阅读说明：本技术 微型气体输送装置 (Miniature gas conveying device ) 是由 莫皓然 陈世昌 廖家淯 廖鸿信 高中伟 黄启峰 韩永隆 李伟铭 于 2019-02-22 设计创作，主要内容包括：一种微型气体输送装置,包括依序堆叠的设置的进气板、共振片、压电致动器、绝缘片及导电片。进气板具有进气孔、汇流排孔及汇流腔室。共振片具有中空孔。压电致动器与共振片之间定义腔室空间,压电致动器包含悬浮板、外框、连接部及压电元件,连接部连接于悬浮板及外框之间,并定义间隙以供气体流通。导电片具有导电内引脚,用以电连接压电元件。当压电致动器受驱动时,气体由进气孔导入,流经汇流腔室、中空孔导入腔室空间内,再经由间隙排出,以实现气体的传输。(A micro gas conveying device comprises an air inlet plate, a resonance sheet, a piezoelectric actuator, an insulation sheet and a conducting sheet which are sequentially stacked. The air inlet plate is provided with an air inlet hole, a bus bar hole and a bus chamber. The resonator plate has a hollow hole. The piezoelectric actuator and the resonance sheet define a cavity space, the piezoelectric actuator comprises a suspension plate, an outer frame, a connecting part and a piezoelectric element, and the connecting part is connected between the suspension plate and the outer frame and defines a gap for gas circulation. The conducting strip is provided with a conducting inner pin for electrically connecting the piezoelectric element. When the piezoelectric actuator is driven, gas is introduced from the gas inlet hole, flows through the confluence chamber and the hollow hole, is introduced into the chamber space, and is discharged through the gap, so that the gas is transmitted.)

1. A micro gas delivery device, comprising:

the air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a confluence chamber, wherein at least one air inlet hole is used for introducing air, at least one air inlet hole corresponds to at least one bus bar hole, at least one bus bar hole is correspondingly communicated with the confluence chamber, and the air is guided to converge into the confluence chamber through at least one air inlet hole;

a resonance sheet, which is jointed with the air inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the air inlet plate;

a piezoelectric actuator assembled and combined on the resonance sheet through a filling material to form a cavity space, wherein the piezoelectric actuator comprises a suspension plate, an outer frame, at least one connecting part, a piezoelectric element and at least one gap, the at least one connecting part is connected between the suspension plate and the outer frame to provide elastic support, the at least one gap is arranged between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element is attached to the suspension plate;

an insulating sheet coupled to one side of the piezoelectric actuator; and

a conductive plate, which is combined with the insulating plate and is provided with a conductive inner pin which is integrally punched, and a conductive position extends inwards from any edge of the conductive plate for contacting, jointing, positioning and connecting with the surface of the piezoelectric element;

when the piezoelectric actuator is driven, gas is led in from at least one air inlet of the air inlet plate, is converged to the converging cavity through at least one bus bar hole, flows through the hollow hole of the resonance sheet and is led into the cavity space, and then is transmitted through the resonance action of the piezoelectric actuator.

2. The micro gas delivery device according to claim 1, wherein the length of the conductive inner leads is between 2.0mm and 6.5 mm.

3. The micro gas delivery device according to claim 1, wherein the width of the conductive inner leads is 0.1mm to 1 mm.

4. The micro gas delivery device according to claim 1, wherein the conductive inner lead is bent inward at a bending angle and a bending height on any side of the conductive sheet to form an extension portion, the extension portion has a bifurcation portion, the bifurcation portion and the conductive sheet maintain the bending height, and the bending height maintains a height in contact with the thickness of the piezoelectric element, so that the bifurcation portion is attached to the surface of the piezoelectric element, and the bifurcation portion and the piezoelectric element are combined and positioned through a surface bonding medium.

5. The micro gas delivery device according to claim 4, wherein the bend angle is 15 degrees.

6. The micro gas delivery device according to claim 4, wherein the bend height is 1 mm.

7. The micro gas delivery device according to claim 4, wherein the bifurcation has an intermediate separation distance that allows the bifurcation to couple to the piezoelectric element through the surface coupling medium.

8. The micro gas delivery device according to claim 7, wherein the intermediate separation distance of the bifurcation is between 0.1mm and 0.5 mm.

9. The micro gas delivery device according to claim 4, wherein the surface-bonding medium is one of an alloy melt, a conductive paste, a conductive ink, or a conductive resin.

10. The micro gas delivery device according to claim 1, wherein the suspension plate of the piezoelectric actuator includes a first surface and a second surface opposite to the first surface, the piezoelectric element is attached to the second surface of the suspension plate, and the outer frame of the piezoelectric actuator has a mating surface and a lower surface.

11. The micro gas delivery device according to claim 10, wherein the first surface of the suspension plate and the mating surface of the outer frame both form a common plane.

12. The micro gas delivery device according to claim 10, wherein at least one connecting portion is formed by stamping between the suspension plate and the outer frame, the first surface of the suspension plate and the mating surface of the outer frame are formed to be non-coplanar, and a distance between the first surface of the suspension plate and the resonator plate is adjusted by stamping at least one connecting portion.

13. The micro gas delivery device according to claim 1, wherein the movable portion of the resonator plate is disposed around the hollow hole in a region opposite to the confluence chamber.

14. The micro gas delivery device according to claim 1, wherein the fixing portion of the resonator plate is disposed at an outer peripheral portion of the resonator plate and is attached to the inlet plate.

15. The micro gas delivery device according to claim 1, wherein the filler material is a conductive adhesive.

16. The micro gas delivery device as claimed in claim 1, wherein the outer frame has a conductive pin, and the conductive plate has a conductive pin for electrical connection.

17. The micro gas delivery device according to claim 10, wherein the suspension plate is provided with a protrusion on the first surface thereof corresponding to the movable portion of the resonator plate.

Technical Field

The present invention relates to a pneumatic power device, and more particularly to a miniature ultra-thin and silent miniature gas conveying device.

Background

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power are often powered by conventional motors and pneumatic valves for gas delivery. However, the volume of the conventional motor and the gas valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, the conventional motor and gas valve also generate noise during operation, which causes inconvenience and discomfort in use.

Therefore, how to develop a micro gas delivery device that can maintain a certain operating characteristic and flow rate for a long time is a problem that needs to be solved.

Disclosure of Invention

The main object of the present invention is to provide a micro gas delivery device, wherein gas enters from an air inlet on the micro gas delivery device, and the actuation of a piezoelectric actuator is utilized to generate a pressure gradient in a designed flow channel and a converging chamber, so as to enable the gas to flow at a high speed, thereby achieving the effect of silence in the micro gas delivery device, further reducing the overall volume and thinning of the micro gas power device, and further achieving the portable and comfortable purpose of the micro gas power device.

To achieve the above object, a broader aspect of the present invention provides a micro gas delivery device, including: the air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a confluence chamber, wherein at least one air inlet hole is used for introducing air, at least one air inlet hole corresponds to at least one bus bar hole, at least one bus bar hole is correspondingly communicated with the confluence chamber, and the air is guided to converge into the confluence chamber through at least one air inlet hole; a resonance sheet, which is jointed with the air inlet plate and is provided with a hollow hole, a movable part and a fixed part, wherein the hollow hole is positioned at the center of the resonance sheet and corresponds to the confluence chamber of the air inlet plate; a piezoelectric actuator assembled and combined on the resonance sheet through a filling material to form a cavity space, wherein the piezoelectric actuator comprises a suspension plate, an outer frame, at least one connecting part, a piezoelectric element and at least one gap, the at least one connecting part is connected between the suspension plate and the outer frame to provide elastic support, the at least one gap is arranged between the suspension plate and the outer frame to provide gas circulation, and the piezoelectric element is attached to the suspension plate; an insulating sheet coupled to one side of the piezoelectric actuator; the conducting plate is combined with the insulating sheet, is provided with a conducting inner pin which is integrally punched, and extends inwards to form a conducting position from any edge of the conducting plate so as to be contacted, jointed, positioned and connected with the surface of the piezoelectric element; when the piezoelectric actuator is driven, gas is led in from at least one air inlet of the air inlet plate, is converged to the converging cavity through at least one bus bar hole, flows through the hollow hole of the resonance sheet and is led into the cavity space, and then is transmitted through the resonance action of the piezoelectric actuator.

Drawings

Fig. 1 is a schematic perspective view of the micro gas delivery device.

Fig. 2A is a schematic exploded view of the micro gas delivery device in a front view.

Fig. 2B is an exploded schematic view of the micro gas delivery device in a back view.

FIG. 3A is a schematic cross-sectional view of the micro gas delivery device of the present invention.

FIG. 3B is a schematic cross-sectional view of another preferred embodiment of the micro gas delivery device.

Fig. 4 is an enlarged partial schematic view of a conductive inner pin of the micro gas delivery device.

Fig. 5A to 5C are schematic operation diagrams of the micro gas delivery device shown in fig. 3A.

Description of the reference numerals

1: miniature gas conveying device

11: air inlet plate

11 a: air intake

11 b: bus bar hole

11 c: confluence chamber

12: resonance sheet

12 a: hollow hole

12 b: movable part

12 c: fixing part

13: piezoelectric actuator

13 a: suspension plate

131 a: first surface

132 a: second surface

13 b: outer frame

131 b: matched surface

132 b: lower surface

133 b: conductive pin

13 c: connecting part

13 d: piezoelectric element

13 e: gap

13 f: convex part

131 f: surface of the convex part

14: insulating sheet

15: conductive sheet

151 a: conductive pin

151 b: conductive inner pin

1511 b: extension part

1512 b: branching part

16: chamber space

g: filling material

h: distance between each other

θ: bending angle

H: height of bending

P: intermediate separation distance

Detailed Description

Embodiments that embody the features and advantages of this disclosure will be described in detail in the description that follows. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1, fig. 2A, fig. 2B and fig. 3A, the micro gas delivery device 1 of the present invention includes an air inlet plate 11, a resonator plate 12, a piezoelectric actuator 13, an insulating plate 14 and a conductive plate 15 stacked in sequence.

The air inlet plate 11 has at least one air inlet hole 11a, at least one bus bar hole 11b and a bus bar chamber 11c, the number of the air inlet holes 11a is the same as that of the bus bar holes 11b, in this embodiment, the number of the air inlet holes 11a and the number of the bus bar holes 11b are 4 for illustration, but not limited thereto; the 4 intake holes 11a penetrate the 4 bus holes 11b, respectively, and the 4 bus holes 11b converge to the confluence chamber 11 c.

The above-mentioned resonator plate 12 can be assembled on the air intake plate 11 by means of bonding, and the resonator plate 12 has a hollow hole 12a, a movable portion 12b and a fixed portion 12c, the hollow hole 12a is located at the center of the resonator plate 12 and corresponds to the converging chamber 11c of the air intake plate 11, and the area which is disposed around the hollow hole 12a and is opposite to the converging chamber 11c is the movable portion 12b, and the area which is disposed at the outer peripheral edge portion of the resonator plate 12 and is bonded and fixed on the air intake plate 11 is the fixed portion 12 c.

The piezoelectric actuator 13 includes a suspension plate 13a, an outer frame 13b, at least one connecting portion 13c, a piezoelectric element 13d, at least one gap 13e, and a protrusion 13 f; the suspension plate 13a is a square suspension plate having a first surface 131a and a second surface 132a opposite to the first surface 131a, the outer frame 13b is disposed around the periphery of the suspension plate 13a, and the outer frame 13b has a set of mating surfaces 131b and a lower surface 132b, and is connected between the suspension plate 13a and the outer frame 13b through at least one connection portion 13c to provide a supporting force for elastically supporting the suspension plate 13a, wherein the first surface 131a of the suspension plate 13a and the mating surface 131b of the outer frame 13b form a common plane, the second surface 132a of the suspension plate 13a and the lower surface 132b of the outer frame 13b form a common plane, and the gap 13e is a gap between the suspension plate 13a, the outer frame 13b and the connection portion 13c for allowing air to pass through. In addition, the first surface 131a of the suspension plate 13a has a convex portion 13f, and in this embodiment, the periphery of the convex portion 13f and the connection portion adjacent to the connection portion 13c are recessed by an etching process, so that the convex portion surface 131f of the convex portion 13f of the suspension plate 13a is higher than the first surface 131a, thereby forming a step-like structure. In addition, the outer frame 13b is disposed around the outer side of the suspension board 13a, and has a conductive pin 133b protruding outward for electrical connection, but not limited thereto.

The resonator plate 12 and the piezoelectric actuator 13 are stacked and assembled with each other through a filler g to form a cavity space 16 therebetween, and the filler g may be a conductive adhesive, but not limited thereto, so that a depth of a gap h may be maintained between the resonator plate 12 and a convex surface 131f of a convex portion 13f of the piezoelectric actuator 13, thereby guiding an air flow to flow more rapidly, and since the convex portion 13f of the suspension plate 13a maintains a proper distance from the resonator plate 12, contact interference between the resonator plate and the suspension plate is reduced, and noise generation is reduced; in other embodiments, as shown in fig. 3B, the resonator plate 12 and the piezoelectric actuator 13 are stacked and assembled with each other through a filling material g to form a cavity space 16 therebetween, or the suspension plate 13a is pressed to be recessed downward, the recessed distance of the suspension plate can be adjusted by at least one connection portion 13c formed between the suspension plate 13a and the outer frame 13B, so that the convex surface 131f of the convex portion 13f on the suspension plate 13a and the assembling surface 131B of the outer frame 13B form a non-coplanar surface, that is, the convex surface 131f of the convex portion 13f is lower than the assembling surface 131B of the outer frame 13B, the second surface 132a of the suspension plate 13a is lower than the lower surface 132B of the outer frame 13B, the piezoelectric element 13d is attached to the second surface 132a of the suspension plate 13a and is disposed opposite to the convex portion 13f, and after the piezoelectric element 13d is applied with a driving voltage, deformation is generated due to the piezoelectric effect, and the suspension plate 13a is driven to vibrate; the small amount of the filler g is coated on the assembling surface 131b of the outer frame 13b, and the piezoelectric actuator 13 is attached to the fixing portion 12c of the resonator plate 12 by thermal compression, so that the piezoelectric actuator 13 is assembled and combined with the resonator plate 12. Wherein the gap h formed between the first surface 131a of the suspension plate 13a and the resonant plate 12 affects the transmission effect of the micro gas transportation device 1, so that it is very important to maintain a fixed gap h for providing stable transmission efficiency for the micro gas transportation device 1, the micro gas transportation device 1 of the present application uses a stamping method for the piezoelectric actuator 13 to make the suspension plate 13a recess downwards, so that the first surface 131a of the suspension plate 13a and the assembly surface 131b of the outer frame 13b are non-coplanar, i.e. the first surface 131a of the suspension plate 13a is lower than the assembly surface 131b of the outer frame 13b, and the second surface 132a of the suspension plate 13a is lower than the lower surface 132b of the outer frame 13b, so that the suspension plate 13a of the piezoelectric actuator 13 is recessed to form a space to form an adjustable gap h with the resonant plate 12, and the suspension plate 13a directly passing through the piezoelectric actuator 13 is modified to form a gap h by forming a recess, thus, the required gap h can be achieved by adjusting the forming recess distance of the suspension plate 13a of the piezoelectric actuator 13, thereby effectively simplifying the structural design for adjusting the gap h, and achieving the advantages of simplifying the manufacturing process and shortening the manufacturing time.

The insulating sheet 14 and the conductive sheet 15 are frame-shaped thin sheets, and are sequentially stacked and bonded to one side of the piezoelectric actuator 13. In the present embodiment, the insulation sheet 14 is attached to the lower surface 132b of the outer frame 13b of the piezoelectric actuator 13, and the conductive sheet 15 is stacked and bonded on the insulation sheet 14. And the form thereof substantially corresponds to the form of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheet 14 is made of an insulating material, such as: plastic, but not limited to this, for insulation; in other embodiments, the conductive sheet 15 is made of a conductive material, such as: but not limited to, metal for electrical conduction. In the present embodiment, a conductive pin 151a may also be disposed on the conductive sheet 15 for electrical conduction. In order to solve the problem that the two electrodes (not shown) for driving the piezoelectric element 13d of the piezoelectric actuator 13 are fixed on the piezoelectric element 13d by welding in a known manner by using more than one conductive wire, but the electrodes on the piezoelectric element 13d need to be fixed by using a jig and have different alignment positions according to different processes, which greatly causes assembly complexity, the present invention provides a conductive inner pin 151b provided on the conductive plate 15 as one of the two electrodes for driving the piezoelectric element 13d, so as to overcome the problem that the electrodes are led out by a conductive wire, the conductive inner pin 151b is integrally punched by the conductive plate 15, and the conductive inner pin 151b can extend out of a conductive position inward on any side of the outer frame of the conductive plate 15 and can be in any shape for external connection of the electrodes, the conductive inner lead 151b is bent inward by an extension 1511b at any side of the outer frame of the conductive sheet 15, in this embodiment, the length of the conductive inner lead 151b is 2.0mm to 6.5mm, the width is 0.1mm to 1mm, the inward bending angle θ of the extension 1511b is 15 degrees, the bending height H is 1mm, the extension 1511b has a branch portion 1512b, the branch portion 1512b maintains a bending height H with the outer frame of the conductive sheet 15, the optimal bending height H is a height that is consistent with the thickness of the piezoelectric element 13d to achieve good contact effect, in this embodiment, the bending height H is 1mm, so that the branch portion 1512b can be adhered to the surface of the piezoelectric element 13d, and the middle spacing distance P of the branch portion 1512b is 0.1mm to 0.5mm, so that the middle spacing distance P of the branch portion 1512b is fixed to the surface bonding medium of the piezoelectric element 13d by melting alloy, conductive adhesive, conductive ink, conductive resin, or the like, so as to achieve better adhesion effect.

Please continue to refer to fig. 5A to 5C, which are schematic operation diagrams of the micro gas delivery device 1 shown in fig. 3A, please refer to fig. 5A first, after the piezoelectric element 13d of the piezoelectric actuator 13 is applied with the driving voltage, the piezoelectric element is deformed to drive the suspension plate 13A to move downward, and the resonance plate 12 is simultaneously moved downward under the influence of the resonance principle, at this time, the volume of the chamber space 16 is increased, so that a negative pressure is formed in the chamber space 16, and the external gas of the micro gas delivery device 1 is sucked through the gas inlet 11a, enters the manifold chamber 11C through the manifold hole 11b, and enters the chamber space 16 through the hollow hole 12 a; referring to fig. 5B again, when the piezoelectric element 13d drives the suspension plate 13a to move upward, the chamber space 16 is compressed, and the gas in the chamber space 16 is forced to be transmitted downward through the gap 13e, so as to achieve the effect of transmitting the gas, and meanwhile, the resonator 12 is also moved upward by the suspension plate 13a due to resonance, so as to synchronously push the gas in the confluence chamber 11c to move toward the chamber space 16, so that the movable portion 12B of the resonator 12 moves upward, and the gas cannot be sucked through the air inlet 11a temporarily; finally, referring to fig. 5C, when the suspension plate 13a is driven downward again and the suspension plate 13a returns to the inactive position and maintains the horizontal position, the movable portion 12b of the resonator 12 is driven to move downward at the same time, the resonator 12 moves the gas in the compression chamber space 16 to the gap 13e and increases the volume in the collecting chamber 11C, so that the gas can continuously pass through the gas inlet 11a and the collecting hole 11b and then is collected in the collecting chamber 11C; by repeating the operations of fig. 5A to 5C, the micro gas transportation device 1 can continuously introduce gas from the gas inlet 11a and then downwards transport the gas through the gap 13e to continuously draw up the gas, so as to form the operation of transporting gas of the micro gas transportation device 1.

In summary, the micro gas delivery device provided by the present disclosure is mainly characterized in that gas enters from an air inlet on the micro gas delivery device, and the actuation of the piezoelectric actuator is utilized to generate a pressure gradient in the designed flow channel and the confluence chamber, so that the gas flows at a high speed, and thus the micro gas delivery device can achieve the effect of silence, further reduce the overall volume and reduce the thickness of the micro gas power device, and further achieve the purpose of light and comfortable portability of the micro gas power device, and can be widely applied to medical devices and related equipment.

While the present invention has been described in detail with reference to the above embodiments, it will be apparent to one skilled in the art that various changes and modifications can be made therein without departing from the scope of the invention as defined in the appended claims.