阅读说明：本技术 投射曝光设备的光学系统 (Optical system of projection exposure apparatus ) 是由 M.帕特拉 于 2020-01-07 设计创作，主要内容包括：本发明涉及一种EUV中操作的微光刻投射曝光设备的光学系统。光学系统包括：至少一个影响偏振的布置,其至少具有一个第一双反射表面单元和一个第二双反射表面单元,它们各具有第一反射表面和第二反射表面。在相同的双反射表面单元内,第一反射表面和第二反射表面以距离d1且以0°±10°的角度直接相邻地布置。第一双反射表面单元的第一反射表面和第二双反射表面单元的第二反射表面以距离d2且以0°±10°的角度直接相邻地布置。在第一反射表面上入射的光与第一反射表面形成的角度为43°±10°,特别是43°±5°。在操作光学系统期间,将在第一双反射表面单元的第一反射表面上入射的光反射朝向第二双反射表面单元的第二反射表面。对于距离d1和d2,以下是成立的：d2＞5*d1。(The invention relates to an optical system of a microlithographic projection exposure apparatus operating in EUV. The optical system includes: at least one polarization-affecting arrangement having at least a first double-reflective-surface element and a second double-reflective-surface element, each having a first reflective surface and a second reflective surface. Within the same double reflecting surface unit, the first reflecting surface and the second reflecting surface are arranged directly adjacent at a distance d1 and at an angle of 0 ° ± 10 °. The first reflective surface of the first double-reflective-surface unit and the second reflective surface of the second double-reflective-surface unit are arranged directly adjacent to each other at a distance d2 and at an angle of 0 ° ± 10 °. The angle formed by the light incident on the first reflecting surface and the first reflecting surface is 43 ° ± 10 °, particularly 43 ° ± 5 °. During operation of the optical system, light incident on the first reflective surface of the first double-reflective surface unit is reflected towards the second reflective surface of the second double-reflective surface unit. For distances d1 and d2, the following holds: d2 > 5 × d 1.)

1. An optical system of a microlithographic projection exposure apparatus operating in EUV, comprising:

at least one polarization affecting arrangement (124, 224, 324, 424, 524, 624, 724) having at least one first and one second double reflecting surface unit (128, 228, 328, 428, 528, 728);

wherein the at least two double reflecting surface units each have a first reflecting surface (128.1, 228.1, 328.1, 428.1, 528.1) and a second reflecting surface (128.2, 228.2, 328.2, 428.2, 528.2);

wherein within the same double-reflecting surface unit, the first reflecting surface and the second reflecting surface are in each case arranged directly adjacent to one another at a distance d1 and at an angle of 0 ° ± 10 °;

wherein the first reflective surface of the first double-reflective surface unit and the second reflective surface of the second double-reflective surface unit are arranged directly adjacent to each other at a distance d2 and at an angle of 0 ° ± 10 °;

wherein during operation of the optical system, light (125, 225, 325, 425, 525) incident on the first reflective surface forms an angle of 43 ° ± 10 ° with the first reflective surface; and

wherein during operation of the optical system, light incident on the first reflective surface of the first double-reflective surface unit is reflected towards the second reflective surface of the second double-reflective surface unit; and

wherein the following is true: d2 > 5 × d 1.

2. The optical system according to claim 1, wherein the polarization affecting arrangement (124, 224, 324, 424, 524, 624, 724) has at least ten double reflecting surface units (128, 228, 328, 428, 528, 728).

3. The optical system according to claim 2, wherein the first reflective surfaces (128.1, 228.1, 328.1, 428.1, 528.1) and the second reflective surfaces (128.2, 228.2, 328.2, 428.2, 528.2) in the double reflective surface unit (128, 228, 328, 428, 528, 728) are arranged alternately and with alternating distances d1 and d 2.

4. The optical system according to any one of the preceding claims, wherein the polarization affecting arrangement (124, 224, 324, 424, 524, 624, 724):

is rotatable about an axis of rotation extending parallel to a light propagation direction (z) of light (125, 225, 325, 425, 525) incident on the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) during operation of the optical system, and/or

Is configured such that the polarization affecting arrangement can be removed from a beam path of light incident on the first reflective surface during operation of the optical system.

5. The optical system according to any of the preceding claims, wherein a first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) and a second reflective surface (128.2, 228.2, 328.2, 428.2, 528.2) in at least one of the double reflective surface units (128, 228, 328, 428, 528, 728) are arranged at both side surfaces of a monolithic element (128, 228, 328, 428, 528a, 528b, 528c, 728).

6. The optical system according to claim 5, wherein at least one non-reflective side surface (457a, 457b, 557c) of the monolithic element (128, 228, 328, 428, 528a, 528b, 528c, 728) is arranged parallel to a light propagation direction (z) of light (125, 225, 325, 425, 525) incident on the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) during operation of the optical system.

7. The optical system of any one of claims 1, 2, 3 or 4, wherein the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) and the second reflective surface (128.2, 228.2, 328.2, 428.2, 528.2) of the double reflective surface unit (128, 228, 328, 428, 528, 728) are arranged at different elements (528 d).

8. The optical system of any one of the preceding claims, wherein the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) and the second reflective surface (128.2, 228.2, 328.2, 428.2, 528.2) comprise:

an EUV reflective layer, and/or

A layer influencing the polarization, and/or

A molybdenum-silicon multilayer coating, and/or

A ruthenium coating, and/or

Molybdenum silicon multilayer coatings with ruthenium capping layers.

9. The optical system according to any one of the preceding claims, wherein the second reflective surface (328.2, 428.2, 528b.2) is arranged in such a way that: the light (125, 225, 325, 425, 525) incident on the first reflective surface during operation of the optical system is displaced by a height h in a light propagation direction (z) with respect to a directly adjacent first reflective surface (328.1, 428.1, 528 b.1).

10. The optical system of claim 9, wherein the following is true:

h＞d1；

wherein h is in particular at most 20% away from h' ═ d1 √ 2.

11. The optical system according to any one of the preceding claims,

wherein at least one of the reflective surfaces (128.1, 228.1, 328.1, 428.1, 528.1, 128.2, 228.2, 328.2, 428.2, 528.2) has an extent L in a first direction of extension;

wherein the first extension direction is given by: projection of a light propagation direction (z) of light (125, 225, 325, 425, 525) incident on the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) into a plane in which the first reflective surface is arranged during operation of the optical system;

wherein L deviates by at most 20% from L ═ 2 × d 2.

12. The optical system according to any one of the preceding claims,

at least two double reflecting surface units (128, 228, 328, 428, 528, 728) are tilted with respect to each other by a correction angleIs arranged in such a way that

At least one first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) and one second reflective surface (128.2, 228.2, 328.2, 428.2, 528.2) are tilted relative to each other by a correction angleThe arrangement is carried out in such a way that,

wherein the correction angleGreater than 0.1.

13. The optical system according to any one of the preceding claims, wherein the polarization affecting arrangement (124, 224, 324, 424, 524, 624, 724) converts unpolarized or circularly polarized light (125, 225, 325, 425, 525) incident on the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) during operation of the optical system into linearly polarized light (130, 230, 330, 430, 530) reflected from the second reflective surface (128.2, 228.2, 328.2, 428.2, 528.2).

14. An illumination system (602, 702) of a microlithographic projection exposure apparatus (601, 701), designed for operation in EUV, wherein the illumination system comprises an optical system according to one of the preceding claims.

15. An illumination system (602, 702) as claimed in claim 14, wherein the illumination system has an intermediate focal plane (612, 712) and at least one first facet mirror (613, 763) comprising a plurality of facets (613a), wherein the at least one polarization influencing arrangement (124, 224, 324, 424, 524, 624, 724) is arranged in a beam path between the intermediate focal plane and the first facet mirror to influence a polarization state of the light (125, 225, 325, 425, 525).

16. A microlithographic projection exposure apparatus (601, 701) comprising an illumination system (602, 702) according to one of claims 14 and 15 and a projection optical unit (607).

17. A method for microlithographically producing microstructured components, comprising the following steps:

providing a substrate to which a layer of a light-sensitive material is at least partially applied;

providing a mask comprising a structure to be imaged;

providing a microlithographic projection exposure apparatus (601, 701) according to claim 16; and

at least a part of the mask is projected onto an area of the layer by means of the projection exposure apparatus.

Technical Field

The invention relates to an optical system comprising a polarization-influencing arrangement, in particular a projection exposure apparatus for EUV microlithography.

Background

An optical system comprising a polarization-influencing arrangement for use in a projection exposure apparatus for EUV microlithography is known, for example, from DE102012206153 a 1. In particular, it is known from DE102012206153 a1 that an arrangement influencing the polarization is used to polarize incident unpolarized light by two reflections at the brewster angle. In this case, the light is linearly polarized by the arrangement of two separate mirrors arranged parallel to one another, which deflect the incident unpolarized light by 90 ° in each case successively. In this case, the original beam direction of the incident light remains unchanged, since two beam deflections of 90 ° in opposite directions each occur. According to DE102012206153 a1, a plurality of such mirror pairs are arranged close to each other. Furthermore, the mirror pairs can be embodied so as to be individually rotatable in each case, in order to be able to set the polarization direction of the reflected light.

Disclosure of Invention

It is an object of the invention to develop an optical system comprising an arrangement for influencing the polarization of the type mentioned in the introduction such that the following properties are optimized:

1.) aiming to reduce or minimize undesired shadowing of the arrangement affecting the polarization; and/or

2.) aiming at improving mechanical and thermal stability; in particular, it is intended to make possible a simpler mechanical mounting of the optical unit affecting the arrangement of the polarization; and/or

3.) in addition to the polarizing operation, the aim is also to make it possible to operate unpolarized with both an unchanged light distribution in the optical system and a higher "effective transmission" than in the polarizing operation; an "effective transmission rate" is understood here to mean the quotient of the intensity downstream (that is to say downstream) of the arrangement region of the arrangement influencing the polarization with respect to the intensity upstream (that is to say upstream) of the arrangement region of the arrangement influencing the polarization.

And/or

4.) the producibility of the arrangement for influencing the polarization is intended to be simplified, and/or it is intended to be manufacturable at a lower cost; and/or

5.) aiming to minimize beam offset due to polarization affecting arrangements; and/or

6.) the aim is to reduce or minimize undesired shadowing due to the arrangement of influencing polarizations, in combination with the minimization of beam deviation due to the arrangement of influencing polarizations; and/or

7.) the arrangement affecting the polarization is intended to be suitable for setting the polarization of incident parallel or diverging light without causing beam deviation due to the arrangement affecting the polarization; and/or

8.) the arrangement influencing the polarization is intended to be retrofittable in existing projection exposure apparatuses without requiring fundamental changes to existing projection exposure apparatuses.

According to the invention, this object is achieved by an optical system having the features specified in claim 1 and/or having the features specified in the dependent claims.

According to the present invention, it has been realized that the above targeted selection of the distance between the reflective surfaces of the arrangement influencing the polarization may be used to reduce the shadow area.

According to the invention, this object is achieved by an optical system for a microlithographic projection exposure apparatus operating in EUV, wherein the optical system comprises at least one polarization influencing arrangement having at least one first double-reflective surface unit and one second double-reflective surface unit. At least two double reflecting surface units each have a first reflecting surface and a second reflecting surface. In the same double-reflecting surface unit, the first reflecting surface and the second reflecting surface are in each case arranged directly adjacent to one another at a distance d1 and at an angle of 0 ° ± 10 °. "directly adjacent" means here that a reflective surface in an arrangement which influences the polarization without further optical use is situated between two reflective surfaces which are arranged directly adjacent at a distance d 1. The first reflective surface of the first double-reflective-surface unit and the second reflective surface of the second double-reflective-surface unit are arranged directly adjacent to each other at a distance d2 and at an angle of 0 ° ± 10 °. During operation of the optical system, light incident on the first reflecting surface forms an angle of 43 ° ± 10 °, in particular 43 ° ± 5 °, with the first reflecting surface. During operation of the optical system, light incident on the first reflective surface of the first double-reflective surface unit is reflected to the second reflective surface of the second double-reflective surface unit. For distances d1 and d2, the following holds: d2 > 5 × d 1. In particular, d2 > 10 × d1, in particular d2 > 20 × d1, is possible.

Due to such a small distance d1, undesired shadowing in the beam path downstream of the arrangement influencing the polarization is reduced. If the polarization-influencing arrangement is removed from the beam path in order to make unpolarized operation possible, the light distribution in the optical system remains almost unchanged, since undesired shadowing due to the polarization-influencing arrangement is reduced. Furthermore, removing the polarization-affecting arrangement allows for a higher "transmission rate" for unpolarized operation, since the reflective surface of the polarization-affecting arrangement is removed from the beam path without changing the light distribution in the process. Furthermore, the producibility of the arrangement influencing the polarization is simplified, since only two reflective surfaces at a distance d1 can be applied on a single optical element, on the front side and on the rear side. Thus, manufacturing with lower costs can be achieved. Due to the fact that shadowing caused by the arrangement affecting the polarization is reduced, the "effective transmission rate" during polarization operation is increased.

According to other embodiments, the optical system is constituted by at least ten double reflecting surface units. Each double-reflecting surface unit therefore tends to become smaller for a given overall size of the optical system. Undesirable shadowing and beam deflection effects scale with the size of the individual double reflecting surface unit and can therefore be reduced by using a large number of double reflecting surface units.

According to an embodiment and/or according to an alternative definition, an optical system for a microlithographic projection exposure apparatus operating in EUV comprises at least one polarization influencing arrangement having at least two first reflective surfaces and at least two second reflective surfaces. The first and second reflecting surfaces are arranged in each case at an angle of 0 ° ± 10 ° relative to one another. During operation of the optical system, the light incident on the first reflecting surface forms an angle of 43 ° ± 10 °, in particular 43 ° ± 5 °, with said first reflecting surface in each case. The first and second reflective surfaces are arranged alternately and at alternating distances d1 and d 2. For distances d1 and d2, the following holds: d2 > 5 × d 1. In particular, it may be d2 > 10 × d1, in particular d2 > 20 × d 1.

According to an embodiment and/or according to an alternative definition, an optical system for a microlithographic projection exposure apparatus operating in EUV comprises at least one polarization influencing arrangement having at least one first reflective surface and at least two second reflective surfaces. The first reflecting surface and the two second reflecting surfaces are arranged in each case at an angle of 0 ° ± 10 ° relative to one another. During operation of the optical system, light incident on the first reflecting surface forms an angle of 43 ° ± 10 °, in particular 43 ° ± 5 °, with the first reflecting surface. The first reflective surface is disposed between the two second reflective surfaces. The first reflective surface is arranged at a distance d1 from one of the second reflective surfaces and at a distance d2 from the other second reflective surface. For distances d1 and d2, the following holds: d2 > 5 × d 1. In particular, it may be d2 > 10 × d1, in particular d2 > 20 × d 1.

According to one embodiment, the polarization-influencing arrangement is rotatable about a rotation axis which extends parallel to a light propagation direction of light incident on the first reflection surface during operation of the optical system and/or the polarization-influencing arrangement is configured such that it is removable from a beam path of light incident on the first incidence surface during operation of the optical system.

The light propagation direction is understood here to mean the direction of the principal ray.

Due to the rotatability of the arrangement influencing the polarization, the polarization direction may vary continuously depending on the rotation angle. Removing the arrangement that affects polarization makes it possible to switch between a polarizing operation (arrangement in the beam path that affects polarization) and a non-polarizing operation (arrangement in the beam path that removes the affecting polarization). Here, a "beam path" is understood to mean a region in which EUV light to be used is guided from the radiation source towards the reticle; rather than, for example, the following areas: in which for example only stray light (e.g. stray light) and/or only light having a wavelength which is not equal to the wavelength of the EUV light used can pass.

Due to the fact that only the entire arrangement influencing the polarization is rotatable and/or removable (instead of e.g. each double reflecting surface unit being inherently rotatable), the mechanical and thermal stability is improved, since only one (larger) rotation means needs to be realized and thus a more stable mechanical mounting can be used, which moreover allows a better and easier heat dissipation. In addition, larger rotary devices can be more easily and economically manufactured.

According to one embodiment, the first and second reflective surfaces in the at least one double reflective surface unit are arranged at both side surfaces of the monolithic element.

Thus, the producibility of the arrangement influencing the polarization is simplified, since instead of two separate elements, two reflective surfaces are applied on a single optical element, i.e. on the front side and the back side. Thus, a manufacturing with lower costs is achieved, since one element per double reflecting surface unit can be saved.

According to one embodiment, at least one side surface of the monolithic element is arranged parallel to a light propagation direction of light incident on the first reflective surface during operation of the optical system.

Thus, undesired shadowing may additionally be reduced. Furthermore, if arrangements influencing the polarization are removed from or introduced into the beam path, the result which can be achieved is that the light distribution in the optical system is changed as little as possible. The "effective transmission rate" during the polarizing operation is improved due to the fact that shadowing caused by the arrangement affecting the polarization is reduced.

According to one embodiment, the first and second reflective surfaces of the double reflective surface unit are arranged on different elements.

Since the distance d1 is smaller, the shadowing is also reduced in the case of the present embodiment. Furthermore, two different elements can be arranged relative to one another, so that a preferred arrangement of the first and second reflective surfaces, for example an exactly parallel arrangement, or an alternating arrangement inclined in a targeted manner relative to one another, is possible. An arrangement of the first and second reflective surfaces inclined at a correction angle with respect to each other may in particular be used for correcting beam offsets caused by the arrangement influencing the polarization. Furthermore, the arrangement of the first and second reflective surfaces being inclined with respect to each other may be configured such that the arrangement influencing the polarization is designed or optimized in a targeted manner for divergent incident light. The same effect can be achieved with a single piece embodiment having a wedge-shaped geometry.

According to one embodiment, the first and second reflective surfaces comprise:

an EUV reflective layer, and/or

A layer influencing the polarization, and/or

A molybdenum-silicon multilayer coating, and/or

A ruthenium coating, and/or

Molybdenum silicon multilayer coatings with ruthenium capping layers.

Thus, the "effective transmission rate" may be increased and/or the effect of polarization separation of the reflective surface may be improved.

According to one embodiment, the second reflecting surface is arranged in the following way: in the light propagation direction (z) of light incident on the first reflective surface during operation of the optical system, is displaced by a height h with respect to the directly adjacent first reflective surface.

Thus, undesired shadowing may additionally be reduced. Furthermore, if the arrangement influencing the polarization is moved away from or introduced into the beam path, it is possible to achieve the result that the light distribution in the optical system changes as little as possible. Due to the fact that shadowing is reduced, the "effective transmission rate" is increased.

According to one embodiment, h > d 1. In particular, h deviates by at most 20% from h' ═ d1 √ 2.

Thus, undesired shadowing may additionally be reduced. Furthermore, if the arrangement influencing the polarization is moved away from or introduced into the beam path, it is possible to achieve the result that the light distribution in the optical system changes as little as possible. By virtue of the fact that shadowing is reduced, the "effective transmission rate" is increased. From a geometrical point of view, h d1 √ 2 can be a preferred embodiment, where the shadowing completely disappears under theoretically ideal conditions (i.e., no tolerance, parallel incident light, etc.).

According to an embodiment, at least one of the reflective surfaces has an extent L in a first direction of extension, which first direction of extension is given by a projection of a light propagation direction of light incident on the first reflective surface into a plane in which the first reflective surface is arranged during operation of the optical system, L and L' deviate by at most 20% from 2 x d 2.

Furthermore, if the arrangement that affects the polarization is moved away from or introduced into the beam path, the result can be achieved that the light distribution in the optical system varies as little as possible, with the help of the fact that the shading is reduced, the "effective transmission rate" is increased, L-2 d2 may be a preferred embodiment from a geometrical point of view, where the shading in theoretically ideal cases (i.e. without tolerances, parallel incident light, etc.) completely disappears.

According to one embodiment, by the arrangement of influencing the polarization, unpolarized or circularly polarized light incident on the first reflective surface during operation of the optical system can be converted into linearly polarized light reflected from the second reflective surface.

According to one embodiment, an illumination system of a microlithographic projection exposure apparatus designed for operation in EUV comprises an optical system having the features disclosed above.

According to one embodiment, the illumination system has an intermediate focal plane and at least one first facet mirror having a plurality of facets. At least one polarization-affecting arrangement is arranged in the beam path between the intermediate focal plane and the first facet mirror for affecting the polarization state of the light.

From such an arrangement of the polarization influencing arrangement the following advantages result:

1.) by the arrangement that affects the polarization, more than 50% of the power of the incident light is actually removed from the beam path (i.e. approximately 50% due to filtering out the "incorrect" polarization direction and the additional reflection loss due to double reflection). If the arrangement influencing the polarization is arranged so early in the system, the radiation load of all downstream elements can be reduced to a large extent, which advantageously influences effects such as lifetime and thermal energy.

2.) possible shadowing downstream of the arrangement influencing the polarization is "washed out" due to downstream light mixing, which has a good effect on the uniformity of the field illumination of the reticle.

According to one embodiment, a microlithographic projection exposure apparatus comprises an illumination system and a projection optical unit as described above.

According to one embodiment, a method of microlithographic fabrication of microstructured components comprises the following steps:

providing a substrate to which a layer of a light-sensitive material is at least partially applied;

providing a mask comprising the structure to be imaged;

providing a microlithographic projection exposure apparatus as described above; and

projecting at least a part of the mask onto an area of the layer by means of a projection exposure apparatus.

The invention is explained in more detail below on the basis of exemplary embodiments illustrated in the drawings.

Drawings

In the drawings:

FIG. 1 shows a schematic cross-sectional view through one embodiment of an arrangement for influencing polarization; and

FIG. 2 shows a schematic diagram of a cross section through an embodiment of an arrangement for influencing polarization; and

FIG. 3 shows a schematic diagram of a cross section through an embodiment of an arrangement for influencing polarization; and

FIG. 4 shows a schematic diagram of a cross section through one embodiment of an affecting polarization arrangement; FIG. 4b illustrates geometric variables, such as range, distance and angle of placement, according to FIG. 4 a; and

FIG. 5 shows a schematic diagram of a cross section through an embodiment of an arrangement for influencing polarization; FIGS. 5a, 5b, 5c, 5d and 5e show different embodiments; and

fig. 6 shows a schematic representation of a cross section through a projection exposure apparatus; and

fig. 7 shows a schematic representation of a cross section through a projection exposure apparatus; and

FIG. 8 shows a schematic of various structures to be imaged; and

fig. 9 shows a schematic of various intensity distributions in the pupil.

Detailed Description

In conjunction with fig. 8 and 9, an explanation is given below of the following background reasons: with respect to the motivation to use polarized illumination, structures are imaged in microlithography.

Projection exposure apparatuses are intended for imaging various types of structures. Fig. 8 shows an example of such a structure to be imaged. The coordinate system (x ', y', z ') is related to the coordinates at the reticle, the direction of y' being oriented parallel to the scanning direction. The coordinate system (x ', y ', z ') corresponds to the coordinate systems shown in fig. 6 and 7. Fig. 8a shows a one-dimensional structure to be imaged, which is arranged extending along direction y 'and parallel to direction x'. The structural dimension is denoted by d. Fig. 8b shows two one-dimensional structures to be imaged, which are arranged in two directions x 'and y' extending perpendicular to each other.

The use of linear polarization for the incident illumination facilitates imaging of simple linear structures, as shown in FIG. 8 a. Here, the polarization direction of the light incident on the structure to be imaged during operation can advantageously be set parallel to the structure extending in the direction x'. The background reason for this has been known to the person skilled in the art for a long time by the keyword "vector effect".

For example, in the case of a more complex structure as illustrated in fig. 8b, downstream of the pupil of the diffractive structure, that is to say in the lens pupil, in addition to the incident illumination light, the diffraction orders relevant in each case have to be taken into account. Fig. 9a shows, as an example, the pupil or a part downstream of the pupil of the diffractive structure as shown in fig. 8b. The coordinate systems (x ", y", z ") in fig. 9 correspondingly illustrate the pupil coordinates. In fig. 9a, B denotes illumination light incident on the diffractive structure or light exiting from the structure without being diffracted. The illumination light B may be diffracted so that, for example, diffraction orders (0, 1) and (1, 0) may appear downstream (behind) the diffraction structure. The illumination light B may also be interpreted as a diffraction order (0, 0). The arrows in fig. 9a show which diffraction orders can or are intended to in each case interfere with the illumination light B in the image field in the image plane in order to image the structure onto the wafer. (0, 1) denotes the diffraction order after diffraction at the horizontal structure (e.g. in the left region of the structure illustrated in fig. 8 b). (1, 0) denotes the diffraction order after diffraction at the vertical structure (e.g. in the right region of the structure shown in fig. 8 b).

The following requirement arises if it is intended to simultaneously image lines with different orientations (e.g. as shown in fig. 8 b) using starlike illumination (as shown in fig. 9 b), and if all illumination directions are intended to contribute to the aerial image. For a vertical structure (as illustrated in the right-hand region of fig. 8 b), the illuminating radiation is intended to be vertically polarized, that is to say parallel to the direction y'. For a horizontal configuration (as illustrated in the left area of fig. 8 b), the illuminating radiation is intended to be horizontally polarized, that is to say, parallel to the direction x'. This gives rise to a requirement that conflicts with the desired polarization direction of the illumination light B in fig. 9a, so that unpolarized illumination is the most favorable polarization state.

According to the invention, it has been recognized that in EUV projection exposure apparatuses, in many applications, it is necessary to set only two polarization states:

1.) unpolarized, or

2.) linearly polarized in only one polarization direction. Alternatively, the only one polarization direction may be variable, in particular rotatable.

The arrangement according to the invention that affects the polarization provides these two polarization states.

Additionally, the arrangement according to the invention for influencing the polarization provides the further advantages listed further above.

Fig. 1 shows an embodiment of an arrangement 124 according to the invention for influencing polarization, the arrangement 124 for influencing polarization comprises a plurality of first reflection surfaces 128.1 and a plurality of second reflection surfaces 128.2. the first reflection surfaces 128.1 and the second reflection surfaces 128.2 are in each case arranged parallel to one another and alternately as shown in fig. 1, the distances d1 and d2 between the plates likewise alternate in each case, the first reflection surfaces 128.1 and the second reflection surfaces 128.2 are arranged close to one another by a distance d1 in each case, such reflection surfaces arranged close to one another are referred to as a double reflection surface unit 128. in particular, d2 > 5 x d1. because the distance d1 is very small, such that a possible shading downstream (that is to say in the positive z direction) is minimized, the surface 122 which is illustrated in a dashed manner as being orthogonal to the direction of propagation of incident light on the arrangement 124 for influencing polarization, and the arrangement 124 for reflecting incident light in the z direction, the direction of incident light can be reflected by a reflection of the incident light beam, and the reflection of the incident light, the incident light can be reflected by the reflection surface 120, the reflection surface, the reflection of the incident light, the reflection surface, the reflection of the incident light, the reflection of the incident light, the reflection of the incident light, the reflection of the light, the reflection of the light, the reflection of the light, the incident light, the reflection of the light, the reflection of the incident light, the reflection of the light, the reflection of the light, the reflection of the light, the reflection of the light, the reflection of the light, the light of the light, the.

In all embodiments shown in the present application, the extent of the reflective surface in a direction perpendicular to the plane of the drawing, that is to say in the y-direction of the depicted right-hand coordinate system, may be greater than d2, in particular at least twice the size of d2, in particular at least 10 times the size of d2, in particular at least 20 times the size of d 2.

Thus shown is an optical system for a microlithographic projection exposure apparatus operating in EUV, the optical system comprising: at least one polarization-affecting arrangement 124 having at least one first double-reflective-surface element and one second double-reflective-surface element 128; wherein at least two double reflecting surface units each have a first reflecting surface 128.1 and a second reflecting surface 128.2, wherein within the same double-reflecting surface unit, in each case the first reflecting surface and the second reflecting surface are arranged directly adjacent to one another at a distance d1 and an angle of 0 ° ± 10 °, wherein the first reflecting surface of the first double-reflecting surface unit and the second reflecting surface of the second double-reflecting surface unit are arranged directly adjacent to each other at a distance d2 and an angle of 0 ° ± 10 °, wherein light 125 incident on the first reflective surface during operation of the optical system forms an angle of 43 ° ± 10 ° with the first mirror, wherein during operation of the optical system light incident on the first reflective surface of the first double-reflective surface unit is reflected to the second reflective surface of the second double-reflective surface unit, and wherein d2 > 5 × d1 holds.

Due to this smaller distance d1, undesired shadowing in the beam path downstream of the arrangement influencing the polarization is reduced. If the polarization-influencing arrangement is removed from the beam path in order to enable unpolarized operation, the light distribution in the optical system remains substantially unchanged, since undesired shadowing due to the polarization-influencing arrangement is reduced. Furthermore, removing the arrangement that affects polarization makes possible unpolarized operation with a higher transmission rate ", since the reflective surface can be removed from the beam path without changing the downstream light distribution in the process. Furthermore, the producibility of the arrangement influencing the polarization is simplified, since two reflective surfaces at a distance of only d1 are applied on a single optical element, on the front side and on the rear side. Thus allowing for a manufacturing with a lower expenditure. By virtue of the fact that shadowing due to the arrangement affecting the polarization is reduced, the "effective transmission rate" during the polarization operation is increased.

In fig. 6 and 7, which respectively show the projection exposure apparatus, the coordinate systems shown in fig. 1, 2, 3, 4 and 5 are likewise depicted in the vicinity of the polarization-influencing arrangement, wherein x, y and z in each case form a right-hand coordinate system, wherein various embodiments of the polarization-influencing arrangement are shown, so that possible orientations of the polarization-influencing arrangement in the projection exposure apparatus are shown. The arrangement influencing the polarization can be embodied here in such a way that it can be rotated about the z-direction and/or removed from the beam path in each case.

It is noted at this juncture that the subsequent figures each have a reference numeral in which the first digit respectively denotes the figure number. Subsequent numbers represent similar or identical, respectively, parts of the components illustrated in the (other) figures. As an example, the first reflective surface 128.1 in fig. 1 is denoted 228.1, 328.1, 428.1. For this reason, these reference numerals are considered to have been introduced in the other figures, and only the differences of the different embodiments will be discussed.

The distance d1 illustrated in fig. 1 is very small. In the following text, the disadvantages that a larger distance d1 may have are described, in particular in connection with fig. 2, and further embodiments according to the invention are described with respect to how these disadvantages are reduced or avoided, in particular in connection with fig. 3, 4a and 4 b.

Fig. 2 shows an embodiment in which the distance d1 is chosen to be much larger than in the embodiment of fig. 1. The incident light 225.2 and 225.3 can only be directed to the object plane as reflected light 230.2 and 230.3 downstream of the polarization-influencing arrangement 324 in the projection exposure apparatus. Fig. 2 shows a shaded gray shaded area 227 of incident light 225.4, having a width h. This shaded area arises due to the fact that: the incident light 225.4 reflected at the first reflecting surface 228.1 impinges on an area of the adjacently arranged double reflecting surface unit 228 which does not belong to the second reflecting surface 228.2 but is a non-reflective side surface. This leads above all to a loss of light. Furthermore, therefore, a shaded region occurs downstream of the arrangement 224 that affects the polarization, so the illumination produced by the reflected light 230.2, 230.3 is not uniform. Furthermore, since the non-reflective side surfaces are located at the double-reflective surface unit 228, other shaded areas 226 appear which are illustrated in a hatched manner. The shadowing results from the incident light 225.1 and 225.5 impinging directly on the non-reflective side surfaces. Therefore, selecting a larger distance d1 results in larger shielded areas 226 and 227, resulting in a large amount of light loss and a large amount of shielding.

Fig. 3 shows another embodiment, in which adjacent double-reflecting surface units 328 are arranged with respect to each other in a shifted manner with respect to each other along the direction z of the incident light 325. Such an arrangement makes it possible to minimize the shaded area 227 in fig. 2. As shown in fig. 3, due to this displacement, the incident light 325.4 can now be reflected from the first reflecting surface 328.1 towards the second reflecting surface 238.2 and also by the latter, which light is thus provided as reflected light 330.4. In the embodiment illustrated in fig. 3, the shaded region 227 in fig. 2 is even no longer present.

The dual reflective surface units 328 may additionally or alternatively also be arranged along the orientation surface ("vertical plane") 356 such that adjacent dual reflective surface units 328 respectively abut the orientation surface ("vertical plane") 356. This has the effect of neither causing light loss due to shadowing nor creating "gaps" between adjacent double reflecting surface elements 328.

An optical system is thus shown in which the second reflecting surface 328.2 is arranged displaced by a height h with respect to the directly adjacent first reflecting surface 328.1 in the light propagation direction z of the light 125 incident on the first reflecting surface during operation of the optical system.

According to one embodiment, h > d 1. In particular, h deviates from h' ═ d1 √ 2 by at most 20%.

h. The relationship between h and d1 will be described in more detail in connection with FIG. 4 b.

Undesired shadowing can be further reduced by these embodiments. Furthermore, it can be achieved that the light distribution in the optical system changes as little as possible if polarization-influencing arrangements are removed from or introduced into the beam path. By virtue of the fact that shadowing is reduced, the "effective transmission rate" is increased. From a geometrical point of view, h d1 √ 2 is a preferred embodiment, where the shadowing ideally in theory (i.e., without tolerance, parallel incident light, etc.) disappears completely.

Fig. 4a shows an embodiment in which, in addition to the second reflective surface 428.2 being highly displaced in the light propagation direction z by a height h relative to the directly adjacent first reflective surface 428.1, the non-reflective side surface 457a is also oriented parallel to the light propagation direction z of the light 425 incident on the first reflective surface 428.1 during operation of the optical system. This ensures that incident light 425.1 impinges on the first reflective surface 428.1 rather than the non-reflective side surfaces as shown in fig. 2. In the embodiment according to fig. 4a, there is no longer any shadowing.

Thus, the undesired shadowing 226 shown in fig. 2 may be additionally reduced. Furthermore, it can be achieved as a result that the light distribution in the optical system changes as little as possible if the arrangement influencing the polarization is removed from or introduced into the beam path. The "effective transmission rate" is increased by virtue of the fact that shadowing due to polarization-affecting arrangements is reduced.

Aspects according to the invention are:

1.) the height of the second reflective surface 428.2 in the light propagation direction z is displaced by a height h relative to the height of the directly adjacent first reflective surface 428.1, as a result of which the shadowing area 227 in fig. 2 is reduced; and

2.) the configuration of the non-reflective lateral surface 457a parallel to the light propagation direction z, as a result of which the shadowing area 226 in figure 2 is reduced,

they are structurally independent of one another and can therefore of course also be realized and used independently of one another. In one embodiment of the invention, only the non-reflective side surfaces 457a are configured parallel to the light propagation direction z, but are arranged in a manner that is highly offset by a height h with respect to one another, unlike the reflective surfaces according to the embodiment of fig. 3.

Fig. 4b shows the geometrical relationship according to the hatched triangle between the variables h and d1 and between L and d2, where L is the extent of the reflective surfaces 428.1 and 428.2 in the first direction of extension in which case for simplicity of illustration it is assumed that the angle of incidence of the light 425 on the reflective surfaces 428.1 and 428.2 is 45 deg. the first direction of extension is given by the projection of the light propagation direction z of the light 425 incident on the first reflective surface 428.1 into the plane in which the first reflective surface 428.1 is arranged during operation of the optical system.

An optical system is thus shown, which comprises at least one reflective surface 428.1 and/or 428.2 having an extent L in a first direction of extension, wherein the first direction of extension is given by a projection of a light propagation direction z of light 425 incident on the first reflective surface 428.1 into a plane in which the first reflective surface is arranged during operation of the optical system, wherein a deviation of L and L' ═ 2 × d2 is at most 20%.

Furthermore, it can be achieved that the light distribution in the optical system changes as little as possible if arrangements influencing the polarization are removed from or introduced into the beam path, the "effective transmission rate" is increased by virtue of the fact that the shading is reduced, L-2 d2 is a preferred embodiment from a geometrical point of view, wherein the shading ideally theoretically (i.e. without tolerances, parallel incident light, etc.) disappears completely.

In all embodiments shown in the present application, the extent of the reflective surface along a second direction of extension perpendicular to the plane of the drawing (that is to say along the y-direction of the depicted right-hand coordinate system) may be greater than L, in particular at least twice the size of L, in particular at least 10 times the size of L, in particular at least 20 times the size of L, in particular at least 50 times the size of L, in particular at least 100 times the size of L.

Thus, due to the arrangement influencing the polarization, the beam shift can be approximately d2 √ 2, that is to say approximately L/√ 2, which is to be kept small along the second direction of extension along y, relative to the extent of the reflecting surface.

Fig. 4b additionally shows a surface normal 454b to the first reflective surface 428.1, where surface normal 454b forms an angle β with incident light 425.2, which angle β may be 43 ° ± 10 °. the angle between surface normal 454b and the orientation surface 1 ("horizontal plane") 455 is α. the angle between incident light 425.2 and the orientation surface 1 ("horizontal plane") 455 is γ. the angle between incident light 425.2 and the first direction of extension is 47 ° ± 10 °.

The case of parallel incident light 125, 225, 325, 425 with flat surfaces 122, 222, 322, 422 is considered in fig. 1, 2, 3 and 4. In these cases only a slight beam shift d2 x v 2 parallel to the x-direction occurs due to double reflection.

In fig. 5a, 5b, 5c and 5d, the case of divergent incident light 522a, 522b, 522c, 522d having curved (in particular spherical) surfaces 522a, 522b, 522c, 522d is subsequently considered, for example for the case of an arrangement 524, 724 between an intermediate focal plane and a facet mirror that influences the polarization, as will be described in more detail below in connection with fig. 6 and 7. In this case, the light originating from the intermediate focus is divergently incident on the arrangement 524 which influences the polarization.

Fig. 5a shows one embodiment of a polarization affecting arrangement 524, which is similar in structure to the configuration in fig. 1, but with divergent incident light 525. To a first approximation, a similar beam shift occurs again. The beam deflection due to double reflection is likewise 0 °, i.e. the radiation direction is not altered.

Fig. 5b shows an embodiment of an arrangement 524 of influencing the polarization, wherein the double reflecting surface units 528b are arranged in a highly offset manner with respect to each other.

Double reflecting surface unit 528b is disposed along orientation surface ("horizontal plane") 555 b.

The double reflecting surface unit 528b may additionally or alternatively also be arranged along the orientation surface ("vertical plane") 556b such that adjacent double reflecting surface units 528b abut the orientation surface ("vertical plane") 556b, respectively. This has the effect that neither optical losses due to shadowing occur nor "gaps" between adjacent double reflecting surface elements 528b occur.

FIG. 5e shows an embodiment where double reflecting surface units 528e are at a smaller correction angle with respect to each otherAre arranged in an inclined manner. Selecting a correction angleSuch that in plane 558e downstream of the polarization-affecting arrangement 524 no beam shift occurs due to the introduction of the polarization-affecting arrangement 524 into the beam path. If the arrangement 524 that affects polarization is not in the beam path, then incident light 525e.3 is incident on plane 558e and is not reflected as light 525 e.3w. If the arrangement 524 that affects polarization is located in the beam path, then incident light 525e.3 is incident on plane 558e as reflected light 530e.3 after two reflections. In plane 558e, there is no beam offset for the two beams 525e.3w and 530e.3 with respect to each other. By way of example, facet mirror 613 or 763 may be arranged in plane 558e without beam deviation.

In all of the embodiments described herein, the incident light 125, 225, 325, 425, 525 is either parallel or divergentCorrection angles of the reflective surfaces 128.1, 228.1, 328.1, 428.1, 528.1, 128.2, 228.2, 328.2, 428.2, 528.2 with respect to each otherMay be smaller and thus result in compensating for beam offset due to two reflections. In this case, the correction angle is selected if the polarization-influencing arrangement 124, 224, 324, 424, 524, 624, 724 is removed from or introduced into the beam pathSuch that the illuminated surface of the predefined surface downstream of the arrangement for influencing the polarization 124, 224, 324, 424, 524, 624, 724, in particular on the facet mirror arranged downstream of the beam path, is not altered. Correcting angleIt may be greater than 10 °, in particular greater than 5 °, in particular greater than 2 °, in particular greater than 1 °, in particular greater than 0.5 °, in particular greater than 0.1 °.

Beam offset and/or beam tilt (in the case of divergent light) can be corrected by correcting the angleCompensation is performed. Required correction angleToo small so that the polarization properties of the reflection remain unchanged.

Fig. 5c shows an embodiment wherein the double reflecting surface unit 528c is implemented in a wedge-shaped manner. In this case, the first and second reflective surfaces 528c.1 and 528c.2 in the same double-reflective-surface unit 528c are at a smaller correction angle with respect to each otherAnd (4) arranging. The correction angleLess than 10 °, in particular less than 5 °, in particular less than 2 °, in particular less than 1 °, in particular less than 0.5 °, can be provided.

In one embodiment, which can be implemented in all embodiments of the polarization influencing arrangements 124, 224, 324, 424, 524, 624, 724 described in this application, the double reflecting surface unit 128, 228, 328, 428, 528a, 528b, 528c, 728 is integrally, that is to say monolithically, implemented.

Thus, the producibility of the arrangement influencing the polarization is simplified, since two reflective surfaces are applied on a single optical element (on the front side and the back side) instead of two separate elements. Thus, a manufacturing with a lower expenditure of costs is achieved, since one component per double reflecting surface unit can be saved.

As an alternative to the monolithic embodiment, in all embodiments described herein, the double reflective surface unit 128, 228, 328, 428, 528a, 528b, 528c, 528d, 728 may also be implemented such that the first reflective surface (128.1, 228.1, 328.1, 428.1, 528.1) and the second reflective surface (128.2, 228.2, 328.2, 428.2, 528.2) in the double reflective surface unit (128, 228, 328, 428, 528, 728) are arranged at different elements (528 d). One embodiment of this type is shown as an example in fig. 5 d. In this embodiment, d1 represents the minimum distance between two reflective surfaces. In fig. 5d, d1 is depicted as being located at a corresponding position of minimum distance between the reflective surfaces.

Since the distance d1 is smaller, the shadowing is likewise reduced in this embodiment. Furthermore, two different elements may be arranged relative to each other such that a preferred arrangement of the first and second reflective surfaces, for example an exactly parallel arrangement or alternatively at a correction angle relative to each otherAn arrangement inclined in a targeted manner is possible. In particular, a first reflective surface and a second reflective surface may be used to correct the angleThe arrangement being tilted with respect to each other to correct for beam offsets caused by the arrangement affecting polarization. Furthermore, the arrangement of the first and second reflective surfaces inclined with respect to each other may be configured such that the arrangement influencing the polarization is targeted designed or optimized for divergent incident light.

The structural components in all embodiments where the first and second reflective surfaces are arranged, and thus the wedge 528c, described above, by way of example only, may be mounted or held by a device that may be arranged behind and/or in front of the plane of the drawing. Such mounting may be achieved in a similar manner to the case of a window blind in front of a window. As shown in fig. 4a, 4b or 5c, and therefore does not reduce mechanical stability nor the possibility of heat dissipation.

The polarization influencing arrangement 124, 224, 324, 424, 524, 624, 724 of the invention can be introduced into the beam path only when linear polarization is required. The polarization direction can be set by rotation about the optical axis z.

The polarization influencing arrangement 124, 224, 324, 424, 524 may be configured such that it is rotatable about an axis of rotation extending parallel to the light propagation direction z of the light 125, 225, 325, 425, 525 incident on the first reflective surface 128.1, 228.1, 328.1, 428.1, 528.1 during operation of the optical system; and/or may be configured such that the polarization-affecting arrangement can be removed from the beam path of light incident on the first reflective surface during operation of the optical system.

In all embodiments, the distance d2 between the individual double reflecting surface elements 128, 228, 328, 428, 528, 728 may in particular be smaller than 30mm, in particular smaller than 20mm, in particular approximately 10mm, in particular smaller than 5 mm. If d2 is approximately 10mm, this means that an arrangement is introduced which influences the polarization, that is to say the switching on of the "polarization", and if the reflecting surfaces are arranged exactly parallel, the illumination on the downstream facet mirror is shifted by approximately 10 mm. If the diameter of the downstream facet mirror is approximately 400mm, the beam deflection is very small compared to the extent of the downstream facet mirror, and in this example in particular only amounts to 2.5% of the facet mirror diameter.

In all exemplary embodiments, the first reflective surface 128.1, 228.1, 328.1, 428.1, 528.1 and the second reflective surface 128.2, 228.2, 328.2, 428.2, 528.2 may include

An EUV reflective layer, and/or

A layer influencing the polarization, and/or

A molybdenum-silicon multilayer coating, and/or

A ruthenium coating, and/or

Molybdenum silicon multilayer coatings with ruthenium capping layers.

The above-described embodiments of the arrangement influencing the polarization can preferably be used in the projection exposure apparatus described below.

The projection exposure apparatus 601, which is known from WO 2012/130768 a2, comprises a radiation source 603 and an illumination system 602 for exposing an object field 690, the illumination system 602 comprises a so-called fly-eye condenser composed of a field facet 613a and a pupil facet 614a, in which case the exposure is to a reflective reticle (not shown in fig. 6) arranged in the object plane 606, the reticle carries the structures to be projected by the projection exposure apparatus 601, for producing micro-or nanostructures, for example as shown in fig. 8, the projection optical unit 607 is used for imaging the object field 690 in the image plane 609, the structures on the reticle are imaged to light-sensitive layers of the wafer, so-called photo-resist, which are not shown in the drawing and are arranged in the region of the image field 608 in the image plane 609, the field of the wafer 609, during operation of the projection apparatus 601, the mask and wafer in the y' direction, the field of the field.

This results in different settable illumination settings, such as described in connection with fig. 9, which are different in the distribution of the illumination angle of the illumination light 670 over the object field 690.

Preferably, the polarization influencing arrangement 124, 224, 324, 424, 524, 624 according to the invention may be arranged between the intermediate focal plane 612 and the field facet mirror 613.

From such an arrangement of the polarization influencing arrangement the following advantages result:

1.) by the arrangement that affects the polarization, more than 50% of the power of the incident light is actually removed from the beam path (i.e. approximately 50% due to the "incorrect" polarization direction of the filtering and the additional reflection loss due to double reflection). If the arrangement affecting the polarization is arranged so early in the system, the radiation load on all downstream elements is greatly reduced, which advantageously affects effects such as lifetime and thermal energy.

2.) possible shadowing downstream of the arrangement affecting the polarization is "washed out" due to downstream light mixing, which has a favorable effect on the uniformity of the field illumination of the photomask.

However, other placement areas are also possible. The arrangement 124, 224, 324, 424, 524, 624 influencing the polarization should ideally be arranged in a region which is not too close to the object plane 606, since otherwise the remaining shading may adversely influence the uniformity of the field illumination. Furthermore, an arrangement in areas where the divergence is not very high is preferred, but not mandatory. In particular, the arrangement 124, 224, 324, 424, 524, 624 influencing the polarization can also be arranged between the radiation source 603 and the intermediate focal plane 612, which makes possible the same advantages as discussed above for the arrangement between the intermediate focal plane 612 and the field facet mirror 613. In particular, the polarization-influencing arrangements 124, 224, 324, 424, 524, 624 may also be arranged between the field facet mirror 613 and the pupil facet mirror 614. In particular, the polarization-influencing arrangements 124, 224, 324, 424, 524, 624 may also be arranged downstream of the pupil facet mirror 614.

According to one embodiment, the projection exposure apparatus 601 comprises an illumination system 602, which illumination system 602 comprises: an optical system comprising at least one polarization affecting arrangement 124, 224, 324, 424, 524, 624 having at least one first and one second double reflecting surface element 128, 228, 328, 428, 528, 728. Each of the at least two double reflecting surface units has a first reflecting surface 128.1, 228.1, 328.1, 428.1, 528.1 and a second reflecting surface 128.2, 228.2, 328.2, 428.2, 528.2. Within the same double-reflecting surface unit, the first reflecting surface and the second reflecting surface are arranged in each case directly adjacent to one another at a distance d1 and at an angle of 0 ° ± 10 °. The first reflective surface of the first double-reflective-surface unit and the second reflective surface of the second double-reflective-surface unit are arranged directly adjacent to each other at a distance d2 and at an angle of 0 ° ± 10 °. During operation of the optical system, light 125, 225, 325, 425, 525 incident on the first reflective surface forms an angle of 43 ° ± 10 ° with the first reflective surface. During operation of the optical system, light incident on the first reflective surface of the first double-reflective surface unit is reflected towards the second reflective surface of the second double-reflective surface unit. For distances d1 and d2, d2 > 5 × d1 is true.

Due to this small distance d1, undesired shadowing in the beam path downstream of the polarization-influencing arrangement is reduced. If the polarization-influencing arrangement is removed from the beam path to enable unpolarized operation, the light distribution in the optical system remains substantially unchanged, since undesired shadowing caused by the polarization-influencing arrangement is reduced. Furthermore, removing the arrangement that affects the polarization makes possible unpolarized operation with a higher "transmission rate" because the reflecting surface is removed from the beam path without changing the light distribution in the process. Furthermore, the producibility of the arrangement influencing the polarization is simplified, since two reflective surfaces at a distance of only d1 are applied on a single optical element, on the front side and on the rear side. Thus achieving a production with a lower outlay. By virtue of the fact that shadowing due to the arrangement affecting the polarization is reduced, the "effective transmission rate" during the polarization operation is increased.

Fig. 7 shows a projection exposure apparatus 701 known from US 2011/0001947 a1, which comprises an alternative illumination optical unit of an illumination system 702. EUV radiation 770 emitted from radiation source 703 is focused by collector 711. Downstream of the collector 711, the EUV radiation 770 propagates through the intermediate focal plane 712 before being incident on a beam shaping facet mirror 763, which is used for targeted illumination of the specular reflector 764. A polarization affecting arrangement 724 comprising a double reflecting surface unit 728 according to the invention is arranged between the intermediate focal plane 712 and the facet mirror 763. EUV radiation 770 is shaped by means of a beam-shaping facet mirror 763 and a specular reflector 764 in such a way that EUV radiation 770 illuminates an object field 790 in object plane 706, wherein in a pupil plane 765 (arranged downstream of the reticle) of a projection optical unit (not shown in fig. 7) a predefined illuminated, circularly bounded pupil illumination distribution (as shown in fig. 9), that is to say a corresponding illumination setting, results. The effect of the specular reflector 764 is described in detail in US 2006/0132747 a 1. The specular reflector 764 is subdivided into individual mirrors. Depending on the illumination requirements, the individual mirrors of the specular reflector 764 are grouped to form individual mirror groups, that is to say to form facets of the specular reflector 764. Each individual mirror forms an illumination channel which in each case cannot in itself completely illuminate the reticle field. Only the sum of all illumination channels results in a complete and uniform illumination of the reticle field. The individual mirrors of the specular reflector 764 and/or the facets of the beam shaping facet mirror 763 may be tilted by an actuator system so that different field and pupil illuminations are settable.

The arrangement 124, 224, 324, 424, 524, 724 for influencing the polarization according to the invention can preferably be arranged between the intermediate focal plane 712 and the facet mirror 763.

From such an arrangement of the polarization influencing arrangement the following advantages result:

1.) by the arrangement that affects the polarization, more than 50% of the power of the incident light is actually removed from the beam path (i.e. approximately 50% due to the "incorrect" polarization direction of the filtering and the additional reflection loss due to double reflection). If the arrangement affecting the polarization is arranged so early in the system, the radiation load on all downstream elements is reduced to a large extent, which advantageously affects effects such as lifetime and thermal energy.

2.) possible shadowing downstream of the arrangement affecting the polarization is "washed out" due to downstream light mixing, which has a favorable effect on the uniformity of the field illumination of the photomask.

However, other placement areas are also possible. The polarization-influencing arrangements 124, 224, 324, 424, 524, 724 should ideally be arranged in regions which are not very close to the object plane 706, since otherwise the remaining shading may adversely affect the uniformity of the field illumination. Furthermore, an arrangement in areas where the divergence is not very high is preferred, but not mandatory. In particular, the arrangement 124, 224, 324, 424, 524, 724 influencing the polarization may also be arranged between the radiation source 703 and the intermediate focal plane 712, which makes possible the same advantages as discussed above for the arrangement between the intermediate focal plane 712 and the facet mirror 763. In particular, the polarization influencing arrangements 124, 224, 324, 424, 524, 724 may also be arranged between the facet mirror 763 and the specular reflector 764. In particular, the polarization influencing arrangements 124, 224, 324, 424, 524, 724 may also be arranged downstream of the specular reflector 764. In particular, the polarization-influencing arrangements 124, 224, 324, 424, 524, 724 may also be arranged between the specular reflector 764 and the object field 790.

According to one embodiment, the projection exposure apparatus 701 comprises an illumination system 702 comprising an optical system with at least one polarization-influencing arrangement 124, 224, 324, 424, 524, 624 having at least one first and one second double-reflective surface unit 128, 228, 328, 428, 528, 728. Each of the at least two double reflecting surface units has a first reflecting surface 128.1, 228.1, 328.1, 428.1, 528.1 and a second reflecting surface 128.2, 228.2, 328.2, 428.2, 528.2. Within the same double-reflecting surface unit, the first reflecting surface and the second reflecting surface are arranged in each case directly adjacent to one another at a distance d1 and at an angle of 0 ° ± 10 °. The first reflective surface of the first double-reflective-surface unit and the second reflective surface of the second double-reflective-surface unit are arranged directly adjacent to each other at a distance d2 and at an angle of 0 ° ± 10 °. During operation of the optical system, light 125, 225, 325, 425, 525 incident on the first reflective surface forms an angle of 43 ° ± 10 ° with the first reflective surface. During operation of the optical system, light incident on the first reflective surface of the first double-reflective surface unit is reflected towards the second reflective surface of the second double-reflective surface unit. For distances d1 and d2, d2 > 5 × d1 is true.

Due to this small distance d1, undesired shadowing in the beam path downstream of the polarization-influencing arrangement is reduced. If the polarization-influencing arrangement is removed from the beam path in order to enable unpolarized operation, the light distribution in the optical system remains substantially unchanged, since undesired shadowing caused by the polarization-influencing arrangement is reduced. Furthermore, removing the arrangement that affects the polarization makes possible unpolarized operation with a higher "transmission rate" because the reflecting surface is removed from the beam path without changing the light distribution in the process. Furthermore, the producibility of the arrangement influencing the polarization is simplified, since two reflective surfaces at a distance of only d1 are applied on a single optical element, on the front side and on the rear side. Thus achieving a production with a lower outlay. By virtue of the fact that shadowing due to the arrangement affecting the polarization is reduced, the "effective transmission rate" during the polarization operation is increased.

In all the embodiments described above, the polarization-influencing arrangement is configured such that it can be retrofitted in existing projection exposure apparatuses without requiring fundamental changes to the existing projection exposure apparatuses.

List of reference numerals

122. 222, 322, 422, 522 are orthogonal to the direction of light propagation

124、224、324、424、524、

624. 724 arrangement for influencing polarization

125. 225, 325, 425, 525 incident light

128、228、328、428、528、

728 double reflecting surface unit

128.1、228.1、328.1、428.1、

528.1 first reflecting surface

128.2、228.2、328.2、428.2、

528.2 second reflecting surface

130. 230, 330, 430, 530 reflected light

531c.3w, 531e.3w have no beam paths with an arrangement which influences the polarization

155. 355, 455, 555 orientation surface 1 ("horizontal plane")

156. 356, 456, 556 oriented surface 2 ("vertical plane")

558c, 558e plane without beam offset

226. 227 shaded region

454b surface Normal

457a, 457b, 557c side surfaces parallel to the light propagation direction

601. 701 projection exposure apparatus

602. 702 illumination system

603. 703 radiation source

604 illumination optical unit

606. 706 object plane

607 projection optical unit

608 image field

609. 709 image plane

611. 711 light collector

612. 712 intermediate focal plane

613 field facet mirror

613a field facet

614 pupil facet mirror

614a pupil facets

616. 617, 618 mirror of a transfer optical unit

670. 770EUV radiation

680 transfer optical unit

690. 790 field of objects

763 Beam shaping facet mirror

764 mirror reflector

765 pupil plane

α angle between surface normal and orientation surface 1

β angle between surface normal and incident light

Angle between gamma incident light and alignment surface 1

Angle between No. 1 extending direction and incident light

Correcting angle

distance between d1 reflective surfaces

distance between d2 reflective surfaces

L extension of the reflective surface