阅读说明：本技术 一种负氢离子引出装置 (Negative hydrogen ion extraction device ) 是由 赵杰 许丽 王世庆 柳建 李建 郑才国 王坤 桂兵仪 于 2019-11-26 设计创作，主要内容包括：本发明公开一种负氢离子引出装置,包括电场组件以及依次绝缘间隔设置的第一栅、第二栅和第三栅,第一栅、第二栅和第三栅设置有沿三者叠加方向并沿着同一轴线方向的通口,第二栅上设置有环绕其通口的环形磁体,电场组件包括加载在第一栅与等离子放电室之间的第一电压组件、加载在第二栅与第一栅之间的第二电压组件以及加载在第三栅与第二栅之间的第三电压组件,第一电压组件、第二电压组件和第三电压组件使得等离子放电室、第一栅、第二栅和第三栅的电位依次增高构成多级电场。本发明采用多级电场将等离子放电室中产生的负氢离子和电子引出,利用磁场将电子约束滤除,有效提高得到的负氢离子束流强度、提高束流纯度、改善束流品质。(The invention discloses a negative hydrogen ion extraction device, which comprises an electric field component, and a first grid, a second grid and a third grid which are sequentially arranged at intervals in an insulated manner, wherein the first grid, the second grid and the third grid are provided with through holes along the superposition direction of the first grid, the second grid and the third grid and along the same axial direction, the second grid is provided with an annular magnet surrounding the through holes, the electric field component comprises a first voltage component loaded between the first grid and a plasma discharge chamber, a second voltage component loaded between the second grid and the first grid and a third voltage component loaded between the third grid and the second grid, and the first voltage component, the second voltage component and the third voltage component enable the potentials of the plasma discharge chamber, the first grid, the second grid and the third grid to be sequentially increased to form a multi-stage electric field. The invention adopts a multistage electric field to lead out negative hydrogen ions and electrons generated in the plasma discharge chamber, and utilizes a magnetic field to restrain and filter the electrons, thereby effectively improving the beam intensity of the obtained negative hydrogen ions, improving the beam purity and improving the beam quality.)

1. The negative hydrogen ion extraction device is characterized by comprising an electric field assembly, a first grid (1), a second grid (2) and a third grid (3) which are sequentially arranged at intervals in an insulating manner, wherein the first grid (1), the second grid (2) and the third grid (3) are respectively provided with through holes in the superposition direction of the three, the through holes of the three are arranged along the same axial direction, the second grid (2) is also provided with an annular magnet (21) surrounding the through holes of the second grid, the electric field assembly comprises a first voltage assembly (4) loaded between the first grid (1) and a plasma discharge chamber, a second voltage assembly (5) loaded between the second grid (2) and the first grid (1) and a third voltage assembly (6) loaded between the third grid (3) and the second grid (2), and the first voltage assembly (4), the second voltage assembly (5) and the third voltage assembly (6) enable the plasma discharge chamber to be in a certain range, The potentials of the first grid (1), the second grid (2) and the third grid (3) are sequentially increased to form a multi-stage electric field.

2. The negative hydrogen ion extraction device according to claim 1, wherein a cooling mechanism is further provided on the second grid (2).

3. The negative hydrogen ion extraction device according to claim 2, wherein the cooling mechanism is a circulating water cooling mechanism.

4. The negative hydrogen ion extraction device according to claim 1, wherein the ring magnet (21) is a permanent magnet.

5. The negative hydrogen ion extraction device according to claim 1, wherein the ring-shaped magnet (21) is provided in a plurality along the axial direction of the through opening of the second grid (2).

6. The negative hydrogen ion extraction device according to claim 1, wherein the first grid (1) is a molybdenum plate coated with a field emission type diamond-like film.

7. The negative hydrogen ion extraction device according to claim 1, wherein an axial adjustment mechanism for adjusting the distance between the third grid (3) and the second grid (2) is provided on the third grid (3).

8. The negative hydrogen ion extraction device according to claim 1, wherein the third grid (3) is further provided with an aperture adjustment mechanism for adjusting the aperture of the through opening thereof.

9. The negative hydrogen ion extraction device according to any one of claims 1 to 8, wherein the first voltage module (4) is applied with 10KV, the second voltage module (5) is applied with 15KV, and the third voltage module (6) is applied with 30KV to 50 KV.

10. The negative hydrogen ion extraction apparatus according to any one of claims 1 to 8, wherein insulators (7) are provided between the first grid (1) and the plasma discharge chamber, between the first grid (1) and the second grid (2), and between the second grid (2) and the third grid (3), respectively.

Technical Field

The invention relates to the technical field of ion sources, in particular to a negative hydrogen ion extraction device.

Background

The ion source is a device for ionizing neutral atoms or molecules and extracting an ion beam current therefrom, and is an indispensable component of various types of equipment such as an ion accelerator, a mass spectrometer, an electromagnetic isotope separator, an ion implanter, an ion beam etching device, an ion thruster, and a neutral beam injector in a controlled fusion device. The main factors restricting the development of the high-current proton cyclotron are beam intensity and beam quality, and the extraction device is the key for improving the beam intensity and the beam quality. The beam current led out from the plasma in the discharge chamber mainly comprises negative hydrogen ions and electrons, the intensity of the electron beam current is usually several times to dozens of times, even hundreds of times, the intensity of the negative hydrogen ion beam current, the stress of the particles is in a non-equilibrium state, and the high-energy particles in the ion source influence the energy distribution and the space profile. Because the intensity of the electron beam is higher than that of the negative hydrogen ion beam by one or two orders of magnitude, the difficulty of separating the electron beam from the negative hydrogen ion beam is high, and the performance parameters of the extracted beam directly influence the performance index of the accelerator. The existing negative hydrogen ion extraction device is difficult to efficiently extract negative hydrogen ions, the extracted negative hydrogen ion beam is difficult to effectively filter electrons because of more electrons, the beam intensity is low, and the beam quality is poor.

Disclosure of Invention

The invention aims to solve the technical problems and the technical task of improving the prior art, and provides a negative hydrogen ion extraction device, which solves the problems that the negative hydrogen ions are extracted efficiently by the extraction device in the prior art, electrons are difficult to effectively filter, the beam intensity is low, and the beam quality is poor.

In order to solve the technical problems, the technical scheme of the invention is as follows:

the utility model provides a negative hydrogen ion extraction device, includes electric field assembly and the first bars, second bars and the third bars that insulating interval set up in proper order, first bars, second bars and third bars all be provided with respectively along the opening of three overlapping direction to three's opening is along same axis direction, still be provided with the ring magnet of surrounding its opening on the second bars, electric field assembly including the first voltage subassembly of loading between first bars and plasma discharge chamber, the second voltage subassembly of loading between second bars and first bars and the third voltage subassembly of loading between third bars and second bars, first voltage subassembly, second voltage subassembly and third voltage subassembly make the electric potential of plasma discharge chamber, first bars, second bars and third bars increase in proper order thereby constitute multistage electric field. The negative hydrogen ion leading-out device adopts the first grid, the second grid and the third grid with different electric potentials to form a three-grid leading-out system, negative hydrogen ions and electrons generated in the plasma discharge chamber are led out under the acceleration of a multi-stage electric field formed by the first grid, the second grid and the third grid, the negative hydrogen ions and the electrons move from a low electric potential to a high electric potential direction, namely, the negative hydrogen ions and the electrons are led out along the first grid, the second grid and the third grid, when the negative hydrogen ions and the electrons pass through a through hole of the second grid, the annular magnet on the second grid generates a high-strength magnetic field to lead the electrons to be restrained by the magnetic field, so that the electrons are filtered out at the second grid, the mass of the negative hydrogen ions is more than that of the electrons, the negative hydrogen ions can have enough kinetic energy under the action of the first voltage component and the second voltage component, and the negative hydrogen ions can pass through the magnetic field of the annular magnet to enter the third grid, finally, the negative hydrogen ions are efficiently led out, electrons and the negative hydrogen ions are efficiently separated, the beam intensity of the obtained negative hydrogen ions is effectively improved, the beam purity is improved, the beam quality is improved, and the requirements of an accelerator on the negative hydrogen ions are met.

Furthermore, the second grid is also provided with a cooling mechanism, the electron beam current led out from the plasma discharge chamber has high intensity, electrons carry high energy, the temperature of the second grid can be rapidly increased when the electrons are restrained and filtered by a magnetic field at the second grid, and the temperature rise can seriously affect the working stability of the leading-out device.

Furthermore, the cooling mechanism is a circulating water cooling mechanism, so that the cooling effect is good, the efficiency is high, and the negative hydrogen ion extraction device is ensured to work at a proper constant temperature.

Furthermore, the annular magnet is a permanent magnet, so that the structure is simple and compact, and the assembly is simple and convenient.

Furthermore, the annular magnet is provided with a plurality of along the opening axial of second bars, the guarantee forms stable and high-strength magnetic field to increase the axial region that the magnetic field of annular magnet covered, improve the restraint filtering effect to the electron, and then effectively improve the negative hydrogen ion beam current intensity that finally obtains, improve the beam current quality.

Furthermore, the first grid is a molybdenum plate coated with a field emission type diamond-like film on the surface, the generation rate of negative hydrogen ions can be increased, the proportion of the negative hydrogen ions in the beam current led out from the plasma of the plasma discharge chamber can be increased, the negative hydrogen ions are generated by a surface mechanism, the probability that protons and hydrogen atoms in the plasma capture electrons from the surface of the metal to form the negative hydrogen ions is improved, the density of the negative hydrogen ions is obviously improved, and the beam current intensity of the finally obtained negative hydrogen ions is improved.

Furthermore, the third grid is provided with an axial adjusting mechanism for adjusting the distance between the third grid and the second grid, so that the potential difference distribution between the third grid and the second grid can be flexibly changed as required, the size of the extracted negative hydrogen ion beam can be conveniently controlled, and the stability and the purity of the negative hydrogen ion beam can be improved.

Furthermore, the third grid is also provided with an aperture adjusting mechanism for adjusting the aperture of the opening of the third grid, so that the size of the negative hydrogen ion beam current can be flexibly adjusted according to the requirement.

Furthermore, the first voltage component loads 10KV voltage, the second voltage component loads 15KV voltage, and the third voltage component loads 30 KV-50 KV voltage, so that the first grid, the second grid and the third grid form a stable multi-stage electric field, negative hydrogen ions are led out under the acceleration of the multi-stage electric field, and the beam intensity is high.

Further, insulators are respectively arranged between the first grid and the plasma discharge chamber, between the first grid and the second grid and between the second grid and the third grid, and the insulators effectively insulate and separate the plasma discharge chamber, the first grid, the second grid and the third grid, so that the stability and reliability of a multi-stage electric field are guaranteed, and the stability of the extracted negative hydrogen ion beam current is guaranteed.

Compared with the prior art, the invention has the advantages that:

the negative hydrogen ion extraction device has a simple and compact structure, adopts a multistage electric field to extract negative hydrogen ions and electrons generated in the plasma discharge chamber, utilizes a magnetic field to restrain and filter the electrons, efficiently separates the electrons and the negative hydrogen ions, efficiently extracts the negative hydrogen ions, effectively improves the beam intensity of the obtained negative hydrogen ions, improves the beam purity, improves the beam quality and meets the requirements of an accelerator on the negative hydrogen ions.

Drawings

FIG. 1 is a schematic structural diagram of a negative hydrogen ion extraction device;

FIG. 2 is a schematic structural diagram of another embodiment of a second gate;

fig. 3 is a schematic structural view of an aperture adjustment mechanism of the third grid.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The negative hydrogen ion extraction device disclosed by the embodiment of the invention can efficiently extract negative hydrogen ions from discharge plasma, effectively filter electrons and meet the requirements of an accelerator on negative hydrogen ion beams.

As shown in fig. 1 to 3, a negative hydrogen ion extraction device mainly includes an electric field assembly, and a first grid 1, a second grid 2 and a third grid 3 sequentially arranged at intervals in an insulated manner;

the first grid 1, the second grid 2 and the third grid 3 are respectively provided with through holes along the superposition direction of the three grids, and the through holes of the three grids are along the same axial direction, and the through holes of the first grid 1, the second grid 2 and the third grid 3 form a channel for leading out negative hydrogen ions and electrons generated in the plasma discharge chamber;

the electric field component comprises a first voltage component 4 loaded between the first grid 1 and the plasma discharge chamber, a second voltage component 5 loaded between the second grid 2 and the first grid 1, and a third voltage component 6 loaded between the third grid 3 and the second grid 2, wherein the first voltage component 4, the second voltage component 5 and the third voltage component 6 enable the electric potentials of the plasma discharge chamber, the first grid 1, the second grid 2 and the third grid 3 to be sequentially increased so as to form a multi-stage electric field, namely, the electric potential of the first grid 1 is higher than that of the plasma discharge chamber a, the electric potential of the second grid 2 is higher than that of the first grid 1, the electric potential of the third grid 3 is higher than that of the second grid 2, and the first voltage component 4 is loaded with 10KV voltage so as to lead out negatively charged particles, namely negative hydrogen ions and electrons, the negative ions and the electrons are accelerated to the second grid 2 under the action of the electric field applied by the first voltage component 4, 15KV is loaded on the second voltage component 5, 30 KV-50 KV is loaded on the third voltage component 6, and negatively charged particles are effectively accelerated and led out under the action of a multi-stage electric field;

still be provided with the annular magnet 21 that encircles its opening on the second bars 2, annular magnet 21 adopts the permanent magnet, moreover, the steam generator is simple in structure, high in use stability, long service life, annular magnet 21 also can adopt the electro-magnet, annular magnet 21 produces the magnetic field of high strength, magnetic field and electric field form criss-cross electromagnetic field configuration, make the electron through first bars 1 by magnetic field constraint, thereby the electron is filtered at second bars department, the negative hydrogen ion quality is big more than the electron, the negative hydrogen ion can have enough big kinetic energy under the electric field effect of first voltage subassembly, second voltage subassembly loading, thereby the negative hydrogen ion can pass through the magnetic field of annular magnet smoothly (pass second bars 2 promptly), the effect of the electron that draws together along with the negative hydrogen ion is realized filtering to second bars 2.

Because the energy of the electrons is high, the electrons can cause the temperature of the second grid to rise rapidly when being restrained and filtered by the magnetic field at the second grid, and therefore, a cooling mechanism is further arranged on the second grid 2, the cooling mechanism can preferably adopt a circulating water cooling mechanism, specifically, the circulating water cooling mechanism can comprise a cooling pipeline arranged on the second grid, a delivery pipe connected with the cooling pipeline, and a circulating pump and a cooler arranged on the delivery pipe, and the cooler can be a fin radiator, a cooling pool and the like.

The first grid 1 is a molybdenum plate coated with a field emission type diamond-like film on the surface, specifically, the molybdenum plate is used as a substrate, an anode layer Hall gas ion source and a high-current metal ion source technology with a magnetic filtering function are utilized, the diamond-like film is prepared on the molybdenum plate by a vacuum cathode arc deposition process, the main component of the diamond-like film is carbon, the diamond-like film has an excellent function of field emission of electrons, and the diamond-like film is used as a cold cathode field emission characteristic in a negative hydrogen ion extraction device to enhance the emission of electrons, so that the generation rate of negative hydrogen ions is increased; the third grid 3 is provided with an axial adjusting mechanism 31 for adjusting the distance between the third grid 3 and the second grid 2, and the third grid 3 is also provided with an aperture adjusting mechanism 32 for adjusting the aperture of an opening of the third grid 3, so that the potential difference distribution between the third grid and the second grid can be flexibly changed as required, the size of the extracted negative hydrogen ion beam current can be conveniently controlled, the stability and the purity of the negative hydrogen ion beam current can be improved, and different negative hydrogen ion beam currents can be output by combining the change of the parameters of a negative hydrogen ion source.

Insulators 7 are respectively arranged between the first grid 1 and the plasma discharge chamber, between the first grid 1 and the second grid 2, and between the second grid 2 and the third grid 3, and the insulators 7 can be in a ring structure along the circumferential direction of the through hole. Specifically, the present embodiment is provided with a discharge chamber flange 11 connected with the plasma discharge chamber a, the first grid 1 is fixed on the first grid flange 12, and the discharge chamber flange 11 and the first grid flange 12 are separated and isolated by an insulator 7; the low potential end of the first voltage component 4 is connected with the plasma discharge chamber a and a discharge chamber flange 11, the high potential end of the first voltage component 4 is connected with a first grid flange 12, and the first grid 1 is connected with the high potential end of the first voltage component 4 through the conductive first grid flange 12; the second grid 2 is insulated and separated from the first grid flange 12 through the insulator 7, then the third grid flange 33 is insulated and separated from the second grid 2 through the insulator 7, the third grid 3 is connected to the third grid flange 33 through the axial adjusting mechanism 31, the axial adjusting mechanism 31 can be operated as required to adjust the axial distance between the third grid 3 and the second grid 2, the low-potential end of the second voltage component 5 is connected with the first grid flange 12, the high-potential end of the second voltage component 5 is connected with the second grid 2, the low-potential end of the third voltage component 6 is connected with the second grid 2, and the high-potential end of the third voltage component 6 is connected with the third grid flange 33. Specifically, the axial adjusting mechanism 31 may be a screw rod mechanism, the third grid 3 is connected with a nut sleeved on the screw rod, the screw rod is axially along the axial direction of the through holes of the third grid 3 and the second grid 2, and the nut is driven to move by rotating the screw rod so as to adjust the distance between the third grid 3 and the second grid 2; the aperture of the opening of the third grid 3 is adjusted by the aperture adjusting mechanism 32, specifically, the opening of the third grid 3 is formed by splicing two semicircles, the aperture adjusting mechanism 32 comprises a pushing assembly for pushing the two semicircles to move along the radial direction, and the pushing assembly drives the semicircles to move along the radial direction so as to adjust the aperture of the opening surrounded by the two semicircles; and the first grid 1, the second grid 2 and the third grid 3 are mutually provided with sealing rings, so that the stability of the negative hydrogen ion beam is improved.

As shown in fig. 2, the annular magnet 21 may also be provided with a plurality of through holes along the axial direction of the second grid 2, so as to increase the axial area covered by the magnetic field of the annular magnet, so as to more effectively filter out the electron confinement, and improve the purity of the finally obtained negative hydrogen ion beam.

The above is only a preferred embodiment of the present invention, and it should be noted that the above preferred embodiment should not be considered as limiting the present invention, and the protection scope of the present invention should be subject to the scope defined by the claims. It will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the spirit and scope of the invention, and these modifications and adaptations should be considered within the scope of the invention.