阅读说明：本技术 基于仿生谐振毛发传感器的管道侧线阵列装置 (Pipeline side line array device based on bionic resonance hair sensor ) 是由 杨波 梁卓玥 张婷 于 2019-10-09 设计创作，主要内容包括：本发明公开了一种基于仿生谐振毛发传感器的管道侧线阵列装置,该装置由四传感器平行阵列装置和外围管道罩两部分组成,四传感器平行阵列装置由四个仿生谐振毛发传感器平行相邻排布组成,外围管道罩为顶部有五个连通孔的矩形管道罩,管道侧线阵列装置可以将谐振器微弱的频率变化提取出来,实现对简谐气流的敏感。管道侧线阵列装置具有强抗干扰能力,高灵敏度和高信噪比等优点。(The invention discloses a pipeline side line array device based on a bionic resonance hair sensor, which consists of two parts, namely a four-sensor parallel array device and a peripheral pipeline cover, wherein the four-sensor parallel array device consists of four bionic resonance hair sensors which are arranged adjacently in parallel, the peripheral pipeline cover is a rectangular pipeline cover with five communicating holes at the top, and the pipeline side line array device can extract weak frequency changes of a resonator to realize sensitivity to simple harmonic gas flow. The pipeline side line array device has the advantages of strong anti-interference capability, high sensitivity, high signal-to-noise ratio and the like.)

1. A pipeline side line array device based on a bionic resonance hair sensor is characterized by comprising a four-sensor parallel array device (18) and a peripheral pipeline cover (17); the four-sensor parallel array device (18) is formed by sequentially, parallelly and adjacently arranging fifth, sixth, seventh and eighth bionic resonant hair sensors (1-5, 1-6, 1-7 and 1-8);

the fifth bionic resonance hair sensor (1-5) consists of an upper fifth hair structure (2-5) and a lower fifth silicon microsensor structure (3-5), the sixth bionic resonance hair sensor (1-6) consists of an upper sixth hair structure (2-6) and a lower sixth silicon microsensor structure (3-6), the seventh bionic resonance hair sensor (1-7) consists of an upper seventh hair structure (2-7) and a lower seventh silicon microsensor structure (3-7), and the eighth bionic resonance hair sensor (1-8) consists of an upper eighth hair structure (2-8) and a lower eighth silicon microsensor structure (3-8); wherein the fifth biomimetic resonant hair sensor (1-5) is located at the leftmost side of the parallel array means (18) and the eighth biomimetic resonant hair sensor 1-8 is located at the rightmost side of the parallel array means (18); the fifth, sixth, seventh and eighth hair structures (2-5, 2-6, 2-7 and 2-8) on the upper layer are all positioned at the edge of the upper end of the parallel array device (18), the sensitive axes of the hair structures are on the same straight line, and the sensitive direction is consistent with the arrangement direction of the sensor array.

2. The pipe side line array device based on the bionic resonance hair sensor is characterized in that the peripheral pipe cover (17) is a rectangular pipe cover with five communication holes at the top, wherein the first, second, third, fourth and fifth communication holes (16-1, 16-2, 16-3, 16-4 and 16-5) are arranged adjacently in parallel, and the central points of the first, second, third, fourth and fifth communication holes are on the same straight line; the communicating holes and the bionic resonance hair sensor are distributed at intervals, and one bionic resonance hair sensor is arranged between every two communicating holes; a fifth bionic resonance hair sensor (1-5) is positioned between the first communicating hole (16-1) and the second communicating hole (16-2), a sixth bionic resonance hair sensor (1-6) is positioned between the second communicating hole (16-2) and the third communicating hole (16-3), a seventh bionic resonance hair sensor (1-7) is positioned between the third communicating hole (16-3) and the fourth communicating hole (16-4), and an eighth bionic resonance hair sensor (1-8) is positioned between the fourth communicating hole (16-4) and the fifth communicating hole (16-5); the peripheral pipeline cover (17) isolates the fifth, sixth, seventh and eighth bionic resonant hair sensors (1-5, 1-6, 1-7 and 1-8) from the outside air to form a pipeline side line system.

3. The pipeline side line array device based on the bionic resonant hair sensor as claimed in claim 1, the method is characterized in that: the rotation center (7-5) of the fifth silicon microsensor structure (3-5) is positioned at the bottom of the lower end of the fifth base mass block (8-5), a first lever mechanism and a second lever mechanism (5-5a, 5-6b) which are bilaterally symmetrical and a first double-end fixed tuning fork resonator substructure (4-5a, 4-6b) are arranged inside the fifth base mass block (8-5), and seventeenth, eighteenth, nineteen and twenty-swing suppression elastic structures (6-5a, 6-5b, 6-5c and 6-6d) are respectively arranged at four top points of the fifth base mass block (8-5), namely the lower left, the upper left and the upper right; the rotation center (7-6) of the sixth silicon microsensor structure (3-6) is positioned at the bottom of the lower end of the sixth base mass block (8-6), a third lever mechanism and a fourth lever mechanism (5-6a, 5-6b) which are bilaterally symmetrical and a third double-end fixed tuning fork resonator substructure and a fourth double-end fixed tuning fork resonator substructure (4-6a, 4-6b) are arranged inside the sixth base mass block (8-6), and twenty-first, twenty-second, twenty-third and twenty-fourth swing inhibiting elastic structures (6-6a, 6-6b, 6-6c and 6-6d) are respectively arranged at four top points of the lower right, the lower left, the upper left and the upper right of the sixth base mass block (8-6); the rotation center (7-7) of the seventh silicon microsensor structure (3-7) is positioned at the bottom of the lower end of the base mass block (8-7), a fifth and a sixth lever mechanisms (5-7a, 5-7b) and a fifth and a sixth double-end fixed tuning fork resonator substructure (4-7a, 4-7b) which are bilaterally symmetrical are arranged inside the seventh base mass block (8-7), and a twenty-fifth, a twenty-sixth, a twenty-seventh and a twenty-eight swing suppression elastic structure (6-7a, 6-7b, 6-7c, 6-7d) are respectively arranged at four top points of the lower right, the lower left, the upper left and the upper right of the seventh base mass block (8-7); the rotation center (7-8) of the eighth silicon microsensor structure (3-8) is positioned at the bottom of the lower end of the eighth base mass block (8-8), a seventh and an eighth lever mechanisms (5-8a, 5-8b) and seventh and eight double-end fixed tuning fork resonator sub-structures (4-8a, 4-8b) which are bilaterally symmetrical are arranged inside the eighth base mass block (8-8), and twenty-ninth, thirty-first and thirty-second swing inhibiting elastic structures (6-8a, 6-8b, 6-8c and 6-8d) are respectively arranged at four top points of the eighth base mass block (8-8), namely the lower right, the lower left, the upper left and the upper right.

4. The pipeline side line array device based on the bionic resonant hair sensor as claimed in claim 3, wherein the seventeenth and twenty-third swing-inhibiting elastic structures (6-5a, 6-5d) of the fifth silicon microsensor structure (3-5) are adjacent to the twenty-second and twenty-third swing-inhibiting elastic structures (6-6b, 6-6c) of the sixth silicon microsensor structure (3-6), the twenty-first and twenty-fourth swing-inhibiting elastic structures (6-6a, 6-6d) of the sixth silicon microsensor structure (3-6) are adjacent to the twenty-sixth and twenty-seventh swing-inhibiting elastic structures (6-7b, 6-7c) of the seventh silicon microsensor structure (3-7), the twenty-fifth swing-inhibiting elastic structures (6-7b, 6-7c) of the seventh silicon microsensor structure (3-7), The twenty-eight wobble-suppressing elastic structures (6-7a, 6-7d) are adjacent to the thirty-first and thirty-first wobble-suppressing elastic structures (6-8b, 6-8c) of the eighth silicon microsensor structure (3-8).

5. The pipeline side line array device based on the bionic resonance hair sensor is characterized in that the pipeline side line array device is sensitive to air simple harmonic vibration, can obtain a simple harmonic output frequency difference signal, and can extract weak resonator frequency change through demodulation of a minimum mean square error algorithm. The solving process of the minimum mean square error algorithm consists of two parts: an arithmetic process (19) and an iterative process (20); the operation process (19) is as follows: firstly, a first output signal x output by a control system_i1Multiplying by weight k₁The second output signal x output by the control system_i2Multiplying by weight k₂Third output signal x output by the control system_i3Multiplying by weight k₃Fourth output signal x output by the control system_i4Multiplying by weight k₄(ii) a Then adding the four paths of signals multiplied by the weight to obtain a total output signal x_i(ii) a Finally input signal x_iSubtracting the estimated signal y_iTo obtain an estimation error signal e_i. The iterative process (20) is: first of all an error signal e is estimated_iMultiplying the steepest descent method convergence factor mu by 2 times and the reference signal R_iObtaining an estimated gradient value; then the current prediction vector P_iAdding the estimated gradient value to obtain the next prediction vector P_i+1(ii) a Last next prediction vector P_i+1And a reference signal R_iMultiplying to obtain a new estimated signal y_iIterate through the process loop until the estimation error signal e is minimized_iObtaining an optimal prediction matrix P; according to the relation between the optimal prediction matrix P and the frequency signal amplitude A, a signal of the frequency amplitude which can reflect the flow velocity of the external simple harmonic can be obtained through calculation, and the sensitivity to the simple harmonic is realized.

Technical Field

The invention belongs to the technical field of micro-electromechanical systems and micro-inertia measurement, and particularly relates to a pipeline side line array device based on a bionic resonance hair sensor.

Background

The hair sensor is a typical multifunctional and miniaturized bionic sensor, the inspiration is researched from hair sensing systems of crickets, spiders, mantises and other insects, and the hair sensing systems of the hair sensor and the hair sensor combine a mechanical structure and a neural structure to provide high sensitivity and dynamic range for the movement of the insects. The bionic hair sensor utilizes the biological characteristics to realize the detection functions of various physical signals such as flow velocity sensitivity, inertia sensitivity, motion control, environment recognition and the like.

The fishes utilize a lateral system of the fishes to detect tiny water flow movement, the lateral system comprises superficial nerves and canal nerves, and the response characteristics of the lateral system are different. The superficial nerves mainly sense the velocity and direction of water flow. The pipeline nerve can sense the change of fluid acceleration and pressure difference, and then judge the subtle change in the flow field.

In recent years, in order to exert the characteristics of the bionic hair sensor to a greater extent, a plurality of domestic and foreign research institutions research the array arrangement of the sensor. Adrian Klein et al, Bonn university, Germany, have developed an implementation of an artificial siding system by arranging a surface sensor that senses direct current flow rate signals and an in-duct sensor that senses simple harmonic flow by using duct orifice pressure differentials. However, most research institutions focus on the application of a single hair sensor, and are difficult to measure weak simple harmonic airflow, so that the characteristics of the hair sensor are not fully utilized.

Disclosure of Invention

The purpose of the invention is as follows: in order to overcome the problems and the defects in the prior art, the invention provides a pipeline side line array device based on a bionic resonance hair sensor, which has the advantages of strong anti-interference capability, high sensitivity, high signal-to-noise ratio and the like.

The technical scheme is as follows: in order to realize the aim, the invention provides a pipeline side line array device based on a bionic resonance hair sensor, which comprises a four-sensor parallel array device and a peripheral pipeline cover; the four-sensor parallel array device is formed by sequentially and adjacently arranging fifth, sixth, seventh and eighth bionic resonant hair sensors in parallel;

the fifth bionic resonance hair sensor consists of an upper fifth hair structure and a lower fifth silicon microsensor structure, the sixth bionic resonance hair sensor consists of an upper sixth hair structure and a lower sixth silicon microsensor structure, the seventh bionic resonance hair sensor consists of an upper seventh hair structure and a lower seventh silicon microsensor structure, and the eighth bionic resonance hair sensor consists of an upper eighth hair structure and a lower eighth silicon microsensor structure; wherein the fifth biomimetic resonant hair sensor is located at the leftmost side of the parallel array apparatus and the eighth biomimetic resonant hair sensor is located at the rightmost side of the parallel array apparatus; the fifth, sixth, seventh and eighth hair structures of the upper layer are all positioned at the edge of the upper end of the parallel array device, the sensitive axes of the hair structures are on the same straight line, and the sensitive direction is consistent with the arrangement direction of the sensor array.

Furthermore, the peripheral pipeline cover is a rectangular pipeline cover with five communicating holes at the top, wherein the first, second, third, fourth and fifth communicating holes are adjacently arranged in parallel, and the central points of the first, second, third, fourth and fifth communicating holes are on the same straight line; the communicating holes and the bionic resonance hair sensor are distributed at intervals, and one bionic resonance hair sensor is arranged between every two communicating holes; a fifth bionic resonance hair sensor is positioned between the first communicating hole and the second communicating hole, a sixth bionic resonance hair sensor is positioned between the second communicating hole and the third communicating hole, a seventh bionic resonance hair sensor is positioned between the third communicating hole and the fourth communicating hole, and an eighth bionic resonance hair sensor is positioned between the fourth communicating hole and the fifth communicating hole; the fifth, sixth, seventh and eighth bionic resonant hair sensors are isolated from the outside air by the peripheral pipeline cover to form a pipeline side line system.

Furthermore, the rotation center of the fifth silicon microsensor structure is positioned at the bottom of the lower end of the fifth base mass block, a first lever mechanism, a second lever mechanism, a first double-end fixed tuning fork resonator substructure and a twenty-second double-end fixed tuning fork resonator substructure which are symmetrical left and right are arranged inside the fifth base mass block, and seventeenth, eighteenth, nineteen and twenty-third swing suppression elastic structures are respectively arranged at four top points of the fifth base mass block, namely the lower right, the lower left, the upper left and the upper right; the rotation center of the sixth silicon microsensor structure is positioned at the bottom of the lower end of the sixth base mass block, a third lever mechanism, a fourth lever mechanism, a third double-end fixed tuning fork resonator substructure and a fourth double-end fixed tuning fork resonator substructure which are bilaterally symmetrical are arranged in the sixth base mass block, and the twenty-first swing suppression elastic structures, the twenty-second swing suppression elastic structures, the twenty-third swing suppression elastic structures and the twenty-fourth swing suppression elastic structures are respectively arranged at four top points of the sixth base mass block, namely the lower right vertex, the upper left vertex and the upper right; the rotation center of the seventh silicon microsensor structure is positioned at the bottom of the lower end of the base mass block, the fifth and sixth lever mechanisms and the fifth and sixth double-end fixed tuning fork resonator substructure which are bilaterally symmetrical are arranged in the seventh base mass block, and the twenty-fifth, twenty-sixth, twenty-seventh and twenty-eight swing suppression elastic structures are respectively arranged at four top points of the seventh base mass block, namely the lower right, the lower left, the upper left and the upper right; the rotation center of the eighth silicon microsensor structure is positioned at the bottom of the lower end of the eighth base mass block, the seventh and eighth lever mechanisms and the seventh and eighth double-end fixed tuning fork resonator substructures which are bilaterally symmetrical are arranged in the eighth base mass block, and the twenty-ninth, thirty-first, thirty-second swing suppression elastic structures are respectively arranged at four top points of the eighth base mass block, namely the lower right, the lower left, the upper left and the upper right.

Further, the seventeenth and twenty-fourth swing-inhibiting elastic structures of the fifth silicon microsensor structure are adjacent to the twenty-twelfth and twenty-third swing-inhibiting elastic structures of the sixth silicon microsensor structure, the twenty-first and twenty-fourth swing-inhibiting elastic structures of the sixth silicon microsensor structure are adjacent to the twenty-sixth and twenty-seventh swing-inhibiting elastic structures of the seventh silicon microsensor structure, and the twenty-fifth and twenty-eighth swing-inhibiting elastic structures of the seventh silicon microsensor structure are adjacent to the thirty-fifth and thirty-eleventh swing-inhibiting elastic structures of the eighth silicon microsensor structure.

Furthermore, the pipeline side line array device is sensitive to air simple harmonic vibration, can obtain simple harmonic output frequency difference signals, and can extract weak resonator frequency change through demodulation of a minimum mean square error algorithm. The solving process of the minimum mean square error algorithm consists of two parts: an operation process and an iteration process; the operation process is as follows: firstly, a first output signal x output by a control system_i1Multiplying by weight k₁The second output signal x output by the control system_i2Multiplying by weight k₂Third output signal x output by the control system_i3Multiplying by weight k₃Fourth output signal x output by the control system_i4Multiplying by weight k₄(ii) a Then adding the four paths of signals multiplied by the weight to obtain a total output signal x_i(ii) a Finally input signal x_iSubtracting the estimated signal y_iTo obtain an estimation error signal e_i. The iteration process is as follows: first of all an error signal e is estimated_iMultiplying the steepest descent method convergence factor mu by 2 times and the reference signal R_iObtaining an estimated gradient value; then the current prediction vector P_iAdding the estimated gradient value to obtain the next prediction vector P_i+1(ii) a Last next prediction vector P_i+1And a reference signal R_iMultiplying to obtain a new estimated signal y_iIterate through the process loop until the estimation error signal e is minimized_iObtaining an optimal prediction matrix P; according to the relation between the optimal prediction matrix P and the frequency signal amplitude A, a signal of the frequency amplitude which can reflect the flow velocity of the external simple harmonic can be obtained through calculation, and the sensitivity to the simple harmonic is realized.

Has the advantages that: compared with the prior art, the invention has the following advantages:

(1) for the pipeline side line array device, the pipeline filters external low-frequency fluid signals, and the array can receive pressure difference changes caused by simple harmonic fluid with high frequency, so that the pipeline side line device has good anti-noise capability, can sense weak simple harmonic signals and filter low-frequency direct-current signals.

(2) The pipeline side line array device has the advantages of strong anti-interference capability, high sensitivity, high signal-to-noise ratio and the like.

(3) When the simple harmonic airflow acts on the pipeline side line device, pressure difference can be generated between the communicating holes, the pressure difference can cause the simple harmonic vibration flow of the gas in the pipeline, and the hair structure on the bionic resonance hair sensor is influenced by the simple harmonic vibration airflow, so that the output frequency difference signal of the sensor is also the simple harmonic signal, the simple harmonic signal is processed, and the weak frequency change of the resonator can be extracted by utilizing a minimum mean square error demodulation algorithm, so that the sensitivity to the simple harmonic airflow is realized.

Drawings

Fig. 1 is a schematic structural diagram of the pipeline side line array device based on the bionic resonant hair sensor.

Fig. 2 is a schematic bottom structure diagram of the pipe side line array device based on the bionic resonant hair sensor.

Fig. 3 is a flow chart of a minimum mean square error demodulation algorithm.

Detailed Description

The present invention is further described with reference to the accompanying drawings and specific examples, which are intended to be illustrative only and not to be limiting of the scope of the invention, and various equivalent modifications of the invention will occur to those skilled in the art upon reading the present invention and fall within the scope of the appended claims.

As shown in figures 1-2, the invention provides a pipeline side line array device based on a bionic resonance hair sensor, which is characterized by comprising a four-sensor parallel array device 18 and a peripheral pipeline cover 17; the four-sensor parallel array device 18 is formed by sequentially arranging fifth, sixth, seventh and eighth bionic resonant hair sensors 1-5, 1-6, 1-7 and 1-8 in parallel and adjacently;

the fifth bionic resonance hair sensor 1-5 consists of an upper fifth hair structure 2-5 and a lower fifth silicon microsensor structure 3-5, the sixth bionic resonance hair sensor 1-6 consists of an upper sixth hair structure 2-6 and a lower sixth silicon microsensor structure 3-6, the seventh bionic resonance hair sensor 1-7 consists of an upper seventh hair structure 2-7 and a lower seventh silicon microsensor structure 3-7, and the eighth bionic resonance hair sensor 1-8 consists of an upper eighth hair structure 2-8 and a lower eighth silicon microsensor structure 3-8; wherein the fifth biomimetic resonant hair sensor 1-5 is located at the leftmost side of the parallel array means 18 and the eighth biomimetic resonant hair sensor 1-8 is located at the rightmost side of the parallel array means 18; the fifth, sixth, seventh and eighth hair structures 2-5, 2-6, 2-7 and 2-8 on the upper layer are all positioned at the upper end edge of the parallel array device 18, the sensitive axes are on the same straight line, and the sensitive direction is consistent with the arrangement direction of the sensor array.

The peripheral pipeline cover 17 is a rectangular pipeline cover with five communicating holes at the top, wherein the first, second, third, fourth and fifth communicating holes 16-1, 16-2, 16-3, 16-4 and 16-5 are adjacently arranged in parallel, and the central points are on the same straight line; the communicating holes and the bionic resonance hair sensor are distributed at intervals, and one bionic resonance hair sensor is arranged between every two communicating holes; a fifth bionic resonance hair sensor 1-5 is positioned between the first communicating hole 16-1 and the second communicating hole 16-2, a sixth bionic resonance hair sensor 1-6 is positioned between the second communicating hole 16-2 and the third communicating hole 16-3, a seventh bionic resonance hair sensor 1-7 is positioned between the third communicating hole 16-3 and the fourth communicating hole 16-4, and an eighth bionic resonance hair sensor 1-8 is positioned between the fourth communicating hole 16-4 and the fifth communicating hole 16-5; the peripheral pipeline cover 17 isolates the fifth, sixth, seventh and eighth bionic resonant hair sensors 1-5, 1-6, 1-7 and 1-8 from the outside air to form a pipeline side line system.

The rotation center 7-5 of the fifth silicon microsensor structure 3-5 is positioned at the bottom of the lower end of a fifth base mass block 8-5, a first lever mechanism 5-5a, a second lever mechanism 5-6b and a first double-end fixed tuning fork resonator substructure 4-5a, a first double-end fixed tuning fork resonator substructure 4-6b which are bilaterally symmetrical are arranged inside the fifth base mass block 8-5, and a seventeenth swing suppression elastic structure 6-5a, a seventeenth swing suppression elastic structure 6-5b, a twenty-second swing suppression elastic structure 6-5c, a twenty-second swing suppression elastic structure 6-6d are respectively arranged at four top points of the fifth base mass block 8-5, namely the lower left top, the upper left top and the upper right top; the rotation center 7-6 of the sixth silicon microsensor structure 3-6 is positioned at the bottom of the lower end of a sixth base mass block 8-6, a third lever mechanism 5-6a, a fourth lever mechanism 5-6b, a third double-end fixed tuning fork resonator substructure 4-6a, a fourth double-end fixed tuning fork resonator substructure 4-6b and a second double-end fixed tuning fork resonator substructure 4-6b are arranged in the sixth base mass block 8-6 in a bilateral symmetry manner, and a twenty-first swing inhibiting elastic structure 6-6a, a twenty-second swing inhibiting elastic structure 6-6b, a twenty-third swing inhibiting elastic structure 6-6c, a twenty-fourth swing inhibiting elastic structure 6-6d are respectively arranged at four top points of the sixth base mass block 8-6, namely the lower right; the rotation center 7-7 of the seventh silicon microsensor structure 3-7 is positioned at the bottom of the lower end of the base mass block 8-7, the fifth and sixth lever mechanisms 5-7a and 5-7b and the fifth and sixth double-end fixed tuning fork resonator sub-structures 4-7a and 4-7b which are bilaterally symmetrical are arranged in the seventh base mass block 8-7, and the twenty-fifth, twenty-sixth, twenty-seventh and twenty-eight swing suppression elastic structures 6-7a, 6-7b, 6-7c and 6-7d are respectively arranged at four top points of the seventh base mass block 8-7, namely the lower left, the upper left and the upper right; the rotation center 7-8 of the eighth silicon microsensor structure 3-8 is positioned at the bottom of the lower end of the eighth base mass block 8-8, a seventh and an eighth lever mechanisms 5-8a and 5-8b and a seventh and an eighth double-end fixed tuning fork resonator substructure 4-8a and 4-8b which are bilaterally symmetrical are arranged in the eighth base mass block 8-8, and a twenty-ninth, thirty-first, thirty-second swing inhibiting elastic structure 6-8a, 6-8b, 6-8c and 6-8d are respectively arranged at four top points of the eighth base mass block 8-8, namely the lower right, the lower left, the upper left and the upper right.

Wherein the seventeenth and twenty-fifth swing-inhibiting elastic structures 6-5a and 6-5d of the fifth silicon microsensor structure 3-5 are adjacent to the twenty-twelfth and twenty-third swing-inhibiting elastic structures 6-6b and 6-6c of the sixth silicon microsensor structure 3-6, the twenty-first and twenty-fourth swing-inhibiting elastic structures 6-6a and 6-6d of the sixth silicon microsensor structure 3-6 are adjacent to the twenty-sixth and twenty-seventh swing-inhibiting elastic structures 6-7b and 6-7c of the seventh silicon microsensor structure 3-7, the twenty-fifth and twenty-eight swing-inhibiting elastic structures 6-7a and 6-7d of the seventh silicon microsensor structure 3-8 are adjacent to the thirty and thirty-eleventh swing-inhibiting elastic structures 6-8b and 6-8b of the eighth silicon microsensor structure 3-7, 6-8c are adjacent.

The pipeline side line array device is sensitive to air simple harmonic vibration, can obtain a simple harmonic output frequency difference signal, and can extract weak resonator frequency change through demodulation of a minimum mean square error algorithm. The principle of the minimum mean square error algorithm demodulation is as follows: using reference signals R_iX is obtained by iterative approximation of the prediction matrix P_iThe estimated signal of (2).

The flow chart of the simple harmonic signal demodulation by using the minimum mean square error algorithm is shown in figure 3. The solving process of the minimum mean square error algorithm consists of two parts: an arithmetic process 19 and an iterative process 20. The operation process 19 is: firstly, a first output signal x output by a control system_i1Multiplying by weight k₁The second output signal x output by the control system_i2Multiplying by weight k₂Third output signal x output by the control system_i3Multiplying by weight k₃Fourth output signal x output by the control system_i4Multiplying by weight k₄(ii) a Then adding the four paths of signals multiplied by the weight to obtain a total output signal x_i(ii) a Finally input signal x_iSubtracting the estimated signal y_iTo obtain an estimation error signal e_i。

The minimum mean square error demodulation algorithm uses a steepest descent iteration method to obtain an optimal prediction matrix P, and if an instantaneous square value of an error signal during each iteration replaces the mean square value, an iteration expression can be obtained:

P_i+1＝P_i+2μe_iR_i

wherein mu is the convergence factor of steepest descent method, P_iIs the current prediction vector and P ═ QI]^T，P_i+1For the next prediction vector, e_iTo estimate the error signal, R_iIs a reference signal. According to the above expression, the iterative process 20 is: first of all an error signal e is estimated_iMultiplying the steepest descent method convergence factor mu by 2 times and the reference signal R_iObtaining an estimated gradient value; then the current prediction vector P_iAdding the estimated gradient value to obtain the next prediction vector P_i+1(ii) a Last next prediction vector P_i+1And a reference signal R_iMultiplying to obtain a new estimated signal y_iIterate through the process loop until the estimation error signal e is minimized_iAnd obtaining the optimal prediction matrix P. From the optimal prediction matrix P to the total input signal x_iThe magnitude of amplitude of (d) is expressed as:

where A is the amplitude of the frequency signal. According to the values of Q and I, a signal of frequency amplitude which can reflect the magnitude of the flow velocity of the external simple harmonic can be obtained through calculation, and the sensitivity to the simple harmonic is realized.

While the invention has been described in connection with specific embodiments thereof, it will be understood that these should not be construed as limiting the scope of the invention, which is defined in the following claims, and any variations which fall within the scope of the claims are intended to be embraced thereby.