阅读说明：本技术 用于光学元件表面颗粒污染物的处理系统 (Treatment system for particle contaminants on the surface of optical elements ) 是由 牛龙飞 苗心向 周国瑞 刘昊 吕海兵 蒋一岚 蒋晓东 周海 倪卫 于 2019-12-16 设计创作，主要内容包括：本发明公开了一种用于光学元件表面颗粒污染物的处理系统,包括：底板,其上通过支撑柱放置有光学元件；风刀及离子棒单元,其通过支撑单元连接在底板上,且风刀及离子棒单元位于光学元件的一端,并使风刀及离子棒单元的出风口正对光学元件的上表面；静电吸附电极,其包括平行设置的正电极棒和负电极棒,正电极棒和负电极棒分别通过电极支撑架连接在底板上,且正电极棒位于光学元件的上方,负电极棒位于光学元件的的下方。本发明通过风刀及离子棒产生离子风或高速气流将光学元件表面的污染物去除并使污染物荷电,采用静电吸附电极在光学元件末端或将静电吸附电极带动在光学元件表面进行来回运动,对污染物进行收集,从而达到污染物去除的目的。(The invention discloses a treatment system for particle pollutants on the surface of an optical element, which comprises: a base plate on which an optical element is placed through support columns; the air knife and ion bar unit is connected to the bottom plate through the supporting unit and is positioned at one end of the optical element, and air outlets of the air knife and ion bar unit are opposite to the upper surface of the optical element; the electrostatic adsorption electrode comprises a positive electrode rod and a negative electrode rod which are arranged in parallel, the positive electrode rod and the negative electrode rod are connected to the bottom plate through electrode supporting frames respectively, the positive electrode rod is located above the optical element, and the negative electrode rod is located below the optical element. The invention removes the pollutants on the surface of the optical element and charges the pollutants by generating ion wind or high-speed airflow through the wind knife and the ion bar, adopts the electrostatic adsorption electrode at the tail end of the optical element or drives the electrostatic adsorption electrode to move back and forth on the surface of the optical element to collect the pollutants, thereby achieving the purpose of removing the pollutants.)

1. A system for treating particulate contaminants on the surface of an optical component, comprising:

a base plate on which an optical element is placed through support columns;

the air knife and ion bar unit is connected to the bottom plate through the supporting unit and is positioned at one end of the optical element, and air outlets of the air knife and ion bar unit are opposite to the upper surface of the optical element;

the electrostatic adsorption electrode comprises a positive electrode rod and a negative electrode rod which are arranged in parallel, the positive electrode rod and the negative electrode rod are connected to the bottom plate through electrode supporting frames respectively, the positive electrode rod is located above the optical element, and the negative electrode rod is located below the optical element.

2. The system of claim 1, wherein the edges of the optical element are supported by four support posts; and the optical element is connected with the tops of the four support columns in the following mode: the top of the supporting column is connected with a limiting plate, and a limiting part matched with the edge of the optical element is arranged on the limiting plate; and the cover plate is positioned above the edge of the optical element and is detachably connected with the limiting plate.

3. The system of claim 2, wherein the cover plate is removably attached to the retainer plate by a bolt.

4. The system of claim 2, wherein the optical element is any one of a rectangular, square, circular, triangular, or trapezoidal optical element.

5. The system of claim 1, wherein the air knife and ion bar unit comprises:

the air knife is connected to the supporting unit through a connecting plate; and the air outlet of the air knife is over against the upper surface of the optical element;

the ion bar is arranged between the air knife and the optical element through the ion bar supporting frame, and the ion bar is opposite to the air outlet of the air knife; one end of the ion bar supporting frame is connected to the shell of the air knife, and the other end of the ion bar supporting frame is connected with the ion bar;

and the compressed gas cylinder is connected with the air knife through a gas pipeline.

6. The system of claim 5, wherein the support unit is a three-degree-of-freedom adjustment mechanism.

7. The system of claim 6, wherein the three-degree-of-freedom adjustment mechanism comprises a linear sliding table I, a lifting sliding table II and a swinging sliding table which are sequentially connected from bottom to top; one side of the connecting plate is connected to the sliding block of the swing sliding table, and the other side of the connecting plate is connected with the shell of the air knife.

8. The system of claim 1, wherein the electrode holder of the positive electrode rod is a two-degree-of-freedom adjustment mechanism; the two-degree-of-freedom adjusting mechanism is a linear sliding table II and a lifting sliding table II which are sequentially connected from bottom to top.

9. The system of claim 1, wherein the electrostatic chuck electrode and its connection to the base plate are replaced by:

the electrostatic adsorption electrode comprises a positive electrode rod and a negative electrode rod which are arranged in parallel, the positive electrode rod and the negative electrode rod are connected to the bottom plate through the sliding unit, the positive electrode rod slides back and forth above the optical element through the sliding unit, and the negative electrode rod slides back and forth below the optical element.

10. The system of claim 9, wherein the slide unit comprises:

the slide rail base is connected to the bottom plate and is positioned on one side of the optical element; the slide rail base is connected with a slide rail; the sliding rail is connected with a sliding rail sliding block;

a wire track base connected to the base plate and located at the other side of the optical element; the silk track base is rotatably connected with a silk rod; the screw rod is connected with a screw rod sliding block; the front end of the screw rod is connected with a speed reducer and an electric controller which are used for controlling the screw rod to rotate and driving the screw rod sliding block to move;

the sliding rail sliding block is connected with a vertical electrode supporting seat I; the lead screw sliding block is connected with a vertical electrode supporting seat II; one end of each of the positive electrode rod and the negative electrode rod is vertically connected with the electrode supporting seat I; the other ends of the positive electrode rod and the negative electrode rod are vertically connected with the electrode supporting seat II.

Technical Field

The invention relates to the technical field of optics, in particular to a treatment system for particle pollutants on the surface of an optical element.

Background

During the construction and operation of the high-power laser device, a small amount of pollutants inevitably remain on the surface or the sub-surface of the optical-mechanical element, the number and frequency of the residual pollutants and sputtering pollutants in space are gradually increased along with the increase of the operation time and energy of the device, the surface of the optical element inevitably accumulates granular pollutants, and the granular pollutants are accumulated to a certain extent to seriously reduce the damage threshold of the optical element. Laser-induced damage to the surface of the optical element can result when the device is operated at higher fluxes, while reducing the operational performance and output capabilities of the device. The reflector is one of the important systems for the operation of the device, and the pollution problem of the reflector and the space cannot be ignored.

The clean closed loop is an important link for the whole process of the reflector cleaning maintenance system. Currently, the cleanliness of the mirror surface can be maintained to some extent despite the use of air knife purging. However, the removed particle pollutants may be in the interior of the reflector box or in the light transmission pipeline, and thus, the hidden danger of secondary pollution exists. The key problem can be solved by removing particle pollutants through electrostatic adsorption, the pollutants on the surface of the reflector are removed through ion wind or high-speed airflow, the pollutants are charged, and the electrostatic induction electrode is adopted to collect the pollutants at the tail end of the reflector, so that the purposes of removing the pollutants and collecting the pollutants at fixed points are achieved. When the device is changed or the clean unit is replaced in the pollutant receiver of maintenance stage, can make the going of pollutant obtain effective control to solve the surperficial particle pollution problem of speculum, realize the clean closed loop of the whole flow of system.

The invention discloses an electrostatic adsorption device for adsorbing particle pollutants on the surface of an optical element, which creatively applies an electrostatic adsorption principle and an ion bar air knife technology to the field of optical cleaning engineering, carries out online cleaning treatment on the particle pollutants on the surface of the optical element in an operating environment, maintains and maintains the clean state of the surface of the optical element, prevents the optical element from being damaged due to pollution, and has very important significance for ensuring high-flux operation of the device.

Disclosure of Invention

An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages described hereinafter.

To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided a processing system for particle contamination on a surface of an optical element, comprising:

a base plate on which an optical element is placed through support columns;

the air knife and ion bar unit is connected to the bottom plate through the supporting unit and is positioned at one end of the optical element, and air outlets of the air knife and ion bar unit are opposite to the upper surface of the optical element;

the electrostatic adsorption electrode comprises a positive electrode rod and a negative electrode rod which are arranged in parallel, the positive electrode rod and the negative electrode rod are connected to the bottom plate through electrode supporting frames respectively, the positive electrode rod is located above the optical element, and the negative electrode rod is located below the optical element.

Preferably, the edges of the optical element are supported and connected by four supporting columns; and the optical element is connected with the tops of the four support columns in the following mode: the top of the supporting column is connected with a limiting plate, and a limiting part matched with the edge of the optical element is arranged on the limiting plate; and the cover plate is positioned above the edge of the optical element and is detachably connected with the limiting plate.

Preferably, the detachable connection mode of the cover plate and the limiting plate is bolt connection.

Preferably, the optical element is any one of a rectangular optical element, a square optical element, a circular optical element, a triangular optical element and a trapezoidal optical element.

Preferably, the air knife and ion bar unit includes:

the air knife is connected to the supporting unit through a connecting plate; and the air outlet of the air knife is over against the upper surface of the optical element;

the ion bar is arranged between the air knife and the optical element through the ion bar supporting frame, and the ion bar is opposite to the air outlet of the air knife; one end of the ion bar supporting frame is connected to the shell of the air knife, and the other end of the ion bar supporting frame is connected with the ion bar;

the compressed gas cylinder is connected with the air knife through a gas pipeline;

preferably, the supporting unit is a three-degree-of-freedom adjusting mechanism.

Preferably, the three-degree-of-freedom adjusting mechanism is a linear sliding table I, a lifting sliding table II and a swinging sliding table which are sequentially connected from bottom to top; one side of the connecting plate is connected to the sliding block of the swing sliding table, and the other side of the connecting plate is connected with the shell of the air knife.

Preferably, the electrode support frame of the positive electrode rod is a two-degree-of-freedom adjusting mechanism; the two-degree-of-freedom adjusting mechanism is a linear sliding table II and a lifting sliding table II which are sequentially connected from bottom to top.

Preferably, the electrostatic adsorption electrode and the connection mode thereof to the base plate are replaced by:

the electrostatic adsorption electrode comprises a positive electrode rod and a negative electrode rod which are arranged in parallel, the positive electrode rod and the negative electrode rod are connected to the bottom plate through the sliding unit, the positive electrode rod slides back and forth above the optical element through the sliding unit, and the negative electrode rod slides back and forth below the optical element.

Preferably, the slide unit includes:

the slide rail base is connected to the bottom plate and is positioned on one side of the optical element; the slide rail base is connected with a slide rail; the sliding rail is connected with a sliding rail sliding block;

a wire track base connected to the base plate and located at the other side of the optical element; the silk track base is rotatably connected with a silk rod; the screw rod is connected with a screw rod sliding block; the front end of the screw rod is connected with a speed reducer and an electric controller which are used for controlling the screw rod to rotate and driving the screw rod sliding block to move;

the sliding rail sliding block is connected with a vertical electrode supporting seat I; the lead screw sliding block is connected with a vertical electrode supporting seat II; one end of each of the positive electrode rod and the negative electrode rod is vertically connected with the electrode supporting seat I; the other ends of the positive electrode rod and the negative electrode rod are vertically connected with the electrode supporting seat II.

The invention at least comprises the following beneficial effects: the invention removes the pollutants on the surface of the optical element and charges the pollutants by generating ion wind or high-speed airflow through the wind knife and the ion bar, adopts the electrostatic adsorption electrode at the tail end of the optical element or drives the electrostatic adsorption electrode to move back and forth on the surface of the optical element to collect the pollutants, thereby achieving the purpose of removing the pollutants and solving the problem of particle pollution on the surface of the optical element.

Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.

Description of the drawings:

FIG. 1 is a schematic diagram of the overall configuration of a system for treating particulate contaminants on the surface of an optical component according to the present invention;

FIG. 2 is a schematic diagram of an overall configuration of another alternative treatment system for particle contaminants on the surface of an optical component according to the present invention;

FIG. 3 is a schematic top view of another alternative system for treating particulate contaminants on the surface of an optical component according to the present invention;

FIG. 4 is a schematic view of a portion of a system for treating particulate contaminants on the surface of an optical component according to the present invention;

FIG. 5 is a schematic view of a portion of a system for treating particulate contaminants on the surface of an optical component according to the present invention;

FIG. 6 is a schematic diagram of a partial structure of a system for treating particle contaminants on the surface of an optical element according to the present invention.

The specific implementation mode is as follows:

the present invention is further described in detail below with reference to the attached drawings so that those skilled in the art can implement the invention by referring to the description text.

It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.

FIGS. 1-6 illustrate a system for treating particulate contaminants on the surface of an optical element according to the present invention, comprising:

a base plate 1 on which an optical element 3 is placed through support columns 2;

the air knife and ion bar unit 4 is connected to the bottom plate 1 through a supporting unit 5, the air knife and ion bar unit 4 is positioned at one end of the optical element 3, and an air outlet of the air knife and ion bar unit 4 is opposite to the upper surface of the optical element 3;

and the electrostatic adsorption electrode 6 comprises a positive electrode rod 60 and a negative electrode rod 61 which are arranged in parallel, the positive electrode rod 60 and the negative electrode rod 61 are respectively connected on the bottom plate through an electrode support frame 7, the positive electrode rod 60 is positioned above the optical element 3, and the negative electrode rod 61 is positioned below the optical element 3.

In the technical scheme, when the surface of the optical element needs to be cleaned and maintained, the air knife unit and the ion bar unit are adopted for sweeping, high-pressure clean gas passes through air outlets of the air knife unit and the ion bar unit to generate high-speed horizontal airflow, ions generated by the ion bar are blown to the surface of the optical element by the high-speed airflow of the air knife to remove pollutants on the surface of the optical element and charge the pollutants, and an electrostatic adsorption electrode is adopted for collecting the pollutants on the optical element, so that the purpose of removing the pollutants is achieved; the positive electrode bar is connected with the positive electrode of an external high-voltage power supply, and the negative electrode bar is connected with the negative electrode of the external high-voltage power supply.

In the above technical solution, the edges of the optical element 3 are supported and connected by four support columns 2; and the optical element 3 is connected with the tops of the four support columns 2 in the following way: the top of the supporting column 2 is connected with a limiting plate 21, and a limiting part 22 matched with the edge of the optical element 3 is arranged on the limiting plate 21; a cover plate 23 positioned above the edge of the optical element 3, wherein the cover plate 23 is detachably connected with the limiting plate 21; in this way, the optical element can be effectively clamped and fixed, and the installation is more stable.

In the above technical solution, the detachable connection mode between the cover plate 23 and the limiting plate 21 is bolt connection. In this way, the optical element can be disassembled and assembled more conveniently.

In the above technical solution, the optical element is any one of a rectangular optical element, a square optical element, a circular optical element, a triangular optical element, and a trapezoidal optical element.

In the above technical solution, the air knife and ion bar unit 4 includes:

an air knife 40 connected to the support unit 5 through a connection plate 41; and the air outlet of the air knife 40 is over against the upper surface of the optical element 3;

the ion bar 42 is arranged between the air knife 40 and the optical element 3 through an ion bar supporting frame 43, and the ion bar 42 is opposite to the air outlet of the air knife 40; one end of the ion bar supporting frame 43 is connected to the shell of the air knife 40, and the other end is connected with the ion bar 42;

a compressed gas cylinder (not shown) connected to the air knife through a gas line;

by adopting the mode, when the surface of the optical element needs to be cleaned and maintained, the air knife unit and the ion bar unit are adopted for blowing, the air outlet of the air knife generates high-speed horizontal airflow, ions generated by the ion bar are blown to the surface of the optical element by the high-speed airflow of the air knife, and pollutants on the surface of the optical element are removed and charged.

In the above technical solution, the supporting unit 5 is a three-degree-of-freedom adjusting mechanism; the three-degree-of-freedom adjusting mechanism is a linear sliding table I50, a lifting sliding table II 51 and a swinging sliding table 52 which are sequentially connected from bottom to top; one surface of the connecting plate 41 is connected to the slide block of the swing sliding table 52, and the other surface is connected to the casing of the air knife 40. By adopting the mode, the horizontal positions of the air knife and the ion bar unit can be adjusted through the linear sliding table I, the vertical positions of the air knife and the ion bar unit can be adjusted through the lifting sliding table II 51, and further the position adjustment of the surfaces of the air knife and the ion bar unit and the optical element is realized; the angle of the air knife and the ion bar unit can be adjusted through the swing sliding table, and then the position adjustment of the surface angle of the air knife, the ion bar unit and the optical element is achieved.

In the above technical solution, the electrode support frame 7 of the positive electrode rod 60 is a two-degree-of-freedom adjustment mechanism; the two-degree-of-freedom adjusting mechanism is a linear sliding table II 70 and a lifting sliding table II 71 which are sequentially connected from bottom to top; by adopting the mode, the horizontal position of the positive electrode rod 60 can be adjusted through the linear sliding table II, the vertical position of the positive electrode rod 60 can be adjusted through the lifting sliding table II, and then the adjustment of the distance between the positive electrode rod and the negative electrode rod and the surface distance between the positive electrode rod and the optical element is realized, so that the adsorption removal of particle pollutants on the surface of the optical element can be better realized.

In the above technical solution, the electrostatic adsorption electrode 6 and the connection manner thereof to the base plate are replaced by:

the electrostatic adsorption electrode 6 comprises a positive electrode rod 60 and a negative electrode rod 61 which are arranged in parallel, the positive electrode rod 60 and the negative electrode rod 61 are connected to the bottom plate 1 through the sliding unit 8, the positive electrode rod 60 slides back and forth above the optical element 3 through the sliding unit 8, and the negative electrode rod 61 slides back and forth below the optical element 3.

In the above technical solution, the sliding unit 8 includes:

a slide base 80 connected to the base plate 1 and located on one side of the optical element 3; the slide rail base 80 is connected with a slide rail 81; a sliding rail sliding block 82 is connected to the sliding rail 81;

a wire guide base 83 attached to the base plate 1 and located on the other side of the optical element 3; the silk track base 83 is rotatably connected with a silk pole 84; the screw rod 84 is connected with a screw rod sliding block 85; the front end of the screw 84 is connected with a speed reducer 86 and an electric controller 87 which are used for controlling the screw 84 to rotate and driving the screw slider 85 to move;

wherein, the slide rail slide block 82 is connected with a vertical electrode supporting seat I88; the lead screw slide block 85 is connected with a vertical electrode supporting seat II 89; one end of each of the positive electrode rod 60 and the negative electrode rod 61 is vertically connected with the electrode supporting seat I88; the other ends of the positive electrode rod 60 and the negative electrode rod 61 are vertically connected with an electrode supporting seat 89.

Adopt this kind of mode, it rotates to drive the lead screw through electric controller and reduction gear, lead screw slider is along lead screw linear motion, and drive I motion of electrode supporting seat, the slide rail slider of optical element opposite side is driven and is slided on the slide rail simultaneously, and drive II motions of electrode supporting seat, and then make positive electrode stick 60 and negative electrode stick 61 along optical element's surface motion, the slip of realization positive electrode stick 60 and negative electrode stick 61 that this kind of mode can be convenient, can realize getting rid of the omnidirectional absorption of optical element surface particulate matter, clean effect is more excellent.

While embodiments of the invention have been described above, it is not limited to the applications set forth in the description and the embodiments, which are fully applicable in various fields of endeavor to which the invention pertains, and further modifications may readily be made by those skilled in the art, it being understood that the invention is not limited to the details shown and described herein without departing from the general concept defined by the appended claims and their equivalents.