阅读说明：本技术 一种超薄均热板超亲水微纳米结构吸液芯及制备方法 (Ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorption core and preparation method thereof ) 是由 不公告发明人 于 2020-07-31 设计创作，主要内容包括：本发明公开了一种超薄均热板超亲水微纳米结构吸液芯,包括吸液芯和均热板盖板,所述吸液芯直接制备于所述均热板盖板上；所述吸液芯由周期分布的微米列阵以及其四周通道构成；所述微米列阵表面以及其四周所述通道表面均密集分布有纳米级亚结构,三者构成含有丰富微空腔的微纳米全覆盖结构；所述微纳米全覆盖结构的表面设有高表面能氧化物涂层。相比于现有吸液芯的喷粉烧结和紫铜丝网吸液芯的传统制备方法,激光方法制备吸液芯工艺步骤少、流程短、效率高,结构一致性好,稳定性高,综合性能好,能达到最低的热管厚度和最优的散热效果。(The invention discloses an ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorption core, which comprises a liquid absorption core and a vapor chamber cover plate, wherein the liquid absorption core is directly prepared on the vapor chamber cover plate; the liquid absorption core is composed of a periodically distributed micro array and a peripheral channel thereof; nanometer-scale substructures are densely distributed on the surface of the micro array and the surfaces of the channels around the surface of the micro array, and the three structures form a micro-nano full-coverage structure with abundant micro cavities; and the surface of the micro-nano full-coverage structure is provided with a high-surface-energy oxide coating. Compared with the traditional preparation method of powder spraying sintering of the liquid absorption core and the red copper wire mesh liquid absorption core, the liquid absorption core preparation method by the laser method has the advantages of few process steps, short flow, high efficiency, good structural consistency, high stability and good comprehensive performance, and can achieve the lowest heat pipe thickness and the optimal heat dissipation effect.)

1. The ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorption core is characterized by comprising a liquid absorption core (1) and a vapor chamber cover plate, wherein the liquid absorption core is directly prepared on the vapor chamber cover plate;

the liquid absorption core (1) is composed of a periodically distributed micro-array and a peripheral channel (11) thereof; nanometer-scale substructures (12) are densely distributed on the surfaces of the micro array and the surfaces of the channels (11) around the micro array, and form a micro-nano full-coverage structure containing abundant micro cavities; and the surface of the micro-nano full-coverage structure is provided with a high-surface-energy oxide coating.

2. The ultra-thin vapor chamber ultra-hydrophilic micro-nanostructured wick according to claim 1, characterized in that the micro-array is an array of a plurality of micro-cones (13); and the pitch of each micrometer cone (13) is 1-300 micrometers; each micrometer cone (13) has a diameter of 1-200 micrometers; the pitch of each micrometer cone (13) is 5-45 degrees; the height of each micrometer cone (13) is 10-70% of the thickness of the soaking plate cover plate;

or, the microarray is an array of a plurality of micrometer rectangles (14); and the distance between every two adjacent micrometer rectangular blocks (14) is 10-500 micrometers; the aspect ratio of each of the micro-rectangular blocks (14) is 1: 1-1: 10; the inclination of the periphery of each micrometer rectangular block (14) is 5-45 degrees; the height of each micron rectangular block (14) is 10-70% of the thickness of the soaking plate cover plate.

3. The ultra-thin vapor chamber ultra-hydrophilic micro-nanostructured wick according to claim 1, characterized in that the nano-scale sub-structures (12) have dimensions of 1-1000 nm; and the nanoscale substructures (12) are corrugated or granular.

4. The ultra-thin soaking plate ultra-hydrophilic micro-nano structure liquid absorbing core according to claim 1, wherein the thickness of the oxide coating is less than 5 nm; and the material of the oxide coating is SiO2 and/or TiO 2.

5. The ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorbing core according to claim 1, wherein the liquid absorbing core (1) can be in one or more combined shapes of square, rectangle, cross, T-shaped, L-shaped, I-shaped, triangle, strip, circle and radiation.

6. The ultra-thin vapor chamber ultra-hydrophilic micro-nanostructured wick according to claim 1, wherein the vapor chamber cover plate is made of one or more of red copper, copper alloy, aluminum alloy and stainless steel.

7. The method for preparing the ultra-hydrophilic micro-nano structure liquid absorbing core of the ultra-thin soaking plate according to claim 1, which is characterized by comprising the following steps:

1) carrying out pretreatment such as cutting and cleaning on the soaking plate cover plate, wherein the thickness of the soaking plate cover plate can be 0.2-1 mm, and the typical thickness can be 0.2-0.4 mm;

2) according to the shape requirement of the soaking plate cover plate on the liquid absorption core (1) area, the scanning area of the ultrafast laser is made into various shapes such as a square, a rectangle, a cross, a T shape, an L shape, an I shape, a triangle, a strip, a circle, a radiation shape and the combination thereof, and the preparation work is carried out in the shape area;

3) focusing ultrafast laser on the surface of the liquid absorption core (1), optimizing the average power, single pulse energy, repetition frequency, focal spot size, scanning speed, action time, scanning times and process parameters of a scanning path of the ultrafast laser, the fluence of the light beam in the laser action area is higher than the ablation threshold of the cover plate material of the soaking plate, the array formed by a plurality of periodically distributed micron cones (13)/a plurality of micron rectangular blocks (14) and the surrounding channels (11) are removed by vaporization of the material generated by an ablation mechanism, simultaneously forming nano-corrugated/nano-granular nano-sub-structures (12) on the surfaces of a plurality of micro-cones (13), a plurality of micro-rectangles (14) and the surfaces of the channels (11) at the periphery based on an ablation and induction mechanism of ultrafast laser;

4) carrying out high surface energy treatment on the surface of the micro-nano substructure (12) to form a super-hydrophilic micro-nano structure liquid absorption core;

5) and sequentially carrying out ultrasonic cleaning, blowing and drying on the prepared super-hydrophilic micro-nano structure liquid absorption core, and then carrying out vacuum packaging to obtain the super-hydrophilic micro-nano structure liquid absorption core product.

8. The method for preparing the ultra-thin soaking plate ultra-hydrophilic micro-nano structure liquid absorbing core according to claim 7, wherein the high surface energy treatment in the step 4) is soaking, spraying, evaporating and sputtering SiO2/TiO2 to form an oxide coating so as to achieve ultra-hydrophilic property; and the thickness of the oxide coating is less than 5 nanometers.

9. The method for preparing the ultra-thin soaking plate ultra-hydrophilic micro-nano structure liquid absorbing core according to claim 7, wherein the wavelength of the ultra-fast laser can be near infrared light, green light or ultraviolet light; the repetition frequency of the ultrafast laser is 10KHz-10000KHz, the average power is 1-500W, the scanning speed is 10-10000mm/s, the size of a focal spot is 1-300 microns, and the scanning times are single or multiple times.

10. The method for preparing the ultra-thin soaking plate ultra-hydrophilic micro-nano structure liquid absorbing core according to claim 9, wherein the ultra-fast laser is a picosecond laser or a femtosecond laser, the pulse width of the picosecond laser is 1-1000 picoseconds, and the pulse of the femtosecond laser is 50-1000 femtoseconds.

Technical Field

The invention relates to a liquid absorption core for various ultrathin heat pipes and vapor chambers, in particular to a high-performance liquid absorption core based on an ultra-hydrophilic micro-nano structure, and belongs to the technical field of heat pipes.

Background

With the rapid development of microelectronic technology and electronic information industry, various electronic devices and devices, especially ultra-thin mobile devices represented by smart phones and tablet computers, are continuously developing towards high performance, integration, miniaturization and lightness and thinness, and higher chip heat flux density, smaller heat dissipation space and more difficult heat dissipation conditions provide higher requirements for the heat dissipation capability and further miniaturization of heat dissipation devices, and the heat dissipation problem of high heat flux density becomes one of the key limiting factors for restricting the further development of electronic devices.

Soaking plate (VC) and heat pipe (for convenience, the soaking plate all contains the heat pipe, this patent hereinafter the soaking plate also all contains the heat pipe) are as a high-efficient two-phase heat transfer device based on boiling phase transition heat transfer, because of its excellent thermal conductivity, good isothermal and reliability, widely use in electron devices such as smart mobile phone, notebook computer. With the increasing lightness and thinness of electronic devices, ultra-thin heat pipes are becoming effective means and preferred solutions for heat dissipation in narrow spaces. The ultrathin heat pipe generally comprises a pipe body, a sealing head, a liquid absorption core and a working medium, and the main structure of the ultrathin heat pipe comprises an evaporation section, a heat insulation section, a condensation section and a sealing shell. The liquid water in the evaporation section absorbs heat generated by the chip during working and is evaporated into steam, the steam is transmitted to the condensation section through the steam channel of the heat insulation section in a gas phase mode, the steam is reduced to the liquid water through heat release of the condensation section, and then the steam flows back to the evaporation section to continuously circulate back and forth, so that the heat of the chip is rapidly dissipated. The heat transfer performance, heat transfer efficiency, and heat transfer limit of a heat pipe are primarily dependent on the capillary pressure provided by the wick and the rate of osmotic return of the liquid within the wick. The traditional liquid absorption cores mainly comprise a wire mesh liquid absorption core, a powder/fiber sintered liquid absorption core, a groove liquid absorption core, a composite liquid absorption core and the like. The thickness of the required wick of the ultrathin heat pipe is also continuously reduced, so that the interfacial shearing force caused by high-speed gas-liquid convection inside the ultrathin heat pipe is increased, and the heat transfer capacity is reduced. There are two main development directions at present: firstly, the traditional liquid absorption core is optimized to meet the requirements of the ultrathin heat pipe, such as a sintered copper mesh core prepared by chemical deposition and sintering, or a composite liquid absorption core structure integrating a mesh, a groove and powder by sintering, the method improves the complexity and the cost of the manufacturing process of the ultrathin heat pipe, and is difficult to further reduce the thickness. The second method is to prepare the liquid absorption structure on the inner wall of the ultrathin heat pipe by adopting etching methods such as reactive ion etching, electric spark machining, electrolytic machining, surface coating and the like, and the methods have the disadvantages of complex process, high manufacturing cost and environmental friendliness. In recent years, laser processing is more active, such as carving transversely and longitudinally staggered fine grooves on the wall of a heat pipe by nanosecond laser, mutually and alternately distributing and scanning super-hydrophobic and super-hydrophilic structures of continuous capillary with a hairy morphology in a groove surface of an aluminum substrate by nanosecond laser, processing pin fin and groove structures on a copper plate by laser, preparing a slope groove capillary structure by nanosecond laser, a micro-groove structure with unequal width, a composite groove structure with high depth and width and the like.

The liquid absorption cores prepared by the various methods can be used for heat pipes with common thickness, when the thickness of the heat pipe is less than 0.4mm, the capillary performance is remarkably reduced, the water resistance and the air resistance are remarkably improved, the heat transfer efficiency is rapidly reduced, and the common liquid absorption cores are difficult to meet the requirements.

Therefore, how to provide an ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorption core with better performance and a preparation method thereof are one of the technical problems to be solved urgently in the field.

Disclosure of Invention

In view of the above, the invention provides an ultra-hydrophilic micro-nano structure liquid absorption core of an ultra-thin vapor chamber and a preparation method thereof, so as to solve the preparation problem of the liquid absorption core with high capillary force and high permeability of the ultra-thin vapor chamber.

In order to solve the technical problems, the invention adopts the following technical scheme:

an ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorption core comprises a liquid absorption core and a vapor chamber cover plate, wherein the liquid absorption core is directly prepared on the vapor chamber cover plate;

the liquid absorption core is composed of a periodically distributed micro array and a peripheral channel thereof; nanometer-scale substructures are densely distributed on the surface of the micro array and the surfaces of the channels around the surface of the micro array, and the three structures form a micro-nano full-coverage structure with abundant micro cavities; and the surface of the micro-nano full-coverage structure is provided with a high-surface-energy oxide coating.

Preferably, the micro-array is an array of a plurality of micro-cones; and the pitch of each micrometer cone is 1-300 micrometers; each of the microcones has a diameter of 1-200 microns; the inclination of each micrometer cone is 5-45 degrees; the height of each micrometer cone is 10-70% of the thickness of the soaking plate cover plate;

or the micro array is an array formed by a plurality of micro rectangular blocks; and the distance between every two adjacent micrometer rectangular blocks is 10-500 micrometers; the aspect ratio of each of the micrometer rectangular blocks is 1: 1-1: 10; the inclination of the periphery of each micrometer rectangular block is 5-45 degrees; the height of each micron rectangular block is 10-70% of the thickness of the soaking plate cover plate.

Preferably, the nanoscale substructures have dimensions of 1-1000 nanometers; and the nano-scale substructure is corrugated or granular.

Preferably, the oxide coating has a thickness of less than 5 nanometers; and the material of the oxide coating is SiO2 and/or TiO 2.

Preferably, the wick may be in the shape of one or more combinations of square, rectangle, cross, triangle, strip, circle and radial.

Preferably, the material of the soaking plate cover plate is one or more of red copper, copper alloy, aluminum alloy and stainless steel.

The invention also provides a preparation method of the ultra-hydrophilic micro-nano structure liquid absorption core of the ultra-thin vapor chamber, which comprises the following steps:

1) carrying out pretreatment such as cutting and cleaning on the soaking plate cover plate, wherein the thickness of the soaking plate cover plate can be 0.2-1 mm, and the typical thickness can be 0.2-0.4 mm;

2) according to the shape requirement of the soaking plate cover plate on the liquid absorption core area, the scanning area of the ultrafast laser is made into various shapes such as a square, a rectangle, a cross, a T shape, an L shape, an I shape, a triangle, a strip, a circle, a radiation shape and the combination thereof, and the preparation work is carried out in the shape area;

3) focusing ultrafast laser on the surface of the liquid absorbing core, optimizing the average power, single pulse energy, repetition frequency, focal spot size, scanning speed, action time, scanning times and process parameters of a scanning path of the ultrafast laser, enabling the energy flux density of a light beam in a laser action area to be higher than an ablation threshold value of a cover plate material of the soaking plate, removing an array formed by a plurality of periodically distributed micro cones/a plurality of micro rectangular blocks and surrounding channels by vaporization of a material generated based on an ablation mechanism, and forming nano-corrugated/nano-granular nano-substructures on the surfaces of the micro cones/the plurality of micro rectangular blocks and the surfaces of the surrounding channels based on the ablation and induction mechanism of the ultrafast laser;

4) carrying out high surface energy treatment on the surface of the micro-nano substructure to form a super-hydrophilic micro-nano structure liquid absorption core;

5) and sequentially carrying out ultrasonic cleaning, blowing and drying on the prepared super-hydrophilic micro-nano structure liquid absorption core, and then carrying out vacuum packaging to obtain the super-hydrophilic micro-nano structure liquid absorption core product.

Preferably, the high surface energy treatment in the step 4) is soaking, spraying, evaporating and sputtering SiO2/TiO2 to form an oxide coating, so that the super-hydrophilic characteristic is achieved, and the capillary force and the permeability are strong; and the thickness of the oxide coating is less than 5 nanometers.

Preferably, the wavelength of the ultrafast laser can be near infrared light, green light or ultraviolet light; the repetition frequency of the ultrafast laser is 10KHz-10000KHz, the average power is 1-500W, the scanning speed is 10-10000mm/s, the size of a focal spot is 1-300 microns, and the scanning times are single or multiple times.

Preferably, the ultrafast laser is a picosecond laser or a femtosecond laser, the pulse width of the picosecond laser is 1-1000 picoseconds, and the pulse of the femtosecond laser is 50-1000 femtoseconds.

Compared with the prior art, the invention has the following technical effects:

(1) the invention focuses on the 0.2-0.4mm ultrathin heat pipe, and as is known, when the thickness of the heat pipe is reduced to be below 0.4, the capillary performance of the liquid absorption core is remarkably reduced, the water resistance and the air resistance are remarkably improved, and the heat transfer efficiency is rapidly reduced. The super-hydrophilic micro-nano structure liquid absorption core prepared by the invention has the advantages that the nano-scale ripple or particle substructure is densely distributed on the surfaces of the periodically distributed micro cone array and the micro rectangular array or the surfaces of the peripheral channels, and the array, the channels and the micro-nano structure with abundant micro-cavities on the surface form strong capillary force, so that the liquid absorption capacity of the liquid absorption core is obviously improved;

(2) the micron-scale cone array and the rectangular array, together with the rich nano-substructure on the surfaces of the micron-scale cone array and the rectangular array and the nano-structure on the surfaces of the channels, form excellent super-hydrophilic characteristics, and can remarkably improve the evaporation capacity based on a high-temperature bubble nucleation evaporation heat dissipation mechanism on the super-hydrophilic surface in an evaporation section. Research shows that when the temperature is higher than 100 ℃ for high-temperature evaporation, the super-hydrophilic surface can continuously generate a large amount of bubbles to quickly separate from the surface, so that the heat dissipation is improved, and other surfaces can form a water film to cover the high-temperature surface to block the heat flow dissipation. Under the same temperature, the heat dissipation heat flux of the super-hydrophilic surface is improved by dozens of times compared with that of the hydrophobic surface or the super-hydrophobic surface;

(3) the periphery of the periodically distributed micron cone array and micron rectangular array is provided with a four-way and eight-way channel, which is beneficial to balancing the liquid absorption capacity of each direction by the liquid absorption core, ensures the heat dissipation capacity of each direction and avoids the insufficient directional liquid absorption of the pure groove-shaped liquid absorption core;

(4) the smooth liquid channel and steam channel are formed by the channel between the micrometer cone and the micrometer rectangular block which are communicated with each other in the four directions and in the eight directions, so that the reduction of water resistance and air resistance is facilitated, and the comprehensive performance is improved;

(5) the periodically distributed micron conical array and micron rectangular array form powerful support for the liquid channel and the gas channel, so that the collapse phenomenon of the cover plate of the vapor chamber under pressure is avoided, and the long-term stable work of the liquid absorption core and the vapor chamber is ensured;

(6) the liquid absorption core is directly prepared on the vapor chamber cover plate, the thickness is not increased, and the realization of an ultrathin vapor chamber with the thickness of 0.2-0.4mm is facilitated;

(7) the invention discloses a liquid absorbing core, which is characterized in that a micro cone array, a micro rectangular array, a liquid channel and a rich micro-cavity substructure on the surface are periodically distributed in the liquid absorbing core and are prepared by high-power picosecond laser or femtosecond laser, conical, rectangular and channel micro structures are formed by a laser ablation mechanism, and simultaneously, a plurality of nano structures are formed by an ablation induction mechanism under an optimized process, so that the liquid absorbing core is a multifunctional preparation method; meanwhile, the laser beam can control the scanning galvanometer through computer programming, and the liquid absorption core patterns with almost any shapes, such as square, rectangle, T-shaped, L-shaped, I-shaped, triangle, strip, circle, radiation and other shapes and combinations thereof, can be prepared in one step, so that the heat dissipation requirements of various soaking plates are met, and the method is a flexible and efficient preparation method. In addition, by controlling the technological parameters such as energy flux density, scanning speed and the like of the ultrafast laser beam, the depth of the micro-nano structure, namely the depth of the liquid channel and the steam channel, can be accurately controlled, so that the steam cavity structure, the liquid cavity structure and the volume distribution in the heat pipe can be regulated, controlled and optimized, and the good capillary water absorption performance, the low water resistance and the low thermal resistance of the heat pipe are ensured. The laser preparation process has stable process, high repeatability and high yield, and is a practical and reliable preparation method. The method is an efficient and cost-controllable preparation method by adopting laser to prepare the liquid absorption core micro-nano structure in one step by improving the laser power and adopting various measures to improve the processing speed. Compared with the traditional preparation method of powder spraying sintering of the liquid absorption core and the red copper wire mesh liquid absorption core, the liquid absorption core preparation method by the laser method has the advantages of few process steps, short flow, high efficiency, good structural consistency, high stability and good comprehensive performance, and can achieve the lowest heat pipe thickness and the optimal heat dissipation effect.

Drawings

FIG. 1 is a schematic diagram of a liquid absorbing core periodically distributed micro-cone array and nano-substructure and peripheral channels of an ultra-hydrophilic micro-nano structure liquid absorbing core of an ultra-thin vapor chamber;

FIG. 2 is a schematic diagram of a liquid absorption core periodically distributed micro-rectangular array and nano-substructure and peripheral channels of the ultra-hydrophilic micro-nano structure liquid absorption core of the ultra-thin vapor chamber;

FIG. 3 is a result of measuring a contact angle between a water drop and a copper alloy L-shaped ultra-hydrophilic micro-nano structure liquid absorption core physical photograph of the ultra-hydrophilic micro-nano structure liquid absorption core of the ultra-thin vapor chamber;

FIG. 4 is a result of measuring a contact angle between an aluminum alloy T-shaped ultra-hydrophilic micro-nano structure liquid absorption core physical photograph and a water drop of the ultra-hydrophilic micro-nano structure liquid absorption core of the ultra-thin vapor chamber;

FIG. 5 shows the result of contact angle treatment between a physical photograph of a stainless steel I-shaped super-hydrophilic micro-nano structure liquid absorption core of the ultrathin soaking plate and a water drop;

in the figure: 1. a wick; 11. a channel; 12. a nanoscale substructure; 13. a micrometer cone; 14. micron rectangular blocks.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

An ultra-thin vapor chamber ultra-hydrophilic micro-nano structure liquid absorption core comprises a liquid absorption core 1 and a vapor chamber cover plate, wherein the liquid absorption core is directly prepared on the vapor chamber cover plate; the liquid absorption core 1 is composed of a periodically distributed micro-array and a peripheral channel 11 thereof; the surfaces of the micro array and the channels 11 around the micro array are densely distributed with nano-scale substructures 12, and the three structures form a micro-nano full-coverage structure; and an oxide coating is arranged on the surface of the micro-nano full-coverage structure. The nanoscale sub-structures 12 have dimensions of 1-1000 nanometers; and the nano-scale sub-structures 12 are corrugated or granular. The thickness of the oxide coating is less than 5 nanometers; and the material of the oxide coating is SiO₂And/or TiO₂。

The micro-array is an array formed by a plurality of micro cones 13; and the distance between every two micron cones 13 is 1-300 microns; each of the micro cones 13 has a diameter of 1 to 200 micrometers; the inclination of each micrometer cone 13 is 5-45 degrees; the height of each micrometer cone 13 is 10-70% of the thickness of the soaking plate cover plate;

or, the micro-array is an array formed by a plurality of micro-rectangular blocks 14; and the distance between every two adjacent micrometer rectangular blocks 14 is 10-500 micrometers; the aspect ratio of each of the micro-rectangles 14 is 1: 1-1: 10; the inclination of the periphery of each micrometer rectangular block 14 is 5-45 degrees; the height of each micron rectangular block 14 is 10-70% of the thickness of the soaking plate cover plate.