阅读说明：本技术 玻璃转接板深孔侧壁附着层真空旋涂装置 (Vacuum spin coating device for deep hole side wall adhesion layer of glass adapter plate ) 是由 方针 陈宏伟 高莉彬 张继华 陈雨哲 曲胜 邹思月 王文君 蔡星周 穆俊宏 于 2020-07-09 设计创作，主要内容包括：本发明提供了一种玻璃转接板深孔侧壁附着层真空旋涂装置,包括供料传输机构、真空旋涂罐、滴液机构及出料传输机构,真空旋涂罐包括机架、固定罐体、活动筒体、旋涂电机和转盘,活动筒体套在固定罐体的上部,活动筒体连接有第一升降机构；旋涂电机连接有转轴,转轴伸入活动筒体内,转盘固定设置在转轴上；转盘上设置有n个上料槽；活动筒体上方设置有密封端盖,密封端盖连接有第二升降机构；密封端盖的下表面设置有n个压料机构,每个压料机构位于一上料槽的上方；固定罐体连接有抽真空泵；滴液机构包括储液罐、出液管、滴液头,滴液头安装在第一水平移动机构。本装置能够实现全自动化地真空旋涂过程,生产效率高,有利于实现规模化、批量化生产。(The invention provides a vacuum spin coating device for a deep hole side wall adhesion layer of a glass adapter plate, which comprises a feeding transmission mechanism, a vacuum spin coating tank, a liquid dropping mechanism and a discharging transmission mechanism, wherein the vacuum spin coating tank comprises a rack, a fixed tank body, a movable cylinder body, a spin coating motor and a turntable; the spin coating motor is connected with a rotating shaft, the rotating shaft extends into the movable cylinder, and the rotating disc is fixedly arranged on the rotating shaft; n feeding troughs are arranged on the rotary table; a sealing end cover is arranged above the movable cylinder body and connected with a second lifting mechanism; n material pressing mechanisms are arranged on the lower surface of the sealing end cover, and each material pressing mechanism is positioned above a feeding groove; the fixed tank body is connected with a vacuum pump; the dropping mechanism comprises a liquid storage tank, a liquid outlet pipe and a dropping head, and the dropping head is arranged on the first horizontal moving mechanism. The device can realize the full-automatic vacuum spin coating process, has high production efficiency, and is favorable for realizing large-scale and batch production.)

1. Glass keysets deep hole lateral wall adhesion layer vacuum spin coating device, its characterized in that: comprises a feeding transmission mechanism (100), a vacuum spin coating tank (200), a dripping mechanism (300) and a discharging transmission mechanism (400);

the vacuum spin-coating tank (200) comprises a rack (1), a fixed tank body (2), a movable cylinder body (3), a spin-coating motor (4) and a rotary table (5), wherein the fixed tank body (2) and the spin-coating motor (4) are fixed on the rack (1), the movable cylinder body (3) is sleeved on the upper part of the fixed tank body (2), a sealing piston (6) is arranged between the movable cylinder body (3) and the fixed tank body (2), and the movable cylinder body (3) is connected with a first lifting mechanism (7); the spin-coating motor (4) is connected with a vertical rotating shaft (8), the rotating shaft (8) penetrates through the bottom of the fixed tank body (2) and extends into the movable cylinder body (3), and the rotary disc (5) is fixedly arranged on the rotating shaft (8); n feeding troughs (9) which radially extend to the edge of the rotary table (5) are arranged on the rotary table (5); a sealing end cover (10) used for sealing the upper port of the movable cylinder (3) is arranged above the movable cylinder (3), and the sealing end cover (10) is connected with a second lifting mechanism (11); the lower surface of the sealing end cover (10) is provided with a vertical positioning shaft (17), a rotatable sleeve (18) is arranged outside the positioning shaft (17), the outer wall of the sleeve (18) is provided with n material pressing mechanisms, and each material pressing mechanism is positioned above a feeding groove (9); the fixed tank body (2) is connected with a vacuum pump (12), and the side wall of the fixed tank body (2) is provided with a vacuum pressure gauge (13);

the liquid dropping mechanism (300) comprises a liquid storage tank (14), the liquid storage tank (14) is connected with a liquid outlet pipe (15), a liquid dropping pump (27) is arranged on the liquid outlet pipe (15), a liquid dropping head (16) is arranged at the end part of the liquid outlet pipe (15), and the liquid dropping head (16) is installed on a first horizontal moving mechanism (26);

feed conveying mechanism (100), liquid dropper (16) and ejection of compact conveying mechanism (400) set up around activity barrel (3), n is more than or equal to 3's integer, and when silo (9) were located and connect the material station in every of carousel (5), there were two in addition last silo (9) that are located dropping liquid station and ejection of compact station respectively.

2. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the feeding conveying mechanism (100) and the discharging conveying mechanism (400) respectively comprise a conveying belt (19), a material receiving plate (20) and a sucking disc (21), the material receiving plate (20) is horizontally arranged at one end, close to the vacuum spin coating tank (200), of the conveying belt (19), a material conveying groove which radially extends to the edge of the material receiving plate (20) along a rotary disc (5) is formed in the material receiving plate (20), the sucking disc (21) is located in the material conveying groove, the sucking disc (21) is installed on a second horizontal moving mechanism (22), and the second horizontal moving mechanism (22) is installed on a third lifting mechanism (23); the sucking disc (21) is connected with an air suction pump (25) through an air pipe.

3. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 2, wherein: the third lifting mechanism (23) is a first hydraulic cylinder with a pair of piston rods facing upwards, a mounting plate (24) is arranged at the top of the first hydraulic cylinder, the second horizontal moving mechanism (22) is a second hydraulic cylinder, and the axial direction of the second hydraulic cylinder is the radial direction of the rotary table (5).

4. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the first lifting mechanism (7) comprises a plurality of vertical third hydraulic cylinders.

5. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the first horizontal moving mechanism (26) is a fourth hydraulic cylinder which is horizontally arranged.

6. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: when a certain feeding groove (9) of the rotary disc (5) is positioned at the material receiving station, another feeding groove (9) adjacent to the feeding groove (9) is positioned at the material discharging station.

7. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the dripper (16) is arranged vertically or obliquely.

8. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 1, wherein: the material pressing mechanism comprises a vertical first connecting rod and an inclined second connecting rod, the top of the second connecting rod is fixedly connected with the sleeve (18), the bottom of the second connecting rod is fixedly connected with the upper end of the first connecting rod, and an annular pressing plate (28) is arranged at the lower end of the first connecting rod.

9. The vacuum spin coating apparatus for deep hole sidewall adhesion layer of glass interposer of claim 8, wherein: a positioning groove (29) is arranged on the rotary table (5) below each annular pressure plate (28).

Technical Field

The invention relates to the field of glass adapter plate processing equipment, in particular to a vacuum spin coating device for a deep hole side wall adhesion layer of a glass adapter plate.

Background

3D packaging is currently the most mature category of integration in the industry, stacking bare chips or individually packaged chips together primarily by packaging, and currently involves many different technologies, most of which are extensions of the existing single chip packaging technologies in three dimensions. Interposer (Interposer), also known as Interposer or Interposer, is a new type of electronic substrate that enables interconnection between fine-pitch I/O at the top die level and larger-size, large-pitch I/O at the bottom package level. The glass adapter plate is a novel adapter plate, a plurality of glass blind holes are formed in the glass adapter plate, the glass blind holes (TGVs) penetrate through a glass substrate to extend and be interconnected, vertical integration is achieved, meanwhile, the interconnection length is shortened, and therefore the size, the weight and the power consumption are reduced, and the glass adapter plate is the foundation and the core of the existing 2.5D/3D integration technology.

At present, extensive research has been carried out by various large enterprises, universities or research institutions aiming at various aspects of the TGV, and the intensive research is mainly focused on the TGV manufacturing process, the TGV-related electrical and thermal-mechanical reliability analysis and the proximity effect of the TGV and a CMOS device so as to control the cost of the TGV and improve the yield and the output. Copper TGV has gained the most widespread use and attention for its excellent electrical properties, fast fill rate and excellent process compatibility, and its typical fabrication process flow comprises the following steps: (a) etching a deep hole on a glass substrate; (b) depositing an adhesion layer on the side wall of the deep hole; (c) depositing a copper barrier layer/copper seed layer on the side wall; (d) electroplating and filling copper in the deep hole; (e) surface CMP and RDL wiring fabrication. With the commercial application of the 2.5D/3D integration technology becoming mature, the integration density of the device is higher, the integration number of the TGV is higher, the size is smaller, and the aspect ratio is higher. The size, especially the diameter, of the TGV greatly affects the electrical and mechanical reliability of the 3D interconnect and stack, and the smaller the diameter of the TGV, the shorter the delay, the less stress from the copper bump, and the smaller the corresponding KOZ (Keep-out zone). Currently, challenges with TGV processing include: deposition of an adhesion layer on the side wall of the ultra-small diameter blind hole, deposition of a uniform copper barrier layer/copper seed layer on the side wall of the ultra-small diameter blind hole and TGV research with excellent high-frequency transmission performance.

In order to solve the problem of high deposition difficulty of an adhesion layer on the side wall of a blind hole with an ultra-small diameter, the applicant develops a vacuum standing spin coating process, namely, a glass substrate is fixed on a turntable, a high polymer solution is dripped on the surface of the glass, the surface of the glass substrate is ensured to be covered by the high polymer solution, the turntable and the glass substrate are integrally transferred to an environment with the pressure lower than the atmospheric pressure, standing is carried out, the deep hole is filled with the high polymer solution, then the turntable is controlled to rotate, the redundant high polymer solution is thrown away, and the high polymer solution remained on the inner wall of the blind hole and the surface of the.

In the testing stage, the above process can be performed manually, but if mass production is to be realized, the efficiency of manual operation is obviously too low, which is not favorable for improving the production efficiency.

Disclosure of Invention

The invention aims to solve the technical problem of providing a vacuum spin coating device for a deep hole side wall adhesion layer of a glass adapter plate, which is operated automatically, improves the production efficiency and is beneficial to realizing batch and large-scale production.

The technical scheme adopted by the invention for solving the technical problems is as follows: the vacuum spin coating device for the deep hole side wall adhesion layer of the glass adapter plate comprises a feeding transmission mechanism, a vacuum spin coating tank, a liquid dropping mechanism and a discharging transmission mechanism;

the vacuum spin-coating tank comprises a rack, a fixed tank body, a movable cylinder body, a spin-coating motor and a rotary table, wherein the fixed tank body and the spin-coating motor are fixed on the rack; the spin-coating motor is connected with a vertical rotating shaft, the rotating shaft penetrates through the bottom of the fixed tank body and extends into the movable tank body, and the rotary table is fixedly arranged on the rotating shaft; n feeding grooves radially extending to the edge of the rotary table are arranged on the rotary table; a sealing end cover used for sealing the upper port of the movable cylinder body is arranged above the movable cylinder body, and the sealing end cover is connected with a second lifting mechanism; the lower surface of the sealing end cover is provided with a vertical positioning shaft, a rotatable sleeve is arranged outside the positioning shaft, the outer wall of the sleeve is provided with n material pressing mechanisms, and each material pressing mechanism is positioned above a material feeding groove; the fixed tank body is connected with a vacuum pump, and the side wall of the fixed tank body is provided with a vacuum pressure gauge;

the liquid dropping mechanism comprises a liquid storage tank, the liquid storage tank is connected with a liquid outlet pipe, a liquid dropping pump is arranged on the liquid outlet pipe, a liquid dropping head is arranged at the end part of the liquid outlet pipe, and the liquid dropping head is arranged on a first horizontal moving mechanism;

feed transmission device, liquid dropper and ejection of compact transmission device set up around the activity barrel, n is more than or equal to 3's integer, and every of carousel is gone up the silo and is located when connecing the material station, has two other last silos that are located dropping liquid station and ejection of compact station respectively.

Further, feed conveying mechanism and ejection of compact conveying mechanism all include the conveyer belt, connect flitch and sucking disc, connect the flitch level to set up the one end that is close to vacuum spin coating jar at the conveyer belt, and connect to be provided with on the flitch along the carousel radially to extend to the defeated silo that connects the flitch edge, the sucking disc is located defeated silo, and the sucking disc is installed on a second horizontal migration mechanism, second horizontal migration mechanism installs in a third elevating system. (ii) a The sucking disc is connected with an air suction pump through an air pipe.

Furthermore, the third lifting mechanism is a first hydraulic cylinder with a pair of piston rods facing upwards, the top of the first hydraulic cylinder is provided with a mounting plate, the second horizontal moving mechanism is a second hydraulic cylinder, and the axial direction of the second hydraulic cylinder is the radial direction of the rotary table.

Further, the first lifting mechanism includes a plurality of vertical third hydraulic cylinders.

Further, the first horizontal moving mechanism is a horizontally arranged fourth hydraulic cylinder.

Furthermore, when a certain feeding groove of the rotary disc is positioned at the material receiving station, another feeding groove adjacent to the feeding groove is positioned at the material discharging station.

Further, the liquid dropping head is arranged vertically or obliquely.

Further, the material pressing mechanism comprises a vertical first connecting rod and an inclined second connecting rod, the top of the second connecting rod is fixedly connected with the sleeve (18), the bottom of the second connecting rod is fixedly connected with the upper end of the first connecting rod, and an annular pressing plate is arranged at the lower end of the first connecting rod.

Furthermore, a positioning groove is arranged on the rotary table below each annular pressing plate.

The invention has the beneficial effects that: the processes of feeding, liquid dropping, vacuumizing, rotating of the rotary table, discharging and the like of the device are all automatically realized by equipment, all moving parts can be controlled only by through hole programs, coordination work of all the moving parts can be promoted, the whole vacuum spin coating process is completed fully automatically, the production efficiency is very high, and large-scale and batch production is favorably realized.

Drawings

FIG. 1 is a front cross-sectional schematic view of the present invention;

fig. 2 is a schematic top view with the end cap removed.

Detailed Description

The invention is further illustrated with reference to the following figures and examples.

As shown in fig. 1 and fig. 2, the vacuum spin coating apparatus for deep-hole sidewall adhesion layer of glass adapter plate of the present invention includes a feeding and conveying mechanism 100, a vacuum spin coating tank 200, a dropping mechanism 300, and a discharging and conveying mechanism 400. The feeding and conveying mechanism 100 is used for conveying the glass substrate with the blind hole to the vacuum spin coating tank 200, the vacuum spin coating tank 200 is used for standing and vacuum spin coating of the glass substrate, the dripping mechanism 300 is used for dripping the high polymer solution on the surface of the glass substrate, so that the high polymer solution covers the surface of the glass substrate, and the discharging and conveying mechanism 400 is used for conveying the spin-coated glass substrate to the next processing device.

Vacuum spin coating jar 200 includes frame 1, the fixed jar of body 2, activity barrel 3, spin coating motor 4 and carousel 5, the fixed jar of body 2 and spin coating motor 4 are fixed in frame 1, activity barrel 3 cover is provided with sealed piston 6 on the upper portion of the fixed jar of body 2 between the activity barrel 3 and the fixed jar of body 2, and activity barrel 3 is connected with a elevating system 7. The spin coating motor 4 is connected with a vertical rotating shaft 8, the rotating shaft 8 penetrates through the bottom of the fixed tank body 2 and extends into the movable cylinder body 3, and the rotary disc 5 is fixedly arranged on the rotating shaft 8; n feeding troughs 9 radially extending to the edge of the rotary table 5 are arranged on the rotary table 5; a sealing end cover 10 for sealing the upper end opening of the movable cylinder 3 is arranged above the movable cylinder 3, and the sealing end cover 10 is connected with a second lifting mechanism 11; a vertical positioning shaft 17 is arranged on the lower surface of the sealing end cover 10, a rotatable sleeve 18 is arranged outside the positioning shaft 17, n material pressing mechanisms are arranged on the outer wall of the sleeve 18, and each material pressing mechanism is positioned above a feeding groove 9; the fixed tank body 2 is connected with a vacuum pumping pump 12, and the side wall of the fixed tank body 2 is provided with a vacuum pressure gauge 13 for testing the vacuum degree.

The fixed tank body 2 and the movable cylinder body 3 are made of high-strength, pressure-resistant and corrosion-resistant materials such as stainless steel and the like, so that the production safety is ensured. The fixed tank body 2 and the movable cylinder body 3 are both circular cylinder bodies, and the sealing piston 6 can be fixed on the outer wall of the fixed tank body 2 and also can be fixed on the inner wall of the movable cylinder body 3. The sealing piston 6 can be a circular ring-shaped piston or two circular ring-shaped pistons, so that the sealing performance is ensured, and the movable cylinder 3 can slide up and down. First elevating system 7 is used for driving activity barrel 3 and reciprocates, specifically, when unloading from top to bottom, first elevating system 7 drive activity barrel 3 moves down for carousel 5 exposes outside activity barrel 3, and feed transport mechanism 100 can shift the glass substrate to on carousel 5, and dropping liquid mechanism 300 can drip the glue on the glass substrate, and ejection of compact transport mechanism 400 can take away the glass substrate after the spin-coating is accomplished. During vacuum spin coating, the first lifting mechanism 7 drives the movable cylinder 3 to move upwards, the turntable 5 is covered, so that the vacuum spin coating can 200 is sealed by matching with the sealing end cover 10, and then the vacuum can be pumped. The first lifting mechanism 7 may be an electric shock driven screw nut pair mechanism, and preferably, the first lifting mechanism 7 includes a plurality of vertical third hydraulic cylinders, specifically, an annular support plate may be welded to the lower end of the movable cylinder 3, and the upper ends of the third hydraulic cylinders are fixedly connected to the support plate.

The spin coating motor 4 is used for driving the turntable 5 to rotate according to a set rotating speed, and a good sealing property should be provided between the rotating shaft 8 and the bottom plate of the fixed tank body 2.

Feed conveying mechanism 100 and ejection of compact conveying mechanism 400 all include conveyer belt 19, connect flitch 20 and sucking disc 21, connect flitch 20 level to set up the one end that is close to vacuum spin coating jar 200 at conveyer belt 19, and connect to be provided with on the flitch 20 along carousel 5 radial extension to the defeated silo that connects the flitch 20 edge, sucking disc 21 is located defeated silo, and sucking disc 21 installs on a second horizontal migration mechanism 22, second horizontal migration mechanism 22 installs in a third elevating system 23. The suction cup 21 is connected with a suction pump 25 through an air pipe. During the material loading, evenly put a plurality of glass substrates on conveyer belt 19, and the one side that glass substrate set up the blind hole up, drop on connecing flitch 20 when glass substrate removes to conveyer belt 19 and is close to the one end of vacuum spin-coating jar 200, be located the top of sucking disc 21 simultaneously, at this moment, third elevating system 23 drive sucking disc 21 rebound, make sucking disc 21 support glass substrate, start aspirator pump 25, utilize suction to inhale glass substrate firmly, then start second horizontal migration mechanism 22, drive sucking disc 21 and glass substrate and remove to vacuum spin-coating jar 200 in. Suction cup 21 is connected to a suction pump 25 via a hose.

In order to ensure that the sucker 21 can place the glass substrate on the turntable 5, n feeding grooves 9 radially extending to the edge of the turntable 5 are arranged on the turntable 5, and when the sucker 21 drives the glass substrate to move horizontally, the glass substrate should be slightly higher than the upper surface of the turntable 5. When the suction cup 21 moves to the turntable 5, the glass substrate enters the feeding groove 9, moves to a proper position along the feeding groove 9, then the suction pump 25 is turned off, the suction force on the glass substrate disappears, the third lifting mechanism 23 drives the suction cup 21 to move downwards, the glass substrate can be placed on the turntable 5, and feeding is completed.

The blanking process is the reverse of the feeding process, but the principle is the same. During blanking, after the glass substrate is moved to the material receiving plate 20, a material pushing mechanism can be arranged on one side of the material receiving plate 20 to push the glass substrate to the conveyor belt 19, and then the glass substrate is conveyed to the next procedure.

The end cap 10 is used to cooperate with the movable cylinder 3 to seal the vacuum spin-coating can 200, and a sealing ring may be disposed at the edge of the end cap 10 to improve the sealing performance. The second lifting mechanism 11 is used for driving the sealing end cover 10 to ascend and descend, the movable cylinder 3 is sealed during spin coating, and the movable cylinder 3 is opened after the spin coating is finished. In order to ensure that the glass substrate is stably fixed on the rotating disc 5 and prevent the glass substrate from moving when the rotating disc 5 rotates at a high speed, a positioning mechanism is required to fix the glass substrate, and an electric clamping mechanism and the like are inconvenient to increase in the vacuum spin coating tank 200, so a vertical positioning shaft 17 is arranged on the lower surface of the sealing end cover 10, a rotatable sleeve 18 is arranged outside the positioning shaft 17, n material pressing mechanisms are arranged on the outer wall of the sleeve 18, and each material pressing mechanism is positioned above one material feeding groove 9. The sleeve 18 can be arranged on the positioning shaft 17 through a thrust ball bearing or a thrust roller bearing, and when the sealing end cover 10 is matched with the movable barrel 3, the pressing mechanism can tightly press and fix the glass substrate on the turntable 5, so that the stability of the glass substrate is ensured.

Specifically, the swaging mechanism includes a vertical first connecting rod and an inclined second connecting rod, the top of the second connecting rod is fixedly connected with the sleeve 18, the bottom of the second connecting rod is fixedly connected with the upper end of the first connecting rod, and the lower end of the first connecting rod is provided with an annular pressing plate 28. The annular pressing plate 28 is in a circular ring shape or a rectangular ring shape, and can press the edge of the glass substrate, and in addition, the annular pressing plate 28 can also be replaced by a plurality of vertical pressing columns which are pressed on the edge of the glass substrate. The length of the first connecting rod and the second connecting rod should be suitable, so that when the end cover 10 is matched with the movable cylinder 3, the annular pressing plate 28 can just press the glass substrate.

In order to prevent the glass substrate from slipping when the glass substrate just falls on the turntable 5, the positioning groove 29 is arranged on the turntable 5 below each annular pressing plate 28, and the glass substrate is directly conveyed into the positioning groove 29 by the suction cup 21, so that the glass substrate can be prevented from moving, and the position accuracy of the glass substrate is improved.

The dropping mechanism 300 comprises a liquid storage tank 14, the liquid storage tank 14 is connected with a liquid outlet pipe 15, a dropping liquid pump 27 is arranged on the liquid outlet pipe 15, a dropping liquid head 16 is arranged at the end part of the liquid outlet pipe 15, and the dropping liquid head 16 is arranged on a first horizontal moving mechanism 26. The dripper 16 is disposed vertically or obliquely. The liquid storage tank 14 is used for storing high polymer solution, the dropping pump 27 is used for providing power for dropping liquid, driving the high polymer solution to enter the dropping head 16 and be discharged from the dropping head 16, and the dropping pump 27 adopts the existing small-sized liquid injection pump to control the dropping amount at each time. The liquid outlet pipe 15 adopts a flexible hose which can be bent to adapt to the movement of the liquid dropping head 16.

Feed transmission device 100, dripper 16 and ejection of compact transmission device 400 set up around activity barrel 3, n is more than or equal to 3's integer, and every of carousel 5 is gone up silo 9 and is located when connecing the material station, has two other last silos 9 that are located dropping liquid station and ejection of compact station respectively. Set up 3 at least material loading groove 9 on the carousel 5, can carry out vacuum spin coating to three glass substrate at every turn, it is efficient. The feeding position of the feeding transmission mechanism 100 is a material receiving station; the position for dripping the high polymer solution and the liquid dripping station correspond to the liquid dripping mechanism 300; the position of the discharging station, i.e., the position where the glass substrate is to be removed, corresponds to the position of the discharging transfer mechanism 400. When every last silo 9 of carousel 5 was located and connects the material station, there are two other last silos 9 that are located dropping liquid station and ejection of compact station respectively, and material loading, dropping liquid and ejection of compact can go on simultaneously promptly, improve production efficiency. More preferably, when a certain feeding groove 9 of the rotating disc 5 is located at the receiving station, another feeding groove 9 adjacent to the feeding groove 9 is located at the discharging station. After completing vacuum spin coating of a batch, the glass substrate on the feeding groove 9 positioned on the discharging station is moved away by the discharging transmission mechanism 400, the feeding groove 9 is in a vacant position, the spin coating motor 4 drives the turntable 5 to rotate for 360 degrees/n, so that the feeding groove 9 moves to the feeding station, at the moment, a new glass substrate can be transferred to the feeding groove 9, and meanwhile, the discharging transmission mechanism 400 unloads the glass substrate at the other feeding groove 9, so that the efficiency can be fully improved.

The third lifting mechanism 23, the second horizontal moving mechanism 22, and the first horizontal moving mechanism 26 may be screw-nut mechanisms driven by a motor, and preferably, the third lifting mechanism 23 is a first hydraulic cylinder with a pair of piston rods facing upward, an installation plate 24 is disposed on the top of the first hydraulic cylinder, the second horizontal moving mechanism 22 is a second hydraulic cylinder, and the axial direction of the second hydraulic cylinder is the radial direction of the rotating disk 5.

In conclusion, the device can realize the vacuum spin coating process of the glass substrate in a full-automatic manner, has high production efficiency and is beneficial to realizing large-scale and batch production.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.