阅读说明：本技术 多级旋转活塞泵 (Multi-stage rotary piston pump ) 是由 托马斯·德赖费特 罗兰德·穆勒 于 2018-05-23 设计创作，主要内容包括：本发明涉及一种多级旋转活塞泵,包括：在壳体中的两个轴,该两个轴支撑多个旋转活塞。对应的旋转活塞形成相应的旋转活塞对,其中提供形成相应泵级的多个旋转活塞对。相邻的泵级通过连接通道彼此连接。所述多级旋转活塞泵还包括连接至第一泵级的泵入口以及连接至最后泵级的泵出口。根据本发明,内置体积比为至少15,因此可以获得至少1500m<Sup>3</Sup>/h的高泵送能力。(The invention relates to a multistage rotary piston pump, comprising: two shafts in the housing, which support a plurality of rotary pistons. The corresponding rotary pistons form respective pairs of rotary pistons, wherein a plurality of pairs of rotary pistons forming respective pump stages are provided. Adjacent pump stages are connected to one another by connecting channels. The multi-stage rotary piston pump further comprises a pump connected to the first pump stageA port and a pump outlet connected to the last pump stage. According to the invention, the built-in volume ratio is at least 15, so that at least 1500m can be obtained 3 High pumping capacity per hour.)

1. A multi-stage rotary piston pump comprising:

two shafts arranged in the housing (10) and supporting a plurality of rotary pistons (20),

wherein the corresponding rotary pistons (20) form rotary piston pairs and a plurality of rotary piston pairs are provided, each forming a pump stage (12, 14, 16, 18);

a plurality of connecting channels (38), each connecting adjacent pump stages to each other;

a pump inlet (34) connected to the first pump stage; and

a pump outlet (36) connected to the last pump stage;

the method is characterized in that:

the built-in Volume Ratio (VR) is at least 15, preferably at least 20, particularly preferably at least 25.

2. The multi-stage rotary piston pump as claimed in claim 1, characterized in that the number of pump stages (n) is at least three, in particular at least five.

3. The multi-stage rotary piston pump according to claim 2, characterized in that the following applies to the number of pump stages (n):

4. a multi-stage rotary piston pump according to any one of claims 1 to 3, characterized in that, in order to avoid over-compression, at least one of the pump stages is connected to a pressure relief channel (52) in which a pressure relief valve (46, 48, 50) is arranged.

5. The multi-stage rotary piston pump according to one of claims 1 to 4, characterized in that at least the second and the third pump stage, in particular also the fourth pump stage, are connected to a pressure relief valve (52).

6. Multistage rotary piston pump according to claim 4 or 5, characterized in that the pressure relief channel (52) is connected to the environment and/or the pump outlet.

7. Multistage rotary piston pump according to one of claims 1 to 6, characterized in that the pressure difference of adjacent pump stages is less than 500 mbar.

8. Multistage rotary piston pump according to one of claims 1 to 7, characterized in that the housing (10) comprises external cooling fins and/or cooling channels arranged in the housing wall.

9. The multi-stage rotary piston pump according to one of claims 1 to 8, characterized in that the connecting channel (38) is arranged in the housing (10), in particular in the vicinity of a cooling channel.

10. Multistage rotary piston pump according to one of claims 1 to 9, characterized in that the pumping capacity of the entire rotary piston pump is at least 1500m³H, in particular at least 2500m³/h。

11. Multistage rotary piston pump according to one of claims 1 to 10, characterized in that the following applies to the surface (a) of the pump chamber in which the rotary piston pair (20) is arranged and which has a time-average pressure of more than 200 mbar:

A>400mm²/(m³h) S/VR, wherein:

s is the highest measured pumping capacity of the pump between a final pressure of 1-50mbar, and

VR is the built-in volume ratio.

12. The multi-stage rotary piston pump according to one of claims 1 to 11, characterized in that during final pressure operation the gas temperature measured directly after the last stage is less than 300 ℃, in particular less than 250 ℃, particularly preferably less than 200 ℃.

[ technical field ] A method for producing a semiconductor device

The invention relates to a multi-stage rotary piston pump.

[ background of the invention ]

Rotary piston pumps typically include a two-toothed rotary piston disposed in a pump chamber. Furthermore, for example, multi-tooth rotary pistons having three or four teeth are known. The two rotary pistons are driven in opposite directions, so that, through the respective chambers formed, gas is sucked in through the inlet and discharged through the outlet. In a multistage rotary piston pump, a plurality of such rotary piston pairs are arranged in series. The outlet of a pumping stage is connected to the inlet of a subsequent pumping stage.

To evacuate a large lock-up chamber or other large chamber, a large amount of gas must be pumped. This must often be done in a short time. For this purpose, it is known to combine a rotary piston pump with a downstream, in-line pre-vacuum pump. Such systems are also used when large gas flows have to be pumped continuously, in particular at low inlet pressures of less than 20mbar (absolute).

Usually, nowadays, a combination of a rotary piston pump and a pre-vacuum pump with a correspondingly high pumping capacity is used for pumping large amounts of gas.

The pumping capacity of the known commercially available multistage rotary piston pump is approximately 600m³H is used as the reference value. For example, model SD600C

A mountain (Kashiyama) pump has this pumping capability. Typically, in these pump systems, a large screw or multi-stage rotary piston pump is used as the pre-vacuum pump.

[ summary of the invention ]

It is an object of the present invention to provide a multistage rotary piston pump in which the combination of rotary piston and pre-vacuum pump can be replaced by one rotary piston pump having a comparable pumping capacity.

According to the invention, this object is achieved by the features of claim 1.

In general, the following problems exist: in the case of large vacuum pumps with correspondingly large pumping capacity, the ratio of the inner surface to the conveying capacity or throughput is disadvantageous. As a result, high temperatures occur in such pumps. High temperatures result in large thermal expansion. In the case of multistage rotary piston pumps, thermal expansions caused by high temperatures occur in particular in the axial direction, so that the rotary piston moves axially (i.e. in the longitudinal direction of the axis supporting the rotary piston). As a result, the pump chamber in which the rotary piston is arranged will have a correspondingly large axial clearance. This, in turn, can negatively affect the pump output and, therefore, the temperature.

The multistage rotary piston pump according to the invention comprises two shafts arranged in the housing, which shafts support a plurality of rotary pistons. Here, the rotary piston may also be formed integrally with the respective shaft. The respective rotary pistons each form a rotary piston pair, wherein a plurality of rotary piston pairs each forming a pump stage are provided. Adjacent pump stages are connected to one another by connecting channels. The outlet of a pump stage is connected to the inlet of a subsequent pump stage by a connecting channel. Furthermore, the first pump stage in the flow direction is connected to the pump inlet. The pump inlet is connected thereto with a lock chamber or the like to be emptied. The last pump stage in the flow direction is connected to the pump outlet.

According to the invention, the multistage rotary piston pump has a large built-in volume ratio (built-in volume ratio). The built-in volume ratio defines the delivery volume of the inlet stage to the delivery volume of the outlet stage. According to the invention, the built-in volume ratio is at least 15, preferably at least 20, particularly preferably at least 25. Due to the provision of a high built-in volume ratio and due to the provision of a multi-stage rotary piston pump, in particular at least 1500m can be achieved³H, in particular more than 2500m³High pumping capacity per hour. The built-in volume ratio can be achieved by a change in the length of the pump stage, a change in the outer diameter of the rotary piston, a change in the number of teeth, and a combination of these changes.

In order to achieve a particularly high pumping capacity, it is particularly preferred that the multistage rotary piston pump comprises at least three stages, in particular at least five stages.

Preferably, the following applies to the number of pump stages:

wherein:

n is the number of pump stages, and

VR is the built-in volume ratio.

Furthermore, it is preferred that at least one of the pump stages is connected to a pressure relief channel in which or between the pump stage and the pressure relief channel a pressure relief valve is arranged to avoid over-compression. Over-compression refers to compression of gas to an intermediate pressure above the outlet pressure of the pump, i.e. pressures above 2bar are generally considered to be over-compression. By reducing over-compression, the maximum motor output required can be reduced.

It is particularly preferred that at least the first two pump stages, in particular the first three pump stages, are connected to a pressure relief channel, in which a respective pressure relief valve is in turn arranged. These pump stages are preceding pump stages in the flow direction.

By providing such a pressure relief passage, different pumping capacities can be achieved in each successive pump stage. If the pumping capacity of the second pump stage is smaller than that of the first pump stage, a portion of the pumped gas can be discharged directly through the pressure relief channel, in particular at the beginning of the pump-out phase. Thus, depending on the pumping stage, there may be different pumping capacities between downstream pumping stages.

The multistage rotary piston pump according to the invention can therefore be operated in particular in such a way that, for example, at an initial high pressure of 1000mbar, the first pump stage completely discharges the pumped gas, in particular via the pressure discharge channel. At the beginning of the pumping process, in particular, the valve of the first stage is opened. During this pumping phase, the remaining pump stages are in an idle state, i.e. they deliver a small amount of gas. Even such "idle" phases can deliver gas, but due to the relief valve, no pressure builds up. Later on, when the pressure is reduced appropriately, for example 500mbar, the outlet valve connected to the first pump stage is closed and the pumped gas is discharged particularly completely through the pressure discharge channel connected to the second pump stage. The valves of the other two pump stages and all other pump stages are open. The remaining pump stages are in an idle state. At a later time, for example again at a low pressure of 250mbar, the pressure relief valve connected to the second pump stage is closed and pumping takes place through the pressure relief channel connected to the third pump stage, either via the remaining pump stages or via the third pump stage. The valves of the first and second pump stages are closed and the valves of the third and possibly further pump stages are opened. This may continue depending on the number of stages of the vacuum pump and depending on the number of pressure relief channels connected to each pumping stage.

The pressure relief channel is preferably connected to the environment and/or the pump outlet. The connection to the pump outlet is particularly advantageous, for example, when the pumped gas cannot be led directly to the environment because it is toxic or has to be cleaned.

According to a further preferred embodiment, the pressure stages or the pump chambers in which the respective pairs of rotary pistons are arranged to select the pump stages are dimensioned such that the pressure difference between adjacent pump stages is less than 500 mbar. Thereby, a reduction of the maximum temperature can be achieved, so that in particular due to the provision of a plurality of pump stages for the entire multistage rotary piston pump, a very high pumping capacity can be achieved.

In addition, in order to obtain a particularly high pumping capacity, it is advantageous to provide an efficient cooling. Thus, according to a preferred embodiment, the housing comprises cooling fins on its outside and/or cooling channels in the housing wall. A cooling medium, in particular a cooling liquid, flows through the cooling channel. Furthermore, it is preferred that the connecting channel, which is arranged in the housing and is connected to the pump stage, is arranged in the vicinity of the cooling channel. For example, the connecting channel may be partially surrounded by a cooling channel to achieve a particularly efficient cooling.

With regard to cooling, it is furthermore particularly preferred that the inner surface of the pump chamber, in which the rotary piston is arranged, is as large as possible. In particular, the following applies:

A>400mm²/(m³h) S/VR, wherein:

a is a portion of the inner surface of the pump chamber, which during final pressure operation, preferably has a time-averaged pressure of more than 200mbar,

s is the highest measured pumping capacity of the vacuum pump between the inlet pressures at the pump inlet of 1-50mbar, and

VR is volume ratio. In order to achieve a correspondingly large surface for a given delivery quantity, a rotor with a medium rotational speed is advantageous. In particular, the rotational speed<6000¹Per minute, preferably<4500¹Per minute, particularly preferably<3000¹In terms of a/minute.

In addition, it is preferred that the connecting channel has a surface which is enlarged, for example, by fins which effectively cool the gas.

According to a particularly preferred embodiment of the invention, when the multistage rotary piston pump is operated at the final pressure, the gas temperature directly after the last stage is less than 300 ℃, preferably less than 250 ℃, particularly preferably less than 200 ℃. These temperatures were measured at ambient temperature of about 20 ℃ and coolant inlet temperature of about 20 ℃ with rated cooling water flow (i.e., the temperature increase of the cooling water from inlet to outlet is less than 20 ℃) and air operation.

In addition, the rotary piston and preferably also the shaft supporting the rotary piston are preferably made of a steel alloy or steel. In particular, the combination of a steel shaft and an aluminum housing is advantageous because the coefficients of thermal expansion differ significantly from each other.

The housing preferably comprises aluminum or an aluminum alloy.

Combinations of the above features are particularly preferred as they help to achieve a particularly effective pumping capacity.

Another important advantage of the multistage rotary piston pump according to the invention is that the installation space required can be greatly reduced. It is no longer necessary to provide a pre-vacuum pump, or at least a smaller pre-vacuum pump can be used.

According to another preferred embodiment, the outlet of the first pump stage is connected to a bypass line. In the bypass line, a valve is arranged. The bypass line is in particular connected to the first pump stage. By providing such a bypass line, the first stage may be depressurized. Furthermore, it is thereby ensured that the pressure increase in the first pump stage is limited.

According to the invention, the drive motor can additionally be operated in a short time at a higher output than the nominal output. This can further improve the efficiency of the pump. In particular, the drive motor can be operated at a higher power than the nominal power for a period of 5 to 30 seconds. In particular, the output can be increased by 50%, preferably by 100%, compared to the nominal output.

[ description of the drawings ]

The invention will be explained in detail hereinafter on the basis of preferred embodiments and with reference to the accompanying drawings, in which:

fig. 1 shows a schematic cross-sectional view of a multistage rotary piston pump according to the invention; and

fig. 2 shows a schematic cross section of a rotary piston stage comprising two teeth.

[ detailed description ] embodiments

The multistage rotary piston pump according to the invention comprises a plurality of pump stages 12, 14, 16, 18 in a pump housing 10. Each pumping stage provides two rotary pistons. The corresponding rotary piston 20, which is configured as a two-tooth rotary piston, is schematically illustrated in the cross-sectional view of fig. 2. The two rotary pistons 20 rotate in opposite directions so that gas is drawn in the direction indicated by arrow 22 through gas inlet 24 and expelled in the direction indicated by arrow 28 through opposite outlet 26.

Each rotary piston of each pair is disposed on a common shaft 30 (fig. 1). The multistage rotary piston pump thus comprises two shafts 30 arranged in series in fig. 1, which are supported in the housing 10. These shafts are driven by gears 32, for example. Gas to be delivered is drawn in through the pump inlet 34 and expelled through the pump outlet 36. The individual pump stages 12, 14, 16, 18 are each connected to one another by a connecting channel 38. Each pump stage 12, 14, 16, 18 comprises an outlet 40, through which outlet 40 the gas to be delivered is delivered into the connecting channel 38. The outlet 42 of the last pump stage 18 is connected to the pump outlet 36. Furthermore, each of the pump stages 14, 16, 18 comprises an inlet 44 which is connected to the respective connecting channel 38. At each inlet 44, a valve 46, 48, 50 is provided, which may be, for example, a heavy duty ball valve. Via the valve, a connection can be established between the inlet 44 and the pressure relief channel 52. The first pump stage 12 may be further connected to a bypass line, not shown. Such a bypass line is connected to the outlet 40 of the first pump stage 12 and comprises a bypass line valve. The bypass line is typically connected to the inlet 34 of the first pump stage. The pressure relief passage 52 is connected to the pump outlet 36.

Preferably, the pumping capacity of the individual pump stages decreases in the conveying direction. In particular, the pumping capacity of the subsequent pump stage is equal to half the pumping capacity of the preceding pump stage.

At the pump outlet 36, the pressure is typically about 1000 mbar.

When the pressure loss in the valves and lines is not taken into account, the rotary piston pump can be operated in the desired manner according to the table below.

Pin	P1	P2	P3	V1	V2	V3
							1000	1000	1000	1000	0	0	0
500	1000	1000	1000	g	0	0
							250	500	1000	1000	g	g	0
125	250	500	1000	g	g	g

The table applies to 2: a rating of 1, i.e. the pumping capacity of the subsequent pump stage, is half that of the previous pump stage.

Here, P_inIs the pressure prevailing at the pump inlet 34. Pressure P₁Is the pressure prevailing at the inlet of the second pump stage 14, P₂Is the pressure prevailing at the inlet of the third pump stage 16, P₃Is the pressure prevailing at the inlet of the fourth pump stage 18.

Said pressure is in mbar.

Valve V₁Is valve 46, valve V₂Is valve 48, valve V₃Is a valve 50. "0" indicates that the valve is open and "g" indicates that the valve is closed.

The foregoing values described in the tables are exemplary only. It is important that the pressure is halved from one pumping stage to the next, depending on the valve that is opened. Thus, the pressure is always halved when the corresponding valve in the pumping stage is closed, since the pumping stage only operates when the valve is closed.