阅读说明：本技术 挠性机构 (Flexible mechanism ) 是由 李钧翔 范智凯 张宇荣 于 2019-01-15 设计创作，主要内容包括：本发明公开了一种挠性机构,包含有：一基座；一第一座体,与该基座相隔开来,并于一第一轴向上相对该基座位移；多数第一挠性单元,桥设于该基座与该第一座体之间,各该第一挠性单元系具有该第一轴向上的弹性；一横梁,设置该基座上,并与该第一座体相隔开来；一第二座体,滑设于该横梁上,并于一第二轴向上相对该横梁位移；以及多数第二挠性单元,桥设于该第一座体与该第二座体之间,各该第二挠性单元具有该第二轴向上的弹性。(The invention discloses a flexible mechanism, comprising: a base; a first seat body which is separated from the base and moves relative to the base in a first axial direction; a plurality of first flexible units, which are bridged between the base and the first seat body, and each first flexible unit has elasticity in the first axial direction; a beam, which is arranged on the base and is separated from the first seat body; the second seat body is arranged on the cross beam in a sliding manner and moves relative to the cross beam in a second axial direction; and a plurality of second flexible units which are bridged between the first seat body and the second seat body, and each second flexible unit has elasticity in the second axial direction.)

1. A flexure mechanism, comprising: comprises the following steps:

a base;

a first seat body which is separated from the base and moves relative to the base in a first axial direction;

a plurality of first flexible units, which are bridged between the base and the first seat body, and each first flexible unit has elasticity in the first axial direction;

a beam, which is arranged on the base and is separated from the first seat body;

the second seat body is arranged on the cross beam in a sliding manner and moves relative to the cross beam in a second axial direction; and

and the plurality of second flexible units are bridged between the first seat body and the second seat body, and each second flexible unit has elasticity in the second axial direction.

2. The flexure mechanism of claim 1 wherein: the beam is provided with a beam body positioned above the base and two connecting parts which extend from two ends of the beam body and are connected to the base respectively, so that the first base body is arranged between the beam body and the base.

3. The flexure mechanism of claim 2 wherein: each first flexible unit is provided with a first body part fixed on the base, a second body part connected with the first base body is separated from the first body part, and a first flexible part is connected with the first body part and the second body part.

4. The flexure mechanism of claim 3 wherein: each second flexible unit is provided with a third body part fixed on the first seat body, a fourth body part connected with the second seat body is separated from the third body part, and a second flexible part is connected with the third body part and the fourth body part.

5. The flexure mechanism of claim 4 wherein: the first body part is provided with an opening end, the first flexible part and the second body part are positioned in the opening end of the first body part, the first flexible part is provided with a first combining part, a first flexible part and two second flexible parts, the first flexible part is bridged between the first combining part and the outer side wall surface of the second body part, and the second flexible parts are respectively bridged between the inner side wall surface of the opening end of the first body part and the first combining part.

6. The flexure mechanism of claim 5 wherein: the third body portion has an open end, the second flexible portion and the fourth body portion are located in the open end of the third body portion, the second flexible portion has a third connector, a third flexible member and two fourth flexible members, the third flexible member is bridged between the third connector and the outer side wall surface of the fourth body portion, and each fourth flexible member is bridged between the inner side wall surface of the open end of the third body portion and the third connector.

7. The flexure mechanism of claim 6 wherein: the bottom surface of the second seat body is provided with a plurality of fixing parts which are respectively connected with the fourth body part of each second flexible unit.

8. The flexure mechanism of claim 7 wherein: the first driving unit is arranged between the base and the first seat body and used for driving the first seat body.

9. The flexure mechanism of any one of claims 1-8, wherein: the second driving unit is arranged between the beam and the second seat body and used for driving the second seat body.

10. The flexure mechanism of claim 9 wherein: a clearance is reserved between each fixing part and the second driving unit.

Technical Field

The present invention relates to motion platforms, and more particularly to a flexible mechanism that can be used in short stroke precision positioning platforms to improve the precision of motion and speed of response.

Background

With the development of semiconductor nano-scale technology, devices with high precision and high response speed have become targets of continuous technical development of semiconductor device manufacturers, and among them, the motion platform widely used as a component unit of a detection device can provide high motion speed, but due to inertia, a moving object is difficult to stop at a precise position in a very short time, and generally, the higher the motion speed of the object is, the greater the degree of shaking before complete stop is, the longer the setting time is relatively required, and the more rapid positioning at a precise position is difficult.

Disclosure of Invention

Therefore, the primary objective of the present invention is to provide a flexible mechanism, which is composed of several independent flexible units that can be separated, and which is easy to manufacture, assemble, process and maintain.

Another object of the present invention is to provide a flexible mechanism, which is formed by a beam for bearing the weight of a driving unit, thereby preventing the other driving unit from being damaged due to an excessive load.

Accordingly, to achieve the above objects, the present invention provides a flexible mechanism,

comprises the following steps: a base; a first seat body which is separated from the base and moves relative to the base in a first axial direction; a plurality of first flexible units, which are bridged between the base and the first seat body, and each first flexible unit has elasticity in the first axial direction; a beam, which is arranged on the base and is separated from the first seat body; the second seat body is arranged on the cross beam in a sliding manner and moves relative to the cross beam in a second axial direction; and a plurality of second flexible units which are bridged between the first seat body and the second seat body, and each second flexible unit has elasticity in the second axial direction.

The first and second flexible units are respectively elastic in the first and second axial directions, which means that the first and second flexible units are respectively flexible due to their structural design and are made to be elastic in different directions by changing the installation orientation or angle.

In a specific technical content, each first flexible unit is respectively provided with a first body part fixed on the base, a second body part connected with the first base body is separated from the first body part, and a first flexible part is connected with the first body part and the second body part. The first body part is provided with an opening end, the first flexible part and the second body part are positioned in the opening end of the first body part, the first flexible part is provided with a first combining part, a first flexible part and two second flexible parts, the first flexible part is bridged between the first combining part and the outer side wall surface of the second body part, and each second flexible part is bridged between the inner side wall surface of the opening end of the first body part and the first combining part. Therefore, each first flexible unit has elastic force in the first axial direction.

Furthermore, each second flexible unit has a third body portion fixed on the first seat body, a fourth body portion connected with the second seat body is separated from the third body portion, and a second flexible portion is connected with the third body portion and the fourth body portion. The third body portion has an open end, the second flexible portion and the fourth body portion are located in the open end of the third body portion, the second flexible portion has a third connector, a third flexible member and two fourth flexible members, the third flexible member is bridged between the third connector and the outer sidewall of the fourth body portion, and each of the fourth flexible members is bridged between the inner sidewall of the open end of the third body portion and the third connector. Therefore, each second flexible unit has elasticity in the second axial direction.

In order to enable the flexible mechanism to be quickly positioned at an accurate position after the flexible mechanism moves at a long stroke and a high speed, the flexible mechanism further comprises a first driving unit arranged between the base and the first seat body and used for driving the first seat body; and the second driving unit is arranged between the cross beam and the second seat body and is used for driving the second seat body. By means of the combination of the components, the first flexible unit and the second flexible unit are respectively matched with the first driving unit and the second driving unit, and motion error compensation is carried out on the flexible mechanism after displacement, so that the purposes of reducing setting time and improving production efficiency are achieved.

In addition, the second driving unit is arranged on the beam, namely the beam bears the weight of the second driving unit, so that the first driving unit does not need to bear the weight of the second driving unit, and the first driving unit is prevented from being damaged due to overlarge load. The beam and the base are connected, so that the second driving unit is not shielded by other components, heat energy generated during operation can be quickly carried away, a more effective heat dissipation path is provided for the second driving unit, and the influence of the heat energy on the operation efficiency of the second driving unit is reduced. Specifically, the beam has a beam body located above the base, and two connecting portions respectively extending from two ends of the beam body and connected to the base, so that the first base is located between the beam body and the base.

Wherein, avoid the flexible mechanism to produce the interference among each component when moving, have the clearance between every fixed part and the second drive unit, in order to guarantee the first drive unit drives the first pedestal and the surplus degree when component that links with it moves, mean that it can move smoothly, will not interfere each other.

The invention has the beneficial effects that: the invention relates to a flexible mechanism which is composed of a plurality of independent flexible units which can be separated, and is convenient to manufacture, assemble, process and maintain. The cross beam bears the weight of the driving unit to avoid damage of the other driving unit caused by over heavy load.

Drawings

Fig. 1 is a perspective combination view of a first embodiment of the present invention.

Fig. 2 is a schematic perspective view of the first embodiment of the present invention hiding the second seat from fig. 1.

Fig. 3 is a perspective view of the first embodiment of the present invention hiding the cross beam and the second flexible unit from fig. 2.

Fig. 4 is an exploded perspective view of the first embodiment of the present invention.

Fig. 5 is a top view of the first embodiment of the present invention in terms of a first flexible unit.

Fig. 6 is a top view of the first embodiment of the present invention in relation to a second flexible unit.

Fig. 7 is a schematic cross-sectional view of fig. 1 showing the first driving unit driving the first base and driving the components connected to the first base to reciprocate in the first axial direction according to the first embodiment of the present invention.

Fig. 8 is a cross-sectional view of another view of fig. 1 showing a sectional view of the second base driven by the second driving unit and reciprocating along the second axis in cooperation with the second flexible unit according to the first embodiment of the present invention.

The base 10, the first seat 20, the first groove 21, the first flexible unit 30, the first body 31, the open end 311, the second body 32, the first flexible portion 33, the first coupling member 331, the first flexible member 332, the second flexible member 333, the cross beam 40, the beam body 41, the connecting portion 42, the second seat 50, the fixing portion 51, the second groove 52, the second flexible unit 60, the third body 61, the open end 611, the fourth body 62, the second flexible portion 63, the third coupling member 631, the third flexible member 632, the fourth flexible member 633, the first driving unit 70, the first stator 71, the first rotor 72, the second driving unit 80, the second stator 81, the second rotor 82, the first axial direction X, the second axial direction Y, and the clearance W.

Detailed Description

Referring to fig. 1 to 8, a flexible mechanism according to a first embodiment of the present invention includes: a base 10; a first seat 20 spaced apart from the base 10 and movable in a first axial direction X relative to the base 10; a plurality of first flexible units 30 bridged between the base 10 and the first base 20, each first flexible unit 30 having elasticity in the first axial direction X for restricting the moving direction of the first base 20; a cross beam 40 disposed on the base 10 and spaced apart from the first base 20; a second seat 50 slidably disposed on the cross beam 40 and displaced relative to the cross beam 40 in a second axial direction Y; and a plurality of second flexible units 60 bridged between the first base 20 and the second base 50, each second flexible unit 60 having elasticity in the second axial direction Y for restricting the moving direction of the second base 50. In this embodiment, the first base 20 and the second base 50 are rectangular platform structures, and the number of the first flexible units 30 and the number of the second flexible units 60 are 4 respectively, and the first flexible units 30 and the second flexible units 60 are designed in a modular manner and are correspondingly disposed at the corner positions of the first base 20 and the second base 50, and each of the first flexible units 30 and the second flexible units 60 can be independently replaced. When one of the first flexible unit 30 or the second flexible unit 60 is damaged due to fatigue, a maintenance worker only needs to replace the first flexible unit or the second flexible unit without replacing the whole flexible mechanism, so that the maintenance cost of the flexible mechanism is greatly reduced, and the convenience of maintenance and adjustment is improved.

Each of the first flexible units 30 has a first body portion 31 fixed on the base 10, a second body portion 32 connected to the first seat 20 and spaced apart from the first body portion 31, and a first flexible portion 33 connected to the first body portion 31 and the second body portion 32. Referring to fig. 5, in this embodiment, the first body 31 has an open end 311, the first flexible portion 33 and the second body 32 are located in the open end 311 of the first body 31, the first flexible portion 33 has a first coupling member 331, two first flexible members 332 and two second flexible members 333, the first flexible members 332 are bridged between the first coupling member 331 and the outer side wall of the second body 32 at intervals, and the second flexible members 333 are bridged between the inner side wall of the open end 311 of the first body 31 and the first coupling member 331 respectively. In addition, the relative position, number, shape or configuration of the first flexible element 332 and the second flexible element 333 may be varied according to the actual situation.

Moreover, the third body portion 61, the fourth body portion 62 and the second flexible portion 63 of each second flexible unit 60 are the same as those of the first flexible unit 30, and the third combining member 631, the third flexible member 632 and the fourth flexible member 633 of the second flexible portion 63 are the same as those of the first flexible portion 33 (as shown in fig. 6), which only differs in that the third body portion 61 is connected to the first seat 20, and the fourth body portion 62 is connected to the second seat 50.

In order to enable the flexible mechanism to be quickly positioned at a precise position after a long-stroke high-speed movement, the flexible mechanism further includes a first driving unit 70 disposed between the base 10 and the first base 20 for driving the first base 20; and a second driving unit 80 disposed between the cross beam 40 and the second base 50 for driving the second base 50. By means of the combination of the above components, the first flexible unit 30 and the second flexible unit 60 are respectively and correspondingly matched with the first driving unit 70 and the second driving unit 80, so as to compensate the motion error of the flexible mechanism after displacement, thereby achieving the purposes of reducing the setting time and improving the production efficiency.

The first driving unit 70 has a first stator 71 disposed on the base 10 and a first rotor 72 disposed on the first base 20 and adjacent to an end surface of the base 10, and the first rotor 72 can be driven by a magnetic field generated between the adjacent first stator 71 to reciprocate the first base 20 along the first axis X. Moreover, the second driving unit 80 has a second stator 81 and a second rotor 82, which are equivalent to the components of the first driving unit 70, for driving the second base 50 to reciprocate along the second axial direction Y. In this embodiment, the first seat 20 has a first recess 21 for receiving the first moving element 72, and the second seat 50 has a second recess 52 for receiving the second moving element 82. The number of the first grooves 21 and the second grooves 52 is configured corresponding to the first moving element 72 and the second moving element 82, respectively.

In addition, since the second driving unit 80 is assembled on the beam 40, thereby bearing the weight of the second stator 81, the first driving unit 70 does not need to bear the weight of the second stator 82, and the first driving unit 70 is prevented from being damaged due to the overlarge load. Because the beam 40 is connected to the base 10, the second driving unit 80 is not shielded by other components, and the heat generated during the operation can be quickly carried away, so that a more effective heat dissipation path is provided for the second driving unit 80, and the influence of the heat on the operation performance of the second driving unit 80 is reduced. Specifically, the cross beam 40 has a beam 41 located above the base 10, and two connecting portions 42 extending from two ends of the beam 41 and connected to the base 10, respectively, so that the first base 20 is located between the beam 41 and the base 10. Wherein, the second stator 81 of the second driving unit 80 is disposed on the beam body 41.

In this embodiment, the first base 20 or the second base 50 can be hollow, so as to greatly reduce the weight, save the cost and meet the requirement of strength. Therefore, the load of the first driving unit 70 can be further reduced, and the heat energy generated by the operation of the first driving unit 70 can be further reduced.

In addition, the bottom surface of the second base 50 has a plurality of fixing portions 51, which are respectively connected to the fourth body portion 62 of each second flexible unit 60. In this embodiment, fixing portions 51 are disposed at each corner of the second base 50, such that a space for accommodating the second driving unit 80 is formed between the bottom surface of the second base 50 and the fixing portions 51.

In order to avoid interference between the components of the flexible mechanism during operation, a clearance W is provided between each fixing portion 51 and the second driving unit 80, so as to ensure the redundancy of the first driving unit 70 driving the first seat 20 and the components connected thereto during operation, i.e. smooth operation without being hindered.