阅读说明：本技术 一种高耦合效率的光纤激光调试装置及调试方法 (High-coupling-efficiency fiber laser debugging device and method ) 是由 李勋武 刘德军 于 2019-12-19 设计创作，主要内容包括：本发明公开了一种高耦合效率的光纤激光调试装置及调试方法,其用于将激光器射出的激光耦合到一激光加工头上的光纤芯径中,其包括45°反射镜、耦合镜组、内设有光纤的双头QBH光纤接头、激光加工头、观察镜组、平行光管以及一光源,所述观察镜组用于观察通过所述45°反射镜反射过来的水平光线成像,所述平行光管位于所述45°反射镜的另一侧且与所述耦合镜组同轴设置,所述耦合镜组位于将光束聚焦到所述双头QBH光纤接头虚拟焦点的位置,所述光源设置在所述激光加工头的焦点位置。本发明能够有效的、安全的将激光器发射出来的激光束精准的耦合到小直径光纤芯径中,且耦合效率高达95％以上。(The invention discloses an optical fiber laser debugging device with high coupling efficiency and a debugging method, which are used for coupling laser emitted by a laser device into an optical fiber core diameter on a laser processing head and comprise a 45-degree reflector, a coupling mirror group, a double-end QBH optical fiber connector with optical fibers arranged inside, the laser processing head, an observation mirror group, a collimator and a light source, wherein the observation mirror group is used for observing horizontal light reflected by the 45-degree reflector to form images, the collimator is positioned on the other side of the 45-degree reflector and is coaxially arranged with the coupling mirror group, the coupling mirror group is positioned at a position for focusing light beams to a virtual focus of the double-end QBH optical fiber connector, and the light source is arranged at a focus position of the laser processing head. The invention can effectively and safely accurately couple the laser beam emitted by the laser to the small-diameter optical fiber core diameter, and the coupling efficiency is up to more than 95%.)

1. A high coupling efficiency fiber laser debugging device, which is used for coupling laser emitted by a laser into a fiber core diameter on a laser processing head, is characterized in that: it includes 45 speculum, coupling mirror group, is equipped with double-end QBH fiber splice, laser beam machining head, observation mirror group, collimator and a light source of optic fibre in, observe mirror group be used for observing through 45 horizontal light imaging that the speculum reflected and come, collimator is located 45 the opposite side of speculum and with the coaxial setting of coupling mirror group, coupling mirror group is located focuses on the light beam the position of double-end QBH fiber splice virtual focus, the light source sets up the focus position of laser beam machining head.

2. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the laser and the coupling mirror group are positioned on the same side of the 45-degree reflecting mirror and distributed in 90 degrees.

3. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: a collimating lens group is arranged between the laser and the 45-degree reflecting mirror; divergent light emitted by the laser forms collimated parallel light through the collimating mirror group, then is reflected into the coupling mirror group through the 45-degree reflecting mirror, and is focused to a virtual focus position of the double-end QBH optical fiber connector through the coupling mirror group.

4. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the observation mirror group is positioned between the collimating mirror group and the 45-degree reflecting mirror.

5. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: wherein the QBH fiber connector of one end of the double-end QBH fiber connector and the coupling mirror group are coaxially arranged, and the QBH fiber connector at the other end is inserted into the QBH fiber connector at the top of the laser processing head.

6. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the light source and the collimator are different in color.

7. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the observation mirror group comprises a triple prism for steering light beams reflected by the 45-degree reflecting mirror, a zoom mirror group with adjustable focal length, a focusing mirror, a reticle and an ocular lens capable of moving axially.

8. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: the magnifying power of the observation mirror group is 4-8 times, and the axial adjusting range of the ocular lens is larger than or equal to 15 mm.

9. The high coupling efficiency fiber laser debugging apparatus according to claim 1, wherein: one surface of the 45-degree reflector is plated with a laser reflection film, and the other surface of the 45-degree reflector is a quartz polished surface; the surface of the 45-degree reflector 3 plated with the laser reflecting film faces the laser and the coupling mirror group; the quartz polishing surface of the 45-degree reflector is arranged towards the collimator.

10. A fiber laser debugging method with high coupling efficiency is characterized in that: which comprises the following steps:

1) arranging a coupling mirror group at a virtual focus position of a double-end QBH optical fiber connector, coaxially arranging a 45-degree reflecting mirror above the coupling mirror group, arranging an observation mirror group on a horizontal light path reflected by the 45-degree reflecting mirror, inserting the connector of the double-end QBH optical fiber connector into a QBH optical fiber interface at the top of a laser processing head, and arranging a light source at the focus position of the laser processing head;

2) adjusting a zoom lens group and an eyepiece in the observation lens group, so that a first circular light spot formed by the fiber core diameter end surface of the double-end QBH fiber joint illuminated by a light source is positioned at the midpoint of a differentiation plate in the observation lens group;

3) a parallel light pipe is coaxially arranged on the other side of the 45-degree reflecting mirror and the coupling mirror group;

4) adjusting a zoom lens group and an eyepiece in the observation lens group to enable a second round light spot formed by reflection of the end face of the crystal head of the double-end QBH optical fiber joint to form a clear image;

5) adjusting the position and the angle of the coupling mirror group to enable the first circular light spot and the second circular light spot to be positioned at the midpoint of a differentiation plate in the observation mirror group;

6) and correcting the position of the coupling mirror group to enable the coupling mirror group to be located at the virtual focus position of the double-end QBH optical fiber connector.

[ technical field ] A method for producing a semiconductor device

The invention belongs to the technical field of laser coupling debugging, and particularly relates to a high-coupling-efficiency fiber laser debugging device and a debugging method.

[ background of the invention ]

Laser processing is applied more and more widely in manufacturing industry, such as laser cutting, laser welding and the like, and the principle of the laser processing equipment is that a laser generating device emits a beam of laser, the laser is coupled into an optical fiber, a joint at the end part of the optical fiber is inserted into a laser processing head, the laser beam is introduced into the laser processing head through the optical fiber, and the laser beam is collimated and focused to the surface of a workpiece to realize cutting or welding. Among them, the optical fiber connector plays a very important role. Before the optical fiber coupling device is used, normal transmission and accurate control can be realized only by coupling, debugging and coupling laser beams into the optical fiber core diameter through a coupling mirror group; because the diameter of the optical fiber is smaller, the traditional coupling debugging method is that an optical power meter is directly arranged at the focal position of a laser processing head, then a three-dimensional adjusting mechanism of a coupling lens group is adjusted, and when the maximum power detected by the optical power meter is detected, the debugging is successful; however, with the development of science and technology, the demand of high-power laser is more and more, the diameter of the optical fiber core is smaller and smaller, the debugging method can only be applied to the optical fiber with the diameter of more than 300um, and for the optical fiber with the diameter of 50-300 um, the method is not applicable, and the optical fiber can be burnt by laser beams due to slight deviation. Therefore, how to couple the laser beam into the optical fiber core diameter with such a small diameter becomes a big problem.

Therefore, it is necessary to provide a new fiber laser debugging device and debugging method with high coupling efficiency to solve the above problems.

[ summary of the invention ]

One of the main objectives of the present invention is to provide an optical fiber laser debugging device with high coupling efficiency, which can effectively and safely accurately couple the laser beam emitted from the laser device into the core diameter of the small-diameter optical fiber, and the coupling efficiency is as high as 95% or more.

The invention realizes the purpose through the following technical scheme: the utility model provides a high coupling efficiency's optic fibre laser debugging device, its is arranged in the optical fiber core footpath of laser coupling to a laser beam machining head that jets out, and it includes 45 speculum, coupling mirror group, is equipped with double-end QBH fiber splice, laser beam machining head, observation mirror group, collimator and a light source of optic fibre in, it is used for observing through to observe mirror group 45 horizontal light formation of image that the speculum came over, collimator is located 45 the opposite side of speculum and with the coaxial setting of coupling mirror group, coupling mirror group is located focuses on the light beam the position of double-end QBH fiber splice virtual focus, the light source sets up the focus position of laser beam machining head.

Further, the laser and the coupling mirror group are located on the same side of the 45 ° reflecting mirror and are distributed in 90 °.

Further, a collimating lens group is arranged between the laser and the 45-degree reflecting mirror; divergent light emitted by the laser forms collimated parallel light through the collimating mirror group, then is reflected into the coupling mirror group through the 45-degree reflecting mirror, and is focused to a virtual focus position of the double-end QBH optical fiber connector through the coupling mirror group.

Further, the observation mirror group is located between the collimating mirror group and the 45 ° reflecting mirror.

Further, the double-end QBH fiber connector wherein the QBH fiber connector of one end with the coaxial setting of coupling mirror group, the QBH fiber connector of the other end is pegged graft in the QBH fiber interface at laser beam machining top.

Further, one surface of the 45-degree reflector is plated with a laser reflection film, and the other surface of the 45-degree reflector is a quartz polished surface; the surface of the 45-degree reflector 3 plated with the laser reflecting film faces the laser and the coupling mirror group; the quartz polishing surface of the 45-degree reflector is arranged towards the collimator.

Further, the light source and the collimator are different in color.

Furthermore, the observation mirror group comprises a triple prism for steering the light beam reflected by the 45-degree reflecting mirror, a zoom mirror group with adjustable focal length, a focusing mirror, a reticle and an ocular lens capable of moving axially.

Furthermore, the magnification of the observation mirror group is 4-8 times, and the axial adjusting range of the ocular lens is more than or equal to 15 mm.

Another objective of the present invention is to provide a fiber laser debugging method with high coupling efficiency, which includes the following steps:

1) arranging a coupling mirror group at a virtual focus position of a double-end QBH optical fiber connector, coaxially arranging a 45-degree reflecting mirror above the coupling mirror group, arranging an observation mirror group on a horizontal light path reflected by the 45-degree reflecting mirror, inserting the connector of the double-end QBH optical fiber connector into a QBH optical fiber interface at the top of a laser processing head, and arranging a light source at the focus position of the laser processing head;

2) adjusting a zoom lens group and an eyepiece in the observation lens group, so that a first circular light spot formed by the fiber core diameter end surface of the double-end QBH fiber joint illuminated by a light source is positioned at the midpoint of a differentiation plate in the observation lens group;

3) a parallel light pipe is coaxially arranged on the other side of the 45-degree reflecting mirror and the coupling mirror group;

4) adjusting a zoom lens group and an eyepiece in the observation lens group to enable a second round light spot formed by reflection of the end face of the crystal head of the double-end QBH optical fiber joint to form a clear image;

5) adjusting the position and the angle of the coupling mirror group to enable the first circular light spot and the second circular light spot to be positioned at the midpoint of a differentiation plate in the observation mirror group;

6) and correcting the position of the coupling mirror group to enable the coupling mirror group to be located at the virtual focus position of the double-end QBH optical fiber connector.

Compared with the prior art, the optical fiber laser debugging device and the debugging method with high coupling efficiency have the beneficial effects that: the coupling efficiency can reach more than 95 percent, and the device is suitable for optical fibers with the core diameter more than or equal to 50um, and is used for respectively carrying out two-time observation on the end face of the optical fiber and the end face of the crystal head, and quantitatively measuring errors by using an observation mirror; the debugging operation is simple, and the method can be used for debugging industrial laser equipment; the collimating lens group does not need an adjusting mechanism, and all assembly tolerances are compensated by the three-dimensional adjusting mechanism of the coupling lens group at one time; the structure design is simple, the device volume is small, the debugging is convenient, and the debugging efficiency is improved; the axial coupling precision of the laser focusing beam and the optical fiber core diameter is visually adjusted, the operation is simple, and the precision is high; the coupling efficiency is high, the water cooling requirement and the laser power loss are reduced, and the processing capacity of the laser processing head is improved.

[ description of the drawings ]

FIG. 1 is a schematic structural diagram of an embodiment of the present invention;

FIG. 2 is a schematic diagram of a partially enlarged structure of a double-ended QBH fiber connector in an embodiment of the invention;

FIG. 3 is a schematic view of an exemplary viewing lens assembly;

the figures in the drawings represent:

100 fiber laser debugging device and method with high coupling efficiency; 101 a light beam;

1, a laser; 2 a collimating lens group; a 345 ° mirror; 4 coupling lens group; 5 double-end QBH fiber connector; 6 observation mirror group, 61 prism, 62 zoom mirror group, 63 focusing mirror, 64 reticle and 65 ocular; 7 collimator.

[ detailed description ] embodiments