阅读说明：本技术 集成于pcb上的压电致动流体泵 (PCB-integrated piezo-actuated fluid pump ) 是由 王代华 彭芸浩 唐炼凯 于 2019-11-13 设计创作，主要内容包括：本发明公开一种集成于PCB上的压电致动流体泵,包括PCB基板、泵作用单元和至少两个压电致动流体阀,泵作用单元分别通过流道与每个压电致动流体阀连接。其中泵作用单元由PCB工艺加工的泵腔壁和覆盖并固定在泵腔壁上的压电单晶执行器构成。压电致动流体阀由PCB工艺加工的阀腔壁、阀口部和覆盖并固定在阀腔壁上的压电单晶执行器构成。通过驱动泵作用单元和压电致动流体阀的压电单晶执行器,使它们有序动作实现流体流量、流速和流向的精确控制功能。本流体泵适宜于集成于PCB上,具有精密操控流体流量、流速和流向的功能,且能够实现与其它微小流控部件集成,从而为复杂的微小流控系统提供流体驱动动力源的功能。(The invention discloses a piezoelectric actuating fluid pump integrated on a PCB (printed circuit board), which comprises a PCB substrate, a pumping unit and at least two piezoelectric actuating fluid valves, wherein the pumping unit is respectively connected with each piezoelectric actuating fluid valve through a flow channel. The pump action unit consists of a pump cavity wall processed by a PCB process and a piezoelectric single crystal actuator covering and fixed on the pump cavity wall. The piezoelectric actuating fluid valve consists of a valve cavity wall, a valve port part and a piezoelectric single crystal actuator, wherein the valve cavity wall and the valve port part are processed by a PCB process, and the piezoelectric single crystal actuator is covered and fixed on the valve cavity wall. The pump action unit and the piezoelectric single crystal actuator of the piezoelectric actuation fluid valve are driven to orderly act to realize the precise control function of the fluid flow, the flow speed and the flow direction. The fluid pump is suitable for being integrated on a PCB, has the function of precisely controlling the flow rate, the flow speed and the flow direction of fluid, and can be integrated with other tiny flow control components, thereby providing the function of a fluid driving power source for a complex tiny flow control system.)

1. A PCB-integrated piezo-actuated fluid pump, comprising: the liquid valve comprises a PCB substrate, a pumping unit and at least two piezoelectric actuating fluid valves, wherein the pumping unit and the at least two piezoelectric actuating fluid valves are integrated on the PCB, the pumping unit is respectively connected with each piezoelectric actuating fluid valve through a flow channel, and the piezoelectric actuating fluid valves are used as liquid inlet valves or liquid outlet valves as required;

the pump action unit consists of a pump cavity wall processed by a PCB process and a piezoelectric single crystal actuator which is covered and fixed on the pump cavity wall;

the piezoelectric actuating fluid valve consists of a valve cavity wall, a valve port part and a piezoelectric single crystal actuator, wherein the valve cavity wall and the valve port part are processed by a PCB (printed Circuit Board) process, and the piezoelectric single crystal actuator covers and is fixed on the valve cavity wall and opens/closes the valve port; the top surface of the valve port part is higher than the bottom of the valve to form a surface boundary contacted with the piezoelectric single crystal actuator, the piezoelectric single crystal actuator is welded on the PCB through the wall of the valve port and is attached to or separated from the surface boundary of the valve port part to form an opening/closing relation, and the valve port part is a liquid inlet/outlet of the fluid pump;

the PCB wiring terminal is welded on the PCB substrate and electrically connected with the piezoelectric single crystal actuator, and the piezoelectric single crystal actuator drives the pump action unit and the piezoelectric actuation fluid valve to orderly act to realize the accurate control function of the flow rate, the flow speed and the flow direction of the fluid;

the driving voltage adopts multiple paths of input signals, each path of input signal respectively acts on the piezoelectric single crystal actuators of the liquid inlet valve, the liquid outlet valve and the pump action unit, the piezoelectric single crystal actuator of the liquid inlet valve is firstly applied with the driving voltage, the phase of the driving voltage acting on the piezoelectric single crystal actuator of the pump action unit lags behind the phase of the driving voltage acting on the piezoelectric single crystal actuator of the liquid inlet valve, the phase of the driving voltage acting on the piezoelectric single crystal actuator of the liquid outlet valve lags behind the phase of the driving voltage acting on the piezoelectric single crystal actuator of the pump action unit, and the flow, the flow speed, the flow direction and the back pressure of the piezoelectric actuating fluid pump are controlled by changing the amplitude, the frequency and the phase of the driving voltages acting on the piezoelectric single crystal actuators of the.

2. The PCB integrated piezo-actuated fluid pump of claim 1, wherein: the pump cavity wall of the pump action unit, the valve cavity wall of the piezoelectric actuating fluid valve and the valve port part are welded on the PCB substrate after being processed by a PCB process, or are directly processed and formed on the PCB substrate.

3. The PCB integrated piezo-actuated fluid pump of claim 2, wherein: the pump chamber wall and the valve chamber wall which are welded on the PCB substrate after being processed by the PCB process are annular parts, the upper end face and the lower end face of each annular part are respectively provided with a copper-clad layer, one end face of each annular part is welded on a copper-clad bonding pad on the PCB substrate, and the other end face of each annular part is welded with a piezoelectric single crystal actuator, so that a closed pump chamber and a closed valve chamber are formed.

4. The PCB integrated piezo-actuated fluid pump of claim 2, wherein: the pump cavity wall and the valve cavity wall which are directly processed and formed on the PCB substrate are formed by processing grooves downwards on the PCB substrate by using a PCB process, or formed by plating a copper-clad layer on the PCB substrate by using the PCB process.

5. The PCB integrated piezo-actuated fluid pump of claim 2, wherein: the pump cavity wall directly formed by processing on the PCB substrate is a cylindrical cavity which is directly processed on the PCB substrate by adopting a PCB process and is communicated up and down, and piezoelectric single crystal actuators are covered and fixed on the upper surface and the lower surface of the cylindrical cavity to form a double-piezoelectric single crystal actuator structure.

6. The PCB integrated piezo-actuated fluid pump of claim 2, wherein: the valve opening part is a cylinder or a circular table, a central through hole is processed in the center of the cylinder or the circular table to serve as a liquid inlet/outlet channel, the lower end face of the cylinder or the circular table is fully coated with a copper layer, the cylinder or the circular table is processed through a PCB process and then welded on a copper-coated welding disc on a PCB substrate or directly processed on the PCB substrate, the valve opening part is coaxially communicated with the through hole on the PCB substrate, and the upper end face of the cylinder or the circular table is a face boundary and is matched with a piezoelectric single crystal actuator to form an opening/closing state.

7. The PCB integrated piezo-actuated fluid pump according to any of claims 1-6, wherein: the pump cavity wall of the pumping action unit and the valve cavity wall of the piezoelectric actuating fluid valve are in circular cylindrical shapes, and the piezoelectric single crystal actuator is in a disc shape.

8. The PCB integrated piezo-actuated fluid pump according to any of claims 1-6, wherein: the pump action unit is characterized in that the pump cavity wall of the pump action unit and the valve cavity wall of the piezoelectric actuating fluid valve are both provided with notches communicated outwards and connected through a flow channel, and the flow channel is welded on a PCB substrate after being processed through a PCB process or is directly processed and formed on the PCB substrate.

9. The PCB integrated piezo-actuated fluid pump according to any of claims 1-6, wherein: the piezoelectric single crystal actuator is formed by bonding piezoelectric ceramics and a substrate, the edge of the substrate of the piezoelectric single crystal actuator is welded and fixed on the wall of a valve cavity or the wall of a pump cavity to form a solid supporting edge structure, the cathode of the piezoelectric single crystal actuator is connected with a system power ground, and the anode of the piezoelectric single crystal actuator is connected with the anode of the system power.

10. The PCB integrated piezoelectric actuated fluid pump of claim 8, wherein: at least one base film layer is added below a substrate of the piezoelectric single crystal actuator, and the material, thickness, diameter and the like of each layer of structure are changed according to specific work places, so that the parameters of the piezoelectric single crystal actuator such as flexibility, natural frequency and the like are changed.

Technical Field

The invention belongs to the technical field of microfluid machinery, and particularly relates to a technology for combining a piezoelectric actuating fluid pump with a piezoelectric single crystal actuator as a power source and a PCB (printed circuit board).

Background

The piezoelectric actuating fluid pump taking the piezoelectric single crystal actuator as the power source has unique advantages as the fluid driving source of micro-fluidic systems or devices such as chip heat dissipation systems, chip laboratories and the like due to the tiny volume, low energy consumption and flexible and changeable structural forms.

At present, chip heat dissipation systems, chip laboratories and other microfluidic systems or devices are generally driven by external fluid pumps, and additional power lines for driving the fluid pumps and pipelines for conveying liquid need to be arranged, so that the integration level of the whole system is low, and the driving force and the control capability of the fluid pumps are reduced due to large pressure loss in the pipelines, which is an important reason why the fluid pumps are not popularized in these application occasions.

To solve these problems, scholars at home and abroad mainly study the driving mode, processing technology and structural composition of the fluid pump. The driving method of the micro-body pump can be classified into a piezo-electric driving method, an electrostatic driving method, an electromagnetic driving method, a thermo-pneumatic driving method, and the like. The piezoelectric actuating fluid pump based on the inverse piezoelectric effect not only has the capability of driving liquid in microliter or even milliliter units, but also has the advantages of simple structure, large driving force and weak electromagnetic interference, so that the piezoelectric actuating fluid pump is suitable for realizing integration with other parts of a micro-fluidic system. Some researchers began to study the processing techniques of fluid pumps in order to reduce the volume of the fluid pumps, and the processing techniques generally include silicon processing techniques, glass and quartz processing techniques, and high molecular polymer processing techniques. Although the volume of the fluid pump made of silicon and high molecular polymer is smaller than that of the fluid pump made of metal, a micro system made of the silicon and the high molecular polymer needs to be provided with a pipeline, and is difficult to integrate with other parts of a micro flow control system, and the problems of weak fluid pump control capability and low integration level are not solved. The chinese patent application 200810069378.1 discloses a fluid pump with active precision control capability, which can achieve low flow rate and extremely high control precision, but does not disclose a structure in which the fluid pump is integrated with other components of micro-fluidic control. In addition, the fluid pump adopts a structural form of a single-piezoelectric single-crystal actuator, so that the compression ratio of a pump cavity is limited, and the improvement of the pump flow is also limited to a certain extent.

Since the researchers of various countries do not provide an effective solution on how to integrate the fluid pump with other components of micro-fluidic system, the fluid pump still has the problems of weak control capability, low integration degree, and the pump flow rate to be further improved in the system. Therefore, new breakthroughs in the integrated structure of the fluid pump and the structural optimization of the pump body are needed.

Disclosure of Invention

The invention aims to provide a piezoelectric actuating fluid pump integrated on a PCB (printed circuit board), which reduces the difficulty of integrating with other components of a micro flow control system, so that the fluid pump directly acts on the micro flow control system, and the control capability of the fluid pump and the integration degree of the system are improved.

The technical scheme of the invention is as follows:

the utility model provides an integrate piezoelectricity actuation fluid pump on PCB, its includes PCB base plate, the pump action unit and two at least piezoelectricity actuation fluid valves of integration on PCB, the pump action unit is connected with every piezoelectricity actuation fluid valve through the runner respectively, piezoelectricity actuation fluid valve is as feed liquor valve or play liquid valve as required, and the fluid passes through the feed liquor valve and flows into the pump chamber, finally flows out in a liquid valve.

The pump action unit consists of a pump cavity wall processed by a PCB process and a piezoelectric single crystal actuator covering and fixed on the pump cavity wall.

The piezoelectric actuating fluid valve consists of a valve cavity wall, a valve port part and a piezoelectric single crystal actuator, wherein the valve cavity wall and the valve port part are processed by a PCB process, and the piezoelectric single crystal actuator covers and is fixed on the valve cavity wall and opens/closes the valve port. The top surface of the valve port part is higher than the bottom surface of the valve to form a surface boundary contacted with the piezoelectric single crystal actuator, the piezoelectric single crystal actuator is welded on the PCB through the wall of the valve port and is attached to or separated from the surface boundary of the valve port part to form an opening/closing relation, and the valve port part is a liquid inlet/outlet of the fluid pump. When no voltage or negative voltage is applied, the bottom of the piezoelectric single crystal actuator is tightly close to the surface boundary of the valve port part, the liquid inlet/outlet is closed, liquid cannot flow into or out of the liquid inlet, and at the moment, even if the pumping action unit works, the fluid pump does not work. Therefore, the piezoelectric actuation fluid pump is a normally-closed piezoelectric actuation fluid pump and has good flow stopping characteristics.

The PCB wiring terminal is welded on the PCB substrate and electrically connected with the piezoelectric single crystal actuator, and the piezoelectric single crystal actuator drives the pump action unit and the piezoelectric actuation fluid valve to orderly act to realize the pumping in and out of the fluid. The flow, velocity and direction of the fluid are precisely controlled. The driving voltage adopts a plurality of paths of input signals, each path of input signal respectively acts on the piezoelectric single crystal actuators of the liquid inlet valve, the liquid outlet valve and the pump action unit, the piezoelectric single crystal actuator of the liquid inlet valve is firstly applied with the driving voltage, the phase lag of the driving voltage of the piezoelectric single crystal actuator acting on the pump action unit acts on the phase of the driving voltage of the piezoelectric single crystal actuator of the liquid inlet valve, the phase lag of the driving voltage of the piezoelectric single crystal actuator acting on the liquid outlet valve acts on the phase of the driving voltage of the piezoelectric single crystal actuator of the pump action unit, and the flow, the flow speed, the flow direction and the back pressure of the piezoelectric actuating fluid pump are controlled by changing the amplitude, the frequency and the phase of the driving voltages acting on the piezoelectric single crystal actuators of the liquid.

Specifically, the pump cavity wall of the pump action unit, the valve cavity wall of the piezoelectric actuation fluid valve and the valve port portion are welded on the PCB substrate after being processed by the PCB process, or are directly processed and formed on the PCB substrate.

The pump chamber wall and the valve chamber wall which are welded on the PCB substrate after being processed by the PCB process are annular parts, the upper end face and the lower end face of each annular part are respectively provided with a copper-clad layer, one end face of each annular part is welded on a copper-clad bonding pad on the PCB substrate, and the other end face of each annular part is welded with a piezoelectric single crystal actuator, so that a closed pump chamber and a closed valve chamber are formed.

The pump cavity wall and the valve cavity wall which are directly processed and formed on the PCB substrate are formed by processing grooves downwards on the PCB substrate by using a PCB process, or formed by plating a copper-clad layer on the PCB substrate by using the PCB process.

As the preferred structure of the invention, the pump cavity wall directly processed and formed on the PCB substrate is a vertically through cylindrical cavity directly processed on the PCB substrate by adopting a PCB process, the upper surface and the lower surface of the cylindrical cavity are covered and fixed with the piezoelectric single crystal actuator to form a double piezoelectric single crystal actuator structure, and the pump cavity compression ratio of the piezoelectric actuating fluid pump can be effectively improved and the flow rate of the piezoelectric actuating fluid pump can be improved by the structure.

Further, the valve opening part is a cylinder or a circular truncated cone, a central through hole is processed in the center of the cylinder or the circular truncated cone to serve as a liquid inlet/outlet channel, the lower end face of the cylinder or the circular truncated cone is fully coated with a copper layer, the cylinder or the circular truncated cone is processed through a PCB process and then welded on a copper-coated welding disc on a PCB substrate or directly processed on the PCB substrate, the valve opening part is coaxially communicated with the through hole on the PCB substrate, and the upper end face of the valve opening part is matched with the piezoelectric single crystal actuator to form an opening/closing.

Preferably, the pump cavity wall of the pumping action unit and the valve cavity wall of the piezoelectric actuation fluid valve are circular cylindrical, and the piezoelectric single crystal actuator is disc-shaped.

Preferably, the pump cavity wall of the pumping unit and the valve cavity wall of the piezoelectric actuation fluid valve are both provided with notches communicated outwards and connected through a flow channel, and the flow channel is welded on a PCB substrate after being processed through a PCB process or is directly processed and formed on the PCB substrate.

Preferably, the piezoelectric single crystal actuator is formed by bonding piezoelectric ceramics and a substrate, the edge of the substrate of the piezoelectric single crystal actuator is welded and fixed on the wall of a valve cavity or the wall of a pump cavity to form a fixed supporting edge structure, the negative electrode of the piezoelectric single crystal actuator is connected with a system power ground, and the positive electrode of the piezoelectric single crystal actuator is connected with the positive electrode of the system power.

Furthermore, at least one substrate film layer is added below the substrate of the piezoelectric single crystal actuator, and the material, thickness, diameter and the like of each layer of structure are changed according to specific work places, so that the parameters of the piezoelectric single crystal actuator such as flexibility, natural frequency and the like are changed.

The invention has the following advantages:

1. the piezoelectric actuating fluid pump is formed by processing each part of the pump through the PCB and welding the parts on the PCB substrate or directly processing the parts on the PCB substrate, has the advantages of simple structure, small volume and complete compatibility with the PCB process, and is suitable for being integrated on the PCB.

2. The PCB substrate of the piezoelectric actuating fluid pump can integrate circuits such as a driving power supply, a sensor and the like, is easy to integrate with other components of a micro flow control system, and improves the integration degree of the micro flow control system.

3. The preferred structure of the piezoelectric actuating fluid pump of the invention is that a through cylindrical cavity is directly processed on a PCB substrate to form the wall of the pump cavity, and piezoelectric single crystal actuators are covered and fixed on the upper surface and the lower surface of the cylindrical cavity to form a double piezoelectric single crystal actuator structure.

3. The piezoelectric actuating fluid pump adopts a fluid valve with a surface boundary higher than the bottom surface of the valve to form a liquid inlet valve and a liquid outlet valve, and because a general valve port is not higher than the bottom surface of the valve but is flush with the bottom surface of the valve, the piezoelectric actuating fluid pump adopts a circular ring or a cone with a surface boundary to form a valve port part, and the surface boundary is higher than the bottom surface of the valve and is matched with a piezoelectric single crystal actuator, so that the piezoelectric actuating fluid pump has extremely high flow stopping property and capability of actively controlling fluid when the valve does not work.

4. The piezoelectric actuating fluid pump is formed by welding through a PCB electric fitting process or directly processing on a PCB substrate, and the formed cavity has good sealing performance with a flow channel, so that liquid cannot directly contact with an electronic element, and the problem of electronic element failure caused by liquid leakage is solved.

5. The piezoelectric actuating fluid pump can realize bidirectional pumping by controlling the fluid valve, and the frequency, amplitude and phase relation of control signals acting on the disc-shaped piezoelectric single crystal actuator driving the fluid valve and the pumping action unit can be changed to change the states of the fluid pump, such as flow rate, flow speed, flow direction and the like.

Drawings

FIG. 1 is a schematic diagram of a PCB-integrated piezoelectric-actuated fluid pump of the present invention operating in a flow-stopped state according to a first embodiment;

fig. 2 is a schematic structural diagram of a PCB substrate of a piezo-actuated fluid pump according to a first embodiment of the present invention, wherein fig. 2 (a) is a schematic structural diagram of an upper surface of the PCB substrate, and fig. 2 (b) is a schematic structural diagram of a lower surface of the PCB substrate;

FIG. 3 is a schematic view of the chamber wall of the pumping unit of the present invention according to one embodiment;

FIG. 4 is a schematic diagram of a chamber wall of a fluid valve according to the present invention in accordance with one embodiment;

FIG. 5 is an electrical process flow of a PCB-integrated piezo-actuated fluid pump according to one embodiment of the present invention;

FIG. 6 is a three-way driving voltage for a four-phase pumping cycle of a PCB-integrated piezo-actuated fluid pump of the present invention according to one embodiment;

FIG. 7 is a four-phase pumping cycle of the PCB-integrated piezo-actuated fluid pump of the present invention in accordance with one embodiment;

FIG. 8 is a schematic diagram of an exemplary PCB-integrated piezo-actuated fluid pump according to the second embodiment of the present invention;

FIG. 9 is a schematic diagram of an exemplary PCB-integrated piezo-actuated fluid pump according to a third embodiment of the present invention;

FIG. 10 is a schematic diagram of an exemplary PCB-integrated piezo-actuated fluid pump according to the fourth embodiment of the present invention;

FIG. 11 is a top view of an exemplary PCB-integrated piezo-actuated fluid pump assembly of the present invention in accordance with a fifth embodiment;

FIG. 12 is a top view of a PCB substrate showing an exemplary embodiment of a PCB-integrated piezo-actuated fluid pump of the present invention according to a fifth embodiment;

FIG. 13 is a bottom view of a PCB substrate showing one embodiment of a PCB-integrated piezo-actuated fluid pump of the present invention in accordance with the fifth embodiment;

FIG. 14 is a schematic diagram of an exemplary PCB-integrated piezo-actuated fluid pump according to the sixth embodiment of the present invention;

fig. 15 is a schematic diagram of an embodiment of a PCB-integrated piezoelectric-actuated fluid pump according to the present invention.

Detailed Description

The invention is further illustrated by the following examples in conjunction with the accompanying drawings: