阅读说明：本技术 一种多气环多逃逸通道的透明窗产生装置和在线测量系统 (Transparent window generating device with multiple air rings and multiple escape channels and online measuring system ) 是由 高咏生 朱锦炜 于 2020-05-12 设计创作，主要内容包括：本发明提供一种多气环多逃逸通道的透明窗产生装置,该透明窗产生装置用于在线测量系统,所述透明窗产生装置的一侧表面为执行面,所述执行面用于朝向待检测的工件设置,所述透明窗产生装置包括至少一组测量通道、至少一组辅助喷气通道、至少一组主环形喷气通道和至少一组环形排气通道,每组所述辅助喷气通道包括至少一个所述辅助喷气通道,每组所述主环形喷气通道包括至少一个所述主环形喷气通道,每组所述环形排气通道包括至少一个所述环形排气通道。本发明还提供一种在线测量系统,能够对工件表面进行精确测量。(The invention provides a transparent window generating device with multiple air rings and multiple escape channels, which is used for an online measuring system, wherein one side surface of the transparent window generating device is an execution surface, the execution surface is used for facing a workpiece to be detected, the transparent window generating device comprises at least one group of measuring channels, at least one group of auxiliary air injection channels, at least one group of main annular air injection channels and at least one group of annular exhaust channels, each group of auxiliary air injection channels comprises at least one auxiliary air injection channel, each group of main annular air injection channels comprises at least one main annular air injection channel, and each group of annular exhaust channels comprises at least one annular exhaust channel. The invention also provides an online measurement system which can accurately measure the surface of the workpiece.)

1. The utility model provides a many gas rings are transparent window of escape passage and produce device, this transparent window produce device is used for online measurement system, its characterized in that, one side surface of transparent window produce device is the execution face, the execution face is used for setting up towards the work piece that awaits measuring, the transparent window produce device includes at least a set of measurement passageway, at least a set of supplementary jet-propelled passageway, at least a set of main annular jet-propelled passageway and at least a set of annular exhaust passage, every group of supplementary jet-propelled passageway includes at least one supplementary jet-propelled passageway, every group of main annular jet-propelled passageway includes at least one main annular jet-propelled passageway, every group of main annular exhaust passage includes at least one annular exhaust passage:

each group of the measuring channels comprises a detection signal inlet, a detection signal outlet and a detection port, the detection port is formed on the execution surface, and the measuring channels are used for guiding a signal incident from the detection signal inlet to the detection port and guiding a signal incident from the detection port to the detection signal outlet;

each group of the main annular gas injection channels corresponds to one group of the measuring channels, the outlets of the main annular gas injection channels are formed on the executing surface, the main annular gas injection channels surround the corresponding measuring channels, and the main annular gas injection channels are arranged to enable gas sprayed out of the main annular gas injection channels to flow in the direction far away from the measuring channels corresponding to the main annular gas injection channels;

each group of auxiliary gas injection channels corresponds to one group of measuring channels, outlets of the gas injection channels are formed on the execution surface, the gas injection channels are used for injecting gas towards the periphery of the corresponding detection ports, and the gas injection channels are arranged so that the gas injected by the gas injection channels flows towards the direction far away from the detection ports corresponding to the gas injection channels;

each group of annular exhaust passages corresponds to one group of main annular air injection passages, inlets of the annular exhaust passages are formed on the executing surface, and the annular exhaust passages are arranged around the corresponding main annular air injection passages.

2. The transparent window generating apparatus according to claim 1, wherein each set of said main annular air injection passages comprises a plurality of said main annular air injection passages arranged at intervals.

3. The transparent window generating apparatus according to claim 2, further comprising at least one air supply channel, wherein the air supply channel is disposed between two adjacent main annular air injection channels in the same group of main annular air injection channels.

4. The transparent window generating device according to claim 3, wherein a plurality of said air supply channels are disposed between two adjacent main annular air injection channels, and are uniformly spaced around the axis of said main annular air injection channels.

5. The transparent window generating apparatus according to any one of claims 1 to 4, wherein the main annular air blowing passage comprises a vertical annular air blowing passage portion and an inclined annular air blowing passage portion communicating with each other, one end opening of the inclined annular air blowing passage portion communicating with the vertical annular air blowing passage portion, and the other end opening of the inclined annular air blowing passage portion is formed on the actuating surface.

6. The transparent window generating device according to claim 5, further comprising a first air inlet channel and a buffer chamber, wherein each group of the main annular air injection channels corresponds to one of the buffer chamber and one of the first air inlet channels, the buffer chamber is communicated with an opening of the corresponding main annular air injection channel, the opening of the corresponding main annular air injection channel is away from the actuating surface, one end of the first air inlet channel is communicated with the corresponding buffer chamber, and the other end of the first air inlet channel is communicated with the outside of the transparent window generating device.

7. The transparent window generating apparatus of any one of claims 1 to 4, wherein the annular exhaust channel has an inner diameter that gradually increases in a direction away from the actuating surface.

8. The transparent window generating apparatus according to any one of claims 1 to 4, wherein said transparent window generating apparatus comprises a plurality of annular exhaust channels, said plurality of annular exhaust channels being coaxially arranged,

the width of one part of at least one annular exhaust channel positioned in the inner ring is smaller than that of the rest part of the annular exhaust channel;

the width of the annular exhaust channel positioned at the outermost ring is larger than that of the annular exhaust channel positioned at the inner ring.

9. The transparent window generating apparatus according to any one of claims 1 to 4, wherein the transparent window generating apparatus comprises an apparatus body, the measuring channel, the auxiliary air injection channel, the main annular air injection channel, and the annular exhaust channel are formed in the apparatus body, and the detection signal inlet of the measuring channel, the detection signal outlet of the measuring channel, the inlet of the main annular air injection channel, and the outlet of the annular exhaust channel are located on an outer surface of the apparatus body.

10. The transparent window generating device according to claim 9, wherein the device body comprises a main body portion and a bottom plate formed on the main body portion, a working surface for facing the workpiece is formed on the main body portion, the bottom plate is disposed around the working surface of the main body portion, and a bottom surface of the bottom plate is flush with the working surface.

11. The transparent window generating device of claim 9, wherein the measurement channel comprises a first measurement channel and a second measurement channel,

one end opening of the first measurement channel is formed as the probe signal inlet, one end opening of the second measurement channel is formed as the probe signal outlet, an axis of the first measurement channel intersects an axis of the second measurement channel so that the other end opening of the first measurement channel and the other end opening of the second measurement channel communicate and are formed as the probe port;

the detection signal incident to the first measurement channel through the detection signal inlet can be emitted through the detection port and reach the surface of the workpiece to be detected, and the signal reflected by the surface of the workpiece can enter the detection port and be emitted from the detection signal outlet under the guidance of the second measurement channel.

12. The transparent window generating device of claim 11, further comprising a first protective tube and a second protective tube,

the first protective pipe is arranged on the device body and surrounds the detection signal inlet;

the second protective pipe is arranged on the device body and surrounds the detection signal outlet.

13. The transparent window generating apparatus of claim 11, further comprising a pair of mounting members disposed on the apparatus body, wherein two of the mounting members of the same pair are located on either side of the apparatus body.

14. The transparent window generating device according to any one of claims 1 to 4, wherein any two of the measuring channel, the auxiliary air injection channel, and the main annular air injection channel are independent and spaced from each other.

15. An on-line measuring system for measuring the condition of a surface of a workpiece, the measuring system comprising a measuring sensor, wherein the measuring system further comprises a transparent window generating device according to any one of claims 1 to 14, the transparent window generating device being adapted to drain liquid from the surface of the workpiece, the measuring sensor being adapted to emit a detection signal to the detection signal inlet and to receive a signal reflected from the detection signal outlet.

Technical Field

The invention relates to an online measuring system in machining, in particular to a transparent window generating device with multiple air rings and multiple escape channels and an online measuring system comprising the transparent window generating device.

Background

In machining a workpiece, in order to determine the surface state of the workpiece, it is necessary to measure the surface state of the workpiece.

Existing measurement types include on-line measurement, off-line measurement, and in-situ measurement, which are increasingly used because on-line measurement does not interrupt the ongoing machining process.

In order to improve the machining precision, ensure the surface quality of the workpiece and the service life of the cutter, the surface temperature of the workpiece in the machining process must be reduced by using a coolant. However, the presence of coolant tends to affect the accuracy of the on-line measurement.

Therefore, how to avoid the adverse effect of the coolant on the online measurement becomes a technical problem to be solved in the field.

Disclosure of Invention

The invention aims to provide a transparent window generating device with multiple air rings and multiple escape channels and an online measuring system comprising the transparent window generating device, wherein the transparent window generating device can reduce or even eliminate the influence of a coolant on measurement when a workpiece being processed is measured.

In order to achieve the above object, as an aspect of the present invention, there is provided a transparent window generating device with multiple air rings and multiple escape channels, the transparent window generating device is used in an online measurement system, and is characterized in that a side surface of the transparent window generating device is an execution surface, the execution surface is used for being disposed toward a workpiece to be detected, the transparent window generating device includes at least one group of measurement channels, at least one group of auxiliary air injection channels, at least one group of main annular air injection channels, and at least one group of annular exhaust channels, each group of auxiliary air injection channels includes at least one auxiliary air injection channel, each group of main annular air injection channels includes at least one main annular air injection channel, each group of main annular exhaust channels includes at least one annular exhaust channel:

each group of the measuring channels comprises a detection signal inlet, a detection signal outlet and a detection port, the detection port is formed on the execution surface, and the measuring channels are used for guiding a signal incident from the detection signal inlet to the detection port and guiding a signal incident from the detection port to the detection signal outlet;

each group of the main annular gas injection channels corresponds to one group of the measuring channels, the outlets of the main annular gas injection channels are formed on the executing surface, the main annular gas injection channels surround the corresponding measuring channels, and the main annular gas injection channels are arranged to enable gas sprayed out of the main annular gas injection channels to flow in the direction far away from the measuring channels corresponding to the main annular gas injection channels;

each group of auxiliary gas injection channels corresponds to one group of measuring channels, outlets of the gas injection channels are formed on the execution surface, the gas injection channels are used for injecting gas towards the periphery of the corresponding detection ports, and the gas injection channels are arranged so that the gas injected by the gas injection channels flows towards the direction far away from the detection ports corresponding to the gas injection channels;

each group of annular exhaust passages corresponds to one group of main annular air injection passages, inlets of the annular exhaust passages are formed on the executing surface, and the annular exhaust passages are arranged around the corresponding main annular air injection passages.

Optionally, each set of the main annular air injection channels comprises a plurality of the main annular air injection channels arranged at intervals.

Optionally, the transparent window generating device further comprises at least one air supplement channel, and the air supplement channel is arranged between every two adjacent main annular air injection channels in the same group of main annular air injection channels.

Optionally, a plurality of air supply channels are arranged between two adjacent main annular air injection channels, and the air supply channels are arranged around the axis of the main annular air injection channel at uniform intervals.

Optionally, the main annular air injection passage includes a vertical annular air injection passage portion and an inclined annular air injection passage portion that are communicated with each other, an opening at one end of the inclined annular air injection passage is communicated with the vertical annular air injection passage portion, and an opening at the other end of the inclined annular air injection passage portion is formed on the execution surface.

Optionally, the transparent window generating device further comprises a first air inlet channel and a buffer cavity, each group of main annular air injection channels corresponds to one buffer cavity and one first air inlet channel, the buffer cavity is communicated with the corresponding opening of the main annular air injection channel deviating from the execution surface, an opening at one end of the first air inlet channel is communicated with the corresponding buffer cavity, and the other end of the first air inlet channel is communicated with the outside of the transparent window generating device.

Optionally, the inner diameter of the annular exhaust passage increases gradually in a direction away from the actuating face.

Optionally, the transparent window generating device comprises a plurality of annular exhaust channels, the plurality of annular exhaust channels being coaxially arranged,

the width of one part of at least one annular exhaust channel positioned in the inner ring is smaller than that of the rest part of the annular exhaust channel;

the width of the annular exhaust channel positioned at the outermost ring is larger than that of the annular exhaust channel positioned at the inner ring.

Optionally, the transparent window generating device comprises a device body, the measuring channel, the auxiliary air injection channel, the main annular air injection channel and the annular exhaust channel are all formed in the device body, and the detection signal inlet of the measuring channel, the detection signal outlet of the measuring channel, the inlet of the main annular air injection channel and the outlet of the annular exhaust channel are all located on the outer surface of the device body.

Optionally, the device body includes a main body portion and a bottom plate formed on the main body portion, a working surface for facing the workpiece is formed on the main body portion, the bottom plate is disposed around the working surface of the main body portion, and a bottom surface of the bottom plate is flush with the working surface.

Optionally, the measurement channel includes a first measurement channel and a second measurement channel, an opening at one end of the first measurement channel is formed as the probe signal inlet, an opening at one end of the second measurement channel is formed as the probe signal outlet, an axis of the first measurement channel intersects an axis of the second measurement channel so that an opening at the other end of the first measurement channel and an opening at the other end of the second measurement channel communicate with each other and are formed as the probe port;

the detection signal incident to the first measurement channel through the detection signal inlet can be emitted through the detection port and reach the surface of the workpiece to be detected, and the signal reflected by the surface of the workpiece can enter the detection port and be emitted from the detection signal outlet under the guidance of the second measurement channel.

Optionally, the transparent window generating device further comprises a first protection tube and a second protection tube.

The first protective pipe is arranged on the device body and surrounds the detection signal inlet;

the second protective pipe is arranged on the device body and surrounds the detection signal outlet.

Optionally, the transparent window generating device further comprises a pair of mounting members, the mounting members are arranged on the device body, and two mounting members in the same pair are respectively located on two sides of the device body.

Optionally, any two of the measurement channel, the auxiliary air injection channel and the main annular air injection channel are independent and spaced from each other.

As a second aspect of the present disclosure, an on-line measuring system is provided, the on-line measuring system is used for measuring the surface state of a workpiece, the measuring system comprises a measuring sensor, wherein the measuring system further comprises the above-mentioned transparent window generating device provided by the present disclosure, the transparent window generating device is used for discharging the liquid on the surface of the workpiece, and the measuring sensor is used for sending a detection signal to the detection signal inlet and receiving the signal reflected from the detection signal outlet.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention without limiting the disclosure. In the drawings:

fig. 1 is a schematic structural diagram of an embodiment of a transparent window generating device provided in the present disclosure;

fig. 2 is a schematic diagram of another embodiment of a transparent window generating device provided in the present disclosure;

fig. 3 is a bottom view of another embodiment of a transparent window generating apparatus provided in the present disclosure;

FIG. 4 is a schematic view showing the positional relationship between channels in the transparent window generating device;

FIG. 5 is a schematic view showing the arrangement position of the air supply passage;

FIG. 6 is a schematic perspective view of an on-line measurement system provided by the present disclosure;

FIG. 7 is a front view of the on-line measurement system provided in FIG. 6;

FIG. 8 is a schematic view of a transparent window formed in Experimental example 1;

FIG. 9 is a schematic view of a transparent window formed in Experimental example 2;

FIG. 10 is a graph of the surface topography of a silicon wafer under different conditions;

FIG. 11 is a graph of the topography of a raised work piece under various conditions.

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.

As a first aspect of the present invention, as shown in fig. 1, a transparent window generating apparatus 100 with multiple air rings and multiple escape channels is provided, and is used for an online measurement system, wherein one side surface of the transparent window generating apparatus is an execution surface, the execution surface is used for being disposed toward a workpiece to be detected, and the transparent window generating apparatus includes at least one group of measurement channels 110, at least one group of auxiliary air injection channels, at least one group of main annular air injection channels, and at least one group of annular exhaust channels. Each set of said auxiliary gas injection channels comprises at least one auxiliary gas injection channel 120, each set of said main annular gas injection channels comprises at least one said main annular gas injection channel 130, and each set of said annular gas exhaust channels comprises at least one said annular gas exhaust channel 140.

Each set of the measurement channels includes a detection signal inlet, a detection signal outlet, and a detection port, the detection port is formed on the execution surface, and the measurement channels are configured to guide a signal incident from the detection signal inlet to the detection port and guide a signal incident from the detection port to the detection signal outlet.

Each set of the main annular gas injection channels 130 corresponds to one set of the measurement channels 110, the outlets of the main annular gas injection channels 130 are formed on the execution surface, the main annular gas injection channels 130 surround the corresponding measurement channels 110, and the main annular gas injection channels 130 are arranged so that the gas ejected from the main annular gas injection channels 130 flows in the direction away from the measurement channels corresponding to the main annular gas injection channels 130.

Each group of auxiliary gas injection channels corresponds to one group of measuring channels, outlets of the gas injection channels are formed on the execution surface, the gas injection channels are used for ejecting gas towards the periphery of the corresponding detection ports, and the gas injection channels are arranged to enable the gas ejected by the gas injection channels to flow towards the direction far away from the detection ports corresponding to the gas injection channels.

Each set of the annular exhaust passages 140 corresponds to one set of the main annular air injection passages 130, inlets of the annular exhaust passages 140 are formed on the execution surface, and the annular exhaust passages 140 are arranged around the corresponding main annular air injection passages 130.

It is to be noted that each of the measurement channels 110 includes a detection signal inlet, a detection signal outlet, and a detection port, the detection port being formed on the execution surface, and the measurement channel is configured to guide a signal incident from the detection signal inlet to the detection port and guide a signal incident from the detection port to the detection signal outlet. Further, the term "signal incident from the probe port" means that a signal incident from the probe signal inlet reaches the workpiece surface, and the workpiece surface reflects the signal to the probe port, enters the probe channel through the probe port, and is guided to the probe signal outlet through the probe channel.

In the present disclosure, the number of sets of the measurement channels is the same as the number of sets of the auxiliary air injection channels, and the number of sets of the measurement channels is also the same as the number of sets of the main annular air injection channels, and the number of sets of the measurement channels is also the same as the number of sets of the annular exhaust channels.

The transparent window generating apparatus 100 provided by the present disclosure is used in cooperation with the sensor 200, in order to detect the surface condition of the workpiece 300 during the machining process of the workpiece 300. During machining of the workpiece 300, introduction of a machining liquid (e.g., coolant a) is inevitable. During detection, the execution surface of the transparent window generating device 100 is arranged opposite to the surface to be detected on the workpiece 300, and gas is sprayed to the surface to be detected through the auxiliary gas spraying channel 120 and the main annular gas spraying channel 130 so as to discharge liquid on the surface to be detected and expose the surface to be detected, so that a transparent window is formed between the execution surface and the surface to be detected. Therefore, the detection signal emitted by the sensor 200 can enter the measurement channel through the entrance of the measurement channel 110, and the measured channel 110 is transmitted to the detection port, enters the transparent window, and reaches the surface to be detected, and is reflected back to the measurement channel 110 by the surface to be detected, and further exits from the detection signal exit of the measurement channel 110, and is finally received by the sensor 200.

In the present disclosure, the gas sprayed toward the surface of the workpiece through the main annular gas spraying passage 130 may discharge the liquid of a portion opposite to the main annular gas spraying passage 130. Since the air outlet of the main annular air injection passage 130 is coincident with the detection port, it is possible to ensure that the detection signal reaches the surface to be detected.

While the gas is supplied to the main annular gas injection channel 130, the gas also needs to be supplied to the auxiliary gas injection channel 120, as described above, the gas outlet of the auxiliary gas injection channel 120 is also arranged on the execution surface, and the gas injected by the auxiliary gas injection channel 120 can further discharge the liquid discharged through the main annular gas injection channel 130 in the direction away from the detection port, so as to ensure that the problem that the liquid discharged by the main annular gas injection channel 130 flows back to the surface to be detected does not exist in the process of performing online detection.

In addition, since the measurement channel 110 is in communication with the transparent window, the auxiliary gas injection channel 120 can also compensate for a portion of the gas escaping from the measurement channel 110, which helps to maintain a higher gas pressure in the transparent window.

The gas ejected from the main annular gas injection channel 130 and the auxiliary gas injection channel 120 is finally exhausted to the outside of the transparent window generating device 100 through the annular exhaust channel 140, so that the vibration of the transparent window generating device 100 in the online detection process can be avoided, and the detection precision is further improved.

In the present disclosure, the specific number of the main annular gas injection passages 130 in each set of main annular gas injection passages is not particularly limited as long as the liquid can be surely discharged. Optionally, each set of the main annular gas injection channels comprises a plurality of main annular gas injection channels 130 arranged at intervals. The main annular air injection channels 130 are arranged on the outer side of the auxiliary air injection channel 120, so that the main annular air injection channels 130 on the relatively outer side can discharge liquid blown out from the inner side outwards further, and a transparent window with higher transparency is realized between a detection port of the detection channel and the surface to be detected, so that the detection precision can be improved.

It should be noted that the plurality of annular gas injection passage structures 130 do not need to rely on high-speed gas flow when discharging liquid, and thus the amount of gas used can be saved.

In fig. 3, a schematic view of the distribution of the different main annular air injection channels 130 is shown.

In order to precisely control the direction in which the gas is discharged and to prevent the transparent window generating apparatus 100 from vibrating due to the gas injection, a plurality of main annular gas injection channels 130 in the same group are optionally provided coaxially, as shown in fig. 3. Like this, the main annular gas-jet channel of difference all can be at 360 degrees orientations blowout gas in the same group to different angle departments, the gaseous volume that awaits measuring the side surface and receive is all the same, guarantees transparent window generating device 100 and detects the stability of time in the execution.

The annular gas injection passage 130 allows the gas to be uniformly injected in all directions when the gas is injected, and an additional space for deployment is not required, so that the volume of the liquid discharge apparatus itself can be reduced.

In the present disclosure, as shown in fig. 2, the auxiliary gas injection passage 120 communicates with a gas source (e.g., a gas pump) through the second gas intake passage 120 a.

In the present disclosure, the shape of the inner surface of the main annular air injection passage 130 is not particularly limited, and alternatively, the inner surface of the main annular air injection passage 130 may be a conical surface, or alternatively, the main annular air injection passage 130 may be flared.

In order to further ensure that there is no liquid in the "transparent window", optionally, as shown in fig. 5, the transparent window generating apparatus 100 further includes at least one set of air supply channels 150, the number of the sets of air supply channels 150 is the same as that of the sets of main annular air injection channels 130, and in the same set of main annular air injection channels 130, the air supply channels 150 are disposed between two adjacent main annular air injection channels 130.

In order to ensure the stability of the transparent window generating device 100 and the transparency of the transparent window generating device, optionally, a plurality of the gas supplementing channels are arranged between two adjacent main annular gas spraying channels 130 at regular intervals around the axis of the main annular gas spraying channels 130.

In the present disclosure, the number of the air supply passages 150 provided between the adjacent two main annular air injection passages 130 is not particularly limited. For example, 4 to 6 gas supply passages 150 may be provided between two adjacent main annular gas injection passages 130.

The additional provision of the gas supply passage 150 can overcome the unevenness of gas injection (fig. 4 and 5) caused by the provision of the measurement passages (hereinafter, and the first measurement passage 111 and the second measurement passage 112 shown in fig. 4 and 5).

In the present invention, the specific shape of the main annular air blowing passage 130 is not particularly limited. As described above, the inner surface of the main annular air ejection passage 130 may be a conical surface, or the main annular air ejection passage 130 may be a trumpet shape. When the main annular air injection passage 130 is formed in a horn shape, the main annular air injection passage 130 includes a vertical annular air injection passage portion 131 and an inclined annular air injection passage portion 132 which communicate with each other, one end opening of the inclined annular air injection passage portion 132 communicates with the vertical annular air injection passage portion 131, and the other end opening of the inclined annular air injection passage portion 132 is formed on the execution surface.

It is noted that the inner diameter of the upper portion of the inclined annular gas injection passage portion 132 (i.e., the portion connected to the vertical annular gas injection passage portion 131) is smaller than the inner diameter of the lower portion of the inclined annular gas injection passage portion 132 (i.e., the portion close to the execution surface).

In order to further ensure the stability of the transparent window generating device 100 in generating the transparent window, optionally, the transparent window generating device 100 further includes a first air inlet channel 130a and a buffer cavity 130b, each group of main annular air injection channels corresponds to one buffer cavity 130b and one first air inlet channel 130a, the buffer cavity 130b is communicated with an opening of the corresponding main annular air injection channel 130 (i.e., an air inlet of the main annular air injection channel 130) facing away from the actuating surface, an opening of one end of the first air inlet channel 130a is communicated with the corresponding buffer cavity 130b, an outside of the transparent window generating device 100 is communicated with the other end of the first air inlet channel 130a, and a width of the buffer cavity 130b is greater than a width of the corresponding main annular air injection channel 130 a.

The first gas inlet channel 130a is communicated with a gas source to introduce gas into the buffer chamber 130b, and the gas enters each main annular gas injection channel 130 after the gas flow rate is uniform, so as to ensure the stability of the transparent window generating device 100 during online measurement.

In the present invention, the specific structure of the annular exhaust channel 140 is not particularly limited as long as the gas in the transparent window can be exhausted from the transparent window generating apparatus 100. In the embodiment shown in fig. 1 and 2, the annular exhaust passage 140 may be inverted conical, or inverted flared. Specifically, the inner diameter of the annular exhaust passage 140 gradually increases in a direction away from the execution plane (i.e., a bottom-up direction in fig. 1 and 2).

As described hereinabove, the inlet of the annular exhaust passage 140 is formed on the execution surface. In order to discharge the gas, an air outlet of the annular exhaust channel 140 is formed on the outer surface of the transparent window generating apparatus 100.

In the present disclosure, the number of the annular exhaust passages 140 is not particularly limited. As an alternative embodiment, the transparent window generating device comprises a plurality of annular exhaust channels 140, and the plurality of annular exhaust channels 140 are coaxially arranged.

Specifically, a portion of the at least one annular vent passage 140 located at the inner ring has a width less than the width of the remaining portion of the annular vent passage; the width of the annular exhaust passage 140 located at the outermost periphery is greater than the width of the annular exhaust passage 140 located at the inner periphery.

As shown in fig. 2, the inner annular exhaust channel 140 has a narrow opening with a small width, which limits the escape of gas when exhausting gas, thereby ensuring a high pressure inside the transparent window with a small amount of gas; in contrast, the wider opening of the outer ring annular vent passage ensures that gas can escape easily from the outer ring annular vent passage 140.

The width of different annular exhaust passage is different, avoids unnecessary gas can produce a large amount of bubbles from drain's bottom edge effusion, and then avoids the bubble to influence measurement accuracy.

The portion of the annular exhaust passage 140 having a smaller width may be formed by providing a valve, or the annular exhaust passage 140 having the above-described structure may be directly formed at the time of molding.

In the embodiment shown in fig. 2, the transparent window generating means is provided with two annular exhaust channels, and the inner annular exhaust channel 140 is provided with a narrow opening.

In the present disclosure, how to form the various channels is not particularly limited. For example, the respective passages may be arranged in such a manner that pipes are provided.

For ease of manufacture, the transparent window generating device 100 includes a device body in which each channel is formed.

Specifically, the measurement passage 110, the auxiliary gas injection passage 120, the main annular gas injection passage 130, and the annular gas exhaust passage 140 are formed in the apparatus body, and the detection signal inlet of the measurement passage 110 and the detection signal outlet of the measurement passage 110 are located on the outer surface of the apparatus body.

Of course, a gas supply channel 150 is also formed in the device body.

In the present invention, the material of the transparent window generating apparatus 100 is also not particularly limited. As an alternative embodiment, the transparent window generating apparatus 100 may be formed by 3D printing using resin.

As an alternative embodiment, the apparatus body may include a main body portion and a bottom plate B formed on the main body portion. As shown in fig. 2 and 3, a working surface for facing the workpiece is formed on the main body, a bottom plate B is disposed around the working surface of the main body, and a bottom surface of the bottom plate is flush with the working surface. The measurement channel, the auxiliary air injection channel, the main annular air injection channel and the annular exhaust channel are formed in the device main body part, and the detection signal inlet of the measurement channel, the detection signal outlet of the measurement channel, the inlet of the main annular air injection channel and the outlet of the annular exhaust channel are all located on the outer surface of the main body part.

The relative flow velocity of gas sprayed out through the main annular gas spraying channel is low, and after the base plate B is arranged, the cooling liquid with relatively high flow velocity can be prevented from entering between the liquid drainage device and the surface to be measured of the workpiece to be measured by utilizing the viscous force between the cooling liquid and the bottom surface of the base plate B.

In the present invention, the specific structure of the measurement channel 110 is not limited, as long as the sensing signal emitted by the sensor 200 can be guided to the surface to be measured, and the sensing signal reflected by the surface to be measured can be guided back to the sensor 200. In the particular embodiment shown in fig. 1 and 2, measurement channel 110 includes a first measurement channel 111 and a second measurement channel 112.

One end opening of the first measurement channel 111 is formed as the probe signal inlet, one end opening of the second measurement channel 112 is formed as the probe signal outlet, and the axis of the first measurement channel 111 intersects with the axis of the second measurement channel 112 so that the other end opening of the first measurement channel 111 and the other end opening of the second measurement channel 112 communicate and are formed as the probe ports.

The detection signal incident to the first measurement channel 111 through the detection signal inlet can exit through the detection port and reach the surface of the workpiece 300 to be measured, and the signal reflected by the surface of the workpiece 300 can enter the detection port and exit from the detection signal outlet under the guidance of the second measurement channel 112.

As an alternative embodiment, the transparent window generating device further comprises a first protection tube and a second protection tube.

The first protective pipe is arranged on the device body and surrounds the detection signal inlet.

The second protective pipe is arranged on the device body and surrounds the detection signal outlet.

For the convenience of installation, optionally, the transparent window generating device further comprises a pair of installation parts, the installation parts are arranged on the device body, and two installation parts in the same pair are respectively positioned on two sides of the device body.

It should be noted that, in the present invention, any two of the measurement channel, the auxiliary air injection channel and the main annular channel are independent and spaced from each other. Because the measuring channel, the auxiliary gas spraying channel and the main annular gas spraying channel are formed in the device body, the measuring channel and the auxiliary gas spraying channel are supported by the material of the device body, and the measuring channel and the main annular gas spraying channel are supported by the material of the device body, so that mutual influence among gases can be avoided, and the accuracy of a measuring result is improved.

Shown in fig. 4 is a schematic diagram of the relative positional relationship among the respective channels (only the first measurement channel 111, the second measurement channel 112, the main annular gas injection channel 130 are shown). As shown, the various channels are spaced apart, rather than communicating.

In the present disclosure, the cross-sectional shape of the portion of the device body located between the channels is not particularly limited, for example, the cross-section of the portion of the device body located between the channels may be, but is not limited to, an oval shape, a spindle shape, or an inverted drop shape, so as to reduce the resistance of the device body to the airflow in the main annular air injection channel, and make the airflow uniform everywhere.

As a second aspect of the present invention, an on-line measuring system for measuring the surface condition of a workpiece is provided, as shown in fig. 6 and 7, the measuring system comprises a measuring sensor 200, wherein the measuring system further comprises the above-mentioned transparent window generating device 100 provided by the present invention, the transparent window generating device 100 is used for discharging the liquid on the surface of the workpiece, and the measuring sensor 200 is used for sending a detection signal to the detection signal inlet and receiving the signal reflected from the detection signal outlet.

In the present invention, the specific structure of the measuring sensor is not particularly specified, and when the measuring channel of the transparent window generating device includes a first measuring channel and a second measuring channel, the measuring sensor is a triangulation laser sensor.

Of course, the present invention is not limited thereto, and the measuring sensor may be any one of an ultrasonic sensor, an electromagnetic wave sensor, and a pressure sensor.

In order to facilitate online measurement of different positions of the workpiece, preferably, the measuring system includes a moving device for moving at least one of the transparent window generating device 100, the measuring sensor 200 and the workpiece 300, so that the distance between the transparent window generating device 100 and the workpiece 300 is suitable for discharging the coolant on the surface of the workpiece, and the distance between the measuring sensor 200 and the workpiece 300 is within the range of the measuring sensor 200.

Preferably, the moving means comprises an x-axis moving platform 430, a y-axis moving platform 440 and a z-axis moving platform 420, as shown in fig. 10, and the execution surface of the transparent window generating apparatus 100 is located in the xz plane. Gas is supplied to the main annular gas injection passage and the auxiliary gas injection passage through the gas supply pipes 500 and 600, respectively.

Specifically, the x-axis moving platform 430 is configured to drive at least one of the transparent window generating device 100, the measurement sensor 200, and the workpiece 300 to move along the x-axis direction (e.g., drive the transparent window generating device 100 and the measurement sensor 200 to move along the x-axis direction), the y-axis moving platform 440 is configured to drive at least one of the transparent window generating device 100, the measurement sensor 200, and the workpiece 300 to move along the y-axis direction (e.g., drive the measurement sensor 200 to move along the y-axis direction), and the z-axis moving platform 420 is configured to drive at least one of the transparent window generating device 100, the measurement sensor 200, and the workpiece 300 to move along the z-axis direction (e.g., drive the transparent window generating device 100 and the measurement sensor.

In order to precisely move components (e.g., any of the transparent window generating device 100, the measurement sensor 200, and the workpiece 300) provided on the moving device, it is preferable that an encoder is provided on at least one of the x-axis moving stage, the y-axis moving stage, and the z-axis moving stage.

Preferably, the measuring system further comprises a manual fine tuning platform 450, the manual fine tuning platform 450 is fixed on any one of the x-axis moving platform 430, the y-axis moving platform 440 and the z-axis moving platform 420, the transparent window generating device 100 is arranged on the manual fine tuning platform 450, and the manual fine tuning platform can perform fine tuning on the position of the transparent window generating device in the y-axis direction so as to adjust the distance between the transparent window generating device 100 and the workpiece 300 to be measured.

Firstly, the measuring sensor 200 is moved to a certain position above the workpiece 300 by using the y-axis moving platform, i.e. the workpiece 300 is within the measuring range of the measuring sensor 200, and then the position of the transparent window generating device 100 along the y-axis direction is finely adjusted by using the manual fine adjustment platform, so that the transparent window generating device 100 is moved to a certain position above the workpiece 300, i.e. the workpiece 300 is within the working distance of the transparent window generating device 100.

In the present invention, there is no particular requirement on the specific structure of manual fine adjustment stage 450, and preferably, the travel of manual fine adjustment stage 450 along the y-axis is about 10 mm.

Examples of the experiments