阅读说明：本技术 一种微焦点x射线源封装结构 (Micro-focus X-ray source packaging structure ) 是由 张伟 刘骏 王刘成 仇小军 于 2021-06-25 设计创作，主要内容包括：本发明涉及X射线管技术领域,尤其是一种微焦点X射线源封装结构,包括环氧模块、金属封板和胀缩气囊,环氧模块的一端开设有第一腔体和第二腔体,金属封板上开设有与第一腔体口和第二腔体口相适配的孔,金属封板密封压装在环氧模块的端部,X射线管穿过金属封板进入第一腔体内并与金属封板密封连接,胀缩气囊穿过金属封板进入第二腔体内并与金属封板密封连接,金属封板朝向环氧模块的一侧设有凹槽,第一腔体和第二腔体通过凹槽连通,第一腔体和第二腔体内满灌绝缘油,本发明可以解决现有技术中微焦点X射线源封装后X射线管散热性能不佳,绝缘性能也较差的问题。(The invention relates to the technical field of X-ray tubes, in particular to a micro-focus X-ray source packaging structure which comprises an epoxy module, the X-ray tube comprises a metal sealing plate and an expansion air bag, wherein one end of an epoxy module is provided with a first cavity and a second cavity, the metal sealing plate is provided with a hole matched with the first cavity opening and the second cavity opening, the metal sealing plate is hermetically pressed at the end part of the epoxy module, the X-ray tube penetrates through the metal sealing plate to enter the first cavity and be hermetically connected with the metal sealing plate, the expansion air bag penetrates through the metal sealing plate to enter the second cavity and be hermetically connected with the metal sealing plate, one side of the metal sealing plate, facing the epoxy module, is provided with a groove, the first cavity and the second cavity are communicated through the groove, and the first cavity and the second cavity are filled with insulating oil.)

1. A micro-focus X-ray source packaging structure is characterized in that: comprises an epoxy module (1), a metal sealing plate (2) and an expansion air bag (3), one end of the epoxy module (1) is provided with a first cavity (11) and a second cavity (12), the metal sealing plate (2) is provided with holes matched with the first cavity (11) opening and the second cavity (12) opening, the metal sealing plate (2) is hermetically pressed at the end part of the epoxy module (1), the X-ray tube (4) penetrates through the metal sealing plate (2) to enter the first cavity (11) and is hermetically connected with the metal sealing plate (2), the expansion and contraction air bag (3) penetrates through the metal sealing plate (2) to enter the second cavity (12) and is hermetically connected with the metal sealing plate (2), a groove (22) is formed in one side, facing the epoxy module (1), of the metal sealing plate (2), the first cavity (11) is communicated with the second cavity (12) through the groove (22), and the first cavity (11) and the second cavity (12) are filled with insulating oil.

2. The microfocus X-ray source package structure according to claim 1, wherein: the two ends of the metal sealing plate (2) are provided with oil filling through holes (21), insulating oil is filled in the first cavity (11) and the second cavity (12) through the oil filling through holes (21), and the oil filling through holes (21) are sealed after the two cavities are filled with the oil.

3. The microfocus X-ray source package structure according to claim 1, wherein: and a sealing ring (5) is arranged between the metal sealing plate (2) and the X-ray tube (4).

4. The microfocus X-ray source package structure according to claim 1, wherein: and the metal sealing plate (2) and the epoxy module (1) are sealed through oil-resistant glue.

5. The microfocus X-ray source package structure according to claim 1, wherein: the first cavity (11) and the second cavity (12) are formed by epoxy resin in a potting mode.

Technical Field

The invention relates to the technical field of micro-focus X-ray tubes, in particular to a micro-focus X-ray source packaging structure.

Background

The micro-focus X-ray source has the characteristics of small volume and convenient use and installation, so the micro-focus X-ray source is widely applied to the electronic semiconductor technology. The core component of the ray source is a ray tube, the encapsulation of the ray tube is the difficulty of the manufacturing and processing of the ray source, and the heat dissipation and the insulation performance of the ray tube are the main problems according to the principle of X-ray generation.

The existing X-ray tube with the micro-focus X-ray source packaged has poor heat dissipation performance and poor insulation performance, and the service life of the micro-focus X-ray source is seriously influenced.

Disclosure of Invention

The invention aims to provide a micro-focus X-ray source packaging structure to solve the problems that an X-ray tube is poor in heat dissipation performance and insulation performance after a micro-focus X-ray source is packaged in the prior art.

In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a microfocus X ray source packaging structure, includes epoxy module, metal shrouding and breathing gasbag, first cavity and second cavity have been seted up to the one end of epoxy module, set up the hole with first cavity mouth and second cavity mouth looks adaptation on the metal shrouding, the sealed pressure equipment of metal shrouding is at the tip of epoxy module, and the X-ray tube passes in the metal shrouding gets into in the first cavity and with metal shrouding sealing connection, and the breathing gasbag that breathes passes in the metal shrouding gets into in the second cavity and with metal shrouding sealing connection, the metal shrouding is equipped with the recess towards one side of epoxy module, and first cavity and second cavity pass through the recess intercommunication, full-filling insulating oil in first cavity and the second cavity.

Preferably, the two ends of the metal sealing plate are provided with oil filling through holes, the first cavity and the second cavity are filled with insulating oil through the oil filling through holes, and the oil filling through holes are sealed after the two cavities are filled with the oil.

Preferably, a sealing ring is arranged between the metal closing plate and the X-ray tube.

Preferably, the metal closing plate and the epoxy module are sealed through oil-resistant glue.

Preferably, the first cavity and the second cavity are formed by potting epoxy resin.

Compared with the prior art, the invention has the beneficial effects that: the X-ray tube is fully immersed in the insulating oil, and the insulating oil and the epoxy resin can provide a good insulating environment and ensure good insulating property of the microfocus X-ray tube; when the X-ray tube works, the insulating oil is expanded by heat generated in a short time, the heat is buffered by the expansion air bag, and then the heat is led out by epoxy resin, so that the X-ray tube can work stably for a long time.

Drawings

FIG. 1 is a schematic structural diagram of the present invention.

In the figure: 1. the device comprises an epoxy module, 11 parts of a first cavity, 12 parts of a second cavity, 2 parts of a metal sealing plate, 21 parts of an oil filling through hole, 22 parts of a groove, 3 parts of an expansion air bag, 4 parts of an X-ray tube and 5 parts of a sealing ring.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1, the present invention provides a technical solution: a micro-focus X-ray source packaging structure comprises an epoxy module 1, a metal sealing plate 2 and an expansion air bag 3, wherein one end of the epoxy module 1 is provided with a first cavity 11 and a second cavity 12, the metal sealing plate 2 is provided with holes matched with a first cavity 11 and a second cavity 12, the metal sealing plate 2 is pressed on the end part of the epoxy module 1 and sealed by oil-resistant glue, an X-ray tube 4 penetrates through the metal sealing plate 2 to enter the first cavity 11 and is hermetically connected with the metal sealing plate 2, the expansion air bag 3 penetrates through the metal sealing plate 2 to enter the second cavity 12 and is hermetically connected with the metal sealing plate 2, one side of the metal sealing plate 2, which faces towards the epoxy module 1, is provided with a groove 22, so that the first cavity 11 and the second cavity 12 are communicated through the groove 22, the first cavity 11 and the second cavity 12 are fully filled with insulating oil, and the X-ray tube 4 is completely immersed in the insulating oil to ensure good insulating property, when the X-ray tube 4 works, heat generated in the first cavity 11 in a short time can be buffered through the expansion air bag 3 in the second cavity 12, and good heat dissipation performance of the X-ray tube is guaranteed.

Preferably, the epoxy module 1 is made of epoxy resin, and the first cavity 11 and the second cavity 12 are molded by potting with epoxy resin, so that the epoxy resin itself has good insulation and thermal conductivity, and further ensures good insulation and heat dissipation of the X-ray tube 4.

Specifically, the both ends of metal shrouding 2 are equipped with the oil filling through-hole 21, and insulating oil fills up first cavity 11 and second cavity 12 through filling oil through-hole 21, and it should be noted that, at the in-process of pouring into insulating oil, will push down the breathing bag 3 that expands and contracts and prevent to kick-back, and the oiling finishes the back and seals the oil filling through-hole 21 at 2 both ends of metal shrouding, guarantees that insulating oil does not leak outward.

Preferably, a sealing ring 5 is arranged between the metal closing plate 2 and the X-ray tube 4, so that good sealing performance is ensured.

Adopt 4 packaging structure of microfocus X-ray tube that this application provided to accomplish the back with 4 encapsulation of X-ray tube, insulating oil is full of first cavity 11 and second cavity 12, 4 abundant submergions of X-ray tube are in insulating oil, when 4 during operation of X-ray tube, insulating oil and epoxy's insulating nature provides good insulating environment, the heat that the short time produced is with insulating oil inflation, wash away through the expansion gasbag 3, rethread epoxy exports the heat, thereby maintain 4 long-term steady operation of X-ray tube.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.