阅读说明：本技术 一种同轴频率调制mems陀螺仪 (Coaxial frequency modulation MEMS gyroscope ) 是由 黄向向 杨敏 卢卡·卢斯基 关健 孙斯佳 于 2020-05-29 设计创作，主要内容包括：一种同轴频率调制MEMS陀螺仪,包括硅弹簧、锚点、内部质量块、外部质量块、感应梳齿状结构、共振微调；共振微调设置在内部质量块的四个侧面以及外部质量块的四个侧面上；四个感应梳齿状结构设置在内部质量块的周围,分别通过硅弹簧与内部质量块连接；四个感应梳齿状结构和四个锚点间隔布置成环状,之间通过硅弹簧连接,四个感应梳齿状结构分别通过硅弹簧与布置在外部质量块的四个侧面上的共振微调连接。本发明的优点：同轴频率调制陀螺仪有两个同轴质量块,其中一个是外部质量块为框架结构,另一个质量块为内部质量块。两个质量块具有相同的中心。这种同轴双质量块结构可以消除由于工艺和温度渐变引起的漂移,测量精度高,稳定性好。(A coaxial frequency modulation MEMS gyroscope comprises a silicon spring, an anchor point, an internal mass block, an external mass block, an induction comb-shaped structure and resonance fine tuning; the resonance fine tuning is arranged on four sides of the inner mass block and four sides of the outer mass block; the four induction comb-shaped structures are arranged around the internal mass block and are respectively connected with the internal mass block through silicon springs; four response comb-tooth structures and four anchor points interval arrangement become the ring-type, connect through the silicon spring between them, and four response comb-tooth structures are connected with the resonance fine setting of arranging on four sides of external quality piece through the silicon spring respectively. The invention has the advantages that: the coaxial frequency modulation gyroscope is provided with two coaxial mass blocks, wherein one coaxial mass block is an outer mass block and is of a frame structure, and the other coaxial mass block is an inner mass block. The two masses have the same center. The coaxial dual-mass block structure can eliminate drift caused by gradual change of process and temperature, and has high measurement precision and good stability.)

1. A coaxial frequency modulated MEMS gyroscope, comprising: the coaxial frequency modulation MEMS gyroscope comprises a silicon spring (1), an anchor point (2), an internal mass block (3), an external mass block (4), an induction comb-shaped structure (5) and a resonance fine tuning (6);

wherein: the resonance trimming (6) is arranged on four sides of the inner mass (3) and four sides of the outer mass (4); the four induction comb-shaped structures (5) are arranged around the internal mass block (3) and are respectively connected with the internal mass block (3) through silicon springs (1);

four induction comb-shaped structures (5) and four anchor points (2) are arranged in an annular shape at intervals and are connected through a silicon spring (1), and the four induction comb-shaped structures (5) are respectively connected with resonance fine tuning (6) arranged on four side faces of an external mass block (4) through the silicon spring (1).

2. The coaxial frequency modulated MEMS gyroscope of claim 1, wherein: the inner mass block (3) is of a cuboid block structure.

3. The coaxial frequency modulated MEMS gyroscope of claim 1, wherein: the outer mass block (4) and the outer mass block are of annular structures.

4. The coaxial frequency modulated MEMS gyroscope of claim 1, wherein: the inner mass (3) and the outer mass (4) have the same mass.

Technical Field

The invention relates to the field of sensors, in particular to a coaxial frequency modulation MEMS gyroscope.

Background

The conventional gyroscope known at present has limits of orthogonality, anisotropic damping and fine tuning, the frequency modulation gyroscope is too sensitive to temperature change, and the temperature change of 1k can generate a deviation of 216 dps. In order to alleviate the influence of the temperature, a double-mass clockwise-anticlockwise rotation structure is adopted on the existing frequency modulation gyroscope, and the effect is not very obvious, the temperature change is still a problem, and the temperature mismatch of the two masses by a few mk can prevent the resolution within a dps range, which is shown in fig. 2.

Disclosure of Invention

The invention aims to overcome the problems and particularly provides a coaxial frequency modulation MEMS gyroscope aiming at the problem that the frequency modulation gyroscope is sensitive to temperature change.

The invention provides a coaxial frequency modulation MEMS gyroscope, which is characterized in that: the coaxial frequency modulation MEMS gyroscope comprises a silicon spring 1, an anchor point 2, an internal mass block 3, an external mass block 4, an induction comb-shaped structure 5 and a resonance fine adjustment 6;

wherein: resonance trimming 6 is provided on four sides of the inner mass 3 and four sides of the outer mass 4; the four induction comb-shaped structures 5 are arranged around the internal mass block 3 and are respectively connected with the internal mass block 3 through the silicon spring 1;

four response comb-tooth structure 5 and four anchor points 2 interval arrangement become the ring-type, connect through silicon spring 1 between, and four response comb-tooth structure 5 are connected with resonance fine setting 6 of arranging on four sides of external quality piece 4 through silicon spring 1 respectively.

The inner mass block 3 is of a cuboid block structure.

The outer mass 4 and the inner mass are of annular structures.

The inner mass 3 and the outer mass 4 have the same mass.

The coaxial frequency modulation gyroscope is provided with two coaxial mass blocks, wherein one coaxial mass block is an outer mass block and is of a frame structure, and the other coaxial mass block is an inner mass block. The two masses have the same center. This coaxial dual mass block structure can eliminate drift due to process and temperature gradients.

The structure formed by the coaxial clockwise and anticlockwise resonators and the outer mass block frame can eliminate drift caused by temperature and resonator parameter change, one of the two mass blocks is the outer mass block, namely the frame structure, and the other mass block is the inner mass block. The two masses rotate in opposite directions, clockwise and counterclockwise.

Coaxial double-mass block MEMS frequency modulation gyroscope

One of the two masses is a structure comprising a frame of the other mass.

The two masses have the same mass but different shapes.

The two masses have the same spring, and each spring shares the same anchor point with the corresponding spring of the other mass.

The two masses have different shapes but the same area and circumference.

The invention has the advantages that:

the invention provides a coaxial frequency modulation MEMS gyroscope, which aims at the problem that the frequency modulation gyroscope is sensitive to temperature change. The coaxial frequency modulation gyroscope is provided with two coaxial mass blocks, wherein one coaxial mass block is an outer mass block and is of a frame structure, and the other coaxial mass block is an inner mass block. The two masses have the same center. The coaxial dual-mass block structure can eliminate drift caused by gradual change of process and temperature, and has high measurement precision and good stability.

Drawings

The invention is described in further detail below with reference to the following figures and embodiments:

FIG. 1 is a schematic diagram of a coaxial frequency modulation MEMS gyroscope;

fig. 2 is a schematic diagram of a dual mass block structure.

Detailed Description