Method for leak testing using a membrane chamber with a ventilated measurement volume

文档序号:1145932 发布日期:2020-09-11 浏览:15次 中文

阅读说明:本技术 使用具有通风测量体积的薄膜腔进行泄漏测试的方法 (Method for leak testing using a membrane chamber with a ventilated measurement volume ) 是由 诺伯特·罗夫 于 2019-01-28 设计创作,主要内容包括:本发明涉及一种使用用于盛测试对象(22)的薄膜腔(10)测试测试对象是否存在泄漏的方法,薄膜腔(10)具有围绕薄膜腔体积(20)的壁,壁具有至少一个柔性壁区域,包括步骤将测试对象(22)插入薄膜腔(10)中以及关闭薄膜腔(10),根据位置测量装置(61)的信号确定薄膜腔的完全关闭,位置测量装置(61)检测薄膜腔的壁相对于彼此的相对位置。(The invention relates to a method for testing a test object for the presence of a leak using a film chamber (10) for receiving the test object (22), the film chamber (10) having a wall which surrounds a film chamber volume (20) and which has at least one flexible wall region, comprising the steps of inserting the test object (22) into the film chamber (10) and closing the film chamber (10), determining a complete closing of the film chamber on the basis of a signal from a position measuring device (61), the position measuring device (61) detecting the relative position of the walls of the film chamber with respect to one another.)

1. A method for testing a specimen for the presence of a leak using a membrane chamber (10) for containing the specimen (22), wherein the membrane chamber (10) comprises a wall enclosing a membrane chamber volume (20), the wall comprising at least one flexible wall region, the method comprising the steps of:

placing said sample (22) in said membrane chamber (10), and

closing the membrane chamber (10),

it is characterized in that

The complete closing of the film chamber is determined from signals of a position measuring device (61), the position measuring device (61) detecting the relative position of the walls of the film chamber with respect to each other.

2. Method according to claim 1, characterized in that a measuring volume (34, 36) is provided in the vicinity of the flexible wall region, the measurement volume (34, 36) is configured to be arranged on the opposite side of the flexible wall region to the membrane chamber volume (20) and to be sealed towards the membrane chamber volume (20), wherein the measurement volume (34, 36) is monitored in order to obtain the magnitude of a possible leak in the sample (22) on the basis of the monitoring result, and detecting a complete closing of the thin film chamber (10) by measuring the pressure in the measurement volume (34, 36) and by monitoring whether the measured pressure exceeds a predefined threshold value, wherein the closed state of the membrane chamber is detected only if the pressure measurement signal exceeds the threshold value and the position measurement signal of the position measurement device corresponds to the closed state.

3. Method according to claim 1 or 2, characterized in that the step of evacuating the membrane chamber (10) and/or monitoring the measurement volume (34, 36) is automatically started after determining that the membrane chamber (10) is closed.

4. A method according to any one of claims 1-3, characterized in that the position measuring device (61) is a contact switch or is used for measuring the distance between the walls of the membrane chamber (10).

5. Method according to one of the preceding claims, characterized in that the closed state of the membrane chamber (10) is detected only if a pressure measurement and a position measurement detect the closed state independently and in combination.

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