Arrangement of a plurality of charged particle beams
阅读说明:本技术 多个带电粒子束的装置 (Arrangement of a plurality of charged particle beams ) 是由 任伟明 刘学东 胡学让 陈仲玮 于 2016-07-21 设计创作,主要内容包括:提出了一种用于以高分辨率和高生产能力观察样本的多束装置。在该装置中,源转换单元通过使来自一个单电子源的平行初级电子束的多个小束偏转来形成该单电子源的多个且平行的图像,并且一个物镜将多个偏转的小束聚焦到样本表面上,并在样本表面上形成多个探测点。可移动聚光透镜用于使初级电子束准直,并改变多个探测点的电流,预小束形成部件弱化初级电子束的库仑效应,并且源转换单元通过最小化并补偿物镜和聚光透镜的离轴像差来最小化多个探测点的尺寸。(A multi-beam apparatus for observing samples with high resolution and high throughput is presented. In the apparatus, a source conversion unit forms a plurality of parallel images of a single electron source by deflecting a plurality of beamlets of parallel primary electron beams from the single electron source, and an objective lens focuses the plurality of deflected beamlets onto a sample surface and forms a plurality of probe points on the sample surface. The movable condenser lens is used to collimate the primary electron beam and to change the current of the plurality of probe points, the pre-beamlet formation section weakens the coulomb effect of the primary electron beam, and the source conversion unit minimizes the size of the plurality of probe points by minimizing and compensating for off-axis aberrations of the objective lens and the condenser lens.)
1. An apparatus for reducing aberrations of beamlets of a multibeam apparatus, the apparatus comprising:
a plurality of electron optical elements configured to direct a plurality of beamlets generated by the multi-beam apparatus towards a main optical axis of the multi-beam apparatus at different deflection angles, wherein the deflection angles of the plurality of beamlets are independently set to reduce aberrations of a plurality of detection points formed by the plurality of beamlets, respectively; and
a plurality of beam limiting openings configured to limit current to the plurality of probe points.
2. The apparatus of claim 1, wherein the plurality of electron optical elements are below and aligned with the plurality of beam limiting openings, respectively.
3. The apparatus of claim 2, wherein the plurality of beam limiting openings are configured to form the plurality of beamlets from substantially parallel beams generated by the multi-beam apparatus.
4. The apparatus of claim 2, further comprising a plurality of pre-curved micro-deflectors over the plurality of beam-limiting openings, respectively, configured to:
forming the plurality of beamlets from substantially parallel beams generated by the multi-beam apparatus; and
directing the plurality of beamlets to be perpendicularly incident into the plurality of beam-limiting openings.
5. The apparatus of claim 2, wherein each of the plurality of electron optical elements is a 4-pole lens.
6. The apparatus of claim 2, wherein the plurality of electron optical elements compensate for at least one of field curvature, astigmatism or distortion aberrations of the plurality of probe points to further reduce the size and distortion of the plurality of probe points.
7. The apparatus of claim 6, wherein each of the plurality of electron optical elements is an 8-pole lens.
8. The apparatus of claim 7, wherein each of the plurality of electron optical elements comprises one microlens and two 4-pole lenses aligned with and positioned along the optical axis of each electron optical element, and the azimuth difference of the two 4-pole lenses is 45 °.
9. The apparatus of claim 8, wherein, for said each electron optical element of said plurality of electron optical elements, one 4-pole lens of said two 4-pole lenses is on a beamlet exit side and a corresponding beamlet is deflected by said one 4-pole lens.
10. The apparatus of claim 9, wherein the landing energy of the plurality of beamlets is changed by changing the electrical potential of the plurality of beamlets.
11. The apparatus of claim 2, further comprising a condenser lens between the plurality of beam limiting openings and the plurality of electron optical elements configured to focus the plurality of beamlets to be directed by the plurality of electron optical elements, respectively, towards the primary optical axis.
12. The apparatus of claim 1, wherein the plurality of electron optical elements are respectively above and aligned with the plurality of beam limiting openings.
13. The apparatus of claim 12, wherein the plurality of electron optical elements are configured to form the plurality of beamlets from substantially parallel beams generated by the multi-beam apparatus.
14. A method for reducing aberrations of beamlets of a multi-beam apparatus, the method comprising:
generating a plurality of beamlets of charged particles;
directing the plurality of beamlets at different deflection angles towards a main optical axis of the multi-beam arrangement using a plurality of electron optical elements; and
the deflection angles are independently set to reduce aberrations of a plurality of detection points respectively formed by the plurality of beamlets.
15. The method of claim 14, further comprising:
compensating for at least one of field curvature, astigmatism or distortion aberration of the plurality of probe points using the plurality of electron optical elements to further reduce size and distortion of the plurality of probe points.
16. The method of claim 14, wherein generating the plurality of beamlets of charged particles comprises:
forming the plurality of beamlets from substantially parallel beams generated by the multi-beam apparatus using the plurality of electron optical elements.
17. The method of claim 14, wherein generating the plurality of beamlets of charged particles comprises:
forming the plurality of beamlets from substantially parallel beams generated by the multi-beam apparatus using a plurality of beam limiting openings respectively over and aligned with the plurality of electron optical elements.
18. The method of claim 14, wherein generating the plurality of beamlets of charged particles comprises:
forming the plurality of beamlets from substantially parallel beams generated by the multi-beam apparatus using a plurality of pre-curved micro-deflectors over and aligned with the plurality of electron optical elements, respectively.
19. The method of claim 18, further comprising:
directing the plurality of beamlets to be perpendicularly incident into a plurality of beam limiting openings respectively above and aligned with the plurality of electron optical elements.
20. The method of claim 14, further comprising:
changing landing energy of the plurality of beamlets by changing electrical potential of the plurality of beamlets.
Technical Field
The present invention relates to a charged particle device having a plurality of charged particle beams. More particularly, the present invention relates to an apparatus for simultaneously acquiring images of a plurality of scanned regions of an observed region on a sample surface using a plurality of charged particle beams. Thus, the apparatus can be used in the semiconductor manufacturing industry to inspect and/or inspect defects on wafers/masks with high resolution and high throughput.
Background
In order to manufacture semiconductor IC chips, pattern defects and/or unwanted particles (residues) inevitably appear on the wafer and/or the mask during the manufacturing process, which greatly reduces the yield. To meet the increasing demands on IC chip performance, patterns with smaller and smaller critical feature sizes have been employed. Accordingly, conventional yield management tools with beams are becoming increasingly inadequate due to diffraction effects, and yield management tools with electron beams are increasingly being employed. The electron beam has a shorter wavelength than the photon beam, thereby possibly providing excellent spatial resolution. Currently, yield management tools with electron beams employ the principles of Scanning Electron Microscopy (SEM) with a single electron beam, which can therefore provide higher resolution, but fail to provide throughput adequate for high volume production. Although higher and higher currents of a single electron beam can be used to increase throughput, excellent spatial resolution will fundamentally be degraded by Coulomb Effect (Coulomb Effect) with increasing beam current.
In order to alleviate the limitation on the production capacity, instead of using a single electron beam with a large current, a promising solution is to use a plurality of electron beams each having a small current. The multiple electron beams form multiple probe points on a surface of the sample being inspected or observed. Multiple probe points can scan multiple small scanned areas within a large observed area on the sample surface, respectively and simultaneously. The electrons of each probe point generate secondary electrons from the sample surface where they land. The secondary electrons include slow secondary electrons (energy ≦ 50eV) and backscattered electrons (energy close to the landing energy of the electron). Secondary electrons from multiple small scanned areas can be collected separately and simultaneously by multiple electron detectors. Therefore, an image of a large observed region including all small scanned regions can be obtained much faster than an image scanned with a single beam.
The multiple electron beams may each be from multiple electron sources, or from a single electron source. With the former, a plurality of electron beams are generally focused on and scanned over a plurality of small scanned areas within a plurality of columns (columns), respectively, and secondary electrons from each scanned area are detected by one electron detector inside the corresponding column. Thus, the device is commonly referred to as a multi-column device. The multiple columns may be independent, or share a multi-axis magnetic or electromagnetic compound objective lens (such as US8,294,095). The beam spacing between two adjacent beams is typically as large as 30mm to 50mm on the sample surface.
For the latter, the source converting unit virtually changes a single electron source into a plurality of sub-sources. The source conversion unit includes: a beamlet-forming (or beamlet-limiting) part having a plurality of beam-limiting openings, and an image-forming part having a plurality of electron-optical elements. The plurality of beam-limiting openings divide the primary electron beam generated by the single electron source into a plurality of sub-beams or beamlets, respectively, and the plurality of electron-optical elements influence the plurality of beamlets to form a plurality of parallel (virtual or real) images of the single electron source. Each image may be considered to be a sub-source emitting a corresponding beamlet. In order to make more beamlets available, the beamlet spacing is in the order of microns. Naturally, a primary projection imaging system and a deflection scanning unit within a single column are used to project a plurality of parallel images onto a plurality of small scanned areas respectively and scan them respectively. The secondary electron beams from the small scanned areas are directed by a beam splitter into a secondary projection imaging system and then focused by the secondary projection imaging system to be detected by a plurality of detector elements of an electron detection device inside the single column, respectively. The plurality of detection elements may be a plurality of electron detectors placed side by side, or a plurality of pixels of one electron detector. Thus, the device is generally referred to as a multibeam device.
The beamlet forming (or beamlet limiting) part is typically a conductive plate having through holes, and a plurality of the through holes therein function as a plurality of beam limiting openings, respectively. Two methods have been used to form a plurality of parallel images by an image forming unit. For the first approach, each electron optical element has an electrostatic microlens (such as US7,244,949) that focuses one beamlet and thus forms one real image. For the second approach, each electron optical element has an electrostatic micro-deflector (such as US6,943,349 and the first cross reference) that deflects one beamlet and thus forms one virtual image. The concept of using electrostatic deflectors to form virtual images of Electron sources was used in The Two-Slit Electron Interference experiments known as early as The 1950 s (FIG. 1 of The paper "The Merli-Missiroli-Pozzi Two-Slit Electron-Interference Experiment", published by Rodolfo Rosa in Physics in Peractive, 14(2012) 178-195). The second method is more advantageous for achieving both high throughput and high resolution because the coulomb effect is weaker in the second method than in the first method due to the higher current density of one real image.
In order to reduce the aberrations of the plurality of detection points, the primary projection imaging system basically comprises a transmission lens and an objective lens, and the transmission lens bends the plurality of beamlets to pass through the objective lens as close as possible to the optical axis of the objective lens. For a source conversion unit using the second method, as proposed in the first cross reference and shown in fig. 1, the bending function of the transfer lens can be performed by a plurality of micro-deflectors, and thus the transfer lens can be eliminated. Without a transmission lens, the projection imaging system would be simplified and easy to manufacture and operate.
In fig. 1, an
If the three beamlets are deflected close to or through the front focus of the
The beam limiting opening limits the current of the three probing points and the current is varied by tuning the focusing power of the condenser lens 110 to vary the current density of the
It is therefore desirable to provide a multibeam device that does not have or has fewer of the aforementioned problems, and thus can provide high image resolution and high throughput. In particular, there is a need for a multi-beam apparatus that can inspect and/or inspect defects on wafers/masks with high resolution and high throughput to match the blueprints of the semiconductor manufacturing industry.
Disclosure of Invention
It is an object of the present invention to provide a new multi-beam apparatus that provides both high resolution and high throughput for observing samples under flexibly changing observation conditions, such as current and landing energy of the probe spot, electrostatic field on the sample surface. The apparatus may function as a yield management tool for inspecting and/or verifying defects on wafers/masks in the semiconductor manufacturing industry.
In the apparatus, a condenser collimates or substantially collimates the primary electron beam into a source conversion unit that deflects beamlets of the primary electron beam towards an optical axis of an objective lens, and the objective lens focuses the deflected beamlets onto a surface of a sample being observed, thereby forming probe spots on the surface, wherein deflection angles of the deflected beamlets are adjusted to reduce a size of the probe spots. The currents of the plurality of detection points may be changed by changing one or both of the focusing power and the position of the first main plane of the condenser lens. The source conversion unit may further reduce the size and size difference of the plurality of probe points by compensating for off-axis aberrations of the plurality of probe points. Furthermore, in order to weaken the coulomb effect due to the primary electron beam as much as possible, the beamlet-forming member of the source conversion unit may be placed close to the single electron source, and a pre-beamlet-forming member may be employed close to the single electron source.
Accordingly, the present invention therefore provides a multibeam device comprising: an electron source; a condenser lens below the electron source; a source conversion unit under the condensing lens; an objective lens under the source conversion unit; a deflection scanning unit under the source converting unit; a sample stage below the objective lens; a beam splitter below the source conversion unit; a secondary projection imaging system; and an electronic detection device having a plurality of detection elements. The electron source, condenser lens, and objective lens are aligned with the primary optical axis of the device, and the sample stage holds the sample so that the surface faces the objective lens. The source conversion unit includes a beamlet-forming member having a plurality of beam-limiting openings and an image-forming member having a plurality of electron-optical elements. The electron source generates a primary electron beam along the main optical axis, and the primary electron beam is focused by the condenser lens to become a substantially parallel beam and then incident into the source conversion unit. A plurality of beamlets of the primary electron beam exit from the source conversion unit, which beamlets pass through the plurality of beam limiting openings, respectively, and are deflected by the plurality of electron optical elements towards the main optical axis, and the deflection angles of the plurality of beamlets are different. The deflection scanning unit deflects a plurality of beamlets which are focused by the objective lens onto the surface and form a plurality of probe points on the surface to scan the plurality of probe points respectively over a plurality of scanned regions within an observed region on the surface, and currents of the plurality of probe points are limited by the plurality of beam limiting openings. A plurality of secondary electron beams, respectively generated by a plurality of probe points from a plurality of scanned areas and directed by the beam splitter into the secondary projection imaging system, are focused by the secondary projection imaging system to maintain a plurality of secondary electron beams to be detected by a plurality of detector elements, respectively, each detector element thus providing an image signal corresponding to a scanned area.
In one embodiment, the deflection angles may be independently set to reduce aberrations of the plurality of detection points, respectively. A plurality of electron optical elements are respectively below and aligned with the plurality of beam limiting openings. Each of the plurality of electron optical elements may be a 4-pole lens. The currents of the plurality of detection points are changed by changing the current density of the primary electron beam incident into the source conversion unit using the condensing lens. The apparatus may further include a pre-beamlet formation component having a plurality of beamlet formation apertures above the source conversion unit, wherein the plurality of beamlets pass through the plurality of beamlet formation apertures, respectively, and a majority of electrons outside the plurality of beamlets are cut off.
In this embodiment, the plurality of electron optical elements may compensate for one or more of, or up to all of, field curvature, astigmatism and distortion aberrations of the plurality of probe points to further reduce the size and distortion of the plurality of probe points. Each electron optical element of the plurality of electron optical elements may be an 8-pole lens. Each electron optical element of the plurality of electron optical elements may include one microlens and two 4-pole lenses aligned with and positioned along an optical axis of each element, and the two 4-pole lenses are different in azimuth by 45 °. For each electron optical element of the plurality of electron optical elements, one 4-pole lens of the two 4-pole lenses is on the beamlet exit side, and a corresponding beamlet is deflected by the one 4-pole lens.
In one embodiment, the condenser lens may include a plurality of ring electrodes disposed at different axial positions along and aligned with the primary optical axis, and voltages of the plurality of ring electrodes may be adjusted to vary the current density. In another embodiment, the condenser lens may comprise at least two single magnetic lenses placed at different axial positions along and aligned with the primary optical axis, and the excitation of the at least two single magnetic lenses may be adjusted to change the current density of the primary electron beam incident into the source conversion unit. In yet another embodiment, the condenser lens may include a plurality of ring electrodes and at least one single magnetic lens placed at different axial positions along and aligned with the primary optical axis, and the voltage of the electrodes and the excitation of the at least one single magnetic lens may be adjusted to vary the current density.
The landing energy of the plurality of beamlets on the surface is varied by varying the electrical potential of the surface.
The invention also provides a multibeam apparatus comprising: an electron source; a condenser lens below the electron source; a source conversion unit under the condensing lens; an objective lens under the source conversion unit; a deflection scanning unit under the source converting unit; a sample stage below the objective lens; a beam splitter below the source conversion unit; a secondary projection imaging system; and an electronic detection device having a plurality of detection elements. The electron source, condenser lens, and objective lens are aligned with the primary optical axis of the device, and the sample stage holds the sample so that the surface faces the objective lens. The source conversion unit includes a beamlet-forming member having a plurality of beam-limiting openings and an image-forming member having a plurality of electron-optical elements. The electron source generates a primary electron beam along a primary optical axis, the primary electron beam is focused by the condenser lens, and then the primary electron beam is incident into the source conversion unit at a convergent or divergent angle. The plurality of beamlets of the primary electron beam exit the source conversion unit, pass through the plurality of beam limiting openings, respectively, and are deflected by the plurality of electron optical elements towards the main optical axis. The plurality of beamlets are focused by an objective lens onto the surface and form a plurality of probe spots on the surface. Deflection angles of the plurality of beamlets are independently set to reduce aberrations of the plurality of detection points, respectively, and the deflection scanning unit deflects the plurality of beamlets to scan the plurality of detection points over a plurality of scanned areas within an area to be observed on the surface, respectively. The current of the plurality of probe points is limited by the plurality of beam limiting openings. A plurality of secondary electron beams are generated from the plurality of scanned areas by the plurality of probe points, respectively, and directed into the secondary projection imaging system by the beam splitter. The secondary projection imaging system focuses and holds a plurality of secondary electron beams to be detected by a plurality of detecting elements, respectively, and thus each detecting element provides an image signal corresponding to a scanned area.
The plurality of electron optical elements may compensate for one or more to all of field curvature, astigmatism, and distortion aberrations of the plurality of probe points to further reduce the size and distortion of the plurality of probe points. The currents of the plurality of detection points are changed by adjusting the current density of the primary electron beam incident into the source conversion unit using the condensing lens. A plurality of electron optical elements may be below the plurality of beam limiting openings. The apparatus may also include a pre-beamlet bending component having a plurality of pre-bend micro-deflectors over the plurality of beam limiting openings, respectively. The plurality of pre-curved micro-deflectors may deflect the plurality of beamlets to be perpendicularly incident into the plurality of beam-limiting openings. The apparatus may further include a pre-beamlet formation component having a plurality of beamlet formation apertures above the source conversion unit, wherein the plurality of beamlets pass through the plurality of beamlet formation apertures, respectively, and a majority of electrons outside the plurality of beamlets are cut off.
The invention also provides a multibeam apparatus comprising: an electron source; a beamlet-forming plate providing a plurality of beam-limiting openings below the electron source; a condenser lens under the beamlet-forming plate; a plurality of electron optical elements below the condenser lens; an objective lens under the plurality of electron optical elements; a deflection scanning unit under the plurality of electron optical elements; a sample stage below the objective lens; a beam splitter below the plurality of electron optical elements; a secondary projection imaging system; and an electronic detection device having a plurality of detection elements. The electron source, condenser lens, and objective lens are aligned with the primary optical axis of the device, and the sample stage holds the sample so that the surface faces the objective lens. The electron source generates a primary electron beam along the primary optical axis, the beamlet-forming plate trims the primary electron beam into a plurality of beamlets that pass through a first set of the plurality of through-holes in the beamlet-forming plate, respectively, and the plurality of through-holes function as a plurality of beam-limiting openings of the device. The condenser lens focuses a plurality of beamlets, which are to be deflected by the plurality of electron optical elements, respectively, toward the main optical axis. The plurality of beamlets are focused by the objective lens onto the surface, and a plurality of detection points are formed on the surface, and deflection angles of the plurality of beamlets are independently set to reduce aberrations of the plurality of detection points, respectively. The deflection scanning unit deflects the plurality of beamlets to scan a plurality of probe points over a plurality of scanned areas within an observed area on the surface, respectively, and currents of the plurality of probe points are limited by the plurality of beam limiting openings. A plurality of secondary electron beams are generated from the plurality of scanned areas by the plurality of probe points, respectively, and directed into the secondary projection imaging system by the beam splitter. The secondary projection imaging system focuses and holds a plurality of secondary electron beams to be detected by a plurality of detecting elements, respectively, and thus each detecting element provides an image signal corresponding to a scanned area.
The plurality of beamlets are perpendicularly incident on the plurality of electron optical elements. The plurality of electron optical elements compensate for one or more to all of field curvature, astigmatism, and distortion aberrations of the plurality of probe points to further reduce the size and distortion of the plurality of probe points. In one embodiment, the current of the plurality of beamlets may be varied by adjusting the angular intensity of the electron source. In another embodiment, the current of the plurality of beamlets may be varied by varying the radial size of the plurality of beam-limiting openings. The radial dimension is changed by moving the beamlet forming plate to position the second set of the plurality of through holes in the beamlet forming plate as a plurality of beam limiting openings.
The invention also provides a method for forming a plurality of probe points in an SEM, which comprises the following steps: generating a primary electron beam from an electron source; collimating or substantially collimating the primary electron beam by a condenser lens; trimming the collimated primary electron beam into a plurality of beamlets by a first plate having a first through hole; deflecting the plurality of beamlets at different deflection angles towards an optical axis of the objective lens by the plurality of electron optical elements; and focusing the plurality of deflected beamlets onto the surface of the sample being observed by the objective lens, wherein the plurality of deflected and focused beamlets form a plurality of probe points.
The method may further comprise the steps of: the deflection angles are independently set to reduce the aberrations of the plurality of detection points, respectively. The method may further comprise the steps of: one or more up to all of the field curvature, astigmatism and distortion aberrations of the plurality of probe points are compensated by the plurality of electron optical elements. The method may further comprise the steps of: the current density of the collimated primary electron beam is changed by moving the first main plane of the condenser lens. The method may further comprise the steps of: most of the electrons outside the plurality of beamlets are cut off by a second plate having a second through hole before the trimming step.
The invention also provides a method for forming a plurality of probe points in an SEM, which comprises the following steps: generating a primary electron beam from an electron source; trimming the primary electron beam into a plurality of beamlets by a plate having a plurality of through holes; focusing the plurality of beamlets by a condenser lens; deflecting the plurality of beamlets towards an optical axis of the objective lens by the plurality of electron optical elements; focusing the deflected beamlets onto a surface of the sample being observed by an objective lens, wherein the deflected and focused beamlets form a plurality of probe points; and independently setting deflection angles of the deflected beamlets to reduce aberrations of the plurality of detection points, respectively.
The method may further comprise the steps of: one or more up to all of the field curvature, astigmatism and distortion aberrations of the plurality of probe points are compensated by the plurality of electron optical elements. The method may further comprise the steps of: the current of the plurality of beamlets is varied by varying the angular intensity of the electron source. The method may further comprise the steps of: the current of the plurality of beamlets is varied by using another plurality of through holes of the plate for the trimming step.
The present invention also provides an apparatus for providing a plurality of sources, the apparatus comprising: a charged particle source for providing a primary beam along an optical axis of the apparatus; means for substantially collimating the primary beam; and means for imaging a plurality of virtual images of the charged particle source with the plurality of beamlets of the collimated primary beam, wherein the plurality of virtual images respectively become a plurality of sources that emit the plurality of beamlets.
The device may further comprise means for varying the current of the plurality of beamlets. The apparatus may further comprise means for suppressing the coulomb effect due to the primary beam.
The invention also provides a multibeam apparatus comprising: a device for providing a plurality of sources; means for projecting a plurality of virtual images on the sample surface such that a plurality of detection points are formed on the sample surface; means for scanning a plurality of probe points on a sample surface; and means for receiving a plurality of signal particle beams generated from a surface of the sample due to the plurality of probe points. The multibeam apparatus may further comprise: means for deflecting the plurality of beamlets independently to reduce aberrations of the plurality of probe points, respectively. The multibeam apparatus may further comprise: means for independently compensating for aberrations of the plurality of detection points. The projection component is a single objective lens.
Other advantages of the present invention will become apparent from the following description taken in conjunction with the accompanying drawings, in which certain embodiments of the invention are illustrated by way of example and not by way of limitation.
Drawings
The present invention will be readily understood by the following detailed description in conjunction with the accompanying drawings, wherein like reference numerals designate like structural elements, and in which:
fig. 1 is a schematic illustration of a conventional multi-beam apparatus disclosed in the first cross-reference.
Fig. 2 is a schematic illustration of one configuration of the new multibeam device according to one embodiment of the present invention.
Fig. 3 is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Fig. 4 is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Fig. 5 is a schematic illustration of one configuration of the micro-deflector and compensator array of fig. 4, according to another embodiment of the present invention.
Fig. 6A is a schematic illustration of one configuration of the micro-deflector and compensator array of fig. 4, according to another embodiment of the invention.
Fig. 6B-6D are schematic illustrations of one example of a configuration of the micro-deflector and compensator array in fig. 6A, according to another embodiment of the present invention.
Fig. 7A and 7B are schematic illustrations of one configuration of the micro-deflector and compensator array of fig. 4, respectively, according to another embodiment of the present invention.
Fig. 8 is a schematic illustration of one mode of operation of the apparatus in fig. 3.
Fig. 9 is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Fig. 10 is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Fig. 11A and 11B are each a schematic illustration of one mode of operation of the apparatus in fig. 10.
Fig. 12, 13A, and 13B are schematic illustrations of one embodiment of the movable condenser lens in fig. 10, respectively.
Fig. 14 is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Fig. 15A is a schematic illustration of another configuration of a new multibeam device according to another embodiment of the present invention.
Fig. 15B is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Fig. 16 is a schematic illustration of another configuration of the new multibeam device according to another embodiment of the present invention.
Detailed Description
Various example embodiments of the invention will now be described more fully with reference to the accompanying drawings, in which some example embodiments of the invention are shown. Without limiting the scope of protection of the invention, all the description and drawings of the embodiments will exemplarily refer to electron beams. However, the embodiments are not intended to limit the invention to specific charged particles.
In the drawings, the relative sizes of each component and between each component may be exaggerated for clarity. Within the following description of the figures, the same or similar reference numerals refer to the same or similar components and entities and only the differences with respect to individual embodiments are described.
Accordingly, while example embodiments of the invention are capable of various modifications and alternative forms, embodiments thereof are shown by way of example in the drawings and will herein be described in detail. It should be understood, however, that there is no intention to limit example embodiments of the invention to the specific forms disclosed, but on the contrary, example embodiments of the invention are to cover all modifications, equivalents, and alternatives falling within the scope of the invention.
In the present invention, "axial" means "in the direction of the optical axis of an electron optical element (such as a circular lens or a multipole lens) or device," radial "means" in the direction perpendicular to the optical axis, "" on-axis "means" on the optical axis or aligned with the optical axis, "and" off-axis "means" not on the optical axis or aligned with the optical axis.
In the present invention, the X-axis, the Y-axis, and the Z-axis form Cartesian (Cartesian) coordinates, the optical axis is on the Z-axis, and the primary electron beam travels along the Z-axis.
In the present invention, "primary electrons" means "electrons emitted from an electron source and incident on a surface on which a sample is being observed or inspected", and "secondary electrons" means "electrons generated from the surface by the primary electrons".
In the present invention, all terms related to through-holes, openings and orifices mean openings or holes penetrating one plate.
In the new multi-beam arrangement, the primary electron beam is focused by a condenser into a source conversion unit in parallel or approximately parallel. The multiple beamlets of the primary electron beam are first deflected by the source conversion unit towards the optical axis of an objective lens and then focused by the objective lens onto the sample surface, resulting in multiple probe points on the sample surface. The deflection angles of the plurality of deflecting beamlets are set to minimize off-axis aberrations due to the objective lens. By changing one or both of the focusing power and the position of the first main plane of the condenser lens, the currents of the plurality of detection points can be changed, and the size of the plurality of detection points and the size difference thereof can be further reduced by compensating for the residual off-axis aberration by the source conversion unit. In addition, for a plurality of detection points, blurring due to the strong coulomb effect of the primary electron beam can be reduced by placing the beamlet-forming member of the source-conversion unit close to a single electron source or additionally using one pre-beamlet-forming member above the source-conversion unit.
Next, some embodiments of the new device will be described. For clarity, only three beamlets are shown, and the number of beamlets may be any number. The deflecting scanning unit, the beam splitter, the secondary projection imaging system and the electronic detection device of the prior art can be used here and, for the sake of simplicity, are not shown or even mentioned in the illustration and description of the embodiments.
One embodiment 200A of the new device is shown in fig. 2. In fig. 2, the
The beamlet-forming part 221 may be a conductive plate having through holes, and three of the through holes function as three beam-limiting openings (221_1 to 221_3), respectively. In FIG. 2, the three deflected beamlets (102_1 to 102_3) do not pass perpendicularly through the three beam limiting openings (221_1 to 221_3) and are thus subject to electron scattering to a certain extent in relation to the deflection angles. Scattered electrons in each beamlet will cause the detection spot to increase and/or become background noise, thus degrading the image resolution corresponding to the scanned area. To avoid this problem, the currents of the three beamlets may be cut while they are parallel to the main optical axis 200_ 1. Thus, another embodiment 300A of the new apparatus is presented in FIG. 3. In fig. 3, the beamlet limitation unit 221 is placed above the
As is well known, the
Each of the three micro-deflectors (222_1 d-222 _3d) in fig. 2 and 3 may be simply formed by a dipole lens, two electrodes of which are oriented to generate a dipole field in the desired deflection direction of the corresponding beamlet, or a quadrupole or 4-pole lens, four electrodes of which may generate a dipole field in any desired direction. In the latter case, all micro-deflectors may be configured to be identical in structure and orientation. This is advantageous from a manufacturing point of view.
In fig. 4, each of the three micro-deflector and compensator elements (422_1 dc-422 _3d) may be simply formed by a 4-pole lens or an octopole or 8-pole lens, four electrodes of the 4-pole lens may generate a dipole field in any desired direction, a quadrupole field and a circular lens field in the desired compensation direction for the corresponding probe point, and eight electrodes of the octopole or 8-pole lens may generate a circular lens field, a dipole field and a quadrupole field both in any desired direction. To generate a circular lens field, the inner surfaces of the four or eight electrodes form a circular shape in radial cross section, as shown in fig. 5. In the latter case, all micro-deflectors and compensator elements may be configured to be identical in structure and orientation. This is advantageous from a manufacturing point of view.
To generate all the aforementioned fields, the voltages of the electrodes in one 4-pole lens or 8-pole lens are different and can be high enough to induce an electrical breakdown. To avoid this problem, each micro-deflector and compensator element may be formed by two or more micro-multipole lenses, or one or more micro-multipole lenses and one or more micro-lenses. In addition, to reduce the aberrations due to each micro-deflector and compensator element, the corresponding beamlet better traverses the circular lens field and the quadrupole field along its optical axis (i.e., better off-axis aberration compensation before beamlet deflection). Thus, the dipole field is better generated by the micro multipole lens on the beamlet exit side of each micro deflector and compensator element. Thus, FIG. 6A illustrates such an embodiment of the
In each of the micro-deflector and compensator elements in fig. 6A, the two micro-multipole lenses may be a dipole lens and a 4-pole lens, or a dipole lens and an 8-pole lens, or a 4-pole lens, respectively, or the like. Fig. 6B, 6C, and 6D show an example in which each microlens is formed of one annular electrode having a circular inner surface, each microlens is a 4-pole lens, and each 4-pole lens in the second layer 422-2 and the corresponding 4-pole lens in the third layer 422-3 differ in orientation or orientation by 45 °. For each micro-deflector and compensator element, the micro-lenses generate a circular lens field, the two 4-pole lenses generate a quadrupole field, and the dipole field is better generated by the 4-pole lenses in the third layer 422-3.
To operate one microlens and compensator element in fig. 4, a drive circuit needs to be connected to each of its electrodes. To prevent the drive circuitry from being damaged by the beamlets 102_1 to 102_3, the
In FIG. 7A, the first upper conductive plates 422-1-CL1 and the first lower conductive plates 422-1-CL2 are placed above and below the microlenses 422-1_1, 422-1_2, and 422-1_3 in the first layer 422-1, respectively. The first upper and lower insulator plates 422-1-IL1 and 422-1-IL2, respectively, having three first upper and lower apertures for beamlets to pass through, support the microlenses 422-1_1, 422-1_2, and 422-1_3, thus making the first layer 422-1 more stable in configuration. Similarly, in the second layer 422-2, a second upper conductive plate 422-2-CL1 and a second lower conductive plate 422-2-CL2 are placed above and below the micro-multipole lenses 422-2_1, 422-2_2, and 422-2_3, respectively. The second upper and lower insulator plates 422-2-IL1, 422-2-IL2, which have three second upper and lower apertures for beamlets to pass through, respectively, support the microlenses 422-2_1, 422-2_2, and 422-2_3, thus making the second layer 422-1 more stable in configuration. In the third layer 422-3, the third upper conductive plate 422-3-CL1 and the third lower conductive plate 422-3-CL2 and the third upper insulator plate 422-3-IL1 and the third lower insulator plate 422-3-IL2 function in the same manner as their counterparts in the second layer 422-2.
In each layer in fig. 7A, the radial dimension of the through-hole is preferably: smaller than the radial dimension of the aperture in order to avoid charging on its inner side wall and smaller than the inner radial dimension of the electrodes of the microlens/micropolarimeter in order to reduce the leaked field more efficiently. In order to reduce the likelihood of beamlet induced electron scattering, each via in the first upper conductive plate is preferably inverted funnel shaped (i.e. with a small end on its beamlet incident side). The beamlet-forming
With the foregoing embodiments of the new apparatus in fig. 2, 3 and 4, the currents of the detection points 102_1s to 102_3 can be changed within a small range by adjusting the focusing power of the
With the previously described embodiments of the new device in fig. 2, 3 and 4, the currents of the probe points 102_1 s-102 _3 can be varied over a large range by moving the first main plane of the
Fig. 10 shows an
To extend the current variation range, the
The displacement of the first main plane 610_2 may be performed by mechanically moving the position of the
The current of the
Fig. 13A shows one
The
Due to the large current of the
Taking the embodiment 300A in fig. 3 as an example, one way is to place the beamlet-forming
Another way is to use a pre-beamlet-forming member above the source conversion unit. Thus, fig. 15A shows such an embodiment 800A of the new device, where one pre-beamlet forming part 872 having three beamlet forming apertures 872_1, 872_2 and 872_3 is placed above the
So far, all the aforementioned methods for improving the performance of a new device have been described independently based on the embodiment 300A in fig. 3. Obviously, some or all of these methods may be used together. Fig. 16 shows such an embodiment 1000A of the new apparatus using one pre-beamlet-forming unit 872 shown in fig. 15A to reduce the coulomb effect due to the
As is well known, the landing energies of the plurality of beamlets may be varied by varying one or both of the potential of the emitter in the
In summary, the present invention proposes a new multi-beam apparatus that provides both high resolution and high throughput for observing samples under flexibly changing observation conditions, and thus can function as a yield management tool for inspecting and/or verifying defects/particles on wafers/masks in the semiconductor manufacturing industry. In the new apparatus, a condenser collimates or substantially collimates the primary electron beam into a source conversion unit, the source conversion unit deflects a plurality of beamlets of the primary electron beam towards an optical axis of an objective lens, and the objective lens focuses the plurality of deflected beamlets onto a sample surface, thereby forming a plurality of probe spots on the sample surface, wherein deflection angles of the plurality of deflected beamlets are adjusted to reduce a size of the plurality of probe spots. The currents of the plurality of detection points can be varied over a wide range by varying both the focusing power and the position of the first main plane of the condenser lens. In order to further reduce the size of the plurality of probing points, their off-axis aberrations may be compensated by the source conversion unit and the coulomb effect due to the primary electron beam may be attenuated by placing the beamlet-forming member of the source conversion unit close to the single electron source or using one pre-beamlet-forming member.
While the invention has been described with respect to preferred embodiments thereof, it is to be understood that other modifications and variations may be made without departing from the spirit and scope of the invention as hereinafter claimed.
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