阅读说明：本技术 一种调节组件及微调装置 (Adjusting component and fine adjustment device ) 是由 宁诗琪 王青亮 郑锋标 张阔峰 郑教增 姜杰 郝凤龙 庞飞 于 2019-03-22 设计创作，主要内容包括：本发明公开了一种调节组件及微调装置,属于精密机械加工及装配技术领域。该调节组件包括固定底板,其与待调整件固定连接；第一调节杆,其与所述固定底板连接,且所述第一调节杆上设置有驱动块,所述第一调节杆能带动所述驱动块在垂直于所述第一调节杆轴线方向致动；第二调节杆,其一端与所述驱动块抵接,另一端与固定基准抵接。该微调装置包括上述调节组件。本发明的调节组件设置第一调节杆、驱动块、第二调节杆以及与调整底座固定连接的固定底板,并借助固定基准的作用使得第二调节杆向驱动块施加反作用力,进而推动调整底座移动,该调节组件结构简单,安装方便,且无需设置腰型孔也可实现沿某一方向的位移。(The invention discloses an adjusting assembly and a fine adjusting device, and belongs to the technical field of precision machining and assembling. The adjusting component comprises a fixed bottom plate which is fixedly connected with a piece to be adjusted; the first adjusting rod is connected with the fixed bottom plate, a driving block is arranged on the first adjusting rod, and the first adjusting rod can drive the driving block to actuate in the direction perpendicular to the axis of the first adjusting rod; and one end of the second adjusting rod is abutted with the driving block, and the other end of the second adjusting rod is abutted with the fixed reference. The fine adjustment device comprises the adjusting assembly. The adjusting assembly is provided with the first adjusting rod, the driving block, the second adjusting rod and the fixed bottom plate fixedly connected with the adjusting base, and the second adjusting rod applies reaction force to the driving block under the action of the fixed datum so as to push the adjusting base to move.)

1. An adjustment assembly, comprising:

a fixed base plate (33) fixedly connected with the piece to be adjusted;

the first adjusting rod (31) is connected with the fixed bottom plate (33), a driving block is arranged on the first adjusting rod (31), and the first adjusting rod (31) can drive the driving block to actuate in the direction perpendicular to the axis of the first adjusting rod (31);

and a second adjustment lever (34) having one end abutting the drive block and the other end abutting a fixed reference.

2. The adjustment assembly according to claim 1, characterized in that the member to be adjusted is provided with a rotation pin (35), the intermediate portion of the second adjustment lever (34) is rotatably connected to the rotation pin (35), and the driving block is configured to drive the second adjustment lever (34) to rotate.

3. The adjustment assembly according to claim 2, characterized in that the adjustment assembly comprises an elastic member, the elastic member is arranged at one end of the second adjustment rod (34) abutting against the driving block, one end of the elastic member is connected with the second adjustment rod (34), the other end is connected with the member to be adjusted, and the elastic member enables the second adjustment rod (34) to abut against the driving block.

4. The adjustment assembly according to claim 3, characterized in that the resilient member is a compression spring (36), the second adjustment lever (34) is located between the compression spring (36) and the drive block, and one end of the compression spring (36) abuts the second adjustment lever (34) and the other end is connected to the member to be adjusted.

5. Adjustment assembly according to claim 1, characterized in that one end face of the second adjustment lever (34) abuts the drive block and the other end face abuts the fixed reference, the drive block being arranged to drive the second adjustment lever (34) in a linear movement.

6. The adjustment assembly according to claim 5, characterized in that the adjustment assembly comprises an extension spring (38), the extension spring (38) being parallel to the direction of linear movement of the second adjustment bar (34), one end of the extension spring (38) being connected to the second adjustment bar (34) and the other end being connected to the member to be adjusted, the extension spring (38) being capable of bringing the second adjustment bar (34) into abutment with the drive block.

7. The adjustment assembly of claim 6, further comprising:

a first fixing pin (37) connected with the member to be adjusted, wherein one end of the extension spring (38) is connected with the first fixing pin (37);

the second fixing pin (39) is fixedly connected with the second adjusting rod (34), and the other end of the extension spring (38) is connected with the second fixing pin (39);

the first fixing pin (37) is located between the drive block and the second fixing pin (39), or the drive block is located between the first fixing pin (37) and the second fixing pin (39).

8. Adjustment assembly according to claim 7, characterized in that the second adjustment lever (34) is provided with an adjustment slot, in which the second fixing pin (39) is located, and in that the first fixing pin (37) can extend into the adjustment slot, and in that the first fixing pin (37) is located between the drive block and the second fixing pin (39).

9. The adjustment assembly according to claim 8, characterized in that the first fixing pin (37) is parallel to the first adjustment lever (31) and the first fixing pin (37) is arranged perpendicular to the second fixing pin (39).

10. The adjustment assembly according to any of claims 1-9, characterized in that the drive block is a wedge block (32), the wedge block (32) being in threaded connection with the first adjustment rod (31), the wedge block (32) being configured to move axially along the first adjustment rod (31), and one end of the second adjustment rod (34) abutting an inclined surface of the wedge block (32).

11. The adjustment assembly according to any one of claims 1-9, characterized in that the drive block is an eccentric (32 '), the first adjustment rod (31) being fixedly connected to the eccentric (32 '), one end of the second adjustment rod (34) abutting the outer circumferential surface of the eccentric (32 ').

12. A fine adjustment device, characterized in that it comprises an adjustment base (1) and an adjustment assembly according to any one of claims 1 to 11, the fixed base plate (33) of the adjustment assembly being fixedly connected to the adjustment base (1).

13. The fine-tuning device according to claim 12, characterized in that the adjustment base (1) comprises a first plane (11) perpendicular to the first direction and a second plane (12) perpendicular to the second direction, at least one of said adjustment assemblies being arranged on the side of the first plane (11) and at least one of said adjustment assemblies being arranged on the side of the second plane (12).

14. The trimming device according to claim 13, characterized in that at least two of said adjustment assemblies are provided on the side of said second plane (12).

15. The fine-tuning device according to claim 13, characterized in that the adjustment base (1) further comprises a third plane opposite to the first plane (11) and a fourth plane opposite to the second plane (12), wherein two spring plungers (4) are provided on the side of the third plane and on the side of the fourth plane, the number of which corresponds to the number of adjustment assemblies.

16. The fine adjustment device according to claim 12, wherein the fixed base plate (33) is located at one end of a first adjustment rod (31), the fixed base plate (33) is fixedly connected with the lower surface of the adjustment base (1), the other end of the first adjustment rod (31) extends into a through hole formed in the upper surface of the adjustment base (1), and a side wall of one end of the first adjustment rod (31) far away from the fixed base plate (33) can be in contact with the adjustment base (1).

Technical Field

The invention relates to the technical field of precision machining and assembly, in particular to an adjusting assembly and a fine adjustment device.

Background

In a mask transmission subsystem of a photoetching machine, after coarse pre-alignment of a mask is finished, a mask plate is rotated by a plate exchange hand for 180 degrees and then is transferred to a mask table, so that the position deviation of the mask plate in the plate exchange process is eliminated, the plate loading precision of the mask plate before the mask plate is transferred to a plate exchange manipulator is ensured, and the position repeatability of the mask plate loading to the mask table is ensured.

Specifically, the detector reads the coverage condition of the light source, and judges the position of the mask plate mark, so that the mask plate is subjected to position compensation through the mask table. When the detector judges the position deviation of the mask, the theoretical position of the mask must be set, and before the mask is installed, the central position of the four-quadrant sensor in the detector is adjusted to coincide with the theoretical position of the mask, and the central position is marked as a zero position of the detector.

At present, precision of a fine prealignment detector mounting plate in a photoetching machine product is directly guaranteed through machining, and the position relation between a detector and a mask plate mark is not directly established. In order to directly establish the relationship between the detector and the mask plate mark position, the detector is realized at X, Y and R_zDecoupling the three directions, taking the position of the detector adjusted by the three directions as the theoretical position of the mask plate mark, and marking the zero position of the detector. Meanwhile, the X, Y two-direction adjustment resolution needs to meet the micron-scale, R_zThe adjustment resolution of the direction needs to meet the milliradian level.

In the mechanical structure, X, Y two-direction adjustment is realized, generally through designing waist-shaped holes, and only X or Y direction adjustment can be realized by one group of waist-shaped holes. If X, Y is to be adjustable in two directions, a two-layer waist hole structure is generally adopted, and the adjustment precision is low and the stability is highAnd (4) poor. If further R is to be adjusted_zAnd in addition, a rotating mechanism is required. Simultaneous realization of X, Y and R_zThe three directions are manually adjustable, and the requirement of a multilayer structure can be met.

Therefore, it is desirable to provide an adjusting assembly and a fine tuning device to solve the above problems.

Disclosure of Invention

One object of the present invention is to provide an adjusting assembly which is simple in structure and can be adjusted in the X direction or the Y direction without providing a kidney-shaped hole.

Another object of the present invention is to provide a trimming device that can be used to provide adjustment assemblies on the same layer structure and achieve X, Y and R_zThe three directions are manually adjustable.

In order to achieve the purpose, the invention adopts the following technical scheme:

an adjustment assembly, comprising:

the fixed bottom plate is fixedly connected with the piece to be adjusted;

the first adjusting rod is connected with the fixed bottom plate, a driving block is arranged on the first adjusting rod, and the first adjusting rod can drive the driving block to actuate in the direction perpendicular to the axis of the first adjusting rod;

and one end of the second adjusting rod is abutted with the driving block, and the other end of the second adjusting rod is abutted with the fixed reference.

Optionally, the to-be-adjusted component is provided with a rotating pin, the middle part of the second adjusting rod is rotatably connected with the rotating pin, and the driving block is configured to drive the second adjusting rod to rotate.

Optionally, the adjusting assembly includes an elastic member, the elastic member is disposed at one end of the second adjusting rod, which is abutted to the driving block, one end of the elastic member is connected to the second adjusting rod, the other end of the elastic member is connected to the member to be adjusted, and the elastic member enables the second adjusting rod to be abutted to the driving block.

Optionally, the elastic member is a compression spring, the second adjusting rod is located between the compression spring and the driving block, one end of the compression spring is abutted against the second adjusting rod, and the other end of the compression spring is connected with the member to be adjusted.

Optionally, an end surface of one end of the second adjustment lever abuts against the driving block, and an end surface of the other end of the second adjustment lever abuts against the fixed reference, and the driving block is configured to drive the second adjustment lever to linearly move.

Optionally, the adjusting assembly includes an extension spring, the extension spring is parallel to the linear moving direction of the second adjusting rod, one end of the extension spring is connected to the second adjusting rod, the other end of the extension spring is connected to the member to be adjusted, and the extension spring enables the second adjusting rod to abut against the driving block.

Optionally, the adjusting assembly further comprises:

the first fixing pin is connected with the piece to be adjusted, and one end of the extension spring is connected with the first fixing pin;

the second fixing pin is fixedly connected with the second adjusting rod, and the other end of the extension spring is connected with the second fixing pin;

the first fixing pin is located between the driving block and the second fixing pin, or the driving block is located between the first fixing pin and the second fixing pin.

Optionally, the second adjusting rod is provided with an adjusting groove, the second fixing pin is located in the adjusting groove, the first fixing pin can extend into the adjusting groove, and the first fixing pin is located between the driving block and the second fixing pin.

Optionally, the first fixing pin is parallel to the first adjusting rod, and the first fixing pin and the second fixing pin are arranged vertically.

Optionally, the driving block is a wedge block, the wedge block is in threaded connection with the first adjusting rod, the wedge block is configured to move axially along the first adjusting rod, and one end of the second adjusting rod is abutted to an inclined surface of the wedge block.

Optionally, the driving block is an eccentric wheel, the first adjusting rod is fixedly connected with the eccentric wheel, and one end of the second adjusting rod is abutted to the outer peripheral surface of the eccentric wheel.

A fine adjustment device comprises an adjustment base and any one of the adjustment assemblies, wherein a fixing bottom plate of each adjustment assembly is fixedly connected with the adjustment base.

Optionally, the adjusting base includes a first plane perpendicular to the first direction and a second plane perpendicular to the second direction, at least one of the adjusting assemblies is disposed on a side of the first plane, and at least one of the adjusting assemblies is disposed on a side of the second plane.

Optionally, at least two adjusting assemblies are arranged on the side of the second plane.

Optionally, the adjustment base further includes a third plane opposite to the first plane and a fourth plane opposite to the second plane, and two spring plungers corresponding to the number of the adjustment assemblies are disposed on both the side where the third plane is located and the side where the fourth plane is located.

Optionally, the fixed base plate is located at one end of the first adjusting rod, the fixed base plate is fixedly connected with the lower surface of the adjusting base, the other end of the first adjusting rod extends into a through hole formed in the upper surface of the adjusting base, and the side wall of one end, far away from the fixed base plate, of the first adjusting rod can be in contact with the adjusting base.

The invention has the beneficial effects that:

the adjusting assembly is through setting up first regulation pole, drive block, second regulation pole and with adjustment base fixed connection's PMKD to make the second adjust the pole and apply reaction force to the drive block with the help of the effect of fixed reference, and then promote the adjustment base and remove, this adjusting assembly simple structure, simple to operate, and need not to set up waist type hole and also can realize the displacement along a certain direction.

The fine adjustment device can realize that a plurality of adjustment assemblies are arranged on the same layer structure by adopting the adjustment assemblies.

Drawings

FIG. 1 is a schematic diagram illustrating a first view angle of a fine adjustment apparatus according to the present invention;

FIG. 2 is a schematic structural diagram of an adjustment assembly according to a first embodiment of the present invention;

FIG. 3 is a schematic diagram illustrating a second view of a fine adjustment apparatus according to the present invention;

FIG. 4 is a schematic structural diagram of another adjustment assembly in the second embodiment of the present invention;

fig. 5 is a schematic structural diagram of another adjusting assembly in the third embodiment of the present invention.

In the figure:

1. adjusting the base; 11. a first plane; 12. a second plane;

2. a detector;

31. a first adjusting lever; 32. wedge blocks 33 and a fixed bottom plate; 34. a second adjusting lever; 35. rotating the pin shaft; 36. a compression spring; 37. a first fixing pin; 38. an extension spring; 39. a second fixing pin;

32', an eccentric wheel;

4. a spring plunger; 5. plunger fixing base.

Detailed Description

In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention. The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.