阅读说明：本技术 基于2t3r型柔性运动副的微定位平台 (Micro-positioning platform based on 2T3R type flexible kinematic pair ) 是由 曹毅 孟刚 居勇健 周辉 于 2020-08-05 设计创作，主要内容包括：本发明提供了基于2T3R型柔性运动副的微定位平台,其有效减少了应力刚化效应、平台的运动耦合及伴生转动的影响,提高平台的定位精度。其包括基座、动平台、第一柔性支链、第二柔性支链以及驱动器,第一柔性支链包括柔性模块一、连接杆、柔性模块二,柔性模块一包括中部刚性连接部和簧片,柔性模块二与动平台连接；第二柔性支链包括柔性模块三、连接杆、柔性模块二,柔性模块三包括中心刚性连接部和簧片,连接杆一端与中心刚性连接部连接,另一端与柔性模块二连接,柔性模块二与动平台连接；柔性模块二包括呈刚性连接框、柔性杆、刚性连接块一和刚性连接块二。(The invention provides a micro-positioning platform based on a 2T3R type flexible kinematic pair, which effectively reduces the stress rigidization effect, the kinematic coupling of the platform and the influence of accompanying rotation, and improves the positioning precision of the platform. The flexible branch chain comprises a first flexible module, a connecting rod and a second flexible module, wherein the first flexible module comprises a middle rigid connecting part and a reed, and the second flexible module is connected with the movable platform; the second flexible branched chain comprises a flexible module III, a connecting rod and a flexible module II, wherein the flexible module III comprises a central rigid connecting part and a reed, one end of the connecting rod is connected with the central rigid connecting part, the other end of the connecting rod is connected with the flexible module II, and the flexible module II is connected with the movable platform; the flexible module II comprises a rigid connecting frame, a flexible rod, a rigid connecting block I and a rigid connecting block II.)

1. The micro positioning platform based on the 2T3R type flexible kinematic pair comprises a base, a movable platform, a first flexible branched chain, a second flexible branched chain and a driver, wherein the first flexible branched chain and the movable platform are positioned in an XY plane, the first flexible branched chain is distributed around the movable platform, the second flexible branched chain is positioned in a Z-axis direction and is positioned between the base and the movable platform, and the micro positioning platform is characterized in that: the first flexible branched chain comprises a linear flexible module I, a connecting rod and a flexible module II, wherein the connecting rod is perpendicular to the flexible module I, the flexible module II is perpendicular to the flexible module I, the flexible module I comprises a middle rigid connecting part and spring leaves positioned on two sides of the middle rigid connecting part, one end of the connecting rod is connected with the middle rigid connecting part, the other end of the connecting rod is connected with the flexible module II, and the flexible module II is connected with the movable platform; the second flexible branched chain comprises a cross-shaped flexible module III, a connecting rod and a flexible module II, wherein the connecting rod is perpendicular to the flexible module III, the flexible module II is perpendicular to the flexible module III, the flexible module III comprises a central rigid connecting part and reeds positioned around the central rigid connecting part, one end of the connecting rod is connected with the central rigid connecting part, the other end of the connecting rod is connected with the flexible module II, and the flexible module II is connected with the movable platform; the flexible module II comprises a square rigid connection frame, flexible rods, a rigid connection block I and a rigid connection block II, one end of each flexible rod is connected with the middle point of four side frames of the rigid connection frame respectively, the flexible rods are connected with the rigid connection block I, the flexible rods are connected with the rigid connection block II respectively, the rigid connection block I is connected with the connection rod, and the rigid connection block II is connected with the movable platform.

2. The micropositioning platform of claim 1 based on a flexible kinematic pair model 2T3R, wherein: the driver comprises an X-direction driver, a Y-direction driver and a Z-direction driver, two adjacent first flexible branched chains are respectively connected with the X-direction driver and the Y-direction driver, the X-direction driver and the Y-direction driver are respectively connected with the middle rigid connecting part, the second flexible branched chain is connected with the Z-direction driver, and the Z-direction driver is connected with the central rigid connecting part.

3. A micropositioning platform based on a flexible kinematic pair of type 2T3R according to claim 1 or 2, wherein: the fixed connection part II is connected with the base, and the fixed connection part I is connected with the pillar of the base.

4. The micropositioning platform of claim 3 based on a flexible kinematic pair model 2T3R, wherein: the base is square, the second fixed connecting part is connected with the middle point of each edge of the base, and the support is located at the connecting point of the two adjacent edges of the base.

5. The micropositioning platform of claim 4 based on a flexible kinematic pair model 2T3R, wherein: the mounting brackets are positioned in the XY plane and used for connecting the driver and are respectively connected with the first fixed connecting parts; in the Z-axis direction, a mounting bracket for connecting the driver is connected with the bottom of the base.

6. The micropositioning platform of claim 1 based on a flexible kinematic pair model 2T3R, wherein: the two reeds positioned on the two sides of the middle rigid connecting part are respectively arranged in parallel and are perpendicular to the connecting rod connected to the middle rigid connecting part.

7. The micropositioning platform of claim 1 or 6 based on a flexible kinematic pair model 2T3R, wherein: the two reeds positioned on the periphery of the central rigid connecting part are respectively arranged in parallel and are perpendicular to the connecting rod connected to the central rigid connecting part.

8. The micropositioning platform of claim 1 based on a flexible kinematic pair model 2T3R, wherein: the same flexible module is simultaneously connected with two connecting rods and two flexible modules II which are arranged in parallel.

9. The micropositioning platform of claim 1 or 8 based on a flexible kinematic pair model 2T3R, wherein: the second flexible branched chain comprises four connecting rods and four flexible modules II, wherein the four connecting rods and the flexible modules II are connected to the central rigid connecting part in a cross shape, the two flexible modules II are arranged in parallel, and the two adjacent flexible modules II are arranged vertically.

10. The micropositioning platform of claim 1 based on a flexible kinematic pair model 2T3R, wherein: the second rigid connecting block is in a cuboid shape, and when the second rigid connecting block is connected with the movable platform, the upper surface of the second rigid connecting block is parallel to the upper surface of the movable platform.

Technical Field

The invention relates to the technical field of flexible mechanisms, in particular to a micro-positioning platform based on a 2T3R type flexible kinematic pair.

Background

The traditional mechanical system is exposed to inevitable problems under the working conditions of precision, micro-size and the like. The precise micro-operation technology can be rapidly developed and widely applied in the related fields, and particularly has great influence in the fields of biological medicine science and technology, precise measurement, national defense, aerospace and the like. The method is applied to the application occasions with extremely high precision and sensitivity requirements on operation objects, such as optical fiber precision butt joint, micro electro mechanical systems, biological micro operation technology and the like. A flexible micro-positioning platform is often used as a transmission mechanism of a micro-operation system to meet the requirements of high precision and high sensitivity.

Unlike traditional rigid mechanisms that achieve motion and function through kinematic pairs, flexible mechanisms utilize elastic deformation of their materials to achieve motion, force, and energy transfer. The reduction of the kinematic pair is even completely replaced, and a series of complex problems such as clearance, frictional wear, lubrication and the like in the mechanism are greatly reduced. As an important branch of flexible mechanics, the flexible micro positioning platform technology is also rapidly developed, but the motion precision and the motion decoupling characteristic of the multi-degree-of-freedom micro positioning platform still need to be further improved, and meanwhile, the flexible kinematic pair with multiple degrees of freedom, a large stroke and no stress rigidization effect has urgent needs, and the problem that the improvement of the associated rotation phenomenon generated in the motion process of the flexible kinematic pair with the large stroke is urgently needed to be solved.

The existing spatial translation micro-positioning platform is a three-degree-of-freedom decoupling long-stroke micro-positioning platform as the application number 201310470918.8, the passive auxiliary associated rotation effect of each branched chain is obvious, the measure of reducing or eliminating the associated rotation effect is not taken, and the coupling phenomenon is generated in the motion process to influence the positioning precision of the micro-positioning platform; the whole structure is complicated, and manufacturability is poor. Application number 201910397913.4 is a high-precision large-stroke large-effective table-board space translation precision positioning platform, the symmetrical arrangement structure of five branched chains effectively eliminates partial accompanying rotation phenomenon in the platform movement process, but the X, Y direction branched chain passive auxiliary stress rigidization effect is obvious, the mechanical property of the platform is not good, and the high precision of the platform in a large stroke range is difficult to guarantee.

Disclosure of Invention

Aiming at the problems that the conventional positioning platform has obvious associated rotation effect of a branched chain driven pair, generates a coupling phenomenon and has obvious stress rigidization effect, the invention provides a micro-positioning platform based on a 2T3R type flexible kinematic pair, which effectively reduces the stress rigidization effect, the motion coupling of the platform and the associated rotation effect and improves the positioning precision of the platform.

The technical scheme is as follows: the micro positioning platform based on the 2T3R type flexible kinematic pair comprises a base, a movable platform, a first flexible branched chain, a second flexible branched chain and a driver, wherein the first flexible branched chain and the movable platform are positioned in an XY plane, the first flexible branched chain is distributed around the movable platform, the second flexible branched chain is positioned in a Z-axis direction and is positioned between the base and the movable platform, and the micro positioning platform is characterized in that: the first flexible branched chain comprises a linear flexible module I, a connecting rod and a flexible module II, wherein the connecting rod is perpendicular to the flexible module I, the flexible module II is perpendicular to the flexible module I, the flexible module I comprises a middle rigid connecting part and spring leaves positioned on two sides of the middle rigid connecting part, one end of the connecting rod is connected with the middle rigid connecting part, the other end of the connecting rod is connected with the flexible module II, and the flexible module II is connected with the movable platform; the second flexible branched chain comprises a cross-shaped flexible module III, a connecting rod and a flexible module II, wherein the connecting rod is perpendicular to the flexible module III, the flexible module II is perpendicular to the flexible module III, the flexible module III comprises a central rigid connecting part and reeds positioned around the central rigid connecting part, one end of the connecting rod is connected with the central rigid connecting part, the other end of the connecting rod is connected with the flexible module II, and the flexible module II is connected with the movable platform; the flexible module II comprises a square rigid connection frame, flexible rods, a rigid connection block I and a rigid connection block II, one end of each flexible rod is connected with the middle point of four side frames of the rigid connection frame respectively, the flexible rods are connected with the rigid connection block I, the flexible rods are connected with the rigid connection block II respectively, the rigid connection block I is connected with the connection rod, and the rigid connection block II is connected with the movable platform.

It is further characterized in that:

the driver comprises an X-direction driver, a Y-direction driver and a Z-direction driver, two adjacent first flexible branched chains are respectively connected with the X-direction driver and the Y-direction driver, the X-direction driver and the Y-direction driver are respectively connected with the middle rigid connecting part, the second flexible branched chain is connected with the Z-direction driver, and the Z-direction driver is connected with the central rigid connecting part;

one ends of the reeds positioned on two sides of the middle rigid connecting part are connected with the middle rigid connecting part, and the other ends of the reeds are connected with a first rigid fixed connecting part;

the base is square, the second fixed connecting part is connected with the middle point of each edge of the base, and the support is positioned at the connecting point of two adjacent edges of the base;

the mounting brackets are positioned in the XY plane and used for connecting the driver and are respectively connected with the first fixed connecting parts; in the Z-axis direction, a mounting bracket for connecting the driver is connected with the bottom of the base;

two reeds which are positioned on two sides of the middle rigid connecting part are respectively arranged in parallel and are perpendicular to the connecting rod connected to the middle rigid connecting part;

the two reeds positioned on the periphery of the central rigid connecting part are respectively arranged in parallel and are perpendicular to the connecting rod connected to the central rigid connecting part;

the same flexible module is simultaneously connected with two connecting rods arranged in parallel and two flexible modules II;

the second flexible branched chain comprises four connecting rods and four second flexible modules, the four connecting rods and the second flexible modules are connected to the central rigid connecting part in a cross shape, two opposite second flexible modules are arranged in parallel, and two adjacent second flexible modules are arranged vertically;

the second rigid connecting block is in a cuboid shape, and when the second rigid connecting block is connected with the movable platform, the upper surface of the second rigid connecting block is parallel to the upper surface of the movable platform.

The invention has the beneficial effects that: the flexible module I and the flexible module III are connected with the movable platform through the flexible module II, the flexible module II is a 2T3R type flexible kinematic pair based on a flexible slender rod, the flexible kinematic pair adopts an inverse series structure, two groups of parallel rod structures have parasitic motion, but the parasitic motion is equal in size and opposite in direction, complete offset can be realized theoretically, meanwhile, the flexible rod can generate a stress rigidization effect under the action of axial tension and pressure, and the inverse series structure can be avoided; in addition, the platform movement can generate coupling displacement and accompanying rotation, and the platform reduces the coupling displacement and the accompanying rotation from two aspects; the motion pair is in an inverted series structure, parasitic motion of the motion pair is reduced, and coupling displacement is reduced in the integral motion of the platform; and secondly, four same branched chains in the overall XY plane of the platform are symmetrically distributed, so that partial coupling displacement and accompanying rotation are counteracted.

Drawings

FIG. 1 is a schematic view of a perspective structure according to the present invention;

FIG. 2 is a schematic view of another embodiment of the present invention;

FIG. 3 is a schematic diagram of the structure of a first flexible branch in the XY plane;

FIG. 4 is a schematic structural diagram of a second flexible branch in the Z-axis direction;

FIG. 5 is a schematic structural view of a second flexible module;

FIG. 6 is a schematic view of a base structure;

fig. 7 is a schematic structural view of another second flexible branch.

Detailed Description

As shown in fig. 1 and 2, the micro positioning platform based on the 2T3R type flexible kinematic pair includes a base 1, a movable platform 2, four first flexible branched chains 3, a second flexible branched chain 4 and a driver, the first flexible branched chains 3 and the movable platform 2 are located in an XY plane, the first flexible branched chains 3 are distributed around the movable platform 2, the second flexible branched chains 4 are located in a Z axis direction and are located between the base 1 and the movable platform 2, as shown in fig. 3, the first flexible branched chains 3 include a linear flexible module one 31, a cross connecting rod one 32 perpendicular to the flexible module one 31, and a first flexible module two 33 perpendicular to the flexible module one 31, the flexible module one 31 includes a middle rigid connecting portion 311 and spring pieces one 312 located at two sides of the middle rigid connecting portion 311, the spring pieces one 312 located at two sides of the middle rigid connecting portion 311 are respectively two and are parallel and are perpendicular to the connecting rod one 32 connected to the middle rigid connecting portion 311, one end of the connecting rod 32 is connected with the middle rigid connecting part 311, the other end of the connecting rod is connected with the second flexible module 33, the connecting rod 32 is positioned inside the second flexible module 33, and the second flexible module 33 is connected with the movable platform 2; one end of the first connecting rod 32 is connected with an active pair of the branched chain, namely, the first connecting rod is connected with a rigid part in the middle of the first flexible module 31 through a screw, and the other end of the first connecting rod is connected with the second flexible module 33 through a screw to form a passive pair of the first flexible branched chain; the same flexible module I31 is simultaneously connected with two connecting rods II 32 and two first flexible modules II 33 which are arranged in parallel.

The four same first flexible branched chains 3 are connected with the rigid connecting block of the second flexible module 33 and the movable platform 2 through screws, and the connection of the first flexible branched chains 3 and the movable platform 2 is completed. When two adjacent first flexible branched chains 3 are connected, the driving pairs have a spatial superposition phenomenon, so that the four groups of driving pairs of the XY plane branched chains adopt an integral manufacturing method, so that the rigid parts at two sides of the driving pairs of two adjacent groups of flexible modules I31 can simultaneously complete the connection of the two groups of flexible modules I31 and the base support 11, and the installation is convenient.

As shown in fig. 4, the second flexible branched chain 4 includes a cross-shaped flexible module three 41, a cross-shaped connecting rod two 42 disposed perpendicular to the flexible module three 41, and a second flexible module two 43 disposed perpendicular to the flexible module three 41, the flexible module three 41 includes a central rigid connecting portion 411 and two spring pieces 412 disposed around the central rigid connecting portion 411, the two spring pieces 412 disposed around the central rigid connecting portion 411 are respectively disposed in parallel and perpendicular to the connecting rod two 42 connected to the central rigid connecting portion 411, one end of the connecting rod two 42 is connected to the central rigid connecting portion 411, the other end is connected to the second flexible module two 43, and the second flexible module two 43 is connected to the movable platform 2.

The second flexible branched chain 4 specifically comprises four second connecting rods 42 and four second flexible modules 43, the four second connecting rods 42 and the four second flexible modules 43 are connected to the central rigid connecting part 411 in a cross shape, the two opposite second flexible modules 43 are arranged in parallel, namely the connecting blocks are assembled in parallel, the two adjacent second flexible modules 43 are arranged vertically and the connecting blocks are assembled vertically, so as to keep the complete symmetry of the structure in the direction of the platform X, Y, one end of each second connecting rod 42 is connected with the rigid part in the middle of the third flexible module 41 through a screw to form an active pair of the second flexible branched chain 4, and the other end of each second flexible module 43 and the rigid connecting block of the second flexible module are connected through a screw to form a passive pair of the second flexible branched chain 4. In addition, as shown in fig. 7, the flexible module three 41 is composed of two identical flexible modules one 31 with their middle rigid parts overlapped at the center and orthogonally distributed, and can be integrally manufactured and easily produced and installed.

Referring to fig. 5, which shows a flexible elongated rod-based 2T 3R-type flexible kinematic pair, having the natural advantage of a large stroke, a first flexible module two 33 and a second flexible module two 43 are similar in structure and include a square rigid connection frame 331, four identical flexible rods 332, a first rigid connection block 333 and a second rigid connection block 334, one end of each flexible rod 332 is connected to the midpoint of four borders of the rigid connection frame 331, wherein two opposite flexible rods 332 are connected to the first rigid connection block 333 as active pairs of the second flexible modules, the other two flexible rods 332 are connected to the second rigid connection block 334 as passive pairs of the second flexible modules, the first rigid connection block 333 is connected to the connection rod 32 by screws, the second rigid connection block 334 is connected to the movable platform 2 by screws, and the second rigid connection block 334 is in a rectangular parallelepiped shape, when the second rigid connection block 334 is connected to the movable platform 2, the upper surface of the rigid connecting block two 334 of the first flexible branched chain 3 and the rigid connecting block two 334 of the second flexible branched chain 4 are respectively two different surfaces because of different installation directions, when the rigid connecting block two 334 of the first flexible branched chain 3 is installed, the upper surface thereof can be seen in fig. 1, the flexible module two shown in fig. 5 is transversely installed, the upper surface of the rigid connecting block two 334 in fig. 1 is a side surface of the connecting block in fig. 5, when the rigid connecting block two 334 of the second flexible branched chain 4 is installed, the upper surface thereof can be seen in fig. 4, the flexible module two shown in fig. 5 is vertically installed, and the upper surface of the rigid connecting block two 334 in fig. 4 is an upper surface of the connecting block in fig. 5.

In addition, as shown in fig. 1 and fig. 2, the driver is a voice coil motor driver, and the driver includes an X-direction driver 5-1, a Y-direction driver 5-2, and a Z-direction driver 5-3, two adjacent first flexible branched chains 3 are respectively connected to the X-direction driver 5-1 and the Y-direction driver 5-2, the X-direction driver 5-1 and the Y-direction driver 5-2 are respectively connected to the middle rigid connection portion 311, the second flexible branched chains 4 are connected to the Z-direction driver 5-3, the Z-direction driver 5-3 is connected to the central rigid connection portion 411, and the drivers are respectively used for driving the flexible branched chains along the axial direction thereof, so that the moving platform 2 connected to the flexible branched chains translates along the axial direction of the drivers.

In combination with fig. 3, one end of the first reed 312 located at two sides of the middle rigid connection portion 311 is connected to the middle rigid connection portion 311, and the other end is connected to the first rigid fixing connection portion 313, in combination with fig. 4, one end of the second reed 412 located at the periphery of the central rigid connection portion 411 is connected to the central rigid connection portion 411, and the other end is connected to the second fixing connection portion 413, the second fixing connection portion 413 is connected to the base 1, and the first fixing connection portion 313 is connected to the pillar 11 of the; as shown in fig. 1 and 6, the base 1 is square, the second fixed connecting portion 413 is connected to a midpoint of each side of the base 1, and the pillar 11 is located at a connecting point of two adjacent sides of the base 1; meanwhile, the mounting brackets I12 which are positioned in the XY plane and used for connecting the driver are respectively connected with the fixed connecting parts I313; in the Z-axis direction, a second mounting bracket 13 for connecting the driver is connected with the bottom of the base 1.

Adopt the advantage of above-mentioned structure to lie in: (1) the 2T3R type flexible kinematic pair based on the flexible slender rod is provided, and is a novel multi-degree-of-freedom flexible kinematic pair which has a large stroke and can effectively eliminate parasitic motion; (2) based on a novel 2T3R flexible kinematic pair structure, a large-stroke flexible micro-positioning platform with excellent comprehensive performance is designed; (3) the kinematic pair with the reverse series structure and the space symmetrical distribution structure of the five branched chains are adopted, so that the kinematic coupling phenomenon of the platform is effectively reduced, and the accompanying rotation under partial conditions is eliminated; (4) the module has better structural manufacturability, and is convenient for realizing integrated processing of the module.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.