阅读说明：本技术 衬底保持器、衬底支撑件和将衬底夹持至夹持系统的方法 (Substrate holder, substrate support and method of clamping a substrate to a clamping system ) 是由 A·A·索图特 T·波耶兹 于 2018-10-24 设计创作，主要内容包括：一种将衬底(W)夹持至夹持系统的方法,所述方法包括以下步骤：提供衬底保持器(200),所述衬底保持器包括：主体(210),具有第一主体表面(212)和第二主体表面(214),其中所述第一主体表面和第二主体表面在所述主体的相反侧上；和多个第一突节(220a,220b),从所述第一主体表面突出,其中每个第一突节具有配置成支撑所述衬底的远端表面；提供用于支撑所述衬底保持器的支撑表面(300)；提供多个第二突节(240),所述多个第二突节用于通过所述支撑表面与多个第二突节的远端表面接触而将所述衬底保持器支撑在所述支撑表面上；生成第一力以将所述衬底保持器吸引至所述支撑表面；将所述衬底放置在所述衬底保持器上,以使得所述衬底接触所述多个第一突节；生成第二力以将所述衬底吸引至所述衬底保持器；和控制在释放步骤中的所述第一力和第二力中的至少一个,以使得所述主体在第二突节之间变形,从而在第一子集的多个第一突节的远端表面和衬底之间产生间隙(225,226),并使得所述衬底被支撑在第二子集的所述多个第一突节的远端表面上。(A method of clamping a substrate (W) to a clamping system, the method comprising the steps of: providing a substrate holder (200) comprising: a body (210) having a first body surface (212) and a second body surface (214), wherein the first and second body surfaces are on opposite sides of the body; and a plurality of first burls (220a, 220b) protruding from the first body surface, wherein each first burl has a distal surface configured to support the substrate; providing a support surface (300) for supporting the substrate holder; providing a plurality of second burls (240) for supporting the substrate holder on the support surface with the support surface in contact with distal surfaces of the plurality of second burls; generating a first force to attract the substrate holder to the support surface; placing the substrate on the substrate holder such that the substrate contacts the plurality of first burls; generating a second force to attract the substrate to the substrate holder; and controlling at least one of the first force and the second force in the releasing step to cause the body to deform between the second burls, thereby creating a gap (225, 226) between the distal surfaces of the first subset of the plurality of first burls and the substrate, and causing the substrate to be supported on the distal surfaces of the second subset of the plurality of first burls.)

1. A method of clamping a substrate to a clamping system, the method comprising:

providing a substrate holder, the substrate holder comprising:

a body having a first body surface and a second body surface, wherein the first and second body surfaces are on opposite sides of the body; and

a plurality of first burls projecting from the first body surface, wherein each first burl has a distal surface configured to support the substrate;

providing a support surface for supporting the substrate holder;

providing a plurality of second burls for supporting the substrate holder on the support surface with the support surface in contact with distal surfaces of the plurality of second burls;

generating a first force to attract the substrate holder to the support surface;

placing the substrate on the substrate holder such that the substrate contacts the plurality of first burls;

generating a second force to attract the substrate to the substrate holder; and

controlling at least one of the first and second forces in the releasing step to cause the body to deform between the second burls, thereby creating a gap between the distal surfaces of the first subset of the plurality of first burls and the substrate, and causing the substrate to be supported on the distal surfaces of the second subset of the plurality of first burls.

2. The method of claim 1, wherein the controlling step further comprises controlling at least one of the first and second forces in the re-engaging step to deform the body such that distal surfaces of the first subset of the plurality of first burls contact the substrate.

3. The method of claim 2, wherein the controlling step further comprises controlling at least one of the first and second forces in the disengaging step to deform the body to create a gap between the distal surfaces of the plurality of first burls of the second subset and the substrate.

4. The method of claim 3, wherein the controlling step further comprises controlling at least one of the first and second forces in another re-engaging step to deform the body such that distal surfaces of the plurality of first burls of the second subset contact the substrate.

5. The method of claim 4, wherein the releasing step, the re-engaging step, the disengaging-engaging step and the further re-engaging step are performed a plurality of times in this order.

6. The method according to any of claims 1-5, wherein the releasing step comprises increasing the magnitude of the first force from an initial value and/or decreasing the magnitude of the second force from an initial value.

7. Method according to any of claims 1-6, wherein the first force is generated at least partly by applying a negative pressure between the support surface and the substrate holder, and/or wherein the second force is generated at least partly by applying a negative pressure between the substrate and the substrate holder, and/or wherein the first force and/or the second force is generated at least partly by applying an electrostatic force via an electrode.

8. A method according to claim 7, wherein the body is configured, in use, to block the passage of gas through the body from the first body surface to the second body surface and to block the passage of gas through the body from the second body surface to the first body surface.

9. A substrate holder for a lithographic apparatus and configured to support a substrate on a substrate support, the substrate holder comprising:

a body having a first body surface and a second body surface, wherein the first and second body surfaces are on opposite sides of the body;

a plurality of first burls projecting from the first body surface, wherein each first burl has a distal surface configured to support the substrate; and

a plurality of second burls projecting from the second body surface, wherein each second burl has a distal surface for supporting the substrate holder on the substrate support,

wherein distal surfaces of a first subset of the plurality of first burls are a first distance from the first body surface, distal surfaces of a second subset of the plurality of first burls are a second distance from the first body surface, the first distance being greater than the second distance.

10. A substrate support, comprising:

a substrate holder, comprising:

a body having a first body surface and a second body surface, wherein the first and second body surfaces are on opposite sides of the body; and

a plurality of first burls projecting from the first body surface, wherein each first burl has a distal surface configured to support the substrate; and

a support surface for supporting the substrate holder by contact with distal end surfaces of a plurality of second burls projecting from the support surface;

wherein distal surfaces of a first subset of the plurality of first burls are a first distance from the first body surface, distal surfaces of a second subset of the plurality of first burls are a second distance from the first body surface, the first distance being greater than the second distance.

11. The substrate holder of claim 9 or the substrate support of claim 10, wherein the body is configured, in use, to block gas from passing through the body from the first body surface to the second body surface and to block gas from passing through the body from the second body surface to the first body surface.

12. The substrate holder of claim 9 or 11 or the substrate support of claim 10 or 11, wherein each of the plurality of first burls of the second subset has an axis that is closer to an axis of one of the plurality of second burls than to an axis of the plurality of first burls of the first subset, and/or wherein there are a greater number of first burls than the second burls, and/or wherein the number of the plurality of first burls of the second subset is substantially equal to the number of the plurality of second burls.

13. The substrate holder of claim 9, 11 or 12 or the substrate support of claim 12, 13 or 14, wherein the stiffness of the substrate holder at a location corresponding to the location of each of the plurality of first burls of the second subset is greater than the stiffness of the substrate holder at a location corresponding to the location of each of the plurality of first burls of the first subset.

14. A substrate holder for a lithographic apparatus and configured to support a substrate on a substrate support, the substrate holder comprising:

a body having a first body surface and a second body surface, wherein the first and second body surfaces are on opposite sides of the body;

a plurality of first burls projecting from the first body surface, wherein each first burl has a distal surface configured to support the substrate;

a plurality of electrodes to which a voltage can be applied to secure the substrate holder to the substrate support; wherein the plurality of electrodes are configured such that: depending on the applied voltage, a force between portions of the body of the substrate holder below the plurality of first burls of the first subset and the substrate support can be controlled independently of a force between portions of the body of the substrate holder below the plurality of first burls of the second subset and the substrate support.

15. A lithographic apparatus comprising the substrate holder of any of claims 9, 11-14 or the substrate support of any of claims 10-13.