阅读说明：本技术 一种终端极化电路、及终端极化装置 (Terminal polarization circuit and terminal polarization device ) 是由 倪涛 曾传滨 孙佳星 王娟娟 韩郑生 罗家俊 于 2020-04-07 设计创作，主要内容包括：本发明公开了一种终端极化电路,包括：M个极化器,每个极化器均包括充电限流电阻、终端匹配电阻和二极管组,M大于等于10,每个极化器的特征阻抗小于等于50Ω；二极管组包括两个以上串联的二极管,终端匹配电阻的一端接地,终端匹配电阻的另一端连接二极管组的一端；充电限流电阻的一端作为极化器的输入端,充电限流电阻的另一端连接二极管组的另一端并作为极化器的输出端；M个极化器的输入端相连并用于接收充电电压,每个极化器的输出端用于对应连接一条脉冲发生段传输线。本发明可以获得纳秒量级1000A电流脉冲发生能力,可以提高电学闩锁测试系统的测试能力,从而满足功率器件电学闩锁测试需求。同时,本发明还公开了一种终端极化装置。(The invention discloses a terminal polarization circuit, comprising: m polarizers, each of which comprises a charging current-limiting resistor, a terminal matching resistor and a diode group, wherein M is more than or equal to 10, and the characteristic impedance of each polarizer is less than or equal to 50 omega; the diode group comprises more than two diodes which are connected in series, one end of the terminal matching resistor is grounded, and the other end of the terminal matching resistor is connected with one end of the diode group; one end of the charging current-limiting resistor is used as the input end of the polarizer, and the other end of the charging current-limiting resistor is connected with the other end of the diode group and used as the output end of the polarizer; the input ends of the M polarizers are connected and used for receiving the charging voltage, and the output end of each polarizer is used for being correspondingly connected with one pulse generation section transmission line. The invention can obtain the nanosecond-level 1000A current pulse generating capacity and improve the testing capacity of the electrical latch testing system, thereby meeting the electrical latch testing requirement of a power device. Meanwhile, the invention also discloses a terminal polarization device.)

1. A termination polarization circuit for use in an electrical latch test system, comprising:

m polarizers, each of which comprises a charging current-limiting resistor, a terminal matching resistor and a diode group, wherein M is more than or equal to 10, and the characteristic impedance of each polarizer is less than or equal to 50 omega;

the diode group comprises more than two diodes which are connected in series, one end of the terminal matching resistor is grounded, and the other end of the terminal matching resistor is connected with one end of the diode group;

one end of the charging current-limiting resistor is used as the input end of the polarizer, and the other end of the charging current-limiting resistor is connected with the other end of the diode group and is used as the output end of the polarizer;

the input ends of the M polarizers are connected and used for receiving charging voltage, and the output end of each polarizer is used for being correspondingly connected with a pulse generation section transmission line.

2. A termination polarization circuit as recited in claim 1, wherein said diode bank has a total withstand voltage capability greater than 5000V.

3. The termination polarization circuit of claim 2, wherein the diode bank comprises:

5 diodes, the diode chooses low parasitic carborundum or schottky diode of 1200V withstand voltage for use.

4. A termination polarization circuit as claimed in any one of claims 1 to 3, further comprising:

one end of the high-impedance power module is connected with the output end of the first polarizer, the other end of the high-impedance power module is used for being connected with a voltage and current detection device, and the first polarizer is any one of the M polarizers;

the high-impedance power module comprises two high-impedance power resistors connected in series, wherein the resistance value of one resistor is 10M omega, and the resistance value of the other resistor is 1G omega.

5. A terminal polarization assembly for use in an electrical latch testing system, comprising:

a positive voltage terminal polarization module in which a terminal polarization circuit according to any one of claims 1 to 3 is provided;

a negative-pressure terminal polarization module which is positioned below the positive-pressure terminal polarization module and locked with the positive-pressure terminal polarization module through a connector, wherein the negative-pressure terminal polarization module is provided with a terminal polarization circuit according to any one of claims 1 to 3;

in the positive voltage terminal polarization module, one end of the diode group is an anode of the diode, and the other end of the diode group is a cathode of the diode;

in the negative-voltage terminal polarization module, one end of the diode group is a cathode of the diode, and the other end of the diode group is an anode of the diode.

6. The apparatus of claim 5, wherein the positive voltage termination polarization module and the negative voltage termination polarization module each comprise:

the polarizer shielding installation box is provided with a connector, and the connector is arranged on the side surface of the polarizer shielding installation box;

the terminal polarization circuit board is arranged in the polarizer shielding installation box, and the terminal polarization circuit is integrated on the terminal polarization circuit board;

the high-voltage charging port is arranged on the polarizer shielding installation box and connected with the input end of each polarizer, and the high-voltage charging port is used for connecting a high-voltage power supply;

m pulse generation section transmission line IO ports are arranged on the polarizer shielding installation box, and each pulse generation section transmission line IO port is correspondingly connected with the output end of one polarizer;

and the power terminal connector is arranged on the polarizer shielding installation box and is connected with the ground plane of the terminal polarization circuit board.

7. The apparatus of claim 6, wherein the termination polarization circuit further comprises:

one end of the high-impedance power module is connected with the output end of the first polarizer, the other end of the high-impedance power module is used for being connected with a voltage and current detection device, and the first polarizer is any one of the M polarizers;

the high-impedance power module comprises two high-impedance power resistors connected in series, wherein the resistance value of one resistor is 10M omega, and the resistance value of the other resistor is 1G omega;

positive pressure terminal polarization module with negative pressure terminal polarization module all still includes:

and the high-voltage monitoring port is arranged on the polarizer shielding installation box and is connected with the other end of the high-impedance power module, and the high-voltage monitoring port is used for connecting a voltage and current detection device.

8. The apparatus of claim 6, wherein the pulse generation section transmission line IO port, the high voltage charging port and the high voltage monitoring port all use high voltage coaxial connectors, and the high voltage coaxial connectors are SHV panel mounted coaxial connectors with characteristic impedance of 50 Ω and have a voltage withstanding capability greater than 5000V.

9. The apparatus of claim 8, wherein the solder connections of the high voltage coaxial connector and the terminal polarizer circuit board are covered with a high voltage insulating glue.

10. The apparatus of any of claims 5 to 9, further comprising;

and the mounting pin is arranged at the bottom of the negative-pressure terminal polarization module and used for fixing the device in a test system.

Technical Field

The invention relates to the technical field of semiconductor device and integrated circuit test equipment, in particular to a high-power terminal polarization circuit and a terminal polarization device of an electrical latch test system based on a transmission line pulse generation technology.

Background

The terminal polarization device is one of the most important components in a transmission line pulse generation system, and has two main functions, one is that the terminal polarization device needs to bear extremely high reverse bias to meet the charging requirement of a transmission line in a transmission section, and in addition, the terminal polarization device plays a role in absorbing reflected waves at the tail end of the system, and the reflected waves can be prevented from being continuously transmitted in the system through tail end impedance matching and diode one-way conduction characteristics so as to generate square wave pulses.

The transmission line pulse generation technology is an important pulse generation technology in the field of power pulse, and is commonly used in electrostatic protection test equipment, namely a transmission line pulse generator (T L P) and a latch (L atch-up) test system.

At present, an electrical latch test system can only meet the requirement of electrical latch test of devices below 5 amperes, and cannot provide higher-power test capability; the pulse width of the power device electrical characteristic test system is too large, usually in the microsecond level, the thermal burnout phenomenon occurs when the latch test is carried out, and the requirement of the power device electrical latch test can not be met. The high-power terminal polarization technology is one of the core technology bottlenecks of nanosecond-level power pulse generation of a latch test system.

Disclosure of Invention

The embodiment of the application provides a terminal polarization circuit and a terminal polarization device, solves the technical problems that an electrical latch test system in the prior art can only meet the electrical latch test requirements of devices below 5 amperes and cannot provide higher-power test capability, and achieves the purpose that nanosecond-level 1000A current pulse generating capability can be obtained under 5000V-level charging voltage, so that the test capability of the electrical latch test system is improved, and the technical effect of meeting the electrical latch test requirements of power devices is achieved.

On one hand, the present application provides the following technical solutions through an embodiment of the present application:

a termination polarization circuit for use in an electrical latch test system, comprising:

m polarizers, each of which comprises a charging current-limiting resistor, a terminal matching resistor and a diode group, wherein M is more than or equal to 10, and the characteristic impedance of each polarizer is less than or equal to 50 omega;

the diode group comprises more than two diodes which are connected in series, one end of the terminal matching resistor is grounded, and the other end of the terminal matching resistor is connected with one end of the diode group;

one end of the charging current-limiting resistor is used as the input end of the polarizer, and the other end of the charging current-limiting resistor is connected with the other end of the diode group and is used as the output end of the polarizer;

the input ends of the M polarizers are connected and used for receiving charging voltage, and the output end of each polarizer is used for being correspondingly connected with a pulse generation section transmission line.

Preferably, the total voltage withstanding capability of the diode group is greater than 5000V.

Preferably, the diode group includes:

5 diodes, the diode chooses low parasitic carborundum or schottky diode of 1200V withstand voltage for use.

Preferably, the terminal polarization circuit further includes:

one end of the high-impedance power module is connected with the output end of the first polarizer, the other end of the high-impedance power module is used for being connected with a voltage and current detection device, and the first polarizer is any one of the M polarizers;

the high-impedance power module comprises two high-impedance power resistors connected in series, wherein the resistance value of one resistor is 10M omega, and the resistance value of the other resistor is 1G omega.

On the other hand, based on the same inventive concept, the present application provides the following technical solutions through an embodiment of the present application:

a terminal polarization device for use in an electrical latch testing system, comprising:

the positive-voltage terminal polarization module is internally provided with a terminal polarization circuit;

the negative-pressure terminal polarization module is positioned below the positive-pressure terminal polarization module and locked with the positive-pressure terminal polarization module through a connector, and a terminal polarization circuit is arranged in the negative-pressure terminal polarization module;

in the positive voltage terminal polarization module, one end of the diode group is an anode of the diode, and the other end of the diode group is a cathode of the diode;

in the negative-voltage terminal polarization module, one end of the diode group is a cathode of the diode, and the other end of the diode group is an anode of the diode.

Preferably, the positive voltage terminal polarization module and the negative voltage terminal polarization module each include:

the polarizer shielding installation box is provided with a connector, and the connector is arranged on the side surface of the polarizer shielding installation box;

the terminal polarization circuit board is arranged in the polarizer shielding installation box, and the terminal polarization circuit is integrated on the terminal polarization circuit board;

the high-voltage charging port is arranged on the polarizer shielding installation box and connected with the input end of each polarizer, and the high-voltage charging port is used for connecting a high-voltage power supply;

m pulse generation section transmission line IO ports are arranged on the polarizer shielding installation box, and each pulse generation section transmission line IO port is correspondingly connected with the output end of one polarizer;

and the power terminal connector is arranged on the polarizer shielding installation box and is connected with the ground plane of the terminal polarization circuit board.

Preferably, the terminal polarization circuit further includes:

one end of the high-impedance power module is connected with the output end of the first polarizer, the other end of the high-impedance power module is used for being connected with a voltage and current detection device, and the first polarizer is any one of the M polarizers;

the high-impedance power module comprises two high-impedance power resistors connected in series, wherein the resistance value of one resistor is 10M omega, and the resistance value of the other resistor is 1G omega;

positive pressure terminal polarization module with negative pressure terminal polarization module all still includes:

and the high-voltage monitoring port is arranged on the polarizer shielding installation box and is connected with the other end of the high-impedance power module, and the high-voltage monitoring port is used for connecting a voltage and current detection device.

Preferably, the pulse generation section transmission line IO port, the high-voltage charging port and the high-voltage monitoring port all adopt high-voltage coaxial connectors, and the high-voltage coaxial connectors are SHV panel-mounted coaxial connectors with characteristic impedance of 50 Ω, and the voltage endurance capacity of the high-voltage coaxial connectors is greater than 5000V.

Preferably, the welding position of the high-voltage coaxial connector and the terminal polarizer circuit board is covered by high-voltage insulating glue.

Preferably, the apparatus further comprises;

and the mounting pin is arranged at the bottom of the negative-pressure terminal polarization module and used for fixing the device in a test system.

One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

in an embodiment of the present application, a terminal polarization circuit is disclosed, which is applied in an electrical latch test system, and includes: m polarizers, each of which comprises a charging current-limiting resistor, a terminal matching resistor and a diode group, wherein M is more than or equal to 10, and the characteristic impedance of each polarizer is less than or equal to 50 omega; the diode group comprises more than two diodes which are connected in series, one end of the terminal matching resistor is grounded, and the other end of the terminal matching resistor is connected with one end of the diode group; one end of the charging current-limiting resistor is used as the input end of the polarizer, and the other end of the charging current-limiting resistor is connected with the other end of the diode group and is used as the output end of the polarizer; the input ends of the M polarizers are connected and used for receiving charging voltage, and the output end of each polarizer is used for being correspondingly connected with a pulse generation section transmission line. Because at least 10 polarizers are arranged in parallel in the terminal polarization circuit, and the characteristic impedance of each polarizer is not more than 50 omega, the characteristic impedance of the whole terminal polarization circuit is not more than 5 ohms, and the nanosecond 1000A current pulse generating capability can be obtained under the 5000V charging voltage based on the transmission line pulse generating technical principle. Therefore, the testing capability of the electrical latch testing system can be improved, and the requirement of electrical latch testing of the power device is met.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.

Fig. 1 is a schematic diagram of a termination polarization circuit in an embodiment of the present application;

fig. 2 is a front view structural diagram of a terminal polarization device in the embodiment of the present application;

fig. 3 is a top view structural diagram of a terminal polarization device in an embodiment of the present application;

FIG. 4 is a technical schematic of a transmission line pulse generation system in an embodiment of the present application;

fig. 5 is a latch-up test curve of a power device under different gate voltages in the embodiment of the present application.

Detailed Description

The embodiment of the application provides a terminal polarization circuit and a terminal polarization device, solves the technical problems that an electrical latch test system in the prior art can only meet the electrical latch test requirements of devices below 5 amperes and cannot provide higher-power test capability, and achieves the purpose that the nanosecond-level 1000A current pulse generating capability can be obtained under the 5000V-level charging voltage, so that the test capability of the electrical latch test system can be improved, and the technical effect of the electrical latch test requirements of power devices can be met.

In order to solve the technical problems, the general idea of the embodiment of the application is as follows:

a termination polarization circuit for use in an electrical latch test system, comprising: m polarizers, each of which comprises a charging current-limiting resistor, a terminal matching resistor and a diode group, wherein M is more than or equal to 10, and the characteristic impedance of each polarizer is less than or equal to 50 omega; the diode group comprises more than two diodes which are connected in series, one end of the terminal matching resistor is grounded, and the other end of the terminal matching resistor is connected with one end of the diode group; one end of the charging current-limiting resistor is used as the input end of the polarizer, and the other end of the charging current-limiting resistor is connected with the other end of the diode group and is used as the output end of the polarizer; the input ends of the M polarizers are connected and used for receiving charging voltage, and the output end of each polarizer is used for being correspondingly connected with a pulse generation section transmission line. Because at least 10 polarizers are arranged in parallel in the terminal polarization circuit, and the characteristic impedance of each polarizer is not more than 50 omega, the characteristic impedance of the whole terminal polarization circuit is not more than 5 ohms, and the nanosecond 1000A current pulse generating capability can be obtained under the 5000V charging voltage based on the transmission line pulse generating technical principle. Therefore, the testing capability of the electrical latch testing system can be improved, and the requirement of electrical latch testing of the power device is met.

The technical scheme is described in detail in the following with reference to the figures and the specific embodiments of the specification.