阅读说明：本技术 二维永磁阵列式磁悬浮重力补偿器 (Two-dimensional permanent magnet array type magnetic suspension gravity compensator ) 是由 张赫 寇宝泉 周立山 葛庆稳 曹广旭 于 2019-12-05 设计创作，主要内容包括：二维永磁阵列式磁悬浮重力补偿器,属于磁悬浮技术领域,本发明为解决大型载荷非接触支撑采用悬吊方式或气浮方式进行重力卸载,存在寄生力大、系统结构复杂的问题。本发明包括定子和动子,定子包括上层定子和下层定子,相互平行且固定连接的上层定子和下层定子之间设置动子,两层定子和动子之间存在垂向气隙；两层定子和动子均为N×N个矩形永磁体构成的二维阵列平板结构,每层平板结构中任意相邻两个永磁体之间存在间隔；永磁体充磁方向为垂向,每层平板结构中任意相邻两个永磁体的充磁方向相反；上层定子和下层定子相对位置永磁体的充磁方向相反；动子与上层定子相对位置永磁体的充磁方向相同。(The invention discloses a two-dimensional permanent magnet array type magnetic suspension gravity compensator, belongs to the technical field of magnetic suspension, and aims to solve the problems of large parasitic force and complex system structure in the gravity unloading of large-scale load non-contact support in a suspension mode or an air floatation mode. The invention comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator, the rotor is arranged between the upper layer stator and the lower layer stator which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two layers of stators and the rotor; the two layers of stators and the rotor are both of a two-dimensional array flat plate structure formed by N multiplied by N rectangular permanent magnets, and a space is reserved between any two adjacent permanent magnets in each layer of flat plate structure; the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the rotor and the upper-layer stator are the same.)

1. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator, the rotor is arranged between the upper layer stator and the lower layer stator which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two layers of stators and the rotor; the two layers of stators and the rotor are both of a two-dimensional array flat plate structure formed by N multiplied by N rectangular permanent magnets, and a space is reserved between any two adjacent permanent magnets in each layer of flat plate structure;

the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the rotor and the upper-layer stator are the same.

2. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the rotor comprises an upper rotor and a lower rotor, the stator is arranged between the upper rotor and the lower rotor which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two rotors and the stator; the two layers of rotors and the stators are of a two-dimensional array flat plate structure formed by N multiplied by N rectangular permanent magnets, and a space exists between any two adjacent permanent magnets in each layer of flat plate structure;

the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are opposite; the magnetizing directions of the permanent magnets at the relative positions of the stator and the lower rotor are the same.

3. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of rotors and the two layers of stators are two-dimensional array flat plate structures formed by NxN rectangular permanent magnets, an interval exists between any two adjacent permanent magnets in each layer of flat plate structure, and a vertical air gap exists between any two adjacent flat plate structures;

the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite;

the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are the same; the magnetizing directions of the permanent magnets at the relative positions of the two layers of rotors and the upper layer of stators are the same.

4. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of stators and the two layers of rotors are two-dimensional array flat plate structures formed by NxN rectangular permanent magnets, an interval exists between any two adjacent permanent magnets in each layer of flat plate structure, and a vertical air gap exists between any two adjacent flat plate structures;

the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite;

the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are the same; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are opposite; the magnetizing directions of the permanent magnets at the relative positions of the two layers of stators and the upper layer of rotor are the same.

5. The two-dimensional permanent magnet array type magnetic suspension gravity compensator according to claims 1 to 4, wherein the width of the stator permanent magnet is larger than, equal to or smaller than that of the rotor permanent magnet, and the permanent magnet at the relative position of the rotor and the stator is in a central symmetry position relationship or a horizontal offset position relationship taking the suspension force rigidity as the minimum design principle.

6. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator, the rotor is arranged between the upper layer stator and the lower layer stator which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two layers of stators and the rotor; the two layers of stators and the rotor are both of two-dimensional Halbach permanent magnet array flat plate structures;

the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the rotor and the upper-layer stator are the same.

7. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of rotors and the two layers of stators are two-dimensional Halbach permanent magnet array flat plate structures, and a vertical air gap exists between any two adjacent layers of flat plate structures;

the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are the same; the magnetizing directions of the permanent magnets at the relative positions of the two layers of rotors and the upper layer of stators are the same.

8. The two-dimensional permanent magnet array type magnetic suspension gravity compensator is characterized by comprising a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of rotors and the two layers of stators are two-dimensional Halbach permanent magnet array flat plate structures, and a vertical air gap exists between any two adjacent layers of flat plate structures;

the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are the same; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper-layer rotor and the upper-layer stator are the same.

9. The two-dimensional permanent magnet array type magnetic suspension gravity compensator according to claim 6, 7 or 8, wherein the two-dimensional Halbach permanent magnet array flat plate structure comprises N × N vertical magnetized rectangular permanent magnets and 2N (N-1) horizontal magnetized rectangular permanent magnets, a horizontal magnetized permanent magnet is arranged between any two adjacent vertical magnetized permanent magnets, the magnetizing direction of the horizontal magnetized permanent magnet is from one vertical magnetized permanent magnet to the other adjacent vertical magnetized permanent magnet, and the magnetizing directions of any two adjacent horizontal magnetized permanent magnets are opposite.

Technical Field

The invention belongs to the technical field of magnetic suspension.

Background

Currently, in some large precision instrumentation, non-contact support of critical components or payloads is required. Such as a metrology frame in a lithography machine, on the one hand, it is necessary to achieve effective isolation from external vibrations, and on the other hand, it is necessary to effectively support the entire metrology frame. For another example, the large space optical load needs to be verified by ground experiments before space launch, and the large space optical load needs to be gravity-unloaded. The traditional gravity unloading scheme adopts a suspension mode or an air floatation mode, has the defects of large parasitic force, complex system structure and the like, and the generated micro particles are not suitable for a vacuum environment.

Disclosure of Invention

The invention aims to solve the problems of large parasitic force and complex system structure in the gravity unloading of large-scale load non-contact support in a suspension mode or an air floatation mode, and provides a two-dimensional permanent magnet array type magnetic suspension gravity compensator.

The two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises seven technical schemes:

the first technical scheme is as follows: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator, the rotor is arranged between the upper layer stator and the lower layer stator which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two layers of stators and the rotor; the two layers of stators and the rotor are both of a two-dimensional array flat plate structure formed by N multiplied by N rectangular permanent magnets, and a space is reserved between any two adjacent permanent magnets in each layer of flat plate structure; the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the rotor and the upper-layer stator are the same.

The second technical scheme is as follows: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the rotor comprises an upper rotor and a lower rotor, the stator is arranged between the upper rotor and the lower rotor which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two rotors and the stator; the two layers of rotors and the stators are of a two-dimensional array flat plate structure formed by N multiplied by N rectangular permanent magnets, and a space exists between any two adjacent permanent magnets in each layer of flat plate structure; the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are opposite; the magnetizing directions of the permanent magnets at the relative positions of the stator and the lower rotor are the same.

The third technical scheme is as follows: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of rotors and the two layers of stators are both two-dimensional array flat plate structures formed by NXN rectangular permanent magnets, an interval exists between any two adjacent permanent magnets in each layer of flat plate structure, and a vertical air gap exists between any two adjacent flat plate structures; the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are the same; the magnetizing directions of the permanent magnets at the relative positions of the two layers of rotors and the upper layer of stators are the same.

The fourth technical proposal is as follows: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of stators and the two layers of rotors are both two-dimensional array flat plate structures formed by NXN rectangular permanent magnets, an interval exists between any two adjacent permanent magnets in each layer of flat plate structure, and a vertical air gap exists between any two adjacent flat plate structures; the magnetizing directions of the permanent magnets are vertical, and the magnetizing directions of any two adjacent permanent magnets in each layer of flat plate structure are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are the same; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are opposite; the magnetizing directions of the permanent magnets at the relative positions of the two layers of stators and the upper layer of rotor are the same.

Preferably, the width of the stator permanent magnet is larger than, equal to or smaller than that of the rotor permanent magnet, and the rotor and the permanent magnet at the relative position of the stator are in a centrosymmetric position relationship or in a horizontal offset position relationship taking the suspension force rigidity as the minimum design principle.

The fifth technical proposal: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator, the rotor is arranged between the upper layer stator and the lower layer stator which are parallel to each other and fixedly connected, and a vertical air gap is formed between the two layers of stators and the rotor; the two layers of stators and the rotor are both of two-dimensional Halbach permanent magnet array flat plate structures; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the rotor and the upper-layer stator are the same.

The sixth technical proposal: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of rotors and the two layers of stators are two-dimensional Halbach permanent magnet array flat plate structures, and a vertical air gap exists between any two adjacent flat plate structures; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are the same; the magnetizing directions of the permanent magnets at the relative positions of the two layers of rotors and the upper layer of stators are the same.

The seventh technical scheme is as follows: the two-dimensional permanent magnet array type magnetic suspension gravity compensator comprises a stator and a rotor, wherein the stator comprises an upper layer stator and a lower layer stator which are parallel to each other and fixedly connected with each other, the rotor comprises an upper layer rotor and a lower layer rotor which are parallel to each other and fixedly connected with each other, the two layers of rotors are arranged between the upper layer stator and the lower layer stator, the two layers of rotors and the two layers of stators are two-dimensional Halbach permanent magnet array flat plate structures, and a vertical air gap exists between any two adjacent flat plate structures; the magnetizing directions of the permanent magnets at the relative positions of the upper stator and the lower stator are the same; the magnetizing directions of the permanent magnets at the relative positions of the upper rotor and the lower rotor are opposite; the magnetizing directions of the permanent magnets at the relative positions of the upper-layer rotor and the upper-layer stator are the same.

Preferably, the two-dimensional Halbach permanent magnet array flat plate structure comprises N × N vertical magnetized rectangular permanent magnets and 2N (N-1) horizontal magnetized rectangular permanent magnets, a horizontal magnetized permanent magnet is arranged between any two adjacent vertical magnetized permanent magnets, the magnetizing direction of each horizontal magnetized permanent magnet is from one vertical magnetized permanent magnet to the other adjacent vertical magnetized permanent magnet, and the magnetizing directions of any two adjacent horizontal magnetized permanent magnets are opposite.

The invention has the beneficial effects that:

(1) the suspension force density is high by adopting a two-dimensional permanent magnet array type gravity compensation scheme; (2) the bilateral structure is adopted, acting forces of the upper stator and the lower stator on the middle rotor in the horizontal direction are mutually offset, and the lateral parasitic force of the device is small; (3) the two-dimensional permanent magnet array has various forms and large optimized space, and can realize lower suspension force rigidity by selecting reasonable structural schemes and size parameters, thereby being beneficial to improving the vibration isolation performance.

The compensator adopting the magnetic suspension technology has the characteristics of non-contact, no friction, no abrasion, no need of lubrication and the like, and can be widely applied to the fields of rail transit, magnetic suspension bearings, precise positioning platforms and the like. The passive suspension of the load is realized, the passive suspension device has the advantages of simple structure, easiness in realization, no loss and the like, and the six-degree-of-freedom stable suspension of the large-mass load can be realized by combining active control.

Drawings

FIG. 1 is a schematic perspective view of a compensator according to an embodiment;

FIG. 2 is a schematic structural diagram of a single-layer mover and single-layer stator compensator in a first embodiment;

FIG. 3 is a schematic diagram of the width relationship and relative positions of the stator permanent magnets and the mover permanent magnets;

FIG. 4 is a schematic structural diagram of a dual-layer mover compensator, where FIG. 4(a) shows the mover inside the stator and FIG. 4(b) shows the mover outside the stator;

FIG. 5 is a schematic diagram of the structure of FIG. 4(a) in which the mover permanent magnets are smaller in width than the stator permanent magnets;

FIG. 6 is a schematic diagram of the stator permanent magnet of FIG. 4(b) having a smaller width than the mover permanent magnet;

FIG. 7 is a two-dimensional Halbach permanent magnet array;

FIG. 8 is a schematic structural diagram of a single-layer rotor structure and a double-layer rotor compensator corresponding to a two-dimensional Halbach permanent magnet array;

fig. 9 is a schematic diagram of other two-dimensional permanent magnet array compensator structures.

Detailed Description

The following detailed description of the embodiments of the present invention will be provided with reference to the drawings and examples, so that how to apply the technical means to solve the technical problems and achieve the technical effects can be fully understood and implemented. It should be noted that, as long as there is no conflict, the embodiments and the features of the embodiments of the present invention may be combined with each other, and the technical solutions formed are within the scope of the present invention.

The embodiment adopts a two-dimensional permanent magnet array type gravity compensation scheme, and the suspension force density is high; the bilateral structure is adopted, acting forces of the upper stator and the lower stator on the middle rotor in the horizontal direction are mutually offset, and the lateral parasitic force of the device is small; the two-dimensional permanent magnet array has various forms and large optimized space, and can realize lower suspension force rigidity by selecting reasonable structural schemes and size parameters, thereby being beneficial to improving the vibration isolation performance.