阅读说明：本技术 一种电阻测试结构 (Resistance test structure ) 是由 孙素 于 2020-07-31 设计创作，主要内容包括：本发明公开了一种电阻测试结构,采用将若干四探针测试结构串联的方式,在测试结构的两端施加电流I,在每个待测电阻结构两端分别量测每个待测电阻两端的电位差,从而得到每个待测电阻的阻值,通过本发明,可解决使用多个Kelvin四探针法测试电阻结构导致焊垫数量过多的问题,有效减少焊垫使用量。(The invention discloses a resistor testing structure, which adopts a mode of connecting a plurality of four-probe testing structures in series, applies current I at two ends of the testing structures, and respectively measures the potential difference at two ends of each resistor to be tested at two ends of each resistor structure to be tested, thereby obtaining the resistance value of each resistor to be tested.)

1. A resistance test structure is characterized in that a plurality of four-probe test structures are connected in series, current I is applied to two ends of each test structure, and the potential difference of two ends of each resistor to be tested is measured at two ends of each resistor to be tested respectively, so that the resistance value of each resistor to be tested is obtained.

2. A resistance test structure as claimed in claim 1, wherein: when the number of the resistors is even, namely n is 2k, the resistor test structure comprises a plurality of two-resistor basic structures and a test signal loading structure, each two-resistor basic structure connects a test pad and the resistor to provide a test point, the two resistors are connected in series to form a test path, the two-resistor basic structures are connected in series, and the test signal loading structure is used for loading a constant current source A to the two-resistor basic structures connected in series through the two ends of the resistor test structure.

3. A resistance test structure as claimed in claim 2, wherein: each two-resistor basic structure consists of two resistors (R (2i) and R (2i-1)), a test pad-to-resistor connection line (105-108), an inter-resistor connection line (109) and 4 test pads, namely a 4i-2 test pad (101), a 4i-1 test pad (102), a 4i test pad (103) and a 4i +1 test pad (104), wherein i is 1,2, a.

4. A resistance test structure as claimed in claim 3, wherein: the test signal loading structure is composed of a constant current source A, a connecting line (203-204) from a current loading welding pad to a resistor, and two current loading welding pads, namely a 1 st current loading welding pad (201) and a 4k +2 th current loading welding pad (202).

5. A resistance test structure as claimed in claim 4, wherein: the constant current source A is connected from a 1 st current loading pad (201), a test probe positive terminal (VH (2i-1)) is connected from a 4i-2 th test pad (101), and the 4i-2 th test pad (101) is connected to one end of a resistor (R (2i-1)) through a test pad-to-resistor connecting line (105); the negative test probe terminal (VL (2i-1)) is accessed from the 4i-1 test pad (102), and the 4i-1 test pad (102) is connected to the other end of the resistor (R (2i-1)) through a test pad-to-resistor connection (106); the test probe positive terminal (VH (2i)) is accessed from the 4i test pad (103), the 4i test pad (103) is connected to one end of a resistor (R (2i)) through a test pad to resistor connecting line (107), and the end is also connected to one end of a resistor (R (2i-1)) connected to the 4i-1 test pad (102) through an inter-resistor connecting line (109) to connect the resistors (R (2i-1)) and (R (2i)) in series, wherein i is 1,.

6. A resistance test structure as claimed in claim 1, wherein: when the number of the resistors is odd, namely n is 2k +1, the resistance test structure comprises a plurality of two-resistor basic structures, a test signal loading structure and a single-resistor test structure, wherein each two-resistor basic structure connects a test pad and a resistor to provide a test point, the two resistors are connected in series to form a test path, the two-resistor basic structures are connected in series, the single-resistor test structure is used for connecting the test pad and the resistors to provide the test point, the two-resistor basic structures connected in series are connected in series with the single-resistor test structure to form the test path, and the test signal loading structure is used for loading a constant current source A between the two-resistor basic structures, the single-resistor test structure and the ground connected in series.

7. A resistance test structure as claimed in claim 6, wherein: each two-resistor basic structure consists of two resistors (R (2i) and R (2i-1)), a connecting line (105-108) from a test pad to the resistor, an inter-resistor connecting line (109) and 4 test pads, namely a 4i-2 test pad (101), a 4i-1 test pad (102), a 4i test pad (103) and a 4i +1 test pad (104), wherein i is 1,2, a.

8. A resistance test structure as claimed in claim 7, wherein: the single-resistor test structure is composed of a resistor (R (2k +1)), a connecting line (303-304) from a test welding pad to the resistor and 2 test welding pads, namely a 4k +2 test welding pad (301) and a 4k +3 test welding pad (302), wherein the resistor (R (2k +1)) is connected with the resistor (R (2k)) of the last two-resistor basic structure.

9. A resistance test structure as claimed in claim 8, wherein: the test signal loading structure is composed of a constant current source A, a connecting line (203-204) from a current loading welding pad to a resistor, and two current loading welding pads, namely a 1 st current loading welding pad (201) and a 4k +4 th current loading welding pad (206).

10. A resistance test structure as claimed in claim 9, wherein: the constant current source A is connected from a 1 st current loading pad (201), a test probe positive terminal (VH (2i-1)) is connected from a 4i-2 th test pad (101), and the 4i-2 th test pad (101) is connected to one end of a resistor (R (2i-1)) through a test pad-to-resistor connecting line (105); the negative test probe terminal (VL (2i-1)) is accessed from the 4i-1 test pad (102), and the 4i-1 test pad (102) is connected to the other end of the resistor (R (2i-1)) through a test pad-to-resistor connection (106); a test probe positive terminal (VH (2i)) is accessed from a 4i test pad (103), the 4i test pad (103) is connected to one end of a resistor (R (2i)) through a test pad to resistor connection line (107), and the end is also connected to one end of a resistor (R (2i-1)) connected to a 4i-1 test pad (102) through an inter-resistor connection line (109) to connect the resistor (R (2i-1)) and the resistor (R (2i)) in series, i is 1, a.k, the test probe positive terminal (VH (2k +1)) is accessed from a test pad (4k +2), and the 4k +2 test pad (301) is connected to one end of the resistor (R (2k +1)) through a test pad to resistor connection line (303); the negative test probe terminal (VL (2k +1)) is tapped from the 4k +3 test pad (302), the 4k +3 test pad (302) is connected to the other end of the resistor (R (2k +1)) via a test pad to resistor connection (304), and the end of the resistor R (2k +1) is grounded via a current load pad to resistor connection (204) and a 4k +4 current load pad (206).

Technical Field

The invention relates to the technical field of semiconductor device testing, in particular to a resistance testing structure.

Background

In the electrical field, resistance is typically measured accurately using Kelvin (Kelvin) four wire sensing. In the field of semiconductor device testing, in order to accurately measure the device structure and material resistance with smaller resistance, a four-probe Kelvin (Kelvin) resistance testing method is generally used, in order to accurately measure the resistance, the influence of a connecting resistor on real resistance in the measuring process needs to be eliminated, as shown in figure 1, a four-probe Kelvin resistance testing method is adopted, currents I are respectively applied to 1 and 4, potential differences U2-U3 at two ends of the resistor are measured at 2 and 3 welding pads (pad), the measured potential difference is the real potential difference at two ends of the resistor to be measured, the influence of wire resistance from one end of the resistor to the welding pad 1 and the influence of the other end of the resistor to the welding pad 4 are eliminated, and the structure can accurately measure the resistance value of a single-resistor structure.

Although the four-probe kelvin resistance test method can basically eliminate the influence of wire resistance and wiring resistance and can accurately measure the resistance value of an ultra-low resistance material, the defect is that 4 welding pads are needed for one resistance structure, as shown in fig. 2, 8 welding pads are needed for two resistance structures, and when a plurality of methods are needed to test the same resistance structure, the number of the welding pads is increased.

Disclosure of Invention

In order to overcome the defects of the prior art, the present invention provides a resistance testing structure to solve the problem of excessive number of pads caused by testing the resistance structure by using multiple Kelvin four-probe methods, thereby effectively reducing the usage amount of the pads.

In order to achieve the above object, the present invention provides a resistor testing structure, which applies a current I to two ends of a testing structure by connecting a plurality of four-probe testing structures in series, and measures a potential difference between two ends of each resistor to be tested at two ends of each resistor to be tested, thereby obtaining a resistance value of each resistor to be tested.

Preferably, when the number of the resistors is an even number, that is, n is 2k, the resistance test structure includes a plurality of two-resistor basic structures and a test signal loading structure, each of the two-resistor basic structures connects the test pad and the resistor to provide a test point, and connects the two resistors in series to form a test path, and the two-resistor basic structures are connected in series with each other, and the test signal loading structure is configured to load the constant current source a to the two-resistor basic structures connected in series through the two-most ends of the resistance test structure.

Preferably, each two-resistor basic structure consists of two resistors (R (2i) and R (2i-1)), a test pad-to-resistor connection (105-108), an inter-resistor connection line (109), and 4 test pads, namely, a 4i-2 test pad (101), a 4i-1 test pad (102), a 4i test pad (103), and a 4i +1 test pad (104), wherein i is 1,2,.

Preferably, the test signal loading structure consists of a constant current source A, a connecting line (203-204) from a current loading pad to a resistor and two current loading pads, namely a 1 st current loading pad (201) and a 4k +2 th current loading pad (202).

Preferably, the constant current source A is accessed from a 1 st current loading pad (201), the test probe positive terminal (VH (2i-1)) is accessed from a 4i-2 th test pad (101), and the 4i-2 th test pad (101) is connected to one end of a resistor (R (2i-1)) through a test pad-to-resistor connecting line (105); the negative test probe terminal (VL (2i-1)) is accessed from the 4i-1 test pad (102), and the 4i-1 test pad (102) is connected to the other end of the resistor (R (2i-1)) through a test pad-to-resistor connection (106); the test probe positive terminal (VH (2i)) is accessed from the 4i test pad (103), the 4i test pad (103) is connected to one end of a resistor (R (2i)) through a test pad to resistor connecting line (107), and the end is also connected to one end of a resistor (R (2i-1)) connected to the 4i-1 test pad (102) through an inter-resistor connecting line (109) to connect the resistors (R (2i-1)) and (R (2i)) in series, wherein i is 1,.

Preferably, when the number of the resistors is an odd number, that is, n is 2k +1, the resistance test structure includes a plurality of two-resistor basic structures, a test signal loading structure, and a single-resistor test structure, each of the two-resistor basic structures connects the test pad and the resistor to provide a test point, and connects the two resistors in series to form a test path, and the two-resistor basic structures are connected in series to each other, the single-resistor test structure is configured to connect the test pad and the resistor to provide a test point, and the two-resistor basic structures connected in series are connected in series to form a test path, and the test signal loading structure is configured to load the constant current source a between the two-resistor basic structures connected in series, the single-resistor test structure, and the ground.

Preferably, each two-resistor basic structure consists of two resistors (R (2i) and R (2i-1)), a test pad-to-resistor connection (105-108), an inter-resistor connection line (109), and 4 test pads, namely, a 4i-2 test pad (101), a 4i-1 test pad (102), a 4i test pad (103), and a 4i +1 test pad (104), wherein i is 1,2, a.

Preferably, the single-resistor test structure consists of a resistor (R (2k +1)), a test pad-to-resistor connecting line (303-304) and 2 test pads, namely a 4k +2 test pad (301) and a 4k +3 test pad (302), wherein the resistor (R (2k +1)) is connected with the resistor (R (2k)) of the last two-resistor basic structure.

Preferably, the test signal loading structure consists of a constant current source A, a connecting line (203-204) from a current loading pad to a resistor and two current loading pads, namely a 1 st current loading pad (201) and a 4k +4 th current loading pad (206)

Preferably, the constant current source A is connected from the 1 st current loading pad (201), the test probe positive terminal (VH (2i-1)) is connected from the 4i-2 th test pad (101), and the 4i-2 th test pad (101) is connected to one end of the resistor (R (2i-1)) through a test pad-to-resistor connection (105); the negative test probe terminal (VL (2i-1)) is accessed from the 4i-1 test pad (102), and the 4i-1 test pad (102) is connected to the other end of the resistor (R (2i-1)) through a test pad-to-resistor connection (106); a test probe positive terminal (VH (2i)) is accessed from a 4i test pad (103), the 4i test pad (103) is connected to one end of a resistor (R (2i)) through a test pad to resistor connection line (107), and the end is also connected to one end of a resistor (R (2i-1)) connected to a 4i-1 test pad (102) through an inter-resistor connection line (109) to connect the resistor (R (2i-1)) and the resistor (R (2i)) in series, i is 1, a.k, the test probe positive terminal (VH (2k +1)) is accessed from a test pad (4k +2), and the 4k +2 test pad (301) is connected to one end of the resistor (R (2k +1)) through a test pad to resistor connection line (303); the negative test probe terminal (VL (2k +1)) is tapped from the 4k +3 test pad (302), the 4k +3 test pad (302) is connected to the other end of the resistor (R (2k +1)) via a test pad to resistor connection (304), and the end of the resistor R (2k +1) is grounded via a current load pad to resistor connection (204) and a 4k +4 current load pad (206).

Compared with the prior art, the resistance test structure has the advantages that the independent four-probe test structures are connected in series through the metal connecting wire, fixed current is applied to the two ends of the test structure, the potential difference is measured on the welding pads at the two ends of each resistance respectively, the resistance value can be accurately measured, structures with different sizes can be designed to accurately measure the resistance structure, finally, the using amount of the welding pads can be effectively reduced through the series connection mode, the more the resistors to be tested are, and the more the number of the welding pads is saved.

Drawings

FIG. 1 is a prior art Kelvin four wire detection schematic;

FIG. 2 is a schematic diagram of a prior art two resistance test structure;

FIG. 3 is a circuit diagram of a first embodiment of a resistance test structure according to the present invention;

FIG. 4 is a circuit diagram of a second embodiment of a resistance test structure according to the present invention;

FIG. 5 is a diagram illustrating two resistance test structures according to an embodiment of the present invention.

Detailed Description

Other advantages and capabilities of the present invention will be readily apparent to those skilled in the art from the present disclosure by describing the embodiments of the present invention with specific embodiments thereof in conjunction with the accompanying drawings. The invention is capable of other and different embodiments and its several details are capable of modification in various other respects, all without departing from the spirit and scope of the present invention.

FIG. 3 is a circuit diagram of a resistance test structure according to a first embodiment of the present invention. The invention relates to a resistance test structure, which applies a current I at the two ends of the test structure by connecting four-probe test structures in series, and can respectively measure the potential difference at the two ends of each resistor to be tested, namely the voltage U1 at the two ends of the resistor R1 to be tested can be calculated by the difference between the potential U2 measured by a welding pad 2 and the potential U3 measured by a welding pad 3, and the resistance value of each resistor to be tested can be accurately measured by analogy, and concretely, when the number of the resistors is even, namely n is 2k, the resistance test structure comprises: a plurality of two-resistor base structures 10 and a test signal loading structure 20. The two basic resistor structures 10 are composed of two resistors R (2i) and R (2i-1), connecting lines 105-108 from test pads to resistors, connecting lines 109 between the resistors, and 4 test pads, namely, a 4i-2 test pad 101, a 4i-1 test pad 102, a 4i test pad 103, and a 4i +1 test pad 104, wherein i is 1, 2. The test signal loading structure 20 is composed of a constant current source a (current is I)205, current loading pads to resistor connecting lines 203-204, and two current loading pads, namely a 1 st current loading pad 201 and a 4k +2 th current loading pad 202, and is used for loading the constant current source a (current is I)205 to a plurality of resistor basic structures 10 connected in series.

A constant current source a (current is I)205 is connected from the current loading pad 1, a test probe positive terminal VH1 is connected from the test pad 2, and the 1 st current loading pad 201 and the 2 nd test pad 101 are connected to one end of a resistor R1 via a current loading pad-to-resistor connection 203 and a test pad-to-resistor connection 105, respectively; the test probe negative terminal VL1 is connected from the 3 rd test pad 102, the 3 rd test pad 102 is connected to the other end of the resistor R1 via the test pad-to-resistor connection 106; the test probe positive terminal VH2 is accessed from the 4 th test pad 103, and the 4 th test pad 103 is connected to one terminal of the resistor R2 via the test pad-to-resistor connection 107, and also connected to one terminal of the resistor R1 connected to the 3 rd test pad 102 via the inter-resistor connection 109 to connect the resistors R1 and R2 in series.

Similarly, the test probe positive terminal VH (2i-1) is accessed from the 4i-2 test pad 101, and the 4i-2 test pad 101 is connected to one end of the resistor R (2i-1) through the test pad-to-resistor connection 105; the test probe negative terminal VL (2i-1) is accessed from the 4i-1 test pad 102, and the 4i-1 test pad 102 is connected to the other end of the resistor R (2i-1) through a test pad-to-resistor connection 106; the test probe positive terminal VH (2i) is accessed from the 4i test pad 103, the 4i test pad 103 is connected to one end of the resistor R (2i) via the test pad-to-resistor connection 107, and the end is also connected to one end of the resistor R (2i-1) connected to the 4i-1 test pad 102 via the inter-resistor connection 109 to connect the resistors R (2i-1) and R (2i) in series, i 2.

Each two basic resistor structures 10 are connected in series, each two basic resistor structures 10 connects a resistor R (2I-2) to a resistor R (2I-1) at the upper end, I is 2, a.

FIG. 4 is a circuit diagram of a resistance test structure according to a second embodiment of the present invention. When the number of the resistors is an odd number, that is, n is 2k +1, the method comprises the following steps: a plurality of two-resistor base structures 10, test signal loading structures 20, and a single-resistor test structure 30. The two basic resistor structures 10 are composed of two resistors R (2i) and R (2i-1), connecting lines 105-109 from test pads to resistors, and 4 test pads, namely, a 4i-2 test pad 101, a 4i-1 test pad 102, a 4i test pad 103, and a 4i +1 test pad 104, wherein i is 1, 2. The single-resistor test structure 30 consists of a resistor R (2k +1), connecting lines 303-304 from test pads to the resistor, and 2 test pads, namely a 4k +2 test pad 301 and a 4k +3 test pad 302, and is used for connecting the test pads and the resistor to provide test points, and meanwhile, a plurality of two resistor basic structures 10 connected in series are connected in series with the single-resistor test structure to form a test path; the test signal loading structure 20 consists of a constant current source A (current is I)205, connecting lines 203-204 from current loading welding pads to resistors and two current loading welding pads, namely a 1 st current loading welding pad 201 and a 4k +4 th current loading welding pad 206, and is used for loading the constant current source A (current is I)205 among a plurality of two-resistor basic structures 10, a single-resistor test structure 30 and the ground which are connected in series;

a constant current source a (current is I)205 is connected from the current loading pad 1, a test probe positive terminal VH1 is connected from the test pad 2, and the 1 st current loading pad 201 and the 2 nd test pad 101 are connected to one end of a resistor R1 via a current loading pad-to-resistor connection 203 and a test pad-to-resistor connection 105, respectively; the test probe negative terminal VL1 is connected from the 3 rd test pad 102, the 3 rd test pad 102 is connected to the other end of the resistor R1 via the test pad-to-resistor connection 106; the test probe positive terminal VH2 is accessed from the 4 th test pad 103, and the 4 th test pad 103 is connected to one terminal of the resistor R2 via the test pad-to-resistor connection 107, and also connected to one terminal of the resistor R1 connected to the 3 rd test pad 102 via the inter-resistor connection 109 to connect the resistors R1 and R2 in series.

Similarly, the test probe positive terminal VH (2i-1) is accessed from the 4i-2 test pad 101, and the 4i-2 test pad 101 is connected to one end of the resistor R (2i-1) through the test pad-to-resistor connection 105; the test probe negative terminal VL (2i-1) is accessed from the 4i-1 test pad 102, and the 4i-1 test pad 102 is connected to the other end of the resistor R (2i-1) through a test pad-to-resistor connection 106; the test probe positive terminal VH (2i) is accessed from the 4i test pad 103, the 4i test pad 103 is connected to one end of the resistor R (2i) via the test pad-to-resistor connection 107, and the end is also connected to one end of the resistor R (2i-1) connected to the 4i-1 test pad 102 via the inter-resistor connection 109 to connect the resistors R (2i-1) and R (2i) in series, i 2.

The test probe positive terminal VH (2k +1) is accessed from the test pad 4k +2, the 4k +2 test pad 301 is connected to one end of the resistor R (2k +1) through the test pad to resistor connecting line 303; the test probe negative terminal VL (2k +1) is accessed from the 4k +3 test pad 302, and the 4k +3 test pad 302 is connected to the other end of the resistor R (2k +1) via the test pad-to-resistor connection 304;

the two resistor basic structures 10 are connected in series with each other, each two resistor basic structures 10 connect at the upper end a resistor R (2I-2) to a resistor R (2I-1), I is 2,...... k, and the resistor R (2k) of the last two resistor basic structures 10 is connected to a resistor R (2k +1) of the single resistor test structure 30, that is, the resistors are connected in series in sequence, a constant current source a (current is I)205 is connected to one end of the resistor R1 through a current loading pad, and a connection 204 to the resistor through the current loading pad at the end of the last resistor R (2k +1) and a 4k +4 current loading pad 206 are grounded.

Preferably, the invention is a structure formed by connecting a plurality of metal wires in series, and the metal material of the wires can be copper or aluminum.