阅读说明：本技术 耗散增益耦合微腔系统 (Dissipative gain coupled microcavity system ) 是由 张靖 张皖哲 杨震宁 关剑卿 施炜 霍跃 于 2020-04-16 设计创作，主要内容包括：本申请涉及一种耗散增益耦合微腔系统,所述第一传输通道和第二传输通道分别设置在所述第一被动微腔和所述第二被动微腔的两侧。所述第一传输通道、所述第二传输通道、所述第一被动微腔和所述第二被动微腔设置于同一平面。通过调整所述第一被动微腔的大小、所述激光的频率、所述第一传输通道和所述第一被动微腔之间的距离,可以在所述第一被动微腔产生拉曼光。然后通过使所述第一被动微腔和所述第二被动微腔耦合、所述第二被动微腔和所述第二传输通道耦合输出拉曼光。主动微腔需要掺杂铒等增益介质,生产工艺复杂,成本高。而第一被动微腔不需要掺杂所述增益介质,通过所述第一被动微腔替换主动微腔,可以降低生产工艺的难度,可以降低耗散增益耦合微腔系统的成本。(The application relates to a dissipation gain coupling microcavity system, first transmission passageway and second transmission passageway set up respectively first passive microcavity with the both sides of second passive microcavity. The first transmission channel, the second transmission channel, the first passive microcavity and the second passive microcavity are arranged on the same plane. By adjusting the size of the first passive microcavity, the frequency of the laser, and the distance between the first transmission channel and the first passive microcavity, raman light can be generated at the first passive microcavity. And then coupling out Raman light by coupling the first passive microcavity and the second passive microcavity, and coupling out the second passive microcavity and the second transmission channel. The active microcavity needs erbium-doped gain medium, and the like, and has complex production process and high cost. The first passive microcavity does not need to be doped with the gain medium, and the active microcavity is replaced by the first passive microcavity, so that the difficulty of the production process can be reduced, and the cost of the dissipation gain coupling microcavity system can be reduced.)

1. A dissipative gain-coupled microcavity system, comprising:

a laser emitting device (100) for emitting laser light;

an optical microcavity device (200), comprising:

a first passive microcavity (210);

a second passive microcavity (220), the first passive microcavity (210) and the second passive microcavity (220) being disposed adjacent to each other; and

the Raman laser comprises a first transmission channel (230) and a second transmission channel (240), wherein the first transmission channel (230) and the second transmission channel (240) are respectively arranged on two sides of a first passive microcavity (210) and a second passive microcavity (220), the first transmission channel (230), the second transmission channel (240), the first passive microcavity (210) and the second passive microcavity (220) are arranged on the same plane, laser is coupled with the first passive microcavity (210) through the first transmission channel (230) to output Raman laser, and the Raman laser is coupled with the second passive microcavity (220) and then output through the second transmission channel (240).

2. The dissipative gain-coupled microcavity system of claim 1, wherein the first transmission channel (230) and the second transmission channel (240) are both optical fibers.

3. The dissipative gain-coupled microcavity system according to claim 2, wherein the first passive microcavity (210) and the second passive microcavity (220) are both disc structures.

4. The dissipative gain-coupled microcavity system according to claim 3, wherein the diameter of the first transmission channel (230) is smaller than the thickness of the first passive microcavity (210).

5. The dissipative gain-coupled microcavity system according to any of claims 1 to 4, wherein the distance between the first passive microcavity (210) and the second passive microcavity (220) is 8 microns to 12 microns.

6. The dissipative gain-coupled microcavity system as claimed in any of claims 1 to 4, wherein a distance between the first transmission channel (230) and the first passive microcavity (210) is in a range of 100 nanometers to 5 micrometers.

7. The dissipative gain-coupled microcavity system according to any of claims 1 to 4, wherein the first passive microcavity (210) and the second passive microcavity (220) each have a diameter of 40 to 80 microns.

8. The dissipative gain-coupled microcavity system according to any of claims 1 to 4, wherein the material of the first passive microcavity (210) and the second passive microcavity (220) comprises silicon dioxide.

9. The dissipative gain-coupled microcavity system according to claim 1, wherein the laser emitting device (100) comprises:

a laser pump source (110) for generating the laser light;

and the laser amplifier (130) is connected with the laser pumping source (110) and is used for adjusting the power of the laser.

10. The dissipative gain-coupled microcavity system according to claim 9, further comprising a laser isolator (120) connected between the laser pump source (110) and the laser amplifier (130) for isolating reflected laser light.

11. The dissipative gain-coupled microcavity system according to claim 1, further comprising a spectrometer (310) and an oscilloscope (320) respectively connected to the optical microcavity device (200).

12. The dissipative gain-coupled microcavity system according to claim 11, further comprising a photodetector (330) connected between the oscilloscope (320) and the optical microcavity device (200).

Technical Field

The application relates to the field of precision instruments, in particular to a dissipation gain coupling microcavity system.

Background

High-precision physical quantity measurement is an important component of metrology. Due to the increasing interest in gravitational wave detection, nanostructure sensing, global positioning and navigation, the interest has attracted people's attention. The development of metrology over the last two decades has provided the necessary tools to determine the fundamental limits of measuring physical quantities and the resources required to achieve these limits.

Among the many different measurement methods, cavity-assisted measurement (CAM), which is a measurement method that couples a high-quality (Q) factor chamber or resonator to a Device Under Test (DUT), has become a versatile and effective experimental method to achieve high-precision measurements. Cavity-assisted metrology has been successfully applied to read out the state of qubits, to measure small mechanical movements, and to detect nanoparticles with single particle resolution, while using microcavity-based measurement systems with both space-symmetric transformations and time-reversal transformations (dissipative gain coupling) can improve the measurement accuracy. In past studies, it was demonstrated that in mechanical motion detection, the sensitivity near the transition point from the uninterrupted state to the broken state would be significantly improved, and could be applied in ultra-high precision measurement and sensing. Because of having extremely high quality factor and small mode volume, the whispering gallery mode optical microcavity can greatly enhance the interaction between the optical field and the substance, and therefore has attracted more and more research interests in many fields, such as the high-sensitivity sensing field. A typical dissipative gain-coupled microcavity system requires two microcavities (active and passive), one active and one passive. Wherein the active cavity erbium ion (active) is easier to excite laser. Therefore, the active micro-cavity manufacturing process is complex and long in time, and the cost of the product is increased.

Disclosure of Invention

In view of the above, it is necessary to provide a dissipative gain-coupled microcavity system to solve the problem of high cost of the existing dissipative gain-coupled microcavity.

A dissipative gain-coupled microcavity system, comprising:

a laser emitting device for emitting laser;

an optical microcavity device, comprising:

a first passive microcavity;

the first passive microcavity and the second passive microcavity are adjacently arranged;

the laser is coupled with the first passive microcavity through the first transmission channel to output Raman laser, and the Raman laser is coupled with the second passive microcavity and then output through the second transmission channel.

In one embodiment, the first transmission channel and the second transmission channel are both optical fibers.

In one embodiment, the first passive microcavity and the second passive microcavity are both disc structures.

In one embodiment, the diameter of the first transmission channel is smaller than the thickness of the first passive microcavity.

In one embodiment, the distance between the first passive microcavity and the second passive microcavity is 8-12 microns.

In one embodiment, the distance between the first transmission channel and the first passive microcavity is 100 nm to 5 μm.

In one embodiment, the first passive microcavity and the second passive microcavity each have a diameter of 40 microns to 80 microns.

Further, the diameters of the first passive microcavity and the second passive microcavity 220 are both micrometers. When the dissipative gain coupling system uses an active microcavity, the diameter of the active microcavity needs to be up to nanometers. Therefore, the volume of the dissipative gain coupling microcavity system can be greatly reduced and the space can be saved by replacing the active microcavity with the first passive microcavity.

In one embodiment, the material of the first passive microcavity and the second passive microcavity includes silicon dioxide.

In one embodiment, the laser emitting apparatus includes:

a laser pump source for generating the laser light;

the laser amplifier is connected with the laser pumping source and used for adjusting the power of the laser;

in one embodiment, the laser isolation device is connected between the laser pump source and the laser amplifier and used for isolating reflected laser.

In one embodiment, the device further comprises a spectrometer and an oscilloscope which are respectively connected with the optical microcavity device.

In one embodiment, the optical microcavity device further comprises a photodetector connected between the oscilloscope and the optical microcavity device.

The dissipation gain coupling microcavity system that the embodiment of this application provided, first passive microcavity with the passive microcavity of second is adjacent to be set up, first transmission path and second transmission path set up respectively first passive microcavity with the both sides of the passive microcavity of second. The first transmission channel, the second transmission channel, the first passive microcavity and the second passive microcavity are arranged on the same plane. By adjusting the size of the first passive microcavity, the frequency of the laser, and the distance between the first transmission channel and the first passive microcavity, raman light can be generated at the first passive microcavity. And then coupling out Raman light by coupling the first passive microcavity and the second passive microcavity, and coupling out the second passive microcavity and the second transmission channel. Because the active microcavity needs to be doped with gain media such as erbium, the production process is complex and the cost is high. The first passive microcavity does not need to be doped with the gain medium, and the first passive microcavity replaces the active microcavity, so that the difficulty of the production process can be reduced, and the cost of a dissipative gain coupling microcavity system can be reduced.

Drawings

FIG. 1 is a schematic diagram of a dissipative gain-coupled microcavity system provided in one embodiment of the present application;

FIG. 2 is a schematic diagram of a dissipative gain-coupled microcavity system provided in one embodiment of the present application;

FIG. 3 is a schematic diagram of a dissipative gain-coupled microcavity system provided in one embodiment of the present application;

FIG. 4 is a schematic diagram of a dissipative gain-coupled microcavity system provided in one embodiment of the present application;

FIG. 5 is a schematic diagram of a dissipative gain-coupled microcavity system provided in one embodiment of the present application;

reference numerals:

dissipative gain coupled microcavity system 10

Laser emitting device 100

Laser pump source 110

Laser isolator 120

Laser amplifier 130

Optical microcavity device 200

First passive microcavity 210

Second passive microcavity 220

First transmission channel 230

Second transmission channel 240

Spectrometer 310

Oscilloscope 320

Photodetector 330

Detailed Description

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. This application is capable of embodiments in many different forms than those described herein and those skilled in the art will be able to make similar modifications without departing from the spirit of the application and it is therefore not intended to be limited to the embodiments disclosed below.

The numbering of the components as such, e.g., "first", "second", etc., is used herein for the purpose of describing the objects only, and does not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, are not to be considered as limiting the present application.

In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1, embodiments of the present application provide a dissipative gain-coupled microcavity system 10. The dissipative gain-coupled microcavity system 10 includes a laser emitting device 100 and an optical microcavity device 200. The optical microcavity device 200 includes a first passive microcavity 210, a second passive microcavity 220, a first transmission channel 230, and a second transmission channel 240. The first passive microcavity 210 and the second passive microcavity 220 are disposed adjacent to each other. The first transmission channel 230 and the second transmission channel 240 are respectively disposed at two sides of the first passive microcavity 210 and the second passive microcavity 220. The first transmission channel 230, the second transmission channel 240, the first passive microcavity 210 and the second passive microcavity 220 are disposed on the same plane. The laser is coupled with the first passive microcavity 210 through the first transmission channel 230 to output a raman laser, and the raman laser is coupled with the second passive microcavity 220 and then output through the second transmission channel 240.

The frequency of the laser light emitted by the laser emitting device 100 can be adjusted. The laser emitting device 100 can be coupled with the optical microcavity device 200 by adjusting the frequency of the laser emitting device 100. The laser emitting device 100 may include a pump light source whose emitting laser frequency may be adjusted. The first passive microcavity 210 and the second passive microcavity 220 may have the same shape structure. The material of the first transfer channel 230 and the second transfer channel 240 may be the same. The first transmission channel 230 and the second transmission channel 240 are used for propagating laser light. The diameters and lengths of the first transmission channel 230 and the second transmission channel 240 can be adjusted according to needs, and both can be made of optical fiber materials.

The first transfer passage 230 and the second transfer passage 240 may be disposed in parallel. The first passive micro-cavity 210 and the second passive micro-cavity 220 may be disposed between the first transmission channel 230 and the second transmission channel 240, and a distance between the first passive micro-cavity 210 and the second passive micro-cavity 220 may be adjusted as needed until the first passive micro-cavity 210 and the second passive micro-cavity 220 are strongly coupled. By adjusting the distance between the first transmission channel 230 and the first passive microcavity 210, the distance between the second passive microcavity 220 and the first passive microcavity 210, and the distance between the second passive microcavity 220 and the second transmission channel 240, the laser emitted from the laser emitting device 100 is coupled with the first passive microcavity 210 through the first transmission channel 230, that is, when the frequency of the laser is the same as the resonant frequency of the first passive microcavity 210, the laser can be coupled, and then raman laser can be generated. The distance between the first passive microcavity 210 and the second passive microcavity 220 can then be adjusted such that the raman laser light is coupled to the second passive microcavity 220 and then output through the second transmission channel 240 coupled to the second passive microcavity 220. Thus constituting a dissipative gain-coupled microcavity system 10, said dissipative gain-coupled microcavity system 10 having a high measurement accuracy.

In the dissipative gain coupling microcavity system 10 provided in the embodiment of the present application, the first passive microcavity 210 and the second passive microcavity 220 are disposed adjacently, and the first transmission channel 230 and the second transmission channel 240 are disposed on two sides of the first passive microcavity 210 and the second passive microcavity 220, respectively. The first transmission channel 230, the second transmission channel 240, the first passive microcavity 210 and the second passive microcavity 220 are disposed on the same plane. Raman light can be generated in the first passive microcavity 210 by adjusting the size of the first passive microcavity 210, the frequency of the laser, and the distance between the first transmission channel 230 and the first passive microcavity 210. Raman light is then coupled out by coupling the first passive microcavity 210 with the second passive microcavity 220, and coupling the second passive microcavity 220 with the second transmission channel 240. Because the active microcavity needs to be doped with gain media such as erbium, the production process is complex and the cost is high. The first passive microcavity 210 does not need to be doped with the gain medium, and the first passive microcavity 210 replaces the active microcavity, so that the difficulty of the production process can be reduced, and the cost of the dissipative gain coupling microcavity system 10 can be reduced.

In one embodiment, the first passive microcavity 210 and the second passive microcavity 220 can be made of high-purity silicon. The surfaces of the first passive microcavity 210 and the second passive microcavity 220 can be plated with a 2 micron thick layer of silicon dioxide. The manufacturing process can include 1, cleaning and cutting a silicon wafer; 2. coating photoresist on the surface of the silicon wafer, and drying; 3. placing a mask plate with a circular pattern on the surface of a silicon wafer, and carrying out exposure patterning through ultraviolet rays; 4. and (3) developing the silicon wafer in a developing solution, wherein the photoresist exposed by ultraviolet rays can be cleaned by the developing solution, the photoresist protected by the circular pattern still remains on the surface of the silicon wafer, and the pattern in the mask is converted into the pattern of the photoresist. Cleaning with high-purity water after the development is finished; 5. and (3) etching by hydrofluoric acid (HF), and etching the developed silicon wafer in the hydrofluoric acid. The silicon dioxide reacts with the hydrofluoric acid and the silicon dioxide covered by the photoresist does not react, so that the unetched silicon dioxide forms the desired pattern. Cleaning the silicon wafer with acetone, alcohol and high-purity water after the etching is finished; 6. etching the silicon wafer into strips, and placing the strips into a xenon fluoride etching machine for etching, wherein the reaction speed of the xenon fluoride and the silicon is very high, and the reaction speed of the xenon fluoride and the silicon dioxide is slow, so that a circular strut can be etched in the silicon below the silicon dioxide layer; and 7, carrying out laser thermal reflow on the silicon dioxide. The center wavelength of the silica laser is 10.6 microns. Silica has a strong absorption in this band. During thermal reflow, the silica melts rapidly and then shrinks due to surface tension to form a minicore ring cavity.

Generally, when an active microcavity (active) and a passive microcavity (passive) are matched to form a dissipation gain coupling system, in the manufacturing process of the active microcavity, in addition to the steps of the passive microcavity, before the microcavity is formed, generally 1, high-purity tetraethyl silicate, concentrated hydrochloric acid, isopropanol and high-purity water are mixed according to a certain proportion to form uniform liquid; 2. calculating the mass of erbium nitrate according to the doping concentration of erbium ions in the prepared microcavity, and then adding corresponding erbium nitrate into the liquid; 3. placing the liquid on a magnetic stirring instrument at the temperature of 70 ℃, heating for three hours and uniformly stirring to enable the substances to react to form sol; 4. forming sol by the liquid in a room temperature environment for 24 hours; 5. removing the high-purity silicon wafer, cleaning the surface, uniformly coating the prepared sol on the surface of the silicon wafer, and controlling the thickness by adjusting the rotating speed and time of the spin coater; 6. and (3) placing the sample in a 1000 ℃ tube furnace for high-temperature annealing for 3 hours, slowly cooling after the annealing is finished, forming a silicon dioxide layer with the thickness of about 500nm on the surface of the silicon wafer, uniformly distributing erbium ions in the silicon dioxide layer, and processing and etching according to the manufacturing method of the passive microcavity to manufacture the active microcavity. Therefore, the above steps can be omitted in the fabrication of the first passive microcavity 210, which can improve the production efficiency and reduce the production cost.

In one embodiment, the first transmission channel 230 and the second transmission channel 240 are both optical fibers. The distance between the first passive microcavity 210 and the second passive microcavity 220 can be adjusted. The optical fiber may be obtained by peeling off the surface of the optical cable. The first transmission channel 230 and the second transmission channel 240 can be obtained by heating the optical fiber with oxyhydrogen flame at a proper temperature and drawing an optical fiber taper with a diameter of about several hundred nanometers to 1 micrometer at a constant speed by using a special platform. Therefore, the thickness and length of the first transmission channel 230 and the second transmission channel 240 can be adjusted, and thus the transmission path of the laser can be adjusted.

In one embodiment, the first passive microcavity 210 and the second passive microcavity 220 are both disc structures. The first passive microcavity 210 and the second passive microcavity 220 can be tangent or nearly tangent, thereby coupling the first passive microcavity 210 and the second passive microcavity 220.

In one embodiment, the edges of the first passive microcavity 210 and the second passive microcavity 220 can be raised, and the laser can be conducted in the raised areas. The bottoms of the first passive microcavity 210 and the second passive microcavity 220 can also have pedestals.

In one embodiment, the diameter of the first transmission channel 230 is less than the thickness of the first passive microcavity 210. I.e. the projection of the first passive microcavity 210 in the direction of the optical fiber may cover the optical fiber. The laser emitted from the optical fiber can be totally emitted into the first passive microcavity 210, so as to improve the coupling effect.

In one embodiment, the distance between the first passive microcavity 210 and the second passive microcavity 220 is 8 microns to 12 microns, and in this range, the first passive microcavity 210 and the second passive microcavity 220 can have good coupling effect. Further, the distance between the first passive microcavity 210 and the second passive microcavity 220 is 9 micrometers, and at this time, the coupling effect of the first passive microcavity 210 and the second passive microcavity 220 is optimal.

In one embodiment, the distance from the first transmission channel 230 to the first passive microcavity 210 is 100 nm to 5 μm. Further, the distance from the first transmission channel 230 to the first passive microcavity 210 can be 1-3 microns, and further, the distance from the first transmission channel 230 to the first passive microcavity 210 can be 2 microns. In this range, the laser light has a good coupling effect with the first passive microcavity 210 through the first transmission channel 230.

In one embodiment, the first passive microcavity 210 and the second passive microcavity 220 each have a diameter of 40 nm to 80 μm. Further, the first passive microcavity 210 and the second passive microcavity 220 both have a diameter of 40 microns. When the dissipative gain coupling system uses an active microcavity, the diameter of the active microcavity needs to be as large as 100 nm to 200 nm. Therefore, by replacing the active microcavity with the first passive microcavity 210, the volume of the dissipative gain-coupled microcavity system 10 can be greatly reduced, saving space.

In one embodiment, the material of the first passive microcavity 210 and the second passive microcavity 220 includes silicon dioxide. Silica has good optical properties.

Referring to fig. 2, in one embodiment, the laser emitting device 100 includes a laser pump source 110 and a laser amplifier 130. The laser pump source 110 is used to generate the laser light. The laser amplifier 130 is connected to the laser pump source 110 for adjusting the power of the laser. The laser amplifier 130 may amplify the frequency of the laser light.

Referring to fig. 3, in one embodiment, the dissipative gain-coupled microcavity system 10 further includes a laser isolator 120. The laser isolator 120 is connected between the laser pump source 110 and the laser amplifier 130. The laser isolator 120 serves to isolate the reflected laser light so that the laser pump source 110 can be prevented from being damaged.

Referring to fig. 4, in one embodiment, the dissipative gain-coupled microcavity system 10 further includes a spectrometer 310 and an oscilloscope 320. The spectrometer 310 and the oscilloscope 320 are respectively connected to the optical microcavity device 200. In one embodiment, the second transmission channel 240 may be connected to the oscilloscope 320 and the spectrometer 310, and the first transmission channel 230 may be connected to the oscilloscope 320. The position of the first transmission channel 230 relative to the first passive microcavity 210 can be adjusted appropriately, and when the lorentz valley displayed on the oscilloscope 320 reaches the deepest point, the point can be regarded as the critical coupling point, i.e., the most suitable point. The frequency of the laser light can be adjusted so that the laser light resonates with the first passive microcavity 210, at which point the laser light can be coupled to the first passive microcavity 210 through the first transmission channel 230 so that raman light can be observed on the spectrometer 310. The amplitude of the laser can be adjusted by tuning, and a stable raman laser output spectrum is observed on the spectrometer 310, and at this time, if the coupling between the first passive microcavity 210 and the second passive microcavity 220 is strong, that is, the coupling can reach thousands to tens of kilohertz, the new dissipative gain coupling microcavity system 10 can be implemented.

The spectrometer 310 may be comprised of an entrance slit, a dispersive system, an imaging system and one or more exit slits. The type of spectrometer is not limited. The spectrometer 310 may also be a prism spectrometer, a grating spectrometer, an interference spectrometer, or the like.

The oscilloscope 320 may convert the electrical signal into an image. The oscilloscope 320 produces a fine spot of light by impinging a narrow beam of electrons, composed of high-speed electrons, on a phosphor-coated screen. Under the action of the measured signal, the oscillograph can be used to observe the waveform curve of various signal amplitudes varying with time.

Referring to fig. 5, in one embodiment, the dissipative gain-coupled microcavity system 10 further includes a photodetector 330. The photodetector 330 is connected between the oscilloscope 320 and the optical microcavity device 200. The photodetector 330 is used to convert the optical signal into an electrical signal and transmit the electrical signal to the oscilloscope 320. The working principle of the photodetector 330 is based on the photoelectric effect. The photodetector 330 may be a photon detector or a thermal detector.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-described examples merely represent several embodiments of the present application and are not to be construed as limiting the scope of the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.