Grinding wheel
阅读说明:本技术 一种研磨砂轮 (Grinding wheel ) 是由 陈兴松 郑秉胄 赵晟佑 于 2019-11-06 设计创作,主要内容包括:本发明提供一种研磨砂轮,包括:环形基体;位于所述环形基体一端面的至少两圈砂轮齿,所述砂轮齿的底端通过粘接剂与所述环形基体固定连接,位于外圈的所述砂轮齿开设有贯穿其底端和顶端的排水孔,所述排水孔与所述环形基体内的排水通道相连通。根据本发明实施例的研磨砂轮,通过将砂轮齿直接固定在所述环形基体端面,无需在环形基体端面上开设沟槽,从而避免了砂轮齿嵌入沟槽部分无法使用的情况的发生,提高了砂轮齿的利用率,降低了生产加工成本;而且,由于在部分砂轮齿内开设了排水孔,增强了环形基体端面的冷却效果,使得设置两圈或多圈砂轮齿时同样满足冷却需求。(The invention provides a grinding wheel, comprising: an annular base; the grinding wheel teeth are positioned on one end face of the annular base body, the bottom ends of the grinding wheel teeth are fixedly connected with the annular base body through an adhesive, drain holes penetrating through the bottom end and the top end of the grinding wheel teeth are formed in the outer ring of the grinding wheel teeth, and the drain holes are communicated with a drain channel in the annular base body. According to the grinding wheel provided by the embodiment of the invention, the grinding wheel teeth are directly fixed on the end face of the annular base body, and a groove does not need to be formed on the end face of the annular base body, so that the condition that the grinding wheel teeth are embedded into the groove and cannot be used is avoided, the utilization rate of the grinding wheel teeth is improved, and the production and processing cost is reduced; moreover, as the water drain holes are formed in part of the grinding wheel teeth, the cooling effect of the end face of the annular base body is enhanced, and the cooling requirement is met when two or more circles of grinding wheel teeth are arranged.)
1. A grinding wheel, comprising:
an annular base;
the grinding wheel teeth are positioned on one end face of the annular base body, the bottom ends of the grinding wheel teeth are fixedly connected with the end face of the annular base body through an adhesive, drain holes penetrating through the bottom end and the top end of the grinding wheel teeth are formed in the outer ring of the grinding wheel teeth, and the drain holes are communicated with a drain channel in the annular base body.
2. A grinding wheel according to claim 1, characterized in that the roughness of the end face of the annular base body on which the grinding wheel teeth are located is in the range of 1.6 to 800 μm.
3. A grinding wheel according to claim 1, characterized in that the cross-sectional area of the grinding wheel teeth decreases from the bottom end of the grinding wheel teeth to the top end of the grinding wheel teeth.
4. A grinding wheel according to claim 3, characterized in that the cross-sectional shape of said grinding wheel teeth on the outer ring may be a combined pattern formed by an arbitrary plane closed pattern and a circle inside said plane closed pattern.
5. A grinding wheel according to claim 4, characterized in that said planar closed figure comprises: circular, elliptical, and polygonal.
6. A grinding wheel according to claim 4, wherein each of said grinding wheel teeth in the same circle are spaced apart and the shape of adjacent grinding wheel teeth differs from each other.
7. A grinding wheel according to claim 5, wherein the planar closed figure is an ellipse or a polygon, and an included angle between a line connecting two points closest and farthest to the center of circle of the grinding wheel tooth in the contour line of the end face at the bottom end of the grinding wheel tooth and a line connecting the center of circle of the grinding wheel tooth and the point closest to the center of circle of the grinding wheel tooth is in a range of 0 to 90 °.
8. A grinding wheel according to claim 1, further comprising:
and at least two circles of water drainage outer holes are formed in the end face of the annular base body where the grinding wheel teeth are located, and the water drainage outer holes and the grinding wheel teeth are alternately distributed in the radius direction of the annular base body.
9. A grinding wheel according to claim 1, characterized in that the mass of each of said grinding wheel teeth in the same circle is the same.
10. A grinding wheel according to claim 1, wherein said annular base is made of an aluminum alloy material and said grinding wheel teeth are made of a diamond material.
Technical Field
The invention relates to the technical field of silicon wafer processing, in particular to a grinding wheel.
Background
At present, the grinding wheel is widely applied to a grinding process and a thinning process in silicon wafer forming processing, and mainly comprises a table metal and grinding teeth, wherein grooves are formed in the surface of the table metal and used for mounting the grinding teeth, the height of the grinding teeth is generally 4mm, 5mm and 7mm, and the grinding teeth are partially embedded in the grooves, and the depth of the grooves is generally 1mm, so that the height of the final actually-used part of the grinding teeth is reduced. In the process of edge grinding of the silicon wafer, the grinding wheel is a main consumable, which is mainly reflected in the abrasion consumption of the grinding teeth, but the grinding teeth are expensive and high in manufacturing cost, so that the processing cost of the silicon wafer is increased. In addition, the existing grinding wheel is limited by the cooling and chip removal capacity, the grinding teeth on the grinding wheel are usually only one circle, and the machining efficiency is low.
Disclosure of Invention
In view of the above, the present invention provides a grinding wheel, which is used to solve the problems of increased production and processing costs and low grinding wheel processing efficiency caused by low utilization rate of grinding teeth.
In order to solve the technical problems, the invention adopts the following technical scheme:
the embodiment of the invention provides a grinding wheel, which comprises:
an annular base;
the grinding wheel teeth are positioned on one end face of the annular base body, the bottom ends of the grinding wheel teeth are fixedly connected with the end face of the annular base body through an adhesive, drain holes penetrating through the bottom end and the top end of the grinding wheel teeth are formed in the outer ring of the grinding wheel teeth, and the drain holes are communicated with a drain channel in the annular base body.
Optionally, the roughness range of the end face of the annular substrate where the grinding wheel teeth are located is 1.6-800 μm.
Optionally, the cross-sectional area of the grinding gear teeth gradually decreases from the bottom end of the grinding gear teeth to the top end of the grinding gear teeth.
Alternatively, the cross-sectional shape of the grinding wheel teeth on the outer ring can be a combined pattern formed by any plane closed pattern and a circle positioned inside the plane closed pattern.
Optionally, the planar closed figure includes: circular, elliptical, and polygonal.
Optionally, each of the grinding wheel teeth in the same circle is arranged at intervals, and the shapes of two adjacent grinding wheel teeth are different from each other.
Optionally, the planar closed figure is an ellipse or a polygon, and an included angle formed by a connecting line between two points of the contour line of the end face of the bottom end of the grinding wheel tooth, which are closest and farthest to the circle center of the circle where the grinding wheel tooth is located, and a connecting line between the circle center of the circle where the grinding wheel tooth is located and a point of the circle where the grinding wheel tooth is located, which is closest to the circle center of the circle where the grinding wheel tooth is located, is in a range of 0 to 90 °.
Optionally, the grinding wheel further comprises:
and at least two circles of water drainage outer holes are formed in the end face of the annular base body where the grinding wheel teeth are located, and the water drainage outer holes and the grinding wheel teeth are alternately distributed in the radius direction of the annular base body.
Optionally, the mass of each of the grinding wheel teeth in the same circle is the same.
Optionally, the annular substrate is made of an aluminum alloy material, and the grinding wheel teeth are made of a diamond material.
The technical scheme of the invention has the following beneficial effects:
according to the grinding wheel provided by the embodiment of the invention, the grinding wheel teeth are directly fixed on the end face of the annular base body, and a groove does not need to be formed on the end face of the annular base body, so that the condition that the grinding wheel teeth are embedded into the groove and cannot be used is avoided, the utilization rate of the grinding wheel teeth is improved, and the production and processing cost is reduced; moreover, as the water drain holes are formed in part of the grinding wheel teeth, the cooling effect of the end face of the annular base body is enhanced, and the cooling requirement is met when two or more circles of grinding wheel teeth are arranged.
Drawings
FIG. 1 is a schematic view of a prior art grinding wheel;
FIG. 2 is a schematic structural diagram of a silicon wafer thinning grinding wheel according to an embodiment of the present invention;
FIG. 3 is a schematic illustration of the location of the grinding wheel teeth and the annular base of the silicon wafer thinning grinding wheel in an embodiment of the invention;
FIG. 4 is a schematic cross-sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 5 is a second schematic cross-sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 6 is a third schematic cross-sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 7 is a fourth schematic sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 8 is a fifth schematic sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 9 is a sixth schematic sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 10 is a seventh schematic cross-sectional view of a grinding wheel tooth according to an embodiment of the present invention;
FIG. 11 is an eighth schematic cross-sectional view of a grinding wheel tooth in accordance with an embodiment of the present invention;
FIG. 12 is a ninth schematic view of the cross-sectional shape of the grinding wheel tooth according to the embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention, are within the scope of the invention.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a grinding wheel in the prior art. As shown in fig. 1, the prior art grinding wheel includes a table 11 and a
Therefore, the embodiment of the invention provides a grinding wheel to solve the above defects of the existing grinding wheel.
As shown in fig. 2 and 3, the grinding wheel in the embodiment of the present invention includes an
In the embodiment of the invention, because the
In the embodiment of the present invention, in order to further improve the structural strength and the bonding strength of the
As shown in fig. 4-10, in some embodiments of the present invention, the cross-sectional shape of the
Because the grinding wheel in the embodiment of the invention is provided with at least two circles of grinding
As shown in fig. 11 and 12, in the embodiment of the present invention, in order to further enhance the cooling effect and the drainage and chip removal effect, so as to make it possible to arrange two rows of
In some embodiments of the present invention, the cross-sectional shape of the outer ring
In some embodiments of the present invention, although the shape of the
In other embodiments of the present invention, the
According to the grinding wheel provided by the embodiment of the invention, the grinding wheel teeth are directly fixed on the end face of the annular base body, and a groove does not need to be formed on the end face of the annular base body, so that the condition that the grinding wheel teeth are embedded into the groove and cannot be used is avoided, the utilization rate of the grinding wheel teeth is improved, and the production and processing cost is reduced; moreover, as the water drain holes are formed in part of the grinding wheel teeth, the cooling effect of the end face of the annular base body is enhanced, and the cooling requirement is met when two or more circles of grinding wheel teeth are arranged.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
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