Metallized isolated scintillating ceramic array structure and preparation method thereof

文档序号:1320343 发布日期:2020-07-14 浏览:43次 中文

阅读说明:本技术 一种金属化隔离的闪烁陶瓷阵列结构及其制备方法 (Metallized isolated scintillating ceramic array structure and preparation method thereof ) 是由 肖贵遐 于 2020-03-30 设计创作,主要内容包括:本发明公开了一种金属化隔离的闪烁陶瓷阵列结构及其制备方法,所述闪烁陶瓷阵列结构包括闪烁陶瓷块,所述闪烁陶瓷块上设有多条纵横交错连通的切槽,切槽将闪烁陶瓷块的上表面分割为阵列分布的闪烁陶瓷阵元,各条切槽内填充烧结型高密度金属化隔离层;还公开了闪烁陶瓷阵列结构的制备方法:在闪烁陶瓷块的表面切割出纵横交错连通的切槽,形成闪烁陶瓷阵列结构;接着将闪烁陶瓷阵列结构浸入高密度金属化浆料中;再进行高温烧结;高温烧结后取出闪烁陶瓷阵列结构进行冷却;最后闪烁陶瓷阵列结构的阵列面进行研磨处理。本发明能够减少X射线的散射以及二次荧光散射,能够防止阵元的信息失真,从而提高了探测器的分辨率。(The invention discloses a metallized isolated flash ceramic array structure and a preparation method thereof, wherein the flash ceramic array structure comprises a flash ceramic block, a plurality of criss-cross communicated cutting grooves are arranged on the flash ceramic block, the cutting grooves divide the upper surface of the flash ceramic block into flash ceramic array elements distributed in an array, and a sintered high-density metallized isolation layer is filled in each cutting groove; also discloses a preparation method of the scintillating ceramic array structure: cutting grooves which are communicated in a criss-cross mode on the surface of the scintillating ceramic block to form a scintillating ceramic array structure; then immersing the scintillating ceramic array structure into the high-density metallization slurry; then high-temperature sintering is carried out; taking out the scintillation ceramic array structure after high-temperature sintering and cooling; and finally, grinding the array surface of the scintillation ceramic array structure. The invention can reduce the scattering of X-rays and secondary fluorescence scattering, and can prevent the information distortion of array elements, thereby improving the resolution of the detector.)

1. The utility model provides a scintillation ceramic array structure that metallization was kept apart, includes scintillation ceramic block, be equipped with the grooving of many vertically and horizontally staggered intercommunications on the scintillation ceramic block, the both ends intercommunication of grooving the scintillation ceramic block global, the scintillation ceramic array element that the array distributes is cut apart into with the upper surface of scintillation ceramic block to vertical and horizontal grooving, its characterized in that: and the longitudinal and transverse cutting grooves are internally filled with sintered metallized isolating layers for isolating the scintillation ceramic array elements.

2. The metallized isolated scintillating ceramic array structure of claim 1, wherein the depth of the undercut is at least 1% of the total thickness of the scintillating ceramic block.

3. The metallized isolated scintillating ceramic array structure of claim 1, wherein the width of the kerfs is 10-300 μm.

4. The metallized isolated scintillating ceramic array structure of claim 1, wherein the scintillating ceramic array element size between the cross-cut grooves is 60-3000 μm.

5. The metallized isolated scintillating ceramic array structure of claim 1, wherein the sintered metallized isolation layer is sintered from a slurry containing a high density metal of silver, copper, molybdenum, manganese, tungsten, or lead; the paste was formulated as a conventional filter using conductive silver paste.

6. A method of making a metallized isolated scintillating ceramic array structure according to any one of claims 1 to 5, comprising the steps of:

step 1: cutting a plurality of criss-cross communicated cutting grooves on the upper surface of the scintillation ceramic block by using a cutting knife, wherein two ends of each cutting groove are communicated with the peripheral surface of the scintillation ceramic block, and the cutting grooves divide the upper surface of the scintillation ceramic block into scintillation ceramic array elements distributed in an array manner to form a scintillation ceramic array;

step 2: immersing the scintillating ceramic array into the high-density metalized slurry to ensure that the cutting groove is filled with the sintered high-density metalized slurry;

and step 3: taking the scintillation ceramic array structure out of the high-density metalized slurry, erasing the high-density slurry on the surface of the scintillation ceramic array structure, and putting the scintillation ceramic array structure into heating equipment for high-temperature sintering so as to sinter and solidify the high-density metalized slurry in the cutting groove to form a high-density sintered metalized isolation layer;

and 4, step 4: taking out the scintillation ceramic array structure after high-temperature sintering and cooling;

and 5: and grinding the array surface of the cooled scintillation ceramic array structure to form the scintillation ceramic array structure with sintered metalized isolation.

7. The method of making a metallized isolated scintillating ceramic array structure in accordance with claim 6, wherein the cutting blade is a laser or diamond cutting blade.

8. The method of claim 6, wherein the high temperature sintering temperature is 500 ℃ to 1500 ℃.

9. The method of claim 6, wherein the metallization paste is formulated with conductive silver paste for a conventional filter.

Technical Field

The invention relates to a metallized isolated scintillating ceramic array structure and a preparation method thereof.

Background

With the continuous development of modern industry and medical technology, the emergence and development of new digital industrial diagnostic and medical imaging technologies, such as X-ray computed tomography (X-CT), positron emission tomography (P L T), cardiovascular angiography (DSA), etc., have made higher and higher requirements on high definition and high resolution structure and performance for the scintillating material array elements used in these technologies.

In the application of the CT with high definition and high resolution, an array receiving array element with high isolation is needed, no scattering exists between the array elements, so that the digital image is clearer, and the CT is the power for driving the application. The existence of scattered radiation in such detector units is a major factor that limits the high resolution of the detector. Traditional detector subassembly also realizes the isolation between the array element through setting up anti-scatter grid, with the help of grid, can optimize ray quality to a great extent, but grid's thickness and technology do not make the state that assembly strength, technology integrality and the geometric efficiency of detector reach the optimum.

The key point of the high-definition and high-resolution imaging technology is that high-isolation and high-density array receiving array elements are needed, and adjacent array elements have a scattering-free structure. Therefore, the array element structure with high scattering isolation becomes a core element for realizing high-resolution images with a high fill factor array structure.

In consideration of human safety, the radiation intensity and detection time must be reduced as much as possible to reduce the absorption of various rays by human body, which requires the scintillating material to have good transparency, high density, short decay time (less than 0.1ms), short afterglow, and good physicochemical stability. Advances in transparent scintillating ceramic fabrication technology have made it possible to develop such scintillators. The scintillation ceramic is easy to realize the molecular-level uniform doping of doping elements in the powder preparation process, the preparation process is simple, the cost is low, and the scintillation ceramic has good machining performance and the like, so that the scintillation ceramic becomes the preferred object of the scintillation detection material for X-CT.

The important factors influencing the CT definition are scattering, and the two types of scattering are total, wherein one type is the scattering of X rays, and the second type is the fluorescence scattering excited by the X rays in the scintillating ceramic; in actual work, X rays irradiate on the scintillating ceramic material, are absorbed by the scintillating material, and generate secondary fluorescence; the propagation of X-rays in the scintillating ceramic material is gradually attenuated along with the propagation distance, and has a certain propagation distance, if no X-ray isolation blocking material exists among the array elements, the X-rays can pass through the partition among the array elements and crosstalk to adjacent array elements, and especially under the condition that the X-rays are not vertical to the scintillating ceramic surface, the crosstalk of the X-rays can cause the radiation intensity crosstalk among the array elements and the information distortion; the secondary fluorescence excited by the X-ray can be transmitted in a material with a certain light transmittance, if no high secondary fluorescence is isolated, the secondary fluorescence can be transmitted in the scintillating ceramic material to form crosstalk interference of light, and information distortion of array elements can be caused to influence the definition of the detector.

Disclosure of Invention

The technical problem to be solved by the invention is to provide a metallized isolated scintillating ceramic array structure and a preparation method thereof, wherein the scintillating ceramic array structure can prevent light scattering among array elements, reduce information distortion of the array elements and further improve the resolution of a detector.

The technical scheme adopted by the invention is as follows.

The utility model provides a scintillation ceramic array structure that metallization was kept apart, includes scintillation ceramic block, be equipped with the grooving of vertically and horizontally staggered intercommunication on the scintillation ceramic block, the both ends intercommunication of grooving the scintillation ceramic block global, the scintillation ceramic array element that the array distributes is cut apart into with the upper surface of scintillation ceramic block to vertical and horizontal grooving, its characterized in that: and a sintered metallized isolating layer for isolating the scintillating ceramic array elements is filled in each cutting groove.

The depth of the cutting groove is at least 1% of the total thickness of the scintillation ceramic block; the width of the cutting groove is 10 to 300 μm; the size of the square scintillation ceramic array element between the longitudinal and transverse cutting grooves is 60-3000 μm.

The sintering type metallization isolation layer is formed by sintering slurry containing high-density metals such as silver, copper, molybdenum, manganese, tungsten or lead; the paste is prepared by using conductive silver paste according to a common filter.

The invention also provides a preparation method of the metallized isolated scintillating ceramic array structure, which comprises the following steps:

step 1: preparing a scintillating ceramic block;

step 2: cutting criss-cross communicated cutting grooves on the upper surface of the scintillating ceramic block, wherein two ends of each cutting groove are communicated with the peripheral surface of the scintillating ceramic block, and the cutting grooves divide the upper surface of the scintillating ceramic block into scintillating ceramic array elements distributed in an array manner to form a scintillating ceramic array;

and step 3: immersing the scintillating ceramic array structure into the high-density metallization slurry to fill the cutting groove with the high-density metallization slurry;

and 4, step 4: taking the scintillation ceramic array structure out of the high-density metalized slurry, erasing the high-density slurry on the surface of the scintillation ceramic array structure, and putting the scintillation ceramic array structure into heating equipment for high-temperature sintering so as to sinter the high-density metalized slurry in the cutting groove to form a high-density sintered metal isolation layer;

and 5: taking out the scintillation ceramic array structure after high-temperature sintering and cooling;

step 6: and grinding the array surface of the cooled scintillation ceramic array structure to form the high-density sintered metallized isolated scintillation ceramic array structure.

The invention adopts a laser cutting knife or a diamond cutting knife to cut.

The temperature of the high-temperature sintering is 500-1500 ℃.

The metallization paste is prepared from a high-density metal material, a ceramic glass phase material and an organic carrier material according to the preparation method of a conductive silver paste for a common filter.

Compared with the prior art, the technology of the invention has the following advantages:

(1) the high-density sintered metal material is filled in the cutting groove of the scintillation ceramic array structure, and has stronger X-ray absorption and isolation capacity, thereby enhancing the scattering isolation capacity of X-ray and secondary fluorescence among array elements and improving the signal-to-noise ratio and resolution of the detector;

(2) the high-density sintered metallized slurry filled in the cutting groove of the scintillation ceramic array structure is sintered and cooled to form a high-strength sintered metallized consolidated body, and the metallized consolidated body is based on a ceramic glass phase material contained in a metallized layer, forms a structure of a scintillation material array element, a ceramic glass phase in the metallized layer, a metal material layer, and a ceramic glass phase in the metallized layer, and has high strength and high reliability; the method comprises the following steps of selecting a ceramic material glass phase material compatible with a scintillation ceramic material as an intermediate phase, realizing high-strength consolidation of the scintillation material and a ceramic glass phase material in a metallization layer, and slightly dissolving a metal material in the metallization layer in the ceramic glass phase material in the metallization layer, so that a high-strength and high-isolation structure is realized after high-temperature sintering, the service capacity of the detector is improved, and the method is suitable for industrial application;

(3) the sintered metallized isolating layer has ceramic material bonding strength of more than 2MPa, the scintillator ceramic material array elements form a scintillating material detection unit under the strength bonding action, the spherical array element arrangement is easy to realize, each array element on the detector is perpendicular to X-ray light, scattered ray artifacts are eliminated on hardware, the definition of an image is improved, and the extra ray dose paid for overcoming the definition reduction is obviously reduced.

(4) According to the invention, the cutting groove with a smaller width can be cut by the mechanical cutting blade, so that the scintillation ceramic block forms an array with high density and high filling coefficient, and the spatial resolution of the detector is improved;

(5) according to the invention, through a grinding process, the high flatness of the array surface is kept, and the integration of a detector system is facilitated;

(6) the scintillation ceramic array elements have high size consistency, the detection image error among the array elements is reduced, and the identification degree of the image is improved.

Drawings

The invention is described in further detail below with reference to the figures and the specific embodiments

FIG. 1 is a schematic top view of an inventive scintillating ceramic array structure with sintered metallization isolation;

FIG. 2 is an enlarged view of a portion of FIG. 1 at A;

FIG. 3 is a schematic side view of an inventive scintillating ceramic array structure with sintered metallization isolation;

FIG. 4 is an enlarged view of a portion of FIG. 3 at B;

reference numbers on the drawings: 1-scintillation ceramic block, 2-cutting groove, 3-high density sintered metallized isolated layer and 4-scintillation ceramic array element.

Detailed Description

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