Device having a first chamber and at least one second chamber
阅读说明：本技术 具有第一腔室和至少一个第二腔室的装置 (Device having a first chamber and at least one second chamber ) 是由 弗洛里安·恩尔奈 于 2018-05-09 设计创作，主要内容包括：具有第一腔室(1)和至少一个第二腔室(2)以及至少一个摆动驱动器(3)的装置,所述摆动驱动器用于使所述装置的摆动物体(4)摆动,其中,所述摆动物体(4)布置在所述第一腔室(1)中并且在所述第一腔室(1)和所述第二腔室(2)之间布置有至少一个中间壁(5),其中,至少部分环形的传动体(6)能够由所述摆动驱动器(3)围绕旋转轴(7)旋转并且穿过所述中间壁(5)中的至少一个贯通开口(8),优选两个贯通开口(8)。(Device having a first chamber (1) and at least one second chamber (2) and at least one oscillating drive (3) for oscillating an oscillating body (4) of the device, wherein the oscillating body (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2), wherein an at least partially annular transmission body (6) is rotatable by the oscillating drive (3) about a rotational axis (7) and passes through at least one through opening (8), preferably two through openings (8), in the intermediate wall (5).)
1. Device with a first chamber (1) and at least one second chamber (2) and at least one oscillating drive (3) for oscillating an oscillating object (4) of the device, wherein the oscillating object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2), characterized in that an at least partially annular transmission body (6) is rotatable by the oscillating drive (3) about a rotation axis (7) and passes through at least one through opening (8), preferably two through openings (8), in the intermediate wall (5).
2. The device according to claim 1, characterized in that the transmission body (6) is arranged both in the first chamber (1) and in the second chamber (2) and/or the wobble drive (3) is arranged at least partially in the second chamber (2).
3. The device according to claim 1 or 2, characterized in that the transmission body (6) engages with the oscillating drive (3) in the second chamber (2) for rotation about the rotation axis (7) and/or the transmission body (6) is mounted only in the second chamber (2) and/or the oscillating object (4) is fixed on the transmission body (6) in the first chamber (1).
4. A device according to any one of claims 1-3, characterized in that the oscillating object (4) is a closing mechanism, preferably a valve disc, for closing a valve opening (9) of the device, preferably the first chamber (1).
5. The device according to any one of claims 1 to 3, wherein the oscillating object (4) is a processing apparatus for processing and/or treating articles in the first chamber (1) and/or moving articles in the first chamber (1).
6. The device according to any one of claims 1 to 5, characterised in that the transmission body (6) is sealed against the intermediate wall (5) at least in the region of the through-opening or through-openings (8).
7. Device according to claim 6, characterized in that the transmission body (6) is sealed with respect to the intermediate wall (5) by means of at least one sealing ring (10).
8. The device according to claim 6, characterized in that the transmission body (6) is at least partially, preferably in the first chamber (1), surrounded by at least one bellows (11) and sealed with respect to the intermediate wall (5) by means of the bellows (11).
9. Device according to claim 8, characterized in that the bellows (11) is partly annularly stretched or compressed depending on the direction of rotation by means of a rotational movement of the transmission body (6) around the rotational axis (7).
10. The device according to any one of claims 1 to 9, characterized in that the transmission body (6) is preferably movable in at least one additional direction of movement (13), preferably parallel to the rotation axis (7), by means of at least one additional drive (12), in addition to the rotational movement about the rotation axis (7).
Technical Field
The invention relates to a device having a first chamber and at least one second chamber and at least one pivoting drive for pivoting a pivoting body of the device, wherein the pivoting body is arranged in the first chamber and at least one intermediate wall is arranged between the first chamber and the second chamber.
Background
For example, when the oscillating object should oscillate in the first chamber, but the oscillation driver for oscillating the oscillating object should be arranged in the second chamber, a general-purpose device is employed. Such a separation may be required, for example, when the first chamber is a process chamber in which processes have to be performed under a determined pressure and/or temperature relationship, and/or when a specific gas or fluid composition has to be provided in the first chamber in order to achieve a process running within the first chamber. One example of a common device is a so-called vacuum valve, wherein the actuator should normally not be arranged in the first chamber or the process chamber, for example in order not to change particle development in the actuator to an interfering factor in the first chamber.
A general device is disclosed, for example, by US 5,243,867. In this document, the shaft passes through the intermediate wall in a correspondingly sealed shape, in order to allow a swinging movement there via an eccentric.
Disclosure of Invention
The object of the invention is to provide a new way of transmitting the movement of a pendulum drive to a pendulum object for a generic device.
For this purpose, the invention provides that: the at least partially annular transmission body can be rotated about a rotational axis by the wobble drive and passes through at least one through opening, preferably two through openings, in the intermediate wall.
In other words, the invention proposes an at least partially annular transmission body which can be rotated about a rotational axis by the wobble drive and which passes through at least one, preferably two through-openings in an intermediate wall separating two chambers from one another. The intermediate wall may also be referred to as a partition wall to emphasize its partitioning function.
The at least partially annular transmission body can also be referred to as a transmission ring, wherein the transmission ring can also be a ring segment, i.e. not necessarily a completely closed ring.
An important feature in this case is that the endless drive body encloses an inner opening or an inner cavity, as has been derived from the general definition of a ring. In the interior opening, a partial region of the intermediate wall is advantageously arranged. The transmission body advantageously passes through the one or both through openings with its annular portion. In the case of two through-openings, these are advantageously arranged in the intermediate wall at a distance from one another. The respective through-opening advantageously opens out into a plane in which the axis of rotation also lies. If there are two through openings, this advantageously applies to both through openings, wherein the same plane is not necessary.
The first chamber may be a process chamber in which a desired pressure and/or temperature relationship and/or a desired composition of a gas or fluid present in the process chamber may be set.
The oscillating drive is advantageously arranged in the second chamber. In these cases, the second chamber may also be referred to as a drive chamber. Of course, this does not exclude that the wobble drive also has its own housing, which can then be arranged exactly in the drive chamber. Of course, the wobble drive and its optionally present housing can be arranged completely or only partially in the second chamber.
In the case of an at least partially annular transmission body, the height of the ring, measured parallel to the axis of rotation, is advantageously significantly smaller than the outer ring diameter. Preferably, the height of the ring, measured parallel to the axis of rotation, is at most half the diameter of the outer ring, preferably at most one third or at most one quarter of the diameter of the outer ring.
In a preferred embodiment, it is provided that the transmission body is arranged both in the first chamber and in the second chamber. This may always be the case. However, it can also be provided that this applies only to certain operating states. Advantageously, however, the transmission body is only arranged in the second chamber. This means that the entire support and the entire drive of the transmission body is advantageously realized or takes place in the second chamber. Furthermore, it is preferably provided that the transmission body engages with a wobble drive in the second chamber for rotation about the rotational axis. However, the oscillating object is advantageously fixed on the transmission body in the first chamber. The oscillating body cannot usually pass through the through-opening in the intermediate wall through which the partially annular transmission body passes.
The oscillating object may be, for example, a closing mechanism for closing a valve opening of the device. The valve opening is advantageously arranged in the first chamber. The closing mechanism may be, for example, a valve disc, a valve needle, etc. In this case, the device according to the invention may also be referred to as a valve. Vacuum valves are particularly preferred. The latter are valves used in vacuum technology. When the operating pressure is reached at a pressure of less than or equal to 0.001 mbar or 0.1 pascal, the vacuum technique is commonly referred to. Vacuum valves are valves designed for these pressure ranges and/or corresponding pressure differences with the environment. However, when the vacuum valve is designed for pressures below atmospheric pressure (i.e. less than 1 bar), one may also be referred to generically as a vacuum valve. The device according to the invention can be constructed as a valve which is adapted to differential pressure in general, or in other words as a differential pressure valve. In particular to such valves whose closing mechanism is adapted to seal the valve opening also against a pressure difference of at least 1 bar. In this case, the pressure difference is a pressure difference exerted on mutually opposite sides of the closing mechanism in the closed position. The pressure difference is generated in particular by the pressure exerted on the closing mechanism from the existing fluid, respectively.
The oscillating object need not necessarily be a closing mechanism. In principle, the oscillating object can be realized in all possible embodiments and can be used for various tasks. For example, the oscillating object may be a processing apparatus for processing and/or moving an article in the first chamber. All treatment devices known per se can be considered for the treatment device. In particular, they may be robotic arms. These robot arms can be embodied, for example, as telescopic, pivotable, rotatable or otherwise. They may carry grippers, vacuum grippers or other actuators.
A preferred variant of the invention provides that the partially annular transmission body is sealed off from the intermediate wall at least in the region of the through-opening(s). It can thus be provided, for example, that the transmission body is sealed off from the intermediate wall by means of at least one sealing ring. In a further embodiment, it can be provided that the transmission body is surrounded at least in regions, preferably in the first chamber, by at least one bellows and is sealed off from the intermediate wall by means of the bellows. The bellows is then likewise advantageously configured as a partial ring. It can thus be provided that the bellows can be partially stretched or compressed in a ring-shaped manner depending on the direction of rotation by means of a rotational movement of the transmission body about the rotational axis. The bellows may be, for example, a diaphragm bellows. Thus, the bellows may be made of a metal or metal alloy, for example stainless steel or a nickel-based alloy. But it may also be an elastomeric bellows, such as polytetrafluoroethylene (teflon or PTFE).
The at least partially annular transmission body advantageously has a rounded, preferably circular or at least elliptical cross section at least in the region in which the seal or the bellows abuts.
A preferred embodiment provides that the transmission body can be moved in at least one additional direction of movement in addition to the rotational movement about the rotational axis. For this purpose, an additional drive is advantageously provided. The additional direction of movement may, for example, extend parallel to the axis of rotation.
Both the pendulum drive and the additional drive can in principle be manually operated drives. The wobble drive and/or the additional drive are preferably an electric drive, however, wherein all variants known from the prior art which are suitable for the respective purpose of use are conceivable here. It may thus be either a motor for generating a rotational movement or a linear motor. For example, electric, pneumatic, hydraulic or other motors may be used. Therefore, there are many different possibilities for constructing the drive.
For the sake of completeness, it is pointed out that even if only a transmission body is mentioned, this always means an at least partially annular transmission body.
Drawings
Examples of how the invention can be constructed are explained in the following description of the figures on the basis of various implementation variants. In the drawings:
figures 1 to 10 show various illustrations of a first embodiment of the invention;
FIGS. 11 and 12 show a second embodiment according to the present invention;
FIG. 13 shows a third embodiment according to the present invention;
fig. 14 and 15 show a fourth embodiment according to the invention, an
Fig. 16 and 17 show a fifth embodiment according to the present invention.
Detailed Description
In a first embodiment, the device according to the invention is embodied in the form of a valve, in particular in the form of a vacuum valve. In fig. 1 and 2, an external view of the
Fig. 1 shows a position in which the
Fig. 3 and 4 now show perspective views of the
As is particularly clearly visible in the sectional view according to fig. 5, the
In order to be able to move the
Fig. 6, 7 and 8 show sections along section line AA of fig. 5, respectively. In this case, fig. 6 shows a situation in which the
Fig. 9 and 10 show sections along the section line BB of fig. 5, respectively. When comparing fig. 9 and 10, it can be clearly seen that the at least partially
A second embodiment of the device of the invention is shown in fig. 11 and 12. Here, a variant of the first exemplary embodiment according to fig. 1 to 10 is shown, so that only important differences are discussed. Otherwise, reference is made to the above remarks regarding the first embodiment, which apply accordingly.
The important difference with respect to the first exemplary embodiment is that fig. 11 and 12 show that in the second exemplary embodiment, bellows 11 are not used for sealing
Fig. 13 shows an exemplary further embodiment variant of the invention, which is a variant of the first exemplary embodiment. Only the differences from the first embodiment will be discussed here. The third exemplary embodiment differs significantly from the first exemplary embodiment in that the
Fig. 14 and 15 show a variant, starting from the first exemplary embodiment, in which, by way of example, a drive is used which is not a
A fifth embodiment of the invention is shown in fig. 16 and 17. Here, fig. 17 shows a section along the section line DD of fig. 16. In this fifth exemplary embodiment, which is again a variant of the first exemplary embodiment, the pivoting
The variant shown here shows that the type of drive can be configured very differently both in the case of the
List of reference numerals
1 direction of rotation of the
2
3 oscillating
4 oscillating
5
6
7 rotating
8 through
9
10 sealing
11 bellows 28 screw rod
12
13 additional direction of
14
15
16
17 rack
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