阅读说明：本技术 用于真空系统的后级泵控制系统及控制方法 (Control system and control method for rear-stage pump of vacuum system ) 是由 尚元贺 蔡克亚 张子奇 韩乐乐 李向广 于 2020-06-28 设计创作，主要内容包括：本发明公开了一种用于真空系统的后级泵控制系统及控制方法,包括真空腔室、后级泵、前级泵、电控阀、真空传感器、控制单元；后级泵抽气口与真空腔室连通,后级泵排气口通过电控阀与前级泵抽气口连通；控制单元信号输入接口分别与真空传感器和后级泵内置温度传感器连接,控制单元控制输出接口分别与前、后级泵控制器和电控阀控制器输入接口连接。本发明通过设置控制单元,便于实时控制前、后级泵开/关闭及调节后级泵转速,及时测量真空腔室真空度和后级泵工作温度,便于调节后级泵抽速,确保了后级泵使用寿命和工作稳定性,降低了功耗,整个真空系统兼顾了体积小与抽速快的优点,便于整个真空系统的集成,相较于前级泵外设方式简化了气路结构。(The invention discloses a rear-stage pump control system and a control method for a vacuum system, wherein the rear-stage pump control system comprises a vacuum chamber, a rear-stage pump, a front-stage pump, an electric control valve, a vacuum sensor and a control unit; the exhaust port of the back-stage pump is communicated with the exhaust port of the front-stage pump through an electric control valve; the control unit signal input interface is respectively connected with the vacuum sensor and the built-in temperature sensor of the rear-stage pump, and the control unit control output interface is respectively connected with the input interfaces of the front-stage pump controller, the rear-stage pump controller and the electric control valve controller. The vacuum pump is convenient to control the opening/closing of the front-stage pump and the rear-stage pump and adjust the rotating speed of the rear-stage pump in real time by arranging the control unit, measures the vacuum degree of the vacuum chamber and the working temperature of the rear-stage pump in time, adjusts the pumping speed of the rear-stage pump, ensures the service life and the working stability of the rear-stage pump, reduces the power consumption, has the advantages of small volume and high pumping speed, is convenient for the integration of the whole vacuum system, and simplifies the gas circuit structure compared with the external arrangement mode of the front-stage pump.)

1. A back-stage pump control system for a vacuum system comprises a vacuum chamber, a back-stage pump, a backing pump, an electric control valve, a vacuum sensor and a control unit; the method is characterized in that: the exhaust port of the rear-stage pump is communicated with the exhaust port of the backing pump through the electric control valve; a signal input interface of the control unit is respectively connected with detection signal output interfaces of the vacuum sensor and a built-in temperature sensor of the rear-stage pump and is used for detecting the vacuum degree in the vacuum chamber and the working temperature of the rear-stage pump; the control signal output interface of the control unit is respectively connected with the control signal input interfaces of the controller of the backing pump, the controller of the backing pump and the controller of the electric control valve, and is used for controlling the pumping speed of the backing pump and the opening/closing of the backing pump and the electric control valve; the front-stage pump is a mechanical vacuum pump, and the rear-stage pump is a molecular vacuum pump.

2. The post-stage pump control system for a vacuum system of claim 1, wherein: the ratio of the rated pumping speed of the rear-stage pump to the rated pumping speed of the front-stage pump is more than 300;

preferably, a signal input interface of the control unit is connected with a detection signal output interface of a built-in temperature sensor of the backing pump, and is used for detecting the working temperature of the backing pump.

3. A control method of the rear stage pump control system according to claim 1, characterized in that: the method comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, when the rear-stage pump is started, reading the working temperature t and the rotating speed n of the rear-stage pump in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when the working temperature t of the rear-stage pump is lower than the first preset temperature t₁And is higher than or equal to a second predetermined temperature t₂When the temperature is higher than the set temperature, the control unit controls the pumping speed of the rear-stage pump to be inversely proportional to the working temperature t;

when the working temperature t of the rear-stage pump is lower than a second preset temperatureDegree t₂When the pump is in use, the pumping speed of the back-stage pump is separated from the control of the working temperature of the back-stage pump; wherein, t₁＞t₂；

And 3, repeatedly and circularly operating the step 1 and the step 2 to realize the continuous and stable work of the back-stage pump and the vacuum system.

4. The control method of the rear stage pump control system according to claim 3, characterized in that: in step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed n of the rear-stage pump to increase to the maximum preset rotating speed n according to the working temperature t of the rear-stage pump_maxOr reduced to the minimum preset rotation speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed; when t = t₂When the rotation speed of the rear stage pump is controlled by the control unit to be less than or equal to the maximum preset rotation speed n_max；

Preferably, the first preset temperature t₁Satisfies the following conditions: t is more than or equal to 55 DEG C₁≤90℃；

Still preferably, the first preset temperature t₁Satisfies the following conditions: t is not less than 75 DEG C₁≤85℃；

Preferably, the second preset temperature t₂Satisfies the following conditions: t is not less than 35 DEG C₂≤80℃。

5. A control method of the rear stage pump control system according to claim 1, characterized in that: the method comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, when the rear-stage pump is started, reading the working temperature t, the output power P and the rotating speed n of the rear-stage pump in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when t < t₁And the output power P of the back stage pump is greater than or equal to the first preset power P₁While controlling the latter pumpThe pumping speed is inversely proportional to the output power P;

when t < t₁And P < P₁When the pump is started, the pumping speed of the rear-stage pump is separated from the control of the output power;

and 3, repeatedly and circularly operating the step 1 and the step 2 to realize the continuous and stable work of the back-stage pump and the vacuum system.

6. The control method of the rear stage pump control system according to claim 5, characterized in that: in step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed of the rear-stage pump to increase to the maximum preset rotating speed n according to the output power P_maxOr reduced to a minimum preset speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed;

preferably, the first preset power P₁Satisfies the following conditions: p is more than or equal to 100 watts₁Less than or equal to 300 watts;

still preferably, the first preset power P₁Satisfies the following conditions: p is more than or equal to 120 watts₁Less than or equal to 200 watts;

preferably, the first preset temperature t₁Satisfies the following conditions: t is more than or equal to 55 DEG C₁≤90℃；

Still preferably, the first preset temperature t₁Satisfies the following conditions: t is not less than 75 DEG C₁≤85℃。

7. A control method of the rear stage pump control system according to claim 1, characterized in that: the method comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, when the back-stage pump is started, reading the working temperature t of the back-stage pump and the vacuum degree in the vacuum chamber in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when t < t₁While controlling the pumping speed and vacuum of the back stage pumpThe vacuum degree in the chamber is in inverse proportion;

and 3, circularly operating the step 1 and the step 2 to realize continuous and stable work of a rear-stage pump and a vacuum system.

8. The control method of the rear stage pump control system according to claim 7, characterized in that: in step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed of the rear-stage pump to increase to the maximum preset rotating speed n according to the vacuum degree of the vacuum chamber_maxOr reduced to a minimum preset speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed;

preferably, the minimum preset rotation speed n_minSatisfies the following conditions: n is more than or equal to 300r/s_min≤800r/s；

Preferably, the maximum preset rotation speed n_maxSatisfies the following conditions: n is more than or equal to 800r/s_max≤2000r/s。

9. A control method of the rear stage pump control system according to claim 1, characterized in that: the method comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, after the rear-stage pump is started, reading the working temperature t of the rear-stage pump, the output power P of the rear-stage pump and the vacuum degree in the vacuum chamber in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when t < t₁When the vacuum pump is used, the control unit controls the pumping speed of the rear-stage pump to be in inverse proportion to the working temperature t, the output power P and the vacuum degree in the vacuum chamber respectively; when the working temperature t, the output power P and the vacuum degree in the vacuum chamber of the rear-stage pump conflict with the pumping speed control of the rear-stage pump, the pumping speed of the rear-stage pump is controlled by respectively adopting the weights a, b and c for the three parameters of the working temperature t, the output power P and the vacuum degree in the vacuum chamber;

a + b + c =1, a, b, c are all values greater than or equal to zero, and at least two of a, b, c are greater than zero;

and 3, circularly operating the step 1 and the step 2 to realize continuous and stable work of a rear-stage pump and a vacuum system.

10. The control method of the rear stage pump control system according to claim 9, characterized in that: in step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed of the rear-stage pump to increase to the maximum preset rotating speed n according to the working temperature t, the output power P and the vacuum degree in the vacuum chamber of the rear-stage pump_maxOr reduced to a minimum preset speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed;

preferably, when the output power P of the rear stage pump is lower than the first preset power P₁When, said b = 0;

preferably, when the working temperature t of the rear-stage pump is less than the second preset temperature t₂When, a =0.

11. The control method of the rear stage pump control system according to claim 9, characterized in that: the weights a, b and c satisfy that a is more than or equal to 0.05 and less than or equal to 0.4, b is more than or equal to 0.05 and less than or equal to 0.4, and c is more than or equal to 0.5;

preferably, the first preset temperature t₁Satisfies the following conditions: t is more than or equal to 55 DEG C₁≤90℃。

Technical Field

The present invention relates to vacuum systems, and more particularly to a post-stage pump control system and method for a vacuum system.

Background

In instruments such as a mass spectrometer, a chromatograph and the like, the required high vacuum environment can reach 10e-7mbar magnitude, and in order to achieve the vacuum degree, a front stage mechanical pump and a rear stage molecular pump are connected in series for realization; the vacuum degree in the vacuum chamber can not be continuously reduced due to limited pumping speed of the front-stage mechanical pump, the rear-stage molecular pump is restarted to pump the gas in the vacuum chamber at the moment, the pumping speed of the rear-stage molecular pump is far higher than that of the front-stage mechanical pump and is extremely high, so that the vacuum degree in the vacuum chamber can be continuously reduced to the required high vacuum degree, when the molecular pump is used, the molecular pump is easy to generate heat or output high power and the like due to overlarge resistance when the pressure difference between the two ends of the pumping opening and the exhaust opening of the molecular pump is overlarge, the high temperature and even breakdown of the molecular pump can be caused after long-term use, the stable work of a vacuum system is influenced, and the service life of the rear-stage molecular pump is greatly prolonged. Therefore, when the molecular pump operates, the mechanical pump needs to operate continuously to reduce the pressure difference between the two ends of the molecular pump, and the pumping speed ratio of the rear-stage molecular pump to the front-stage mechanical pump needs to be less than 300 in conventional use so as to ensure that the molecular pump can maintain stable operation. For this reason, in the daily selection, the following two combinations are often selected: 1. the combined mode has the advantages that the pumping speed is high as a whole, the required vacuum degree can be achieved quickly, but the pumping speed of the front stage mechanical pump is in direct proportion to the volume, so that the volume is large, extra power supply is needed, the integration is not facilitated, and the occupied area of the whole equipment is large; 2. the vacuum pump consists of a front stage mechanical pump with low pumping speed (such as the pumping speed of 0.28-0.45L/s) and a rear stage molecular pump with low pumping speed (such as the pumping speed of 60-85L/s), and is characterized in that the front stage mechanical pump has small volume and is favorable for integration, but because the whole pump with low pumping speed is adopted, the whole pumping speed is slow, and long time is needed to enable the vacuum degree in the vacuum chamber to reach a required value when the vacuum pump is used.

Due to the structural characteristics and the limitation of the pumping ratio of the molecular pump and the mechanical pump, when the combination of the vacuum pump is selected, the volume and the pumping speed are hardly taken into consideration, and the requirements of a user on high pumping speed, small volume and high integration are not met.

Disclosure of Invention

The invention aims to provide a rear-stage pump control system for a vacuum system, and the invention also aims to provide a control method of the rear-stage pump control system.

In order to achieve the purpose, the invention adopts the following technical scheme:

the invention relates to a rear-stage pump control system for a vacuum system, which comprises a vacuum chamber, a rear-stage pump, a front-stage pump, an electric control valve, a vacuum sensor and a control unit, wherein the vacuum chamber is provided with a vacuum chamber; the method is characterized in that: the exhaust port of the rear-stage pump is communicated with the exhaust port of the backing pump through the electric control valve; a signal input interface of the control unit is respectively connected with detection signal output interfaces of the vacuum sensor and a built-in temperature sensor of the rear-stage pump and is used for detecting the vacuum degree in the vacuum chamber and the working temperature of the rear-stage pump; the control signal output interface of the control unit is respectively connected with the control signal input interfaces of the controller of the backing pump, the controller of the backing pump and the controller of the electric control valve, and is used for controlling the pumping speed of the backing pump and the opening/closing of the backing pump and the electric control valve; the front-stage pump is a mechanical vacuum pump, and the rear-stage pump is a molecular vacuum pump.

The ratio of the rated pumping speed of the rear-stage pump to the rated pumping speed of the front-stage pump is more than 300; and a signal input interface of the control unit is connected with a detection signal output interface of a built-in temperature sensor of the backing pump and is used for detecting the working temperature of the backing pump.

The control method of the rear-stage pump control system comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, when the rear-stage pump is started, reading the working temperature t and the rotating speed n of the rear-stage pump in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when the working temperature t of the rear-stage pump is lower than the first preset temperature t₁And is higher than or equal to a second predetermined temperature t₂When the temperature is higher than the set temperature, the control unit controls the pumping speed of the rear-stage pump to be inversely proportional to the working temperature t;

when the working temperature t of the rear-stage pump is lower than a second preset temperature t₂When the pump is in use, the pumping speed of the back-stage pump is separated from the control of the working temperature of the back-stage pump; wherein, t₁＞t₂；

And 3, repeatedly and circularly operating the step 1 and the step 2 to realize the continuous and stable work of the back-stage pump and the vacuum system.

In step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed n of the rear-stage pump to increase to the maximum preset rotating speed n according to the working temperature t of the rear-stage pump_maxOr reduced to the minimum preset rotation speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed; when t = t₂When the rotation speed of the rear stage pump is controlled by the control unit to be less than or equal to the maximum preset rotation speed n_max(ii) a The first preset temperature t₁Satisfies the following conditions: t is more than or equal to 55 DEG C₁Not more than 90 ℃; preferably a first predetermined temperature t₁Satisfies the following conditions: t is not less than 75 DEG C₁Less than or equal to 85 ℃; the second preset temperature t₂Satisfies the following conditions: t is not less than 35 DEG C₂≤80℃。

The control method of the rear-stage pump control system comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, when the rear-stage pump is started, reading the working temperature t, the output power P and the rotating speed n of the rear-stage pump in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when t < t₁And the output power P of the back stage pump is greater than or equal to the first preset power P₁When the pump is started, the pumping speed of the rear-stage pump is controlled to be inversely proportional to the output power P;

when t < t₁And P < P₁When the pump is started, the pumping speed of the rear-stage pump is separated from the control of the output power;

and 3, repeatedly and circularly operating the step 1 and the step 2 to realize the continuous and stable work of the back-stage pump and the vacuum system.

In step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed of the rear-stage pump to increase to the maximum preset rotating speed n according to the output power P_maxOr reduced to a minimum preset speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed; the first preset power P₁Satisfies the following conditions: p is more than or equal to 100 watts₁300 watts or less, preferably the first preset power P₁Satisfies the following conditions: p is more than or equal to 120 watts₁Less than or equal to 200 watts; the first preset temperature t₁Satisfies the following conditions: t is more than or equal to 55 DEG C₁At 90 ℃ or lower, preferably a first predetermined temperature t₁Satisfies the following conditions: t is not less than 75 DEG C₁≤85℃。

The control method of the rear-stage pump control system comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, when the back-stage pump is started, reading the working temperature t of the back-stage pump and the vacuum degree in the vacuum chamber in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when t < t₁When the vacuum degree in the vacuum chamber is increased, the pumping speed of the rear-stage pump is controlled to be inversely proportional to the vacuum degree in the vacuum chamber;

and 3, circularly operating the step 1 and the step 2 to realize continuous and stable work of a rear-stage pump and a vacuum system.

In step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed of the rear-stage pump to increase to the maximum preset rotating speed n according to the vacuum degree of the vacuum chamber_maxOr reduced to a minimum preset speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed; the minimum preset rotation speed n_minSatisfies the following conditions: n is more than or equal to 300r/s_minLess than or equal to 800 r/s; the maximum preset rotation speed n_maxSatisfies the following conditions: n is more than or equal to 800r/s_max≤2000r/s。

The control method of the rear-stage pump control system comprises the following steps:

step 1, judging whether the backing pump is started or not, and starting the electric control valve and the backing pump only after the backing pump is started;

step 2, after the rear-stage pump is started, reading the working temperature t of the rear-stage pump, the output power P of the rear-stage pump and the vacuum degree in the vacuum chamber in real time;

when the working temperature t of the rear-stage pump is higher than or equal to the first preset temperature t₁When the pump is started, the rear-stage pump is closed;

when t < t₁When the vacuum pump is used, the control unit controls the pumping speed of the rear-stage pump to be in inverse proportion to the working temperature t, the output power P and the vacuum degree in the vacuum chamber respectively; when the working temperature t, the output power P and the vacuum degree in the vacuum chamber of the rear-stage pump conflict with the pumping speed control of the rear-stage pump, the pumping speed of the rear-stage pump is controlled by respectively adopting the weights a, b and c for the three parameters of the working temperature t, the output power P and the vacuum degree in the vacuum chamber;

a + b + c =1, a, b, c are all values greater than or equal to zero, and at least two of a, b, c are greater than zero;

and 3, circularly operating the step 1 and the step 2 to realize continuous and stable work of a rear-stage pump and a vacuum system.

In step 2, when t < t₁The control unit controls the rotating speed n of the rear stage pump to be at the minimum preset rotating speed n_minAnd a maximum preset rotation speed n_maxTo (c) to (d); when the control unit controls the rotating speed of the rear-stage pump to increase to the maximum preset rotating speed n according to the working temperature t, the output power P and the vacuum degree in the vacuum chamber of the rear-stage pump_maxOr reduced to a minimum preset speed n_minWhen the rotating speed is higher than the set rotating speed, the rear-stage pump is controlled to keep the current rotating speed; when the output power P of the post-stage pump is lower than the first preset power P₁When, said b = 0; when the working temperature t of the rear-stage pump is less than the second preset temperature t₂When, a =0.

The weights a, b and c satisfy that a is more than or equal to 0.05 and less than or equal to 0.4, b is more than or equal to 0.05 and less than or equal to 0.4, and c is more than or equal to 0.5; the first preset temperature t₁Satisfies the following conditions: t is more than or equal to 55 DEG C₁≤90℃。

According to the rear-stage pump control system for the vacuum system, the control unit is arranged, so that the opening and closing of the front-stage pump and the rear-stage pump can be conveniently controlled in real time, the rotating speed of the rear-stage pump can be adjusted, the vacuum sensor and the temperature sensor connected with the rear-stage pump are arranged, the vacuum degree of the vacuum chamber and the working temperature of the rear-stage pump can be timely measured, and the pumping speed of the rear-stage pump can be conveniently adjusted.

The control method of the rear-stage pump control system provided by the invention controls the operation of the rear-stage pump according to different working temperatures of the rear-stage pump by monitoring the working temperature of the rear-stage pump in real time. Or the output power of the rear-stage pump is monitored in real time, and the operation of the rear-stage pump is controlled according to different output powers of the rear-stage pump. Or the temperature of the back-stage pump and the vacuum degree of the vacuum chamber are monitored in real time, and the back-stage pump is controlled to operate according to different vacuum degrees in the vacuum chamber. Or the vacuum degree of the vacuum chamber is combined with the working temperature and the output power of the rear-stage pump by a certain weight, the pumping speed of the rear-stage pump with large pumping speed is controlled and adjusted, and the pumping speed is controlled by a unitary or multivariate identification method, so that the problem of heating of the rear-stage pump when the pumping speed ratio of the rear-stage pump and the backing-stage pump is more than 300 is solved, the service life and the working stability of the backing-stage pump are ensured, and simultaneously, the power consumption is reduced, so that the whole vacuum system can take the advantages of small volume and high pumping speed into account, the integration of the whole vacuum system is facilitated, the floor area of equipment is greatly reduced, and the backing-stage pump can be integrated in an instrument in which the vacuum chamber is positioned due to the greatly reduced volume of the backing-stage pump, the noise and the power consumption are reduced, an external power supply is; the forepump is integrated in the instrument, so that compared with an external mode of the forepump, the gas circuit structure is simplified, and the forepump and the rear pump are relatively fixed, so that the risk of gas leakage is reduced; the design of integrating can make instrument area reduce one fifth, has optimized user experience greatly, integrates to the high efficiency of vacuum pumping system and has important meaning.

Drawings

Fig. 1 is a schematic structural diagram of a rear-stage pump control system according to embodiment 1 of the present invention.

Fig. 2 is a flowchart of a control method of the rear pump control system according to embodiment 1.

Fig. 3 is a flowchart of a control method of the rear pump control system according to embodiment 2 of the present invention.

Fig. 4 is a flowchart of a control method of the rear pump control system according to embodiment 3 of the present invention.

Fig. 5 is a flowchart of a control method of the rear pump control system according to embodiment 4 of the present invention.

Fig. 6 is a schematic structural diagram of a post-stage pump control system in example 5 of the present invention, which is based on vacuum pumping of a vacuum chamber of a mass spectrometer.

Detailed Description

The following describes embodiments of the present invention in detail with reference to the drawings, which are implemented on the premise of the technical solution of the present invention, and detailed embodiments and specific operation procedures are provided, but the scope of the present invention is not limited to the following embodiments.