Laser wavelength measuring device and method based on interference mode
阅读说明：本技术 一种基于干涉方式的激光波长测量装置与方法 (Laser wavelength measuring device and method based on interference mode ) 是由 赵虎 毛建东 周春艳 张白 于 2019-11-26 设计创作，主要内容包括：本发明涉及一种基于干涉方式的激光波长测量装置与方法,包括：待测激光源,用于发射待测激光束；分光镜,用于接收待测激光束,并将待测激光束透射至楔形反光镜,以及反射至透镜；楔形反光镜,用于将分光镜透射的待测激光束反射至透镜；透镜,用于接收分光镜和楔形反光镜反射的待测激光束,并将待测激光束透射至光电探测器；光电探测器,用于接收透镜透射的待测激光束；处理器,与光电探测器电连接,用于检测光电探测器上产生的干涉现象。本发明中测量装置所使用的光学器件简单,无需标准波长激光源参与测量,大大降低了测量装置的复杂度,并且也提高了装置对待测激光波长的测量精度。(The invention relates to a laser wavelength measuring device and method based on an interference mode, which comprises the following steps: the laser source to be detected is used for emitting laser beams to be detected; the spectroscope is used for receiving the laser beam to be detected, transmitting the laser beam to be detected to the wedge-shaped reflector and reflecting the laser beam to be detected to the lens; the wedge-shaped reflecting mirror is used for reflecting the laser beam to be measured transmitted by the spectroscope to the lens; the lens is used for receiving the laser beam to be detected reflected by the spectroscope and the wedge-shaped reflector and transmitting the laser beam to be detected to the photoelectric detector; the photoelectric detector is used for receiving the laser beam to be detected transmitted by the lens; and the processor is electrically connected with the photoelectric detector and is used for detecting the interference phenomenon generated on the photoelectric detector. The optical device used by the measuring device is simple, a standard wavelength laser source is not needed to participate in measurement, the complexity of the measuring device is greatly reduced, and the measuring precision of the device on the laser wavelength to be measured is improved.)
1. The utility model provides a laser wavelength measuring device based on interference mode which characterized in that: the method comprises the following steps:
the laser source to be detected is used for emitting laser beams to be detected;
the spectroscope is used for receiving the laser beam to be detected, transmitting the laser beam to be detected to the wedge-shaped reflector and reflecting the laser beam to be detected to the lens;
the wedge-shaped reflecting mirror is used for reflecting the laser beam to be measured transmitted by the spectroscope to the lens;
the lens is used for receiving the laser beam to be detected reflected by the spectroscope and the wedge-shaped reflector and transmitting the laser beam to be detected to the photoelectric detector;
the photoelectric detector is used for receiving the laser beam to be detected transmitted by the lens;
and the processor is electrically connected with the photoelectric detector and is used for detecting the interference phenomenon generated on the photoelectric detector.
2. The interferometric-based laser wavelength measuring device of claim 1, wherein: the wedge-shaped reflecting mirror is connected with a precise displacement device and used for driving the wedge-shaped reflecting mirror to move in the horizontal direction.
3. The interferometric-based laser wavelength measuring device of claim 1, wherein: the precise displacement device is a piezoelectric ceramic motor without a guide rail.
4. The interferometric-based laser wavelength measuring device of claim 3, wherein: the wedge-shaped reflector comprises a reflecting surface, and the spectroscope and the reflecting surface of the wedge-shaped reflector are arranged in parallel.
5. An interferometric-based laser wavelength measuring device according to any one of claims 1-4, characterized in that: the lens is a convex lens.
6. The interferometric-based laser wavelength measuring device of claim 5, wherein: the photoelectric detector is arranged at the focus of the convex lens.
7. The interferometric-based laser wavelength measuring device of claim 1, wherein: still include the casing, laser wavelength measuring device based on interference mode sets up in the casing, and await measuring laser source, spectroscope, lens, photoelectric detector, accurate displacement device are fixed the setting for the casing respectively.
8. A laser wavelength measuring method based on an interference mode is characterized in that: the method comprises the following steps:
step S1: fixedly arranging a laser source to be detected, a spectroscope, a lens, a photoelectric detector and a precise displacement device in a shell;
step S2: starting a laser source to be detected, and moving the position of the wedge-shaped reflector so that the wedge-shaped reflector can receive a laser beam to be detected;
step S3: controlling a precise displacement device to drive a wedge-shaped reflector to move in the horizontal direction/the vertical direction, so that a constructive interference/destructive interference phenomenon is generated on a photoelectric detector, and recording the displacement X1 of the wedge-shaped reflector by a processor;
step S4: continuously controlling the precise displacement device to drive the wedge-shaped reflector to move in the horizontal direction/the vertical direction until the next constructive interference/destructive interference phenomenon is generated on the photoelectric detector, and recording the displacement X2 of the wedge-shaped reflector by the processor;
step S5: and the processor calculates the wavelength of the laser beam to be measured according to the displacement of the two times of horizontal movement/vertical movement of the wedge-shaped reflector, the angle between the reflecting surface of the wedge-shaped reflector and the horizontal direction, and the angle between the laser beam to be measured incident to the reflecting surface and the reflecting surface.
9. The interferometric-based laser wavelength measurement method of claim 8, characterized in that: in step S1, the beam splitter is disposed parallel to the reflective surface of the wedge-shaped reflective mirror.
10. The interferometric-based laser wavelength measurement method of claim 8, characterized in that: the photo detector is set at the focal point of the lens in the step S1.
Technical Field
The invention relates to the technical field of laser wavelength measurement, in particular to a laser wavelength measuring device and method based on an interference mode.
Background
The accurate measurement of the laser wavelength is very important for the field of optical precision measurement, and taking a laser interferometer as an example, the measurement precision of the laser wavelength is directly related to the precision of the laser wavelength, so how to improve the measurement precision of the laser wavelength and reduce the complexity and the cost of a laser wavelength measurement device becomes important research content in the related field.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a laser wavelength measuring device and method based on an interference mode.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
an interference-based laser wavelength measuring device, comprising:
the laser source to be detected is used for emitting laser beams to be detected;
the spectroscope is used for receiving the laser beam to be detected, transmitting the laser beam to be detected to the wedge-shaped reflector and reflecting the laser beam to be detected to the lens;
the wedge-shaped reflecting mirror is used for reflecting the laser beam to be measured transmitted by the spectroscope to the lens;
the lens is used for receiving the laser beam to be detected reflected by the spectroscope and the wedge-shaped reflector and transmitting the laser beam to be detected to the photoelectric detector;
the photoelectric detector is used for receiving the laser beam to be detected transmitted by the lens;
and the processor is electrically connected with the photoelectric detector and is used for detecting the interference phenomenon generated on the photoelectric detector.
Furthermore, in order to better realize the invention, the wedge-shaped reflecting mirror is connected with a precise displacement device which is used for driving the wedge-shaped reflecting mirror to move in the horizontal direction.
Furthermore, in order to better implement the present invention, the precision displacement device is a piezoelectric ceramic motor without a guide rail.
Furthermore, in order to better realize the invention, the wedge-shaped reflector comprises a reflecting surface, and the beam splitter is arranged in parallel with the reflecting surface of the wedge-shaped reflector.
Further, in order to better implement the present invention, the lens is a convex lens.
Further, in order to better implement the present invention, the photodetector is disposed at the focal point of the convex lens.
Furthermore, in order to better implement the present invention, the laser measuring device further includes a housing, the laser measuring device based on the interference mode is disposed in the housing, and the laser source to be measured, the spectroscope, the lens, the photodetector, and the precision displacement device are respectively and fixedly disposed with respect to the housing.
A laser wavelength measuring method based on an interference mode comprises the following steps:
step S1: fixedly arranging a laser source to be detected, a spectroscope, a lens, a photoelectric detector and a precise displacement device in a shell;
step S2: starting a laser source to be detected, and moving the position of the wedge-shaped reflector so that the wedge-shaped reflector can receive a laser beam to be detected;
step S3: controlling a precise displacement device to drive a wedge-shaped reflector to move in the horizontal direction, so that a constructive interference/destructive interference phenomenon is generated on a photoelectric detector, and recording the displacement X1 of the wedge-shaped reflector by a processor;
step S4: continuously controlling the precise displacement device to drive the wedge-shaped reflector to move in the horizontal direction until the next constructive interference/destructive interference phenomenon is generated on the photoelectric detector, and recording the displacement X2 of the wedge-shaped reflector by the processor;
step S5: and the processor calculates the wavelength of the laser beam to be measured according to the displacement of the two times of horizontal movement of the wedge-shaped reflector, the angle between the reflecting surface of the wedge-shaped reflector and the horizontal direction, and the angle between the laser beam to be measured and the reflecting surface, which are incident to the reflecting surface.
Further, in order to better implement the present invention, in step S1, the beam splitter is disposed parallel to the reflective surface of the wedge-shaped reflective mirror.
Further, in order to better implement the present invention, the photodetector is disposed at the focal point of the lens in step S1.
Compared with the prior art, the invention has the beneficial effects that:
the optical device used by the measuring device is simple, a standard wavelength laser source is not required to be added for measurement, the complexity of the measuring device is greatly reduced, and the measuring precision of the device on the laser wavelength to be measured is improved.
The precision displacement device is a piezoelectric ceramic motor without a guide rail, so that the influence of the machining error of the guide rail on the wavelength measurement is avoided, and the precision of the wavelength measurement result is improved.
The invention can use the precision displacement device to drive the wedge-shaped reflector to move in the vertical direction, and eliminates the vertical micro displacement caused by the influence of gravity when the precision displacement device and the wedge-shaped reflector move, so that the precision of the optical path difference measurement is more accurate, namely the precision of the laser wavelength measurement result is improved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic structural view of a measuring apparatus according to embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of a measuring apparatus according to embodiment 1 of the present invention after moving;
FIG. 3 is a schematic diagram illustrating angle estimation in embodiment 1 of the present invention;
fig. 4 is a schematic diagram illustrating calculation of variation of optical path difference in embodiment 1 of the present invention;
FIG. 5 is a schematic structural view of a measuring apparatus according to embodiment 2 of the present invention;
FIG. 6 is a schematic diagram of a measuring apparatus according to embodiment 2 of the present invention after moving;
fig. 7 is a schematic diagram illustrating calculation of variation of optical path difference in embodiment 2 of the present invention;
fig. 8 is a schematic structural diagram of a measurement apparatus according to embodiment 3 of the present invention.
Description of the main elements
The device comprises a laser source to be detected 100, a
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
- 上一篇：一种医用注射器针头装配设备
- 下一篇：温度传感器的安装结构