量块、第二质量块、耦合弹性梁、第一驱动框架和第二驱动框架。本发明实现了俯仰和滚动角速率的测量,并减小了惯性测量单元的体积。(The invention discloses a high-precision horizontal axis silicon micro gyroscope based on tuning fork driving effect, which comprises: the gyroscope sensor comprises a cover cap layer, a gyroscope sensitive structure and a substrate layer; the gyroscope sensitive structure is arranged in the internal vacuum structure; the gyroscope sensitive structure comprises a first driving comb tooth group, a second driving comb tooth group, a third driving comb tooth group, a fourth driving comb tooth group, a first driving detection comb tooth, a second driving detection comb tooth, a third driving detection comb tooth, a fourth driving detection comb tooth, a first driving elastic beam group, a second driving elastic beam group, a first detection elastic beam group, a second detection elastic beam group, an anchor block group, a first mass block, a second mass block, a coupling elastic beam, a first driving frame and a second driving frame. The invention realizes the measurement of pitch and roll angular rates and reduces the volume of the inertial measurement unit.)

1. A high-precision horizontal axis silicon micro gyroscope based on tuning fork driving effect is characterized by comprising: comprises a cover cap layer (17), a gyroscope sensitive structure (18) and a substrate layer (19); wherein the content of the first and second substances,

the cover layer (17) and the substrate layer (19) are connected to form an internal vacuum structure, and the gyroscope sensitive structure (18) is arranged in the internal vacuum structure;

the gyroscope sensitive structure (18) comprises a first driving comb tooth group (1), a second driving comb tooth group (2), a third driving comb tooth group (3), a fourth driving comb tooth group (4), a first driving detection comb tooth (5), a second driving detection comb tooth (6), a third driving detection comb tooth (7), a fourth driving detection comb tooth (8), a first driving elastic beam group (91), a second driving elastic beam group (92), a first detection elastic beam group (101), a second detection elastic beam group (102), an anchor area group (11), a first mass block (12), a second mass block (13), a coupling elastic beam (14), a first driving frame (151) and a second driving frame (152); wherein the content of the first and second substances,

the first driving comb tooth group (1) and the first driving detection comb tooth (5) are arranged on a first side wall (1511) of the first driving frame (151); the second driving comb tooth group (2) and the second driving detection comb teeth (6) are arranged on a first secondary side wall (1512) of the first driving frame (151); wherein the first side wall (1511) is opposite to the first second side wall (1512);

the third driving comb tooth group (3) and the third driving detection comb tooth (7) are both arranged on a second side wall (1521) of the second driving frame (152); the fourth driving comb tooth group (4) and the fourth driving detection comb tooth (8) are both arranged on a second side wall (1522) of the second driving frame (152); wherein the second first sidewall (1521) is opposite to the second sidewall (1522);

one end of the first driving elastic beam group (91) is connected with the anchor group (11), and the other end of the first driving elastic beam group (91) is connected with the first driving frame (151);

one end of the second driving elastic beam group (92) is connected with the anchor group (11), and the other end of the second driving elastic beam group (92) is connected with a second driving frame (152);

the first mass (12) is arranged inside the first drive frame (151) and the second mass (13) is arranged inside the second drive frame (152);

one end of the first detection elastic beam group (101) is connected with the first driving frame (151), and the other end of the first detection elastic beam group (101) is connected with the first mass block (12);

one end of the second detection elastic beam group (102) is connected with the second driving frame (152), and the other end of the second detection elastic beam group (102) is connected with the second mass block (13);

the first driving frame (151) is connected with the second driving frame (152) through the coupling elastic beam (14);

the first mass (12) and the second mass (13) are symmetrical with respect to a center line of the coupling spring beam (14);

the upper surface of the substrate layer (19) is provided with a first metal electrode plate (211) and a second metal electrode plate (212), the first metal electrode plate (211) and the lower surface of the first mass block (12) form a detection capacitor, and the second metal electrode plate (212) and the lower surface of the second mass block (13) form a detection capacitor.

2. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 1, wherein: the first driving comb tooth group (1) comprises five first driving comb teeth, and the five first driving comb teeth are arranged on one side wall of the first driving frame (151) in parallel at equal intervals;

the second driving comb tooth group (2) comprises five second driving comb teeth, and the five second driving comb teeth are arranged on the other side wall of the first driving frame (151) in parallel at equal intervals;

the third driving comb tooth group (3) comprises five third driving comb teeth, and the five third driving comb teeth are arranged on one side wall of the second driving frame (152) in parallel at equal intervals;

the fourth driving comb tooth group (4) comprises five fourth driving comb teeth, and the five fourth driving comb teeth are arranged on the other side wall of the second driving frame (152) in parallel at equal intervals.

3. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 1, wherein: the first driving elastic beam group (91) comprises a first one-to-one driving elastic beam (911), a first two-to-one driving elastic beam (912), a first three-to-one driving elastic beam (913) and a first four-to-one driving elastic beam (914);

the anchor block group (11) comprises a first anchor area (111), a second anchor area (112), a third anchor area (113), a fourth anchor area (114), a fifth anchor area (115) and a sixth anchor area (116);

one end of the first one-to-one driving elastic beam (911) is connected with the first anchor area (111), and the other end of the first one-to-one driving elastic beam (911) is connected with the upper left corner point of the first driving frame (151);

one end of the first secondary driving elastic beam (912) is connected with the second anchor area (112), and the other end of the first secondary driving elastic beam (912) is connected with the upper right corner point of the first driving frame (151);

one end of the first third driving elastic beam (913) is connected with the third anchor area (113), and the other end of the first third driving elastic beam (913) is connected with the lower left corner point of the first driving frame (151);

one end of the first four-drive elastic beam (914) is connected with the fourth anchor area (114), and the other end of the first four-drive elastic beam (914) is connected with the lower right corner point of the first drive frame (151).

4. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 3, wherein: the second driving elastic beam group (92) comprises a second first driving elastic beam (921), a second driving elastic beam (922), a second third driving elastic beam (923) and a second fourth driving elastic beam (924);

one end of the second first driving elastic beam (921) is connected with the second anchor area (112), and the other end of the second first driving elastic beam (921) is connected with the upper left corner point of the second driving frame (152);

one end of the second driving elastic beam (922) is connected with the fifth anchor area (115), and the other end of the second driving elastic beam (922) is connected with the upper right corner point of the second driving frame (152);

one end of the second third driving elastic beam (923) is connected with the fourth anchor area (114), and the other end of the second third driving elastic beam (923) is connected with the lower left corner point of the second driving frame (152);

one end of the second four-drive elastic beam (924) is connected with the sixth anchor area (116), and the other end of the second four-drive elastic beam (924) is connected with the lower right corner point of the second drive frame (152).

5. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 1, wherein: the first detection elastic beam group (101) comprises a first one-to-one detection elastic beam (1011), a first two-to-one detection elastic beam (1012), a first three-to-one detection elastic beam (1013) and a first four-to-one detection elastic beam (1014); wherein the content of the first and second substances,

one end of the first detection elastic beam (1011) is connected with a first side wall (1511) of the first driving frame (151), and the other end of the first detection elastic beam (1011) is connected with the first mass block (12);

one end of the first two-two detection elastic beam (1012) is connected with a first two side wall (1512) of the first driving frame (151), and the other end of the first two-two detection elastic beam (1012) is connected with the first mass block (12);

one end of the first third detection elastic beam (1013) is connected with the first third side wall (1513) of the first driving frame (151), and the other end of the first third detection elastic beam (1013) is connected with the first mass block (12);

one end of the first four detection elastic beam (1014) is connected with a first four side wall (1514) of the first driving frame (151), and the other end of the first four detection elastic beam (1014) is connected with the first mass block (12).

6. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 1, wherein: the second detecting elastic beam group (102) comprises a second first detecting elastic beam (1021), a second detecting elastic beam (1022), a second third detecting elastic beam (1023) and a second fourth detecting elastic beam (1024); wherein the content of the first and second substances,

one end of the second first detection elastic beam (1021) is connected with a second side wall (1521) of the second driving frame (152), and the other end of the second first detection elastic beam (1021) is connected with the second mass block (13);

one end of the second detection elastic beam (1022) is connected with the second side wall (1522) of the second driving frame (152), and the other end of the second detection elastic beam (1022) is connected with the second mass block (13);

one end of the second third detection elastic beam (1023) is connected with the second third side wall (1523) of the second driving frame (152), and the other end of the second third detection elastic beam (1023) is connected with the second mass block (13);

one end of the second four detection elastic beam (1024) is connected with a second four side wall (1524) of the second driving frame (152), and the other end of the second four detection elastic beam (1024) is connected with the second mass block (13).

7. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 1, wherein: the first mass (12) has a square cross section.

8. The high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect as claimed in claim 1, wherein: the cross section of the second mass block (13) is square.

Technical Field

The invention belongs to the technical field of micro-mechanical inertial instruments, and particularly relates to a high-precision horizontal axis silicon micro-gyroscope based on a tuning fork driving effect, which can be applied to systems such as guided bombs, portable air-defense missiles, mobile equipment, unmanned aerial vehicles, navigation equipment and the like and is used for measuring the rotation angular rate of a carrier around a fixed shaft relative to an inertial space.

Background

The gyroscope is a sensor for measuring the rotation motion of a carrier relative to an inertial space, is a core device in the fields of motion measurement, inertial navigation, guidance control and the like, and has very important application value in high-end industrial equipment and accurate striking weapons such as aerospace, unmanned driving, guided ammunition and the like. With the continuous development of application fields such as individual navigation, microminiature operation platform, satellite navigation, unmanned driving, internet of things, intelligent medical treatment and the like, the silicon micro gyroscope has huge application prospect due to the characteristics of small volume, low power consumption, long service life, batch production, low price and the like.

Silicon micro-gyroscopes are commonly used in small Inertial Measurement Units (IMUs), a high performance 6-axis IMU consisting of 3 single-axis micro-gyroscopes and 3 single-axis micro-accelerometers, which can measure yaw rate, pitch rate and roll rate simultaneously. Because the traditional silicon micro gyroscope is generally a Z-axis gyroscope and is used for the application of a yaw rate detection device, the measurement of the pitch and roll angular rates can be realized only by vertically placing the Z-axis gyroscope. This arrangement results in an increase in the volume of the inertial measurement unit, which is not conducive to miniaturization of the micro inertial system. Compared with the advanced foreign technologies, the precision, the integration level and the like of the domestic single-chip integrated three-axis gyroscope still have larger gaps, the development and the application of domestic micro-inertia devices are greatly limited, and the coupling degree of the single-chip integrated three-axis gyroscope in each direction is higher, so that the single-chip integrated three-axis gyroscope is not beneficial to high-precision measurement.

Disclosure of Invention

The technical problem solved by the invention is as follows: the defects of the prior art are overcome, the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect is provided, and the pitching and rolling speed detection is realized by adopting the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect. Meanwhile, a differential vacuum packaging form is adopted, so that the silicon micro gyroscope can keep higher angular rate measurement precision in a complex vibration mechanical environment, and a foundation is laid for integration of a small inertial measurement unit.

The purpose of the invention is realized by the following technical scheme: a high-precision horizontal-axis silicon micro-gyroscope based on tuning fork driving effect comprises: the gyroscope sensor comprises a cover cap layer, a gyroscope sensitive structure and a substrate layer; the cover cap layer and the substrate layer are connected to form an internal vacuum structure, and the gyroscope sensitive structure is arranged in the internal vacuum structure; the gyroscope sensitive structure comprises a first driving comb tooth group, a second driving comb tooth group, a third driving comb tooth group, a fourth driving comb tooth group, a first driving detection comb tooth, a second driving detection comb tooth, a third driving detection comb tooth, a fourth driving detection comb tooth, a first driving elastic beam group, a second driving elastic beam group, a first detection elastic beam group, a second detection elastic beam group, an anchor block group, a first mass block, a second mass block, a coupling elastic beam, a first driving frame and a second driving frame; the first driving comb tooth group and the first driving detection comb teeth are arranged on a first side wall of the first driving frame; the second driving comb tooth group and the second driving detection comb teeth are arranged on a first secondary side wall of the first driving frame; the first side wall is opposite to the first second side wall; the third driving comb tooth group and the third driving detection comb tooth are arranged on a second side wall of the second driving frame; the fourth driving comb tooth group and the fourth driving detection comb teeth are arranged on a second side wall of the second driving frame; wherein the second first side wall is opposite to the second side wall; one end of the first driving elastic beam group is connected with the anchor area group, and the other end of the first driving elastic beam group is connected with the first driving frame; one end of the second driving elastic beam group is connected with the anchor area group, and the other end of the second driving elastic beam group is connected with the second driving frame; the first mass block is arranged inside the first driving frame, and the second mass block is arranged inside the second driving frame; one end of the first detection elastic beam group is connected with the first driving frame, and the other end of the first detection elastic beam group is connected with the first mass block; one end of the second detection elastic beam group is connected with the second driving frame, and the other end of the second detection elastic beam group is connected with the second mass block; the first driving frame is connected with the second driving frame through the coupling elastic beam; the first mass and the second mass are symmetrical about a center line of the coupling spring beam; the upper surface of the substrate layer is provided with a first metal electrode plate and a second metal electrode plate, the first metal electrode plate and the lower surface of the first mass block form a detection capacitor, and the second metal electrode plate and the lower surface of the second mass block form a detection capacitor.

In the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect, the first driving comb tooth group comprises five first driving comb teeth, and the five first driving comb teeth are arranged on one side wall of the first driving frame at equal intervals; the second driving comb tooth group comprises five second driving comb teeth, and the five second driving comb teeth are arranged on the other side wall of the first driving frame at equal intervals in parallel; the third driving comb tooth group comprises five third driving comb teeth, and the five third driving comb teeth are arranged on one side wall of the second driving frame in parallel at equal intervals; the fourth driving comb tooth group comprises five fourth driving comb teeth, and the five fourth driving comb teeth are arranged on the other side wall of the second driving frame at equal intervals.

In the tuning fork drive effect-based high-precision horizontal axis silicon micro gyroscope, the first drive elastic beam group comprises a first one-to-one drive elastic beam, a first two-to-one drive elastic beam, a first three-to-one drive elastic beam and a first four-to-one drive elastic beam; the anchor area group comprises a first anchor area, a second anchor area, a third anchor area, a fourth anchor area, a fifth anchor area and a sixth anchor area; one end of the first one-to-one driving elastic beam is connected with the first anchor area, and the other end of the first one-to-one driving elastic beam is connected with the upper left corner point of the first driving frame; one end of the first secondary driving elastic beam is connected with the second anchor area, and the other end of the first secondary driving elastic beam is connected with the upper right corner point of the first driving frame; one end of the first third driving elastic beam is connected with the third anchor area, and the other end of the first third driving elastic beam is connected with a lower left corner point of the first driving frame; one end of the first four-drive elastic beam is connected with the fourth anchor area, and the other end of the first four-drive elastic beam is connected with the lower right corner point of the first drive frame.

In the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect, the second driving elastic beam group comprises a second first driving elastic beam, a second driving elastic beam, a second third driving elastic beam and a second fourth driving elastic beam; one end of the second first driving elastic beam is connected with the second anchor area, and the other end of the second first driving elastic beam is connected with the upper left corner point of the second driving frame; one end of the second driving elastic beam is connected with the fifth anchor area, and the other end of the second driving elastic beam is connected with the upper right corner point of the second driving frame; one end of the second third driving elastic beam is connected with the fourth anchor area, and the other end of the second third driving elastic beam is connected with a lower left corner point of the second driving frame; one end of the second four-drive elastic beam is connected with the sixth anchor area, and the other end of the second four-drive elastic beam is connected with the lower right corner point of the second drive frame.

In the tuning fork drive effect-based high-precision horizontal axis silicon micro gyroscope, the first detection elastic beam group comprises a first one-to-one detection elastic beam, a first two-to-one detection elastic beam, a first three-to-one detection elastic beam and a first four-to-one detection elastic beam; one end of the first detection elastic beam is connected with a first side wall of the first driving frame, and the other end of the first detection elastic beam is connected with the first mass block; one end of the first secondary detection elastic beam is connected with the first secondary side wall of the first driving frame, and the other end of the first secondary detection elastic beam is connected with the first mass block; one end of the first third detection elastic beam is connected with the first three sidewalls of the first driving frame, and the other end of the first third detection elastic beam is connected with the first mass block; one end of the first fourth detection elastic beam is connected with the first four side walls of the first driving frame, and the other end of the first fourth detection elastic beam is connected with the first mass block.

In the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect, the second detection elastic beam group comprises a second first detection elastic beam, a second detection elastic beam, a second third detection elastic beam and a second fourth detection elastic beam; one end of the second first detection elastic beam is connected with a second side wall of the second driving frame, and the other end of the second first detection elastic beam is connected with the second mass block; one end of the second detection elastic beam is connected with the second side wall of the second driving frame, and the other end of the second detection elastic beam is connected with the second mass block; one end of the second third detection elastic beam is connected with the second three side walls of the second driving frame, and the other end of the second third detection elastic beam is connected with the second mass block; one end of the second fourth detection elastic beam is connected with a second four side wall of the second driving frame, and the other end of the second fourth detection elastic beam is connected with the second mass block.

In the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect, the cross section of the first mass block is square.

In the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect, the cross section of the second mass block is square.

Compared with the prior art, the invention has the following beneficial effects:

(1) compared with the limitation that only yaw rate signals can be measured when a traditional tuning fork driving Z-axis gyroscope is horizontally placed, the tuning fork driving Z-axis gyroscope can measure pitch and roll rate signals when the tuning fork driving Z-axis gyroscope is horizontally placed;

(2) according to the invention, through adopting a double-mass symmetrical differential microstructure design, stress self-offset under vibration condition input can be formed, compared with a single mass horizontal axis structure, the instrument precision is greatly improved, and the measurement of the silicon micro-electromechanical gyroscope on the angular velocity in the horizontal direction under a complex vibration mechanical environment can be realized;

(3) by adopting the structural design of the differential detection capacitor, the invention can effectively inhibit various common-mode interference signals and improve the sensitivity of the detection capacitor.

(4) According to the invention, the material with a gas adsorption effect is used as the detection electrode material, so that the structural quality factor can be effectively improved while signal detection is realized, and the detection sensitivity is further improved.

(5) The invention utilizes the detection capacitor formed by the lower surface of the mass block and the upper surface of the substrate layer, so that the capacitance is larger, and the sensitivity of the detection capacitor is higher.

(6) The horizontal axis gyroscope designed by the invention can be integrated on a three-axis micro-gyroscope system, and compared with the integration of three traditional Z-axis gyroscopes, the size of the system can be effectively reduced.

Drawings

Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:

FIG. 1 is a schematic structural diagram of a high-precision horizontal-axis silicon micro-gyroscope based on tuning fork driving effect according to an embodiment of the present invention;

FIG. 2 is a cross-sectional structural diagram of a high-precision horizontal-axis silicon micro-gyroscope based on tuning fork driving effect according to an embodiment of the present invention;

FIG. 3 is a driving resonance mode diagram of a high-precision horizontal-axis silicon micro-gyroscope based on tuning fork driving effect according to an embodiment of the present invention;

fig. 4 is another driving resonance mode diagram of the high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect according to the embodiment of the invention.

Detailed Description

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

FIG. 1 is a schematic structural diagram of a high-precision horizontal-axis silicon micro-gyroscope based on tuning fork driving effect according to an embodiment of the present invention; fig. 2 is a cross-sectional structural diagram of a high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect according to an embodiment of the present invention.

As shown in fig. 1 and 2, the high-precision horizontal axis silicon micro gyroscope based on the tuning fork driving effect comprises a cap layer 17, a gyroscope sensitive structure 18 and a substrate layer 19, wherein,

the cap layer 17 and the substrate layer 19 are connected to form an internal vacuum structure, and the gyroscope sensitive structure 18 is arranged in the internal vacuum structure;

the gyro sensitive structure 18 comprises a first driving comb tooth group 1, a second driving comb tooth group 2, a third driving comb tooth group 3, a fourth driving comb tooth group 4, a first driving detection comb tooth 5, a second driving detection comb tooth 6, a third driving detection comb tooth 7, a fourth driving detection comb tooth 8, a first driving elastic beam group 91, a second driving elastic beam group 92, a first detection elastic beam group 101, a second detection elastic beam group 102, an anchor area group 11, a first mass block 12, a second mass block 13, a coupling elastic beam 14, a first driving frame 151 and a second driving frame 152; wherein the content of the first and second substances,

the first driving comb tooth group 1 and the first driving detection comb tooth 5 are both arranged on a first side wall 1511 of the first driving frame 151; the second driving comb-tooth group 2 and the second driving detection comb-teeth 6 are both disposed on the first secondary sidewall 1512 of the first driving frame 151; wherein, the first sidewall 1511 is opposite to the first two sidewalls 1512; the third driving comb tooth group 3 and the third driving detection comb tooth 7 are both arranged on the second side wall 1521 of the second driving frame 152; the fourth driving comb tooth group 4 and the fourth driving detection comb tooth 8 are both disposed on the second sidewall 1522 of the second driving frame 152; wherein the second sidewall 1521 is opposite to the second sidewall 1522; one end of the first driving elastic beam group 91 is connected with the anchor area group 11, and the other end of the first driving elastic beam group 91 is connected with the first driving frame 151; one end of the second driving elastic beam group 92 is connected with the anchor area group 11, and the other end of the second driving elastic beam group 92 is connected with the second driving frame 152; the first mass 12 is disposed inside the first driving frame 151, and the second mass 13 is disposed inside the second driving frame 152; one end of the first elastic beam group 101 is connected to the first driving frame 151, and the other end of the first elastic beam group 101 is connected to the first proof mass 12; one end of the second elastic beam group 102 is connected to the second driving frame 152, and the other end of the second elastic beam group 102 is connected to the second mass 13; the first driving frame 151 is connected to the second driving frame 152 by coupling the elastic beam 14; the first mass 12 and the second mass 13 are symmetrical about a center line of the coupling spring beam 14; the upper surface of the substrate layer 19 is provided with a first metal electrode plate 211 and a second metal electrode plate 212, the first metal electrode plate 211 and the lower surface of the first mass block 12 form a detection capacitor, and the second metal electrode plate 212 and the lower surface of the second mass block 13 form a detection capacitor.

The working environment of the gyroscope sensitive structure 18 is a vacuum environment formed by connecting the cap layer 17 and the substrate layer 19;

the driving mode of the gyroscope sensitive structure 18 is the anti-phase vibration of the first mass block 12 and the second mass block 13 in the X direction, and the resonant frequency of the gyroscope sensitive structure is determined by the rigidity of the first driving elastic beam set 91 and the second driving elastic beam set 92 and the mass of the first mass block 12 and the second mass block 13;

the frequency difference between the anti-phase driving mode and the in-phase driving mode is determined by the rigidity of the elastic coupling beam 14, and the frequency of the in-phase driving mode is far away from the frequency of the anti-phase working mode in actual work by adjusting the rigidity of the elastic coupling beam 14, so that the modal interference is reduced;

the frequency of the detection mode of the gyroscope sensitive structure 18 is determined by the rigidity of the first detection elastic beam set 101 and the second detection elastic beam set 102 and the mass of the first mass block 12 and the second mass block 13;

in a working state, an external driving circuit applies bias alternating current signals to the first driving comb tooth group 1, the second driving comb tooth group 2, the third driving comb tooth group 3 and the fourth driving comb tooth group 4, the alternating current signals of the first driving comb tooth group 1, the second driving comb tooth group 2, the third driving comb tooth group 3 and the fourth driving comb tooth group 4 are opposite in phase, electrostatic force generated by the alternating current signals drives the first mass block 12 and the second mass block 13 to vibrate through the first driving frame 151 and the second driving frame 152 respectively, the vibration mode in the driving direction is that the first mass block 12 and the second mass block 13 vibrate in the X direction in a left-right simple harmonic mode, and the vibration directions of the first mass block 12 and the second mass block 13 are opposite in phase; when an angular velocity along the Y axis is inputted from the outside, the first and second masses 12 and 13 are vibrated up and down in the Z direction by the coriolis force, and the first and second masses 12 and 13 are vibrated in opposite phases. The vibration of the first mass block 12 and the second mass block 13 causes the capacitance gaps of the detection capacitor formed by the first metal electrode plate 211 on the upper surface of the substrate layer 19 and the lower surface of the first mass block 12 and the detection capacitor formed by the second metal electrode plate 212 and the second mass block 13 to be alternately increased and decreased, so that the variable-pitch capacitive differential detection is realized.

As shown in fig. 1, the first driving comb-tooth group 1 includes five first driving comb-teeth, which are disposed side by side at equal intervals on one side wall of the first driving frame 151; the second driving comb tooth group 2 includes five second driving comb teeth, which are arranged side by side at equal intervals on the other side wall of the first driving frame 151; the third driving comb tooth group 3 includes five third driving comb teeth, which are arranged side by side at equal intervals on one side wall of the second driving frame 152; the fourth driving comb-tooth group 4 includes five fourth driving comb-teeth, which are disposed side by side at equal intervals on the other side wall of the second driving frame 152.

As shown in fig. 1, the first driving elastic beam group 91 includes a first primary driving elastic beam 911, a first secondary driving elastic beam 912, a first tertiary driving elastic beam 913, and a first quaternary driving elastic beam 914; anchor group 11 includes first anchor region 111, second anchor region 112, third anchor region 113, fourth anchor region 114, fifth anchor region 115, and sixth anchor region 116; one end of the first one-by-one driving elastic beam 911 is connected with the first anchor region 111, and the other end of the first one-by-one driving elastic beam 911 is connected with the upper left corner point of the first driving frame 151; one end of the first secondary driving elastic beam 912 is connected with the second anchor area 112, and the other end of the first secondary driving elastic beam 912 is connected with the upper right corner point of the first driving frame 151; one end of the first third driving elastic beam 913 is connected to the third anchor region 113, and the other end of the first third driving elastic beam 913 is connected to a lower left corner point of the first driving frame 151; one end of the first fourth driving elastic beam 914 is connected to the fourth anchor region 114, and the other end of the first fourth driving elastic beam 914 is connected to a lower right corner point of the first driving frame 151.

As shown in fig. 1, the second driving spring beam group 92 includes a second first driving spring beam 921, a second driving spring beam 922, a second third driving spring beam 923 and a second fourth driving spring beam 924; one end of the second first driving elastic beam 921 is connected to the second anchor region 112, and the other end of the second first driving elastic beam 921 is connected to the upper left corner point of the second driving frame 152; one end of the second driving elastic beam 922 is connected with the fifth anchor region 115, and the other end of the second driving elastic beam 922 is connected with the upper right corner point of the second driving frame 152; one end of the second third driving elastic beam 923 is connected to the fourth anchor region 114, and the other end of the second third driving elastic beam 923 is connected to a lower left corner point of the second driving frame 152; one end of the second fourth driving elastic beam 924 is connected to the sixth anchor area 116, and the other end of the second fourth driving elastic beam 924 is connected to the lower right corner point of the second driving frame 152.

As shown in fig. 1, the first detecting elastic beam group 101 includes a first one-detecting elastic beam 1011, a first two-detecting elastic beam 1012, a first three-detecting elastic beam 1013, and a first four-detecting elastic beam 1014; one end of the first elastic beam 1011 is connected to the first sidewall 1511 of the first driving frame 151, and the other end of the first elastic beam 1011 is connected to the first mass block 12; one end of the first two-sensing elastic beam 1012 is connected to the first two-side wall 1512 of the first driving frame 151, and the other end of the first two-sensing elastic beam 1012 is connected to the first proof mass 12; one end of the first third sensing elastic beam 1013 is connected to the first three sidewalls 1513 of the first driving frame 151, and the other end of the first third sensing elastic beam 1013 is connected to the first proof mass 12; one end of the first fourth sensing elastic beam 1014 is connected to the first fourth sidewall 1514 of the first driving frame 151, and the other end of the first fourth sensing elastic beam 1014 is connected to the first mass block 12.

As shown in fig. 1, the second detecting elastic beam set 102 includes a second first detecting elastic beam 1021, a second detecting elastic beam 1022, a second third detecting elastic beam 1023 and a second fourth detecting elastic beam 1024; one end of the second detecting elastic beam 1021 is connected to the second sidewall 1521 of the second driving frame 152, and the other end of the second detecting elastic beam 1021 is connected to the second mass 13; one end of the second detection elastic beam 1022 is connected to the second sidewall 1522 of the second driving frame 152, and the other end of the second detection elastic beam 1022 is connected to the second proof mass 13; one end of the second third detecting elastic beam 1023 is connected to the second three sidewalls 1523 of the second driving frame 152, and the other end of the second third detecting elastic beam 1023 is connected to the second mass 13; one end of the second fourth detecting elastic beam 1024 is connected to the second fourth sidewall 1524 of the second driving frame 152, and the other end of the second fourth detecting elastic beam 1024 is connected to the second mass 13.

The first mass block 12 and the second mass block 13 are symmetrically arranged, and the operating frequency can be adjusted by designing the size of the driving elastic beam, and preferably, the operating frequency of the present embodiment is about 10 KHz. The rigidity of the driving elastic beam in the X direction is far less than the rigidity of the driving elastic beam in the Y direction and the Z direction, so that the mass block can be driven in the X direction.

As shown in fig. 3, in the driving mode, due to the adoption of the symmetrical differential design, the motion directions of the two mass blocks are in opposite phases, so that stress self-cancellation under the input of the vibration condition can be formed, the thermoelastic loss is reduced, the quality factor is improved, and further the mechanical sensitivity is improved.

In the embodiment, a positive phase alternating current driving voltage with a direct current bias is applied to the first driving comb tooth group 1, the second driving comb tooth group 2, the third driving comb tooth group 3 and the fourth driving comb tooth group 4, a negative phase alternating current driving voltage with a direct current bias is applied to the first driving detection comb tooth 5, the second driving detection comb tooth 6, the third driving detection comb tooth 7 and the fourth driving detection comb tooth 8, an alternating electrostatic driving force is generated, and the first mass block 12 and the second mass block 13 realize negative phase harmonic vibration on the X axis, so that closed-loop driving can be realized through an external circuit and an algorithm.

As shown in fig. 4, in the detection mode of the horizontal axis silicon micro-gyroscope according to the present invention, the detection frequency can be adjusted by the detection elastic beam. When the angular velocity of the Y axis is input, the velocity generated by the vibration of the mass block in the X direction interacts with the angular velocity input omega to generate the Coriolis acceleration along the Z axis. The first mass block 12 and the second mass block 13 are forced to vibrate under the action of the coriolis inertia force in the Z axis, the vibration directions of the mass blocks are opposite, and the vibration amplitude represents the magnitude of the coriolis acceleration. The external detection circuit extracts the driving displacement signals of the first driving detection comb 5, the second driving detection comb 6, the third driving detection comb 7 and the fourth driving detection comb 8, and performs differential processing, so that various common-mode interference signals are suppressed.

In the embodiment, the up-and-down vibration of the mass block on the Z axis causes the gap between the lower surface of the mass block and the upper surface of the substrate layer to be changed, the capacitance change signal is extracted through an external detection circuit, and the measured value of angular rate output is further calculated.

The embodiment can be widely applied to systems such as guided bombs, portable air-defense missiles, intelligent shells, unmanned planes, navigation equipment and the like, is used for measuring the rotation angular rate of a carrier around a fixed shaft relative to an inertial space, and can also effectively reduce the volume of a triaxial integrated micro-inertial system. Without departing from the technical principle of the present invention, several modifications and variations can be made, and these modifications and variations should also be regarded as the scope of the present invention.

Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make variations and modifications of the present invention without departing from the spirit and scope of the present invention by using the methods and technical contents disclosed above.