阅读说明：本技术 电源产生器的点火方法 (Ignition method of power generator ) 是由 杨昆翰 郭金璋 赖威勳 于 2020-04-13 设计创作，主要内容包括：一种电源产生器的点火方法,包含步骤：(a)、软启动一点火电压至一第一电压电平；(b)、持续一第一点火时间后,调整该点火电压至一第二电压电平；(c)、持续一第二点火时间后,调整该点火电压至该第一电压电平；以及(d)、重复步骤(b)、(c),直到点火成功。(A method of igniting a power generator, comprising the steps of: (a) soft starting an ignition voltage to a first voltage level; (b) after a first ignition time, adjusting the ignition voltage to a second voltage level; (c) after a second ignition time, adjusting the ignition voltage to the first voltage level; and (d) repeating the steps (b) and (c) until the ignition is successful.)

1. A method of igniting a power generator, comprising the steps of:

(a) soft starting an ignition voltage to a first voltage level;

(b) after a first ignition time, adjusting the ignition voltage to a second voltage level;

(c) after a second ignition time, adjusting the ignition voltage to the first voltage level; and

(d) and (c) repeating the steps (b) and (c) until the ignition is successful.

2. The method as claimed in claim 1, wherein a ratio of the first ignition time for the first voltage level to the second ignition time for the second voltage level is adjustable.

3. The method of claim 1, wherein the first voltage level is lower than the second voltage level when the ignition voltage is a dc voltage and a negative voltage.

4. The ignition method of a power generator as claimed in claim 3, wherein the first voltage level of the following period is greater than or equal to the first voltage level of the preceding period, or the second voltage level of the following period is less than or equal to the second voltage level of the preceding period.

5. The ignition method of a power generator as claimed in claim 3, wherein the first voltage level of a following period is greater than or equal to the first voltage level of a preceding period, and the second voltage level of a following period is less than or equal to the second voltage level of a preceding period.

6. The ignition method of a power generator as claimed in claim 1, wherein when the ignition voltage is a sine wave voltage, an absolute value of the first voltage level is greater than an absolute value of the second voltage level.

7. The ignition method of a power generator as claimed in claim 6, wherein the absolute value of the first voltage level of a subsequent cycle is less than or equal to the absolute value of the first voltage level of a previous cycle, or the absolute value of the second voltage level of a subsequent cycle is greater than or equal to the absolute value of the second voltage level of a previous cycle.

8. The ignition method of a power generator as claimed in claim 6, wherein an absolute value of the first voltage level of a following cycle is less than or equal to an absolute value of the first voltage level of a preceding cycle, and an absolute value of the second voltage level of a following cycle is greater than or equal to an absolute value of the second voltage level of a preceding cycle.

9. The generator of claim 6, wherein the first ignition time duration voltage and the second ignition time duration voltage are adjustable.

Technical Field

The invention relates to an ignition method of a power supply generator, in particular to an ignition method of a power supply generator capable of dynamically adjusting the ignition voltage level.

Background

The power supply of semiconductor device can be classified into dc, if, rf and microwave power supplies. When the power supply is started, a larger excitation source is usually provided, and the process of generating plasma by the chamber process needs to break the bonds of gas molecules or atoms by sufficient energy, so the excitation can be generally performed by a high-voltage or high-frequency power supply.

Referring to fig. 1A and 1B, fig. 1A is a schematic diagram of a conventional capacitive plasma ignition method, and fig. 1B is a schematic diagram of a conventional inductive plasma ignition method. As shown in fig. 1A, a gas (e.g., argon) is subjected to high pressure in the chamber and dissociated into a plasma of positive ions and electrons. As shown in fig. 1B, a gas (e.g., argon) is subjected to high frequency in the chamber and dissociated into a plasma of positive ions and electrons.

Taking a dc power supply (or a pulse power supply) as an example, refer to fig. 2A, which is a waveform diagram of an ignition mode of a conventional dc power supply. Although it is easier to ionize the gas and successfully ignite by supplying it directly at a higher voltage (e.g., 3000 volts), it is not known that the high voltage supplied will successfully ignite because the chamber is usually cooled before the plasma is struck. Typically, if the ignition fails, it is shut down after a certain period of time. At the same time, adjustments in pressure within the cavity, gas concentration …, etc., are made to establish a preferred ignition environment. Then, the ignition process is performed again at a high voltage. However, such ignition method results in a long ignition time, so that the ignition efficiency is poor. Further, by the high-voltage ignition, the chamber is easily damaged by ion bombardment (ion bombardment), so that the life of the chamber is reduced.

Or, taking an intermediate frequency and radio frequency power supply as an example, and referring to fig. 2B, it is a waveform schematic diagram of an ignition mode of a conventional sine wave power supply. Although the power is supplied by a high-frequency voltage, the alternating power source has a fixed frequency and amplitude, so that the gas is dissociated in the positive half cycle, but is reduced in the negative half cycle, so that the ignition fails and the success is not easy.

Therefore, how to design an ignition method for a power generator, and particularly an ignition method for a power generator capable of dynamically adjusting an ignition voltage level, to solve the above-mentioned technical problems, is an important issue studied by the inventors of the present disclosure.

Disclosure of Invention

An objective of the present invention is to provide an ignition method for a power generator, which solves the problems of the prior art.

To achieve the above object, the present invention provides a method for igniting a power generator, comprising: (a) soft starting an ignition voltage to a first voltage level; (b) after a first ignition time, adjusting the ignition voltage to a second voltage level; (c) after a second ignition time, adjusting the ignition voltage to the first voltage level; and (d) repeating the steps (b) and (c) until the ignition is successful.

In one embodiment, a ratio of the first ignition time for which the first voltage level is maintained to the second ignition time for which the second voltage level is maintained is adjustable.

In one embodiment, when the ignition voltage is a dc voltage and a negative voltage, the first voltage level is less than the second voltage level.

In one embodiment, the first voltage level of the following period is greater than or equal to the first voltage level of the preceding period, or the second voltage level of the following period is less than or equal to the second voltage level of the preceding period.

In one embodiment, the first voltage level of a subsequent cycle is greater than or equal to the first voltage level of a previous cycle, and the second voltage level of a subsequent cycle is less than or equal to the second voltage level of a previous cycle.

In one embodiment, when the ignition voltage is a sine wave voltage, the absolute value of the first voltage level is greater than the absolute value of the second voltage level.

In an embodiment, an absolute value of the first voltage level of a subsequent cycle is less than or equal to an absolute value of the first voltage level of a previous cycle, or an absolute value of the second voltage level of a subsequent cycle is greater than or equal to an absolute value of the second voltage level of a previous cycle.

In one embodiment, the absolute value of the first voltage level of a subsequent cycle is less than or equal to the absolute value of the first voltage level of a previous cycle, and the absolute value of the second voltage level of a subsequent cycle is greater than or equal to the absolute value of the second voltage level of a previous cycle.

In one embodiment, the magnitude of the first ignition time duration voltage and the magnitude of the second ignition time duration voltage are adjustable.

By the ignition method of the power generator, the voltage (no matter the fixed voltage or the variable voltage) which changes along with the time is provided in different periods, and the ignition is directly carried out by a single high voltage in the prior art, so that a more efficient ignition procedure can be obtained, the cavity is protected from being damaged, and the service life of the cavity is prolonged.

For a further understanding of the techniques, means, and advantages of the invention adopted to carry out the intended purpose, reference should be made to the following detailed description of the invention and to the accompanying drawings which are included to provide a further understanding of the invention, its objects, features, and characteristics, and are therefore believed to be within the scope and spirit of the invention, as defined by the appended claims, and are provided for reference and description only, and not for limitation.

Drawings

FIG. 1A: a schematic diagram of a conventional capacitive plasma ignition method is shown.

FIG. 1B: a schematic diagram of a conventional inductive plasma ignition method is shown.

FIG. 2A: the waveform of the ignition mode of the existing direct current power supply is shown schematically.

FIG. 2B: is a waveform schematic diagram of the prior sine wave power supply ignition mode.

FIG. 3A: is a waveform diagram of the first embodiment of the ignition mode of the dc power supply of the present invention.

FIG. 3B: is a waveform diagram of a second embodiment of the ignition mode of the dc power supply of the present invention.

FIG. 3C: is a waveform diagram of the third embodiment of the ignition mode of the dc power supply of the present invention.

FIG. 3D: is a waveform diagram of a fourth embodiment of the ignition mode of the dc power supply according to the present invention.

FIG. 4A: is a waveform diagram of a first embodiment of the firing mode of the sine wave power supply of the present invention.

FIG. 4B: is a waveform diagram of a second embodiment of the firing mode of the sine wave power supply of the present invention.

FIG. 4C: is a waveform diagram of a third embodiment of the firing mode of the sine wave power supply of the present invention.

FIG. 4D: is a waveform diagram of a fourth embodiment of the firing mode of the sine wave power supply of the present invention.

FIG. 5: is a flow chart of the ignition method of the power supply generator.

Description of reference numerals:

t0, t1, t2, t3, t 4: point in time

T1: first ignition time

T2: second ignition time

V1, V1', V1 ": first voltage level

V2, V2', V2 ": second voltage level

S11-S14: step (ii) of

Detailed Description

The technical contents and detailed description of the present invention are described below with reference to the accompanying drawings.

For convenience of explaining the ignition method of the present invention, a dc power supply is taken as an example, and fig. 3A is a waveform diagram of a first embodiment of the ignition method of the dc power supply of the present invention. Please refer to fig. 5, which is a flowchart of the ignition method of the power generator according to the present invention. The invention provides an ignition method of a power generator, which comprises the following main steps: first, an ignition voltage is soft-started to a first voltage level (S11). It should be noted that the dc power supply is illustrated with a negative voltage as an example. The step (S11) corresponds to the relationship of fig. 3A as follows: at time t0, the ignition voltage is soft-started and at time t1, the ignition voltage reaches the first voltage level V1. For example, the first voltage level V1 is-1900 volts (or a voltage between-1000 volts and-1900 volts), but the invention is not limited thereto. Then, when the ignition voltage reaches the first voltage level, the ignition voltage is adjusted to a second voltage level after a first ignition time (S12). The first ignition time T1 may be 10 ms (or a time between 10 ms and 1000 ms), but the invention is not limited thereto. Moreover, the second voltage level V2 reached at the time point t2 is-500 volts (or a voltage between-500 volts and-1000 volts), but the invention is not limited thereto. In the present embodiment, the slope from the first voltage level V1 to the second voltage level V2 is (V2-V1)/(T2-T1-T1). By utilizing the time-dependent voltage change rate (i.e., dv/dt), the ignition process is easier to succeed than the prior art in which only a single voltage level of direct current is supplied.

Then, after a second ignition time, the ignition voltage is adjusted to the first voltage level (S13). The second ignition time T2 may be 200 ms (or a time between 200 ms and 1000 ms), but the invention is not limited thereto. In the present embodiment, the first voltage level V1 is a constant voltage, so the first voltage level V1 reached at time t3 is-1900 volts as described above. Also, in the present embodiment, the slope from the second voltage level V2 to the first voltage level V1 is (V1-V2)/(T3-T2-T2). Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition. Wherein, the ratio of the first ignition time T1 sustained by the first voltage level V1 to the second ignition time T2 sustained by the second voltage level V2 is adjustable.

Then, it is judged whether or not the ignition is successful (S14). If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process is repeated after the second cycle as shown in fig. 3A. If so (ignition is successful), the ignition process is ended.

Please refer to fig. 3B, which is a waveform diagram of the dc power ignition method according to the second embodiment of the present invention. Unlike the embodiment shown in fig. 3A, the first voltage level V1 and the second voltage level V2 are fixed, and in the embodiment shown in fig. 3B, the first voltage levels V1, V1', V1 "are varied (not fixed), and the second voltage level V2 is fixed.

As shown in FIG. 3B, at time t0, the ignition voltage is soft-started, and at time t1, the ignition voltage reaches the first voltage level V1 (e.g., -1900 volts). Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2 (e.g., -500 volts). In this embodiment, ignition is made easier to succeed by the rate of change of voltage over time (i.e., dv/dt). Therefore, the slope from the first voltage level V1 to the second voltage level V2 is (V2-V1)/(T2-T1-T1).

Then, after the second ignition time T2 is continued, the ignition voltage is adjusted to the first voltage level V1'. In the present embodiment, since the first voltage level V1 is a variable voltage, the first voltage level V1' reached at the time point t3 is-1700 volts. Therefore, the slope of the decrease from the second voltage level V2 to the first voltage level V1 'is (V1' -V2)/(T3-T2-T2). Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, whether ignition is successful is judged. If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process is repeated after the second cycle as shown in fig. 3B. If so (ignition is successful), the ignition process is ended.

Please refer to fig. 3C, which is a waveform diagram of the dc power ignition method according to the third embodiment of the present invention. Unlike the embodiment shown in fig. 3B, in which the first voltage levels V1, V1', V1 "are varied and the second voltage level V2 is fixed, in the embodiment shown in fig. 3C, the first voltage level V1 is fixed, and the second voltage levels V2, V2', V2" are varied (not fixed).

As shown in FIG. 3C, at time t0, the ignition voltage is soft-started, and at time t1, the ignition voltage reaches the first voltage level V1 (e.g., -1900 volts). Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2 (e.g., -500 volts). In this embodiment, ignition is made easier to succeed by the rate of change of voltage over time (i.e., dv/dt). Therefore, the slope from the first voltage level V1 to the second voltage level V2 is (V2-V1)/(T2-T1-T1).

Then, after the second ignition time T2 is continued, the ignition voltage is adjusted to the first voltage level V1. In the present embodiment, since the first voltage level V1 is a fixed voltage, the first voltage level V1 reached at the time point t3 is-1900 volts. Therefore, the slope of the decrease from the second voltage level V2 to the first voltage level V1 is (V1-V2)/(T3-T2-T2). Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2'. In the present embodiment, since the second voltage level V2 is a variable voltage, the second voltage level V2' reached at the time point t4 is-700 volts. The slope from the first voltage level V1 to the second voltage level V2 'is (V2' -V1)/(T4-T3-T1). Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, whether ignition is successful is judged. If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process after the third cycle is shown in fig. 3C. If so (ignition is successful), the ignition process is ended.

Please refer to fig. 3D, which is a waveform diagram of the dc power ignition method according to the fourth embodiment of the present invention. Unlike the embodiment shown in fig. 3A, the first voltage level V1 and the second voltage level V2 are fixed, and in the embodiment shown in fig. 3D, the first voltage levels V1, V1', V1 "are varied (not fixed), and the second voltage levels V2, V2', V2" are also varied (not fixed).

As shown in FIG. 3D, at time t0, the ignition voltage is soft-started, and at time t1, the ignition voltage reaches the first voltage level V1 (e.g., -1900 volts). Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2 (e.g., -500 volts). In this embodiment, ignition is made easier to succeed by the rate of change of voltage over time (i.e., dv/dt). Therefore, the slope from the first voltage level V1 to the second voltage level V2 is (V2-V1)/(T2-T1-T1).

Then, after the second ignition time T2 is continued, the ignition voltage is adjusted to the first voltage level V1'. In the present embodiment, since the first voltage level V1 is a variable voltage, the first voltage level V1' reached at the time point t3 is-1700 volts. Therefore, the slope of the decrease from the second voltage level V2 to the first voltage level V1 'is (V1' -V2)/(T3-T2-T2). Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2'. In the present embodiment, since the second voltage level V2 is a variable voltage, the second voltage level V2' reached at the time point t4 is-700 volts. The slope from the first voltage level V1 'to the second voltage level V2' is (V2 '-V1')/(T4-T3-T1). Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, whether ignition is successful is judged. If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process after the third cycle is shown in fig. 3D. If so (ignition is successful), the ignition process is ended.

In summary, by providing the voltage (no matter the voltage is fixed or varied) varying with time in different periods, it is different from the prior art that the ignition is directly performed with a single high voltage, so that a more efficient ignition procedure can be obtained, the cavity can be protected from being damaged, and the service life of the cavity can be prolonged.

Further, the ignition method of the present invention is described by taking a sine wave power supply as an example, and fig. 4A is a schematic waveform diagram of a first embodiment of the ignition method of the sine wave power supply of the present invention. Similarly, please refer to fig. 5. The invention provides an ignition method of a power generator, which comprises the following main steps: first, an ignition voltage is soft-started to a first voltage level (S11). It should be noted that the sine wave power supply is illustrated by taking positive and negative symmetrical voltages as an example, and therefore, only positive voltages are shown in the drawing. The step (S11) corresponds to the relationship of fig. 4A as follows: at time t0, the ignition voltage is soft-started and at time t1, the ignition voltage reaches the first voltage level V1. For example, the first voltage level V1 is +1900 volts (or a voltage between +1000 volts and +1900 volts), but the invention is not limited thereto. Then, when the ignition voltage reaches the first voltage level, the ignition voltage is adjusted to a second voltage level after a first ignition time (S12). The first ignition time T1 may be 10 ms (or a time between 10 ms and 1000 ms), but the invention is not limited thereto. Moreover, the second voltage level V2 reached at the time point t2 is +500 volts (or a voltage between +500 volts and +1000 volts), but the invention is not limited thereto. By using the time-dependent voltage change rate (i.e., dv/dt), the ignition process is easier to succeed than the prior art in which only a single voltage level of high voltage is supplied.

Then, after a second ignition time, the ignition voltage is adjusted to the first voltage level (S13). The second ignition time T2 may be 200 ms (or a time between 200 ms and 1000 ms), but the invention is not limited thereto. In the present embodiment, the first voltage level V1 is a constant voltage, and therefore the first voltage level V1 reached at the time point t3 is +1900 volts as described above. Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition. Wherein, the ratio of the first ignition time T1 sustained by the first voltage level V1 to the second ignition time T2 sustained by the second voltage level V2 is adjustable.

Then, it is judged whether or not the ignition is successful (S14). If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process is repeated after the second cycle as shown in fig. 4A. If so (ignition is successful), the ignition process is ended.

Please refer to fig. 4B, which is a waveform diagram of a second embodiment of the firing method of the sine wave power supply according to the present invention. Unlike the embodiment shown in fig. 4A, the first voltage level V1 and the second voltage level V2 are fixed, and in the embodiment shown in fig. 4B, the first voltage levels V1, V1', V1 "are varied (not fixed), and the second voltage level V2 is fixed.

As shown in fig. 4B, at time t0, the ignition voltage is soft-started, and at time t1, the ignition voltage reaches the first voltage level V1 (e.g., +1900 volts). Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2 (e.g., +500 volts). In this embodiment, ignition is made easier to succeed by the rate of change of voltage over time (i.e., dv/dt).

Then, after the second ignition time T2 is continued, the ignition voltage is adjusted to the first voltage level V1'. In the present embodiment, since the first voltage level V1 is a variable voltage, the first voltage level V1' reached at the time point t3 is +1700 volts. Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, whether ignition is successful is judged. If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process after the second cycle is shown in fig. 4B. If so (ignition is successful), the ignition process is ended.

Please refer to fig. 4C, which is a waveform diagram of a sine wave power ignition method according to a third embodiment of the present invention. Unlike the embodiment shown in fig. 4B, in which the first voltage levels V1, V1', V1 "are varied and the second voltage level V2 is fixed, in the embodiment shown in fig. 4C, the first voltage level V1 is fixed, and the second voltage levels V2, V2', V2" are varied (not fixed).

As shown in fig. 4C, the ignition voltage is soft-started at a time point t0, and reaches the first voltage level V1 (e.g., +1900 volts) at a time point t 1. Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2 (e.g., +500 volts). In this embodiment, ignition is made easier to succeed by the rate of change of voltage over time (i.e., dv/dt).

Then, after the second ignition time T2 is continued, the ignition voltage is adjusted to the first voltage level V1. In the present embodiment, since the first voltage level V1 is a fixed voltage, the first voltage level V1 reached at the time point t3 is +1900 volts. Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2'. In the present embodiment, since the second voltage level V2 is a variable voltage, the second voltage level V2' reached at the time point t4 is +700 volts. Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, whether ignition is successful is judged. If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process after the third cycle is shown in fig. 4C. If so (ignition is successful), the ignition process is ended.

Please refer to fig. 4D, which is a waveform diagram of a sine wave power ignition method according to a fourth embodiment of the present invention. Unlike the embodiment shown in fig. 4A, the first voltage level V1 and the second voltage level V2 are fixed, and in the embodiment shown in fig. 4D, the first voltage levels V1, V1', V1 "are varied (not fixed), and the second voltage levels V2, V2', V2" are also varied (not fixed).

As shown in fig. 4D, the ignition voltage is soft-started at a time point t0, and reaches the first voltage level V1 (e.g., +1900 volts) at a time point t 1. Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2 (e.g., +500 volts). In this embodiment, ignition is made easier to succeed by the rate of change of voltage over time (i.e., dv/dt).

Then, after the second ignition time T2 is continued, the ignition voltage is adjusted to the first voltage level V1'. In the present embodiment, since the first voltage level V1 is a variable voltage, the first voltage level V1' reached at the time point t3 is +1700 volts. Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, after the first ignition time T1, the ignition voltage is adjusted to the second voltage level V2'. In the present embodiment, since the second voltage level V2 is a variable voltage, the second voltage level V2' reached at the time point t4 is +700 volts. Similarly, the ignition sequence is performed by the rate of change of voltage over time (i.e., dv/dt), which helps to increase the chances of successful ignition.

Then, whether ignition is successful is judged. If not (ignition has not been successful), the steps (S12) and (S13) are repeated, i.e., the ignition process after the third cycle is shown in fig. 4D. If so (ignition is successful), the ignition process is ended.

In summary, by providing the voltage (no matter the voltage is fixed or varied) varying with time in different periods, it is different from the prior art that the ignition is directly performed with a single high voltage, so that a more efficient ignition procedure can be obtained, the cavity can be protected from being damaged, and the service life of the cavity can be prolonged.

The above-mentioned detailed description and drawings are only for the preferred embodiments of the present invention, and the features of the present invention are not limited thereto, but rather should be construed as limiting the scope of the present invention, and all the modifications and variations of the present invention are included in the scope of the present invention, which is defined by the following claims, and all the modifications and variations that can be easily made by those skilled in the art within the scope of the present invention are included in the following claims.