Dry vacuum pump
阅读说明:本技术 干式真空泵 (Dry vacuum pump ) 是由 S·克罗谢 于 2019-02-14 设计创作,主要内容包括:本发明涉及一种干式真空泵(1),包括:-至少一个集油槽(2);-至少一个泵送级(3a-3e);-两个旋转轴(4),它们分别保持至少一个在至少一个泵送级(3a-3e)中延伸的转子(5),所述转子(5)构造为沿相反方向以同步方式旋转,以在真空泵(1)的进入口和排出口间运送待泵送的气体,所述轴(4)由被集油槽(2)中包含的润滑剂润滑的轴承支撑;-至少一个润滑剂密封装置(6),其在每个轴通道处插入集油槽(2)和泵送级(3e)之间,该密封装置(6)包括安装在轴(4)上以与该轴一起旋转的总体上盘形的导流板(14;24;26),其特征在于,该导流板(14)的盘部在周边具有环形端部(16),该环形端部朝泵送级(3e)延伸以构成保持凹部。(The invention relates to a dry vacuum pump (1) comprising: -at least one oil sump (2); -at least one pumping stage (3a-3 e); -two rotating shafts (4) each holding at least one rotor (5) extending in at least one pumping stage (3a-3e), said rotors (5) being configured to rotate in opposite directions in a synchronized manner to carry the gas to be pumped between an inlet and an outlet of the vacuum pump (1), said shafts (4) being supported by bearings lubricated by the lubricant contained in the oil sump (2); -at least one lubricant sealing device (6) interposed between the sump (2) and the pumping stage (3e) at each shaft passage, the sealing device (6) comprising a generally disc-shaped deflector (14; 24; 26) mounted on the shaft (4) for rotation therewith, characterized in that the disc of the deflector (14) has a ring-shaped end (16) at the periphery, which extends towards the pumping stage (3e) to constitute a retaining recess.)
1. Dry vacuum pump (1) comprising:
-at least one oil sump (2),
-at least one pumping stage (3a-3e),
-two rotating shafts (4) holding respectively at least one rotor (5) extending in said at least one pumping stage (3a-3e), these rotors (5) being configured to rotate in opposite directions in a synchronized manner so as to convey the gas to be pumped between an inlet (7) and an outlet (8) of said vacuum pump (1), these shafts (4) being supported by bearings lubricated by the lubricant contained in said oil sump (2),
-at least one lubricant sealing device (6) interposed between the sump (2) and the pumping stage (3e) at each shaft passage, the sealing device (6) comprising a generally disc-shaped deflector (14; 24; 26) mounted on the shaft (4) to rotate therewith,
characterized in that the disk of the deflector (14; 24; 26) has on its periphery a ring-shaped end (16) which extends towards the pumping stage (3e) so as to constitute a retaining recess.
2. Vacuum pump (1) according to claim 1, characterized in that said annular end portion (16) has a generally cylindrical shape, coaxial with the rotation axis (I-I) of said shaft (4).
3. Vacuum pump (1) according to any of the preceding claims, characterized in that the annular end portion (16) has a radial rim (25).
4. Vacuum pump (1) according to any of the preceding claims, characterized in that the sealing means (6) comprises an annular seal (11), the annular end (16) of the deflector (14; 24; 26) extending at least partially around the annular seal (11).
5. Vacuum pump (1) according to any of the preceding claims, characterized in that the sealing means (6) comprise a sleeve (18) mounted on the shaft (4), the deflector (14; 24; 26) being mounted on the sleeve (18).
6. Vacuum pump (1) according to the preceding claim, characterized in that said sleeve (18) has a two-stage cylindrical shape comprising a first cylindrical stage (18a) having an outer diameter suitable for being inserted in a central orifice (15) in said baffle (14) and a second cylindrical stage (18b) constituting an axial stop for said baffle (14; 24; 26).
7. Vacuum pump (1) according to any of the preceding claims, characterized in that the surface (27) of the deflector (26) bearing the annular end (16) has a generally frustoconical shape, coaxial to the centre of the deflector (26), and with its apex on the side of the oil sump (2).
8. Vacuum pump (1) according to any of the preceding claims, characterized in that the baffle (14; 24; 26) comprises a surface (17) opposite to the surface (23; 27) carrying the annular end (16), having a generally frustoconical shape, coaxial with the centre of the baffle (14; 24; 26) and having its vertex on the side of the pumping stage (3 e).
9. Vacuum pump (1) according to any of the preceding claims, characterized in that the stator (21) of the vacuum pump (1) and the edge of the surface (17) of the deflector (14; 24; 26) opposite the surface (23; 27) carrying the annular end (16) are separated by an axial distance (d) of less than 3mma) And a vertical distance (d) of less than 3mmv)。
10. Vacuum pump (1) according to any of the preceding claims, characterized in that the sealing means (6) comprise an annular seal (11), such as a ring with a single or double lip (12a, 12b), or a segmented seal.
11. Dry vacuum pump (1) comprising:
-at least one oil sump (2),
-at least one pumping stage (3a-3e),
-two rotating shafts (4) holding respectively at least one rotor (5) extending in said at least one pumping stage (3a-3e), these rotors (5) being configured to rotate in opposite directions in a synchronized manner so as to convey the gas to be pumped between an inlet (7) and an outlet (8) of said vacuum pump (1), these shafts (4) being supported by bearings lubricated by the lubricant contained in said oil sump (2),
-at least one lubricant sealing device (6) interposed between the oil sump (2) and the pumping stage (3e) at each shaft passage, the sealing device (6) comprising a generally disc-shaped deflector (28) mounted on the shaft (4) to rotate therewith,
characterized in that the disk of the deflector (28) comprises at least one surface (17, 29) having a frustoconical shape and coaxial with the centre of the deflector (28).
12. Vacuum pump according to the preceding claim, characterized in that the surface (29) of the deflector (28) having a frustoconical shape, the vertex of which is located on the sump (2) side, is directed towards the pumping stage (3 e).
13. A vacuum pump according to claim 11 or 12, characterized in that the surface (17) of the deflector (28) having a frustoconical shape, the apex of which is located on the side of the pumping stage (3e), is opposite the oil sump (2).
Technical Field
The invention relates to a dry vacuum pump, such as a roots pump, a claw pump or a screw pump. More particularly, the present invention relates to lubricant sealing for vacuum pumps.
Background
A dry roughing vacuum pump comprises one or more pumping stages in series, wherein the gas to be pumped flows between an inlet and an outlet. Known roughing vacuum pumps are distinguished by rotary lobe pumps having two or more lobes, also known as roots pumps, claw pumps and screw pumps. Roots blower-type vacuum pumps are also known, which are used upstream of the roughing vacuum pump to improve pumping capacity at high flow rates. These vacuum pumps are called "dry" pumps because during operation the rotors rotate in the stators without any mechanical contact between the rotors or between the rotors and the stators, which makes it possible to dispense with the use of oil in the pumping stages.
The rotating shaft is supported by ball bearings lubricated by oil. During operation, rotation of the shaft in the bearings generates contaminants, such as oil droplets, which may move towards the pumping stages when subjected to pressure changes. However, it is important that for so-called "dry" applications, such as semiconductor substrate manufacturing processes, there is no oil smearing in the pumping stages. Therefore, the lubricated bearings must be isolated from the dry pumping stage by a seal arrangement, and the shaft can still rotate by this seal arrangement.
The sealing means used mainly consist of physical barriers, such as flanges on bearings, friction joints, ejector disks, gas drains, oil collectors, such as expansion and condensation chambers, or obstacles, such as labyrinths and bends. These solutions mainly attempt to prevent or limit the movement of the oil. However, during operation, the pressure exerted in the vacuum pump may fluctuate widely and create thrust between the lubricated bearings and the pumping stage, thereby enabling the entrainment of contaminant particles from the pumping stage into the sump and the entrainment of oil mist or vapour from the bearings into the pumping stage, particularly in applications where large amounts of gas are periodically vented.
It is particularly desirable to limit the movement of solid or liquid particles from the pumping stage or friction joint to the sump, as these particles are sometimes abrasive, which may lead to reduced lubrication performance, which may lead to premature wear of the ball bearings, for example.
Disclosure of Invention
It is therefore an object of the present invention to propose a dry vacuum pump which at least partially remedies the disadvantages of the prior art.
To this end, the invention relates to a dry vacuum pump comprising:
-at least one oil sump tank,
-at least one pumping stage, the pumping stages,
two rotating shafts, each holding at least one rotor extending in the at least one pumping stage, the rotors being configured to rotate in opposite directions in a synchronized manner so as to convey the gas to be pumped between an inlet and an outlet of the vacuum pump, the shafts being supported by bearings lubricated by lubricant contained in a sump,
at least one lubricant seal interposed between the sump and the pumping stage at each shaft passage, the seal comprising a generally disc-shaped baffle mounted on the shaft for rotation therewith,
characterized in that the disk of said baffle has on its periphery an annular end (tip) which extends towards the pumping stage, thus constituting a retaining recess.
The retaining recess of the deflector makes it possible to retain any particles or dust that may come from the pumping stage of the vacuum pump or from the friction joint and that will be radially expelled (ejected, dislodged) by the deflector. Thereby restricting the particles from moving toward the ball bearings or oil sumps.
Thereby, the life of the bearing can be increased, and the contamination of oil can be reduced, so that the oil consumption can be reduced. Thus, after 1000 hours of operation of a vacuum pump comprising such a baffle, it can be noted that the oil consumption is reduced by about 30%, and that the "clean" oil is almost completely free of contaminating particles.
A baffle made in this way is easy and inexpensive to manufacture. In addition, it is compatible with different types of "dynamic" or friction-type ring seals of the sealing device.
The vacuum pump may comprise a single sump. On a multistage vacuum pump, the oil sump can be arranged next to the so-called low-pressure pumping stage or next to the so-called high-pressure pumping stage. Alternatively, the bearings may be lubricated with grease.
The vacuum pump may also comprise two oil sumps. These oil sumps are each arranged at one end of the vacuum pump, that is to say, on a multistage vacuum pump, one of these oil sumps is close to the so-called high-pressure stage and the other is close to the so-called low-pressure stage. On single-stage vacuum pumps, such as roots blower-type vacuum pumps, these oil sumps are arranged on both sides of a single pumping stage.
The annular end portion may have any shape. It may be chamfered (beveled).
According to one embodiment, the annular end portion has a generally cylindrical (barrel) shape, which is coaxial with the axis of rotation of the shaft.
The annular end portion may also have a radial rim. The radial edge makes it possible to improve the particle or dust retaining capacity of the retaining recess.
The sealing means may comprise an annular seal, for example a friction type annular seal or a dynamic seal. The friction type annular seal includes, for example, a single lip ring or a double lip ring. The dynamic seal comprises, for example, a segmented seal.
According to one embodiment, the annular end of the baffle extends at least partially around the annular seal.
According to one embodiment, the sealing device comprises a sleeve mounted on the shaft, the deflector being mounted on the sleeve.
The sleeve has, for example, a two-stage cylindrical shape, comprising a first cylindrical stage having an outer diameter adapted to be inserted into the central orifice in the baffle, and a second cylindrical stage constituting an axial stop for the baffle.
The surface of the disc carrying the annular end portion may be perpendicular to the axis of rotation of the shaft. According to another embodiment, the surface of the baffle carrying the annular end has a generally frustoconical shape, is coaxial with the centre of the baffle, and has its apex on the side of the sump. This frustoconical shape makes it possible to guide back to the pumping stage any particles or dust from the pumping stage that are not trapped in the retaining recess.
The surface of the disc opposite the surface carrying the annular end portion may be perpendicular to the axis of rotation of the shaft. According to another embodiment, the surface opposite to the surface carrying the annular end has a frustoconical shape, is coaxial with the centre of the deflector and has its vertex on the pumping stage side. This frusto-conical shape of the rotating deflector allows any lubricant splash points that strike the deflector to be directed back to the sump.
In addition, an axial distance of less than 3mm and a vertical distance of less than 3mm may be provided to space the stator of the vacuum pump from the edge of the surface of the baffle opposite the surface carrying the annular end. Thereby forming a very narrow passage between the stator and the baffle. It allows relative expansion of the parts without contacting each other, while at the same time providing low conductivity for the lubricant, thereby restricting its movement out of the deflector.
The invention also relates to a dry vacuum pump comprising:
-at least one oil sump tank,
-at least one pumping stage, the pumping stages,
two rotating shafts, each holding at least one rotor extending in the at least one pumping stage, the rotors being configured to rotate in opposite directions in a synchronized manner so as to convey the gas to be pumped between an inlet and an outlet of the vacuum pump, the shafts being supported by bearings lubricated by lubricant contained in a sump,
at least one lubricant seal interposed between the sump and the pumping stage at each shaft passage, the seal comprising a generally disc-shaped baffle mounted on the shaft for rotation therewith,
characterized in that the disk portion of the baffle comprises at least one surface having a frustoconical shape and being coaxial with the center of the baffle.
One surface of the baffle having a frusto-conical shape with the apex on the sump side may be the surface opposite the pumping stage. This frusto-conical shape makes it possible to direct any particles or dust that may come from the pumping stage back to the pumping stage.
One surface of the deflector having a frustoconical shape with the apex on the pumping stage side may be the surface opposite the oil sump. The "concave" frusto-conical shape of the rotating deflector during operation allows any lubricant splash points that strike the deflector to be directed back to the sump.
Both surfaces of the baffle may have a frusto-conical shape.
Drawings
Other advantages and features will become apparent upon reading the description of the invention and the accompanying drawings, in which:
figure 1 shows a very schematic representation of one example of a dry vacuum pump.
Figure 2 shows a partial cross-sectional view of a portion of the vacuum pump of figure 1, particularly illustrating the sealing arrangement.
Fig. 3 shows an enlarged view of a detail of the sealing device in fig. 2.
Fig. 4 shows a perspective view of a baffle of the sealing device of fig. 2.
Fig. 5 shows a cross-sectional view of the baffle of fig. 4.
Fig. 6 shows an enlarged view of a detail of fig. 5.
Fig. 7 shows a perspective view of the sleeve of the sealing device of fig. 2.
Fig. 8 shows a cross-sectional view of the sleeve of fig. 7.
Fig. 9 shows a view similar to fig. 3 of a second embodiment of a baffle.
Fig. 10 shows a view similar to fig. 3 of a third embodiment of a baffle.
Fig. 11 shows a view similar to fig. 3 of a fourth embodiment of a baffle.
Fig. 12 shows a view similar to fig. 3 of a second embodiment of the ring seal.
In the drawings, like elements have like reference numerals. The drawings in the drawings are simplified for ease of understanding.
The following embodiments are examples. While the description refers to one or more embodiments, this does not necessarily mean that each reference refers to the same embodiment or that the feature only applies to a single embodiment. Simple features of different embodiments may also be combined or interchanged to provide further embodiments.
Detailed Description
Fig. 1 shows a
The
The
In this illustrative example, the
Each
The
The
The
The
At each shaft passage, a
As can be seen more clearly in fig. 2, the sealing means 6 may comprise at least one
The
In the example shown in fig. 1 to 11, the
The friction
FIG. 12 shows another example in which the
The segmented seal comprises one or more rings 13a rigidly mounted in the
The
An
The disk of the
The
According to a first embodiment, the
According to one embodiment,
In the example shown in fig. 2 and 3, the
In the example shown in fig. 12, the protruding shape of the
The bend helps to retain particles from the pumping stages 3a-3e in the retaining recess of the
The
The seal between the
The
The
In the example of fig. 12, the complementary ring 13b of the segmented seal is formed in the
The
The
According to one embodiment, the
During operation, the "concave" frustoconical shape of the rotating
Further, the axial distance d in a direction parallel to the rotation axis I-I may be madeaLess than 3mm and a perpendicular distance d in a direction perpendicular to the axis of rotation I-IvLess than 3mm so that the
For example, two adjacent cylindrical cavities are formed in the
During operation, the
The centrifugal force created by the rapid rotation of the
The
Baffles 14 made in this manner are easy and inexpensive to manufacture. It is compatible with different types of "dynamic" or friction ring seals 11.
Fig. 9 shows a
In this second embodiment, the
In the first two embodiments, the
Fig. 10 shows a
The
During operation, the centrifugal force generated by the rapid rotation of the
Fig. 11 shows a fourth embodiment of a baffle 28.
This embodiment differs from the previous embodiment in that the baffle 28 does not have an
In this example, the disk portion of the baffle 28 includes at least one
Only one surface may have a frustoconical shape, while the other surface may be perpendicular to the axis of rotation I-I of the
The surface 29 of the deflector 28 having a frustoconical shape, the apex of which is located on the
The
Both surfaces of the baffle 28 may have a frustoconical shape (fig. 11).
The frusto-conical shape of the
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