阅读说明：本技术 包括可适形涂层的磨料制品和由此形成的抛光系统 (Abrasive article including conformable coating and polishing system formed thereby ) 是由 陈季汎 贾斯廷·A·里德尔 文森特·J·拉拉亚 凯莱布·T·纳尔逊 谢文祥 摩西·M·戴维 于 2018-07-05 设计创作，主要内容包括：本公开涉及包括可适形涂层(例如亲水性涂层)的磨料制品,以及由此形成的抛光系统。本公开提供了一种磨料制品,所述磨料制品包括陶瓷主体,所述陶瓷主体具有研磨表面和相反的第二表面,其中所述陶瓷主体的研磨表面包括多个所设计的特征结构,所述多个所设计的特征结构各自具有基部和与所述基部相反的远侧端部,并且所述陶瓷主体具有至少7.5的莫氏硬度；邻近并适形于所述多个所设计的特征结构的可适形金属氧化物涂层,其中所述可适形金属氧化物涂层包括第一表面；和与所述可适形金属氧化物涂层的所述第一表面接触的可适形极性有机金属涂层,其中所述可适形极性有机金属涂层包含具有至少一种金属和具有至少一个极性官能团的有机部分的化合物。(The present disclosure relates to abrasive articles including conformable coatings (e.g., hydrophilic coatings), and polishing systems formed therefrom. The present disclosure provides an abrasive article comprising a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of engineered features each having a base and a distal end opposite the base, and the ceramic body has a mohs hardness of at least 7.5; a conformable metal oxide coating adjacent to and conformable to the plurality of designed features, wherein the conformable metal oxide coating comprises a first surface; and a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organometallic coating comprises a compound having at least one metal and an organic moiety having at least one polar functional group.)

1. An abrasive article, comprising:

a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of engineered features each having a base and a distal end opposite the base, and the ceramic body has a mohs hardness of at least 7.5;

a conformable metal oxide coating adjacent to and conformable to the plurality of designed features, wherein the conformable metal oxide coating comprises a first surface; and

a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organometallic coating comprises a compound having at least one metal and an organic moiety having at least one polar functional group.

2. The abrasive article of claim 1, wherein the at least one metal of the conformable polar organometallic coating is at least one of Si, Ti, Zr, and Al.

3. The abrasive article of claim 1, wherein the at least one polar functional group comprises at least one of a hydroxyl, acid, primary amine, secondary amine, tertiary amine, methoxy, ethoxy, propoxy, ketone, cationic, and anionic functional group.

4. The abrasive article of claim 1, wherein the at least one polar functional group comprises at least one of a cationic functional group and an anionic functional group.

5. The abrasive article of claim 1, wherein the at least one polar functional group comprises at least one cationic functional group and one anionic functional group.

6. The abrasive article of claim 1, wherein the compound is an organosilane, and wherein the conformable polar organometallic coating comprises a reaction product of the organosilane and a metal oxide of the conformable metal oxide coating.

7. The abrasive article of claim 6, wherein the organosilane includes at least one of an organochlorosilane, an organosilane alcohol, and an alkoxysilane.

8. The abrasive article of claim 1, wherein the organosilane includes an alkoxysilane.

9. The abrasive article of claim 1, wherein the organosilane includes at least one of n-trimethoxysilylpropyl-n, n, n-trimethylammonium chloride, n- (trimethoxysilylpropyl) ethylenediaminetriacetic acid trisodium salt, carboxyethylsilanetriol disodium salt, 3- (trihydroxysilyl) -1-propanesulfonic acid, and n- (3-triethoxysilylpropyl) glucamide.

10. The abrasive article of claim 1, wherein the conformable polar organometallic coating further comprises at least one of lithium silicate, sodium silicate, and potassium silicate.

11. The abrasive article of claim 1, wherein the metal of the metal oxide comprises at least one of Al, Ti, Cr, Mg, Mn, Fe, Co, Ni, Cu, W, Zn, Zr, Ga, and Si.

12. The abrasive article of claim 5, wherein the metal of the metal oxide comprises Si and the organosilane comprises an alkoxysilane.

13. The abrasive article of claim 1 wherein the water contact angle on the conformable polar organometallic coating is less than 30 degrees.

14. The abrasive article of claim 1, wherein the water contact angle on the conformable polar organometallic is between 0 degrees and 20 degrees.

15. The abrasive article of claim 1, further comprising a conformable diamond coating disposed between the abrasive surface of the ceramic body and the conformable metal oxide coating.

16. The abrasive article of claim 1, wherein the ceramic body is a carbide ceramic body and comprises 99% carbide ceramic by weight.

17. The abrasive article of claim 16, wherein the carbide ceramic body comprises 99% by weight of a silicon carbide ceramic.

18. The abrasive article of claim 16, wherein the ceramic body is a monolithic ceramic body.

19. The abrasive article of claim 1, wherein the plurality of engineered features are precisely-shaped features.

20. A polishing system, comprising:

a polishing pad comprising a material;

an abrasive pad conditioner having an abrasive surface, wherein the abrasive pad conditioner comprises at least one abrasive article according to claim 1, wherein the abrasive surface of the abrasive pad conditioner comprises a conformable polar organometallic coating of the at least one abrasive article.

21. The polishing system of claim 20, wherein the material of the polishing pad comprises polyurethane.

22. The polishing system of claim 20, wherein the working liquid is an aqueous working liquid.

23. The polishing system of claim 20, further comprising a cleaning liquid.

24. The polishing system of claim 23, wherein the cleaning liquid is an aqueous cleaning liquid.

Technical Field

The present disclosure relates to abrasive articles having a conformable coating, such as abrasive pad conditioners having a conformable coating, and polishing systems formed therefrom.

Background

Coated abrasive articles have been described, for example, in U.S. patent 5,921,856; 6,368,198 and 8,905,823, and U.S. patent publications 2011/0053479 and 2017/0008143.

Disclosure of Invention

Abrasive articles are commonly used to abrade a variety of substrates in order to remove a portion of the abraded substrate surface from the substrate itself. The material removed from the substrate surface is commonly referred to as swarf. One problem with abrasive articles is that swarf can accumulate on the abrading surface of the abrasive article, thereby reducing the abrading ability of the abrasive article. Removal of swarf from an abrasive article is often difficult because it can easily adhere to the abrasive surface of the abrasive article.

In Chemical Mechanical Planarization (CMP) applications, the polishing system can comprise a polishing pad, typically a polymer-based material, such as polyurethane; abrasive articles designed to abrade the pad, such as abrasive pad dressers; a substrate to be polished, such as a semiconductor wafer; and a working fluid, such as a polishing slurry containing abrasive particles, designed to polish/abrade the substrate being polished. During polishing of a wafer with a polishing slurry and a polishing pad, the polishing pad can become smooth with slurry particles from the slurry, which reduces the ability of the polishing pad to polish the wafer in a consistent manner. Polishing pads are typically abraded using an abrasive pad dresser that may include an abrasive layer of diamond particles, a ceramic abrasive layer, or a diamond-coated ceramic abrasive layer in order to remove glaze and/or expose a new polishing pad surface to maintain consistent polishing performance of the pad over a long polishing period of time. However, during use, pad dressers are prone to swarf buildup, e.g., pad material abraded from the pad and/or abrasive particles from the slurry can adhere to the abrasive surface of the pad dresser. This phenomenon reduces the ability of the abrasive pad dresser to remove glaze from the polishing pad and/or expose new polishing pad surfaces, and ultimately results in reduced polishing performance of the polishing pad itself. To ameliorate this situation, there is a need for an abrasive pad dresser having an abrasive surface that reduces swarf accumulation and/or that can be easily cleaned of swarf.

The present disclosure relates to abrasive articles having a unique hydrophilic surface. The hydrophilic surface improves the wettability of the surface of the abrasive article and may result in enhanced soil resistance and/or enhanced cleaning due to the hydrophilic surface of the abrasive article. This is in contrast to the prior art, such as U.S. patent application publication 2011/0053479(Kim et al), which shows that a hydrophobic cutting surface is required to prevent contamination of the cutting tool surface (e.g., the pad dresser surface). The present disclosure also provides polishing systems incorporating the abrasive articles of the present disclosure.

In one embodiment, the present disclosure provides an abrasive article comprising:

a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of designed features each having a base and a distal end opposite the base, and the ceramic body has a Mohs hardness of at least 7.5 and/or at least 1300kg/mm²Vickers hardness of (2);

a conformable metal oxide coating adjacent to and conformable to the plurality of designed features, wherein the conformable metal oxide coating comprises a first surface; and

a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating. In some embodiments, the conformable polar organometallic coating comprises a compound having at least one metal and an organic moiety having at least one polar functional group. Optionally, the at least one metal of the conformable polar organometallic coating can be at least one of Si, Ti, Zr, and Al. The ceramic body may have a thickness of between 4mm and 25 mm. In some embodiments, the abrasive surface has a projected surface area of 500mm²To 500000mm²In the meantime.

In another embodiment, the present disclosure provides a polishing system comprising:

a polishing pad comprising a material;

an abrasive pad conditioner having an abrasive surface, wherein the abrasive pad conditioner comprises an abrasive article according to any one of the abrasive articles of the present disclosure, wherein the abrasive surface of the abrasive pad conditioner comprises a conformable polar organometallic coating of the at least one abrasive article.

Drawings

Fig. 1A is a schematic top view of at least a portion of an exemplary abrasive article according to one exemplary embodiment of the present disclosure.

Fig. 1B is a schematic cross-sectional view through line 1B of the exemplary abrasive article of fig. 1A, according to one exemplary embodiment of the present disclosure.

Fig. 2 is a schematic top view of a segmented polishing pad dresser according to an exemplary embodiment of the present disclosure.

Fig. 3 is a schematic view of an exemplary polishing system for utilizing an abrasive article according to some embodiments of the present disclosure.

Repeat use of reference characters in the present specification and drawings is intended to represent same or analogous features or elements of the disclosure. The figures may not be drawn to scale. As used herein, the word "between … …" applied to a numerical range includes the endpoints of that range unless otherwise specified. The recitation of numerical ranges by endpoints includes all numbers subsumed within that range (e.g. 1 to 5 includes 1, 1.5, 2, 2.75, 3, 3.80, 4, and 5) and any range within that range.

It should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the scope and spirit of the principles of this disclosure. Unless defined otherwise, all scientific and technical terms used herein have the same meaning as commonly understood in the art. The definitions provided herein will facilitate understanding of certain terms used frequently herein and are not meant to limit the scope of the present disclosure. As used in this specification and the appended claims, the singular forms "a", "an", and "the" encompass embodiments having plural referents, unless the context clearly dictates otherwise. As used in this specification and the appended claims, the term "or" is generally employed in its sense including "and/or" unless the context clearly dictates otherwise.

Throughout this disclosure, "designed feature" refers to a three-dimensional feature (a topographical feature having a length, width, and height) having a machined shape (i.e., cut to form a shape or a molded shape), the molded shape of the designed feature being the inverse of the corresponding mold cavity, which shape is retained after the designed feature is removed from the mold cavity. The designed features may shrink in size due to, for example, sintering of the green ceramic to form the designed features of the ceramic. However, the shrunk designed features still maintain the general shape of the mold cavity formed from the green ceramic and are still considered designed features.

Throughout this disclosure, "microreplication" refers to the following manufacturing techniques: wherein precisely shaped topographical features are prepared by casting or molding a ceramic powder precursor in a production tool, such as a mold or stamping tool, wherein the production tool has a plurality of micron-to millimeter-sized topographical features that are the inverse of the final desired features. Upon removal of the ceramic powder precursor from the production tool, a series of topographical features are present in the surface of the green ceramic. The topographical features of the green ceramic surface have a shape that is the inverse of the features of the original production tool.

Throughout this disclosure, the phrase "conformable coating" refers to a coating that coats and conforms to an abrasive surface or a topographically-bearing surface that includes a plurality of designed features. The coating conforms to the designed features or surface topography and generally does not completely fill the topography of the designed features or surface to produce a flat surface, e.g., the coating does not planarize a plurality of designed features or a surface with topography.

Throughout this disclosure, the term "polar organometallic" refers to compounds having at least one metal (e.g., alkali, alkaline earth, transition, and semiconductor metals) and an organic moiety having at least one polar functional group.

Throughout this disclosure, the term "organometallic" refers to a compound that contains at least one bond between a carbon atom of an organic compound and a metal (including transition metals and semiconductor metals).

Detailed Description

The present disclosure relates to abrasive articles that may be used in a variety of abrasive applications. The abrasive articles of the present disclosure exhibit particular utility as elements of an abrasive pad dresser or segmented abrasive pad dresser, and can be used in a variety of CMP applications. The abrasive articles of the present disclosure exhibit unique anti-soiling and/or cleaning characteristics associated with a hydrophilic surface positioned adjacent to the abrasive surface of the body of the abrasive article. HydrophilicThe polar surface is the result of one or more conformable coatings applied to the abrasive surface of the abrasive article body. The hydrophilic surface can be associated with a polar organometallic coating applied adjacent to the abrasive surface of the abrasive article. The abrasive articles of the present disclosure include a ceramic body having an abrasive surface, i.e., a surface designed to abrade a substrate, and a polar organometallic coating adjacent to the abrasive surface. The ceramic body may have a mohs hardness of at least 7.5 and/or at least 1300kg/mm²Vickers hardness of (2). The polar organometallic coating can be a conformable coating that conforms to any designed feature on the abrasive surface or any coated designed feature on the abrasive surface. The polar organometallic coating can include a compound having at least one metal and an organic moiety having at least one polar functional group. The at least one metal may be at least one of Si, Ti, Zr, and Al. The polar organometallic coating can include an organometallic compound. The abrasive article can further include a metal oxide coating disposed between the abrasive surface of the ceramic body and the polar organometallic coating. The metal oxide coating can facilitate bonding of the polar organometallic coating to the ceramic body of the abrasive article. The metal oxide coating can also be hydrophilic and contribute to the hydrophilicity of the final abrasive surface (coated abrasive surface) of the abrasive article. The metal oxide coating may also improve the durability and shelf life of the hydrophilic coating compared to, for example, a plasma coating, such that the abrasive article is able to maintain its anti-fouling properties over a longer period of time. The metal oxide can be a conformable coating that conforms to any designed feature on the abrasive surface or any coated designed feature on the abrasive surface. The abrasive article may include an optional diamond coating disposed between the abrasive surface of the ceramic body and the polar organometallic coating. The abrasive article may include an optional diamond coating disposed between the abrasive surface of the ceramic body of the abrasive article and the metal oxide coating. The diamond coating may improve the chemical resistance, wear resistance, and/or strength of the abrasive surface of the ceramic body of the abrasive article, thereby facilitating a longer abrasive life of the abrasive article. The diamond coating may be conformable to an abrasive surfaceA designed feature (e.g., a plurality of designed features) on a face or a conformable coating of a coated designed feature on an abrasive surface. The surface of the diamond coating may be oxidized to facilitate bonding to the polar organometallic coating or metal oxide coating. If the surface of the diamond coating is oxidized, the oxidized surface may be considered a metal oxide coating herein, even though conventionally oxidized carbon would not be considered a metal oxide coating. The term "metal oxide" herein has its conventional meaning in the art, except that it comprises an oxidized diamond surface.

The abrasive article of the present disclosure includes a ceramic body having an abrasive surface and an opposing second surface; the abrasive surface includes a plurality of engineered features. The designed feature can be defined as having a base and a distal end opposite the base. The abrasive article includes at least one conformable polar organometallic coating, and the polar organometallic coating can include a compound having at least one metal and an organic moiety having at least one polar functional group. The at least one metal may be at least one of Si, Ti, Zr, and Al. The polar organometallic coating is adjacent to the abrasive surface of the ceramic body. The abrasive article can further include a metal oxide coating, for example, a conformable metal oxide coating disposed between the abrasive surface of the ceramic body and the at least one conformable polar organometallic coating. The abrasive article may also include an optional diamond coating, for example, a conformable diamond coating. In some embodiments, a diamond coating may be disposed between the abrasive surface of the ceramic body and the at least one conformable polar organometallic coating. In some embodiments, a diamond coating may be disposed between the abrasive surface of the ceramic body and the metal oxide coating. Combinations comprising all three coatings may also be used. In some embodiments, the surface of the diamond coating may be oxidized and may include oxygen.

The conformable polar organometallic coating can include a compound having at least one metal and an organic moiety having at least one polar functional group. The at least one polar functional group of the organic moiety includes, but is not limited to, at least one of hydroxyl, acid (e.g., carboxylic acid), primary amine, secondary amine, tertiary amine, methoxy, ethoxy, propoxy, ketone, cationic, and anionic functional groups. In some embodiments, the at least one polar functional group comprises at least one of a cationic functional group and an anionic functional group. In some embodiments, the at least one polar functional group includes at least one cationic functional group and one anionic functional group, such as a zwitterion. In some embodiments, the conformable polar organometallic coating can include a compound having at least one metal and an organic moiety having at least two polar functional groups. In some embodiments, the at least two polar functional groups may be the same functional group. In some embodiments, the at least two polar functional groups may be different functional groups. In some embodiments, the conformable polar organometallic coating can be an organosilane including, but not limited to, at least one of an organochlorosilane, an organosilane alcohol, and an alkoxysilane, i.e., the compound having at least one metal and an organic moiety having at least one polar functional group can be an organosilane including, but not limited to, at least one of an organochlorosilane, an organosilane alcohol, and an alkoxysilane. Useful organosilanes include, but are not limited to, at least one of n-trimethoxysilylpropyl-n, n, n-trimethylammonium chloride, n- (trimethoxysilylpropyl) ethylenediaminetriacetic acid trisodium salt, carboxyethylsilanetriol disodium salt, 3- (trihydroxysilyl) -1-propanesulfonic acid, and n- (3-triethoxysilylpropyl) glucamide. The conformable polar organometallic coating can further include at least one of lithium silicate, sodium silicate, and potassium silicate.

Particularly useful conformable polar organometallic coatings can include zwitterionic silanes. Zwitterionic silanes are neutral compounds with opposite sign charges in the molecule, as described by http:// goldbook. iupac. org/z06752. html. Such compounds provide easy-to-clean properties to the coating.

Suitable zwitterionic silanes include zwitterionic sulfonate-functionalized silanes, zwitterionic carboxylate-functionalized silanes, zwitterionic phosphate-functionalized silanes, zwitterionic phosphonate-functionalized silanes, or combinations thereof. In certain embodiments, the zwitterionic silane is a zwitterionic sulfonate-functionalized silane.

In certain embodiments, the zwitterionic silane compounds used in this disclosure have the following formula (I), wherein:

(R¹O)_p-Si(Q¹)_q-W-N⁺(R²)(R³)-(CH₂)_m-Z^t-

(I)

wherein:

each R¹Independently hydrogen, a methyl group or an ethyl group;

each Q¹Independently selected from the group consisting of a hydroxyl group, an alkyl group containing 1 to 4 carbon atoms, and an alkoxy group containing 1 to 4 carbon atoms;

each R²And R³A linear, branched, or cyclic organic group (preferably having 20 carbon atoms or less) that is independently saturated or unsaturated, which may optionally be joined together with atoms of the group W to form a ring;

w is an organic linking group;

Z^t-is-SO₃ ^-、–CO₂ ^-、–OPO₃ ^2-、–PO₃ ^2-、–OP(＝O)(R)O^-Or a combination thereof, wherein t is 1 or 2, and R is an aliphatic, aromatic, branched, linear, cyclic, or heterocyclic group (preferably having 20 or less carbons, more preferably R is an aliphatic group having 20 or less carbons, and even more preferably R is methyl, ethyl, propyl, or butyl);

p and m are integers from 1 to 10 (or 1 to 4, or 1 to 3);

q is 0 or 1; and

p+q＝3。

in certain embodiments, the organic linking group W of formula (I) may be selected from saturated or unsaturated, linear, branched, or cyclic organic groups. The linking group W is preferably an alkylene group, which may include carbonyl groups, urethane groups, urea groups, heteroatoms (such as oxygen, nitrogen, and sulfur), and combinations thereof. Examples of suitable linking groups W include alkylene groups, cycloalkylene groups, alkyl-substituted cycloalkylene groups, hydroxyl-substituted alkylene groups, hydroxyl-substituted monooxaalkylene groups, divalent hydrocarbon groups with an oxa-backbone substitution, divalent hydrocarbon groups with a mono-thia-backbone substitution, divalent hydrocarbon groups with an oxa-thia-backbone substitution, divalent hydrocarbon groups with a dioxo-thia-backbone substitution, arylene groups, arylalkylene groups, alkylarylene groups, and substituted alkylarylene groups.

Suitable examples of zwitterionic compounds of formula (I) are described in U.S. Pat. No.5,936,703(Miyazaki et al) and International publication Nos. WO 2007/146680 and WO 2009/119690, and include the following zwitterionic functional groups (-W-N)⁺(R³)(R⁴)-(CH₂)_m-SO₃ ^-)：

In certain embodiments, the zwitterionic sulfonate-functionalized silane compounds used in the present disclosure have the following formula (II), wherein:

(R¹O)_p-Si(Q¹)_q-CH₂CH₂CH₂-N⁺(CH₃)₂-(CH₂)_m-SO₃ ^-

(II)

wherein:

each R¹Independently hydrogen, a methyl group or an ethyl group;

each Q¹Independently selected from the group consisting of a hydroxyl group, an alkyl group containing 1 to 4 carbon atoms, and an alkoxy group containing 1 to 4 carbon atoms;

p and m are integers from 1 to 4;

q is 0 or 1; and is

p+q＝3。

Suitable examples of zwitterionic sulfonate-functionalized compounds of formula (II) are described in U.S. patent 5,936,703(Miyazaki et al), including, for example:

(CH₃O)₃Si-CH₂CH₂CH₂-N⁺(CH₃)₂-CH₂CH₂CH₂-SO₃ ^-(ii) a And

(CH₃CH₂O)₂Si(CH₃)-CH₂CH₂CH₂-N⁺(CH₃)₂-CH₂CH₂CH₂-SO₃ ^-。

other examples of suitable zwitterionic sulfonate-functionalized compounds that can be prepared using standard techniques include the following:

and

preferred examples of suitable zwitterionic sulfonate-functionalized silane compounds for use in the present disclosure are described in the experimental section. Particularly preferred zwitterionic sulfonate-functionalized silanes are:

examples of zwitterionic carboxylate-functionalized silane compounds include:

wherein each R is independently OH or alkoxy and n is 1-10.

Examples of zwitterionic phosphate-functionalized silane compounds include:

(N, N-dimethyl, N- (2-phosphoethyl) -aminopropyl-trimethoxysilane (DMPAMS)).

Examples of zwitterionic phosphonate-functionalized silane compounds include:

in some embodiments, the conformable polar organometallic coating of the present disclosure comprises the zwitterionic silane compound in an amount of at least 0.0001 weight percent (wt%), or at least 0.001 wt%, or at least 0.01 wt%, or at least 0.05 wt%, based on the total weight of the ready-to-use composition. In some embodiments, the compositions of the present disclosure comprise the zwitterionic silane compound in an amount of up to 10 wt.%, or up to 5 wt.%, or up to 2 wt.%, based on the total weight of the ready-to-use composition.

In some embodiments, the conformable polar organometallic coatings of the present disclosure comprise a zwitterionic silane compound in an amount of at least 0.0001 weight percent (wt%), or at least 0.001 wt%, or at least 0.01 wt%, or at least 0.1 wt%, or at least 0.5 wt%, based on the total weight of the concentrated composition. In some embodiments, the compositions of the present disclosure comprise a zwitterionic silane compound in an amount of up to 20 weight percent, or up to 15 weight percent, or up to 10 weight percent, based on the total weight of the concentrated composition.

The metal of the conformable metal oxide coating can include at least one of an alkali metal, an alkaline earth metal, a transition metal, and a semiconductor metal. The semiconductor metal includes Si, Ga, and the like. In some embodiments, the metal of the metal oxide comprises at least one of Al, Ti, Cr, Mg, Mn, Fe, Co, Ni, Cu, W, Zn, Zr, Ga, and Si. Various combinations may be used.

In some embodiments, the abrasive article includes a conformable metal oxide coating adjacent to and conforming to a plurality of three-dimensional features, e.g., a plurality of engineered features, wherein the conformable metal oxide coating includes a first surface; and a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating. The conformable polar organometallic coating includes a compound having at least one metal and an organic moiety having at least one polar functional group. The conformable metal oxide coating can be in contact with a plurality of three-dimensional features of a ceramic body of the abrasive article. In some embodiments, the water contact angle on the conformable polar organometallic coating of the abrasive article is less than 30 degrees, less than 20 degrees, less than 10 degrees, less than 5 degrees, or even less than 2 degrees. In some embodiments, the water contact angle on the conformable polar organometallic coating of the abrasive article is between 0 degrees to 30 degrees, between 0 degrees to 20 degrees, between 0 degrees to 10 degrees, between 0 degrees to 5 degrees, or even between 0 degrees to 1.5 degrees. The compound having at least one metal and an organic moiety having at least one polar functional group can be an organosilane, and the conformable polar organometallic coating can include a reaction product of the organosilane and a metal oxide of the conformable metal oxide coating. In some embodiments, the metal of the metal oxide can include Si, the organosilane of the conformable polar organometallic coating can include an alkoxysilane, and the at least one polar functional group of the conformable polar organometallic coating can include at least one of a cationic functional group and an anionic functional group. The abrasive article can include an optional conformable diamond coating disposed between the abrasive surface of the ceramic body of the abrasive article and the conformable metal oxide coating.

The ceramic body of the abrasive article may have a mohs hardness of at least 7.5, at least 8, or even at least 9 and/or at least 1300kg/mm²At least 1500kg/mm²At least 2000kg/mm²Or even at least 3000kg/mm²Vickers hardness of (2). In some embodiments, the ceramic body has a mohs hardness between 7.5 and 10, between 8 and 10, or even between 9 and 10 and/or between 1300kg/mm²And 10000kg/mm²Between 1300kg/mm²And 4000kg/mm²Between 1300kg/mm²And 3000kg/mm²Between 1500kg/mm²And 10000kg/mm²Between 1500kg/mm²And 4000kg/mm²Between or even between 1300kg/mm²And 3000kg/mm²Vickers hardness in between. Generally, it has a high Mohs hardness (at least about 7.5) and/or Vickers hardness (at least about 1300 kg/mm)²) The abrasive articles of (a) have particular utility because they are capable of withstanding the abrasive action that occurs during the abrading process and/or the typically harsh chemical environment present in, for example, CMP applications.

The ceramic body may be a carbide ceramic body comprising 99% by weight of a carbide ceramic, optionally the carbide ceramic body may comprise 99% by weight of a silicon carbide ceramic. The ceramic body may be a monolithic ceramic body. A monolithic ceramic body is a body consisting essentially of a ceramic that is composed of and has a continuous ceramic structure throughout, e.g., a continuous ceramic morphology throughout. The ceramic morphology may be a single phase. Monolithic ceramics are typically designed to erode very slowly, preferably not at all, and do not contain abrasive particles that can be released from the monolithic ceramic. Monolithic ceramics are not abrasive composites commonly used in the abrasive art. The abrasive composites include a binder (e.g., a polymeric binder) and a plurality of abrasive particles dispersed within the binder. The abrasive composites have at least a two-phase morphology, i.e., a continuous binder or matrix phase and a discontinuous abrasive particle phase. The binder may be referred to as a "binder matrix" or "matrix". In contrast to monolithic ceramics, abrasive composites, particularly those having multiple three-dimensional structures (e.g., engineered features), function through erosion of the binder, which results in exposure of new abrasive particles, while worn abrasive particles are released from the composite.

In one embodiment, the present disclosure provides an abrasive article comprising: a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of engineered features, each engineered feature comprising a plurality of groovesThe construct has a base and a distal end opposite the base, and the ceramic body has a hardness of at least 7.5 and/or at least 130kg/mm²Vickers hardness of (2);

a conformable metal oxide coating adjacent to and conformable to the plurality of designed features, wherein the conformable metal oxide coating comprises a first surface; and

a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organometallic coating comprises a compound having at least one metal and an organic moiety having at least one polar functional group. In some embodiments, the at least one metal is at least one of Si, Ti, Zr, and Al.

Fig. 1A is a schematic top view of at least a portion of an exemplary abrasive article according to an exemplary embodiment of the present disclosure, and fig. 1B is a schematic cross-sectional view of the exemplary abrasive article of fig. 1A through line 1B according to an exemplary embodiment of the present disclosure. Fig. 1A and 1B illustrate at least a portion of an abrasive article 100 comprising a ceramic body 10 having an abrasive surface 10a and an opposing second surface 10B, wherein the abrasive surface 10a of the ceramic body comprises a plurality of designed features 20, each designed feature having a base 20B and a distal end 20a opposite the base. As shown in fig. 1A, at least a portion of abrasive article 100 has a projected surface area equal to the area of the great circle defining the perimeter of abrasive article 100. Abrasive article 100 further includes a conformable metal oxide coating 30 adjacent to and conformable to the plurality of designed features 20 (where the conformable metal oxide coating 30 includes a first surface 30a), and a conformable polar organometallic coating 40 in contact with the first surface 30a of the conformable metal oxide coating 30. The conformable polar organometallic coating 40 can include a compound having at least one metal (e.g., at least one of Si, Ti, Zr, and Al) and an organic moiety having at least one polar functional group. Abrasive article 100 may optionally include a conformable diamond coating 50 disposed between abrasive surface 10a of ceramic body 10 and conformable metal oxide coating 40. The diamond coating (if used) may be in contact with the abrasive surface 10a of the ceramic body 10. In some embodiments, the metal oxide coating 30 is adjacent to and in contact with the abrasive surface 10a of the ceramic body 10. In some embodiments, the metal oxide coating 30 is adjacent to and in contact with the conformable diamond coating 50. In this exemplary embodiment, the plurality of designed features 20 have a quadrilateral pyramid shape, wherein the apex of the quadrilateral pyramid corresponds to the distal end 20a of the plurality of designed features 20 and the base of the quadrilateral pyramid corresponds to the base 20b of the plurality of three-dimensional features. The designed features each have a length L, a width W, and a height H. If each designed feature has a different length, width, and height, the average of the length, width, and height may be used to characterize multiple designed features. If the base of the designed feature has a circular cross-sectional area, the radius of the circle may be used to define the designed feature.

The ceramic body of the abrasive article includes an abrasive surface. The abrasive surface includes a plurality of engineered features.

The areal density of the plurality of designed features is not particularly limited. In some embodiments, the plurality of designed features can have an areal density of 0.5/cm²To 1X 10⁷/cm²，0.5/cm²To 1X 10⁶/cm²，0.5/cm²To 1X 10⁵/cm²，0.5/cm²To 1X 10⁴/cm²，0.5/cm²To 1X 10³/cm²，1/cm²To 1X 10⁷/cm²，1/cm²To 1X 10⁶/cm²，1/cm²To 1X 10⁵/cm²，1/cm²To 1X 10⁴/cm²，1/cm²To 1X 10³/cm²，10/cm²To 1X 10⁷/cm²，10/cm²To 1X 10⁶/cm²，10/cm²To 1X 10⁵/cm²，10/cm²To 1X 10⁴/cm²Or even 10/cm²To 1X 10³/cm². In some embodiments, at least one of the dimensions (e.g., length, width, height, diameter) of each of the individual designed features can be 1 micron to 2000 microns, 1 micron to 1000 microns, 1 micron to 750 microns, 1 micron to 500 microns, 10 microns to 2000 microns, 10 microns to 1000 microns, 10 microns to 750 microns, 10 microns to 500 microns, 25 microns to 2000 microns, 25 microns to 1000 microns, 25 microns to 750 microns, or even 25 microns to 500 microns.

The ceramic body and its corresponding plurality of designed features may be formed by at least one of machining, micromachining, microreplication, molding, extrusion, injection molding, ceramic pressing, or the like, such that the plurality of designed features are machined and reproducible from part to part and within the part, reflecting the ability to replicate the design. The plurality of designed features may be formed by mechanical techniques including, but not limited to, conventional machining such as sawing, boring, drilling, turning, and the like. Laser cutting; water jet cutting, and the like. The plurality of engineered features may be formed by microreplication techniques known in the art.

The shape of the plurality of designed features is not particularly limited and may include, but is not limited to; a cylindrical shape; an elliptic cylinder shape; polygonal prisms such as pentagonal prisms, hexagonal prisms, and octagonal prisms; tapered and truncated pyramids, wherein the tapered shape may comprise, for example, 3 to 12 sidewalls; cubic, such as a cube or cuboid; conical and frusto-conical; annular, etc. Combinations of two or more different shapes may be used. The plurality of designed features may be random or patterned, such as a square array, a hexagonal array, or the like. Additional shapes and patterns of designed features can be found in U.S. patent application publication 2017/0008143(Minami et al), which is incorporated herein by reference in its entirety.

When molding or stamping is used to form a plurality of designed features, the mold or stamping tool has at least one predetermined array or pattern of specified shapes on its surface that is the inverse of the predetermined array or pattern of designed features and the specified shapes of the ceramic body. The mold may be formed of a metal, ceramic, cermet, composite, or polymeric material. In one embodiment, the mold is a polymeric material such as polypropylene. In another embodiment, the mold is nickel. Molds made of metal can be made by engraving, micromachining or other mechanical means such as diamond turning, or by electroforming. One preferred method is electroforming. The mold may be formed by preparing a positive master mold having a predetermined array of designed features of abrasive elements and a specified shape. Then a mold having a surface topography inverse to the positive master mold is manufactured. The master and matrix molds can be made by direct machining techniques, such as diamond turning as disclosed in U.S. Pat. Nos. 5,152,917(Pieper et al) and 6,076,248(Hoopman et al), the disclosures of which are incorporated herein by reference in their entirety. These techniques are further described in U.S. patent 6,021,559(Smith), the disclosure of which is incorporated herein by reference in its entirety. Molds comprising, for example, thermoplastics can be made by replicating a metal master tool. The thermoplastic sheet material can optionally be heated with the metal master mold such that the thermoplastic material is embossed with the surface pattern presented by the metal master mold by pressing the two surfaces together. Thermoplastic materials can also be extruded or cast onto the metal master mold and then pressed. Other suitable methods of making the production tool and metal master are discussed in U.S. patent 5,435,816(Spurgeon et al), which is incorporated herein by reference in its entirety.

The ceramic body of the abrasive article may include a continuous ceramic phase. The ceramic body may be a sintered ceramic body. In some embodiments, the ceramic body may comprise less than 5 wt%, less than 3 wt%, less than 2 wt%, less than 1 wt%, less than 0.5 wt%, or even 0 wt% polymer. The ceramic body may comprise less than 5 wt%, less than 3 wt%, less than 2 wt%, less than 1 wt%, less than 0.5 wt% or even 0 wt% of organic material. The ceramic body may be a monolithic ceramic body. The ceramic of the ceramic body is not particularly limited, except that the ceramic body should have a mohs hardness of at least 7.5 and/orAt least 1300kg/mm²Vickers hardness of (2). The ceramic may include, but is not limited to, at least one of silicon carbide, silicon nitride, alumina, zirconia, tungsten carbide, and the like. Among them, silicon carbide and silicon nitride, and particularly silicon carbide, can be advantageously used from the viewpoint of strength, hardness, wear resistance, and the like. In some embodiments, the ceramic is a carbide ceramic comprising at least 70%, at least 80%, at least 90%, at least 95%, or even at least 99% by weight of the carbide ceramic. Useful carbide ceramics include, but are not limited to, at least one of silicon carbide, boron carbide, zirconium carbide, titanium carbide, and tungsten carbide. Various combinations may be used. The ceramic body of the abrasive article may be manufactured without the use of carbide formers and may be substantially free of oxide sintering aids. In one embodiment, the ceramic body of the abrasive article comprises less than about 1% by weight of an oxide sintering aid.

The fabrication of the ceramic body may be performed by machining or molding techniques of the preformed ceramic, e.g., microreplication. One particularly useful manufacturing technique is ceramic molding. In this technique, a ceramic powder precursor, typically formed from agglomerates (comprising ceramic particles, a polymeric binder, and optionally one or more other additives, such as a carbon source or lubricant), is placed in a mold having a desired body size and surface with counter-cavities of desired designed features (including their appropriate size, shape, and pattern). Once in the mold, the ceramic powder precursor is compressed under high pressure to densify the powder and force the powder into the mold cavity. This first step of the method produces a molded green ceramic that is removable from the mold. The green ceramic is then sintered at high temperature to remove the polymeric binder and further densify the body, thereby forming a ceramic body, i.e., a sintered ceramic body having a plurality of designed features. In one embodiment, the green ceramic element is heated during the binder and carbon source (if present) pyrolization step in an oxygen-deficient atmosphere at a temperature range between 300 ℃ and 900 ℃, thereby forming a ceramic body having an abrasive surface herein, the abrasive surface of the body comprising a plurality of engineered features. In one embodiment, the green ceramic element is sintered in an oxygen-deficient atmosphere at a temperature in a range between 1900 ℃ and about 2300 ℃ to form a ceramic body having an abrasive surface therein comprising a plurality of engineered features. The ceramic powder precursor may be an agglomerate, such as a spray dried agglomerate. The ceramic dry pressing technique is disclosed in U.S. patent application publication 2017/0008143(Minami et al), which has previously been incorporated by reference herein in its entirety. The ceramic body may be cleaned by conventional techniques prior to applying one or more of the conformable coatings.

The abrasive article includes at least one conformable coating. The at least one conformable coating includes a conformable polar organometallic coating comprising a compound having at least one metal (e.g., at least one of Si, Ti, Zr, and Al) and an organic moiety having at least one polar functional group. The abrasive article can further include a conformable metal oxide coating disposed between the abrasive surface of the ceramic body of the abrasive article and the at least one conformable polar organometallic coating. The metal oxide coating may be in contact with the abrasive surface of the ceramic body. The at least one conformable polar organometallic coating can be in contact with the conformable metal oxide coating (i.e., the exposed surface of the metal oxide coating). The abrasive article may include an optional conformable diamond coating. The diamond coating may be in contact with the abrasive surface of the ceramic body of the abrasive article. The conformable metal oxide coating may be in contact with the diamond coating (i.e., the exposed surface of the diamond coating). The at least one conformable polar organometallic coating can be in contact with the conformable diamond coating (i.e., the exposed surface of the diamond coating) if the conformable metal oxide coating is not present. The conformable diamond coating may include an oxidized surface containing oxygen. A combination of a conformable polar organometallic coating with a conformable metal oxide coating or a conformable diamond coating may be used. Combinations of all three coatings may be used, i.e., a conformable polar organometallic coating, a conformable metal oxide coating, and a conformable diamond coating. For example, in one embodiment, the abrasive surface of the ceramic body may be first coated with a conformable metal oxide coating, such as diamond-like glass (DLG). The metal oxide coating is adjacent to and in contact with a plurality of engineered features of the abrasive surface of the ceramic body. The DLG coating has an exposed first surface that can be coated with a conformable polar organometallic coating comprising a compound having at least one metal and an organic moiety having at least one polar functional group, such as a conformable hydrophilic coating. The conformable polar organometallic coating is adjacent to and in contact with the first surface of the metal oxide coating. In some embodiments, the metal oxide coating may be a diamond coating, wherein the surface of the diamond coating has been oxidized and comprises oxygen. In another embodiment, the abrasive surface of the ceramic body may be first coated with a conformable diamond coating. The diamond coating is adjacent to and in contact with a plurality of engineered features of the abrasive surface of the ceramic body. A conformable metal oxide coating, such as diamond-like glass (DLG), can then be coated on the exposed surface of the conformable diamond coating. The conformable metal oxide coating is adjacent to and in contact with the conformable diamond coating. An additional conformable polar organometallic coating (e.g., a conformable hydrophilic coating) comprising a compound having at least one metal and an organic moiety having at least one polar functional group can then be coated on the exposed surface of the conformable metal oxide coating. The conformable polar organometallic coating is in contact with the exposed surface of the conformable metal oxide coating.

The conformable diamond coating may include at least one of a conformable nanocrystalline diamond coating, a conformable microcrystalline diamond coating, and a conformable Diamond Like Carbon (DLC) coating. The thickness of the conformable diamond coating is not particularly limited. In some embodiments, the diamond coating has a thickness of 0.5 to 30 microns, 1 to 30 microns, 5 to 30 microns, 0.5 to 20 microns, 1 to 20 microns, 5 to 20 microns, 0.5 to 15 microns, 1 to 15 microns, or even 5 to 15 microns. The conformable diamond coating may be, for example, a diamond like carbon coating (DLC). In some embodiments, carbon atoms are present in an amount of 40 to 95 atomic%, 40 to 98 atomic%, 40 to 99 atomic%, 50 to 95 atomic%, 50 to 98 atomic%, 50 to 99 atomic%, 60 to 95 atomic%, 60 to 98 atomic% or even 60 to 99 atomic%, based on the total composition of the DLC. The diamond coating may be deposited on a surface, for example an abrasive surface of a ceramic body, by conventional techniques such as Plasma Enhanced Chemical Vapor Deposition (PECVD) methods, Hot Wire Chemical Vapor Deposition (HWCVD) methods, ion beam, laser ablation, RF plasma, ultrasound, arc discharge, cathodic arc plasma deposition, using a gaseous carbon source such as methane or a solid carbon source such as graphite and hydrogen gas as desired. In some embodiments, diamond coatings with high crystallinity may be produced by HWCVD.

The conformable metal oxide coating comprises at least one metal oxide such as aluminum oxide, titanium oxide, chromium oxide, magnesium oxide, manganese oxide, iron oxide, cobalt oxide, nickel oxide, copper oxide, tungsten oxide, zinc oxide, silicon oxide, and the like. Combinations of metal oxides, including alloys, may be used. The metal of the conformable metal oxide coating can include at least one of a transition metal and a semiconductor metal. The metal of the metal oxide may include at least one of Al, Ti, Cr, Mg, Mn, Fe, Co, Ni, Cu, W, Zn, and Si. Combinations of metals may be used. Additionally, the conformable metal oxide coating may be a diamond coating having an oxidized surface containing oxygen. The conformable metal oxide coating can include Diamond Like Glass (DLG). The term "diamond-like glass" (DLG) refers to a substantially or completely amorphous glass comprising carbon, silicon and oxygen, and optionally comprising one or more additional components selected from the group comprising hydrogen, nitrogen, fluorine, sulfur, titanium and copper. Other elements may be present in certain embodiments. In some embodiments, the metal oxide coating does not contain fluorine. In some embodiments, the DLG comprises 80% to 100%, 90% to 100%, 95% to 100%, 98% to 100%, or even 99% to 100% of carbon, silicon, oxygen, and hydrogen, based on the molar basis of the DLG composition. In some embodiments, the DLG comprises 80% to 100%, 90% to 100%, 95% to 100%, 98% to 100%, or even 99% to 100% carbon, silicon, and oxygen, based on the molar basis of the DLG composition. The amorphous diamond-like glass coating of the present disclosure may comprise atomic clustering to impart short-range order thereto but substantially no mid-range and long-range order resulting in micro-or macro-crystallinity that may disadvantageously disperse radiation having wavelengths from 180nm to 800 nm. The term "amorphous" refers to a substantially random arrangement of amorphous material having no X-ray diffraction peaks or having modest X-ray diffraction peaks. When present, atomic clusters typically occur in a small dimension compared to the wavelength of the actinic radiation. Useful diamond-like glass coatings and methods for making the same can be found, for example, in U.S. Pat. No. 6,696,157(David et al), which is incorporated herein by reference in its entirety. The metal oxide coating may be formed by conventional techniques including, but not limited to, physical vapor deposition, chemical vapor deposition, Plasma Enhanced Chemical Vapor Deposition (PECVD), reactive ion etching, and atomic layer deposition. The thickness of the conformable metal oxide coating is not particularly limited. In some embodiments, the metal oxide coating has a thickness of 0.5 to 30 microns, 1 to 30 microns, 5 to 30 microns, 0.5 to 20 microns, 1 to 20 microns, 5 to 20 microns, 0.5 to 15 microns, 1 to 15 microns, or even 15 to 15 microns.

The metal oxide coating can act as a "tie layer" to improve adhesion between the abrasive surface of the ceramic body and the hydrophilic coating (i.e., the conformable polar organometallic coating). The metal oxide coating may also serve as a "tie layer" to improve adhesion between the conformable diamond coating and the conformable polar organometallic coating of the ceramic body. The metal oxide coating can also contribute to the hydrophilicity of the exposed surface of the coated abrasive article.

The abrasive articles of the present disclosure also include a conformable polar organometallic coating comprising a compound having at least one metal (e.g., at least one of Si, Ti, Zr, and Al) and an organic moiety having at least one polar functional group. The conformable polar organometallic coating can be a hydrophilic coating. The conformable polar organometallic coating can comprise the reaction product of a coupling agent and/or a coupling agent and a metal oxide surface, e.g., a metal oxide coating, i.e., a compound having at least one metal and an organic moiety having at least one polar functional group can be the reaction product of a coupling agent and/or a coupling agent and a metal oxide surface, e.g., a metal oxide coating. While not wishing to be bound by theory, the coupling agent (e.g., alkoxysilane) may hydrolyze in the presence of moisture to form a silanol, whose hydroxyl groups may further react with the surface of the metal oxide, which itself will typically have hydroxyl groups, through a condensation mechanism. The condensation reaction will result in the formation of M-O-Si bonds and water, where M is the metal of the metal oxide surface. Coupling agents known in the art may be used, including but not limited to at least one of silane coupling agents, titanate coupling agents, zirconate coupling agents, and aluminate coupling agents. Combinations of coupling agents may be used. The mixture may comprise a mixture of different coupling agents of the same type, for example a mixture of two or more different silane coupling agents, or a mixture of two or more different coupling agent types, for example a mixture of a silane coupling agent and a titanate coupling agent. The conformable polar organometallic coating can comprise an organosilane, and the conformable polar organometallic coating formed therefrom can comprise a reaction product of the organosilane and a metal oxide of the conformable metal oxide coating, i.e., the compound having at least one metal and an organic moiety having at least one polar functional group can be an organosilane, and the conformable polar organometallic coating formed therefrom can comprise a reaction product of the organosilane and a metal oxide of the conformable metal oxide coating. Useful organosilanes include, but are not limited to, at least one of organochlorosilanes, organosilane alcohols, and alkoxysilanes. The at least one polar functional group includes, but is not limited to, at least one of hydroxyl, acid (e.g., carboxylic acid), primary amine, secondary amine, tertiary amine, methoxy, ethoxy, propoxy, ketone, cationic, and anionic functional groups. In some embodiments, the organic moiety having at least one polar functional group may comprise at least two, at least three, at least four, at least five, or even at least six polar functional groups. In some embodiments, the organic moiety having at least one polar functional group may comprise one to three, one to four, one to six, one to eight, one to ten, two to three, two to four, two to six, two to eight, or even two to ten polar functional groups. In some embodiments, the conformable polar organometallic coating includes a compound having at least one metal (e.g., at least one of Si, Ti, Zr, and Al) and an organic moiety having at least two polar functional groups. If the organic moiety comprises at least two polar functional groups, the at least two polar functional groups may be the same functional group, e.g., both hydroxyl groups, or may be a combination of different functional groups, e.g., two hydroxyl groups and a primary amine group. In some embodiments, the at least one polar functional group comprises at least one of a cationic functional group and an anionic functional group. In some embodiments, the at least one polar functional group includes a cationic functional group and an anionic functional group, i.e., a zwitterionic silane as previously described. The at least one polar functional group provides the associated conformable coating with enhanced hydrophilicity. Conformable polar organometallic coatings, i.e., compounds having at least one metal and an organic moiety having at least one polar functional group, can include at least one of silane coupling agents, such as organosilanes, having particular utility, titanate coupling agents, zirconate coupling agents, and aluminate coupling agents.

The conformable polar organometallic coating comprising a compound having at least one metal and an organic moiety having at least one polar functional group can be applied to a substrate (e.g., a conformable metal oxide coating) in a solvent-free form, but is preferably applied from a solution thereof comprising a volatile solvent, such as a volatile organic solvent. Such solutions may comprise from 0.25 wt% to about 80 wt%, from about 0.25 wt% to about 10 wt%, or even from 0.25 wt% to 3 wt% of the compound, based on the total weight of the solution, with the remainder consisting essentially of a solvent or mixture of solvents. Examples of generally suitable solvents include, but are not limited to, water; alcohols such as methanol, ethanol and propanol; ketones such as acetone and methyl ethyl ketone; hydrocarbons such as hexane, cyclohexane, toluene, and the like; ethers, such as diethyl ether and tetrahydrofuran, and mixtures thereof. Water may be present if desired, for example to hydrolyze compounds having one or more hydrolyzable functional groups. Organic acids such as acetic acid may also be present if desired, for example to stabilize the silanol containing solution. After coating, the solvent is removed from the solution, leaving a conformable polar organometallic coating on the substrate that includes a compound having at least one metal and an organic moiety having at least one polar functional group. In some embodiments, the conformable polar organometallic may comprise 30 to 100 wt%, 40 to 100 wt%, 50 to 100 wt%, 60 to 100 wt%, 70 to 100 wt%, 80 to 100 wt%, 90 to 100 wt%, or even 95 to 100 wt% of a compound having at least one metal and an organic moiety having at least one polar functional group, based on the weight of the coating. The conformable polar organometallic coating can further include at least one of lithium silicate, sodium silicate, and potassium silicate. The silicate may be present in the coating from 1% to 70%, from 1% to 60%, from 1% to 50%, from 1% to 40% or even from 1% to 30% based on the weight of the coating.

In one embodiment, the abrasive article of the present disclosure may be made as follows:

providing a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of designed features each having a base and a distal end opposite the base, and the ceramic body has a mohs hardness of at least 7.5 and/or at least 1300kg/mm²Vickers hardness of (2);

disposing a conformable metal oxide coating adjacent to and conformable to the plurality of designed features, wherein the conformable metal oxide coating comprises a first surface;

disposing a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organometallic coating comprises a compound having at least one metal (e.g., at least one of Si, Ti, Zr, and Al) and an organic moiety having at least one polar functional group. In some embodiments, the conformable metal oxide coating is in contact with the abrasive surface of the ceramic body.

In another embodiment, the abrasive article of the present disclosure is made by:

providing a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of designed features each having a base and a distal end opposite the base, and the ceramic body has a mohs hardness of at least 7.5 and/or at least 1300kg/mm²Vickers hardness of (2);

disposing a conformable diamond coating adjacent to and conforming to the plurality of designed features, wherein the conformable diamond coating comprises an exposed surface;

disposing a conformable metal oxide coating adjacent to and in contact with the exposed surface of the diamond coating, wherein the conformable metal oxide coating comprises a first surface;

disposing a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organometallic coating comprises a compound having at least one metal (e.g., at least one of Si, Ti, Zr, and Al) and an organic moiety having at least one polar functional group. In some embodiments, the conformable diamond coating is in contact with the abrasive surface of the ceramic body.

The abrasive articles of the present disclosure may be particularly useful as abrasive pad conditioners for use in, for example, CMP applications. The abrasive article may be used in both full pad dressers and segmented pad dressers. A segmented polishing pad conditioner includes at least one polishing element attached to a substrate, the substrate generally having a larger projected surface area than the element. Thus, there are regions on the segmented polishing pad dresser surface that contain polishing surfaces and regions that do not contain polishing surfaces. In some embodiments, a full-face abrasive pad conditioner includes an abrasive article according to any of the present disclosure. The surface area of the overall abrasive pad conditioner may comprise 50% to 100%, 60% to 100%, 70% to 100%, 80% to 100%, or even 90% to 100% of the abrasive surface of an abrasive article according to the present disclosure. The segmented polishing pad dresser includes a substrate and at least one polishing element; the abrasive elements may be abrasive articles according to any of the abrasive articles of the present disclosure. Fig. 2 illustrates a schematic top view of a segmented polishing pad dresser of the present disclosure. The segmented polishing pad conditioner 200 includes a substrate 210 and an abrasive element 220 having an abrasive surface 220 a. In this exemplary embodiment, the segmented polishing pad conditioner 200 includes five polishing elements 220. The abrasive elements 220 can be any of the abrasive articles of the present disclosure. The substrate 210 is not particularly limited. The substrate 210 may be a rigid material, such as a metal. The substrate 210 may be stainless steel, such as a stainless steel plate. In some embodiments, the substrate 210 has an elastic modulus of at least 1GPa, at least 5GPa, or even at least 10 GPa. The abrasive elements 220 may be attached to the substrate 210 by any method known in the art, such as mechanically (e.g., with screws or bolts) or by adhesive (e.g., with an epoxy adhesive layer). It may be advantageous to have the abrasive surface 220a of the abrasive element 220 be substantially flat. A method of mounting an abrasive element to a substrate such that the flat abrasive surface of the abrasive element can be substantially flat is disclosed in U.S. patent publication 2015/0224625(LeHuu et al), which is incorporated herein by reference in its entirety.

Fig. 3 schematically illustrates an example of a polishing system 300 utilizing an abrasive article, according to some embodiments of the present disclosure. As shown, the polishing system 300 can include a polishing pad 350 having a polishing surface 350a and an abrasive pad dresser 310 having an abrasive surface. The abrasive pad conditioner includes at least one abrasive article according to any one of the abrasive articles of the present disclosure, wherein the abrasive surface of the abrasive pad conditioner includes a conformable polar organometallic coating of the at least one abrasive article. The system may also include one or more of the following: a working liquid 360, a platen 340, and a polishing pad conditioner carrier assembly 330, a cleaning liquid (not shown). The adhesive layer 370 can be used to attach the polishing pad 350 to the platen 340 and can be part of a polishing system. A substrate (not shown) to be polished on polishing pad 350 can also be part of polishing system 300. The working liquid 360 may be a solution layer disposed on the polishing surface 350a of the polishing pad 350. Polishing pad 350 can be any polishing pad known in the art. Polishing pad 350 comprises a material, i.e., it is made of a material. The material of the polishing pad can include a polymer, such as at least one of a thermoset polymer and a thermoplastic polymer. The thermoset polymer and the thermoplastic polymer may be polyurethane, i.e., the material of the polishing pad may be polyurethane. The working liquid is typically disposed on the surface of the polishing pad. The working fluid may also be located at the interface between the pad conditioner 310 and the polishing pad 350. During operation of the polishing system 300, the drive assembly 345 can rotate (arrow a) the platen 340 to move the polishing pad 350 to perform a polishing operation. Polishing pad 350 and polishing liquid 360, alone or in combination, can define a polishing environment that mechanically and/or chemically removes material from or polishes a major surface of a substrate to be polished. In order to abrade, i.e., modify, the polishing surface 350a with the polishing pad dresser 310, the carrier assembly 330 may press the polishing pad dresser 310 against the polishing surface 350a of the polishing pad 350 in the presence of the polishing slurry 360. The platen 340 (and thus the polishing pad 350) and/or the abrasive pad dresser carrier assembly 330 are then moved relative to each other to translate the abrasive pad dresser 310 across the polishing surface 350a of the polishing pad 350. The carrier assembly 330 may be rotated (arrow B) and optionally laterally traversed (arrow C). Thus, the abrasive layer of the pad conditioner 310 removes material from the polishing surface 350a of the polishing pad 350. It should be understood that the polishing system 300 of fig. 3 is merely one example of a polishing system that can be employed in connection with the abrasive articles of the present disclosure, and that other conventional polishing systems can be employed without departing from the scope of the present disclosure.

Selected embodiments of the present disclosure include, but are not limited to, the following:

in a first embodiment, the present disclosure provides an abrasive article comprising:

a ceramic body having an abrasive surface and an opposing second surface, wherein the abrasive surface of the ceramic body comprises a plurality of engineered features each having a base and a distal end opposite the base, and the ceramic body has a mohs hardness of at least 7.5;

a conformable metal oxide coating adjacent to and conformable to the plurality of designed features, wherein the conformable metal oxide coating comprises a first surface; and

a conformable polar organometallic coating in contact with the first surface of the conformable metal oxide coating, wherein the conformable polar organometallic coating comprises a compound having at least one metal and an organic moiety having at least one polar functional group.

In a second embodiment, the present disclosure provides an abrasive article according to the first embodiment, wherein the at least one metal of the conformable polar organometallic coating is at least one of Si, Ti, Zr, and Al.

In a third embodiment, the present disclosure provides an abrasive article according to the first or second embodiment, wherein the at least one polar functional group comprises at least one of a hydroxyl, an acid, a primary amine, a secondary amine, a tertiary amine, a methoxy, an ethoxy, a propoxy, a ketone, a cationic, and an anionic functional group.

In a fourth embodiment, the present disclosure provides an abrasive article according to any one of the first to third embodiments, wherein the at least one polar functional group comprises at least one of a cationic functional group and an anionic functional group.

In a fifth embodiment, the present disclosure provides an abrasive article according to any one of the first to fourth embodiments, wherein the at least one polar functional group comprises at least one cationic functional group and one anionic functional group.

In a sixth embodiment, the present disclosure provides an abrasive article according to any one of the first to fifth embodiments, wherein the compound is an organosilane, and wherein the conformable polar organometallic coating comprises a reaction product of the organosilane and a metal oxide of the conformable metal oxide coating.

In a seventh embodiment, the present disclosure provides an abrasive article according to the sixth embodiment, wherein the organosilane includes at least one of an organochlorosilane, an organosilane alcohol, and an alkoxysilane.

In an eighth embodiment, the present disclosure provides an abrasive article according to any one of the first to seventh embodiments, wherein the organosilane comprises an alkoxysilane.

In a ninth embodiment, the present disclosure provides the abrasive article of any one of the first to seventh embodiments, wherein the organosilane includes at least one of n-trimethoxysilylpropyl-n, n, n-trimethylammonium chloride, n- (trimethoxysilylpropyl) ethylenediaminetriacetic acid trisodium salt, carboxyethylsilanetriol disodium salt, 3- (trihydroxysilyl) -1-propanesulfonic acid, and n- (3-triethoxysilylpropyl) glucamide.

In a tenth embodiment, the present disclosure provides an abrasive article according to any one of the first to ninth embodiments, wherein the conformable polar organometallic coating further comprises at least one of lithium silicate, sodium silicate, and potassium silicate.

In an eleventh embodiment, the present disclosure provides the abrasive article of any one of the first to tenth embodiments, wherein the metal of the metal oxide comprises at least one of Al, Ti, Cr, Mg, Mn, Fe, Co, Ni, Cu, W, Zn, Zr, Ga, and Si.

In a twelfth embodiment, the present disclosure provides an abrasive article according to the fifth embodiment, wherein the metal of the metal oxide comprises Si and the organosilane comprises an alkoxysilane.

In a thirteenth embodiment, the present disclosure provides an abrasive article according to any one of the first to twelfth embodiments, wherein the water contact angle on the conformable polar organometallic coating is less than 30 degrees.

In a fourteenth embodiment, the present disclosure provides an abrasive article according to any one of the first to thirteenth embodiments, wherein the water contact angle on the conformable polar organometallic is between 0 degrees to 20 degrees.

In a fifteenth embodiment, the present disclosure provides an abrasive article according to any one of the first to fourteenth embodiments, further comprising a conformable diamond coating disposed between the abrasive surface of the ceramic body and the conformable metal oxide coating.

In a sixteenth embodiment, the present disclosure provides the abrasive article of any one of the first to fifteenth embodiments, wherein the ceramic body is a carbide ceramic body and comprises 99% carbide ceramic by weight.

In a seventeenth embodiment, the present disclosure provides the abrasive article of the sixteenth embodiment, wherein the carbide ceramic body comprises 99% by weight of the silicon carbide ceramic.

In an eighteenth embodiment, the present disclosure provides the abrasive article of the sixteenth or seventeenth embodiment, wherein the ceramic body is a monolithic ceramic body.

In a nineteenth embodiment, the present disclosure provides the abrasive article of any one of the first to eighteenth embodiments, wherein the plurality of engineered features are precisely-shaped features.

In a twentieth embodiment, the present disclosure provides a polishing system comprising:

a polishing pad comprising a material;

an abrasive pad conditioner having an abrasive surface, wherein the abrasive pad conditioner comprises at least one abrasive article according to any one of the first through nineteenth embodiments, wherein the abrasive surface of the abrasive pad conditioner comprises a conformable polar organometallic coating of the at least one abrasive article.

In a twenty-first embodiment, the present disclosure provides the polishing system of the twentieth embodiment, wherein the material of the polishing pad comprises polyurethane.

In a twenty-second embodiment, the present disclosure provides the polishing system of the twentieth or twenty-first embodiment, wherein the working liquid is an aqueous working liquid.

In a twenty-third embodiment, the present disclosure provides the polishing system of any one of the twentieth to twenty-second embodiments, further comprising a cleaning liquid.

In a twenty-fourth embodiment, the present disclosure provides the polishing system of the twenty-third embodiment, wherein the cleaning liquid is an aqueous cleaning liquid.