阅读说明：本技术 接合设备 (Joining apparatus ) 是由 朴东镐 姜锡宙 金秉戊 李承柱 于 2020-02-19 设计创作，主要内容包括：本申请公开了接合设备。接合设备包括第一台、第二台和辊构件,其中,第一台上布置有第一衬底,第二台上布置有与第一衬底面对的第二衬底,并且辊构件包括辊部和进气部。辊部包括在一个方向上延伸的内孔和连接内孔与外部空间的多个开口并且配置成通过按压第一衬底来接合第一衬底与第二衬底。进气部连接到辊部并且配置成吸入内孔的空气。(The application discloses a joining apparatus. The bonding apparatus includes a first stage on which a first substrate is disposed, a second stage on which a second substrate facing the first substrate is disposed, and a roller member including a roller portion and an air intake portion. The roller portion includes an inner hole extending in one direction and a plurality of openings connecting the inner hole and an external space and is configured to join the first substrate and the second substrate by pressing the first substrate. The air intake portion is connected to the roller portion and configured to draw air into the bore.)

1. A bonding apparatus, comprising:

a first stage having a first substrate disposed thereon;

a second stage on which a second substrate facing the first substrate is disposed; and

a roller member including a roller portion and an air intake portion, wherein the roller portion includes an inner hole extending in one direction and a plurality of openings connecting the inner hole and an external space and is configured to join the first substrate and the second substrate, and the air intake portion is connected to the roller portion and is configured to intake air of the inner hole.

2. The joining apparatus according to claim 1,

the roller portion includes:

a support portion having the bore defined therein; and

a pressing portion that is arranged on the support portion and that is

Wherein each of the openings is a hole penetrating the support portion and the pressing portion.

3. The joining apparatus according to claim 2,

the support portion includes:

first and second side surfaces exposing the inner bore to the outside; and

an outer surface having the opening defined therein and connecting the first side surface and the second side surface, and

wherein the air intake portion completely overlaps the inner hole exposed from the first side surface and is connected to the first side surface.

4. The joining apparatus according to claim 3,

the roller member further includes:

an alignment portion connected to the second side surface and configured to rotate the support portion.

5. The joining apparatus according to claim 4,

the aligning section includes:

a cover completely overlapping the inner bore and connected to the second side surface; and

a stem portion connected to the cap portion.

6. The joining apparatus according to claim 3,

the pressing portion is disposed on an entire portion of the outer surface.

7. The joining apparatus according to claim 2,

the support portion is formed of metal, and the pressing portion is formed of polyurethane.

8. The joining apparatus according to claim 2,

the thickness of the support portion is larger than the thickness of the pressing portion when viewed in a sectional view of the roller portion.

9. The joining apparatus according to claim 2,

the openings include a first opening and a second opening that do not overlap with each other in a length direction of the roller member, and

wherein the support portion has a shape in which a first portion and a second portion are spaced apart from each other by the first opening and the second opening when viewed in a sectional view of the roller portion.

10. The joining apparatus according to claim 1,

the opening includes a first opening and a second opening, and

wherein the first opening does not overlap with the second opening in a longitudinal direction of the roller member.

11. The joining apparatus of claim 10,

the first openings overlap with the second openings in a thickness direction of the roller members, respectively.

12. The joining apparatus according to claim 1,

the openings are spaced apart from each other and aligned in the one direction.

Technical Field

The present disclosure relates to a bonding apparatus, and more particularly, to an apparatus for bonding substrates and a method of bonding substrates using the same.

Background

Various display devices have been developed for use in multimedia devices such as televisions, cellular phones, tablet computers, navigation systems, and game machines. For example, the display device may include an Organic Light Emitting Display (OLED) device, a Liquid Crystal Display (LCD) device, an Electrophoretic Display (ED) device, a surface-conduction electron-emission display (SED) device, and a Vacuum Fluorescent Display (VFD) device.

In addition, the display device may include a display panel for displaying an image, an input sensing unit for sensing an external input, and a window. The display panel, the input sensing unit, and the window may be provided as separate components and may be coupled to each other through a bonding process therebetween.

Disclosure of Invention

The present disclosure may provide a bonding apparatus capable of bonding two substrates using a roller member including an opening, and a method of bonding substrates using the bonding apparatus.

In an embodiment of the inventive concept, a bonding apparatus includes a first stage on which a first substrate is disposed, a second stage on which a second substrate facing the first substrate is disposed, and a roller member including a roller portion and a gas inlet portion. The roller portion includes an inner hole extending in one direction and a plurality of openings connecting the inner hole and an external space and is configured to join the first substrate and the second substrate. The air intake portion is connected to the roller portion and configured to draw air into the bore.

In an embodiment, the roller portion may include a bearing portion in which an inner hole is defined and a pressing portion disposed on the bearing portion. Each of the openings may be a hole penetrating the support portion and the pressing portion.

In an embodiment, the support portion may include first and second side surfaces exposing the inner hole to the outside, and an outer surface having an opening defined therein and connecting the first and second side surfaces. The air intake portion completely overlaps with the inner hole exposed from the first side surface and is connected to the first side surface.

In an embodiment, the roller member may further include an alignment portion, wherein the alignment portion is connected to the second side surface and configured to rotate the support portion.

In an embodiment, the alignment portion may include a cap portion and a stem portion, wherein the cap portion completely overlaps the inner bore and is connected to the second side surface, and the stem portion is connected to the cap portion.

In an embodiment, the pressing part may be disposed on the entire portion of the outer surface.

In an embodiment, the support portion may be formed of metal, and the pressing portion may be formed of polyurethane.

In an embodiment, the thickness of the support portion may be greater than the thickness of the pressing portion when viewed in a sectional view of the roller portion.

In an embodiment, the openings may include first and second openings that do not overlap with each other in a length direction of the roller member. The support portion may have a shape in which the first portion and the second portion are spaced apart from each other by the first opening and the second opening when viewed in a sectional view of the roller portion.

In an embodiment, the opening may include a first opening and a second opening. The first opening may not overlap with the second opening in the length direction of the roller member.

In an embodiment, the first openings may overlap with the second openings in a thickness direction of the roller members, respectively.

In embodiments, the openings may be spaced apart from each other and may be aligned in one direction.

In an embodiment of the inventive concept, a method of bonding substrates includes: adsorbing one end portion of the first substrate arranged on the first stage onto the roller member through an opening included in the roller member; aligning an end portion of the first substrate with an end portion of a second substrate disposed on the second stage; bringing one end portion of the first substrate adsorbed on the roller member into contact with one end portion of the second substrate; and rolling the roller member in one direction during pressing of the first substrate by the roller member.

In an embodiment, the method may further comprise: before one end portion of the first substrate is attracted to the roller member, the opening is aligned with the one end portion of the first substrate so that the opening faces the one end portion of the first substrate.

In an embodiment, the roller member may be rotated by an alignment part connected to an end of the roller member so that the opening is aligned with an end of the first substrate.

In an embodiment, the roller member may include an inner hole connected to the external space through the opening.

In an embodiment, the air intake portion may be connected to an end portion of the roller member, and the end portion of the first substrate may be adsorbed on the roller member through the opening by a suction operation of the air intake portion.

In an embodiment, the alignment of the one end portion of the first substrate with the one end portion of the second substrate may be performed in a suction operation of the air intake portion.

In an embodiment, the suction operation of the air intake part may be stopped after the one end portion of the first substrate is brought into contact with the one end portion of the second substrate.

Drawings

The accompanying drawings are included to provide a further understanding of the concepts of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate exemplary embodiments of the inventive concepts and, together with the description, serve to explain the principles of the inventive concepts. In the drawings:

fig. 1 is a perspective view showing a display device manufactured using a bonding apparatus according to an embodiment of the present inventive concept;

fig. 2 is an exploded perspective view showing a joining apparatus according to an embodiment of the present inventive concept;

fig. 3A is a perspective view illustrating a roller member according to an embodiment of the present inventive concept;

fig. 3B is a perspective view showing a part of a roller member according to an embodiment of the present inventive concept;

fig. 3C is a perspective view showing another part of the roller member according to the embodiment of the concept of the present invention;

fig. 4A is a sectional view of a roller member according to an embodiment of the present inventive concept, taken along line I-I' of fig. 3A;

fig. 4B is a sectional view taken along line I-I' of fig. 3A to show a roller member to which another embodiment of the inventive concept relates;

fig. 5 is a flowchart illustrating a method of bonding substrates according to an embodiment of the inventive concept;

fig. 6 is a sectional view showing a first substrate disposed on a first stage; and

fig. 7A to 7E are cross-sectional views illustrating a method of bonding substrates according to an embodiment of the inventive concept.

Detailed Description

The inventive concept will now be described more fully hereinafter with reference to the accompanying drawings, in which various embodiments are shown. The inventive concept may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the inventive concept to those skilled in the art. Like reference numerals refer to like elements throughout the specification.

It will be understood that when an element such as a layer, region or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. In contrast, the term "directly" means that there are no intervening elements present. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and include "at least one", unless the content clearly indicates otherwise. "or" means "and/or (and/or)". As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. It will be further understood that the terms "comprises" and/or "comprising," or "includes" and/or "including," when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components, and/or groups thereof.

Spatially relative terms such as "below", "lower", "above", "upper" and the like may be used herein for convenience of description to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "below" or "beneath" other elements or features would then be oriented above the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings herein.

As used herein, "about (about)" or "about (approximate)" includes the stated values and means within an acceptable deviation of the specified values as determined by one of ordinary skill in the art, taking into account the measurement and the error associated with the measurement of the specified quantity (i.e., the limitations of the measurement system).

Exemplary embodiments are described herein with reference to cross-sectional and/or plan views as idealized exemplary illustrations. In the drawings, the size of layers and regions may be exaggerated for clarity. Accordingly, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, the exemplary embodiments should not be construed as limited to the shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an etched region shown as a rectangle will typically have rounded or curved features. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to limit the actual shape of the regions and are not intended to limit the scope of the exemplary embodiments.

Hereinafter, exemplary embodiments of the inventive concept will be described in detail with reference to the accompanying drawings.

Fig. 1 is a perspective view showing a display device manufactured using a bonding apparatus according to an embodiment of the present inventive concept.

Referring to fig. 1, a display device DD manufactured using a bonding apparatus according to an embodiment of the inventive concept is shown as an example. The display device DD may display the image I M through the display surface DD-IS. A time display frame and an application icon are shown as an example of an image. The display surface DD-IS may include a display area DD-DA in which the image IM IS displayed and a non-display area DD-NDA adjacent to the display area DD-DA. An image may not be displayed in the non-display region DD-NDA.

The display surface DD-IS may have a shape extending in a first direction DR1 and a second direction DR2 intersecting the first direction DR 1. The normal direction of the display surface DD-IS (i.e., the thickness direction of the display device DD) may be indicated by the third direction DR 3. The expression "when viewed in plan" or "in plan" as used herein may mean the expression "when viewed in the third direction DR 3". Hereinafter, the front surface (or top surface) and the rear surface (or bottom surface) of each of the layers or units may be defined by the third direction DR 3. However, the directions indicated by the first direction DR1, the second direction DR2, and the third direction DR3 may be relative concepts, and may be changed to other directions (e.g., opposite directions).

The display device DD applicable to a mobile phone is shown as an example in this embodiment. Even though not shown in the drawings, the electronic module, the camera module, and the power supply module mounted on the main board may be placed in a cradle and/or a case together with the display device DD to constitute a mobile phone. The display device DD to which the present inventive concept relates is applicable to large electronic devices (e.g., televisions and monitors) as well as small and medium electronic devices (e.g., tablet computers, car navigation units, game machines, and smart watches).

Fig. 2 is an exploded perspective view showing a joining apparatus according to an embodiment of the present inventive concept. Fig. 3A is a perspective view illustrating a roller member according to an embodiment of the present inventive concept. Fig. 3B is a perspective view showing a part of the roller member according to the embodiment of the present inventive concept. Fig. 3C is a perspective view showing another part of the roller member according to the embodiment of the present inventive concept.

Referring to fig. 2, the bonding apparatus BD may include a first station ST1, a second station ST2, and a roller member R T. The bonding apparatus BD may bond two parts of the display device DD shown in fig. 1. In some embodiments, the two components may be a first substrate P1 disposed on the first station ST1 and a second substrate P2 disposed on the second station ST 2.

For example, the first substrate P1 and the second substrate P2 may be a display panel for displaying an image and an input sensing unit for sensing an external input, respectively. For another example, each of the first substrate P1 and the second substrate P2 may be a display substrate included in a display panel. In some embodiments, one of the first and second substrates P1 and P2 may be a window. In the present embodiment, the joining apparatus BD can be used to join two components included in the display device DD. However, the embodiments of the inventive concept are not limited thereto. In some embodiments, the bonding apparatus BD may be used to bond two substrates of various devices.

Each of the first and second stages ST1 and ST2 may have a shape extending in a first direction DR1 and a second direction DR2 intersecting the first direction DR 1. The first stage ST1 may have a shape for supporting a partial region of the first substrate P1, and the second stage ST2 may have a shape for supporting the entire region of the second substrate P2. In addition, the first and second stages ST1 and ST2 may have a thickness greater than that of the first and second substrates P1 and P2, respectively, and may support the first and second substrates P1 and P2, respectively.

The roller member RT may include a roller portion RD, an air intake portion VD, an alignment portion AD, a first fixing portion FD1, and a second fixing portion FD 2. The roller member RT may roll in the second direction DR2 during pressing one of the first and second substrates P1 and P2. In the present embodiment, the roller member RT may press the first substrate P1 from the first substrate P1 toward the second substrate P2 in the third direction DR 3. In addition, the roller member RT may roll in the second direction DR 2.

According to fig. 2, the first substrate P1 disposed on the first stage ST1 may include a first portion P1a overlapping the first stage ST1 in the third direction DR3 and a second portion P1b not overlapping the first stage ST1 in the third direction DR 3. The second portion P1b of the first substrate P1 pressed by the roller member RT may not overlap with the first stage ST 1.

Referring to fig. 3A, the roller portion RD may have a shape extending in the first direction DR1, and may have a circular shape when viewed in a sectional view. The phrase "sectional view" may mean a sectional view of the roller portion RD taken along a thickness direction of the roller portion RD (i.e., the third direction DR 3). The above-described operation of the roller member RT rolling in the second direction DR2 during the pressing of the first substrate P1 may be basically performed by the roller portion RD. In other words, the first substrate P1 and the second substrate P2 may be joined to each other by the pressing motion and the rolling motion of the roller portion RD.

Roller portion RD may include an outer surface RD-O, a first side surface SS1, and a second side surface SS 2. The outer surface RD-O may be disposed between the first side surface SS1 and the second side surface SS 2. In some embodiments, roll portion RD may include an inner bore HO, and inner bore HO may define an interior space of roll portion RD. The inner bore HO may extend in a first direction DR1 and may correspond to a length of the roll portion RD.

Each of the first and second side surfaces SS1 and SS2 may expose the inner hole HO to the outside. The inner hole HO exposed through the first and second side surfaces SS1 and SS2 may be located at the centers of the first and second side surfaces SS1 and SS 2.

According to an embodiment of the inventive concept, the roller portion RD may include a plurality of openings OP arranged in the first direction DR1 and spaced apart from each other. Each of the openings OP may have a shape extending in the third direction DR3, and may connect the inner hole HO to an external space. In the present embodiment, the opening OP defined at the outer surface RD-O of the roller portion RD has a circular shape. However, the embodiments of the inventive concept are not limited thereto. The shape of the opening OP may be variously modified.

Meanwhile, prior to the process of bonding the first and second substrates P1 and P2 of fig. 2, a process of aligning one end portion of the first substrate P1 with one end portion of the second substrate P2 may be performed. However, if one end portion of the first substrate P1 is not parallel to the plane defined by the first and second directions DR1 and DR2, it may be difficult to align one end portion of the first substrate P1 with one end portion of the second substrate P2. For example, if the second portion P1b of the first substrate P1 is bent from the first portion P1a of the first substrate P1, it may be difficult to align one end portion of the first substrate P1 with one end portion of the second substrate P2.

According to an embodiment of the inventive concept, one end portion of the first substrate P1 may be controlled to be parallel to a plane defined by the first direction DR1 and the second direction DR2 through the opening OP of the roller portion RD. Hereinafter, a plane defined by the first direction DR1 and the second direction DR2 is defined as an alignment plane.

In detail, air intake (or suction) may be performed through the opening OP of the roller portion RD, and thus, one end portion of the first substrate P1 may be adsorbed on the roller portion RD. The intake of the opening OP may be performed by intake (or suction) of the inner hole HO included in the roller portion R D. The second portion P1b of the first substrate P1 may be adsorbed through the opening OP, and thus, the second portion P1b of the first substrate P1 may be parallel to the alignment plane. As a result, one end portion of the first substrate P1 can be easily aligned with one end portion of the second substrate P2. The roller portion RD will be described in more detail later.

Referring to fig. 3B, the air inlet portion VD may be connected to the first side surface SS1 of the roller portion RD. The intake portion V D may completely overlap the inner hole HO exposed through the first side surface SS 1. In other words, the intake portion VD may completely cover the inner hole HO, and may be connected to the first side surface SS 1. The above-described intake (or suction) of the opening OP may be performed through the intake portion VD. For example, the air inlet VD may be controlled using electrical energy such that the air pressure of the air inlet VD is lower than the air pressure of the inner hole HO. As a result, when the intake portion VD is operated, the air of the bore HO may be drawn into the intake portion VD. Hereinafter, the operation performed by the intake portion VD may be defined as an air suction operation.

Referring to fig. 3C, the alignment portion AD may be connected to the second side surface SS2 of the roller portion RD. The alignment portion A D may completely overlap the inner hole HO exposed through the second side surface SS2 and may be connected to the second side surface SS 2.

The alignment portion AD may include a cap portion PN directly connected to the second side surface SS2 and a stem portion CN connected to the cap portion PN. The cap PN may completely cover the inner hole HO and may be connected to the second side surface SS 2. The stem portion CN may overlap a portion of the inner hole HO and may be connected to a portion of the cap PN. The roller portion RD can be rolled or rotated by the movement of the rod portion CN.

Referring again to fig. 2, the first fixing portion FD1 may be coupled to one end portion of the roller portion RD. The first fixing portion FD1 may include a first coupling hole FOP1, and one end portion of the roller portion RD may be inserted in the first coupling hole FOP 1.

The second fixing portion FD2 may be coupled to the other end portion of the roller portion RD. The second fixing portion FD2 may include a second coupling hole FOP2, and the other end of the roller portion RD may be inserted in the second coupling hole FOP 2.

Even though not shown in the drawings, the first and second holders FD1 and FD2 and the first stage ST1 may be coupled to the main stage. For example, the first and second holders FD1 and FD2 may be tiltable or movable in the second direction DR2 on the main table. Accordingly, the roller portion RD coupled to the first and second fixing portions FD1 and FD2 may also be tiltable or movable in the second direction DR 2.

Fig. 4A is a sectional view of a roller member according to an embodiment of the present inventive concept, taken along line I-I' of fig. 3A. Fig. 4B is a sectional view of a roller member according to another embodiment of the present inventive concept, taken along line I-I' of fig. 3A.

In fig. 4A and 4B, respectively, a roll portion RD and a roll portion RDa are shown, wherein in roll portion RD and roll portion RDa the opening OP of fig. 3A is shown.

Referring to fig. 4A, the roller portion RD may include a bearing portion H1 and a pressing portion a 1. Support portion H1 may include an inner bore HO. The bearing portion H1 may include a first side surface, a second side surface, and an outer surface disposed between the first and second side surfaces. First and second side surfaces SS1 and SS2 of roller portion RD described above may correspond to the first and second side surfaces of bearing H1, respectively. In other words, the air intake portion VD may be connected to the first side surface of the bearing portion H1, and the alignment portion AD may be connected to the second side surface of the bearing portion H1. For example, the support portion H1 may be formed of a rigid material such as metal.

The pressing portion a1 may be disposed on the bearing portion H1. The pressing portion a1 may cover the entire outer surface of the bearing portion H1. In some embodiments, opening OP may be a hole penetrating through support portion H1 and pressing portion a1, and inner hole HO may be connected to an external space through opening OP. In some embodiments, the thickness of press portion a1 may be less than the thickness of bearing H1, and press portion a1 may be formed of, for example, polyurethane.

For example, when an air suction operation is performed through the intake portion VD described with reference to fig. 3B, air of the bore HO may be drawn into the intake portion VD. In this case, air of the external space may also be sucked through the opening OP and the inner hole HO. In other words, air of the external space may be sucked through the opening OP, and the air sucked through the opening OP may be sucked into the intake portion VD through the inner hole HO.

For example, when one of the first and second substrates P1 and P2 of fig. 2 is adjacent to the opening OP in the suction operation of the gas inlet VD, the one substrate may be adsorbed onto the outer surface RD-O of the roller portion RD.

Referring to fig. 4B, a roll portion RDa according to another embodiment of the present inventive concept is shown. The openings OP may include a plurality of first openings OP1 aligned in the first direction DR1 and a plurality of second openings OP2 aligned in the first direction DR 1. The first opening OP1 may not overlap with the second opening OP2 in the length direction (i.e., the first direction DR1) of the roller portion RDa.

According to an embodiment of the inventive concept, the first openings OP1 may overlap the second openings OP2, respectively, in a thickness direction (i.e., the third direction DR3) of the roller portion RDa. The inner hole HO may be connected to an external space through the first opening OP1 and the second opening OP 2. In addition, during the air suction operation of the air intake portion VD, an external object may be adsorbed onto the roller portion RDa through the first and second openings OP1 and OP 2.

In the above embodiment, the first opening OP1 may overlap with the second opening O P2 in the third direction DR 3. However, the embodiments of the inventive concept are not limited thereto. In some embodiments, the first opening OP1 may not overlap with the second opening OP2 in the third direction DR3, and/or the number of openings OP that do not overlap with each other in the first direction DR1 may be variously changed.

In addition, according to fig. 4B, when viewed in a sectional view of the roller portion RDa, the bearing portion H1 may have a shape in which the first portion H1a and the second portion H1B are spaced apart from each other by the first opening OP1 and the second opening OP 2. The pressing part A1z may have a shape in which the first portion A1a and the second portion A1b are spaced apart from each other by the first opening OP1 and the second opening OP2 when viewed in a sectional view of the roller portion RDa.

Fig. 5 is a flowchart illustrating a method of bonding substrates according to an embodiment of the inventive concept. Fig. 6 is a sectional view showing a first substrate disposed on a first stage. Fig. 7A to 7E are cross-sectional views illustrating a method of bonding substrates according to an embodiment of the inventive concept.

Fig. 5 illustrates the operation of the bonding apparatus BD described with reference to fig. 2. As described above, the first and second substrates P1 and P2 of fig. 2 may be joined to each other by the roller members RT. Even though not shown in the drawings, an adhesive member may be further disposed between the first and second substrates P1 and P2. Prior to bonding the first substrate P1 to the second substrate P2, an adhesive member may be disposed on one of the first substrate P1 and the second substrate P2.

Meanwhile, according to fig. 6, the first portion P1a of the first substrate P1 disposed on the first stage ST1 may be fixed by the first stage ST1, and thus may be parallel to the alignment plane. However, the second portion P1b of the first substrate P1, which does not overlap with the first stage ST1, may be bent from the first portion P1a, and thus may not be parallel to the alignment plane. If one end portion of the first substrate P1 and one end portion of the second substrate P2 are not aligned with each other, the bonding reliability between the substrates may be deteriorated.

According to an embodiment of the inventive concept, the roller member RT may control the second portion P1b of the first substrate P1 such that the second portion P1b is parallel to the alignment plane.

As shown in fig. 5, the opening OP included in the roller portion RD may be aligned with one end portion P1-E of the first substrate P1 disposed on the first station ST1 such that the opening OP faces the one end portion P1-E of the first substrate P1 (S110). One end portion P1-E of the first substrate P1 may correspond to one end portion of the second portion P1b, and may be an end portion of the first substrate P1. One end portion P2-E of the second substrate P2 may be an end portion of the second substrate P2 adjacent to one end portion P1-E of the first substrate P1.

In detail, referring to fig. 7A and 7B, the roller portion RD may be rotated such that the opening O P of the roller portion RD faces one end P1-E of the first substrate P1. This may be controlled by the alignment section AD described above with reference to fig. 3C. For example, the roller portion RD may be rotated in the clockwise direction by a predetermined angle by rotating the lever portion CN of the aligning portion AD in the clockwise direction by a predetermined angle. As a result, as shown in fig. 7B, the opening OP of the roller portion RD may be aligned in a facing manner with one end portion P1-E of the first substrate P1.

Fig. 7A and 7B show the roller portion RD of fig. 4A. However, the embodiments of the inventive concept are not limited thereto. In certain embodiments, the roll portion RDa of fig. 4B may be applied to a method of operating a joining apparatus. For example, the roll portion RDa of fig. 4B may include at least two or more openings that do not overlap with each other in a length direction of the roll portion RDa. One of the two openings may be aligned with one end portion P1-E of the first substrate P1, and thus, the process of aligning the opening with one end portion P1-E of the first substrate P1 may be easier.

Thereafter, one end portion P1-E of the first substrate P1 may be adsorbed on the roller portion RD through the opening OP (S120). This can be controlled by the intake portion VD described above with reference to fig. 3B. For example, in the suction operation of the gas inlet VD, the first substrate P1 may be sucked through the opening OP of the roller portion RD, and thus, the second portion P1b of the first substrate P1 may be parallel to the alignment plane.

One end portion P1-E of the first substrate P1 may be aligned with one end portion P2-E of the second substrate P2 (S130). In particular, the alignment between the first substrate P1 adsorbed on the roller portion RD and the second substrate P2 may be performed during the suction operation of the gas inlet portion VD. Since the one end portion P1-E of the first substrate P1 is adsorbed on the roller portion RD, the state in which the second portion P1b of the first substrate P1 is parallel to the alignment plane can be maintained.

Subsequently, one end portion P1-E of the first substrate P1 sucked through the opening OP may be brought into contact with one end portion P2-E of the second substrate P2 (S140). Referring to fig. 7D, the roller portion RD may be vertically moved and the first substrate P1 may be tilted by a predetermined angle az, and thus, one end portion P1-E of the first substrate P1 may be joined to one end portion P2-E of the second substrate P2. At this time, the suction operation of the intake portion VD can be continuously maintained. In addition, the first stage ST1 may also be inclined with respect to the alignment plane based on the movement of the roller portion RD, but the second stage ST2 may remain parallel to the alignment plane.

Next, the roller portion RD may be rolled in the second direction DR2 while pressing the first substrate P1 (S150). Referring to fig. 7D and 7E, the first substrate P1 may be pressed in a direction toward the second substrate P2 by the pressing portion a1 of the roller portion RD. In addition, since the roller portion RD rolls in the second direction DR2, the first substrate P1 may be integrally joined to the second substrate P2. The first substrate P1 may be separated from the first station ST1 and may be disposed on the second substrate P2.

In addition, according to the concept of the present invention, the air suction operation of the roller portion RD may be stopped during the pressing movement and the rolling movement of the roller portion RD. In other words, after the one end portion P1-E of the first substrate P1 is brought into contact with the one end portion P2-E of the second substrate P2 through the opening O P, the operation of the gas inlet VD may be stopped.

According to an embodiment of the inventive concept, one end portion of the first substrate of the two substrates may be adsorbed on the roller member through the opening included in the roller member. The first substrate and the second substrate may be aligned with each other in a state where the first substrate is adsorbed on the roller member.

Therefore, a process of aligning the first substrate with the second substrate can be easily performed before the first substrate and the second substrate are bonded.

While the inventive concept has been described with reference to exemplary embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the inventive concept. Accordingly, it should be understood that the above-described embodiments are not limited, but illustrative. The scope of the inventive concept is, therefore, indicated by the broadest permissible interpretation of the following claims and their equivalents, and shall not be restricted or limited by the foregoing description.