阅读说明：本技术 一种多通道低温型半导体温控装置及半导体生产设备 (Multi-channel low-temperature semiconductor temperature control device and semiconductor production equipment ) 是由 胡文达 芮守祯 曹小康 靳李富 刘紫阳 冯涛 宋朝阳 李文博 于 2021-06-18 设计创作，主要内容包括：本发明提供一种多通道低温型半导体温控装置及半导体生产设备,涉及半导体技术领域,多通道低温型半导体温控装置包括制冷系统和至少两个循环系统,多通道低温型半导体温控装置的第一压缩机和第二压缩机可以同时工作,也可单独使用,单独使用第一压缩机时,可通过第四换热器使得循环介质的温度达到-40℃。第一压缩机和第二压缩机同时工作时,可通过第三换热器使得循环介质温度达到-80℃,增大温控范围,实现超低温要求。升温过程利用压缩机排出的高温气体进入第二换热器和第四换热器进行热量交换,使得循环介质迅速升温,降低能源消耗。由于多个循环系统与一个制冷系统进行热量交换,减小了温控装置的体积,每个循环系统都可单独控制温度。(The invention provides a multichannel low-temperature semiconductor temperature control device and semiconductor production equipment, and relates to the technical field of semiconductors, wherein the multichannel low-temperature semiconductor temperature control device comprises a refrigerating system and at least two circulating systems, a first compressor and a second compressor of the multichannel low-temperature semiconductor temperature control device can work simultaneously or can be used independently, and when the first compressor is used independently, the temperature of a circulating medium can reach-40 ℃ through a fourth heat exchanger. When the first compressor and the second compressor work simultaneously, the temperature of the circulating medium can reach-80 ℃ through the third heat exchanger, the temperature control range is enlarged, and the requirement of ultralow temperature is met. In the temperature rising process, high-temperature gas discharged by the compressor enters the second heat exchanger and the fourth heat exchanger for heat exchange, so that the circulating medium is quickly heated, and the energy consumption is reduced. Because a plurality of circulation systems exchange heat with a refrigerating system, the volume of the temperature control device is reduced, and each circulation system can independently control the temperature.)

1. A multi-channel low-temperature semiconductor temperature control device, comprising:

the refrigeration system comprises a first heat exchanger, a second heat exchanger, a third heat exchanger, at least one fourth heat exchanger, a first compressor and a second compressor, wherein a first inlet and a first outlet of the first heat exchanger are respectively communicated with a cooling water circulation pipeline, and a second outlet of the first heat exchanger is respectively communicated with a first inlet of the second heat exchanger and a first inlet of the fourth heat exchanger; an inlet of the first compressor is communicated with a first outlet of the second heat exchanger and a first outlet of the fourth heat exchanger respectively, and an outlet of the first compressor is communicated with a second inlet of the first heat exchanger, a first inlet of the second heat exchanger and a first inlet of the fourth heat exchanger respectively; an inlet of the second compressor is communicated with a first outlet of the third heat exchanger, and an outlet of the second compressor is respectively communicated with a second inlet of the second heat exchanger and a first inlet of the third heat exchanger; the second outlet of the second heat exchanger is communicated with the first inlet of the third heat exchanger;

at least two circulation systems, wherein the inlet of one of the circulation systems is communicated with the second outlet of the third heat exchanger, and the outlet of one of the circulation systems is communicated with the second inlet of the third heat exchanger; and inlets of the rest of the circulating systems are communicated with the second outlets of the corresponding fourth heat exchangers, and outlets of the rest of the circulating systems are communicated with the second inlets of the corresponding fourth heat exchangers.

2. The multi-channel low temperature type semiconductor temperature control device according to claim 1, wherein the refrigeration system further comprises:

a first port of the first control valve is communicated with the second outlet of the first heat exchanger, and a second port of the first control valve is communicated with the first inlet of the second heat exchanger;

and a first port of the second control valve is communicated with an outlet of the first compressor, and a second port of the second control valve is communicated with a first inlet of the second heat exchanger.

3. The multi-channel low temperature type semiconductor temperature control device according to claim 1, wherein the refrigeration system further comprises:

an outlet of the second compressor is communicated with a first port of the third control valve and a second inlet of the second heat exchanger respectively, and a second port of the third control valve is communicated with a first inlet of the third heat exchanger;

and a first port of the fourth control valve is communicated with the second outlet of the second heat exchanger, and a second port of the fourth control valve is communicated with the first inlet of the third heat exchanger.

4. The multi-channel low temperature type semiconductor temperature control device according to any one of claims 1 to 3, wherein the refrigeration system further comprises:

the control valve group comprises a fifth control valve and a sixth control valve, a first interface of the fifth control valve is communicated with the second outlet of the first heat exchanger, and a second interface of the fifth control valve is communicated with the first inlet of the corresponding fourth heat exchanger; and a first port of the sixth control valve is communicated with an outlet of the first compressor, and a second port of the sixth control valve is communicated with a first inlet of the corresponding fourth heat exchanger.

5. The multi-channel low temperature type semiconductor temperature control device according to claim 4, wherein the control valve block further comprises:

and a first port of the seventh control valve is communicated with an inlet of the first compressor, and a second port of the seventh control valve is communicated with a first outlet of the corresponding fourth heat exchanger.

6. The multi-channel low temperature type semiconductor temperature control device according to any one of claims 1 to 3, wherein the circulation system comprises: the temperature control device comprises a buffer tank, a circulating pump, a heating device and a first temperature sensor, wherein an outlet of the buffer tank is communicated with an inlet of the circulating pump, and an outlet of the circulating pump is communicated with an inlet of a corresponding load; the heating device is used for heating the medium entering the buffer tank, and the first temperature sensor is used for detecting the temperature of the medium entering the load; when the circulating system is communicated with the third heat exchanger, the outlet of the load is communicated with the second inlet of the third heat exchanger, and the inlet of the buffer tank is communicated with the second outlet of the third heat exchanger; when the circulating system is communicated with the corresponding fourth heat exchanger, the outlet of the load is communicated with the second inlet of the corresponding fourth heat exchanger, and the inlet of the buffer tank is communicated with the second outlet of the corresponding fourth heat exchanger.

7. The multi-channel low temperature type semiconductor temperature control device of claim 6, wherein the heating device is a heating barrel disposed in the buffer tank.

8. The multi-channel low temperature type semiconductor temperature control device according to claim 6, wherein the circulation system further comprises:

a second temperature sensor disposed at an inlet of the buffer tank.

9. The multi-channel low temperature type semiconductor temperature control device according to claim 6, wherein the load is an etching process equipment.

10. A semiconductor production apparatus, characterized in that it comprises a multi-channel low temperature type semiconductor temperature control device according to any one of claims 1 to 9.

Technical Field

The invention relates to the technical field of semiconductors, in particular to a multi-channel low-temperature semiconductor temperature control device and semiconductor production equipment.

Background

The semiconductor temperature control device plays a crucial role in the manufacturing process of wafers as auxiliary equipment for producing semiconductors, the problems of occupied area and energy consumption of auxiliary equipment are also big problems along with the increase of the number of production lines, in addition, the load requires constant temperature output in the manufacturing process of the wafers, meanwhile, the temperature control under the conditions of cooling and loading is also highly required, the temperature area of the existing temperature control equipment is small, and the low-temperature requirement cannot be met.

Disclosure of Invention

The invention provides a multi-channel low-temperature semiconductor temperature control device and semiconductor production equipment, which are used for solving the problems of high energy consumption, large occupied space, small temperature control range and low temperature control precision of the conventional temperature control equipment.

The invention provides a multi-channel low-temperature semiconductor temperature control device, comprising:

the refrigeration system comprises a first heat exchanger, a second heat exchanger, a third heat exchanger, at least one fourth heat exchanger, a first compressor and a second compressor, wherein a first inlet and a first outlet of the first heat exchanger are respectively communicated with a cooling water circulation pipeline, and a second outlet of the first heat exchanger is respectively communicated with a first inlet of the second heat exchanger and a first inlet of the fourth heat exchanger; an inlet of the first compressor is communicated with a first outlet of the second heat exchanger and a first outlet of the fourth heat exchanger respectively, and an outlet of the first compressor is communicated with a second inlet of the first heat exchanger, a first inlet of the second heat exchanger and a first inlet of the fourth heat exchanger respectively; an inlet of the second compressor is communicated with a first outlet of the third heat exchanger, and an outlet of the second compressor is respectively communicated with a second inlet of the second heat exchanger and a first inlet of the third heat exchanger; the second outlet of the second heat exchanger is communicated with the first inlet of the third heat exchanger;

at least two circulation systems, wherein the inlet of one of the circulation systems is communicated with the second outlet of the third heat exchanger, and the outlet of one of the circulation systems is communicated with the second inlet of the third heat exchanger; and inlets of the rest of the circulating systems are communicated with the second outlets of the corresponding fourth heat exchangers, and outlets of the rest of the circulating systems are communicated with the second inlets of the corresponding fourth heat exchangers.

According to the multi-channel low-temperature semiconductor temperature control device provided by the invention, the refrigeration system further comprises:

a first port of the first control valve is communicated with the second outlet of the first heat exchanger, and a second port of the first control valve is communicated with the first inlet of the second heat exchanger;

and a first port of the second control valve is communicated with an outlet of the first compressor, and a second port of the second control valve is communicated with a first inlet of the second heat exchanger.

According to the multi-channel low-temperature semiconductor temperature control device provided by the invention, the refrigeration system further comprises:

an outlet of the second compressor is communicated with a first port of the third control valve and a second inlet of the second heat exchanger respectively, and a second port of the third control valve is communicated with a first inlet of the third heat exchanger;

and a first port of the fourth control valve is communicated with the second outlet of the second heat exchanger, and a second port of the fourth control valve is communicated with the first inlet of the third heat exchanger.

According to the multi-channel low-temperature semiconductor temperature control device provided by the invention, the refrigeration system further comprises:

the control valve group comprises a fifth control valve and a sixth control valve, a first interface of the fifth control valve is communicated with the second outlet of the first heat exchanger, and a second interface of the fifth control valve is communicated with the first inlet of the corresponding fourth heat exchanger; and a first port of the sixth control valve is communicated with an outlet of the first compressor, and a second port of the sixth control valve is communicated with a first inlet of the corresponding fourth heat exchanger.

According to the multi-channel low-temperature semiconductor temperature control device provided by the invention, the control valve group further comprises:

and a first port of the seventh control valve is communicated with an inlet of the first compressor, and a second port of the seventh control valve is communicated with a first outlet of the corresponding fourth heat exchanger.

According to the multi-channel low-temperature semiconductor temperature control device provided by the invention, the circulating system comprises: the temperature control device comprises a buffer tank, a circulating pump, a heating device and a first temperature sensor, wherein an outlet of the buffer tank is communicated with an inlet of the circulating pump, and an outlet of the circulating pump is communicated with an inlet of a corresponding load; the heating device is used for heating the medium entering the buffer tank, and the first temperature sensor is used for detecting the temperature of the medium entering the load; when the circulating system is communicated with the third heat exchanger, the outlet of the load is communicated with the second inlet of the third heat exchanger, and the inlet of the buffer tank is communicated with the second outlet of the third heat exchanger; when the circulating system is communicated with the corresponding fourth heat exchanger, the outlet of the load is communicated with the second inlet of the corresponding fourth heat exchanger, and the inlet of the buffer tank is communicated with the second outlet of the corresponding fourth heat exchanger.

According to the multichannel low-temperature semiconductor temperature control device provided by the invention, the heating device is a heating barrel, and the heating barrel is arranged in the buffer box.

According to the multi-channel low-temperature semiconductor temperature control device provided by the invention, the circulating system further comprises:

a second temperature sensor disposed at an inlet of the buffer tank.

According to the multichannel low-temperature semiconductor temperature control device provided by the invention, the load is etching process equipment.

The invention also provides semiconductor production equipment which comprises the multichannel low-temperature semiconductor temperature control device.

The first compressor and the second compressor of the multi-channel low-temperature semiconductor temperature control device provided by the invention can work simultaneously or can be used independently, and when the first compressor is used independently, the temperature of a circulating medium can reach-40 ℃ through the fourth heat exchanger. When the first compressor and the second compressor work simultaneously, the temperature of the circulating medium can reach-80 ℃ through the third heat exchanger, the temperature control range is enlarged, and the requirement of ultralow temperature is met. In the temperature rising process, high-temperature gas discharged by the compressor enters the second heat exchanger and the fourth heat exchanger for heat exchange, so that the circulating medium is quickly heated, and the energy consumption is reduced. Because a plurality of circulation systems exchange heat with a refrigerating system, the volume of the temperature control device is reduced, and each circulation system can independently control the temperature.

Drawings

In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and those skilled in the art can also obtain other drawings according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a multi-channel low-temperature semiconductor temperature control device provided by the invention.

Reference numerals:

100. a first heat exchanger; 101. a second heat exchanger; 102. a third heat exchanger; 103. a fourth heat exchanger; 104. a first compressor; 105. a second compressor; 106. a first control valve; 107. a second control valve; 108. a third control valve; 109. a fourth control valve; 110. a fifth control valve; 111. a sixth control valve; 112. a seventh control valve; 200. a buffer tank; 201. a circulation pump; 202. a heating device; 203. a first temperature sensor; 204. a second temperature sensor; PCW, cooling water circulation line.

Detailed Description

The embodiments of the present invention will be described in further detail with reference to the drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.

In embodiments of the invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of an embodiment of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

The multichannel low-temperature type semiconductor temperature control device and the semiconductor production apparatus of the present invention will be described with reference to fig. 1.

Fig. 1 illustrates a schematic structural diagram of a multichannel low-temperature semiconductor temperature control device, and as shown in fig. 1, the multichannel low-temperature semiconductor temperature control device includes a refrigeration system and at least two circulation systems, the refrigeration system includes a first heat exchanger 100, a second heat exchanger 101, a third heat exchanger 102, at least one fourth heat exchanger 103, a first compressor 104 and a second compressor 105, a first inlet and a first outlet of the first heat exchanger 100 are respectively communicated with a cooling water circulation pipeline PCW, and a second outlet of the first heat exchanger 100 is respectively communicated with a first inlet of the second heat exchanger 101 and a first inlet of the fourth heat exchanger 103. An inlet of the first compressor 104 is communicated with a first outlet of the second heat exchanger 101 and a first outlet of the fourth heat exchanger 103, respectively, and an outlet of the first compressor 104 is communicated with a second inlet of the first heat exchanger 100, a first inlet of the second heat exchanger 101 and a first inlet of the fourth heat exchanger 103, respectively. An inlet of the second compressor 105 is communicated with a first outlet of the third heat exchanger 102, and an outlet of the second compressor 105 is respectively communicated with a second inlet of the second heat exchanger 101 and a first inlet of the third heat exchanger 102; the second outlet of the second heat exchanger 101 communicates with the first inlet of the third heat exchanger 102. At least two circulation systems, wherein the inlet of one circulation system is communicated with the second outlet of the third heat exchanger 102, and the outlet of one circulation system is communicated with the second inlet of the third heat exchanger 102. And the inlets of the rest of circulating systems are communicated with the second outlets of the corresponding fourth heat exchangers 103, and the outlets of the rest of circulating systems are communicated with the second inlets of the corresponding fourth heat exchangers 103.

The first compressor 104 and the second compressor 105 of the multichannel low-temperature semiconductor temperature control device can work simultaneously or can be used independently, and when the first compressor 104 is used independently, the temperature of a circulating medium can reach-40 ℃ through the fourth heat exchanger 103; when the first compressor 104 and the second compressor 105 work simultaneously, the temperature of the circulating medium can reach-80 ℃ through the third heat exchanger 102, the temperature control range is enlarged, and the requirement of ultralow temperature is met. In the temperature rising process, high-temperature gas discharged by the compressor enters the second heat exchanger 101 and the fourth heat exchanger 103 for heat exchange, so that the circulating medium is quickly heated, and the energy consumption is reduced. Because a plurality of circulation systems exchange heat with a refrigerating system, the volume of the temperature control device is reduced, and each circulation system can independently control the temperature.

According to an embodiment of the present invention, the refrigeration system further comprises a first control valve 106 and a second control valve 107, a first port of the first control valve 106 is in communication with the second outlet of the first heat exchanger 100, and a second port of the first control valve 106 is in communication with the first inlet of the second heat exchanger 101. A first port of the second control valve 107 communicates with an outlet of the first compressor 104, and a second port of the second control valve 107 communicates with a first inlet of the second heat exchanger 101. By controlling the opening degrees of the first control valve 106 and the second control valve 107, the temperature of the medium entering the third heat exchanger 102 can be adjusted, the temperature of the circulating medium in the circulating system corresponding to the third heat exchanger 102 can be preliminarily controlled, and the temperature control precision is improved.

According to an embodiment of the present invention, the refrigeration system further comprises a third control valve 108 and a fourth control valve 109, the outlet of the second compressor 105 is communicated with the first port of the third control valve 108 and the second inlet of the second heat exchanger 101, respectively, and the second port of the third control valve 108 is communicated with the first inlet of the third heat exchanger 102. A first port of the fourth control valve 109 communicates with the second outlet of the second heat exchanger 101 and a second port of the fourth control valve 109 communicates with the first inlet of the third heat exchanger 102. By controlling the opening degrees of the third control valve 108 and the fourth control valve 109, the temperature of the medium entering the third heat exchanger 102 can be further adjusted, so that the temperature of the circulating medium in the circulating system corresponding to the third heat exchanger 102 can be further controlled, and the temperature control precision can be further improved.

According to the embodiment of the invention, the refrigeration system further comprises at least one control valve group, and the number of the control valve groups is the same as that of the fourth heat exchangers 103, and the control valve groups correspond to the fourth heat exchangers one by one. The control valve group comprises a fifth control valve 110 and a sixth control valve 111, wherein a first interface of the fifth control valve 110 is communicated with the second outlet of the first heat exchanger 100, and a second interface of the fifth control valve 110 is communicated with the first inlet of the corresponding fourth heat exchanger 103. A first port of the sixth control valve 111 communicates with an outlet of the first compressor 104, and a second port of the sixth control valve 111 communicates with a first inlet of the corresponding fourth heat exchanger 103. By controlling the opening degrees of the fifth control valve 110 and the sixth control valve 111, the temperature of the medium entering the fourth heat exchanger 103 can be adjusted, the temperature of the medium circulating in the circulating system corresponding to the fourth heat exchanger 103 can be preliminarily controlled, and the temperature control precision can be improved.

According to an embodiment of the present invention, the control valve group further comprises a seventh control valve 112, a first port of the seventh control valve 112 is communicated with the inlet of the first compressor 104, and a second port of the seventh control valve 112 is communicated with the first outlet of the corresponding fourth heat exchanger 103. By controlling the opening degree of the seventh control valve 112, the temperature of the circulating medium in the circulation system corresponding to the fourth heat exchanger 103 can be further controlled, and the temperature control accuracy can be further improved.

According to an embodiment of the present invention, the circulation system includes a buffer tank 200, a circulation pump 201, a heating device 202, and a first temperature sensor 203, an outlet of the buffer tank 200 communicates with an inlet of the circulation pump 201, and an outlet of the circulation pump 201 communicates with an inlet of a corresponding load. The heating device 202 is used to heat the medium entering the buffer tank 200, and the first temperature sensor 203 is used to detect the temperature of the medium entering the load. When the circulating system is communicated with the third heat exchanger 102, the outlet of the load is communicated with the second inlet of the third heat exchanger 102, and the inlet of the buffer tank 200 is communicated with the second outlet of the third heat exchanger 102; when the circulation system is communicated with the corresponding fourth heat exchanger 103, the outlet of the load is communicated with the second inlet of the corresponding fourth heat exchanger 103, and the inlet of the buffer tank 200 is communicated with the second outlet of the corresponding fourth heat exchanger 103.

It should be noted here that the first temperature sensor 203 is disposed at the entrance of the load, and the temperature of the medium entering the load is checked by the first temperature sensor 203, and the PID temperature control device can adjust the temperature of the heating apparatus 202 according to the temperature value detected by the first temperature sensor 203, so as to keep the temperature of the medium entering the load within a predetermined range, thereby further improving the temperature control accuracy.

According to the embodiment of the present invention, the heating device 202 is a heating barrel, and the heating barrel is disposed in the buffer tank 200; of course, the installation position of the heating tub is not limited to this, and the heating tub may be connected in series between the outlet of the buffer tank 200 and the inlet of the circulation pump 201. The heating barrel is arranged to carry out secondary adjustment on the temperature of the circulating medium in the circulating system, so that the temperature control precision is further improved.

According to an embodiment of the present invention, the circulation system further includes a second temperature sensor 204, the second temperature sensor 204 is disposed at an inlet of the buffer tank 200, and the second temperature sensor 204 is used for detecting a temperature of the medium entering the buffer tank 200. The temperature of the medium entering the buffer box 200 can be detected by the second temperature sensor 204, and the PID temperature control device can adjust the temperature of the refrigeration system according to the temperature value detected by the second temperature sensor 204, so that the temperature control precision is further improved.

According to an embodiment of the invention, the load is an etching process equipment.

According to an embodiment of the present invention, as shown in fig. 1, the multichannel low temperature type semiconductor temperature control device includes a refrigeration system and three circulation systems, the refrigeration system includes a first heat exchanger 100, a second heat exchanger 101, a third heat exchanger 102, two fourth heat exchangers 103, a first compressor 104, a second compressor 105, a first control valve 106, a second control valve 107, a third control valve 108, a fourth control valve 109, and two control valve groups.

A first inlet and a first outlet of the first heat exchanger 100 are respectively communicated with the cooling water circulation pipeline PCW, and a second outlet of the first heat exchanger 100 is communicated with a first port of the first control valve 106. An inlet of the first compressor 104 is communicated with a first outlet of the second heat exchanger 101, and an outlet of the first compressor 104 is respectively communicated with a second inlet of the first heat exchanger 100 and a first port of the second control valve 107. A second port of the first control valve 106 communicates with a first inlet of the second heat exchanger 101, and a second port of the second control valve 107 communicates with a first inlet of the second heat exchanger 101. An outlet of the second compressor 105 is communicated with a first port of a third control valve 108 and a second inlet of the second heat exchanger 101, and a second port of the third control valve 108 is communicated with a first inlet of the third heat exchanger 102. A first port of the fourth control valve 109 communicates with the second outlet of the second heat exchanger 101 and a second port of the fourth control valve 109 communicates with the first inlet of the third heat exchanger 102.

The control valve group comprises a fifth control valve 110, a sixth control valve 111 and a seventh control valve 112, wherein a first port of the fifth control valve 110 is communicated with a second outlet of the first heat exchanger 100, and a second port of the fifth control valve 110 is communicated with a first inlet of the corresponding fourth heat exchanger 103. A first port of the sixth control valve 111 communicates with an outlet of the first compressor 104, and a second port of the sixth control valve 111 communicates with a first inlet of the corresponding fourth heat exchanger 103. A first port of the seventh control valve 112 communicates with an inlet of the first compressor 104, and a second port of the seventh control valve 112 communicates with a first outlet of the corresponding fourth heat exchanger 103.

One of the three circulating systems is communicated with the third heat exchanger 102, and the other two circulating systems are respectively communicated with the corresponding fourth heat exchangers 103. The circulation system includes buffer tank 200, circulating pump 201, heating bucket, first temperature sensor 203 and second temperature sensor 204, and the export of buffer tank 200 communicates with the entry of circulating pump 201, and the export of circulating pump 201 communicates with the entry of the load that corresponds. The heating tub is disposed in the buffer tank 200, the first temperature sensor 203 is disposed at an inlet of the load, and the second temperature sensor 204 is disposed at an inlet of the buffer tank 200. When the circulating system is communicated with the third heat exchanger 102, the outlet of the load is communicated with the second inlet of the third heat exchanger 102, and the inlet of the buffer tank 200 is communicated with the second outlet of the third heat exchanger 102; when the circulation system is communicated with the corresponding fourth heat exchanger 103, the outlet of the load is communicated with the second inlet of the corresponding fourth heat exchanger 103, and the inlet of the buffer tank 200 is communicated with the second outlet of the corresponding fourth heat exchanger 103.

The invention also provides semiconductor production equipment which comprises the multichannel low-temperature semiconductor temperature control device.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.