阅读说明：本技术 一种真空玻璃连续封接方法 (Continuous sealing method for vacuum glass ) 是由 宋驁天 叶岩 杜争 郑剑锋 龙江东 罗涛 王俊飞 于 2019-12-18 设计创作，主要内容包括：本发明涉及一种真空玻璃连续封接方法,真空玻璃的两块玻璃板在预定封接区域均制备有金属化层,且两块玻璃板的两个金属化层之间放置有钎焊料；真空玻璃夹在盖板和托盘之间,形成组合工件；封接工艺中,通过辐射加热方式对盖板和托盘同时加热,利用盖板和托盘存储的热量对两块玻璃板加热以完成两块玻璃板的封接。克服了现有技术中玻璃加热不均匀、翘曲或碎裂的问题,利用盖板和托盘存储的热量对两块玻璃板加热以完成两块玻璃板的封接,实现可靠工艺曲线控制的同时,提高了生产效率。(The invention relates to a continuous sealing method of vacuum glass, wherein two glass plates of the vacuum glass are both provided with a metalized layer in a preset sealing area, and a brazing material is placed between the two metalized layers of the two glass plates; the vacuum glass is clamped between the cover plate and the tray to form a combined workpiece; in the sealing process, the cover plate and the tray are heated simultaneously in a radiation heating mode, and the two glass plates are heated by utilizing the heat stored in the cover plate and the tray so as to finish the sealing of the two glass plates. The problems of uneven heating, warping or cracking of glass in the prior art are solved, the two glass plates are heated by utilizing the heat stored in the cover plate and the tray to complete the sealing of the two glass plates, reliable process curve control is realized, and meanwhile, the production efficiency is improved.)

1. A vacuum glass continuous sealing method is characterized in that: two glass plates of the vacuum glass are both provided with a metalized layer in a preset sealing area, and a brazing material is placed between the two metalized layers of the two glass plates; the vacuum glass is clamped between the cover plate and the tray to form a combined workpiece; in the sealing process, the cover plate and the tray are heated simultaneously in a radiation heating mode, and the two glass plates are heated by utilizing the heat stored in the cover plate and the tray so as to finish the sealing of the two glass plates.

2. A method for continuously sealing vacuum glass according to claim 1, wherein: one or more vacuum glasses are first placed side by side on a pallet, and then a cover plate is placed on the upper side of the vacuum glasses to form a combined workpiece.

3. A method for continuous sealing of vacuum glass according to claim 2, characterized in that: a plurality of barrier strips are arranged on the tray on the outer side of the vacuum glass, and the barrier strips are made of glass or carbon-carbon composite materials or stainless steel or aluminum.

4. A method for continuously sealing vacuum glass according to claim 1, wherein: the tray is made of a carbon-carbon composite material or silicon carbide or boron carbide or silicon nitride or silicon-aluminum alloy or stainless steel with a heat absorption coating on the surface or aluminum alloy with a heat absorption coating on the surface; the cover plate is made of carbon-carbon composite material or silicon carbide or boron carbide or silicon nitride or silicon-aluminum alloy or stainless steel with a heat absorption coating on the surface or aluminum alloy with a heat absorption coating on the surface.

5. A method of continuous sealing of vacuum glass according to any of claims 1 to 4, characterized in that: the vacuum-pumping and sealing process of the vacuum glass is completed on a vacuum packaging line, and the vacuum glass is provided with a channel for vacuum-pumping of a vacuum layer, and the channel is positioned between two metallization layers on two glass plates.

6. A method of continuously sealing vacuum glass according to claim 5, wherein: the vacuum packaging line comprises a chip inlet cavity, a vacuum transition cavity, a preheating cavity, a heating cavity, a cooling cavity, a vacuum releasing transition cavity and a chip outlet cavity which are sequentially arranged; the combined workpiece sequentially passes through the wafer feeding cavity and the vacuum transition cavity, and the vacuum layer is vacuumized in the vacuum transition cavity; the combined workpiece after vacuumizing enters a preheating cavity, a tray and a cover plate are heated at a preheating position in the preheating cavity, the combined workpiece starts to move towards the heating cavity after the tray and the cover plate are heated to a preheating temperature, and the tray and the cover plate preheat the vacuum glass together and preheat the vacuum glass to be 10-50 ℃ below a sealing temperature in the moving process; after the vacuum glass reaches the preheating temperature, the cover plate and the tray are heated again at the heating position of the heating cavity, the cover plate and the tray are rapidly heated to be 50-100 ℃ above the sealing temperature, after the heating temperature is reached, the combined workpiece moves towards the cooling cavity, and the glass plate is heated to be above the sealing temperature by the tray and the cover plate in the moving process, so that the melting, wetting and sealing of the welding materials are realized.

7. A method of continuously sealing vacuum glass according to claim 6, wherein: after the combined workpiece enters the cooling cavity, the combined workpiece is placed on a cooling platform through a vertical movement mechanism, pressure is applied to the upper side of the cover plate to vertically compress the vacuum glass, then the cooling platform cools the tray, and when the temperature of the tray is lower than that of the glass plate, the tray cools the glass until the temperature of the combined workpiece is reduced to 100 ℃ below the sealing temperature.

8. A method of continuously sealing vacuum glass according to claim 6, wherein: the vacuum degrees of the vacuum transition cavity, the preheating cavity, the heating cavity, the vacuum releasing transition cavity and the cooling cavity are all more than 5x10^-4Pa; the vacuum degrees of the wafer inlet cavity and the wafer outlet cavity are both more than 10^{- 2}Pa。

9. A method of continuously sealing vacuum glass according to claim 6, wherein: the gas filled in the sheet outlet cavity and the sheet inlet cavity is dry nitrogen or dry air or dry inert gas.

Technical Field

The invention relates to the technical field of glass manufacturing, in particular to a continuous sealing method for vacuum glass.

Background

The vacuum glass is a glass deep-processing product which is formed by forming a vacuum sealing layer between two pieces of flat glass which are placed in parallel so as to realize heat insulation and sound insulation. The vacuum sealing layer is sealed and connected with the periphery of the vacuum sealing layer to achieve air tightness by adopting specific materials, and support columns which are arranged specifically are arranged in the sealing layer to support the external atmospheric pressure so as to keep the shape of the vacuum layer. A typical vacuum glass structure is shown in fig. 1, in which a support column 14 is provided between two plate glasses 13, and a sealing layer 15 is provided on the periphery of a cavity between the two plate glasses, thereby forming a vacuum layer 12 on the inner side thereof; in order to evacuate the vacuum layer 12, a suction hole 11 is further provided. And the vacuum glass which is subjected to one-step air suction and packaging in the vacuum cavity and has no air suction holes on the surface and the edge is called as tail-free vacuum glass, and the structure is shown in figure 2.

At present, the commonly used sealing materials for vacuum glass comprise ① low-melting-point glass powder, namely a mixture of inorganic metal oxides, which is generally sintered into glass by a specific formula and crushed and ground to form micron-sized or nanometer-sized powder, and then the micron-sized or nanometer-sized powder is prepared into slurry for use, and generally a low-temperature soft solder with the softening temperature (Tg) of 350-500 ℃, ②, namely a low-temperature metal alloy, which can be prepared into solder paste (paste with certain viscosity formed by mixing and dispersing solder powder, solvent and soldering flux), a solder prefabricated part (processed into a solder compact with a specific shape) and the like, wherein the melting point temperature is lower than 350 ℃, no matter the low-temperature glass powder or the low-temperature soft solder is adopted, the solder is subjected to preheating, melting, wetting, connecting layer formation, cooling, solidification and the like along with a process curve, and finally realizes airtight sealing, so that the control of the process curve is the key for realizing the airtight sealing, and the control difficulty of the process curve is related.

Glass is a brittle material, has a low thermal conductivity (λ 1W/m · K), has a high emissivity (∈ 0.84), and if a large temperature difference is formed inside the glass, thermal stress is locally generated in the glass, and when the thermal stress exceeds the strength of the glass, the glass is broken. Therefore, the packaging process of the vacuum glass is better than the whole uniform heating process.

The integral heating mode in the vacuum glass sealing process mainly comprises two modes of hot plate heating and radiation heating. The heat is transferred to the glass by a contact heat conduction mode in the heating of the hot plate (as shown in figure 3), so that the glass has better temperature uniformity, but the glass has low heat conduction coefficient and larger contact thermal resistance between the hot plate and the glass, so that the heating efficiency of the glass is lower, meanwhile, the single surface of the glass is easy to warp when being heated, and is not beneficial to sealing, and in addition, the whole hot plate needs to maintain high temperature, so that the energy consumption is high; in contrast, radiant heating has a higher heating efficiency due to a higher heat source temperature. Meanwhile, the heat radiation module can be started and stopped quickly. However, the conventional lamp tube type heat radiation element array is difficult to realize large-area uniform heating, the temperature rise rate of the edge is higher than that of the center, and the glass is easy to warp.

Therefore, a method for continuously sealing the tailless vacuum glass is urgently needed.

Disclosure of Invention

The invention aims to solve the technical problem of providing a tailless vacuum glass continuous sealing method capable of realizing the tailless vacuum glass continuous sealing.

In order to solve the technical problems, the technical scheme of the invention is as follows: a vacuum glass continuous sealing method, two glass plates of vacuum glass are prepared with metallization layers in a preset sealing area, and brazing solder is placed between the two metallization layers of the two glass plates; the vacuum glass is clamped between the cover plate and the tray to form a combined workpiece; in the sealing process, the cover plate and the tray are heated simultaneously in a radiation heating mode, and the two glass plates are heated by utilizing the heat stored in the cover plate and the tray so as to finish the sealing of the two glass plates.

As a preferable technical scheme, one or more pieces of vacuum glass are placed on a tray in parallel, and then a cover plate is placed on the upper side of the vacuum glass so as to form a combined workpiece.

As a preferred technical scheme, a plurality of barrier strips are placed on a tray on the outer side of the vacuum glass, and the barrier strips are made of glass or carbon-carbon composite materials or stainless steel or aluminum.

As a preferable technical scheme, the tray is made of a carbon-carbon composite material or silicon carbide or boron carbide or silicon nitride or silicon-aluminum alloy or stainless steel with a heat-absorbing coating on the surface or aluminum alloy with a heat-absorbing coating on the surface; the cover plate is made of carbon-carbon composite material or silicon carbide or boron carbide or silicon nitride or silicon-aluminum alloy or stainless steel with a heat absorption coating on the surface or aluminum alloy with a heat absorption coating on the surface.

As a preferred technical solution, the vacuum-pumping and sealing processes of the vacuum glass are completed on a vacuum packaging line, and the vacuum glass is provided with a channel for vacuum-pumping of the vacuum layer, which is located between two metallized layers on two glass plates.

As a preferred technical scheme, the vacuum packaging line comprises a chip inlet cavity, a vacuum transition cavity, a preheating cavity, a heating cavity, a cooling cavity, a vacuum releasing transition cavity and a chip outlet cavity which are sequentially arranged; the combined workpiece sequentially passes through the wafer feeding cavity and the vacuum transition cavity, and the vacuum layer is vacuumized in the vacuum transition cavity; the combined workpiece after vacuumizing enters a preheating cavity, a tray and a cover plate are heated at a preheating position in the preheating cavity, the combined workpiece starts to move towards the heating cavity after the tray and the cover plate are heated to a preheating temperature, and the tray and the cover plate preheat the vacuum glass together and preheat the vacuum glass to be 10-50 ℃ below a sealing temperature in the moving process; after the vacuum glass reaches the preheating temperature, the cover plate and the tray are heated again at the heating position of the heating cavity, the cover plate and the tray are rapidly heated to be 50-100 ℃ above the sealing temperature, after the heating temperature is reached, the combined workpiece moves towards the cooling cavity, and the glass plate is heated to be above the sealing temperature by the tray and the cover plate in the moving process, so that the melting, wetting and sealing of the welding materials are realized.

As an optimal technical scheme, after the combined workpiece enters the cooling cavity, the combined workpiece is placed on the cooling platform through the vertical movement mechanism, pressure is applied to the upper side of the cover plate to vertically compress the vacuum glass, then the cooling platform cools the tray, and when the temperature of the tray is lower than that of the glass plate, the tray cools the glass until the temperature of the combined workpiece is reduced to 100 ℃ below the sealing temperature.

As a preferred technical scheme, the device comprises a vacuum transition cavity, a preheating cavity, a heating cavity, a vacuum releasing transition cavity and coolingThe vacuum degrees of the cavities are all more than 5x10^-4Pa; the vacuum degrees of the wafer inlet cavity and the wafer outlet cavity are both more than 10^-2Pa。

As a preferred technical scheme, the gas filled in the wafer outlet cavity and the wafer inlet cavity is dry nitrogen or dry air or dry inert gas.

The vacuum glass continuous sealing method overcomes the problems of uneven heating, warping or cracking of glass in the prior art, and the two glass plates are heated by utilizing the heat stored in the cover plate and the tray to complete the sealing of the two glass plates, so that the production efficiency is improved while the reliable process curve control is realized.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic structural view of a prior art tailed vacuum glass;

FIG. 2 is a schematic structural diagram of a tailless vacuum glass according to the prior art;

FIG. 3 is a schematic structural view of a vacuum packaging line;

FIG. 4 is a schematic view of the structure of the assembled workpiece;

FIG. 5 is a schematic view of the distribution of solder on a glass plate;

FIG. 6 is a schematic diagram of the heating of vacuum glass by the preheating chamber and the heating chamber;

FIG. 7 is a schematic view of the cooling chamber cooling the vacuum glass;

FIG. 8 is a first embodiment of the arrangement of vacuum glass on a tray;

FIG. 9 is a second embodiment of the vacuum glass arrangement on the tray;

FIG. 10 is a graph of the actual temperature of the vacuum glass;

fig. 11 is a process curve of a vacuum packaging line.

Detailed Description

In the vacuum glass continuous sealing method, two glass plates 23 of vacuum glass are provided with metalized layers in a preset sealing area, and a brazing material 24 is placed between the two metalized layers of the two glass plates 23, as shown in fig. 5; the vacuum glass is sandwiched between the cover plate 21 and the tray 22 to form the combined workpiece 2, as shown in fig. 4; in the sealing process, the cover plate 21 and the tray 22 are heated by radiation heating, and the two glass plates 23 are heated by the heat stored in the cover plate 21 and the tray 22 to complete the sealing of the two glass plates 23.

Preferably, one or more vacuum glasses may be placed between the tray 22 and the cover plate 21 as needed, and the one or more vacuum glasses are first placed on the tray 22 in parallel, and then the cover plate 21 is placed on the upper side of the vacuum glasses to form the combined workpiece 2.

The plurality of barrier strips 25 are arranged on the outer side of the vacuum glass, and the barrier strips 25 surround the outer side of the vacuum glass, so that the heat dissipation of the vacuum glass in the heating process is reduced, the temperature distribution is more uniform, and the heating is more effective; meanwhile, as shown in fig. 8 and 9, the arrangement of the sizes of the glass processed in the same batch in different sizes is optimized, and the processing efficiency is improved. The barrier strip 25 is made of glass or carbon-carbon composite material or stainless steel or aluminum.

In the method, the tray 22 and the cover plate 21 are made of one of carbon-carbon composite material, silicon carbide, boron carbide, silicon nitride, silicon-aluminum alloy, stainless steel with a heat absorption coating on the surface, aluminum alloy with a heat absorption coating on the surface and the like, so that the requirements of high heat radiation absorptivity, high heat conductivity, uniform temperature distribution and glass warpage avoidance are met, and the glass bearing performance requirements of low thermal expansion rate and high mechanical performance are met in the temperature rising process.

When the vacuum glass is a tailed vacuum glass, as shown in fig. 1, a channel for vacuum-pumping of the vacuum layer is provided on the glass plate 23; when the vacuum glass is a tailless vacuum glass, the vacuum-pumping and sealing process of the vacuum glass is completed on a vacuum packaging line, and the channel is arranged between two metalized layers on two glass plates 23. The brazing material can be in a sheet shape, a strip shape and the like, the channel is arranged in the brazing material or is discontinuous in the brazing material, and the channel is formed at the joint of the brazing material; the vias may also be machined in the metallization layer. The formation of the channel can be adjusted according to the actual processing technology, and the requirement of the channel on a vacuum packaging line by a vacuumizing process can be met.

The combined workpiece 2 is conveyed into a vacuum packaging line through a conveying roller, the structure of the vacuum packaging line is shown in figure 3, and the vacuum packaging line comprises a wafer inlet cavity 91, a vacuum transition cavity 92, a preheating cavity 93, a heating cavity 94, a cooling cavity 95, a vacuum releasing transition cavity 96 and a wafer outlet cavity 97 which are sequentially arranged; two adjacent process chambers are connected by a vacuum valve which can be independently opened, and a roller type conveying mechanism is arranged in each process chamber to horizontally convey workpieces. The combined workpiece 2 sequentially passes through the sheet feeding cavity 91, the vacuum transition cavity 92, the preheating cavity 93, the heating cavity 94, the cooling cavity 95, the vacuum releasing transition cavity 96 and the sheet discharging cavity 97 under the conveying of the conveying roller; wherein the vacuum transition chamber, the preheating chamber, the heating chamber, the vacuum releasing transition chamber and the cooling chamber process chamber are required to reach the vacuum degree of 5x10^-4Pa is above; the chip inlet cavity and the chip outlet cavity are communicated with the atmosphere and need to be repeatedly vacuumized and broken, and the vacuum degree needs to reach 10^-2Pa. The gas filled in the vacuum breaking of the wafer inlet cavity 91 and the wafer outlet cavity 97 can be dry nitrogen, dry air or other dry inert gases.

On the vacuum packaging line, the combined workpiece 2 is subjected to four processes of vacuumizing, preheating, sealing and cooling in sequence, and the process curve is shown in fig. 11.

The combined workpiece 2 passes through the wafer feeding cavity 91 and the vacuum transition cavity 92 in sequence, and the vacuum layer is vacuumized in the vacuum transition cavity 92. Specifically, the combined workpiece 2 enters the sheet inlet cavity 91, the front and rear valves of the sheet inlet cavity 91 are closed, and the pressure in the sheet inlet cavity 91 and the vacuum layer of the vacuum glass is pumped to rough vacuum through a mechanical pump; then, a valve of the wafer inlet cavity 91 communicated with the vacuum transition cavity 92 is opened, the combined workpiece 2 is conveyed to the vacuum transition cavity 92, the valve of the wafer inlet cavity 91 communicated with the vacuum transition cavity 92 is closed, the high vacuum pump in the vacuum transition cavity 92 pumps the combined workpiece 2 to high vacuum, and the pump of the vacuum transition cavity 92 continuously works; when the vacuum degree reaches a preset value, a valve for communicating the transition cavity 1 with the preheating cavity 93 is opened, and the combined workpiece 2 is conveyed to the next process cavity.

The combined workpiece 2 is conveyed to the preheating chamber 93 and the heating chamber 94 after being vacuumized, the combined workpiece 2 is heated in the preheating chamber 93 and the heating chamber 94 by the radiation heater, the heating principle is as shown in fig. 6, namely the radiation heater 931/941 heats the tray 22 and the cover plate 21, the tray 22 and the cover plate 21 are heated quickly because the tray 22 and the cover plate 21 have better heat radiation absorptivity, and the tray 22 and the cover plate 21 stop heating after reaching the set temperature, and the heat stored in the tray 22 and the cover plate 21 is continuously transferred to the glass plate 23, so as to realize the preheating and heating of the glass plate 23.

Specifically, after the combined workpiece 2 reaches the preheating position of the preheating chamber 93, the valve of the transition chamber 1 communicating with the preheating chamber 93 is closed, the radiation heater 931 in the preheating chamber 93 starts to work to heat the cover plate 21 and the tray 22 to the specified preheating temperature, and then the combined workpiece 2 is conveyed to the heating chamber 94, and in the moving process, the cover plate 21 and the tray 22 continuously heat the vacuum glass, and the vacuum glass is continuously heated to 10-50 ℃ below the sealing temperature.

After the combined workpiece 2 reaches the heating position of the heating cavity 94, front and rear valves of the heating cavity 94 are closed and locked, the radiation heater 941 is started, and the cover plate 21 and the tray 22 are rapidly heated to 50-100 ℃ above the sealing temperature by the power higher than the preheating power; after the set heating temperature is reached, a valve between the heating cavity and the cooling cavity is opened, the combined workpiece 2 is conveyed to the cooling cavity 95, and in the conveying process, the glass is heated to a temperature higher than the sealing temperature by the cover plate 21 and the tray 22, so that the melting, wetting and sealing of the solder are realized.

After reaching the predetermined position of the cooling chamber 95, the combined workpiece 2 is placed on the cooling platform 952 through the vertical movement mechanism, and then the pressing device 951 acts to press the upper part of the combined workpiece 2, so that the combined workpiece 2 is vertically pressed. As shown in fig. 7, a cooling medium flow channel is embedded in the cooling platform 952, a low-temperature cooling medium outside the cooling cavity 95 starts to flow into the cooling platform 952, the upper part of the combined workpiece 2 is compressed, the pressing device 951 is a flexible or rigid compressing device, so that the thermal contact resistance between the combined workpiece 2 and the cooling platform 952 can be reduced, and the cooling medium is conveyed into the flow channel to cool the platform and the combined workpiece 2. When the temperature of the tray 22 is lower than the temperature of the vacuum glass, the vacuum glass starts to be cooled, the liquid metal starts to be cooled and solidified, and a compact sealing layer is realized under the assistance of lower pressure; when the seal layer is completely solidified, the combined workpiece 2 is cooled to 100 ℃ below the sealing temperature, and the workpiece starts to move to the vacuum-releasing transition cavity 96.

In the de-vacuuming transition chamber 96, the combined workpiece 2 is further cooled and then enters the sheet outlet chamber 97; after the combined workpiece 2 reaches the preset position of the sheet outlet cavity 97, the valves of the over-vacuum transition cavity 96 and the sheet outlet cavity 97 are closed, the sheet outlet cavity 97 is slowly filled with gas, the pressure is increased to the atmospheric pressure, then the tail valve is opened, and the workpiece is sent out of the sheet outlet cavity 97, so that the whole process is completed.

The invention realizes the stable control of the tailless vacuum glass production process, the actual temperature curve of the glass is shown in figure 10, the temperature difference of each temperature measuring point is less than 10 ℃, the curve is smooth and continuous, the production period of single batch is less than 30min, and the production rate and the qualification rate of finished products are greatly improved; meanwhile, the invention realizes the random arrangement of the large and small sheets and improves the adaptability to the product size.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.