Coupling and synchronizing mirror elements in a laser micromirror array
阅读说明：本技术 激光微镜阵列中的耦合和同步镜元件 (Coupling and synchronizing mirror elements in a laser micromirror array ) 是由 周勤 王佑民 于 2018-12-11 设计创作，主要内容包括：一些实施例披露了被配置为使LiDAR系统中重定向光的微机电系统装置,包括布置在线性阵列内的支撑框架和至少两个镜元件,所述至少两个镜元件包括第一镜元件和第二镜元件。所述至少两个镜元件的每个镜元件可在旋转轴上旋转,所述旋转轴与由所述至少两个镜元件的所述线性阵列限定的线垂直,并且将对应的镜元件一分为二为第一部分和第二部分。所述装置可包括耦合元件,所述耦合元件的远端物理耦合到所述第一镜元件的第一部分,而近端物理耦合到所述第二镜元件的第二部分,使得第一镜元件的旋转引起第二镜元件的同步且等同地旋转。(Some embodiments disclose a microelectromechanical systems device configured to redirect light in a LiDAR system, including a support frame arranged within a linear array and at least two mirror elements including a first mirror element and a second mirror element. Each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements and bisects the corresponding mirror element into a first portion and a second portion. The apparatus can include a coupling element having a distal end physically coupled to a first portion of the first mirror element and a proximal end physically coupled to a second portion of the second mirror element such that rotation of the first mirror element causes synchronous and equal rotation of the second mirror element.)
1. A microelectromechanical systems device configured to redirect light in a light detection and ranging (LiDAR) system, the microelectromechanical systems device comprising:
a support frame;
at least two mirror elements arranged in an end-to-end, longitudinal linear array within the support frame, the at least two mirror elements comprising:
a first mirror element; and
a second mirror element adjacent to and linearly aligned with the first mirror element;
wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements, the rotation axis of each mirror element dividing the corresponding mirror element into a first portion and a second portion; and
a coupling element, a distal end of the coupling element coupled to a first portion of the second mirror element, a proximal end of the coupling element coupled to a second portion of the second mirror element, wherein the coupling element physically couples the first mirror element and the second mirror element such that rotation of the first mirror element causes the second mirror element to rotate synchronously and equally and rotation of the second mirror element causes the first mirror element to rotate synchronously and equally.
2. The mems apparatus of claim 1, wherein each mirror element includes a first coupling location on a first portion thereof and a second coupling location on a second portion thereof, the first and second coupling locations defining a location to which the coupling element is coupled, wherein the first and second coupling locations are equidistant from and on opposite sides of an axis of rotation of the respective mirror element.
3. The mems apparatus of claim 1, further comprising:
one or more processors; and
one or more MEMS engines controlled by the one or more processors and configured to rotate at least one of the first and second mirror elements, wherein the coupling element rotates the at least two mirror elements synchronously, mechanically, and equally within a range of motion when the one or more MEMS engines rotate the at least one of the first and second mirror elements.
4. The mems apparatus of claim 3, wherein the range of motion comprises a range of rotation of no more than 90 degrees.
5. The mems apparatus of claim 1, wherein the support frame, the at least two mirror elements, and the coupling element together form a continuous unitary structure on a common substrate.
6. The mems apparatus of claim 1, further comprising:
a third mirror element adjacent to and linearly aligned with the second mirror element; and
a second coupling element distally coupled to a first portion of the second mirror element, the second coupling element proximally coupled to a second portion of the third mirror element, such that the coupling element physically couples the second and third mirror elements such that rotation of the third mirror element causes the first and second mirror elements to rotate synchronously and equally.
7. The mems apparatus of claim 1, wherein the first portion of the first mirror element and the second portion of the second mirror element each comprise a longitudinal channel configured to allow the coupling element to pass through a plane defined by the first mirror element and the second mirror element when the first mirror element and the second mirror element are rotated.
8. The mems apparatus of claim 1, wherein the coupling element flexes as the first mirror element and the second mirror element rotate.
9. The mems apparatus of claim 1, wherein the support frame comprises: a coupling element support configured parallel to the rotational axes of the first and second mirror elements and located between the first and second mirror elements, wherein the coupling element rotates on the coupling element support when the first and second mirror elements rotate.
10. The mems apparatus of claim 1, wherein the first mirror element is connected to the support frame by at least one support hinge disposed along the rotational axis to facilitate rotation of the first mirror element and the second mirror element along the rotational axis.
11. The mems apparatus of claim 10, wherein the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element are a continuous unitary structure.
12. The mems apparatus of claim 1, wherein each of the plurality of mirror elements has the same size and dimensions.
13. The mems apparatus of claim 12, wherein each of the plurality of mirror elements is rectangular having:
two opposing ends are separated by a first distance defining the length and longitudinal arrangement of the respective mirror elements; and
the two opposing sides are separated by a second distance that defines a width of the respective mirror element.
14. The mems apparatus of claim 1, wherein the support frame comprises a support configured perpendicular to the linear array and at a location between the first mirror element and the second mirror element, wherein the support supports the coupling element at a pivot point, wherein the coupling element rotates at the pivot point.
15. A MEMS device configured to redirect light in a LiDAR system,
the microelectromechanical systems device comprises:
a support frame;
a first mirror element coupled to the support frame by a first support hinge, wherein the first mirror element is rotatable relative to the support frame along a rotation axis of the first support hinge and defines a direction by the first support hinge;
a second mirror element coupled to the support frame by a second support hinge, wherein the second mirror element is rotatable relative to the support frame along a rotation axis of the second support hinge and defines a direction by the second support hinge; and
a coupling element coupling the first mirror element to the second mirror element such that rotation of the first mirror element rotates the second mirror element in synchronization with and equally to the first mirror element and rotation of the second mirror element rotates in synchronization with and equally to the first mirror element and the second mirror element.
16. The mems apparatus of claim 15, wherein the first mirror element and the second mirror element are arranged in an end-to-end, longitudinal linear array within the support frame.
17. The mems apparatus of claim 15, wherein the range of rotation of the first mirror element and the second mirror element does not exceed 90 degrees.
18. The mems apparatus of claim 15, wherein the support frame, the first and second mirror elements, and the coupling element together form a continuous unitary structure on a common substrate.
19. The mems apparatus of claim 15, wherein the coupling element flexes as the first mirror element and the second mirror element rotate.
20. The mems apparatus of claim 15, wherein the support frame comprises: a coupling element support configured parallel to the rotational axes of the first and second mirror elements and between the first and second mirror elements, wherein the coupling element rotates on the coupling element support when the first and second mirror elements rotate.
21. A microelectromechanical systems device configured to redirect light in a LiDAR system, the microelectromechanical systems device comprising:
a support frame;
at least two mirror elements configured to be arranged in an end-to-end, longitudinal linear array within the support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; and
a coupling element configured adjacent to and parallel to the linear array of the at least two mirror elements, the coupling element coupling to the same location at each of the at least two mirror elements such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally.
22. The mems apparatus of claim 21, further comprising:
one or more processors; and
an actuator controlled by the one or more processors or one or more MEMS engines configured to drive the coupling element, the coupling element causing the at least two mirror elements to rotate synchronously and equally within a range of motion.
23. The mems apparatus of claim 22, wherein the range of motion comprises a range of rotation of no more than 90 degrees.
24. The mems apparatus of claim 21, wherein the support frame, the coupling element, and the at least two mirror elements are formed as a continuous unitary structure on a common substrate.
25. The mems apparatus of claim 25, wherein the common substrate is a semiconductor substrate and the support frame, the coupling element, and the at least two mirror elements are in a same plane.
26. The mems apparatus of claim 21, wherein each of the plurality of mirror elements has the same size and dimensions.
27. The mems apparatus of claim 21, wherein the first mirror element is coupled to the support frame by at least one support hinge configured along the rotational axis to facilitate rotation of the first mirror element and the second mirror element along the rotational axis.
28. The mems apparatus of claim 28, wherein the at least one support hinge, the support frame, the first mirror element, the second mirror element, and the coupling element are a continuous, unitary structure formed on a common substrate.
29. The mems apparatus of claim 21, wherein each of the at least two mirror elements is rectangular having:
two opposing ends are separated by a first distance defining the length and longitudinal arrangement of the respective mirror elements; and
the two opposing sides are separated by a second distance that defines a width of the respective mirror element.
30. The mems apparatus of claim 21, wherein the coupling element flexes as the first mirror element and the second mirror element rotate.
31. A microelectromechanical systems device configured to redirect light in a LiDAR system, the microelectromechanical systems device comprising:
a support frame;
at least two mirror elements configured to be arranged in a linear array within the support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; and
a coupling element configured to couple to each of the at least two mirror elements in the same position such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining ones of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally.
32. The mems apparatus of claim 31, further comprising:
one or more processors; and
an actuator controlled by the one or more processors or one or more MEMS engines configured to drive the coupling element, the coupling element causing the at least two mirror elements to rotate synchronously and equally within a range of motion.
33. The mems apparatus of claim 31, wherein the range of motion comprises a range of rotation of no more than 90 degrees.
34. The mems apparatus of claim 31, wherein the support frame and the at least two mirror elements are formed on a common substrate.
35. The mems apparatus of claim 31, wherein each of the plurality of mirror elements has the same size and dimensions.
36. The mems apparatus of claim 31, wherein each of the at least two mirror elements is rectangular having:
two opposing ends are separated by a first distance defining the length and longitudinal arrangement of the respective mirror elements; and
the two opposing sides are separated by a second distance that defines a width of the respective mirror element.
37. The mems apparatus of claim 31, wherein the first mirror element is connected to the support frame by at least one support hinge disposed along the rotational axis to facilitate rotation of the first and second mirror elements along the rotational axis.
38. The mems apparatus of claim 37, wherein the at least one support hinge, the support frame, the first mirror element, the second mirror element, and the coupling element are a continuous unitary structure.
39. A microelectromechanical systems device configured to redirect light in a LiDAR system, the microelectromechanical systems device comprising:
a support frame;
at least two mirror elements arranged in a linear array within the support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements;
at least one support hinge for each of the at least two mirror elements, each support hinge being configured along the rotation axis and configured to couple the corresponding mirror element to the support frame, each support hinge being configured to rotate the first mirror element and the second mirror element along the rotation axis; and
a flexible coupling element coupled to each identical location of the at least two mirror elements such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining ones of the at least two mirror elements connected to the coupling element to rotate synchronously and equally.
40. The mems apparatus of claim 39, wherein the at least one support hinge, the support frame, the first mirror element, the second mirror element, and the coupling element are a continuous unitary structure formed on a common substrate.
Background
Modern vehicles are typically equipped with a set of environmental detection sensors that are intended to detect objects and landscape features around the vehicle in real time, which can serve as the basis for many current and emerging technologies, such as lane change assistance, collision avoidance, and autopilot functions. Some commonly used sensing systems include optical sensors (e.g., infrared, camera, etc.), radio detection and ranging (RADAR ) for detecting the presence, direction, distance, and speed of other vehicles or objects, magnetometers (e.g., passive sensing of large ferrous objects such as trucks, cars, or trams), and light detection and ranging (LiDAR ).
LiDAR generally uses a pulsed light source and a detection system to estimate distance to environmental features (e.g., vehicles, buildings, etc.). In some systems, a laser or burst of light (pulse) is emitted and focused through a lens assembly, and a receiver collects the pulse reflections from the subject. The time of flight (TOF) of a pulse may be measured in terms of the time of transmission to the time of receipt of a reflection, which may appear as a single data point. This process can be repeated very quickly, within any desired range, which can typically be within a certain area in front of the vehicle, or within a 360 degree radius. The process may capture TOF measurements to form a set of points, which may be dynamically and continuously updated in real time to form a "point cloud. The point cloud data may be used to estimate the distance, size, and location of objects relative to the LiDAR system, typically with high fidelity (e.g., within 5 centimeters), may be used to map an area around the vehicle so that the vehicle is spatially aware of its surroundings, and may, for example, prompt the driver for obstacles, danger, or points of interest in the event of a possible collision, or take corrective action (e.g., apply brakes).
While LiDAR and other sensing systems are expected to drive the continued development of fully automated traffic, challenges remain that limit its widespread adoption. LiDAR systems are typically expensive, large, and bulky. In some embodiments, multiple emitters may be required to accurately track a scene, particularly for systems that require precision over a large range and field of view (FOV). Despite the great advances made in pushing autopilot technology to larger commercial applications, there is still a need for further improvements.
Disclosure of Invention
This summary is not intended to identify key or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter alone. The subject matter of the present application should be understood by reference to the entire specification of the application, any or all of the drawings, and appropriate portions of each claim.
The foregoing and other features and examples are described in more detail in the following detailed description, claims, and drawings.
In some embodiments, a microelectromechanical systems device configured to redirect light in a light detection and ranging system (LiDAR), the microelectromechanical systems device may comprise:
a support frame; at least two mirror elements arranged in an end-to-end, longitudinal linear array within the support frame, the at least two mirror elements comprising: a first mirror element; and a second mirror element adjacent to and linearly aligned with the first mirror element. Wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements, the rotation axis of each mirror element dividing the corresponding mirror element into a first portion and a second portion. The MEMS device may further comprise a coupling element having a distal end coupled to the first portion of the second mirror element and a proximal end coupled to the second portion of the second mirror element, wherein the coupling element physically couples the first mirror element and the second mirror element such that rotation of the first mirror element causes the second mirror element to rotate synchronously and equally, and rotation of the second mirror element causes the first mirror element to rotate synchronously and equally.
In some embodiments, each mirror element may comprise a first coupling position on its first portion and a second coupling position on its second portion, the first and second coupling positions defining positions to which the coupling element is coupled, wherein the first and second coupling positions are equidistant from and on opposite sides of the rotational axis of the respective mirror element. In some embodiments, the MEMS device can also include one or more processors; one or more MEMS engines controlled by one or more processors configured to rotate at least one of the first mirror element and the second mirror element, wherein the coupled element rotates at least two mirror elements synchronously, mechanically, and within a range of motion synchronously and equally when the one or more MEMS engines rotate at least one of the first mirror element and the second mirror element. In some embodiments, the range of motion may include any suitable range of rotation (e.g., a range of rotation of no more than 90 degrees). In some embodiments, the support frame, the at least two mirror elements, and the coupling element may together form (e.g., be etched in the same plane of the semiconductor substrate) a continuous unitary structure on a common substrate. In some embodiments, the mems device may further comprise: a third mirror element (or more) adjacent to and linearly aligned with the second mirror element; and a second coupling element distally coupled to the first portion of the second mirror element and proximally coupled to the second portion of the third mirror element, wherein the coupling element physically couples the second mirror element and the third mirror element such that rotation of the third mirror element causes the first mirror element and the second mirror element to rotate synchronously and equally.
In some embodiments, the first portion of the first mirror element and the second portion of the second mirror element may each include a longitudinal channel configured to allow the coupling element to pass through a plane defined by the first mirror element and the second mirror element when the first mirror element and the second mirror element are rotated. In some embodiments, the coupling element bends when the first mirror element and the second mirror element rotate. In some embodiments, the support frame comprises: a coupling element support configured parallel to the rotational axes of the first and second mirror elements and between the first and second mirror elements, wherein the coupling element rotates on the coupling element support when the first and second mirror elements rotate. In some embodiments, the first mirror element may be connected to the support frame by at least one support hinge (typically two linearly aligned hinges) arranged along the rotation axis to facilitate rotation of the first mirror element and the second mirror element along the rotation axis. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element on the common substrate may form a continuous unitary structure (e.g., etched by photolithography or other semiconductor manufacturing processes, etc.). In some embodiments, each of the plurality of mirror elements may have the same size and dimensions. In some embodiments, each of the at least two mirror elements may be rectangular, having: the two opposite ends are separated by a first distance, which defines the length and longitudinal arrangement of the respective mirror element, and the two opposite sides are separated by a second distance, which defines the width of the respective mirror element. In some embodiments, the support frame may comprise a support configured perpendicular to the linear array and at a position between the first mirror element and the second mirror element, wherein the support supports the coupling element at a pivot point, wherein the coupling element rotates at the pivot point.
In some embodiments a MEMS device configured to redirect light in a LiDAR system may include a support frame; a first mirror element coupled to the support frame by a first support hinge, wherein the first mirror element is rotatable relative to the support frame along a rotation axis of the first support hinge and defines a direction by the first support hinge; a second mirror element coupled to the support frame by a second support hinge, wherein the second mirror element is rotatable relative to the support frame along a rotation axis of the second support hinge and a direction is defined by the second support hinge; a coupling element coupling the first mirror element to the second mirror element such that rotation of the first mirror element causes the second mirror element to rotate synchronously and equally with the first mirror element and rotation of the second mirror element causes the first mirror element to rotate synchronously and equally with the second mirror element. In some embodiments, the first mirror element and the second mirror element may be arranged in an end-to-end, longitudinal linear array within the support frame. Typically, the linear array has more than two mirror elements, as shown in FIGS. 5B-5D and 7B-7D. In some embodiments, the range of rotation of the first and second mirror elements may not exceed 90 degrees (typically between 45-90 degrees), although other ranges are possible. In some embodiments, the support frame, the first and second mirror elements, and the coupling element on a common substrate may together form a continuous unitary structure. In some embodiments, the coupling element may bend when the first mirror element and the second mirror element are rotated. In some embodiments, the support frame may include: a coupling element support configured parallel to the rotational axes of the first and second mirror elements and between the first and second mirror elements, wherein the coupling element rotates on the coupling element support when the first and second mirror elements rotate.
In some embodiments, the MEMS device configured to redirect light in a LiDAR system may include: a support frame; at least two mirror elements configured to be arranged in an end-to-end, longitudinal linear array within a support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; a coupling element configured adjacent to and parallel to the linear array of at least two mirror elements, the coupling element being coupled to the same location at each of the at least two mirror elements such that rotation of any one of the at least two mirror elements causes the remaining ones of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally. In some embodiments, the mems device may further comprise: one or more processors; one or more MEMS engines controlled by one or more processors configured to drive a coupling element that rotates at least two mirror elements synchronously and equally within a range of motion. In some embodiments, the range of motion includes a range of rotation of no more than 90 degrees (e.g., 45-90 degrees), although other ranges are possible. In some embodiments, the support frame, the coupling element and the at least two mirror elements on a common substrate may form a continuous, unitary structure. In some embodiments, the common substrate may be a semiconductor substrate, and the support frame, the coupling element, and the at least two mirror elements may be on the same plane.
In some embodiments, each of the plurality of mirror elements may have the same size and dimensions, although other arrangements are possible. In some embodiments, the first mirror element may be coupled to the support frame by at least one support hinge configured along the rotation axis to facilitate rotation of the first mirror element and the second mirror element along the rotation axis. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element on the common substrate may form a common unitary structure. In some embodiments, each of the at least two mirror elements may be rectangular, having: the two opposite ends are separated by a first distance, the first distance defining the length and longitudinal arrangement of the respective mirror element; the two opposing sides are separated by a second distance that defines a width of the respective mirror element. As will be appreciated by those of ordinary skill in the art from the description of the present application, the mirror elements may also be other shapes. In some embodiments, the coupling element may bend upon rotation of the first and second mirror elements.
In some embodiments, a MEMS device in a LiDAR system configured to redirect light in the LiDAR system may include: a support frame; at least two mirror elements configured to be arranged in a linear array within a support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; a coupling element configured to be coupled at substantially the same location of each of the at least two mirror elements, such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining mirror elements of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally. In some embodiments, a microelectromechanical systems device may include: one or more processors; an actuator, controlled by the one or more processors or one or more MEMS engines, configured to drive the coupling element, which rotates the at least two mirror elements synchronously and equally within the range of motion. In some embodiments, the range of motion may include a range of rotation of no more than 90 degrees (e.g., 45-90 degrees, or other suitable range). In some embodiments, the support frame and the at least two mirror elements may be formed on a common substrate, and each of the plurality of mirror elements may have the same size and dimensions. In some embodiments, each of the plurality of mirror elements may be rectangular, having: the two opposite ends are separated by a first distance, the first distance defining the length and longitudinal arrangement of the respective mirror element; the two opposing sides are separated by a second distance that defines a width of the respective mirror element. In some embodiments, the first mirror element can be coupled to the support frame by at least one support hinge (typically two support hinges, as shown in fig. 7A-7D) configured along the rotation axis to facilitate rotation of the first mirror element and the second mirror element along the rotation axis. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element may be a common unitary structure. In some embodiments, these structures may be formed on a common substrate.
In some embodiments, a MEMS device can be configured to redirect light in a LiDAR system, and can include: a support frame; at least two mirror elements arranged in a linear array, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; at least one support hinge for each of the at least two mirror elements, each support hinge being configured along a rotation axis and configured to couple the respective mirror element to the support frame, each support hinge being configured to rotate the first mirror element and the second mirror element along the rotation axis; a flexible coupling element coupled to each of the at least two mirror elements in substantially the same position, such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining ones of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element may be a formed unitary structure on the common substrate.
In some embodiments, a microelectromechanical systems device may be configured to redirect light in a light detection and ranging system (LiDAR), which may include: a support frame; at least two mirror elements configured to be arranged in an end-to-end, longitudinal linear array within the support frame, the at least two mirror elements comprising: a first mirror element; a second mirror element adjacent to and linearly aligned with the first mirror element. Each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements, the rotation axis of each mirror element dividing the corresponding mirror element into a first portion and a second portion. The mems device may further include: a coupling element having a distal end coupled to the first portion of the first mirror element and a proximal end coupled to the second portion of the second mirror element, wherein the coupling element physically couples the first mirror element and the second mirror element such that rotation of the first mirror element causes synchronous and equal rotation of the second mirror element and rotation of the second mirror element causes synchronous and equal rotation of the first mirror element.
In some embodiments, each mirror element may comprise a first coupling position on its first portion and a second coupling position on its second portion defining a position to which the coupling element is coupled, wherein the first coupling position and the second coupling position are equidistant from and on opposite axes of the rotational axis of the respective mirror element. The MEMS device can also include one or more processors; one or more processor-controlled one or more MEMS engines configured to rotate at least one of the first mirror element and the second mirror element, wherein the coupled element rotates the at least two mirror elements synchronously, mechanically, and within a range of motion, synchronously and equally as the one or more MEMS engines rotate at least one of the first mirror element and the second mirror element. The range of motion may include any suitable range of rotation (e.g., no more than 90 degrees). In some embodiments, the support frame, the at least two mirror elements, and the coupling element may together form (e.g., be etched in the same plane of the semiconductor substrate) a continuous unitary structure on a common substrate. In a further embodiment, the MEMS device can further include a third mirror element (or more) adjacent to and linearly aligned with the second mirror element; and a second coupling element distally coupled to the first portion of the second mirror element and proximally coupled to the second portion of the third mirror element, wherein the coupling element physically couples the second mirror element and the third mirror element such that rotation of the third mirror element causes synchronous and equal rotation of the first and second mirror elements.
The first portion of the first mirror element and the second portion of the second mirror element may each include a longitudinal channel configured to allow the coupling element to pass through a plane defined by the first mirror element and the second mirror element when the first mirror element and the second mirror element are rotated. In some embodiments, the coupling element may be flexible, and the coupling element bends when the first mirror element and the second mirror element rotate. The support frame may comprise a coupling element support configured parallel to the rotational axis of the first and second mirror elements and between the first and second mirror elements, wherein the coupling element rotates on the coupling element support when the first and second mirror elements rotate. The first mirror element may be connected to the support frame by at least one support hinge (typically two linearly aligned hinges) arranged along the rotation axis to facilitate rotation of the first and second mirror elements along the rotation axis. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element may be a continuous unitary structure and may be formed on a common substrate (e.g., etched by photolithography or other semiconductor manufacturing processes, etc.). Each of the plurality of mirror elements may have the same size and dimensions. In some embodiments, each of the plurality of mirror elements may be rectangular, having: the two opposite ends are separated by a first distance defining the length and longitudinal arrangement of the respective mirror element, and the two opposite sides are separated by a second distance defining the width of the respective mirror element. In some embodiments, the support frame may comprise a support configured perpendicular to the linear array and at a position between the first and second mirror elements, wherein the support supports the coupling element at a pivot point at which the coupling element rotates.
In some embodiments, a MEMS device configured to redirect light in a LiDAR system may include a support frame; a first mirror element coupled to the support frame by a first support hinge, wherein the first mirror element is rotatable relative to the support frame along a rotation axis of the first support hinge and is oriented by the first support hinge; a second mirror element coupled to the support frame by a second support hinge, wherein the second mirror element is rotatable relative to the support frame along a rotation axis of the second support hinge and a direction is defined by the second support hinge; a coupling element coupling the first mirror element to the second mirror element such that rotation of the first mirror element causes the second mirror element to rotate synchronously and equally with the first mirror element and rotation of the second mirror element causes the first mirror element to rotate synchronously and equally with the second mirror element. The first and second mirror elements may be arranged in an end-to-end, longitudinal linear array within the support frame. In some embodiments, the linear array has more than two mirror elements, as shown in FIGS. 5B-5D and 7B-7D. In some embodiments, the range of rotation of the first and second mirror elements may not exceed 90 degrees (typically between 45-90 degrees), although other ranges are possible. In some embodiments, the support frame, the first and second mirror elements, and the coupling element on a common substrate may together form a continuous unitary structure. In some embodiments, the coupling element may bend when the first mirror element and the second mirror element rotate. In some embodiments, the support frame may include: a coupling element support configured parallel to the rotational axes of the first and second mirror elements and between the first and second mirror elements, wherein the coupling element rotates on the coupling element support when the first and second mirror elements rotate.
In some embodiments, a MEMS device configured to redirect light in a LiDAR system may include a support frame; at least two mirror elements arranged in an end-to-end, longitudinal linear array within the support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; and a coupling element configured adjacent to and parallel to the linear array of at least two mirror elements, the coupling element being coupled to substantially the same location at each of the at least two mirror elements, such that rotation of any one of the at least two mirror elements causes the remaining ones of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally. In some embodiments, the MEMS device can also include one or more processors; an actuator, controlled by one or more processors or one or more MEMS engines, configured to drive a coupling element that rotates at least two mirror elements synchronously and equally within a range of motion. In some embodiments, the range of motion includes a range of rotation of no more than 90 degrees (e.g., 45-90 degrees), although other ranges are possible. In some embodiments, the support frame, the coupling element and the at least two mirror elements on a common substrate may form a continuous, unitary structure. In some embodiments, the common substrate may be a semiconductor substrate, and the support frame, the coupling element, and the at least two mirror elements may be on the same plane.
In some embodiments, each of the plurality of two mirror elements may have the same size and dimensions, although other arrangements are possible. In some embodiments, the first mirror element may be coupled to the support frame by at least one support hinge configured along the rotation axis to facilitate rotation of the first mirror element and the second mirror element along the rotation axis. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element on the common substrate may form a common unitary structure. Each of the at least two mirror elements may be rectangular, having: the two opposite ends are separated by a first distance, the first distance defining the length and longitudinal arrangement of the respective mirror element; the two opposing sides are separated by a second distance that defines a width of the respective mirror element. As will be appreciated by those of ordinary skill in the art from the description of the present application, the mirror elements may also be other shapes. The coupling element may bend upon rotation of the first mirror element and the second mirror element.
In some embodiments, a MEMS device configured to redirect light in a LiDAR system may include a support frame; at least two mirror elements configured to be arranged in a linear array within a support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; a coupling element configured to couple to each of the at least two mirror elements in substantially the same position, such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining ones of the at least two mirror elements coupled to the coupling element to rotate synchronously and equally. In some embodiments, a microelectromechanical systems device may include one or more processors; an actuator controlled by one or more processors or one or more MEMS engines and configured to drive a coupling element that rotates the at least two mirror elements synchronously and equally within the range of motion. In some embodiments, the range of motion may include a range of rotation of no more than 90 degrees (e.g., 45-90 degrees, or other suitable range). In some embodiments, the support frame and the at least two mirror elements may be formed on a common substrate, and each of the plurality of mirror elements may have the same size and dimensions. In some embodiments, at least two mirror elements, which may be configured to each be rectangular, two opposing ends separated by a first distance, the first distance defining a length and a longitudinal arrangement of the respective mirror elements; the two opposing sides are separated by a second distance that defines a width of the respective mirror element. The first mirror element may be coupled to the support frame by at least one support hinge (typically two support hinges, as shown in fig. 7A-7D) arranged along the rotation axis, which support hinge facilitates rotation of the first mirror element and the second mirror element along the rotation axis. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element may be a unitary structure formed together on a common substrate. In some embodiments, these structures may be formed on a common plane.
In some embodiments, a MEMS device can be configured to redirect light in a LiDAR system, and can include a support frame; at least two mirror elements arranged in a linear array within a support frame, wherein each mirror element of the at least two mirror elements is rotatable on a rotation axis perpendicular to a line defined by the linear array of the at least two mirror elements; at least one support hinge for each of the at least two mirror elements, each support hinge being configured along a rotation axis and configured to couple the corresponding mirror element to a support frame, each support hinge being configured to rotate the first mirror element and the second mirror element along the rotation axis; a flexible coupling element coupled to substantially the same location of each of the at least two mirror elements, such that the coupling element physically couples each of the at least two mirror elements together such that rotation of any one of the at least two mirror elements causes the remaining mirror elements of the at least two mirror elements connected to the coupling element to rotate synchronously and equally. In some embodiments, the at least one support hinge, the support frame, the first and second mirror elements, and the coupling element may be a unitary structure formed together on a common substrate.
Drawings
The detailed description is set forth with reference to the accompanying drawings.
FIG. 1 illustrates an exemplary vehicle using a LiDAR based system according to some embodiments of the present application.
FIG. 2 illustrates an example of light steering using a LiDAR based system according to some embodiments of the present application.
FIG. 3 illustrates a micro-electromechanical system based micromirror assembly in an exemplary LiDAR based system according to some embodiments of the present application.
FIG. 4 illustrates operations of the exemplary micromirror assembly of FIG. 3 to provide a two-dimensional field of view (FOV) according to some embodiments of the present application.
FIGS. 5A-5F illustrate exemplary first-class coupled synchronous linear arrays of micromirrors operating under a range of motion according to some embodiments of the present application.
FIGS. 6A-6B illustrate simplified functional diagrams of exemplary micromirror-coupled synchronous linear arrays shown in FIGS. 5A-5F according to some embodiments of the present application.
FIGS. 7A-7E illustrate a second type of synchronous linear array of micromirror array coupling in an exemplary MEMS according to some embodiments of the present application.
FIGS. 8A-8B illustrate simplified functional diagrams of exemplary micromirror-coupled synchronous linear arrays of FIGS. 7A-7E according to some embodiments of the present application.
Detailed Description
Various aspects of the present application relate generally to object tracking systems and, more particularly, to a micro-electromechanical systems-based synchronized micromirror array system configured to redirect light in a LiDAR system.
In the following description, various examples of MEMS based synchronized micromirror array systems are shown and described. For purposes of explanation, specific configurations and details are set forth in order to provide a thorough understanding of the embodiments. It will be apparent, however, to one skilled in the art that some embodiments may be practiced or carried out without every detail disclosed. Furthermore, well-known features may be omitted or simplified in order not to obscure the novel features described herein.
The following provides a general, non-limiting overview of the present application that follows. LiDAR systems typically use a pulsed light source that is focused through a lens assembly to transmit and receive pulses reflected off of an object, with each detected return pulse captured as a single data point. An example of a LiDAR system on an autonomous vehicle is shown in FIG. 1 and described further below. Detected TOF measurements can be captured to form a set of points, which can be dynamically and continuously updated in real time to form a "point cloud". The point cloud data may estimate, for example, the distance, size, and location of objects relative to the LiDAR system. To send and detect pulses in two or more dimensions, light deflection or "light guide" systems (see, e.g., FIG. 2) can be used to deflect the sent and received pulses over a range to create a larger field of view for object detection. In some systems, the light redirecting device may include a movable mirror assembly to allow configurability in the direction of light projection. The mirrors in the mirror assembly may be moved (e.g., rotated/tilted) by an actuator (controlling a coupling element as described below) to reflect (and steer) light from the light source to a predetermined angle. The mirror may be rotated to provide a first range of projection angles along a first (e.g., vertical) axis of a one-dimensional (1D) field of view, and in some embodiments, a second range of projection angles along a second (e.g., horizontal) axis, which may be orthogonal to the first axis. The first and second ranges of projection angles may define a 1D or 2D field of view in which the object may be detected. The mirror assembly can have a significant impact on various performance metrics of the light redirecting device including accuracy, actuation power, FOV, dispersion angle, reliability, resolution, range, and imaging characteristics. In some embodiments, certain functions of the light turning system (including the mirror assembly, the actuator, and the control circuitry that configures the actuator to set the angle of projection) may be formed in a microelectromechanical system on a semiconductor substrate.
In some embodiments, the optical aperture of the system may be determined by the size of the mirror. In most applications, a larger optical aperture is generally preferred, which can be achieved by increasing the size of the mirror. However, this may sacrifice other properties, such as the speed of operation of the mirror. For example, a system that uses a single mirror (e.g., on a single axis) to provide light steering would require relatively high actuation forces to achieve the target FOV and target dispersion, which can reduce reliability. Furthermore, to reduce dispersion, the size of the mirror may be matched to the width of the light pulse (e.g., light pillar) from the light source, which may result in an increase in the mass and inertia of the mirror. As a result, a greater actuation force (e.g., torque) may be required to rotate the mirror to achieve the target FOV. Subjecting the mems actuator to large actuation forces can require significant power resources and can reduce the useful life and reliability of the actuator. In some embodiments, due to the mass and inertial characteristics of large mirrors, in fast scan scenarios using mems actuators, it may not be possible to move the mirrors at the desired rate and range.
As proposed herein, a solution to this problem is to use a mems-based mirror array (see, e.g., fig. 3) instead of a large mirror device. In this case, the size and mass of the individual mirrors can be significantly smaller and lighter, so that higher scanning speeds (using less power) can be achieved. Individually, smaller mirror sizes can significantly reduce the ability to transmit and receive light (e.g., LiDAR) pulses because less mirror surface area is available for light reflection. In contrast, a smaller MEMS micromirror array can be configured in any suitable size to effectively achieve a larger specular reflection area (e.g., comparable to a single large mirror or larger mirrors), but with numerous benefits, including faster control of individual mirror tilt and reduced power consumption.
In order for a row of mirrors to work together as a single mirror of similar size, each mirror in the array needs to be synchronized so that at any point in time all mirrors in the array are oriented in the same direction (also referred to as tilt). Otherwise, as will be understood by those of ordinary skill in the art from the description of the present application, light pulses striking the micromirror array may be dispersed in multiple directions, resulting in degraded performance (e.g., tracking) characteristics. In an ideal MEMS-based system, each mirror in the array is fabricated identically, and ideally synchronous motion of each mirror in the array is achieved (e.g., by an actuator coupled to each mirror) as long as the drive signal is identical to each mirror. However, due to manufacturing and manufacturing process variations, the mirrors may differ slightly in quality and/or size, and thus the same drive signal indicates that each mirror will respond slightly differently, e.g., with poor reflection uniformity across the array and corresponding poor dispersion characteristics.
Aspects of the present invention are directed to solving the problem of synchronizing the motion (e.g., rotation) and direction (tilt) of a mirror array in a micro-electromechanical system based micro-mirror array, particularly where there may be slight variations in mass and/or size between each mirror of the array. Some of the techniques presented herein involve mechanical coupling between mirrors to synchronize motion across an array of mirrors. In some embodiments, a multi-lever mechanical coupling mechanism (using multiple coupling elements) may be used for synchronized motion across the mirror array, as shown and described below with respect to fig. 5A-6B. In a further embodiment, as shown and described below with respect to fig. 7A-8B, levers having a common mechanical connection (coupling element) at each mirror may mechanically synchronize the movement and direction of the mirrors across the array. Although linear arrays and single axis embodiments are presented herein, it should be understood that a two dimensional array of mirrors using a plurality of coupling elements may be used for two dimensional motion and/or multi-array control, as will be discussed further below.
Exemplary System Environment for some embodiments
FIG. 1 illustrates an exemplary vehicle 100 using a LiDAR-based detection system according to some embodiments of the present application. The vehicle 100 may include a
In some embodiments, a rotating mirror system (e.g., LiDAR module 102) may be used that may allow a single laser to align an object over 360 degrees at high rotation rates (e.g., 500-. The point cloud data may estimate, for example, the distance, size, and location of objects relative to the LiDAR system, often with high fidelity (e.g., within 2 cm). In some embodiments, the third dimension (e.g., height) may be performed in a number of different ways. For example, a rotating mirror system (or other suitable apparatus) may be moved up and down (e.g., on a gimbal or other actuation device) to increase the field of view (FOV) of the scan. Although not shown or discussed further, it should be understood that other LiDAR systems may also be used to form the point cloud, and that novel aspects of the various threshold-adjusted detection schemes described herein may be incorporated. For example, some scanning implementations may employ solid state or flash memory based LiDAR units, which may be configured to scan 2D focal plane areas. Those of ordinary skill in the art, with the benefit of the present disclosure, will appreciate numerous alternative embodiments and variations therefrom.
Referring again to FIG. 1, the
FIG. 2 illustrates an example of light steering using a LiDAR based system according to some embodiments of the present application. . The
The collimated pulsed light 218 may be incident on a
The
Micro-mirror array based on micro-electro-mechanical system
In the following embodiments, numerous micro-electromechanical systems are presented that include micro-mirror array structures that can be integrated with the LiDAR systems described above. Microelectromechanical systems may be described as a class of micro (e.g., sub-micron to millimeter-sized) mechanical and electromechanical elements that may be formed into various devices and structures using microfabrication techniques. The complexity of mems devices can range from simple static structures without moving elements to highly complex electromechanical systems with moving elements that can be controlled by integrated microelectronics. Some moving functional elements may include transducers, such as microsensors and microactuators. In some aspects of the invention, microactuators may be used to actuate coupling elements that mechanically couple and synchronize micromirrors in an array, at least as described further below with respect to fig. 5A-8. In some embodiments, the MEMS micromirror arrays described herein can be integrated on a common silicon substrate along with integrated circuitry (e.g., microelectronics) that includes circuitry that can control the micromirror array. Some typical fabrication processes may include Complementary Metal Oxide Semiconductor (CMOS) processes, bipolar CMOS (bicmos) processes, and the like. Although a single substrate embodiment is shown and described herein, it is understood that a multi-substrate system (e.g., an array of mirrors on different substrates) is possible, as will be appreciated by one of ordinary skill in the art.
In contrast to an arrangement (e.g., as shown in fig. 2) in which the light guide transmitter uses a single mirror with two rotational axes to provide two ranges of projection angles to form the FOV, some embodiments may use first and second (or an array of first and second) rotating mirrors, each having a single but orthogonal rotational axis, to provide two ranges of projection angles to form the FOV. Such an arrangement may improve reliability and accuracy, and may reduce actuation power while providing the same or higher FOV and dispersion.
Fig. 3-4 illustrate an
In some embodiments, each mirror in the array of first rotating mirrors 302(a) (e.g., first rotating mirror 302(a)) may rotate about a
The
Synchronization of MEMS micromirror array using mechanical coupling elements
FIGS. 5A-5F illustrate exemplary first-class coupled synchronous linear arrays of micromirrors operating under a range of motion according to some embodiments of the present application. The micro mirror array 500 can be integrated into a larger micro-electromechanical system structure, such as the
In the following MEMS micromirror arrays, the actuators configured on the mirror axes (e.g., similar to
Referring to FIG. 5A, only two mirrors of a first type of coupled synchronous linear array of micro mirrors 500 of a first type in a micro electro mechanical system are shown, although any number of mirrors may be employed. For example, FIG. 3 shows 4 mirrors in a linear array, FIG. 4 shows 3 mirrors in a linear array, and FIGS. 5B-D show 6 mirrors in a linear array. More or fewer mirrors may be used, as well as multiple linear arrays of mirrors. Although the mirrors shown herein are rotated along a single axis (e.g., axis 536), it should be understood that some embodiments may incorporate mirrors having two axes or be rotated across a one-or two-dimensional array. The techniques and structures described herein may be applied in a dual-axis embodiment, as would be understood by one of ordinary skill in the art having the benefit of this disclosure.
Referring to FIG. 5A, a micro mirror array 500 can comprise a
In FIG. 5A, the
The
In some embodiments, the coupling location may provide a pivot/rotation point for the coupling element. For example, as shown in fig. 5B-5D, the coupling element rotates in the coupled position. The rotational axis for the coupling element can be constructed perpendicularly with respect to the
In some embodiments, support hinges 539(1) and 539(2) may couple their respective mirror elements to the
The
As described above, the MEMS device can include multiple actuators to rotate/orient individual micromirrors in the array, to control one or more coupling elements (e.g., to control a rotation control element at
Fig. 5E shows an example of an integral mirror element with an integrated coupling element and hinge structure. These structures may be arranged in the same plane (as shown) or in different planes. The manner in which the hinge structures and coupling elements can be bent is shown, for example, in labeled boxes a and B, respectively. The labeling box B shows how to rotate the coupling element on the coupling element support structure ("coupling element support"), as described below. In this case, the coupling element support can also be part of a unitary structure and be manufactured in the same way. FIG. 5F shows another embodiment of a mirror structure having a different method of forming the coupling element. The labeled boxes and arrows in fig. 5F show how the coupling element and hinge support rotate and flex as the mirror element rotates.
FIGS. 6A-6B illustrate simplified functional diagrams of exemplary micromirror-coupled synchronous linear arrays of FIGS. 5A-5C according to some embodiments of the present application. In particular, fig. 6A shows the mirror element synchronously rotated at a first deflection angle (e.g., a positive deflection of about 45 degrees), and fig. 6B shows the mirror element synchronously rotated at a second deflection angle (e.g., a negative deflection of about (-)45 degrees). In FIG. 6A, as mirror 520(1) is rotated to a first deflection angle,
FIGS. 7A-7D illustrate a second type of synchronous linear array coupled to a micro mirror array 700 in an exemplary micro electro-mechanical system according to some embodiments of the present application. The micro mirror array 700 can be integrated into a larger micro-electromechanical system structure, such as the
Referring to FIG. 7A, only two micromirrors of the first type of synchronized micromirror of the first type of coupled micromirror array 500 are shown in the MEMS, although any number of micromirrors may be employed. More or fewer micromirrors can be used, as well as multiple linear arrays of micromirrors. Although the mirrors shown herein are rotated along a single axis (e.g., axis 736), it should be understood that some embodiments may incorporate mirrors having two axes or be rotated across a one-or two-dimensional array. The techniques and structures described herein may be applied in a dual-axis embodiment, as would be understood by one of ordinary skill in the art having the benefit of this disclosure.
In FIG. 7A, a micro mirror array 700 can comprise a support frame 710 and at least two mirror elements 720, the at least two mirror elements 720 being arranged in an end-to-end, longitudinal linear array within the support frame. As shown, at least two mirror elements are defined by a length L and a width W, wherein the longitudinal arrangement corresponds to linear alignment of the mirror elements along line 701. The at least two elements in fig. 7A include a first mirror element 720(1) and a second mirror element 720(2), wherein the second mirror element is adjacent to and linearly aligned with the first mirror element 720(1) (e.g., collinear with line 501). Each of the plurality of mirror elements 720 can be rotated on a rotational axis 736 that is perpendicular to a line (e.g., line 701) defined by the linear array of at least two mirror elements. For example, the rotational axis 736 of each mirror element can be parallel to a line defining the width W. In some embodiments, similar to the embodiments of fig. 5A-6B, the axis of rotation 736 of each mirror element can divide the corresponding mirror element into a first portion and a second portion. Alternatively, as shown in fig. 7B-D, the different rotation axis 736(B) may be configured to be closer to the edge. In some embodiments, some or all of the at least two mirror elements may be mechanically connected together using a coupling element to facilitate mechanically synchronized rotation of the at least two mirror elements. In some embodiments, the coupling element may be rotated by an actuator that drives the coupling element. Alternatively or additionally, the coupling element may not be driven by an actuator, and rotation of the mirror (e.g., 738A) by one or more actuator pairs of one or more mirrors may indirectly cause the coupling element to rotate, and due to its fixed and rotatable coupling with each mirror element in the array (or a subset thereof), the other mirror elements will rotate synchronously and equally.
In fig. 7A, a coupling element 730 may be coupled to each mirror element at a coupling location 732. The relative position of each mirror element may be at the same position, e.g., the coupling position 732(1) of mirror element 720(1) is at the same distance from the mirror element rotation axis 736(1) or rotation axis 736(1) (B), because the coupling position 732(2) from mirror element 720(2) is from rotation axis 736(2) or rotation axis 736(2) (B). For example, the length of the micromirror can be about 1mm, with the alternative position being about 0.2mm from the
In some embodiments, the coupling location may provide a pivot/rotation point for the coupling element. For example, as shown in fig. 7B-7D, the coupling element rotates at a coupling position on axis 762. The rotational axis of the coupling element can be configured to be perpendicular to the rotational axis 736 (or rotational axis 736(b)) of the respective mirror element. The support frame 710 is shown as a lattice or lattice-type structure, however, the support frame 710 can be configured in any suitable manner such that the array of micro mirrors 720 can be arranged therein and operate within an unobstructed range of motion (see, e.g.,
In some embodiments, the support hinges may couple their corresponding mirror elements to the support frame 710, as described above with respect to fig. 5A. The support hinges may be configured along respective rotation axes for rotation of the mirror elements, which are coupled to the first mirror element and the second mirror element and may cause rotation of the first mirror element and the second mirror element along the rotation axes. The support hinge may be flexible (e.g. a torsion bar) and may deform as the mirror element rotates. In some embodiments, the support hinge, the support frame, the mirror element, and the coupling element may be a continuous, unitary structure on a common substrate (e.g., a semiconductor substrate). For example, the structure may be formed by a semiconductor fabrication process (e.g., etching, photolithography, etc.) and may be one integral structure formed on a common plane, for example, as shown in fig. 5A, 5E-F, 7A, and 7E. Typical dimensions are shown in fig. 5B-5D (in the millimeter range), but other dimensions are possible.
As described above, the MEMS device can include multiple actuators to rotate/orient individual micromirrors in the array, control coupling elements, or both. In some embodiments, the one or more processors may be coupled with (from an external computing device) or integrated with (e.g., fabricated on the same common semiconductor substrate)
Fig. 7E shows an example of at least two mirror elements 790(1, 2) with an integrated coupling element 794, the integrated coupling element 794 being coupled with each corresponding mirror element at 793(1, 2), and the hinge structures (791(1, 2) and 792(1, 2)) being configured as a unitary structure. These structures may be arranged in the same plane (as shown) or in different planes. The manner in which the hinge structure and coupling element can be bent may be similar to the examples shown in fig. 5E-F. As shown in fig. 7B-7D, the axis of rotation shown in fig. 7E can be in the center of the mirror element (bisecting the mirror element) or on one side (shown in dashed line 795). Some embodiments may have a groove for the hinge structure to keep the hinge and coupling element 794 out of contact, particularly if the structures are on the same plane (e.g., in a unitary structure etched from the same substrate, as described above).
FIGS. 8A-8B illustrate simplified functional diagrams of exemplary micromirror-coupled synchronous linear arrays of FIGS. 7A-7C according to some embodiments of the present application. In particular, fig. 8A shows the mirror element synchronously rotated at a first deflection angle (e.g., zero deflection), and fig. 8B shows the mirror element synchronously rotated at a second deflection angle (e.g., about +45 degrees positive deflection). In FIG. 8B, as described above, when mirror 720(1) is rotated from a first deflection angle to a second deflection angle, coupling element 730 synchronizes and equally rotates the other mirrors in the array. That is, each mirror 720 may rotate on its corresponding axis 736. Coupling element 730 may be coupled to each mirror 720 at coupling locations (732) that are equidistant with respect to the rotational axis 736 (or rotational axis 736(b)) of each mirror. The coupling element can be rotated at coupling position 732 on shaft 762. One or more (integrated) mems actuators may be configured to rotate the mirror element at a rotation position 732, to rotate the coupling element at a coupling position 732 to rotate the coupling element at an axis 762, or any combination thereof. In some embodiments, a subset of the mirrors (e.g., less than the total number of mirrors in the array) may have actuators configured to rotate the mirrors or active actuators. Although the illustrated range of motion (e.g., the range of rotation of the mirror and the coupling element) is approximately 90 degrees in total in fig. 7B-D, other ranges are possible as would be understood by one of ordinary skill in the art having the benefit of this application.
Other variations of the systems, devices, and techniques are within the scope of the present application. Accordingly, while the disclosed technology is susceptible to various modifications and alternative constructions, certain illustrated embodiments thereof are shown in the drawings and have been described above in detail. It should be understood, however, that there is no intention to limit the application to the specific form or forms disclosed, but on the contrary, the intention is to cover all modifications, alternative constructions, and equivalents falling within the spirit and scope of the application, as defined by the appended claims. For example, any embodiment, alternative embodiment, etc., and concepts thereof, may be any other embodiment described and/or within the spirit and scope of the application.
The use of the terms "a" and "an" and "the" and similar referents in the context of describing the disclosed embodiments (especially in the context of the following claims) is to be construed to cover both the singular and the plural, unless otherwise indicated herein or clearly contradicted by context. The terms "comprising," "having," "including," and "containing" are to be construed as open-ended terms (i.e., meaning "including, but not limited to,") unless otherwise noted. The term "coupled" is to be understood as partially or fully contained, appended to, or connected together, even if some intervening elements are present. The phrase "based on" is to be understood as open-ended, not limiting in any way, and should be interpreted or otherwise read as "based at least in part on" where appropriate. Recitation of ranges of values herein are merely intended to serve as a shorthand method of referring individually to each separate value falling within the range, unless otherwise indicated herein, and each separate value is incorporated into the specification as if it were individually recited herein. All methods described herein can be performed in any suitable order unless otherwise indicated herein or otherwise clearly contradicted by context. The use of any and all examples, or exemplary language (e.g., "such as") provided herein, is intended merely to better illuminate embodiments of the application and does not pose a limitation on the scope of the application unless otherwise claimed. No language in the specification should be construed as indicating any non-claimed element as essential to the practice of the invention.
Numerous specific details are set forth herein to provide a thorough understanding of claimed subject matter. However, it will be understood by those of ordinary skill in the art that the claimed subject matter may be practiced without these specific details. In other instances, methods, devices, or systems that would be known by one of ordinary skill have not been described in detail so as not to obscure claimed subject matter. The various embodiments illustrated and described are provided by way of example only to illustrate various features of the claims. However, features illustrated and described with respect to any given embodiment are not necessarily limited to the associated embodiment, and may be used or combined with other embodiments illustrated and described. Furthermore, the claims are not intended to be limited by any one exemplary embodiment.
While the present subject matter has been described in detail with respect to specific embodiments thereof, it will be appreciated that those skilled in the art, upon attaining an understanding of the foregoing may readily produce alterations to, variations of, and equivalents to such embodiments. Accordingly, it should be understood that the present application is presented by way of example only, and not limitation, and does not preclude inclusion of such modifications, variations and/or additions to the present subject matter as would be readily apparent to one of ordinary skill in the art. Indeed, the methods and systems described herein may be embodied in a variety of other forms; furthermore, various omissions, substitutions and changes in the form of the methods and systems described herein may be made without departing from the spirit of the application. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the application.
While this application provides some example embodiments and applications, other embodiments that are apparent to those of ordinary skill in the art, including embodiments that do not provide all of the features and advantages set forth herein, are also within the scope of this application. Accordingly, the scope of the present application is intended to be defined only by reference to the appended claims.
Conditional language, such as "may," "might," "may," "for example," and the like, as used herein, are generally intended to convey that certain examples include, and other examples do not include, certain features, elements and/or steps unless specifically stated otherwise, or otherwise understood in the context of use. Thus, such conditional language is not generally intended to imply that a function, element, and/or step is required in any way by one or more examples or that one or more examples must include a routine for determining whether such feature, element, and/or step is included or is to be performed in any particular example, with or without author input or prompting.
The terms "comprising," "including," "having," and the like, are synonymous and are included in an open-ended fashion, and do not exclude other elements, functions, acts, operations, and the like. Also, to the extent that the term "or" is used in an inclusive sense (rather than an exclusive sense), such that when used, for example, to connect a list of elements, the term "or" means one, some or all of the elements in the list. In this document, the use of "adapted to" or "configured to" is an open and inclusive language and does not exclude devices adapted to or configured to perform additional tasks or steps. In addition, the use of "based on" is open-ended and inclusive in that, in fact, a process, step, calculation, or other operation that is based on one or more referenced conditions or values may be based on other conditions or values besides those listed. Likewise, the use of "based at least on" is open and inclusive, as in practice a process, step, calculation, or other action that is "based at least in part on" one or more conditions or process values may in fact be based on conditions other than those listed. The headings, lists, and numbers included herein are for ease of description only and are not meant to be limiting.
The various features and processes described above may be used independently of one another or may be combined in various ways. All possible combinations and sub-combinations are intended to fall within the scope of the present application. Additionally, certain method or process blocks may be omitted in some embodiments. The methods and processes described herein are also not limited to any particular order of execution and the associated blocks or states may be executed in other suitable orders. For example, described blocks or states may be performed in an order different than that specifically disclosed, or multiple blocks or states may be combined into a single block or state. The exemplary blocks or states may be performed serially, in parallel, or in other manners. Blocks or states may be added to or removed from the disclosed examples. Similarly, the example systems and components described herein may be configured differently than described. For example, elements may be added, removed, or rearranged as compared to the disclosed examples.