阅读说明：本技术 一种气相沉积炉用硅棒柔性夹持机构 (Silicon rod flexible clamping mechanism for vapor deposition furnace ) 是由 邓文汉 于 2020-06-05 设计创作，主要内容包括：本发明涉及多晶硅生产用设备技术领域,且公开了一种气相沉积炉用硅棒柔性夹持机构,包括底座,所述底座的顶部固定安装有负压产生箱,所述负压产生箱的顶部固定安装有活塞筒,所述负压产生箱的顶部开设有负压槽,所述负压产生箱的内部开设有负压腔,所述活塞筒通过负压槽与负压腔内部连通,所述底座内部流动有冷却液体,所述活塞筒内部滑动连接有活塞块,本发明通过设置有活塞筒、活塞块以及负压产生箱,使得硅芯在受到沉积炉内气流影响倾倒时,使得硅芯与夹套向一侧倾斜,从而防止硅芯与夹套因固定连接产生较大的剪切力,使得硅芯与夹持机构接触位置不会受到剪切力的影响,从而不会出现折断倒棒现象发生而意外停炉。(The invention relates to the technical field of equipment for producing polycrystalline silicon, and discloses a silicon rod flexible clamping mechanism for a vapor deposition furnace, which comprises a base, wherein a negative pressure generating box is fixedly arranged at the top of the base, a piston cylinder is fixedly arranged at the top of the negative pressure generating box, a negative pressure groove is formed at the top of the negative pressure generating box, a negative pressure cavity is formed in the negative pressure generating box, the piston cylinder is communicated with the negative pressure cavity through the negative pressure groove, cooling liquid flows in the base, and a piston block is connected in the piston cylinder in a sliding manner. Thereby avoiding the accidental furnace shutdown caused by the phenomenon of breaking and falling the rod.)

1. The utility model provides a silicon rod flexible fixture for vapor deposition furnace, includes base (1), its characterized in that: the negative pressure generating box (2) is fixedly installed at the top of the base (1), the piston cylinder (3) is fixedly installed at the top of the negative pressure generating box (2), a negative pressure groove (4) is formed in the top of the negative pressure generating box (2), a negative pressure cavity (15) is formed in the negative pressure generating box (2), the piston cylinder (3) is communicated with the inside of the negative pressure cavity (15) through the negative pressure groove (4), cooling liquid flows in the base (1), a piston block (5) is connected in the piston cylinder (3) in a sliding mode, the top of the piston block (5) extends to the upper portion of the piston cylinder (3) and is fixedly connected with a jacket (6), a silicon core (7) is fixedly clamped in the jacket (6), a splitter plate (10) is fixedly installed at the bottom of the base (1), and a feeding box (8) is fixedly installed at the bottom of the splitter plate (10), the bottom of the feeding box (8) is fixedly provided with a feeding hole (13).

2. The silicon rod flexible clamping mechanism for the vapor deposition furnace as set forth in claim 1, wherein: intercommunication mouth (9) have been seted up at the top of feed box (8), the diffluence vent of seting up on intercommunication mouth (9) and flow distribution plate (10) is corresponding, the top fixed mounting of flow distribution plate (10) has flow valve (11), the import and the diffluence vent of flow valve (11) cooperate, the export fixed mounting at flow valve (11) top has inlet pipe (12), the top of inlet pipe (12) is passed base (1) and is extended to the top of base (1), the bottom fixed mounting of piston cylinder (3) inner chamber has pressure sensor (14), the quantity in negative pressure chamber (15) is six, six negative pressure chamber (15) are fan-shaped range of angle etc.

Technical Field

The invention relates to the technical field of equipment for producing polycrystalline silicon, in particular to a silicon rod flexible clamping mechanism for a vapor deposition furnace.

Background

At present, the production process of the polycrystalline silicon internationally mainly comprises an improved Siemens method and a silane method, wherein the Siemens method is used for producing the rod-shaped polycrystalline silicon by a vapor deposition method. The process comprises the steps of synthesizing SiHCb from industrial silicon, removing impurity elements by purifying SiHCl3, depositing SiHCl3 in a reduction furnace under the atmosphere of H2 to obtain high-purity polysilicon, and separating tail gas H2, SiHCl3, SH2Cl, SiCl4 and HCl discharged from the polysilicon reduction furnace for recycling. In the process of growing the polysilicon, the silicon core needs to be well fixed to prevent the silicon core from displacement so as to ensure that the process of growing the polysilicon is smoothly completed.

Disclosure of Invention

Aiming at the defects of the silicon rod clamping mechanism for the existing vapor deposition furnace in the use process, the invention provides the silicon rod flexible clamping mechanism for the vapor deposition furnace, which has the advantage that the contact position of a silicon core and the clamping mechanism is not influenced by shearing force to break, and solves the problems in the background art.

The invention provides the following technical scheme: the utility model provides a silicon rod flexible fixture for vapor deposition furnace, includes the base, the top fixed mounting of base has the negative pressure to produce the case, the negative pressure produces the top fixed mounting of case and has a piston section of thick bamboo, the negative pressure produces the top of case and has seted up the negative pressure groove, the negative pressure produces the inside negative pressure chamber of having seted up of case, the piston section of thick bamboo passes through negative pressure groove and negative pressure intracavity portion intercommunication, the base internally flowing has cooling liquid, the inside sliding connection of piston section of thick bamboo has the piston piece, the top of piston piece extends to the top and the fixedly connected with clamp cover of piston section of thick bamboo, the inside centre gripping of clamp cover is fixed with the silicon core, the bottom fixed mounting of base has the flow distribution plate, the bottom fixed mounting of flow distribution plate has the feeding case.

Preferably, the intercommunication mouth has been seted up at the top of feeding case, the diffluence vent of seting up on intercommunication mouth and the diffluence plate is corresponding, the top fixed mounting of diffluence plate has the flow valve, the import and the diffluence vent of flow valve cooperate, the export fixed mounting at flow valve top has the inlet pipe, the top of inlet pipe is passed the base and is extended to the top of base, the bottom fixed mounting of piston cylinder inner chamber has pressure sensor, the quantity in negative pressure chamber is six, six the negative pressure chamber is fan-shaped range of equidirectional angle.

The invention has the following beneficial effects:

1. according to the invention, the piston cylinder, the piston block and the negative pressure generating box are arranged, so that when the silicon core is inclined under the influence of airflow in the deposition furnace, the silicon core and the jacket are inclined towards one side, and thus, the silicon core and the jacket are prevented from generating larger shearing force due to fixed connection, the contact position of the silicon core and the clamping mechanism is not influenced by the shearing force, and the phenomenon of breaking and falling the silicon core is avoided, so that the accidental furnace shutdown is avoided.

2. According to the invention, the piston cylinder is communicated with the negative pressure generating box through the negative pressure groove, so that gas in the negative pressure cavity is input into the piston cylinder through the negative pressure groove, the temperature in the piston cylinder is lower than the temperature outside the piston cylinder, the pressure in the piston cylinder is lower than the pressure outside the piston cylinder, negative pressure is generated in the piston cylinder, meanwhile, the cooling water is used for cooling the base for equipment, the silicon core and the jacket are flexibly supported by the negative pressure of temperature difference in the piston cylinder, and therefore, the function of flexibly supporting the silicon core and the jacket can be realized without adding external equipment.

3. According to the invention, the flow valve and the feeding pipe are arranged, a large amount of polysilicon is accumulated on the surface of the silicon core above the jacket through a reduction reaction, if the air inflow is increased through the production valve outside the silicon core, and the air inflow is reduced by controlling the flow valve on the side with more polysilicon, so that the side with more polysilicon of the silicon core is slightly reacted with the mixed gas, and the side with less polysilicon of the silicon core is greatly reacted with the mixed gas, so that the cross-sectional area of the outer side of the silicon core tends to be balanced, and the phenomenon that the silicon core and the jacket incline due to the unbalanced growth of the silicon core, and the silicon core topples over due to the generated inclination can be.

Drawings

FIG. 1 is a schematic view of the internal structure of the present invention;

FIG. 2 is a top view of the present invention;

FIG. 3 is a schematic top view of the negative pressure generating tank of the present invention;

fig. 4 is a schematic view of the internal structure of the piston cylinder according to the present invention.

In the figure: 1. a base; 2. a negative pressure generating tank; 3. a piston cylinder; 4. a negative pressure tank; 5. a piston block; 6. a jacket; 7. a silicon core; 8. a feeding box; 9. a communication port; 10. a flow distribution plate; 11. a flow valve; 12. a feed pipe; 13. a feed inlet; 14. a pressure sensor; 15. a negative pressure chamber.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-4, a silicon rod flexible clamping mechanism for a vapor deposition furnace comprises a base 1, a negative pressure generating box 2 is fixedly installed on the top of the base 1, a piston cylinder 3 is fixedly installed on the top of the negative pressure generating box 2, a negative pressure groove 4 is formed on the top of the negative pressure generating box 2, a negative pressure cavity 15 is formed in the negative pressure generating box 2, the piston cylinder 3 is communicated with the negative pressure cavity 15 through the negative pressure groove 4, cooling liquid flows in the base 1, a piston block 5 is connected in the piston cylinder 3 in a sliding manner, the top of the piston block 5 extends to the upper side of the piston cylinder 3 and is fixedly connected with a jacket 6, a silicon core 7 is fixedly clamped in the jacket 6, a splitter plate 10 is fixedly installed on the bottom of the base 1, a feeding box 8 is fixedly installed on the bottom of the splitter plate 10, a feeding port 13 is fixedly installed on the bottom of the, the cooling liquid in the base 1 exchanges the temperature of the gas in the negative pressure cavity 15, so that the temperature in the piston cylinder 3 is lower than the temperature outside the piston cylinder 3, the pressure in the piston cylinder 3 is lower than the pressure outside the piston cylinder 3, and the negative pressure is generated in the piston cylinder 3.

At present, as mentioned in the foregoing background art and mentioned that the silicon core and the clamping mechanism are susceptible to the influence of the shearing force to cause the phenomenon of breaking and falling of the rod, the present application improves the connection form between the jacket 6 and the base into the flexible connection between the piston cylinder 3 and the piston block 5 under the action of negative pressure, when the jacket 6 and the silicon core 7 are in an inclined state due to the uneven growth of the polysilicon on the surfaces thereof, the piston blocks 5 below the jacket 6 can be linked to cause uneven pressure to drive the jacket 6 and the silicon core 7 to integrally and synchronously incline, so as to avoid the occurrence of the condition that the shearing stress at the joint of the jacket 6 and the silicon core 7 is preferentially loaded, thereby protecting the safety of the joint.

Wherein, intercommunication mouth 9 has been seted up at the top of feed box 8, the reposition of redundant personnel hole of seting up on intercommunication mouth 9 and the flow distribution plate 10 is corresponding, the top fixed mounting of flow distribution plate 10 has flow valve 11, flow valve 11's import and reposition of redundant personnel hole cooperate, the export fixed mounting at flow valve 11 top has inlet pipe 12, base 1 is passed and extends to base 1's top at inlet pipe 12's top, the bottom fixed mounting of 3 inner chambers of piston tube has pressure sensor 14, pressure sensor 14 is used for detecting the inside negative pressure numerical value of 3 piston tubes, the quantity of negative pressure chamber 15 is six, six negative pressure chambers 15 are fan-shaped range of equidirectional angle, inlet pipe 12 is six with the quantity of piston tube 3, and be annular array. Each negative pressure cavity 15 corresponds to a piston cylinder 3 and a negative pressure groove 4, when one side of polysilicon produced outside a silicon core 7 is too much, the side of the silicon core 7 with too much polysilicon is caused to be inverted, so that flexible support at the position of the piston cylinder 3 corresponding to the inverted side of the silicon core 7 is changed, a piston rod in the piston cylinder 3 is moved upwards, negative pressure change is generated in the negative pressure cavity 15, according to pressure difference fed back by a plurality of pressure sensors 14, the air injection rate of a feeding pipe 12 is adjusted through a flow valve 11, namely, the air injection rate of the flow valve 11 at the position of the negative pressure cavity 15 accelerating negative pressure is increased, and the air injection rate of the flow valve 11 at the position of a pressurized negative pressure cavity 15 is decreased, so that the air inlet balance of each point is adjusted according to the pressure balance of the pressure sensors 14, when the pressure sensors 14 work, the pressure critical parameter value floating range exceeds 4.5%, namely, action, therefore, the polysilicon on the outer side of the silicon core 7 grows uniformly, and the problem that the silicon core 7 and the jacket 6 incline due to unbalanced growth of the silicon core 7 and the phenomenon that the silicon core 7 topples over due to excessive inclination can be effectively solved.

The using method of the invention is as follows: before producing polysilicon, fixing a silicon core 7 in a jacket 6, then, when producing polysilicon, introducing a cooling liquid in a base 1 (the cooling liquid can adopt the cooling liquid of the current deposition furnace equipment for a silicon rod base) to carry out temperature change on gas in a negative pressure cavity 15 in a negative pressure generating box 2, so that the gas in the negative pressure cavity 15 is input into a piston cylinder 3 through a negative pressure groove 4, at the moment, the temperature in the piston cylinder 3 is lower than the temperature outside the piston cylinder 3, the pressure in the piston cylinder 3 is lower than the pressure outside the piston cylinder 3, at the moment, negative pressure is generated in the piston cylinder 3, so that the bottom end of a piston block 5 is adsorbed at the bottom of an inner cavity of the piston cylinder 3, at the moment, a pressure sensor 14 detects a pressure value, records and transmits the pressure value to an external instrument, simultaneously introduces mixed gas into a feeding box 8 from a feeding port 13, and then inputs the mixed gas into a flow distribution plate, then evenly inputting the polysilicon into a feeding pipe 12 through a flow valve 11 through a flow dividing hole on a flow dividing plate 10, finally spraying the polysilicon from the top of the feeding pipe 12, when a large amount of polysilicon is accumulated on the surface of a silicon core 7 positioned above a jacket 6 through a reduction reaction, if one side of the polysilicon produced outside the silicon core 7 is too much, the silicon core 7 is inclined towards the side with too much polysilicon, at the moment, the silicon core 7 drives the jacket 6 to incline together, the jacket 6 drives a piston block 5 at the side with too little polysilicon to move upwards along the inner wall of a piston cylinder 3, so that accelerating negative pressure is generated in a negative pressure cavity 15, the negative pressure value detected by a pressure sensor 14 at the side with too little polysilicon is reduced, meanwhile, pressurization is generated at the negative pressure cavity 15 at the side with too much polysilicon, the air injection rate of the flow valve 11 at the side with too much polysilicon is reduced, and meanwhile, an operator controls the flow valve, therefore, one side with a large amount of polysilicon of the silicon core 7 reacts with the mixed gas in a small amount, and one side with a small amount of polysilicon of the silicon core 7 reacts with the mixed gas in a large amount, so that the cross-sectional area of the outer side of the silicon core 7 tends to be balanced, the jacket 6 and the silicon core 7 are in a balanced state again, when the pressure sensor 14 detects that the negative pressure inside the negative pressure cavity 15 tends to be stable step by step, and at the moment, an operator readjusts the flow valve 11 to be in a flow equalizing state again.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.