Method for manufacturing iris diaphragm
阅读说明:本技术 可变光圈的制作方法 (Method for manufacturing iris diaphragm ) 是由 陈嘉伟 韦怡 周彦汝 于 2019-11-04 设计创作,主要内容包括:本申请公开了一种可变光圈的制作方法,可变光圈的制作方法包括制作气压室以形成第一结构,第一结构包括隔绝气压室与外界的弹性薄膜;在弹性薄膜上设置储液腔以形成第二结构,储液腔与气压室位于弹性薄膜的相背的两侧;在第二结构上制造第一通道及第二通道,第一通道连通气压室与外界,第二通道连通储液腔及外界。本公开提供的可变光圈的制作方法是基于通过气体压力驱动光流体实现可变光圈的方案,可以解决制造这种可变光圈的技术难题。(The application discloses a manufacturing method of an iris diaphragm, which comprises the steps of manufacturing an air pressure chamber to form a first structure, wherein the first structure comprises an elastic film for isolating the air pressure chamber from the outside; a liquid storage cavity is arranged on the elastic film to form a second structure, and the liquid storage cavity and the air pressure chamber are positioned on two opposite sides of the elastic film; and manufacturing a first channel and a second channel on the second structure, wherein the first channel is communicated with the air pressure chamber and the outside, and the second channel is communicated with the liquid storage cavity and the outside. The manufacturing method of the variable aperture provided by the disclosure is based on the scheme that the variable aperture is realized by driving the optical fluid through gas pressure, and can solve the technical problem of manufacturing the variable aperture.)
1. A method of manufacturing an iris diaphragm, comprising:
manufacturing an air pressure chamber to form a first structure, wherein the first structure comprises an elastic film for isolating the air pressure chamber from the outside;
a liquid storage cavity is arranged on the elastic film to form a second structure, and the liquid storage cavity and the air pressure chamber are positioned on two opposite sides of the elastic film; and
and manufacturing a first channel and a second channel on the second structure, wherein the first channel is communicated with the air pressure chamber and the outside, and the second channel is communicated with the liquid storage cavity and the outside.
2. The method of claim 1, wherein the step of forming the first structure by forming the air chamber comprises:
providing a first substrate;
fabricating a mold core on the first substrate;
fabricating a plenum wall on the first substrate covering the mold core; and
and removing the mold core and the first substrate, wherein the air pressure chamber wall forms the air pressure chamber.
3. The method of claim 2, wherein the step of fabricating a mandrel on the first substrate comprises:
coating photoresist on the first substrate;
etching an air pressure chamber area on the photoresist by an ultraviolet exposure technology; and
and removing the photoresist outside the air pressure chamber area to form the mold core.
4. The method of claim 2, wherein the step of fabricating a plenum wall on the first substrate covering the core comprises:
spin-coating a liquid material on the core, the liquid material being capable of covering the core; and
and curing the liquid material after the spin coating is finished to form the air pressure chamber wall.
5. The method of claim 3, wherein the step of removing the core and the first substrate comprises:
removing the photoresist in the die core; and
and removing the first substrate.
6. The method of manufacturing an iris diaphragm according to claim 2, wherein the step of manufacturing an air pressure chamber to form the first structure further comprises:
providing a second substrate;
fabricating the elastic film on the second substrate; and
combining the air pressure chamber wall and the elastic film to obtain the first structure.
7. The method of claim 6, wherein the step of providing a reservoir on the elastic film to form a second structure comprises:
removing the second substrate;
one side of the elastic film, which is far away from the air pressure chamber, is provided with a hollow liquid storage cavity side wall; and
the liquid storage cavity side wall is provided with a liquid storage cavity top wall to form the second structure, and the liquid storage cavity side wall, the liquid storage cavity top wall and the elastic film jointly form the liquid storage cavity.
8. The method of claim 6, wherein the step of providing a reservoir on the elastic film to form a second structure comprises:
removing the second substrate; and
and arranging a liquid storage cavity wall on one side of the elastic film, which is far away from the air pressure chamber, so as to form the second structure, wherein a blind hole is formed in the liquid storage cavity wall, the opening of the blind hole faces the elastic film, and the liquid storage cavity is formed by the liquid storage cavity wall and the elastic film together.
9. The method of claim 7, wherein the step of fabricating a first channel and a second channel on the second structure comprises:
penetrating the top wall of the reservoir chamber to create the second channel; and
the first channel is made by penetrating the top wall of the liquid storage cavity, the side wall of the liquid storage cavity and the elastic film.
10. The method of manufacturing an iris diaphragm according to claim 1, further comprising:
and injecting a light absorption solution into the liquid storage cavity, wherein the liquid storage cavity is filled with the light absorption solution.
Technical Field
The present disclosure relates to the field of optical devices, and more particularly, to a method for manufacturing an iris diaphragm.
Background
The light fluid can be driven by gas pressure to realize the iris diaphragm, specifically, the iris diaphragm is provided with an air pressure chamber and a liquid storage cavity, the elastic film of the air pressure chamber is deformed by changing the air pressure of the air pressure chamber, liquid in the liquid storage cavity is driven to deform, the elastic film is contacted with the top of the liquid storage cavity, and the contact area is the iris diaphragm. At present, the application of the iris diaphragm is more and more extensive, and how to manufacture the iris diaphragm becomes a technical problem to be solved.
Disclosure of Invention
The embodiment of the application provides a manufacturing method of an iris diaphragm.
The method for manufacturing the iris diaphragm according to the embodiment of the present application includes:
manufacturing an air pressure chamber to form a first structure, wherein the first structure comprises an elastic film for isolating the air pressure chamber from the outside; a liquid storage cavity is arranged on the elastic film to form a second structure, and the liquid storage cavity and the air pressure chamber are positioned on two opposite sides of the elastic film; and manufacturing a first channel and a second channel on the second structure, wherein the first channel is communicated with the air pressure chamber and the outside, and the second channel is communicated with the liquid storage cavity and the outside.
In some embodiments, the step of fabricating the plenum to form the first structure comprises: providing a first substrate; fabricating a mold core on the first substrate; fabricating a plenum wall on the first substrate covering the mold core; and removing the mold core and the first substrate, wherein the air pressure chamber wall forms the air pressure chamber.
In certain embodiments, the step of fabricating a mold core on the first substrate comprises:
coating photoresist on the first substrate; etching an air pressure chamber area on the photoresist by an ultraviolet exposure technology; and removing the photoresist outside the air pressure chamber area to form the mold core.
In certain embodiments, the step of fabricating a plenum wall on the first substrate covering the mold core comprises:
spin-coating a liquid material on the core, the liquid material being capable of covering the core; and curing the liquid material after the spin coating is finished to form the air pressure chamber wall.
In some embodiments, the step of removing the mandrel and the first substrate comprises:
removing the photoresist in the die core; and removing the first substrate.
In some embodiments, the step of fabricating the plenum to form the first structure further comprises:
providing a second substrate; fabricating the elastic film on the second substrate; and combining the air pressure chamber wall and the elastic film to obtain the first structure.
In some embodiments, the step of providing a reservoir on the elastic membrane to form a second structure comprises:
removing the second substrate; one side of the elastic film, which is far away from the air pressure chamber, is provided with a hollow liquid storage cavity side wall; and a liquid storage cavity top wall is arranged on the liquid storage cavity side wall to form the second structure, and the liquid storage cavity side wall, the liquid storage cavity top wall and the elastic film jointly form the liquid storage cavity.
In some embodiments, the step of providing a reservoir on the elastic membrane to form a second structure comprises:
removing the second substrate; and arranging a liquid storage cavity wall on one side of the elastic film, which is far away from the air pressure chamber, so as to form the second structure, wherein a blind hole is formed in the liquid storage cavity wall, the opening of the blind hole faces the elastic film, and the liquid storage cavity is formed by the liquid storage cavity wall and the elastic film together.
In some embodiments, the step of fabricating a first via and a second via on the second structure comprises:
penetrating the top wall of the reservoir chamber to create the second channel; and penetrating the top wall of the liquid storage cavity, the side wall of the liquid storage cavity and the elastic film to manufacture the first channel.
In some embodiments, the method of making the iris diaphragm further comprises:
and injecting a light absorption solution into the liquid storage cavity, wherein the liquid storage cavity is filled with the light absorption solution.
The manufacturing method of the iris diaphragm, provided by the application, is based on the scheme that the optical fluid is driven by the gas pressure to realize the iris diaphragm, can solve the technical problem of manufacturing the iris diaphragm, and is simple in process flow by firstly manufacturing the gas pressure chamber, then manufacturing the
Additional aspects and advantages of embodiments of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of embodiments of the present application.
Drawings
The above and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic flow chart of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 2 is a schematic view of a scene of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 3 is a schematic flow chart of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 4 is a schematic view of a scene of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 5 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 6 is a schematic flow chart of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 7 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 8 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 9 is a schematic view of a scene of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 10 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 11 is a schematic view of a scene of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 12 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 13 is a schematic view of a scene of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 14 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 15 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 16 is a schematic flow chart illustrating a method of manufacturing an iris diaphragm according to an embodiment of the present application;
fig. 17 is a schematic view of a scene of a method of manufacturing an iris diaphragm according to an embodiment of the present application;
FIG. 18 is a schematic diagram of a scene of an embodiment of an iris diaphragm of an embodiment of the present application;
fig. 19 is a schematic view of a scene of one state of the variable aperture stop according to the embodiment of the present application.
Description of the main element symbols:
the
Detailed Description
Embodiments of the present application will be further described below with reference to the accompanying drawings. The same or similar reference numbers in the drawings identify the same or similar elements or elements having the same or similar functionality throughout.
In addition, the embodiments of the present application described below in conjunction with the accompanying drawings are exemplary and are only for the purpose of explaining the embodiments of the present application, and are not to be construed as limiting the present application.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
Referring to fig. 1 to 2, a method for manufacturing an
The method of manufacturing the
s10: manufacturing an
s20: a
s30: a
The method for manufacturing the
In step S10, the shape of the
in step S20, the
In step S30, the
Referring to fig. 3 and 4, in some embodiments, the step S10 of fabricating the
step S11: providing a first substrate 14;
step S12: manufacturing a mold core 17 on the first substrate 14;
step S13: making a gas
step S14: the mold core 17 and the first substrate 14 are removed and the
Specifically, the first substrate 14 may be a silicon wafer, or the like, which is not limited herein, and the first substrate 14 is a silicon wafer for explanation, and it is understood that the first substrate 14 may be other substrates.
Referring to fig. 5, in some embodiments, step S12 includes step S121, step S122, and step S123.
Step S121: applying a photoresist on the first substrate 14;
step S122: etching an air pressure chamber area 16 on the photoresist by an ultraviolet exposure technology; and
step S123: removing the photoresist outside the plenum region 16;
the photoresist may be SU-8, BN308, BN303, BP212, AZ9620, etc., without limitation. The photoresist outside the air pressure chamber region 16 may be removed by cleaning with a chemical solution, an optical method, or the like, and the specific removal method is not limited herein. The air pressure chamber area 16 is carved by the ultraviolet exposure technology, the ultraviolet exposure technology is mature, the manufacturing process is simple, the cost is low, and meanwhile, the manufacturing precision is high.
Referring to fig. 6, in some embodiments, step S13 includes:
step S131: spin-coating a liquid material on the mold core 17, the spin-coating liquid material being capable of covering the mold core 17; and
step S132: and curing the liquid material after the spin coating to form the air
Specifically, the liquid material may be an organic material such as Polydimethylsiloxane (PDMS), polymethyl methacrylate (PMMA), and the like, which is not limited herein. The curing method may be natural drying, radiation curing, and the like, which is not limited herein. Firstly, a liquid material is spin-coated on the mold core 17, and then the spin-coated liquid material is cured, so that the formed air
Referring to fig. 7, in some embodiments, step S14 includes:
s141: removing the photoresist in the mold core 17; and
s142: the first substrate 14 is removed.
Specifically, the photoresist in the mold core 17 may be removed by a chemical solution, an optical method, a photoresist remover, and the like, and the specific embodiment is not limited herein. After the photoresist in the mold core 17 is removed, the
Referring to fig. 8 and 9, in some aspects, the step S10 further includes:
s15: providing a
s16: manufacturing an
s17: the
Specifically, the
In step S16, the
In step S17, the
Referring to fig. 10 and 11, in some embodiments, step S20 includes:
step S21: removing the
step S22: a hollow liquid storage
step S23: a
Specifically, in step S22, the
Referring to fig. 12 and 13, in some embodiments, step S20 includes:
s21: removing the
s24: a liquid
Specifically, the liquid
Referring to fig. 14, in some embodiments, step S30 includes:
s31: a
s32: a
Referring to fig. 15, in some embodiments, step S30 includes:
s33: through the
s34: a
Specifically, the
The opening of the
In some embodiments, the
Referring to fig. 16 and 17, in some embodiments, the method for manufacturing the
Referring to fig. 18 and 19, further, after the light absorbing
The
In the description herein, reference to the description of the terms "certain embodiments," "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present application, "a plurality" means at least two, e.g., two, three, unless specifically limited otherwise.
Although embodiments of the present application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present application, and that variations, modifications, substitutions and alterations of the above embodiments may be made by those of ordinary skill in the art within the scope of the present application, which is defined by the claims and their equivalents.
- 上一篇:一种医用注射器针头装配设备
- 下一篇:扩散板、直下式背光模块及显示装置