Method for selective metallization of oxide ceramic composite material

文档序号:1307544 发布日期:2020-08-11 浏览:8次 中文

阅读说明:本技术 一种氧化物陶瓷复合材料选择性金属化的方法 (Method for selective metallization of oxide ceramic composite material ) 是由 贝国平 于 2019-06-19 设计创作,主要内容包括:本发明涉及一种利用激光表面处理技术在氧化物陶瓷复合材料表面选择性金属化的技术。具体方案如下:1)含活性因子的氧化物陶瓷复合材料的制备;2)根据线路图纸,利用激光将氧化物陶瓷表面活化和烧蚀线路。3)将烧蚀完的样品进行清洗,置入化学液体里进行金属化处理,沉积金属线路;4)清洗样品干燥处理。本发明与传统金属化工艺相比,具有方法更简单、制备更快速、工艺更可控、精度高、结合力强、更为环保等优点。根据涂覆金属的特性,可具有导热、导电、导磁等性能,在大规模集成电路、电磁屏蔽、多功能芯片等领域具有非常高的应用价值。(The invention relates to a technology for selectively metallizing the surface of an oxide ceramic composite material by utilizing a laser surface treatment technology. The specific scheme is as follows: 1) preparing an oxide ceramic composite material containing an active factor; 2) according to the circuit drawing, the surface of the oxide ceramic is activated and ablated by laser. 3) Cleaning the ablated sample, putting the sample into chemical liquid for metallization treatment, and depositing a metal circuit; 4) and (5) cleaning a sample and drying. Compared with the traditional metallization process, the method has the advantages of simplicity, rapidness in preparation, controllability in process, high precision, strong binding force, environmental friendliness and the like. According to the characteristics of the coating metal, the coating metal has the properties of heat conduction, electric conduction, magnetic conduction and the like, and has very high application value in the fields of large-scale integrated circuits, electromagnetic shielding, multifunctional chips and the like.)

1. A method for selectively metallizing the surface of an oxide ceramic composite material by using a laser surface treatment technology is mainly characterized by comprising the following steps of:

preparing an oxide ceramic composite material containing an activation factor;

according to a circuit drawing, activating and ablating the surface of the oxide ceramic by using laser;

cleaning the ablated sample, putting the sample into chemical liquid for metallization treatment, and depositing a metal circuit;

and (5) cleaning a sample and drying.

2. The method according to claim 1, wherein the oxide ceramic in the oxide ceramic composite material is a metal alumina such as alumina, silica, zirconia, titania, or the like.

3. The method of claim 1, wherein the activator is a metal-related oxide material to be coated, preferably copper oxide (CuO or Cu)2O) oxidation (NiO), and the like, wherein the activation factor can also be chromium oxide, silver oxide, tin oxide, zinc oxide, titanium oxide and the like, and the added content is 1-8% by mass.

4. The method as claimed in claim 1, wherein the preparation technique of the oxide ceramic composite material containing the activating factor includes pressureless sintering, hot-pressing sintering, plasma rapid sintering, etc., the sintering temperature is 1000-1700 ℃, and the holding time is 0.5-8h.

5. The method of claim 1, wherein the laser surface treatment is mainly a single pulse laser, and the specific treatment comprises the following steps: the laser wavelength is 800-1400nm, the power of the laser is 2-18W, the speed: 0.4-2.4m/s, frequency: 60-240kHz, energy density: 0.6-20j/cm2

6. The method of claim 1, wherein the surface-activated ceramic composite substrate is immersed in a commercial or home-made chemical agent for metallization, such as a metal layer of copper, silver, platinum, nickel, etc., and the electroless plating temperature is controlled to be 20-80 ℃ and the electroless plating time is controlled to be 15-40 minutes.

7. The method of claim 1, wherein the metallized substrate is rinsed with deionized water or alcohol and then dried.

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