阅读说明：本技术 多分力传感器 (Multi-component force sensor ) 是由 汪星星 王建国 王梦茹 于 2019-12-12 设计创作，主要内容包括：本发明提供了一种多分力传感器,包括：用于测量XY轴方向上的力的第一传感器本体、用于测量Z轴方向上的力和XYZ轴扭矩的第二传感器本体和连接导柱；所述第一传感器本体上形成有两个相互垂直布置的第一梁和第二梁；所述第二传感器本体包括周边固定圆环和四个沿所述周边固定圆环的径向正交设置的横梁,所述连接导柱的下端位于所述周边固定圆环中并通过所述横梁与所述周边固定圆环连接；所述第一梁、第二梁、横梁上均贴有应变计；所述第一传感器本体的上端面为承载平面,所述第一传感器本体的下端与所述连接导柱的上端连接。本发明可以同时进行六轴力的检测,且结构简单、成本低。(The invention provides a multi-component force sensor, comprising: the sensor comprises a first sensor body for measuring force in the XY axis direction, a second sensor body for measuring force in the Z axis direction and XYZ axis torque, and a connecting guide column; the first sensor body is provided with a first beam and a second beam which are vertically arranged; the second sensor body comprises a peripheral fixed ring and four cross beams which are orthogonally arranged along the radial direction of the peripheral fixed ring, and the lower end of the connecting guide column is positioned in the peripheral fixed ring and is connected with the peripheral fixed ring through the cross beams; strain gauges are attached to the first beam, the second beam and the cross beam; the upper end face of the first sensor body is a bearing plane, and the lower end of the first sensor body is connected with the upper end of the connecting guide pillar. The invention can simultaneously detect six-axis force, and has simple structure and low cost.)

1. A multi-component force sensor, comprising: a first sensor body (1) for measuring force in the XY axis direction, a second sensor body (2) for measuring force in the Z axis direction and XYZ axis torque, and a connecting guide post (3);

the first sensor body (1) is provided with a first beam (6) and a second beam (7) which are vertically arranged;

the second sensor body (2) comprises a peripheral fixed circular ring (4) and four cross beams (5) which are orthogonally arranged along the radial direction of the peripheral fixed circular ring (4), and the lower end of the connecting guide column (3) is positioned in the peripheral fixed circular ring (4) and is connected with the peripheral fixed circular ring (4) through the cross beams (5);

strain gauges are attached to the first beam (6), the second beam (7) and the cross beam (5);

the upper end face of the first sensor body (1) is a bearing plane (8), and the lower end of the first sensor body (1) is connected with the upper end of the connecting guide pillar (3).

2. Multi-component force sensor according to claim 1, characterized in that the first sensor body (1) and the connecting guide post (3) are of an integrally formed cylindrical structure.

3. Multi-component force sensor according to claim 2, wherein the first beam (6) and the second beam (7) are arranged in sequence from top to bottom along the extension direction of the cylindrical structure.

4. Multi component force sensor according to claim 3, wherein the cylindrical structure is formed with first notches on its front and rear circumferential sides, the first beams (6) being formed between the first notches, and the cylindrical structure is formed with second notches on its left and right circumferential sides, the second beams (7) being formed between the second notches.

5. The multi-component force sensor according to claim 1, further comprising a mounting base plate (9), an outer cover (10) and a sealing cover plate (11), wherein the sealing cover plate (11) is mounted at an upper opening of the outer cover (10), the mounting base plate (9) is mounted at a lower opening of the outer cover (10), a mounting space is defined by the mounting base plate (9), the outer cover (10) and the sealing cover plate (11), the first sensor body (1), the second sensor body (2) and the connecting guide pillar (3) are all arranged in the mounting space, and the second sensor body (2) is fixedly connected with the mounting base plate (9).

6. The multi-component force sensor according to claim 5, wherein a through hole (12) is formed in the sealing cover plate (11), an outer edge groove (13) is formed at an edge of the through hole (12), an annular sealing groove (14) is formed in the circumferential direction of the first sensor body (1), the upper end of the first sensor body (1) is inserted into the through hole (12), the multi-component force sensor further comprises a sealing diaphragm (15) and a pressing assembly, and the sealing diaphragm (15) is mounted at the outer edge groove (13) and the annular sealing groove (14) through the pressing assembly.

7. The multi component force sensor according to claim 6, wherein the compression assembly includes an outer ring compression ring (16) for compression sealing the sealing diaphragm (15) with the outer edge groove (13), and an inner ring compression ring (17) for compression sealing the sealing diaphragm (15) with the annular seal groove (14).

8. The multi-component force sensor according to claim 6, wherein the outer ring of the sealing diaphragm (15) is arranged at the outer edge groove (13) and sealed with the outer edge groove (13) by silicone coating, and/or the outer ring of the sealing diaphragm (15) is arranged at the annular sealing groove (14) and sealed with the annular sealing groove (14) by silicone coating.

9. Multi-component force sensor according to claim 6, characterized in that the sealing diaphragm (15) is of a corrugated diaphragm type structure.

10. The multi-component force sensor according to claim 5, wherein the mounting base plate (9) is provided with a mounting hole (18), and the bearing plane (8) is provided with a mounting screw hole and/or a positioning pin hole for mounting a polished workpiece or a jig.

Technical Field

The invention relates to the field of force sensors, in particular to a multi-component force sensor.

Background

In the grinding and polishing industry, due to the particularity of the industry, the environment is severe, at present, an automatic polishing grinding machine or a robot is increasingly used for replacing manual operation in the industry, but in the polishing and polishing process, particularly, a six-axis force sensor is mostly used for accurately controlling a force value in the working process of a curved surface polishing robot arm, but the sensor is assembled on the arm, the protection is very difficult, and the influence of long-term work on the sensor is very large; in addition, six-axis force is rarely used simultaneously in the polishing process, and 2-3-axis force is generally used more, so that the polishing process is very wasteful in terms of cost control.

Disclosure of Invention

The present invention provides a multi-component force sensor to solve at least one of the above technical problems.

To solve the above problem, as an aspect of the present invention, there is provided a multi-component force sensor including: the sensor comprises a first sensor body for measuring force in the XY axis direction, a second sensor body for measuring force in the Z axis direction and XYZ axis torque, and a connecting guide column; the first sensor body is provided with a first beam and a second beam which are vertically arranged; the second sensor body comprises a peripheral fixed ring and four cross beams which are orthogonally arranged along the radial direction of the peripheral fixed ring, and the lower end of the connecting guide column is positioned in the peripheral fixed ring and is connected with the peripheral fixed ring through the cross beams; strain gauges are attached to the first beam, the second beam and the cross beam; the upper end face of the first sensor body is a bearing plane, and the lower end of the first sensor body is connected with the upper end of the connecting guide pillar.

Preferably, the first sensor body and the connecting guide post are of an integrally formed cylindrical structure.

Preferably, the first beam and the second beam are sequentially arranged from top to bottom along the extending direction of the cylinder structure.

Preferably, the circumference front and back both sides of cylinder structure are formed with first breach, two form between the first breach first roof beam, the circumference left and right sides of cylinder structure is formed with the second breach, two form between the second breach the second roof beam.

Preferably, the multi-component force sensor further comprises a mounting base plate, an outer cover and a sealing cover plate, the sealing cover plate is mounted at an opening at the upper end of the outer cover, the mounting base plate is mounted at an opening at the lower end of the outer cover, a mounting space is defined by the mounting base plate, the outer cover and the sealing cover plate, the first sensor body, the second sensor body and the connecting guide pillar are all arranged in the mounting space, and the second sensor body is fixedly connected with the mounting base plate.

Preferably, a through hole is formed in the sealing cover plate, an outer edge groove is formed in the edge of the through hole, an annular sealing groove is formed in the circumferential direction of the first sensor body, the upper end of the first sensor body is inserted into the through hole, the multi-component force sensor further comprises a sealing diaphragm and a pressing assembly, and the sealing diaphragm is installed in the outer edge groove and the annular sealing groove through the pressing assembly.

Preferably, the pressing assembly comprises an outer ring pressing ring for pressing and sealing the sealing membrane and the outer edge groove, and an inner ring pressing ring for pressing and sealing the sealing membrane and the annular sealing groove.

Preferably, the outer ring of the sealing diaphragm is arranged at the outer edge groove and sealed with the outer edge groove by silica gel coating, and/or the outer ring of the sealing diaphragm is arranged at the annular sealing groove and sealed with the annular sealing groove by silica gel coating.

Preferably, the sealing membrane is of a corrugated membrane type structure.

Preferably, the mounting base plate is provided with a mounting hole, and the bearing plane is provided with a mounting screw hole and/or a positioning pin hole for mounting a polished workpiece or a jig.

Due to the adoption of the technical scheme, the six-axis force detection device can detect six-axis force at the same time, and is simple in structure and low in cost.

Drawings

FIG. 1 schematically illustrates an exploded view of the present invention;

FIG. 2 schematically illustrates a perspective view of the present invention;

FIG. 3 schematically illustrates a top view of the present invention;

FIG. 4 schematically illustrates a front view of the present invention;

FIG. 5 schematically illustrates a cross-sectional view A-A of FIG. 4;

FIG. 6 schematically illustrates a perspective view of the sensor assembly;

FIG. 7 schematically illustrates a front view of the sensor assembly;

fig. 8 schematically shows a top view of the sensor assembly.

Reference numbers in the figures: 1. a first sensor body; 2. a second sensor body; 3. connecting the guide post; 4. a ring is fixed on the periphery; 5. a cross beam; 6. a first beam; 7. a second beam; 8. a load bearing plane; 9. mounting a bottom plate; 10. a housing; 11. sealing the cover plate; 12. a through hole; 13. an outer edge groove; 14. an annular seal groove; 15. sealing the membrane; 16. an outer ring compression ring; 17. an inner ring compression ring; 18. mounting holes; 19. waterproof connector lug.

Detailed Description

The embodiments of the invention will be described in detail below with reference to the drawings, but the invention can be implemented in many different ways as defined and covered by the claims.

In one aspect of the invention, a multi-component force sensor, in particular a multi-component force sensor dedicated to a dynamic grinding machine, is provided for satisfying force value control during polishing.

The multi-component force sensor includes: a first sensor body 1 for measuring force in the XY axis direction, a second sensor body 2 for measuring force in the Z axis direction and XYZ axis torque, and a connecting guide post 3; the first sensor body 1 is provided with a first beam 6 and a second beam 7 which are vertically arranged; the second sensor body 2 comprises a peripheral fixed ring 4 and four cross beams 5 which are orthogonally arranged along the radial direction of the peripheral fixed ring 4, and the lower end of the connecting guide pillar 3 is positioned in the peripheral fixed ring 4 and is connected with the peripheral fixed ring 4 through the cross beams 5; strain gauges are attached to the first beam 6, the second beam 7 and the cross beam 5; the upper end surface of the first sensor body 1 is a bearing plane 8, and the lower end of the first sensor body 1 is connected with the upper end of the connecting guide pillar 3.

Preferably, the first sensor body 1 and the connecting guide post 3 are of an integrally formed cylindrical structure. Preferably, the first beam 6 and the second beam 7 are sequentially arranged from top to bottom along the extending direction of the cylinder structure.

The sensor assembly of the present invention comprises a first sensor body 1 and a second sensor body 2, which are connected by a connecting guide post 3. The first sensor body 1 is mainly used for measuring X, Y axial force, and the second sensor body 2 is used as a main body for force application and is also used for measuring XYZ axial torque of Z axial force.

For the detection of the force values in the XY direction, the force of the sensor is transmitted through a jig or a workpiece installed on the bearing plane 8, the force values in the X and Y directions are sensed on the first sensor body 1, the force values are sensed through the first beam 6 and the second beam 7 which are vertically arranged on the first sensor body 1, the strain gauge is attached to the centers of the first beam 6 and the second beam 7, and the coupling influence between the two beams is very small because the two beams are vertically arranged.

For the force value in the Z-axis direction and the torque in the Z-axis direction, the peripheral fixed ring 4 of the second sensor body 2 extends inwards to form four beams 5, and a connecting guide pillar 3 is formed in the middle. The connecting guide post 3 is connected (integrally or separately connected) with the first sensor body 1 at the upper end. Thus, when the Z-axis force and torque are transmitted to the second sensor body 2, the four beams are subjected to bending and torsional deformation. When the strain gauge is bent, a force in the Z-axis direction is measured, and the strain gauge is attached to the center of the upper end surface of the beam 5. When the strain gauge is torsionally deformed, a torque in the Z-axis direction is measured, and the strain gauge is attached to the right center of both sides of the side surface of the beam 5.

The torque of X and Y axes can be measured on the second sensor body 2 by combining the four cross beams 5 by using patches in different modes, so that the force in X, Y and Z directions and the torque in three directions can be measured simultaneously, and a 6-axis force sensor is formed.

Due to the adoption of the technical scheme, the six-axis force detection device can detect six-axis force at the same time, and is simple in structure and low in cost.

Preferably, first gaps are formed in the front side and the rear side of the circumferential direction of the cylindrical structure, the first beam 6 is formed between the two first gaps, second gaps are formed in the left side and the right side of the circumferential direction of the cylindrical structure, and the second beam 7 is formed between the two second gaps.

As a sensor for polishing and grinding, due to the harsh working environment, the sensor not only has the influence of vibration and impact force on the site, but also has dust and polishing liquid, and has strong corrosivity, and if the sensor is not well protected, the sensor can be damaged, and the service life of the sensor is shortened. For this purpose, preferably, the multi-component force sensor further includes a mounting base plate 9, an outer cover 10 and a sealing cover plate 11, the sealing cover plate 11 is mounted at an upper opening of the outer cover 10, the mounting base plate 9 is mounted at a lower opening of the outer cover 10, a mounting space is defined among the mounting base plate 9, the outer cover 10 and the sealing cover plate 11, the first sensor body 1, the second sensor body 2 and the connecting guide pillar 3 are all disposed in the mounting space, and the second sensor body 2 is fixedly connected with the mounting base plate 9. The mounting bottom plate 9 and the outer cover 10 are sealed by using a sealing strip and silica gel during mounting.

The first sensor body 1, which functions both as a sensor and as a force beam, is very important for sealing, since dynamic grinding forces are to be absorbed in this case, the invention provides for sealing with a sealing diaphragm of the corrugated diaphragm type. For this purpose, preferably, a through hole 12 is formed in the sealing cover plate 11, an outer edge groove 13 is formed at an edge of the through hole 12, an annular sealing groove 14 is formed in the circumferential direction of the first sensor body 1, the upper end of the first sensor body 1 is inserted into the through hole 12, the multi-component force sensor further includes a sealing diaphragm 15 and a pressing assembly, and the sealing diaphragm 15 is installed at the outer edge groove 13 and the annular sealing groove 14 through the pressing assembly. Preferably, the sealing membrane 15 is of a corrugated membrane type structure.

Preferably, the pressing assembly includes an outer ring pressing ring 16 for pressing and sealing the sealing diaphragm 15 with the outer edge groove 13, and an inner ring pressing ring 17 for pressing and sealing the sealing diaphragm 15 with the annular sealing groove 14, and then pressing with the outer ring pressing ring 16 by a screw.

Preferably, the outer ring of the sealing diaphragm 15 is arranged at the outer edge groove 13 and sealed with the outer edge groove 13 by coating with silica gel, and/or the outer ring of the sealing diaphragm 15 is arranged at the annular sealing groove 14 and sealed with the annular sealing groove 14 by coating with silica gel.

When the tool atress of installation on bearing plane 8, the power value responds to through the sensor on first and the second sensor body jointly, and at this moment the diaphragm only plays the effect of keeping apart, and dust, grinding fluid etc. are kept apart outside, consequently for the protection of sensor becomes more reliable and simple and convenient.

Preferably, the mounting base plate 9 is provided with a mounting hole 18, and the bearing plane 8 is provided with a mounting screw hole and/or a positioning pin hole for mounting a polished workpiece or a jig. The mounting base plate 9 has eight mounting holes 18 for fixing, and a cover for protection and a multi-core waterproof connector 19 for electrical connection are mounted on the base plate.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.