阅读说明：本技术 环保型金刚砂线切割液 (Environment-friendly carborundum wire cutting liquid ) 是由 王成 赵天祥 于 2019-11-15 设计创作，主要内容包括：本发明公开了一种环保型金刚砂线切割液,线切割液原料按重量百分比包括以下组分：多支链醇改性表面活性剂3-5％、十二碳炔二醇聚氧乙烯醚3-5％、超支化Gemini阳离子表面活性剂0.5-1％、特殊类型醇醚5-15％、异构硬脂酸3-5％、AMP-95 3-5％、余量为去离子水加至100％；具有优良的润湿,冷却,润滑,清洗,低泡,和沉降性能,并具有很好的润湿、渗透性,切割液具有良好的抗菌性,防止切割液变质,切割液可循环使用,且循环利用率高,有效延长切割液的使用寿命。该切割液可有效防止硅片表面TTV大,有线痕,硅片在切割过程中发生脆性崩裂或划痕的发生,提高硅片表面的光滑度,避免硅片翘曲,使所加工的硅片厚度均匀一致,提高良品率。(The invention discloses an environment-friendly carborundum wire cutting liquid, which comprises the following raw materials in percentage by weight: 3-5% of multi-branched alcohol modified surfactant, 3-5% of dodecene glycol polyoxyethylene ether, 0.5-1% of hyperbranched Gemini cationic surfactant, 5-15% of special alcohol ether, 3-5% of isomeric stearic acid, 3-5% of AMP-953%, and the balance of deionized water added to 100%; the cutting fluid has the advantages of excellent wetting, cooling, lubricating, cleaning, low foaming and settling properties, good wetting and permeability, good antibacterial property, capability of preventing the cutting fluid from deteriorating, recyclability, high recycling rate and capability of effectively prolonging the service life of the cutting fluid. The cutting fluid can effectively prevent the surface of the silicon wafer from having large TTV and linear marks, and the silicon wafer is subjected to brittle fracture or scratch in the cutting process, so that the smoothness of the surface of the silicon wafer is improved, the silicon wafer is prevented from warping, the thickness of the processed silicon wafer is uniform, and the yield is improved.)

1. The environment-friendly carborundum wire cutting liquid is characterized by comprising the following raw materials in percentage by weight: 3-5% of multi-branched alcohol modified surfactant, 3-5% of dodecene glycol polyoxyethylene ether, 0.5-1% of hyperbranched Gemini cationic surfactant, 5-15% of special alcohol ether, 3-5% of isomeric stearic acid, 3-5% of AMP-953%, and the balance of deionized water added to 100%.

2. The environment-friendly carborundum wire cutting fluid as claimed in claim 1, wherein the wire cutting fluid comprises the following raw materials in percentage by weight: 4% of multi-branched alcohol modified surfactant, 4% of dodecene glycol polyoxyethylene ether, 0.8% of hyperbranched Gemini cationic surfactant, 10% of special alcohol ether, 4% of isomeric stearic acid, AMP-954 and the balance of deionized water to 100%.

3. The environment-friendly carborundum wire cutting fluid of claim 1, wherein said dodecenyl diol polyoxyethylene ether is 2,5,8, 11-tetramethyl-6-dodecenyl-5, 8-diol polyoxyethylene ether.

4. The environment-friendly emery wire-cutting fluid according to claim 3, wherein the hyperbranched Gemini cationic surfactant is DC-102.

5. The environment-friendly emery wire cutting fluid according to claim 4, wherein the special type of alcohol ether is one or both of DC-101 and DC-103.

Technical Field

The invention relates to the field of cutting fluid, in particular to environment-friendly carborundum wire cutting fluid.

Background

The silicon wafer is cut by utilizing the friction between the diamond plated on the outer layer of the sand line and the silicon wafer instead of the traditional steel wire, and the cutting speed is 2-3 times of that of a steel wire in the mortar cutting process. The required cutting fluid does not need mortar for suspending silicon carbide particles, and does not need to mix silicon carbide blade materials in the solution, the sheet yield is higher than that of a mortar cutting mode, the consumed water and electricity consumption is reduced by 60% compared with that of a mortar cutting technology, the silicon powder generated after cutting can be completely recycled, the resource utilization rate is greatly improved, the per unit production equipment is depreciated, the labor and energy cost is greatly reduced, and the energy-saving and environment-friendly effects are achieved. In order to smoothly finish the cutting of the silicon wafer by the diamond wire, prevent the silicon wafer stress, surface layer and subsurface layer from being damaged and broken edges, and improve the cutting yield of the silicon wafer, special cutting fluid is required. At present, the domestic diamond wire cutting fluid cannot meet the industrial production requirement and has high cost; the Total Thickness Variation (TTV) of the surface of the silicon wafer after cutting can not meet the requirement, the surface of the silicon wafer has deformation, and brittle fracture and scratch are generated during cutting; after the cutting fluid is used for a period of time, the lubricating property and the cooling property are greatly reduced, the cutting fluid is decayed, the later use is severely limited, and the service life of the cutting fluid is short. In addition, most of the existing carborundum wire cutting liquid contains foam stabilizing components, and a large amount of foam is generated in the cutting process, so that a large amount of organic silicon defoaming agent is required to be added for defoaming, and the phenomenon of groove overflow is prevented. But the addition of the organic silicon defoaming agent can greatly reduce the storage stability of the cutting fluid on one hand, and the organic silicon defoaming agent is easy to separate out and layer; on the other hand, the silicon wafer is reversely attached to the surface of the silicon wafer to form white spots which are not easy to clean, and the photoelectric conversion efficiency of the rear-end solar cell is influenced. In addition, in the diamond sand wire cutting process, the diamond plated on the outer layer of the sand wire is subjected to friction cutting with silicon crystals, so that large friction force is generated, and instant high temperature is generated; the silicon powder generated by cutting is very fine in particle size, the specific surface area is greatly increased, the silicon powder is easily adsorbed on the surface of a cut silicon wafer and is not easy to clean, and therefore the smoothness of a product is reduced, the damage is large, the product is easy to warp, and the yield is reduced.

In view of the above, there is a need for a carborundum wire cutting fluid that has excellent wetting, cooling, lubricating, cleaning, low foaming, and settling properties. The method can effectively prevent the silicon wafer from brittle fracture or scratch in the cutting process due to large TTV and line mark on the surface of the silicon wafer, thereby influencing the roughness and warping degree of the surface of the silicon wafer and enabling the thickness of the processed silicon wafer to be uniform.

Disclosure of Invention

In view of the above, the present invention provides an environment-friendly diamond wire cutting fluid, which has excellent wetting, cooling, lubricating, cleaning, low foaming and settling properties, and has good wetting and permeability properties, the cutting fluid has good antibacterial properties, the cutting fluid is prevented from deteriorating, the cutting fluid can be recycled, the recycling rate is high, and the service life of the cutting fluid is effectively prolonged. The cutting fluid can effectively prevent the surface of the silicon wafer from having large TTV and linear marks, and the silicon wafer is subjected to brittle fracture or scratch in the cutting process, so that the smoothness of the surface of the silicon wafer is improved, the silicon wafer is prevented from warping, the thickness of the processed silicon wafer is uniform, and the yield is improved. Meanwhile, the diamond wire is effectively protected, the abrasion of the diamond wire is reduced, the durability of the diamond wire is improved, the replacement frequency of the diamond wire is reduced, and the production efficiency and the economic benefit are improved.

The invention relates to an environment-friendly emery wire cutting liquid, which comprises the following raw materials in percentage by weight: 3-5% of multi-branched alcohol modified surfactant, 3-5% of dodecene glycol polyoxyethylene ether, 0.5-1% of hyperbranched Gemini cationic surfactant, 5-15% of special alcohol ether, 3-5% of isomeric stearic acid, 3-5% of AMP-953%, and the balance of deionized water added to 100%.

Further, the wire cutting fluid comprises the following raw materials in percentage by weight: 4% of multi-branched alcohol modified surfactant, 4% of dodecene glycol polyoxyethylene ether, 0.8% of hyperbranched Gemini cationic surfactant, 10% of special alcohol ether, 4% of isomeric stearic acid, AMP-954 and the balance of deionized water to 100%;

further, the dodecenyldiol polyoxyethylene ether is 2,5,8, 11-tetramethyl-6-dodecenylene-5, 8-diol polyoxyethylene ether;

further, the hyperbranched Gemini cationic surfactant is DC-102;

further, the special type of alcohol ether is one or two of DC-101 and DC-103.

The invention has the beneficial effects that: the environment-friendly emery wire cutting liquid disclosed by the invention has excellent wetting, cooling, lubricating, cleaning, low foaming and settling properties, and good wetting and permeability properties, has good antibacterial property, can prevent the cutting liquid from deteriorating, can be recycled, has high recycling rate, and effectively prolongs the service life of the cutting liquid. The cutting fluid can effectively prevent the surface of the silicon wafer from having large TTV and linear marks, and the silicon wafer is subjected to brittle fracture or scratch in the cutting process, so that the smoothness of the surface of the silicon wafer is improved, the silicon wafer is prevented from warping, the thickness of the processed silicon wafer is uniform, and the yield is improved. Meanwhile, the diamond wire is effectively protected, the abrasion of the diamond wire is reduced, the durability of the diamond wire is improved, the replacement frequency of the diamond wire is reduced, and the production efficiency and the economic benefit are improved.

Detailed Description

The environment-friendly emery wire cutting liquid comprises the following raw materials in percentage by weight: 3-5% of multi-branched alcohol modified surfactant, 3-5% of dodecene glycol polyoxyethylene ether, 0.5-1% of hyperbranched Gemini cationic surfactant, 5-15% of special alcohol ether, 3-5% of isomeric stearic acid, 3-5% of AMP-953%, and the balance of deionized water added to 100%. The hyperbranched Gemini cationic surfactant has extremely high charge density and adsorption performance, extremely low foam, strong acid resistance and strong electrolyte resistance, and is widely applied to glass processing as a cleaning agent, a settling agent, a dispersing agent and the like. Has the advantages of small dosage, no residue, high settling speed and the like. The special alcohol ether is a product of purification chemical technology limited company in Henan province. AMP-95 is a multifunctional amine assistant, and has the functions of regulating the pH value of the emulsion adhesive, moistening and dispersing. The multi-branched alcohol modified surfactant and the dodecene glycol polyoxyethylene ether are adopted to act synergistically, so that the water-based paint has excellent surface wetting and dispersing properties, and the static surface tension of 0.1 percent is 34.2; dynamic surface tension 35.7. The lubricant can carry lubricants such as special alcohol ether and the like to quickly cover the carborundum lines and the surfaces of silicon wafers to be cut, an effective lubricating film layer is quickly formed in a cutting area, the surface cleanliness of the silicon wafers is improved, smooth cutting is guaranteed, TVV is reduced, edge breakage of the silicon wafers is prevented, the quality and the yield of the silicon wafers are improved, the carborundum lines are effectively protected, abrasion of the carborundum lines is reduced, the service life of the carborundum lines is improved, the replacement frequency of the carborundum lines is reduced, and the production efficiency and the economic benefit are improved. Particular types of alcohol ethers have excellent lubricating properties of 1% PB90 KG. The hyperbranched Gemini cationic surfactant has good silicon powder settleability and antibacterial property, can effectively improve the separability of silicon powder and cutting fluid, improves the cyclic utilization rate of the cutting fluid, prevents the silicon powder from scratching the surface of a silicon wafer, improves the yield, ensures that the cutting fluid has good antibacterial property, and prevents the cutting fluid from deteriorating. The isomerous stearic acid and AMP-95 have excellent antirust performance, prevent the cutting machine tool from rusting, and have synergy with other additives. The wetting and permeability properties of the whole formula product are improved.

In the embodiment, the raw materials of the wire cutting fluid comprise the following components in percentage by weight: 4% of multi-branched alcohol modified surfactant, 4% of dodecene glycol polyoxyethylene ether, 0.8% of hyperbranched Gemini cationic surfactant, 10% of special alcohol ether, 4% of isomeric stearic acid, AMP-954 and the balance of deionized water to 100%; is a preferred embodiment.

In this embodiment, the dodecenyl diol polyoxyethylene ether is 2,5,8, 11-tetramethyl-6-dodecenyl-5, 8-diol polyoxyethylene ether.

In the embodiment, the hyperbranched Gemini cationic surfactant is DC-102; the DC-102 is a product of purification technology limited company in Henan province, has good silicon powder settleability and antibacterial property, can effectively improve the separability of silicon powder and cutting fluid, improves the cyclic utilization rate of the cutting fluid, prevents the silicon powder from scratching the surface of a silicon wafer, improves the yield, ensures that the cutting fluid has good antibacterial property, and prevents the cutting fluid from deteriorating.

In this embodiment, the specific type of alcohol ether is one or two of DC-101 and DC-103. A special type of alcohol ether DC-101: the environment-friendly composite material is phosphorus-free, foamless (without any defoaming agent), non-irritant, odorless, nonflammable and explosive, green, environment-friendly, easily biodegradable and free of secondary pollution to the environment; the acid resistance and alkali resistance are excellent, the compatibility with inorganic salt is good, and the compatibility is not influenced by high pH value; the lubricating agent has excellent lubricating property and wear resistance; good water solubility, no foam at normal temperature to high temperature; the addition of 1% can achieve good lubricity. Special type alcohol ether DC-103: the novel functional surfactant is compounded by a plurality of gemini surfactants. The oil-soluble organic acid-base oil has good compatibility with various surfactants, auxiliaries and solvents, and has excellent acid resistance, alkali resistance, sterilization, bacteriostasis and lubricating properties; low foam, no stimulation, no peculiar smell, nonflammability, explosiveness, greenness, environmental protection, easy biodegradation and no secondary pollution to the environment; the paint has excellent acid resistance and alkali resistance, is compatible with inorganic salt and has good compatibility; the lubricating oil has excellent lubricating property and wear resistance, and can effectively improve the service life of the cutter and the processing quality of metal parts; good water solubility and cooling property; the PB value of 1% water solution can reach more than 90. The special alcohol ethers DC-101 and DC-103 are products of purification technology limited company in Henan province.