Method for manufacturing ultra-large quadrupole lens in vacuum
阅读说明：本技术 真空内超大型四极透镜的制造方法 (Method for manufacturing ultra-large quadrupole lens in vacuum ) 是由 孙国平 李学敏 马力祯 袁平 张小奇 姚庆高 杨文杰 倪鹏 于 2020-05-28 设计创作，主要内容包括：本发明公开了一种真空内超大型四极透镜的制造方法,将四极透镜分解设计成四个磁轭和四个磁极,锻造毛坯,热处理；加工磁轭和磁极,预装配透镜铁芯；再拆解,镀镍；绕制半成品线圈,环氧真空浇注,得线圈；拆解镀镍的四个部分,安装线圈,装配,得四极透镜铁芯；带有散热条的真空管道的一端焊接端盖,四极透镜铁芯两个端面上安装铁芯水冷管；带有散热条的真空管道穿入四极透镜铁芯的中心孔,铁芯水冷管和端盖上的冷却水管相连,焊接另一个端盖；线圈导线出线和端盖上的冷却水管依次穿入过渡段真空管道和真空隔离管道,制得真空内超大型四极透镜。该制造方法将线圈与真空环境隔离开来,不影响真空度,改善和提高了真空内超大型四极透镜的性能。(The invention discloses a manufacturing method of an ultra-large quadrupole lens in vacuum, which comprises the steps of decomposing and designing the quadrupole lens into four magnet yokes and four magnetic poles, forging a blank and carrying out heat treatment; processing a magnetic yoke and a magnetic pole, and pre-assembling a lens iron core; then disassembling and nickel plating; winding a semi-finished coil, and carrying out epoxy vacuum casting to obtain a coil; disassembling the four parts of the nickel plating, installing coils and assembling to obtain a quadrupole lens iron core; an end cover is welded at one end of the vacuum pipeline with the heat dissipation strip, and iron core water cooling tubes are arranged on two end faces of the quadrupole lens iron core; a vacuum pipeline with a heat dissipation strip penetrates through a central hole of the quadrupole lens iron core, an iron core water cooling pipe is connected with a cooling water pipe on the end cover, and the other end cover is welded; and the coil wire outgoing line and a cooling water pipe on the end cover sequentially penetrate into the transition section vacuum pipeline and the vacuum isolation pipeline to manufacture the ultra-large quadrupole lens in vacuum. The manufacturing method isolates the coil from the vacuum environment, does not influence the vacuum degree, and improves and enhances the performance of the ultra-large quadrupole lens in vacuum.)
1. A manufacturing method of an ultra-large quadrupole lens in vacuum is characterized by comprising the following steps:
1) decomposing and designing a lens iron core in the vacuum inner ultra-large quadrupole lens into a left upper magnetic yoke, a lower left magnetic yoke, a right upper magnetic yoke, a right lower magnetic yoke which have the same structure and size, and a left upper magnetic pole, a left lower magnetic pole, a right upper magnetic pole and a right lower magnetic pole which have the same structure and size and correspond to the four magnetic yokes; according to the requirements of the design drawing of the magnetic yoke and the magnetic pole, a blank is taken, a magnetic yoke blank and a magnetic pole blank are forged, and heat treatment is carried out;
2) processing the magnetic yoke blank after heat treatment in a large numerical control processing center to obtain four magnetic yokes, wherein the processing precision of each assembly surface of the magnetic yoke meets the design requirement, and the flatness of each assembly surface is less than or equal to 0.03 mm;
3) processing the magnetic pole blank after heat treatment in a large numerical control processing center to obtain four magnetic poles, wherein the processing precision of the assembling surfaces of the magnetic poles and the magnetic yokes meets the design requirement, and the flatness of each assembling surface of the magnetic poles is less than or equal to 0.03 mm; the surface profile degree of the arc surface (9) on the magnetic pole is less than or equal to 0.02 mm;
4) connecting a magnetic yoke and a magnetic pole by using screws, and arranging positioning pins to assemble an 1/4 iron core;
5) connecting four 1/4 iron cores into a whole through bolts, and pre-assembling the lens iron cores;
6) after the assembly is qualified, disassembling the preassembled lens iron core into four parts, cleaning and plating nickel;
7) taking an oxygen-free copper hollow lead, and winding four sets of semi-finished coils; checking the winding size and the insulating property of the semi-finished coil and the water flow parameter of the semi-finished coil;
9) carrying out epoxy vacuum casting on the semi-finished coil which is qualified in inspection to obtain a coil (11);
10) respectively disassembling the four parts plated with nickel in the step 6); assembling a coil (11) on each disassembled magnetic pole, assembling the disassembled magnetic pole with the coil (11) on the disassembled magnetic yoke, fixing the coil (11) to obtain four reassembled 1/4 iron cores, mutually connecting the four reassembled 1/4 iron cores into a whole through screws, and arranging and gathering coil lead outgoing lines (10) reserved in all the coils (11) into a bundle shape; the outer joint seam of the joint of two adjacent disassembled magnetic yokes is welded in a vacuum sealing mode, and the plugs of all screw holes on all disassembled magnetic yokes are welded in a vacuum sealing mode to form a quadrupole lens iron core (4) with a central hole;
11) taking a vacuum pipeline with a heat dissipation strip, and taking a first end cover (1) with a cooling water pipe and a second end cover (7) with the cooling water pipe; welding a first end cover (1) with a cooling water pipe at one end of a vacuum pipeline with a heat dissipation strip in a vacuum sealing manner to form an assembly;
iron core water-cooling tubes (6) are fixedly arranged on two end faces of the quadrupole lens iron core (4);
penetrating a vacuum pipeline with a heat dissipation strip in the assembly into a center hole of a quadrupole lens iron core (4), then leading out a coil lead outlet wire (10) from an iron core water-cooling pipe (6) arranged on the end face of the quadrupole lens iron core (4) with one end being connected with a cooling water pipe on a first cooling water pipe-carrying end cover (1), and penetrating the coil lead outlet wire (10) in a bundle through a wire outlet pipe (12) arranged on the first cooling water pipe-carrying end cover (1);
then, attaching the first end cover (1) with the cooling water pipe to the side wall of the quadrupole lens iron core (4) to determine the installation position; taking a second end cover (7) with a cooling water pipe, connecting an iron core water cooling pipe (6) arranged on the other end surface of the quadrupole lens iron core (4) with the cooling water pipe on the second end cover (7) with the cooling water pipe, and then welding the second end cover (7) with the cooling water pipe on the other end of the vacuum pipeline with the heat dissipation strip in a vacuum sealing manner;
12) taking a transition section vacuum pipeline (2), wherein the transition section vacuum pipeline (2) comprises a hollow cuboid pipeline body (13), a first opening (14) and a second opening (15) are processed on a bottom plate of the pipeline body (13), and a third opening (16) is processed on a top plate of the pipeline body (13); the free end of a coil wire outlet (10) and the free end of a cooling water pipe on a first cooling water pipe end cover (1) penetrate into a first opening (14), penetrate through a pipeline body (13), extend out of a transition section vacuum pipeline (2) from a third opening (16), penetrate the free end of a cooling water pipe on a second cooling water pipe end cover (7) into a second opening (15), extend out of the transition section vacuum pipeline (2) from the third opening (16), and close together the coil wire outlet (10) extending out of the transition section vacuum pipeline (2), a cooling water pipe on the first cooling water pipe end cover (1) and a cooling water pipe on the second cooling water pipe end cover (7) to form a linear pipe bundle; downwards moving the transition section vacuum pipeline (2) to enable the first opening (14) to be aligned with a wire outlet pipe (12) on the first cooling water pipe end cover (1), and the second opening (15) to be aligned with the wire outlet pipe (12) on the second cooling water pipe end cover (7); sleeving a chimney-shaped vacuum isolation pipeline (3) on the line tube bundle, and aligning the lower end of the vacuum isolation pipeline (3) with the third opening (16);
13) vacuum seal welding a transition section vacuum pipeline (2) and a wire outlet pipe (12) on a first cooling water end cover (1), vacuum seal welding a transition section vacuum pipeline (2) and a wire outlet pipe (12) on a second cooling water end cover (1), and vacuum seal welding a transition section vacuum pipeline (2) and a vacuum isolation pipeline (3); the other end of the vacuum isolation pipeline (3) is provided with a pipeline flange (5); and obtaining the ultra-large quadrupole lens in vacuum.
2. The method of manufacturing an in-vacuum ultra-large quadrupole lens according to claim 1, wherein in the step 1), the material of the blank is a magnetic conductive material.
3. The method for manufacturing an ultra-large quadrupole lens in vacuum according to claim 1, wherein in the step 5), when the lens core is pre-assembled, the assembling accuracy of key parts is ensured, and the aperture size of the lens and the size accuracy of the magnetic pole gap are detected and adjusted.
4. The method for manufacturing the in-vacuum ultra-large quadrupole lens according to claim 1, wherein in the step 11), the central hole of the vacuum pipeline with the heat dissipation strip, the central hole of the first end cap (1) with the cooling water pipe and the central hole of the second end cap (7) with the cooling water pipe are communicated to form a lens hole central vacuum tube (8).
Technical Field
The invention belongs to the technical field of a novel manufacturing process of an ultra-large quadrupole lens, namely an ion beam focusing electromagnetic lens, and relates to a manufacturing method of an ultra-large quadrupole lens in vacuum.
Background
The quadrupole lens for focusing or defocusing ion beam is one kind of magnet structure widely used in particle accelerator magnet system, and can make the ion beam pass through the magnetic channel formed by four magnetic poles of the lens and bear certain Lorentz force to complete the focusing or defocusing of ion beam with the quadrupole lens under the action of Lorentz force, and the vacuum super large quadrupole lens is set in vacuum degree of 1 × 10-8In Pa vacuum environment, the lens weight exceeds 9000kg, the width and height of the iron core are over 1.4 m, the iron core is composed of 4 magnetic yokes and 4 corresponding magnetic poles, the four magnetic poles of the iron core are provided with 4 sets of coils which jointly form a quadrupole lens, the coils are assembled in a vacuum-isolated nonmagnetic stainless steel sealing structure, the outside of the coils is vacuum degree of 1 × 10-8Pa, the coil in the sealing structure is communicated with the atmosphere; the quadrupole lens is positioned in a large vacuum chamber, and the top of the vacuum chamber is provided with parts such as a collecting pipe for a cooling coil; the length of the coil lead-out wire part is more than 3 meters; the bottom of the lens is provided with a base for adjusting the height.
Disclosure of Invention
The invention aims to provide a method for manufacturing an ultra-large quadrupole lens in vacuum, which can well control the size of an iron core, isolate a coil from a vacuum environment, does not influence the vacuum degree of a vacuum chamber and enables the performance of a magnetic field to be stable.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows: a manufacturing method of an ultra-large quadrupole lens in vacuum specifically comprises the following steps:
1) decomposing and designing a lens iron core in the vacuum inner ultra-large quadrupole lens into a left upper magnetic yoke, a lower left magnetic yoke, a right upper magnetic yoke, a right lower magnetic yoke which have the same structure and size, and a left upper magnetic pole, a left lower magnetic pole, a right upper magnetic pole and a right lower magnetic pole which have the same structure and size and correspond to the four magnetic yokes; according to the requirements of the design drawing of the magnetic yoke and the magnetic pole, a blank is taken, a magnetic yoke blank and a magnetic pole blank are forged, and heat treatment is carried out;
2) processing the magnetic yoke blank after heat treatment in a large numerical control processing center to obtain four magnetic yokes, wherein the processing precision of each assembly surface of the magnetic yoke meets the design requirement, and the flatness of each assembly surface is less than or equal to 0.03 mm;
3) processing the magnetic pole blank after heat treatment in a large numerical control processing center to obtain four magnetic poles, wherein the processing precision of the assembling surfaces of the magnetic poles and the magnetic yokes meets the design requirement, and the flatness of each assembling surface of the magnetic poles is less than or equal to 0.03 mm; the surface profile degree of the arc surface on the magnetic pole is less than or equal to 0.02 mm;
4) connecting a magnetic yoke and a magnetic pole by using screws, and arranging positioning pins to assemble an 1/4 iron core;
5) connecting four 1/4 iron cores into a whole through bolts, and pre-assembling the lens iron cores;
6) after the assembly is qualified, disassembling the preassembled lens iron core into four parts, cleaning and plating nickel;
7) taking an oxygen-free copper hollow lead, and winding four sets of semi-finished coils; checking the winding size and the insulating property of the semi-finished coil and the water flow parameter of the semi-finished coil;
9) carrying out epoxy vacuum casting on the semi-finished coil which is qualified in inspection to obtain a coil;
10) respectively disassembling the four parts plated with nickel in the step 6); assembling a coil on each disassembled magnetic pole, assembling the disassembled magnetic pole with the coil on the disassembled magnetic yoke, fixing the coil to obtain four reassembled 1/4 iron cores, mutually connecting the four reassembled 1/4 iron cores into a whole through screws, and arranging and gathering coil leads reserved by all coils to be led out into a bundle shape; the outer joint seam of the joint of two adjacent disassembled magnetic yokes is welded in a vacuum sealing mode, and the plugs of all screw holes on all disassembled magnetic yokes are welded in a vacuum sealing mode to form a quadrupole lens iron core with a central hole;
11) taking a vacuum pipeline with a heat dissipation strip, and taking a first end cover with a cooling water pipe and a second end cover with a cooling water pipe; welding the first end cover with the cooling water pipe at one end of the vacuum pipe with the heat dissipation strip in a vacuum sealing manner to form an assembly;
iron core water cooling tubes are fixedly arranged on two end faces of the quadrupole lens iron core;
penetrating a vacuum pipeline with a heat dissipation strip in the assembly into a central hole of the quadrupole lens iron core, then connecting an iron core water-cooling pipe arranged on the end face of the quadrupole lens iron core, where the outgoing end of the coil lead is led out, with a cooling water pipe on a first cooling water pipe-carrying end cover, and penetrating the bundled coil lead outgoing line through a line outlet pipe arranged on the first cooling water pipe-carrying end cover;
then, attaching the end cover with the cooling water pipe to the side wall of the quadrupole lens iron core, and determining the installation position; taking a second end cover with a cooling water pipe, connecting an iron core water cooling pipe arranged on the other end surface of the quadrupole lens iron core with the cooling water pipe on the second end cover with the cooling water pipe, and then welding the second end cover with the cooling water pipe at the other end of the vacuum pipeline with the heat dissipation strip in a vacuum sealing manner;
12) taking a transition section vacuum pipeline, wherein the transition section vacuum pipeline comprises a hollow cuboid pipeline body, a first opening and a second opening are processed on a bottom plate of the pipeline body, and a third opening is processed on a top plate of the pipeline body; the free end of the coil wire outlet and the free end of the cooling water pipe on the first end cover with the cooling water pipe are inserted into the first opening, penetrate through the pipeline body and extend out of the transition section vacuum pipeline from the third opening, the free end of the cooling water pipe on the second end cover with the cooling water pipe is inserted into the second opening and extend out of the transition section vacuum pipeline from the third opening, and the coil wire outlet extending out of the transition section vacuum pipeline, the cooling water pipe on the first end cover with the cooling water pipe and the cooling water pipe on the second end cover with the cooling water pipe are combined to form a wire tube bundle; moving the transition section vacuum pipeline downwards to enable the first opening to be aligned with the wire outlet pipe on the first cooling water pipe end cover, and the second opening to be aligned with the wire outlet pipe on the second cooling water pipe end cover; sleeving a chimney-shaped vacuum isolation pipeline on the line pipe bundle, and aligning the lower end of the vacuum isolation pipeline with the third opening;
13) vacuum seal welding a transition section vacuum pipeline and a wire outlet pipe on a first belt cooling water end cover, vacuum seal welding a transition section vacuum pipeline and a wire outlet pipe on a second belt cooling water end cover, and vacuum seal welding a transition section vacuum pipeline and a vacuum isolation pipeline; the other end of the vacuum isolation pipeline is provided with a pipeline flange; and obtaining the ultra-large quadrupole lens in vacuum.
The manufacturing method of the invention adopts a new process for isolating the coil from the vacuum environment to manufacture the ultra-large quadrupole lens in vacuum, has the advantages of good structural stability, simple and convenient assembly, high processing precision, small shape dimension and shape error, no influence of the coil packaged in the vacuum sealing structure on the vacuum degree in the large vacuum chamber, good magnetic field index, and improvement of the performance of the ultra-large quadrupole lens in vacuum, and is a very ideal result.
Drawings
Fig. 1 is a schematic view of an ultra-large quadrupole lens to be manufactured by the manufacturing method of the present invention.
Fig. 2 is a rear view of fig. 1.
Fig. 3 is a schematic view of a yoke manufactured by the manufacturing method of the present invention.
Fig. 4 is a schematic view of a magnetic pole fabricated by the fabrication method of the present invention.
Fig. 5 is a schematic view of 1/4 cores formed by combining a yoke and a magnetic pole manufactured by the manufacturing method of the present invention.
Fig. 6 is a schematic view of a lens core pre-assembled in the manufacturing method of the present invention.
Fig. 7 is a schematic view of a quadrupole lens core manufactured by the manufacturing method of the present invention.
FIG. 8 is a schematic view of a vacuum tube with heat sink fins for use in the manufacturing method of the present invention.
Fig. 9 is a schematic view of an end cap with a cooling water pipe used in the manufacturing method of the present invention.
Fig. 10 is a rear view of fig. 9.
FIG. 11 is a schematic view of a transition piece vacuum tube used in the manufacturing method of the present invention.
Fig. 12 is a schematic view of a vacuum insulated pipe used in the manufacturing method of the present invention.
In the figure: 1. the structure comprises a first end cover with a cooling water pipe, 2, a transition section vacuum pipeline, 3, a vacuum isolation pipeline, 4, a quadrupole lens iron core, 5, a pipeline flange, 6, an iron core water cooling pipe and 7, a second end cover with a cooling water pipe; 8. the lens hole comprises a central vacuum tube, 9 arc surfaces, 10 coil lead wires, 11 coils, 12 outlet tubes, 13 pipeline bodies, 14 first openings, 15 second openings and 16 third openings.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
The invention provides a method for manufacturing an ultra-large quadrupole lens in vacuum, which is used for manufacturing the prior art ultra-large quadrupole lens in vacuum shown in figures 1 and 2, wherein the ultra-large quadrupole lens meets the requirement of isolating a coil from a vacuum environment. The manufacturing method specifically comprises the following steps:
1) decomposing and designing a lens iron core in the vacuum inner ultra-large quadrupole lens into a left upper magnetic yoke, a left lower magnetic yoke, a right upper magnetic yoke, a right lower magnetic yoke, a left upper magnetic pole, a left lower magnetic pole, a right upper magnetic pole and a right lower magnetic pole which correspond to the four magnetic yokes, wherein the four magnetic yokes have the same structure and size, and the four magnetic poles have the same structure and size; according to the size and the material required in the design drawing, the blank of the corresponding material is taken and forged into a magnet yoke blank and a magnetic pole blank, and the magnet yoke blank and the magnetic pole blank are subjected to heat treatment;
the magnetic yoke and the magnetic pole are made of magnetic materials. According to the forming mechanism, forging can be divided into free forging, die forging, ring rolling and special forging. The special forging is also a die forging mode. For the magnetic conductive material, the material has uniform structure, the material has low coercive force and good magnetic conductivity when the crystal grains are coarse, but the crystal grains of the material can be broken in the forging process to cause the coercive force to be increased, so that a necessary heat treatment process needs to be adopted after the forging to increase the crystal grains of the material and eliminate various stresses, thereby reducing the coercive force of the material, improving the magnetic permeability and achieving the aim of improving the magnetic performance.
2) Processing the magnetic yoke blank after heat treatment in a large numerical control processing center to obtain four magnetic yokes shown in figure 3, ensuring that the processing precision of each assembly surface on the magnetic yoke meets the design requirement, and ensuring that the flatness of each assembly surface is less than or equal to 0.03 mm;
3) processing the magnetic pole blank after heat treatment in a large numerical control processing center to obtain four magnetic poles shown in figure 4, ensuring that the processing precision of the assembling surfaces of the magnetic poles and the magnetic yokes meets the design requirement, and ensuring that the flatness of each assembling surface of the magnetic poles is less than or equal to 0.03 mm; the surface profile degree of the
4) connecting a magnetic yoke and a magnetic pole by using screws, and arranging a positioning pin to ensure the assembly resetting precision, so as to assemble the 1/4 iron core shown in the figure 5;
5) connecting the four assembled 1/4 iron cores into a whole by using screws through screw holes reserved on the magnetic yoke, and pre-assembling the lens iron cores to form the complete lens iron core shown in fig. 6; when the lens iron core is preassembled, the assembling precision of key parts is ensured, and the aperture size of the lens and the size precision of the magnetic pole gap are detected and adjusted;
6) after the assembly is qualified, the preassembled lens iron core is disassembled into four parts (namely a magnetic yoke and a magnetic pole combination), the surfaces of the four parts are cleaned, and then nickel is plated to prevent rusting;
7) taking a TU1 oxygen-free copper hollow lead which is in a regular cuboid shape and is provided with a circular water cooling hole at the center;
checking the smoothness of the inner hole of the hollow conductor: firstly, compressed air is introduced into an inner hole of a lead, and impurities and the like in the inner hole are blown clean; then, a steel ball passing experiment is carried out on the copper conductor, namely, the steel ball with the diameter of 90% of the inner diameter of the hollow conductor is sent into the inner hole of the hollow conductor from one end of the hollow conductor, and the steel ball is blown out from the other end of the hollow conductor by compressed air;
then, burrs and the like which possibly affect the insulating property of the coil on the surface of the hollow lead are cleaned; scrubbing the surface of the copper conductor by using industrial alcohol to remove residues such as oil stains, powder and the like;
8) winding four sets of semi-finished coils on the processed coil winding die according to a specified winding method; checking that parameters such as winding size, insulating property, water flow and the like of the semi-finished coil meet requirements;
9) according to a specified procedure, epoxy vacuum casting is carried out on the semi-finished coil which is qualified in inspection to obtain the
10) respectively disassembling the four parts plated with nickel in the step 6), namely disassembling the magnetic pole from the magnetic yoke to form a disassembled magnetic yoke and a disassembled magnetic pole; assembling a
11) taking the vacuum pipeline with the heat dissipation strips shown in the figure 8, and taking two end covers with cooling water pipes shown in the figures 9 and 10, wherein one end cover with the cooling water pipes is a first end cover with the cooling water pipes 1, and the other end cover with the cooling water pipes is a second end cover with the
iron core
penetrating a vacuum pipeline with a heat dissipation strip in the assembly into a central hole of a quadrupole
then, attaching the first end cover 1 with the cooling water pipe to the side wall of the quadrupole
12) taking the transition section vacuum pipeline 2 shown in fig. 11, the transition section vacuum pipeline 2 includes a hollow cuboid pipeline body 13, a first opening 14 and a second opening 15 are processed on a bottom plate of the pipeline body 13, and a third opening 16 is processed on a top plate of the pipeline body 13; the free end of a coil wire outlet 10 and the free end of a cooling water pipe on a first end cover 1 with the cooling water pipe are inserted into a first opening 14, penetrate through a pipeline body 13, extend out of a transition section vacuum pipeline 2 from a third opening 16, penetrate a free end of a cooling water pipe on a second end cover 7 with the cooling water pipe into a second opening 15, extend out of the transition section vacuum pipeline 2 from the third opening 16, and merge together the coil wire outlet 10 extending out of the transition section vacuum pipeline 2, the cooling water pipe on the first end cover 1 with the cooling water pipe and the cooling water pipe on the second end cover 7 with the cooling water pipe to form a wire tube bundle; moving the transition section vacuum pipeline 2 downwards to enable the first opening 14 to be aligned with the outlet pipe 12 on the first cooling water pipe end cover 1, and the second opening 15 to be aligned with the outlet pipe 12 on the second cooling water pipe end cover 7; the chimney-like vacuum insulation pipe 3 shown in fig. 12 is fitted over the bundle of wires with the lower end of the vacuum insulation pipe 3 aligned with the third opening 16;
13) vacuum seal welding a transition
The manufactured ultra-large quadrupole lens in vacuum needs vacuum detection and magnetic field measurement:
1) helium mass spectrum vacuum leak detection is carried out on a vacuum sealing part of the ultra-large quadrupole lens in vacuum, wherein the vacuum sealing part is provided with a
2) And (3) carrying out magnetic field measurement on the ultra-large quadrupole lens in vacuum with qualified helium mass spectrum vacuum leak detection, and ensuring that the magnetic field performance meets the requirements.
The vacuum inner ultra-large quadrupole lens qualified for vacuum leak detection and magnetic field measurement can be installed for use, when in use, the whole body is installed in a large vacuum chamber, the
The vacuum pipeline with the heat dissipation strip, the first end cover 1 with the cooling water pipe, the
And a
The manufacturing method of the invention divides the quadrupole
The vacuum pipeline with the heat dissipation strips, the first end cover 1 with the cooling water pipe, the
The